Vacuum pump with rotor whirling relative to pump cavity

Abstract

The invention belongs to the technical field of vacuum pumps, and particularly relates to a vacuum pump with rotors vortex relative to a pump cavity. According to the technical scheme, the vacuum pump with the rotor whirling relative to the pump cavity comprises a stator, the stator comprises a cylinder forming the pump cavity and spiral blades in the pump cavity, an air inlet is formed in one end of the cylinder, and an air outlet is formed in the other end of the cylinder; the rotor is provided with a spiral groove; wherein the spiral blade is located in the spiral groove, and the spiral blade and the spiral groove extend in the axial direction of the barrel body; when observed in the axial direction of the cylinder body, the rotor makes vortex motion relative to the pump cavity. According to the vacuum pump with the rotor whirling relative to the pump cavity, the rotor whirling relative to the pump cavity has the advantages of being free of oil pollution and the like of an existing vortex vacuum pump, meanwhile, the spiral blades of the stator and the spiral grooves of the rotor extend in the axial direction of the barrel body instead of an involute spiral adopted by the vortex vacuum pump, the axial size can be larger, and the axial size can be smaller. Therefore, the efficiency and / or the stability are / is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum pumps, and particularly relates to a vacuum pump in which a rotor vortices relative to a pump chamber. Background Art

[0002] In a scroll vacuum pump, the fixed scroll body is called a stator disk, and the rotating scroll body is called a rotor disk. The rotor disk does not rotate by itself but revolves in translation with a certain radius of gyration. As the rotor disk revolves in translation, an intake chamber and a compression chamber are formed between the two scroll bodies. The volume of the working chamber after inhaling gas decreases as the rotor moves, and the gas is discharged by moving from the outer circle to the center, continuously completing the processes of intake, compression, and exhaust.

[0003] Although scroll vacuum pumps have many advantages, such as oil-free pollution, low noise, etc. However, in the existing scroll vacuum pump, the rotor disk and the stator disk are sealed by a sealing strip, and the sealing strip wears during use and needs to be replaced regularly. Even if high-quality sealing strips are used, they usually need to be replaced every six months to one year, and high-quality sealing strips usually have a relatively high price.

[0004] In addition, in a scroll vacuum pump, the gas moves radially in a spiral from the outer circle to the center. Due to the limited radial dimension, the ultimate vacuum degree is relatively low; when the radial dimension is large, not only does it lose the advantage of its small volume, but also the stability is poor.

[0005] In addition, the existing scroll vacuum pump has weak dust, water vapor treatment ability. Summary of the Invention

[0006] Aiming at the deficiencies of the existing scroll vacuum pump in which the air flow moves spirally in the radial direction and the sealing strip between the rotor disk and the stator disk needs to be replaced regularly, the present invention provides a vacuum pump in which a rotor vortices relative to a pump chamber. Different from the existing scroll vacuum pump, a single rotor drives the air flow to move spirally in the axial direction, having the advantages of oil-free pollution and the like of the existing scroll vacuum pump. At the same time, there is no sealing strip with dynamic seal wear. Further, compared with the existing scroll vacuum pump, it takes into account the ultimate vacuum degree and stability; improves the dust, water vapor treatment ability.

[0007] To achieve the above object, the present invention adopts the following technical solutions: A vacuum pump in which a rotor vortices relative to a pump chamber, the vacuum pump in which a rotor vortices relative to a pump chamber includes:

[0008] A stator, including a cylinder body forming a pump chamber and spiral blades in the pump chamber, an air inlet is provided at one end of the cylinder body, and an air outlet is provided at the other end;

[0009] A rotor, provided with spiral grooves;

[0010] Wherein, the spiral blades are located in the spiral grooves, and both the spiral blades and the spiral grooves extend along the axial direction of the cylinder body;

[0011] Wherein, when observed along the axial direction of the cylinder body, the rotor vortices relative to the pump chamber.

[0012] The vacuum pump of the present invention has a rotor that vortexes relative to the pump chamber, and the rotor vortexes relative to the pump chamber, and has the advantages of oil-free pollution of the existing vortex vacuum pump; the spiral blades and spiral grooves extend along the axial direction of the cylinder, and a static seal can be used between the stator and the mechanism that drives the rotor, without the need for a dynamic seal strip between the moving disk and the static disk of the existing vortex vacuum pump. The spiral blades of the stator and the spiral grooves of the rotor extend along the axial direction of the cylinder instead of the involute spiral used in the vortex vacuum pump, and the axial dimension can be larger, thereby taking into account both the ultimate vacuum degree and stability.

[0013] As an improvement, a conical hole is opened in the cylinder and the rotor is truncated into a cone shape, which can compress the gas and thus improve efficiency.

[0014] As an improvement, the spiral grooves have equal pitches; the spiral blades have equal pitches, so that the rotor can be screwed into the stator, making processing and assembly easy.

[0015] As an improvement, the spiral grooves have equal widths, the spiral blades have equal thicknesses, the width of the spiral grooves is 0.05-0.2 mm greater than the thickness of the spiral blades, and the spiral blades are located at the center of the width direction of the spiral grooves; and / or,

[0016] The spiral grooves have equal depths, the radial dimensions of the spiral blades are consistent, and the depth of the spiral grooves is smaller than the radial dimension of the spiral blades.

[0017] As an improvement, an overflow channel is provided at the gas outlet end of the cylinder; and / or,

[0018] Functional holes are provided on the cylinder body, and the functional holes are used for gas ballast, gas mixing and / or purging.

[0019] As an improvement, a cylindrical hole is opened in the cylinder, the rotor is cylindrical, the spiral grooves and spiral blades have variable pitches and the pitch gradually decreases from the air inlet to the air outlet.

[0020] As an improvement, the vacuum pump further comprises an eccentric driving mechanism for causing the rotor to swirl.

[0021] As an improvement, the eccentric drive mechanism includes a motor and an eccentric shaft, the rotation axis of the eccentric shaft coincides with the axis of the stator barrel, the motor and the stator are statically sealed, a bellows is provided between the motor and the rotor, the eccentric shaft is located in the bellows, and the two ends of the bellows are sealed with the motor and the rotor respectively. The rotor axis is eccentrically arranged relative to the pump chamber axis, and a "crescent-shaped" axial space is formed between the outer side of the rotor and the inner side of the pump chamber, and gas transmission is achieved through the cooperation of the rotor, spiral blades, and the pump chamber.

[0022] As an improvement, the eccentric driving mechanism is connected to the driving end of the rotor, and an eccentric supporting shaft is provided at one end of the cylinder away from the eccentric driving mechanism, and the two ends of the eccentric supporting shaft are respectively connected to the cylinder and the rotor.

[0023] As an improvement, the output shaft of the motor forms the aforementioned eccentric shaft; and / or,

[0024] The eccentric part of the eccentric shaft is connected to the rotor through a bearing.

[0025] As an improvement, the vacuum pump is horizontal or vertical.

[0026] As an improvement, the cylinder body and the spiral blade are integrally formed.

[0027] The beneficial effects of the vacuum pump with the rotor orbiting relative to the pump chamber of the present invention are as follows: It has many advantages of a scroll vacuum pump such as oil-free pollution and low noise; both the spiral blade and the spiral groove extend along the axial direction of the cylinder body, and a static seal can be adopted between the stator and the mechanism driving the rotor, without the need for the sealing strip for the dynamic seal between the moving disk and the static disk in the existing scroll vacuum pump. The axial dimension can be larger without increasing the overall size, taking into account both the ultimate vacuum degree and stability; the airflow is helical axially, and the processing ability for dust and water vapor is stronger. Further, when a frustum (conical) rotor is adopted, compared with a cylindrical rotor, the gas is compressed during the vacuum pumping process, and it is more energy-efficient at a lower vacuum degree (usually the working time at a lower vacuum degree is much longer than that at a higher vacuum degree). Description of the Drawings

[0028] Figure 1 is a schematic structural diagram of the vacuum pump according to Embodiment 1 of the present invention.

[0029] Figure 2 is an exploded structural diagram of the vacuum pump according to Embodiment 1 of the present invention.

[0030] Figure 3 is a cross-sectional view of the vacuum pump according to Embodiment 1 of the present invention.

[0031] Figure 4 is a schematic structural diagram of the cylinder body, the air inlet and the air outlet of the vacuum pump according to Embodiment 1 of the present invention.

[0032] Figure 5 is a schematic structural diagram of the spiral blade of the vacuum pump according to Embodiment 1 of the present invention.

[0033] Figure 6 is a schematic structural diagram of the rotor of the vacuum pump according to Embodiment 1 of the present invention.

[0034] Figure 7 is a schematic structural diagram of the vacuum pump according to Embodiment 2 of the present invention.

[0035] Figure 8 is an exploded structural diagram of the vacuum pump according to Embodiment 2 of the present invention.

[0036] Figure 9 is a cross-sectional view of the vacuum pump according to Embodiment 2 of the present invention.

[0037] Figure 10 It is a schematic structural diagram of the cylinder body, air inlet and air outlet of the vacuum pump according to the second embodiment of the present invention.

[0038] Figure 11 It is a schematic structural diagram of the spiral blade of the vacuum pump according to the first embodiment of the present invention.

[0039] Figure 12 It is a schematic structural diagram of the rotor of the vacuum pump according to the second embodiment of the present invention.

[0040] In the figure, 1 is the stator; 11 is the cylinder body; 12 is the spiral blade; 13 is the air inlet; 14 is the air outlet;

[0041] 2 is the rotor; 21 is the spiral groove;

[0042] 3 is the eccentric drive mechanism; 31 is the motor; 32 is the eccentric shaft; 33 is the bearing;

[0043] 4 is the bellows. Detailed implementation manners

[0044] The technical solutions of the embodiments of the present invention will be explained and described below. However, the following embodiments are only the preferred embodiments of the present invention, not all of them. Based on the embodiments in the implementation manners, other embodiments obtained by those skilled in the art without creative efforts all fall within the protection scope of the present invention.

[0045] Refer to Figures 1 to 12 , for the vacuum pump in which the rotor of the embodiment of the present invention vortices relative to the pump cavity, the vacuum pump in which the rotor vortices relative to the pump cavity includes:

[0046] The stator includes a cylinder body forming the pump cavity and a spiral blade in the pump cavity. An air inlet is provided at one end of the cylinder body, and an air outlet is provided at the other end;

[0047] The rotor is provided with a spiral groove;

[0048] Wherein, the spiral blade is located in the spiral groove, and both the spiral blade and the spiral groove extend along the axial direction of the cylinder body;

[0049] Wherein, when observing along the axial direction of the cylinder body, the rotor vortices relative to the pump cavity. Vortical motion is eccentric motion in terms of the form of motion.

[0050] For the vacuum pump in which the rotor of the present invention vortices relative to the pump cavity, the rotor vortices relative to the pump cavity, having the advantages of no oil pollution of the existing scroll vacuum pump, etc.; both the spiral blade and the spiral groove extend along the axial direction of the cylinder body, and a static seal can be adopted between the stator and the mechanism driving the rotor, without the dynamic seal strip between the moving disk and the static disk of the existing scroll vacuum pump.

[0051] Embodiment 1

[0052] Refer toFigures 1 to 6 , a vacuum pump in which the rotor 2 of the first embodiment of the present invention whirls relative to the pump chamber. The vacuum pump in which the rotor 2 whirls relative to the pump chamber includes:

[0053] A stator 1, including a cylinder 11 forming the pump chamber and a spiral blade 12 in the pump chamber. An air inlet 13 is provided at one end of the cylinder 11, and an air outlet 14 is provided at the other end;

[0054] A rotor 2, provided with a spiral groove 21;

[0055] Among them, the spiral blade 12 is located in the spiral groove 21, and both the spiral blade 12 and the spiral groove 21 extend along the axial direction of the cylinder 11;

[0056] Among them, when observing along the axial direction of the cylinder 11, the rotor 2 whirls relative to the pump chamber.

[0057] In this embodiment, the cylinder 11 and the spiral blade 12 are fixed, and can be realized by integral molding or other means.

[0058] In this embodiment, a cylindrical hole is opened in the cylinder 11, the rotor 2 is cylindrical, the spiral groove 21 and the spiral blade 12 have equal pitches, and the gas is not compressed during the transmission process. In other embodiments, both the spiral groove 21 and the spiral blade 12 have variable pitches and the pitch gradually decreases along the direction from the air inlet 13 to the air outlet 14, and the gas is compressed during the transmission process.

[0059] In this embodiment, the spiral groove 21 has a constant width, the spiral blade 12 has a constant thickness, the width of the spiral groove 21 is 0.05 - 0.2 mm greater than the thickness of the spiral blade 12, and the spiral blade 12 is located at the center in the width direction of the spiral groove 21.

[0060] In this embodiment, the spiral groove 21 has a constant depth, the radial dimensions of the spiral blade 12 are the same, and the depth of the spiral groove 21 is less than the radial dimension of the spiral blade 12.

[0061] In this embodiment, the vacuum pump further includes an eccentric drive mechanism 3 for causing the rotor 2 to whirl, and a static seal is provided between the stator 1 and the eccentric drive mechanism 3.

[0062] In this embodiment, the eccentric drive mechanism 3 includes a motor 31 and an eccentric shaft 32. The rotation axis of the eccentric shaft 32 coincides with the axis of the barrel 11 of the stator 1. The motor 31 and the stator 1 are statically sealed. A bellows 4 is provided between the motor 31 and the rotor 2. The eccentric shaft 32 is located in the bellows 4. Both ends of the bellows 4 are sealed with the motor 31 and the rotor 2, respectively. The axis of the output shaft of the motor 31 coincides with the rotation axis of the eccentric shaft 32 and the axis of the pump chamber. The axis of the rotor 2 coincides with the eccentric axis 32 line of the eccentric shaft 32. The axis of the rotor 2 is eccentrically arranged relative to the axis of the pump chamber. The outer side of the rotor 2 and the inner side of the pump chamber form a "crescent-shaped" axial space. The rotor 2, the spiral blade 12, and the pump chamber cooperate and transmit gas, which is similar to a screw conveyor for transporting solid materials or a screw pump for transporting liquids in some aspects.

[0063] In this embodiment, the bellows 4 is a metal bellows 4, and both ends of the bellows 4 are sealed and connected to the motor 31 and the rotor 2 through flange structures. The bellows 4 is only briefly shown in the figure.

[0064] In other embodiments, the eccentric drive mechanism 3 is connected to the driving end of the rotor 2, and an eccentric support shaft is provided at one end of the cylinder 11 away from the eccentric drive mechanism 3, and the two ends of the eccentric support shaft are respectively connected to the cylinder 11 and the rotor 2, so as to support the two ends of the rotor 2 and make the operation more stable. The existing vortex vacuum pump cannot achieve support at both ends.

[0065] In this embodiment, the eccentric portion of the eccentric shaft 32 is connected to the rotor 2 via a bearing 33 .

[0066] In this embodiment, the spiral grooves 21 have equal pitches; the spiral blades 12 have equal pitches, so that the rotor 2 can be screwed into the stator 1, which is convenient for processing and assembly.

[0067] In this embodiment, the vacuum pump is horizontal. In other embodiments, the vacuum pump may also be vertical.

[0068] In other embodiments, an overflow channel is provided at the gas outlet end of the cylinder 11 .

[0069] In other embodiments, the cylinder 11 is provided with functional holes, which are used for gas ballast, aeration and / or purging.

[0070] The beneficial effects of the vacuum pump in which the rotor 2 vortexes relative to the pump chamber of the present invention are: providing a brand-new vacuum pump in which a single rotor 2 drives the airflow to spiral axially; having many advantages of a vortex vacuum pump such as no oil pollution and low noise; a static seal is adopted between the stator 1 and the motor 31 of the eccentric drive mechanism 3, eliminating the high-demand dynamic sealing strip between the moving disk and the static disk of the existing vortex pump; the airflow spirals along the axial direction, and the axial dimension can be larger, which takes into account both the ultimate vacuum degree and the stability compared to increasing the radial dimension; the airflow spirals axially, and has a stronger ability to handle dust and water vapor.

[0071] Embodiment 2

[0072] Refer to Figures 7 to 12 , for the vacuum pump in which the rotor 2 of the second embodiment of the present invention whirls relative to the pump chamber,

[0073] In this embodiment, a conical hole is provided in the cylinder body 11, and the rotor 2 is frustum-shaped, which can compress the gas during the conveying process, so as to improve the pumping efficiency at a higher vacuum degree with a longer working time (the working time at a lower vacuum degree is much shorter than that at a higher vacuum degree).

[0074] In this embodiment, the spiral groove 21 has an equal pitch; the spiral blade 12 has an equal pitch, so that the rotor 2 can be screwed into the stator 1, which is convenient for processing and assembly.

[0075] In this embodiment, the output shaft of the motor 31 forms the aforementioned eccentric shaft 32.

[0076] As described above, it is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes but is not limited to the content described in the above specific implementation manner. Any modification that does not deviate from the functional and structural principles of the present invention will be included in the scope of the claims.

Claims

1. A vacuum pump with the rotor orbiting relative to the pump chamber, characterized in that: The vacuum pump in which the rotor vortices relative to the pump chamber includes: A stator (1), including a cylinder body (11) forming the pump chamber and a spiral blade (12) in the pump chamber. An air inlet (13) is provided at one end of the cylinder body (11), and an air outlet (14) is provided at the other end. A rotor (2), provided with a spiral groove (21). Among them, the spiral blade (12) is located in the spiral groove (21), and both the spiral blade (12) and the spiral groove (21) extend along the axial direction of the cylinder body (11). Among them, when observing along the axial direction of the cylinder body (11), the rotor (2) vortices relative to the pump chamber.

2. The vacuum pump with the rotor vortexing relative to the pump chamber according to claim 1, characterized in that: A tapered hole is provided in the cylinder body (11), and the rotor (2) is frustum-shaped.

3. The vacuum pump with the rotor eddying relative to the pump chamber according to claim 1, characterized in that: A cylindrical hole is provided in the cylinder body (11), and the rotor (2) is cylindrical.

4. The vacuum pump with vortex movement of the rotor relative to the pump chamber according to any one of claims 1 to 3, characterized in that: The spiral groove (21) has a constant pitch; the spiral blade (12) has a constant pitch.

5. The vacuum pump with the rotor vortexing relative to the pump chamber according to any one of claims 1 to 3, characterized in that: Both the spiral groove (21) and the spiral blade (12) have a variable pitch, and the pitch gradually decreases in the direction from the air inlet (13) to the air outlet (14).

6. The vacuum pump with relative eddy of the rotor to the pump chamber according to claim 1, characterized in that: The spiral groove (21) has a constant width, the spiral blade (12) has a constant thickness, the width of the spiral groove (21) is 0.05 - 0.2 mm greater than the thickness of the spiral blade (12), and the spiral blade (12) is located at the center in the width direction of the spiral groove (21); and / or, The spiral groove (21) has a constant depth, the radial dimensions of the spiral blade (12) are the same, and the depth of the spiral groove (21) is less than the radial dimension of the spiral blade (12).

7. The vacuum pump with the rotor eddying relative to the pump chamber according to claim 1, wherein: An overflow channel is provided at the air outlet end of the cylinder body (11); and / or, A number of functional holes are provided on the cylinder body (11), and the functional holes are used for at least one of gas ballast, gas admixture, and purging; and / or, The vacuum pump is horizontal or vertical; and / or, The cylinder body (11) and the spiral blade (12) are integrally formed.

8. The vacuum pump with vortex movement of the rotor relative to the pump chamber according to claim 1, characterized in that: The vacuum pump further includes an eccentric drive mechanism (3) for making the rotor (2) vortex, and there is a static seal between the stator (1) and the eccentric drive mechanism (3).

9. The vacuum pump with the rotor swirling relative to the pump chamber according to claim 8, characterized in that: The eccentric drive mechanism (3) includes a motor (31) and an eccentric shaft (32). The rotation axis of the eccentric shaft (32) coincides with the axis of the cylinder body (11) of the stator (1). There is a static seal between the motor (31) and the stator (1). A bellows (4) is provided between the motor (31) and the rotor (2). The eccentric shaft (32) is located in the bellows (4), and both ends of the bellows (4) are sealed with the motor (31) and the rotor (2) respectively.

10. The vacuum pump with vortex motion of the rotor relative to the pump chamber according to claim 9, characterized in that: The output shaft of the motor (31) forms the aforementioned eccentric shaft (32); and / or, The eccentric part of the eccentric shaft (32) is connected to the rotor (2) through a bearing (33).

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