Multi-channel product inner leakage detection mode

Abstract

The invention discloses a multi-channel product inner leakage detection mode, and relates to the technical field of leakage detection.The product cavity is divided into a cavity A and a cavity B. The inner leakage detection mode comprises the steps that S1, single-channel detection is conducted; s2, initial inner leakage inspection; S3, inner leakage inspection: unqualified products in the step S2 are put into the vacuum box again for re-inspection; s4, leakage checking is conducted, specifically, qualified workpieces in the step S2 and unqualified workpieces in the step S3 are detected in a vacuum box; and S5, marking the product with the leakage point in the cavity A or the cavity B. According to the invention, whether the inner leakage phenomenon exists in the multi-channel product can be rapidly determined, the accuracy of the detection work is improved, the product with the inner leakage defect is effectively prevented from being put into the market, and the product quality is guaranteed. And meanwhile, the specific leakage point location of the product can be judged, so that classified recovery processing can be conveniently carried out on the product, subsequent maintenance operation and secondary utilization of the product are facilitated, and the product detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of leak detection, and particularly relates to a multi-channel product internal leak detection method. Background Art

[0002] Vacuum box helium leak detection is a commonly used detection method, mainly used to detect the leakage of vacuum seals. Its core principle is to use helium as a tracer gas, fill helium into the workpiece, and perform detection in a vacuum box. Then, a high-precision helium mass spectrometer leak detector is used to quickly and accurately judge the leakage of the workpiece, and the leak rate of the detected product is obtained by analyzing the helium distribution.

[0003] There are various methods for leak detection using a helium mass spectrometer leak detector, such as the helium spraying method (also called the vacuum method), the helium suction method, etc. The most commonly used method for leak detection of vacuum equipment is the helium spraying method. It is worth mentioning that the equipment has a helium purging function. When the leak rate value of a non-conforming product is too high, before the next leak detection, the system automatically fills high-purity nitrogen into the contaminated vacuum box and common pipelines and evacuates them to ensure that the equipment will not produce false alarms due to the helium background pollution in the vacuum box.

[0004] The existing vacuum box helium leak detection method for multi-channel products can only detect whether there is a leakage phenomenon on the product wall. When there is an internal leak between the channels of the product, during the helium leak detection process, since the gas always circulates inside the product cavity, it is not easy to detect the internal leak of the product in the vacuum box. If there is a leakage phenomenon on the product wall, it is also not easy to detect which channel the product leakage point belongs to, which is likely to cause errors and affect the accuracy of the detection work. The staff cannot determine the leak point location, which is not convenient for product recovery, repair, and secondary utilization. Therefore, the present application provides a multi-channel product internal leak detection method to meet the requirements. Summary of the Invention

[0005] In view of the above problems, the present application provides a multi-channel product internal leak detection method.

[0006] To achieve the above object, the present application provides the following technical solution: A multi-channel product internal leak detection method, the product cavity is divided into two cavities A and B, and the internal leak detection method includes the following steps:

[0007] S1: Single-channel detection, place the product in a vacuum box. The vacuum box is provided with an A-cavity inflation interface and a B-cavity inflation interface that are respectively connected to the two cavities A and B. The A-cavity inflation interface inflates the inside of the product cavity A, and the B-cavity inflation interface is opened;

[0008] S2: Initial internal leakage inspection. Determine whether the gas data in the vacuum chamber is qualified through the helium detection system connected to the vacuum chamber. If it is qualified, there are no leakage points in the A chamber and the connection between the A and B chambers. If it is unqualified, there is a leakage point in the A chamber or the connection between the A and B chambers:

[0009] S3: Internal leakage troubleshooting. Re-place the unqualified products in step S2 into the vacuum chamber for re-inspection. Inflate the inside of the A chamber of the product through the A chamber inflation interface, while keeping the B chamber inflation interface closed. Determine whether the products in the vacuum chamber are qualified through the helium detection system. If it is qualified, there is a leakage point at the connection between the A and B chambers. Mark the workpieces with leakage points at the connection between the A and B chambers and determine the internal leakage of the workpieces. If it is unqualified, there is no leakage point at the connection between the A and B chambers, and the leakage point exists in the A chamber or B chamber of the product;

[0010] S4: Leakage troubleshooting. Conduct inspections on the qualified workpieces in step S2 and the unqualified workpieces in step S3 in the vacuum chamber, screen out the qualified workpieces, and determine the leakage point location of the leaking products;

[0011] S5: Mark the products with leakage points in the A chamber or B chamber.

[0012] Further, step S4 includes the following steps:

[0013] S41: Inspect the qualified workpieces in step S4 in the vacuum chamber. Keep the A chamber inflation interface closed and inflate the inside of the B chamber of the product through the B chamber inflation interface. Determine whether the products in the vacuum chamber are qualified through the helium detection system. If it is qualified, it means the product is qualified, and the A chamber, B chamber, and the connection between the A and B chambers of the product are all qualified. If it is unqualified, it means the product is unqualified, and the leakage point of the product is located in the B chamber;

[0014] S42: Conduct inspections on the unqualified workpieces in step S5 in the vacuum chamber. After completely pumping out the gas inside the A chamber of the product through the A chamber inflation interface, keep the A chamber inflation interface closed and inflate the B chamber of the product through the B chamber inflation interface. Determine whether the products in the vacuum chamber are qualified through the helium detection system. If it is qualified, it means the leakage point of the product is located in the A chamber. If it is unqualified, it means the leakage point of the product is located in the B chamber.

[0015] Further, both the A chamber inflation interface and the B chamber inflation interface are connected to a helium supply system.

[0016] Further, the opening and closing states of both the A chamber inflation interface and the B chamber inflation interface are controlled by valves.

[0017] Further, movable fastening plates are provided inside the vacuum chamber. When the products are inside the vacuum chamber for inspection operations, the fastening plates press the products against the A chamber inflation interface and the B chamber inflation interface.

[0018] Further, the vacuum chamber is provided with an A-chamber pressure detection sensor and a B-chamber pressure detection sensor that are connected to the A chamber and the B chamber of the product, and both the A-chamber pressure detection sensor and the B-chamber pressure detection sensor are connected to the helium detection system.

[0019] In summary, the technical effects and advantages of the present invention are as follows:

[0020] The present invention can quickly determine whether there is an internal leakage phenomenon in a multi-channel product, improve the accuracy of the detection work, effectively prevent products with internal leakage defects from being put on the market, and ensure product quality. At the same time, it can also determine the specific leakage points of the product, so as to facilitate the classification and recycling of the product, which is beneficial to the subsequent maintenance operation and secondary utilization of the product, and improves the efficiency of product detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0022] Figure 1 It is a three-dimensional structure schematic diagram of the present invention.

[0023] Figure 2 It is a second perspective schematic diagram of the present invention.

[0024] Figure 3 It is a front view schematic diagram of the present invention.

[0025] Figure 4 It is a bottom view structure schematic diagram of the present invention.

[0026] Figure 5 It is a schematic diagram of the positions of the A chamber and the B chamber of the product of the present invention.

[0027] Figure 6 It is a process schematic diagram of the present invention.

[0028] In the figure: 1, vacuum chamber; 11, A-chamber inflation interface; 12, B-chamber inflation interface; 13, fastening plate; 14, A-chamber pressure detection sensor; 15, B-chamber pressure detection sensor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0030] Embodiment: Refer to Figure 1-6 A multi-channel product internal leakage detection method shown in the figure. The product cavity is divided into two cavities A and B. This internal leakage detection method includes the following steps:

[0031] S1: Single-channel detection. Place the product in the vacuum chamber 1. The vacuum chamber 1 is provided with an A-chamber inflation interface 11 and a B-chamber inflation interface 12 that are respectively connected to the two cavities A and B. The A-chamber inflation interface 11 inflates the inside of the product's A chamber, and the B-chamber inflation interface 12 is opened. During the detection process, when the detection gas enters the inside of the product's A chamber, due to the B-chamber inflation interface 12 being in an open state, if there is a leak at the connection between the product's A chamber and the A and B chambers, the detection gas will leak into the vacuum chamber 1 or the inside of the B chamber, and there will be a pressure change in either the vacuum chamber 1 or the A and B chambers of the product.

[0032] S2: Initial internal leakage detection. Determine whether the gas data in the vacuum chamber 1 is qualified through a helium detection system connected to the vacuum chamber 1. The helium detector uses the characteristic of helium molecules diffusing in a vacuum to detect whether there is helium in the surrounding environment, whether the pressure changes, and transmits the detection result to the PLC control system.

[0033] If it is qualified, there is no leak point at the connection between the A chamber and the A and B chambers. If it is unqualified, there is a leak point at the A chamber or the connection between the A and B chambers. The PLC control system makes a preliminary marking process to separate the qualified products from the unqualified products. The qualified products directly enter the detection line in step S4, and the unqualified products enter the detection line in step S3.

[0034] S3: Internal leakage troubleshooting. Place the unqualified products in step S2 back into the vacuum chamber 1 for re-inspection. The A-chamber inflation interface 11 inflates the inside of the product's A chamber, and at the same time, the B-chamber inflation interface 12 remains closed. At this time, only one inflation port of the A chamber remains in the A and B chambers of the product. After helium enters the product, determine whether the product in the vacuum chamber 1 is qualified through the helium detection system.

[0035] If it is qualified, it means that there is no helium leakage inside the vacuum chamber 1. Since the unqualified products in step S2 all have leakage points in the A chamber or at the connection between the A and B chambers, when there is no helium leakage inside the vacuum chamber 1, it means that there is a leakage point at the connection between the A and B chambers. The helium detector transmits the detection result to the PLC control system, and the PLC control system marks the workpieces with leakage points at the connection between the A and B chambers, determines that the workpieces have internal leakage, and centrally collects the marked internally leaking workpieces.

[0036] If there is helium leakage inside the vacuum chamber 1, it means that the product is unqualified, and there is no leakage point at the connection between the A and B chambers of the product. The leakage point only exists in the A chamber or B chamber of the product. The PLC control system marks the workpiece and sends it into the detection line of step S4.

[0037] S4: Leakage troubleshooting. Detect the qualified workpieces in step S2 and the unqualified workpieces in step S3 inside the vacuum chamber 1, and screen out the qualified workpieces, which are centrally collected.

[0038] S5: Mark the products with leakage points in the A chamber or B chamber. For unqualified workpieces, it is necessary to determine the leakage point position of the leaking products for recycling and repair the leakage points.

[0039] Specifically, in order to determine the leakage point position of the unqualified workpieces, step S3 includes the following steps:

[0040] S41: Detect the qualified workpieces in step S2 inside the vacuum chamber 1. The A chamber inflation interface 11 remains closed, and the B chamber inflation interface 12 inflates the inside of the B chamber of the product. Determine whether the product inside the vacuum chamber 1 is qualified through the helium detection system. If it is qualified, it means that there is no gas overflow inside the B chamber of the product. In step S2, it has been determined that there is no leakage in the A chamber and the connection between the A and B chambers of the product. Therefore, when there is no leakage in the B chamber of the product either, the A chamber, B chamber, and the connection between the A and B chambers of the product are all qualified. If it is unqualified, it means that the product is unqualified, and the leakage point of the product is located in the B chamber.

[0041] S42: Detect the unqualified workpieces in step S3 inside the vacuum chamber 1. After the A chamber inflation interface 11 completely extracts the gas inside the A chamber of the product, the A chamber inflation interface 11 remains closed, and the B chamber inflation interface 12 inflates the B chamber of the product. Determine whether the product inside the vacuum chamber 1 is qualified through the helium detection system. In step S3, the leakage point of the unqualified product only exists in the A chamber or B chamber of the product. Therefore, if it is qualified, it means that the leakage point of the product is not in the B chamber and is located in the A chamber. If it is unqualified, it means that the leakage point of the product is located in the B chamber.

[0042] In order to enable the helium gas to be smoothly transported through the A - chamber inflation interface 11 and the B - chamber inflation interface for the required detection, both the A - chamber inflation interface 11 and the B - chamber inflation interface 12 are connected to a helium gas supply system. When the helium gas supply system operates, inflation and deflation operations can be smoothly performed on the A - chamber and B - chamber of the product. In order to accurately control the opening and closing states of the A - chamber and B - chamber of the product, the operating states of the A - chamber inflation interface 11, the B - chamber inflation interface 12, and the helium gas supply system are all controlled by valves, and the valves are controlled by the terminal PLC control system.

[0043] Inside the vacuum chamber 1, there are movable fastening plates 13. When the product is inside the vacuum chamber 1 for detection operations, to maintain the stability of the product, the fastening plates 13 press the product tightly against the A - chamber inflation interface 11 and the B - chamber inflation interface 12. The product remains in a stable state throughout the detection process, is tightly connected to the A - chamber inflation interface 11 and the B - chamber inflation interface 12, further ensuring the accuracy of the product detection data.

[0044] On the vacuum chamber 1, there are an A - chamber pressure detection sensor 14 and a B - chamber pressure detection sensor 15 connected to the A - chamber and B - chamber of the product. Both the A - chamber pressure detection sensor 14 and the B - chamber pressure detection sensor 15 are connected to the helium gas detection system. When pressure changes occur inside the A - chamber and B - chamber of the product, the A - chamber pressure detection sensor 14 and the B - chamber pressure detection sensor 15 can accurately sense the pressure change phenomenon and transmit the pressure change state to the PLC control system, so that the PLC control system can make a response to determine whether there are internal leaks or leakage phenomena in the product.

[0045] Finally, it should be noted that the above - mentioned are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A multi-channel in-leakage detection method for products, characterized in that: The cavity of the product is divided into two cavities A and B. The internal leakage detection method includes the following steps: S1: Single-channel detection. Place the product in the vacuum chamber (1). The vacuum chamber (1) is provided with an air inlet interface (11) for cavity A and an air inlet interface (12) for cavity B, which are respectively connected to the two cavities A and B. The air inlet interface (11) for cavity A inflates the inside of cavity A of the product, and the air inlet interface (12) for cavity B is opened. S2: Preliminary internal leakage inspection. Determine whether the gas data in the vacuum chamber (1) is qualified through a helium detection system connected to the vacuum chamber (1). If it is qualified, there are no leakage points in cavity A and at the joints of cavities A and B. If it is unqualified, there are leakage points in cavity A or at the joints of cavities A and B. S3: Internal leakage troubleshooting. Place the unqualified product in step S2 back into the vacuum chamber (1) for re-inspection. The air inlet interface (11) for cavity A inflates the inside of cavity A of the product, and at the same time, the air inlet interface (12) for cavity B remains closed. Determine whether the product in the vacuum chamber (1) is qualified through the helium detection system. If it is qualified, there are leakage points at the joints of cavities A and B. Mark and process the workpieces with leakage points at the joints of cavities A and B, and determine internal leakage of the workpieces. If it is unqualified, there are no leakage points at the joints of cavities A and B, and the leakage points are in cavity A or cavity B of the product. S4: Leakage troubleshooting. Detect the qualified workpieces in step S2 and the unqualified workpieces in step S3 in the vacuum chamber (1), screen out the qualified workpieces, and determine the leakage point positions of the leaking products. S5: Mark and process the products with leakage points in cavity A or cavity B.

2. The multi-channel product internal leakage detection method according to claim 1, characterized in that: The said step S4 includes the following steps: S41: Detect the qualified workpieces in step S2 in the vacuum chamber (1). The air inlet interface (11) for cavity A remains closed, and the air inlet interface (12) for cavity B inflates the inside of cavity B of the product. Determine whether the product in the vacuum chamber (1) is qualified through the helium detection system. If it is qualified, it means the product is qualified, and cavities A and B of the product and the joints of cavities A and B are all qualified. If it is unqualified, it means the product is unqualified, and the leakage point of the product is in cavity B. S42: Detect the unqualified workpieces in step S3 in the vacuum chamber (1). After the air inlet interface (11) for cavity A completely evacuates the gas inside cavity A of the product, the air inlet interface (11) for cavity A remains closed, and the air inlet interface (12) for cavity B inflates cavity B of the product. Determine whether the product in the vacuum chamber (1) is qualified through the helium detection system. If it is qualified, it means the leakage point of the product is in cavity A. If it is unqualified, it means the leakage point of the product is in cavity B.

3. The multi-channel product internal leakage detection method according to claim 1, characterized in that: Both the air inlet interface (11) for cavity A and the air inlet interface (12) for cavity B are connected to a helium supply system.

4. The multi-channel product internal leakage detection method according to claim 1, characterized in that: The opening and closing states of the air inlet interface (11) for cavity A and the air inlet interface (12) for cavity B are both controlled by valves.

5. The multi-channel in-leakage detection method for products according to claim 1, wherein: A movable fastening plate (13) is provided inside the vacuum chamber (1). When the product is inside the vacuum chamber (1) for detection operations, the fastening plate (13) presses the product against the air inlet interface (11) for cavity A and the air inlet interface (12) for cavity B.

6. The multi-channel product internal leakage detection method according to claim 1, characterized in that: An A - chamber pressure detection sensor (14) and a B - chamber pressure detection sensor (15) which are connected to the A - chamber and the B - chamber of the product are provided on the vacuum chamber (1). The A - chamber pressure detection sensor (14) and the B - chamber pressure detection sensor (15) are both connected to a helium detection system.

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