Atmosphere protection Auger energy disperse spectroscopy low-temperature sample transfer table and transfer method

Abstract

The invention discloses an atmosphere protection Auger energy disperse spectroscopy low-temperature sample transfer table and a transfer method. The transfer table comprises a sample carrying table and a base, a cooling liquid storage cavity is formed in the sample carrying table, and cooling liquid is injected into the cooling liquid storage cavity, so that a sample placed on the sample carrying table is kept at a low temperature. The surface of the sample carrying table is concave downwards to form a sample groove, the sample groove is of a hollow triangular prism structure with a triangular longitudinal section and comprises two opposite triangular vertical faces and two opposite inclined faces, and the bottoms of the two inclined faces intersect. According to the atmosphere protection Auger energy disperse spectroscopy low-temperature sample transfer table, the cooling liquid storage cavity is formed in the sample carrying table, and a sample is kept in a low-temperature state through a refrigerant medium in the cooling liquid storage cavity.

Description

Technical Field

[0001] The present invention relates to the field of atmosphere - protected Auger spectrometers, and particularly to a low - temperature sample transfer stage and a transfer method for an atmosphere - protected Auger spectrometer. Background Art

[0002] A low - temperature sample transfer stage is a sample transfer device that can transfer a sample frost - free to an atmosphere - protected Auger spectrometer at liquid nitrogen temperature. This sample stage is suitable for materials that require low - temperature testing and can also reduce sample contamination.

[0003] In the prior art, the commonly used method to maintain a low - temperature environment for a sample is high - pressure freezing. The sample is immersed in liquid nitrogen and then transferred to the test stage of the Auger spectrometer. However, this method is relatively complex and expensive. Therefore, we propose a low - temperature transfer stage and a usage method for an atmosphere - protected Auger spectrometer. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a low - temperature sample transfer stage and a transfer method for an atmosphere - protected Auger spectrometer to meet the low - temperature requirements of the sample.

[0005] To solve the above - mentioned technical problems, according to one aspect of the present invention, the technical solution adopted is: A low - temperature sample transfer stage for an atmosphere - protected Auger spectrometer includes a sample carrier stage and a base; a coolant storage cavity is arranged inside the sample carrier stage, and coolant is injected into the coolant storage cavity to keep the sample placed on the sample carrier stage at a low temperature.

[0006] Further, a sample groove is formed by concave - down on the surface of the sample carrier stage.

[0007] Further, the sample groove is a hollow triangular prism structure with a triangular longitudinal section, including two opposite triangular vertical surfaces and two opposite inclined surfaces, and the bottoms of the two inclined surfaces intersect.

[0008] Further, the longitudinal section of the sample groove is a right - angled triangle, with the right - angle located at the bottom of the sample groove, and the other two angles are 30° and 60° respectively.

[0009] Further, the coolant is ethylene glycol.

[0010] Further, a plurality of positioning rings are arranged between the base and the sample carrier stage, and a positioning groove is formed between two positioning rings.

[0011] According to another aspect of the present invention, a low - temperature sample transfer method for an atmosphere - protected Auger spectrometer is provided. Using the above - mentioned low - temperature sample transfer stage for an atmosphere - protected Auger spectrometer, it includes the following steps: Inject coolant into the coolant storage cavity; Place the sample on the sample stage through conductive adhesive. Use the sample transfer rod to transfer the low-temperature sample stage of the atmosphere-protected Auger spectrometer to the sample chamber.

[0012] Further, after the sample is placed on the sample stage, use an ear bulb to blow directly to ensure that no foreign objects fall off.

[0013] Further, the sample is a thin film sample or a bulk sample, with a sample diameter ≤ 2 cm and a thickness ≤ 1 cm.

[0014] The low-temperature sample stage of the atmosphere-protected Auger spectrometer provided by the present invention is provided with a coolant storage cavity inside the sample stage, and the sample is kept in a low-temperature state by the refrigerant medium in the coolant storage cavity.

[0015] The present invention can meet the low-temperature requirements of the sample, contribute to the accurate characterization of the sample, and provide technical support for more accurate analysis and improvement of material properties. The use method of the present invention is simple and is beneficial to cost saving. Description of the Drawings

[0016] The drawings herein are used to provide further illustration of the present invention, form a part of this application, and the schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention.

[0017] Figure 1 is the front view of the low-temperature sample stage of the atmosphere-protected Auger spectrometer according to the embodiment of the present invention; Figure 2 is the side view of the low-temperature sample stage of the atmosphere-protected Auger spectrometer according to the embodiment of the present invention.

[0018] In the figure, 1 - sample stage, 2 - base, 3 - coolant storage cavity, 4 - sample groove, 5 - positioning ring, 6 - sealed liquid injection port. Detailed Embodiments

[0019] In order to enable those skilled in the art to better understand the present invention, the following further clearly and completely describes the present invention with reference to the accompanying drawings and in combination with embodiments. It should be noted that, without conflict, the embodiments and features in the embodiments in this application can be combined with each other.

[0020] As Figure 1 shown, a low-temperature sample stage of an atmosphere-protected Auger spectrometer provided by a typical embodiment of the present invention includes a sample stage 1 and a base 2.

[0021] The interior of the sample stage 1 is provided with a coolant storage cavity 3 filled with coolant. The sample stage 1 is made of a material with good thermal conductivity. The sample is placed on the sample carrier 1, and the coolant keeps the sample placed on the sample stage 1 at a low temperature.

[0022] Exemplarily, the coolant storage cavity 3 can be an annular tubular structure inside the sample stage 1 or a chamber structure opened inside the sample stage 1. The coolant preferably uses ethylene glycol. A sealed liquid injection port 6 connected to the coolant storage cavity 3 is provided on the outer wall of the sample stage 1.

[0023] In a preferred embodiment, a sample groove 4 is formed by concave - down on the surface of the sample stage 1, and the sample is placed in the sample groove 4.

[0024] Based on the above - mentioned embodiment, preferably, the sample groove 4 is a hollow triangular prism structure with a triangular longitudinal section, including two opposite triangular vertical surfaces and two opposite inclined surfaces, and the bottoms of the two inclined surfaces intersect. According to this embodiment, the sample can be placed obliquely in the sample groove 4. In Auger electron spectroscopy testing, placing the sample obliquely is beneficial for better signal collection.

[0025] Exemplarily, the longitudinal section of the sample groove is a right - angled triangle, with the right - angle at the bottom of the sample groove, and the other two angles are 30° and 60° respectively. Experiments have proved that under the inclination angle conditions given in this embodiment, the sample can collect signals preferably.

[0026] In a preferred embodiment, a plurality of positioning rings 5 are provided between the base 2 and the sample stage 1, and a positioning groove is formed between two positioning rings 5. The sampling rod catches the positioning groove, thereby placing the sample into the instrument transfer chamber.

[0027] Another typical embodiment of the present invention provides an atmosphere - protected Auger electron spectroscopy low - temperature sample transfer method, which is implemented based on the atmosphere - protected Auger electron spectroscopy low - temperature sample transfer stage provided by the present invention.

[0028] First, inject coolant into the coolant storage cavity 3, and then place the sample on the sample stage 1 through conductive glue. Or, first place the sample on the sample stage 1 through conductive glue, and then inject coolant into the coolant storage cavity 3.

[0029] After the sample is placed on the sample stage 1, use an ear - syringe to blow directly to ensure that no foreign objects fall. The above - mentioned sample is a thin - film sample or a bulk sample, with the sample diameter ≤ 2 cm and the thickness ≤ 1 cm.

[0030] Use the sample transfer rod to transfer the atmosphere - protected Auger electron spectroscopy low - temperature sample transfer stage to the sample chamber, close the chamber door, and send it into the test chamber after vacuum pumping.

[0031] The scope of protection claimed by the present invention is not limited to the above specific embodiments. For those skilled in the art, the present invention can have various deformations and modifications. Any modification, improvement, and equivalent replacement made within the concept and principle of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An atmosphere-protected Auger electron spectrometer low-temperature sample transfer stage, characterized in that: It includes a sample stage and a base; a coolant storage cavity is provided inside the sample stage, and the coolant storage cavity is filled with coolant to keep the sample placed on the sample stage at a low temperature.

2. The low-temperature sample transfer stage of the atmosphere-protected Auger electron spectrometer according to claim 1, wherein: A sample groove is formed by concave-convex on the surface of the sample stage.

3. The low-temperature sample transfer stage of the atmosphere-protected Auger electron spectrometer according to claim 2, characterized in that: The sample groove is a hollow triangular prism structure with a triangular longitudinal section, including two opposite triangular vertical surfaces and two opposite inclined surfaces, and the bottoms of the two inclined surfaces intersect.

4. The low-temperature sample transfer stage of the atmosphere-protected Auger electron spectrometer according to claim 3, characterized in that: The longitudinal section of the sample groove is a right triangle, with the right angle at the bottom of the sample groove, and the other two angles are 30° and 60° respectively.

5. The cryogenic sample transfer stage of the atmosphere-protected Auger electron spectrometer according to claim 1 or 4, characterized in that: The coolant is ethylene glycol.

6. The low-temperature sample transfer stage of the atmosphere-protected Auger spectrometer according to claim 1, characterized in that: A plurality of positioning rings are provided between the base and the sample stage, and a positioning groove is formed between two positioning rings.

7. A method for low-temperature sample transfer of an atmosphere-protected Auger electron spectrometer, characterized in that, Using the low-temperature sample transfer stage of the atmosphere-protected Auger energy spectrometer according to any one of claims 1-6, comprising the following steps: Inject coolant into the coolant storage cavity; Place the sample on the sample stage through conductive glue; Use the sample transfer rod to transfer the low-temperature sample transfer stage of the atmosphere-protected Auger energy spectrometer to the sample chamber.

8. The low-temperature sample transfer method of the atmosphere-protected Auger electron spectrometer according to claim 7, characterized in that: After the sample is placed on the sample stage, blow it directly with an ear bulb to ensure that no foreign objects fall off.

9. The cryogenic sample transfer method for an atmosphere-protected Auger electron spectrometer according to claim 7 or 8, characterized in that: The sample is a thin film sample or a bulk sample, the sample diameter ≤ 2 cm, and the thickness ≤ 1 cm.

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