Substrate cassette storage device, working method, and substrate processing apparatus

Abstract

The application discloses a substrate box storage device, a working method and a substrate processing device. The substrate box comprises a side wall and an openable door. The substrate box storage device comprises a storage rack, the storage rack comprising at least one bearing plate, each bearing plate comprising at least one bearing part and at least one blowing part, wherein the bearing part is used for bearing the substrate box, and the blowing part is configured to blow at least the door; a gas supply pipeline in communication with the blowing part and used for supplying gas to the blowing part; and a shell, the shell having an accommodation space inside, at least one bearing plate being arranged in the accommodation space, and the shell comprising an exhaust port used for exhausting gas in the shell. The blowing part arranged on each bearing plate can effectively blow off particles adhered to the door of the substrate box by blowing at the door of the substrate box during placement of the substrate box, thereby reducing the risk of contamination of the substrate when the substrate box is subsequently opened, and ensuring the cleanliness of subsequent processes.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing equipment, and in particular to a substrate box storage device, a working method and a substrate processing device. Background Art

[0002] At the front end of a semiconductor vertical furnace tube system is a substrate cassette storage device. This device is divided into multiple layers, each capable of storing multiple substrate cassettes. The storage racks of the substrate cassette storage device are driven by a motor for rotation. During operation, a robotic arm retrieves a substrate cassette, delivering it to a workstation. The next step involves opening the cassette door and removing a substrate for processing. Currently, the outer shell of the substrate cassette is susceptible to contamination from both mechanical mechanisms and the cleanroom environment. Consequently, when the cassette reaches the next workstation and the door is opened to remove a substrate, impurities adhering to the outer shell (particularly the door) are likely to be transferred to the substrate surface, contaminating the substrate. Summary of the Invention

[0003] This application solves the technical problem that the substrate box in the substrate box storage device is easily contaminated by the following technical solution:

[0004] A substrate box storage device for storing substrate boxes, wherein the substrate box comprises side walls and an openable door, comprising:

[0005] a storage rack, the storage rack comprising at least one carrying plate, each of the carrying plates comprising at least one carrying portion and at least one purge portion, wherein the carrying portion is used to carry the substrate box, and the purge portion is configured to purge at least toward the door;

[0006] an air supply pipeline, the air supply pipeline being in communication with the purge portion and being used for supplying air to the purge portion; and

[0007] The shell has an accommodating space inside, the at least one bearing plate is arranged in the accommodating space, and the shell includes an exhaust port, which is used to discharge the gas in the shell.

[0008] Preferably, the purging portion is further configured to: purge towards the side walls of the substrate box.

[0009] Preferably, the air supply pipeline includes a main pipeline and at least one branch pipeline, a first end of the branch pipeline is communicated with the main pipeline, and a second end of the branch pipeline is communicated with the corresponding purge part.

[0010] Preferably, each of the purge portions comprises a plurality of air outlet holes, at least some of the plurality of air outlet holes are configured to discharge air upward, and / or at least some of the plurality of air outlet holes are configured to discharge air downward.

[0011] Preferably, the exhaust port is arranged at the upper portion of the housing or at the lower portion of the housing.

[0012] Preferably, the exhaust unit is further arranged.

[0013] Preferably, the fan filter unit is further arranged opposite to the exhaust port.

[0014] Preferably, the storage rack further comprises a rotating shaft penetrating through the at least one carrier plate for driving the at least one carrier plate to rotate, wherein the rotating shaft is hollow inside, and the air supply pipeline is arranged at least partially inside the rotating shaft.

[0015] A working method of a substrate cassette storage device, applied to the substrate cassette storage device as described above, the working method comprising: controlling the blowing action of the blowing unit and the exhaust action of the exhaust port to be performed alternately.

[0016] A substrate processing apparatus comprising the substrate cassette storage device as described above.

[0017] The positive progress effect of the present application is that the blowing unit arranged on each carrier plate can effectively blow off the particles adhered to the door of the substrate cassette during the placement of the substrate cassette by blowing to the door of the substrate cassette, thereby reducing the risk of contamination of the substrate when the subsequent substrate cassette is opened, and thus ensuring the cleanliness of the subsequent process. The housing can form a closed space to prevent the environment outside the housing from contaminating the substrate cassette. Moreover, the housing is provided with an exhaust port, so that the particles generated during the blowing process of the blowing unit can be discharged in time, avoiding the particles from contaminating the substrate cassette again, and further ensuring the clean environment during the operation of the entire device. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 FIG. 1 is a structural schematic diagram of a substrate cassette storage device according to an embodiment of the present application;

[0019] Figure 2 FIG. 2 is a structural schematic diagram of a storage rack according to an embodiment of the present application;

[0020] Figure 3 FIG. 3 is a structural schematic diagram of a carrier plate and a blowing unit according to an embodiment of the present application;

[0021] Figure 4 FIG. 4 is a structural schematic diagram of a substrate cassette storage device according to another embodiment of the present application. DETAILED DESCRIPTION

[0022] The present application will be further described in the following embodiments, but the present application is not limited in the scope of the embodiments.

[0023] As shown in Figures 1 to 3 The embodiment provides a substrate box storage device for storing a substrate box 500. The substrate box 500 comprises a sidewall 520 and an openable door 510. The substrate box storage device comprises a storage rack 100, a gas supply pipeline 300 and a housing 400. The storage rack 100 comprises at least one bearing plate 110, each bearing plate 110 comprises at least one bearing part 111 for placing the substrate box 500 and at least one purge part 112 configured to purge at least the door 510 of the substrate box 500. The gas supply pipeline 300 is connected with the purge part 112 for supplying gas to the purge part 112. The housing 400 has an accommodation space in the interior, and the at least one bearing plate 110 is arranged in the accommodation space. The housing 400 comprises an exhaust port 410 for exhausting gas in the housing 400. Each bearing part 111 corresponds to one purge part 112.

[0024] The purge part 112 arranged on each bearing plate 110 can effectively blow off particles adhered to the door 510 of the substrate box 500 by purging the door 510 of the substrate box 500 during placement of the substrate box 500, thereby reducing the risk of contamination of the substrate when the substrate box 500 is subsequently opened, and thus ensuring the cleanliness of subsequent processes. The housing 400 can form a closed accommodation space, and the substrate box 500 is arranged in the accommodation space, so as to prevent the environment outside the housing from contaminating the substrate box 500. In addition, the housing 400 is provided with the exhaust port 410, so that the particles generated during the purging process of the purge part 112 can be timely exhausted, thereby avoiding the particles from contaminating the substrate box 500 again, and further ensuring the clean environment during operation of the entire device.

[0025] In some embodiments, one purge part can also correspond to a plurality of bearing parts, for example, the purge part is arranged at a middle position of the bearing plate, and the plurality of bearing parts are arranged around the purge part, and the door of the substrate box is arranged towards the purge part.

[0026] In some embodiments, the storage rack 100 further comprises a rotating shaft 200 penetrating through the bearing plate 110 for driving the bearing plate 110 to rotate, and the rotating shaft 200 is hollow in the interior. The gas supply pipeline 300 is at least partially arranged in the interior of the rotating shaft 200. The bearing plate 110 is driven to rotate by the rotating shaft 200, so that efficient storage of a plurality of substrate boxes 500 can be realized in a limited space. The gas supply pipeline 300 is arranged in the interior of the rotating shaft 200 by utilizing the hollow structure of the rotating shaft 200, so that the structure is more compact and reliable, and the gas supply pipeline 300 is less likely to interfere with the substrate box 500, so that gas delivery is more stable.

[0027] Specifically, the gas supply pipeline 300 rotates synchronously with the bearing plate 110, and the gas supply pipeline 300 is connected with a gas source through a rotating joint 700, so as to realize rotary gas supply.

[0028] In some embodiments, the rotating shaft 200 can also not be provided, and the carrier plate 110 does not rotate.

[0029] In some embodiments, as shown in Figure 2 As shown in the figure (only one carrier plate 110 is shown for the blowing part 112), the storage rack 100 includes four carrier plates 110 distributed in the vertical direction, each carrier plate 110 is provided with four carrier parts 111 and four blowing parts 112. In some embodiments, the number of carrier plates 110 and the number of carrier parts 111 can be flexibly set as needed.

[0030] In some embodiments, as shown in Figure 3 As shown in the figure, the blowing part 112 is also configured to blow to the side wall 520 of the substrate box 500. The blowing part 112 includes a main blowing part 1121 and a side blowing part 1122. The main blowing part 1121 blows to the wafer box door 510, and the side blowing part 1122 blows to the side wall 520 of the substrate box 500. The particles on the substrate box 500 are more completely removed, further reducing the risk of substrate contamination when the substrate box 500 is opened.

[0031] In some embodiments, the gas supply pipeline 300 includes a main pipeline 310 and at least one branch pipeline 320, each carrier plate 110 is provided with one branch pipeline 320, the first end of the branch pipeline 320 is connected with the main pipeline 310, and the second end of the branch pipeline 320 is connected with the corresponding blowing part 112. Wherein, the rotating shaft 200 is provided with a plurality of openings 210, the main pipeline 310 is located inside the rotating shaft 200, and the branch pipeline 320 is led out from the corresponding opening 210. The design of the main pipeline 310 and the branch pipeline 320 realizes the supply of blowing gas for the substrate box 500, thereby ensuring that each substrate box 500 can obtain sufficient and stable blowing gas during the rotating movement of the equipment. Each branch pipeline 320 corresponds to a plurality of blowing parts 112 on each carrier plate 110, which optimizes the structural layout of the gas supply pipeline 300. For example, in the embodiments shown in Figure 2 and Figure 3 As shown in the figure, each carrier plate 110 can be provided with one branch pipeline, which corresponds to four blowing parts 112 on the carrier plate 110. Specifically, the one branch pipeline is divided into four segments, each segment corresponds to one blowing part 112, and each segment is connected by a multi-way joint. Four branch pipelines are provided on the four carrier plates 110.

[0032] In some embodiments, each carrier plate 110 may also be provided with multiple branch lines, each of which has a first end connected to the main line and a second end connected to a corresponding purge section. Each branch line corresponds to only one purge section. Specifically, each carrier plate 110 may be provided with four branch lines, each corresponding to a purge section on that carrier plate 110, and each branch line has a first end connected to the main line. A total of 16 branch lines are provided on the four carrier plates 110.

[0033] In some embodiments, the substrate cassette storage device further includes an exhaust unit (not shown), which is connected to the exhaust port 410 located at the top of the housing 400. By adding the exhaust unit and connecting it to the exhaust port 410 located at the top of the housing 400, efficient exhaust gas discharge is achieved, preventing the accumulation of exhaust gas within the housing 400 during the purge process, thereby further improving the overall cleaning effect of the substrate cassette 500. Specifically, the exhaust unit is an exhaust pump or a device capable of generating negative pressure.

[0034] In some embodiments, as Figure 3 As shown, the purge unit 112 includes multiple air outlets that discharge air upward. The purge unit 112 generates an upward airflow to purge the substrate cassette 500. Particles on the substrate cassette 500 are blown upward and are more easily discharged through the exhaust port 410 located at the upper portion of the housing 400. Specifically, the purge unit 112 includes a purge body, which is an internal hollow structure. The air outlets are provided on the purge body. The purge body is located near the bottom of the door 510 and the bottom of the sidewall 520 of the substrate cassette 500 to purge the door 510 and the sidewall 520 of the substrate cassette 500 upward.

[0035] In some embodiments, as Figure 4As shown, the substrate cassette storage device further comprises a fan filter unit 600, which is arranged at the upper portion of the housing 400, and the exhaust port 410 is arranged at the bottom of the housing 400. The fan filter unit 600 can form an airflow from top to bottom inside the housing 400, and the gas supplied by the fan filter unit 600 is clean gas, which is discharged through the exhaust port 410 at the bottom of the housing 400, so as to effectively purify the particles in the housing 400, and quickly discharge the particles blown up by the blowing part 112 during the blowing process, thereby improving the cleanliness of the surface of the substrate cassette 500 and the surrounding environment, and ensuring that the subsequent substrate taking-out process is not contaminated. Further, the blowing part 112 comprises a plurality of gas outlets, which blow gas downward. The downward airflow of the blowing part 112 effectively removes the particles attached to the surface of the substrate cassette 500, and at the same time, cooperates with the airflow from top to bottom formed by the fan filter unit 600 and the bottom exhaust port 410, which is beneficial to quickly discharge the particles blown up by the blowing part 112. Specifically, the blowing part 112 comprises a blowing main body, which is a hollow structure, and the gas outlets are arranged on the blowing main body, and the blowing main body is close to the top of the door 510 and the top of the side wall 520 of the substrate cassette 500. In some embodiments, the blowing part 112 is arranged on the bearing part 111 above the substrate cassette 500, so as to blow the door 510 and the side wall 520 of the substrate cassette 500 downward.

[0036] In some embodiments, the fan filter unit 600 can also be arranged at the lower portion of the housing 400, and the exhaust port 410 is arranged at the upper portion of the housing 400, so that the fan filter unit 600 and the exhaust port are arranged in opposite positions.

[0037] In some embodiments, the gas outlet directions of the plurality of gas outlets can be not associated with the position of the exhaust port 410 on the housing, that is, the gas outlet directions of the plurality of gas outlets can be upward or downward, or a part of the plurality of gas outlets blows gas upward and the other part blows gas downward, and the exhaust port 410 can be arranged at the upper portion or the lower portion of the housing 400.

[0038] In some embodiments, the substrate cassette storage device further comprises a driving assembly, and the housing 400 comprises a movable baffle 420, and the driving assembly is connected with the baffle 420 and used for opening or closing the housing 400. By opening or closing the housing 400 through the driving assembly, it is easier to take and place the substrate cassette 500. The present embodiment also provides a working method of the substrate cassette storage device, which comprises the substrate cassette storage device as above, and the working method comprises: the blowing of the blowing part 112 and the exhaust of the exhaust port 410 are alternately performed.

[0039] The work method of the present application alternately performs the blowing of the blowing part 112 and the exhaust of the exhaust port 410, so that directional and efficient air flow blowing is performed first to remove impurities and contaminants on the surface and the surrounding area of the substrate box 500, and then the exhaust of the waste gas is performed quickly to avoid continuous interference or mixing of the air flow, thereby ensuring more stable cleaning effect.

[0040] The present embodiment also provides a substrate processing device comprising the substrate box storage device as above.

[0041] Although the specific embodiments of the present application are described above, those skilled in the art should understand that this is only an illustration. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present application, and these changes and modifications all fall within the protection scope of the present application.

Claims

1. A substrate box storage device for storing substrate boxes, wherein the substrate box comprises a side wall and an openable door, characterized in that: include: a storage rack, the storage rack comprising at least one carrying plate, each of the carrying plates comprising at least one carrying portion and at least one purge portion, wherein the carrying portion is used to carry the substrate box, and the purge portion is configured to purge at least toward the door; an air supply pipeline, the air supply pipeline being in communication with the purge portion and being used for supplying air to the purge portion; as well as The shell has an accommodating space inside, the at least one bearing plate is arranged in the accommodating space, and the shell includes an exhaust port, which is used to discharge the gas in the shell.

2. The substrate box storage device according to claim 1, wherein: The purging portion is further configured to: purge toward the sidewall of the substrate box.

3. The substrate box storage device according to claim 1, wherein: The air supply pipeline includes a main pipeline and at least one branch pipeline, a first end of the branch pipeline is communicated with the main pipeline, and a second end of the branch pipeline is communicated with the corresponding purge part.

4. The substrate box storage device according to any one of claims 1 to 3, characterized in that: Each of the purge portions includes a plurality of air outlet holes, at least some of the air outlet holes are configured to discharge air upward, and / or at least some of the air outlet holes are configured to discharge air downward.

5. The substrate box storage device according to claim 4, wherein: The exhaust port is arranged at the upper portion of the shell or at the lower portion of the shell.

6. The substrate box storage device according to claim 5, wherein: It also includes an exhaust unit connected to the exhaust port.

7. The substrate box storage device according to claim 5, wherein: It also includes a fan filter unit, which is arranged opposite to the exhaust port.

8. The substrate box storage device according to any one of claims 1 to 3, characterized in that: The storage rack further includes a rotating shaft passing through the at least one supporting plate for driving the at least one supporting plate to rotate, wherein the interior of the rotating shaft is hollow, and the air supply pipeline is at least partially disposed inside the rotating shaft.

9. A method for operating a substrate box storage device, characterized in that: Applied to the substrate box storage device according to any one of claims 1 to 8, the working method includes: controlling the purging action of the purging portion and the exhaust action of the exhaust port to be performed alternately.

10. A substrate processing device, characterized in that: The substrate box storage device comprises the substrate box storage device according to any one of claims 1 to 8.

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