A quartz boat polishing device

Abstract

The present invention discloses a quartz boat polishing device, which belongs to the field of quartz automatic polishing technology, comprising: a hanger, a cross bar fixedly installed on the upper surface of the hanger, a cross sliding mechanism slidably installed on the outer surface of the cross bar, and a polishing mechanism fixedly installed on the lower surface of the cross sliding mechanism, so that the cross sliding mechanism can push the polishing mechanism jacket to the outer surface of the quartz boat, so that the polishing mechanism performs a horizontal pushing type polishing of the outer surface of the quartz boat. The present application uses the design of the polishing mechanism to automatically adapt to the protrusions and depressions on the outer surface of the quartz boat when polishing the quartz boat. This feature makes the polishing process more precise. No matter how complex the surface shape of the quartz boat is, it can ensure that the polishing mechanism maintains a suitable polishing pressure and contact state with the surface of the quartz boat, effectively avoiding the problem of over-polishing or under-polishing, and greatly improving the polishing accuracy and the quality of the finished product of the quartz boat.

Description

Technical Field

[0001] The invention relates to the technical field of automatic quartz polishing, in particular to a quartz boat polishing device. Background Art

[0002] Quartz boat is a kind of quartz product. Due to the characteristics of quartz, its products are used in a wide range of fields, mainly in the fields of electronics and chemical industry. Quartz boat is mainly used in the production of electronic products, especially the production of electronic chips. In the actual production process, the chip is placed in the quartz boat and then sent to the corresponding equipment for processing. Because it is used in high-precision fields, the quartz boat itself also needs to ensure its smoothness to avoid affecting product production.

[0003] For example, the Chinese patent with announcement number CN220445938U discloses an automatic polishing device for quartz boats, wherein longitudinal guide rails are provided at the top of the processing table and near the edges of both ends, and a mounting frame is slidably connected to the longitudinal guide rails, and the mounting frame is evenly and detachably connected to the side wall opposite to the processing table with three telescopic rods, and the output end of the telescopic rod is detachably connected to a connecting plate, and a grinding wheel is provided on one side of the connecting plate, and a transverse guide rail is provided in the middle of the top side wall of the processing table. The quartz boat to be processed is placed on the placement plate, and then the telescopic rod is started to lower the grinding wheel. When the grinding wheel contacts the quartz boat, the grinding process begins. The entire process does not require manual participation, which can reduce labor costs and avoid problems caused by manual grinding. When high-efficiency grinding is required, the three telescopic rods can be started at the same time to achieve the purpose of simultaneous processing of multiple stations, thereby improving the overall grinding process efficiency.

[0004] However, the above-mentioned automatic polishing equipment for quartz boats cannot perform 360° all-round polishing operations on the quartz boat during the polishing process. Instead, the staff needs to constantly adjust the angle of the quartz boat to achieve polishing of different parts, which increases the manual operation link and reduces the degree of automation of the equipment. In addition, during the polishing process of the quartz boat, it cannot be adaptively adjusted according to the convexities and concavities on the surface of the quartz boat, resulting in uneven polishing. The convex parts may be over-polished, which will damage the surface accuracy of the quartz boat. The concave parts may be under-polished, and the expected polishing effect cannot be achieved, which affects the quality and performance of the quartz boat. Summary of the Invention

[0005] The purpose of the present invention is to provide a quartz boat polishing device to solve the problem raised in the above background technology that the quartz boat cannot be polished 360° in all directions during the polishing process, but requires the staff to constantly adjust the angle of the quartz boat to achieve polishing of different parts, and the quartz boat cannot be adaptively adjusted according to the surface protrusions and depressions of the quartz boat during the polishing process.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] 7. The swiftly and minutely adjusting device for a wood-planer working table as claimed in claim 1, wherein said linking rod and said adjusting base are pivotally connected to each other to form a round shank and a round shank of said tool. said linking rod is pivotally connected to said linking rod and said adjusting base is pivotally connected to said linking rod. said linking rod is pivotally connected to said linking rod

[0008] Preferably, a first motor is fixedly installed on the side of the second connecting plate away from the first turntable, and the output shaft of the first motor rotates through the second connecting plate and is fixedly connected to the second turntable, so that the quartz boat clamped by the first turntable and the second turntable can be rotated by the first motor through the second turntable, and the rotating quartz boat can be fully polished by the polishing mechanism in an all-round 360°.

[0009] Preferably, an arc-shaped bracket is fixedly mounted on one end of the moving block of the linear module, and the other end of the arc-shaped bracket slides through the second connecting plate, so that after the quartz boat is polished, when the linear module pulls out the first turntable, the clamped quartz boat can fall into the arc-shaped bracket for reception.

[0010] Preferably, the cross sliding mechanism includes an L-shaped plate and a first guide bar, the first guide bar is fixedly mounted on the upper surface of the cross bar, and the L-shaped plate is slidably mounted on the outer surface of the first guide bar, a second motor is fixedly mounted on the upper surface of the L-shaped plate, a first gear is fixedly mounted on one end of the output shaft of the second motor, the first gear is meshed with the first rack, and the first rack is fixedly mounted on the upper surface of the cross bar, so that the second motor can drive the L-shaped plate to slide horizontally on the outer surface of the cross bar by driving the first gear to mesh with the first rack.

[0011] Preferably, a third motor is fixedly mounted on the outer surface of the L-shaped plate, a second gear is fixedly mounted on one end of the output shaft of the third motor, the second gear is meshed with the second rack, the second rack is fixedly mounted on a side of the connecting rod away from the cross bar, a second guide bar is fixedly mounted on a side of the connecting rod close to the cross bar, and the connecting rod is slidably mounted on the outer surface of the L-shaped plate through the second guide bar, so that the third motor can drive the connecting rod to slide vertically on one end of the L-shaped plate through the second guide bar by driving the meshing of the second gear and the second rack, and the lower surface of the connecting rod is fixedly connected to the grinding mechanism, so that the vertically sliding connecting rod can cooperate with the horizontally sliding L-shaped plate to enable the grinding mechanism to slide in a cross path.

[0012] Preferably, the grinding mechanism includes a docking plate, the docking plate is fixedly mounted on the lower surface of the connecting rod, a C-shaped plate is welded to both ends of the lower surface of the docking plate, two connecting tubes are rotatably mounted in each of the C-shaped plates, the connecting tubes on the two C-shaped plates are arranged opposite to each other, a fixing rod is fixedly mounted between the connecting tubes on the two C-shaped plates, a connecting disk is rotatably mounted on one end of each connecting tube away from the fixing rod, and a torsion spring is installed inside each connecting tube, a torsion arm at one end of the torsion spring is inserted into the fixing rod, and a torsion arm at the other end of the torsion spring is inserted into the connecting disk, and the torsion spring is used to apply a traction force for inward rotation to the connecting disk;

[0013] A connecting arm is fixedly mounted on each connecting plate, and a movable arm is hingedly connected to one end of the connecting arm away from the connecting plate, and the two movable arms close to the same side of the U-shaped plate are arranged in an inverted V shape.

[0014] Preferably, a Y-shaped frame is fixedly installed at one end of each movable arm away from the connecting arm, and two transmission columns are rotatably installed in each Y-shaped frame. The outer surfaces of the two transmission columns are covered with grinding belts, and the outer surfaces of the grinding belts are elliptical protrusions. A fourth motor is fixedly installed on the outer side of the Y-shaped frame, and the output shaft of the fourth motor rotates through the Y-shaped frame and is fixedly connected to one of the transmission columns, so that the two relative movable arms can drive the grinding belts to touch the two sides of the outer surface of the quartz boat through the applied inward rotating traction force.

[0015] Preferably, a laser distance measuring sensor is installed at an inclined position on the inner end of each movable arm, and the laser emission point of the laser distance measuring sensor is flush with the end of the grinding belt, so that the laser distance measuring sensor can accurately detect the distance between the end of the grinding belt and the quartz boat. The signal emitting end of the laser distance measuring sensor is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric control end of the electric push rod, and the electric push rod is rotatably installed on the outer surface of the C-shaped plate, and the piston rod of the electric push rod is rotatably installed on the side of the movable arm near the upper end.

[0016] Preferably, the movable arm can start the electric push rod by the distance from the quartz boat detected by the laser distance sensor, so that the electric push rod pushes the movable arm to drive the polishing belt to adaptively touch the outer surface of the quartz boat.

[0017] Preferably, the models of the laser ranging sensor and controller are DimetixDAE-10-050 and S7-1200 respectively.

[0018] Preferably, the displacement x(t) of the electric push rod is dynamically adjusted by the following equation:

[0019] ,in:

[0020] d(t) is the distance between the end of the polishing belt and the surface of the quartz boat detected in real time by the laser ranging sensor;

[0021] d set To preset the best grinding distance, set it according to the hardness of the quartz boat material;

[0022] R(t) is the real-time curvature radius of the quartz boat surface, which is calculated by the difference between the distances between adjacent detection points;

[0023] F k is the equivalent elastic force of the torsion spring, which is determined by the spring stiffness coefficient and preload;

[0024] C is the calibration constant, which is calibrated by experiment;

[0025] β is the convergence attenuation coefficient, which is used to suppress oscillations during the regulation process.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] 1. Precise clamping and rotation control:

[0028] Through the linkage of linear modules, dual turntables and motors, the quartz boat can be automatically clamped and rotated at a constant speed, ensuring uniform force during the polishing process, avoiding uneven polishing caused by speed fluctuations, and improving the consistency of the finished product.

[0029] 2. Multi-axis collaborative grinding path planning:

[0030] Based on the cross-slide mechanism and gear rack transmission system, the grinding mechanism controls the compound motion in the horizontal (X-axis) and vertical directions (Y-axis). Combined with the rotation of the quartz boat (Z-axis), a three-dimensional dynamic grinding path is formed, covering the entire area of the quartz boat surface, eliminating grinding blind spots, and adapting to complex curved surface structures.

[0031] 3. Adaptive pressure closed-loop regulation:

[0032] The closed-loop feedback system integrates a laser distance sensor and an electric push rod to monitor the distance between the grinding belt and the quartz boat surface in real time, dynamically adjust the fitting pressure, avoid overpressure damage or insufficient grinding caused by underpressure, and ensure uniform grinding of complex surfaces (such as protrusions and depressions).

[0033] 4. Efficient automation and flexible adaptation:

[0034] The entire process is automated (clamping → rotation → path planning → pressure regulation → dynamic polishing), which supports the rapid switching of quartz boats of different specifications without manual intervention, greatly improving efficiency. It is also compatible with diverse production needs and effectively increases equipment utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a schematic diagram of the overall structure of the quartz boat polishing equipment of the present invention;

[0036] Figure 2 This is a structural diagram of the cross sliding mechanism of the present invention driving the polishing mechanism to perform transverse polishing on the quartz boat;

[0037] Figure 3 It is a structural schematic diagram of the second motor and the first gear of the present invention;

[0038] Figure 4 This is a schematic structural diagram of the third motor and the second gear of the present invention;

[0039] Figure 5 It is a structural schematic diagram of the grinding mechanism of the present invention;

[0040] Figure 6 for Figure 5 A magnified view of part A;

[0041] Figure 7 Schematic diagram of the structure of the electric push rod of the present invention;

[0042] Figure 8 It is a schematic structural diagram of the grinding belt and laser ranging sensor of the present invention.

[0043] In the figure: 1. Hanger; 101. Crossbar; 102. Linear module; 103. First connecting plate; 104. First turntable; 105. Arc bracket; 106. Second connecting plate; 107. Second turntable; 108. First motor; 2. Cross sliding mechanism; 201. First rack; 202. L-shaped plate; 203. Second motor; 204. First gear; 205. Third motor; 206. First guide rail; 207. Connecting rod; 2 08. Second rack; 209. Second gear; 210. Second guide rail; 3. Grinding mechanism; 301. Docking plate; 302. U-shaped plate; 303. Connecting pipe; 304. Torsion spring; 305. Movable arm; 306. Electric push rod; 307. Y-shaped frame; 308. Fourth motor; 309. Laser ranging sensor; 310. Grinding belt; 311. Transmission column; 312. Connecting plate; 313. Fixing rod; 314. Connecting arm. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0045] See also Figure 1-Figure 7 , this embodiment provides the following technical solutions:

[0046] like Figure 1-Figure 2 As shown, a quartz boat polishing device includes: a hanger 1, a cross bar 101 is fixedly installed on the upper surface of the hanger 1, a cross sliding mechanism 2 is slidably installed on the outer surface of the cross bar 101, and a polishing mechanism 3 is fixedly installed on the lower surface of the cross sliding mechanism 2, so that the cross sliding mechanism 2 can push the polishing mechanism 3 to be clamped on the outer surface of the quartz boat, so that the polishing mechanism 3 performs a horizontal pushing method to polish the outer surface of the quartz boat, and the quartz boat is clamped in it by the first turntable 104 and the second turntable 107, and the first turntable 104 is rotatably installed on the first turntable 107. On one side of the upper part of the connecting plate 103, the first connecting plate 103 is fixedly mounted on the upper surface of the moving block of the linear module 102, and the linear module 102 is fixedly mounted at the center of the inner lower surface of the hanger 1, and the second turntable 107 is rotatably mounted on the upper part of the second connecting plate 106 on the side facing the first turntable 104, and the second connecting plate 106 is fixedly mounted on the upper surface of the linear module 102, so that the linear module 102 can push the first connecting plate 103 through the moving block to clamp the quartz boat between the first turntable 104 and the second turntable 107.

[0047] A first motor 108 is fixedly installed on the side of the second connecting plate 106 away from the first turntable 104, and the output shaft of the first motor 108 rotates through the second connecting plate 106 and is fixedly connected to the second turntable 107, so that the quartz boat clamped by the first turntable 104 and the second turntable 107 can be rotated by the first motor 108 through the second turntable 107, and the rotating quartz boat can be fully polished by the polishing mechanism 3 in an all-round 360°.

[0048] An arc-shaped bracket 105 is fixedly mounted on one end of the moving block of the linear module 102, and the other end of the arc-shaped bracket 105 slides through the second connecting plate 106, so that after the quartz boat is polished, when the linear module 102 pulls out the first turntable 104, the clamped quartz boat can fall into the arc-shaped bracket 105 for reception.

[0049] Through the design of the crossbar 101, the linear module 102, the first motor 108, the first turntable 104, the second turntable 107, the arc bracket 105, the cross sliding mechanism 2 and the grinding mechanism 3, when in use, the quartz boat to be clamped can be supported between the first turntable 104 and the second turntable 107, and then the linear module 102 can be started to push the first connecting plate 103 through the moving block to drive the first turntable 104 to slide toward the second turntable 107 until the quartz boat is clamped between the first turntable 104 and the second turntable 107. It can then stop, and then the first motor 108 can be started to drive The second turntable 107 rotates, and then drives the quartz boat clamped therebetween to rotate at a set speed to ensure uniform grinding. Then, the cross sliding mechanism 2 and the grinding mechanism 3 can be opened, and the grinding mechanism 3 can be opened to the maximum extent, so that it is driven by the cross sliding mechanism 2 started together to be sleeved on the two ends of the outer surface of the quartz boat. As the grinding mechanism 3 can be started again to gradually reduce the distance, until the grinding mechanism 3 can independently detect the distance from the quartz boat, then the grinding mechanism 3 can automatically adjust according to the detected distance and press on the two ends of the outer surface of the quartz boat, and as the quartz boat The rotation of the grinding mechanism 3 can make the grinding mechanism 3 monitor the distance from the quartz boat in real time, so that it can automatically adapt to the convexity and concaveness of the outer surface of the quartz boat. This feature makes the grinding process more accurate. No matter how complex the surface shape of the quartz boat is, it can ensure that the grinding mechanism 3 maintains a suitable grinding pressure and contact state with the surface of the quartz boat, effectively avoiding the problem of over-grinding or under-grinding, greatly improving the grinding accuracy and the quality of the finished product of the quartz boat. Then, while the grinding mechanism 3 is grinding the quartz boat, the cross sliding mechanism 2 started at the same time can drive the grinding mechanism 3 to grind the outer surface of the quartz boat. Lateral movement realizes all-round and dead-angle-free grinding of the surface of the quartz boat, so that the grinding mechanism 3 can flexibly cover different positions of the quartz boat, and can adjust the grinding path and range according to the shape, size and grinding requirements of the quartz boat. This design not only improves the grinding efficiency, but also enhances the adaptability of the equipment to quartz boats of different specifications and shapes, expands the applicable scope of the equipment, and meets diversified production needs. After the grinding of the quartz boat is completed, the linear module 102 can be started again to pull out the first turntable 104, so that the clamped quartz boat can fall into the arc-shaped bracket 105 and be received.

[0050] like Figure 3-Figure 4As shown, the cross sliding mechanism 2 includes an L-shaped plate 202 and a first guide bar 206. The first guide bar 206 is fixedly mounted on the upper surface of the cross bar 101, and the L-shaped plate 202 is slidably mounted on the outer surface of the first guide bar 206. A second motor 203 is fixedly mounted on the upper surface of the L-shaped plate 202, and a first gear 204 is fixedly mounted on one end of the output shaft of the second motor 203. The first gear 204 is meshed with the first rack 201, and the first rack 201 is fixedly mounted on the upper surface of the cross bar 101, so that the second motor 203 can drive the L-shaped plate 202 to slide horizontally on the outer surface of the cross bar 101 by driving the first gear 204 to mesh with the first rack 201.

[0051] A third motor 205 is fixedly mounted on the outer surface of the L-shaped plate 202, and a second gear 209 is fixedly mounted on one end of the output shaft of the third motor 205. The second gear 209 meshes with the second rack 208, and the second rack 208 is fixedly mounted on the side of the connecting rod 207 away from the cross bar 101. A second guide bar 210 is fixedly mounted on the side of the connecting rod 207 close to the cross bar 101, and the connecting rod 207 is slidably mounted on the outer surface of the L-shaped plate 202 through the second guide bar 210, so that the third motor 205 can drive the connecting rod 207 to slide vertically on one end of the L-shaped plate 202 through the second guide bar 210 by driving the second gear 209 to mesh with the second rack 208, and the lower surface of the connecting rod 207 is fixedly connected to the grinding mechanism 3, so that the vertically sliding connecting rod 207 can cooperate with the horizontally sliding L-shaped plate 202 to enable the grinding mechanism 3 to slide in a cross direction.

[0052] By designing the second motor 203, the third motor 205, the first gear 204, the second gear 209, the first rack 201, the second rack 208, the L-shaped plate 202 and the connecting rod 207, the quartz boat is clamped between the first turntable 104 and the second turntable 107 and driven to rotate, and then the second motor 203 can be started to drive the first gear 204 and the first rack 201 to engage with each other. According to the gear and rack transmission principle, the rotation of the first gear 204 will be converted into a linear motion along the direction of the first rack 201. Therefore, the first gear 204 rolls on the first rack 201, thereby driving the L-shaped plate 202 on the outer surface of the first guide bar 206 to slide horizontally on the outer surface of the cross bar 101. By controlling the forward and reverse rotation and the speed of the second motor 203, the sliding direction and speed of the L-shaped plate 202 can be accurately controlled until it is The polishing mechanism 3 moves to the target position in the horizontal direction of the outer surface of the quartz boat. After the L-shaped plate 202 completes the horizontal positioning, the third motor 205 can be started to drive the second gear 209 to engage with the second rack 208. Also based on the gear rack transmission principle, the connecting rod 207 slides vertically on one end of the L-shaped plate 202 through the second guide bar 210, so that the connecting rod 207 can drive the unfolded polishing mechanism 3 to move vertically downward and be mounted on the outer surface of the quartz boat. By controlling the operation of the second motor 203 and the third motor 205 respectively, the horizontal sliding of the L-shaped plate 202 and the vertical sliding of the connecting rod 207 cooperate with each other to realize the flexible path sliding of the polishing mechanism 3 in the cross direction. In this way, the polishing mechanism 3 can accurately move to any position on the outer surface of the quartz boat and prepare for subsequent polishing operations.

[0053] like Figure 5-Figure 7 As shown, the grinding mechanism 3 includes a docking plate 301, which is fixedly mounted on the lower surface of the connecting rod 207. A U-shaped plate 302 is welded to both ends of the lower surface of the docking plate 301. Two connecting tubes 303 are rotatably mounted in each U-shaped plate 302. The connecting tubes 303 on the two U-shaped plates 302 are arranged opposite to each other. A fixing rod 313 is fixedly mounted between the connecting tubes 303 on the two U-shaped plates 302. A connecting disk 312 is rotatably mounted on the end of each connecting tube 303 away from the fixing rod 313, and each A torsion spring 304 is installed inside each connecting tube 303. The torsion arm at one end of the torsion spring 304 is inserted into the fixed rod 313, and the torsion arm at the other end of the torsion spring 304 is inserted into the connecting disk 312. The torsion spring 304 is used to apply a traction force to the connecting disk 312 to rotate inward; a connecting arm 314 is fixedly installed on each connecting disk 312, and a movable arm 305 is hinged at the end of the connecting arm 314 away from the connecting disk 312. The two movable arms 305 on the same side of the U-shaped plate 302 are arranged in an inverted V shape.

[0054] A Y-shaped frame 307 is fixedly mounted on one end of each movable arm 305 away from the connecting arm, and two transmission columns 311 are rotatably mounted in each Y-shaped frame 307. The outer surfaces of the two transmission columns 311 are covered with a polishing belt 310, and the outer surface of the polishing belt 310 is in the shape of an elliptical protrusion. A fourth motor 308 is fixedly mounted on the outer side of the Y-shaped frame 307. The output shaft of the fourth motor 308 rotates through the Y-shaped frame 307 and is fixedly connected to one of the transmission columns 311. In this way, the two opposing movable arms 305 can drive the polishing belt 310 to contact the two sides of the outer surface of the quartz boat through the applied inward rotation traction.

[0055] A laser distance sensor 309 is installed at an inclined position on the inner end of each movable arm 305. The laser emission point of the laser distance sensor 309 is flush with the end of the grinding belt 310, so that the laser distance sensor 309 can accurately detect the distance between the end of the grinding belt 310 and the quartz boat. The signal transmitting end of the laser distance sensor 309 is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric control end of the electric push rod 306. The electric push rod 306 is rotatably installed on the outer surface of the U-shaped plate 302, and the piston rod of the electric push rod 306 is rotatably installed on the side of the movable arm 305 near the upper end.

[0056] This allows the movable arm 305 to activate the electric push rod 306 based on the distance from the quartz boat detected by the laser distance sensor 309. This push rod 306 pushes the movable arm 305, driving the polishing belt 310 to adaptively contact the outer surface of the quartz boat. The laser distance sensor 309 and controller are Dimetix DAE-10-050 and S7-1200, respectively.

[0057] Through the design of the C-shaped plate 302, the connecting tube 303, the torsion spring 304, the movable arm 305, the electric push rod 306, the Y-shaped frame 307, the fourth motor 308, the laser ranging sensor 309 and the polishing belt 310, when polishing the quartz boat, the electric push rod 306 can be started first to pull the movable arm 305 to flip outward in the C-shaped plate 302, and then the movable arm 305 can drive the polishing belt 310 installed in the Y-shaped frame 307 to flip outward and unfold. In the process of being driven to flip, the movable arm 305 will also twist the torsion spring 304 set in the connecting tube 303, and then the second motor 203 can be started to drive the docking plate 301 fixedly connected to the lower surface of the connecting rod 207 to move vertically downward, and the lower surface of the docking plate 301 is fixedly installed with a C-shaped The plate 302 can be used to make the docking plate 301 drive the movable arm 305 and the polishing belt 310 to be turned over and expanded and to be mounted on both ends of the outer surface of the quartz boat. Then, the fourth motor 308 can be started to drive the polishing belt 310 mounted on the outer surface of the transmission column 311 for transmission. Then, the electric push rod 306 and the laser distance sensor 309 can be started again. The started electric push rod 306 can push the movable arm 305 to turn inward in the U-shaped plate 302, so that the movable arm 305 can drive the polishing belt 310 to turn inward. The started laser distance sensor 309 can be driven to turn inward together with the movable arm 305. When the laser distance sensor 309 turns inward with the movable arm 305, it will continue to emit laser beams to the surface of the quartz boat. The distance between the end of the polishing belt 310 and the surface of the quartz boat is measured in real time. When the distance data is transmitted to the controller, the controller will immediately compare the measured value with the preset optimal polishing distance parameter. If it is detected that the distance is greater than the set value, it indicates that the polishing belt 310 has not yet been fitted in place. The controller will quickly send an extension command to the electric push rod 306. After the electric push rod 306 receives the signal, the piston rod extends forward, pushing the movable arm 305 to further flip inward in the U-shaped plate 302, so that the polishing belt 310 is closely fitted to the surface of the quartz boat under the auxiliary traction of the torsion spring 304. If the distance is less than the set value, the controller controls the electric push rod 306 to retract, driving the movable arm 305 to fine-tune outward to avoid excessive polishing pressure and damage to the quartz boat. Through this closed-loop feedback Feedback mechanism, the grinding belt 310 can accurately adapt to the subtle undulations on the surface of the quartz boat, ensuring that the grinding pressure is always in the optimal state. After the grinding belt 310 is attached to the surface of the quartz boat, the fourth motor 308 continuously drives the transmission column 311 to rotate at a high speed, driving the grinding belt 310 to run at a constant linear speed, and using the elliptical convex structure on its surface to efficiently grind the quartz boat. At the same time, the equipment starts the first motor 108 to drive the quartz boat to rotate at a set speed, and cooperates with the second motor 203 and the third motor 205 to make the grinding mechanism 3 perform a compound motion along the axial and circumferential directions of the quartz boat. During this process, the laser ranging sensor 309 always maintains real-time monitoring. Once it detects that the spacing changes due to irregularities on the surface of the quartz boat, such as convexities or concaveness,The new data is immediately fed back to the controller, which then adjusts the extension and contraction of the electric push rod 306 and dynamically adjusts the contact angle and pressure of the polishing belt 310 to ensure that the polishing belt 310 always maintains stable contact with the surface of the quartz boat, thus achieving uniform polishing of complex curved surfaces.

[0058] The displacement x(t) of the electric push rod 306 is dynamically adjusted by the following equation:

[0059] ,in:

[0060] d(t) is the distance between the end of the polishing belt 310 and the surface of the quartz boat detected in real time by the laser ranging sensor 309;

[0061] d set To preset the best grinding distance, set it according to the hardness of the quartz boat material;

[0062] R(t) is the real-time curvature radius of the quartz boat surface, which is calculated by the difference between the distances between adjacent detection points;

[0063] F k is the equivalent elastic force of the torsion spring 304, which is determined by the spring stiffness coefficient and the preload force;

[0064] C is the calibration constant, which is calibrated through experiments; β is the convergence attenuation coefficient, which is used to suppress oscillations during the adjustment process and has a value range of 0.03≤β≤0.07.

[0065] For example:

[0066] 1. Initialization parameters: set d set =0.5mm, C=2.0, β=0.05;

[0067] 2. Real-time monitoring: The laser ranging sensor measures d(t) = 0.8 mm and the surface curvature radius R(t) = 10 mm;

[0068] 3. Calculation ;

[0069] 4. Substitute into the equation:

[0070] ;

[0071] 5. Execute adjustment: The controller drives the electric push rod to extend 0.00197mm, reducing the gap to the target value.

[0072] Technical effects:

[0073] Curvature adaptive adjustment: By introducing the surface curvature R(t), the response speed is dynamically adjusted to adapt the grinding pressure to the concave and convex surface, with an adjustment accuracy of ±0.01mm;

[0074] Nonlinear convergence optimization: The exponential decay term automatically suppresses overshoot according to the deviation size, significantly shortening the system convergence time;

[0075] Energy consumption reduction: Compared with traditional PID control, the spring force F k The introduction of reduces the invalid stroke of the electric push rod and effectively reduces energy consumption.

[0076] During the polishing process, the controller collects d(t) in real time through the laser ranging sensor, and the surface curvature R(t) is obtained by calculating the difference between the distances between adjacent points. Then, it is substituted into the equation to calculate the displacement of the electric push rod x(t), and the movable arm 305 is driven to adjust the fitting pressure of the polishing belt 310. The laser ranging continues to provide feedback until d(t) stabilizes at d set Dynamic correction within a ±0.02mm range, with parameters updated every 10ms, ensures real-time response to surface changes. For example, when a bump is detected (R(t) = 5mm), C / R(t) increases, accelerating the actuator's response. When the gap deviation decreases, an exponential term suppresses the adjustment amplitude to ensure stable fit.

[0077] Example verification:

[0078] Test scenario: polishing a quartz boat with protrusions (R=5mm) and depressions (R=20mm);

[0079] Result comparison: Compared with traditional PID control, the surface roughness (Ra) after adjustment of this equation is reduced by 18% and the grinding time is reduced by 25%.

[0080] According to the above technical solution, the working steps of this solution are summarized and sorted out: when polishing the quartz boat, the quartz boat to be clamped can be supported between the first turntable 104 and the second turntable 107, and then the linear module 102 can be started to push the first connecting plate 103 through the moving block to drive the first turntable 104 to slide toward the second turntable 107 until the quartz boat is clamped between the first turntable 104 and the second turntable 107. It can then stop, and then the first motor 108 can be started to drive the second turntable 107 to rotate, thereby driving the quartz boat clamped therebetween to rotate at a set speed. Then the electric push rod 306 can be started to pull the movable arm 305 to flip outward in the U-shaped plate 302, so that the movable arm 305 can drive the Y-shaped frame 307 to rotate. The transmission-mounted grinding belt 310 flips outward and unfolds, and the movable arm 305 is driven to flip and twists the torsion spring 304 provided in the connecting tube 303 together, and then the second motor 203 is started to drive the first gear 204 to engage with the first rack 201. According to the gear and rack transmission principle, the rotation of the first gear 204 is converted into a linear motion along the direction of the first rack 201. Therefore, the first gear 204 rolls on the first rack 201, thereby driving the L-shaped plate 202 on the outer surface of the first guide bar 206 to slide horizontally on the outer surface of the cross bar 101. By controlling the forward and reverse rotation and speed of the second motor 203, the sliding direction and speed of the L-shaped plate 202 can be accurately controlled until the movable arm 305 is moved To the target position in the horizontal direction of the outer surface of the quartz boat, and after the L-shaped plate 202 completes the horizontal positioning, the third motor 205 can be started to drive the second gear 209 to engage with the second rack 208. Also based on the gear rack transmission principle, the connecting rod 207 is made to slide vertically on one end of the L-shaped plate 202 through the second guide bar 210, so that the connecting rod 207 can drive the unfolded movable arm 305 and the polishing belt 310 to move vertically downward and be mounted on both ends of the outer surface of the quartz boat. Then, the fourth motor 308 can be started to drive the polishing belt 310 mounted on the outer surface of the transmission column 311 for transmission, and then the electric push rod 306 and the laser ranging sensor 309 can be started again, and the started electric push rod 306 can push the movable arm 305 The movable arm 305 rotates inwards, causing the polishing belt 310 to rotate inwards. The activated laser distance sensor 309 can be driven to rotate inwards along with the movable arm 305. When the laser distance sensor 309 rotates inwards along with the movable arm 305, it will continue to emit a laser beam to the surface of the quartz boat and measure the distance between the end of the polishing belt 310 and the surface of the quartz boat in real time. When the distance data is transmitted to the controller, the controller will immediately compare the measured value with the preset optimal polishing distance parameter. If it is detected that the distance is greater than the set value, it indicates that the polishing belt 310 has not yet been fitted in place. The controller will quickly send an extension command to the electric push rod 306. After the electric push rod 306 receives the signal, the piston rod extends forward.The movable arm 305 is pushed to further turn inward within the U-shaped plate 302, so that the polishing belt 310 is closely attached to the surface of the quartz boat under the auxiliary traction of the torsion spring 304. If the distance is less than the set value, the controller controls the electric push rod 306 to retract, driving the movable arm 305 to fine-tune outward to avoid excessive polishing pressure from damaging the quartz boat. After the polishing belt 310 is attached to the surface of the quartz boat, the fourth motor 308 continuously drives the transmission column 311 to rotate at a high speed, driving the polishing belt 310 to run at a constant linear speed, thereby achieving the desired effect. The quartz boat is efficiently ground using the elliptical raised structure on its surface. At the same time, the second motor 203 and the third motor 205 control the horizontal sliding of the L-shaped plate 202 and the vertical sliding of the connecting rod 207 in a set path, respectively, to cooperate with each other to drive the grinding belt 310 to perform a compound motion along the axial and circumferential directions of the quartz boat in the cross direction. During this process, the laser ranging sensor 309 always maintains real-time monitoring. Once it detects that the spacing changes due to irregularities on the surface of the quartz boat, such as protrusions or depressions, it immediately feeds back the new data to the controller, so that the controller immediately adjusts the extension and contraction amount of the electric push rod 306 and dynamically adjusts the fitting angle and pressure of the grinding belt 310 to ensure that the grinding belt 310 always maintains stable contact with the surface of the quartz boat, thereby achieving uniform grinding of complex curved surfaces. When the quartz boat completes the predetermined grinding process, the controller first controls the fourth motor 308 to stop running, so that the grinding belt 310 stops rotating. Then, the controller sends a command to the electric push rod 306 to pull the movable arm 305 outward. The polishing belt 310 gradually detaches from the surface of the quartz boat under the combined action of the electric push rod 306 and the torsion spring 304. Meanwhile, the laser distance sensor 309 continuously monitors the distance change to ensure a smooth and collision-free detachment process. Finally, the second motor 203 and the third motor 205 drive the movable arm 305 to its initial position. The linear module 102 drives the first turntable 104 to release the quartz boat. The polished quartz boat falls into the curved bracket 105, and the entire equipment enters standby mode, awaiting the next polishing task.

[0081] In summary: the quartz boat polishing equipment can automatically adapt to the protrusions and depressions on the outer surface of the quartz boat when polishing the quartz boat. This feature makes the polishing process more precise. No matter how complex the surface shape of the quartz boat is, it can ensure that the polishing mechanism 3 maintains appropriate polishing pressure and contact state with the surface of the quartz boat, effectively avoiding the problem of over-polishing or under-polishing, and greatly improving the polishing accuracy and the quality of the finished product of the quartz boat.

[0082] Parts not described in the present invention are the same as those in the prior art or can be implemented using the prior art. Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz boat polishing device, characterized in that: include: A hanger (1) is provided, wherein a crossbar (101) is fixedly mounted on the upper surface of the hanger (1), a cross sliding mechanism (2) is slidably mounted on the outer surface of the crossbar (101), and a grinding mechanism (3) is fixedly mounted on the lower surface of the cross sliding mechanism (2), so that the cross sliding mechanism (2) can push the grinding mechanism (3) to be clamped on the outer surface of the quartz boat, so that the grinding mechanism (3) performs a horizontal pushing-type grinding on the outer surface of the quartz boat, and the quartz boat is clamped therein by a first turntable (104) and a second turntable (107), wherein the first turntable (104) is rotatably mounted on the first connecting plate (103). ) on one side of the upper part, the first connecting plate (103) is fixedly mounted on the upper surface of the moving block of the linear module (102), the linear module (102) is fixedly mounted at the center of the inner lower surface of the hanger (1), the second turntable (107) is rotatably mounted on the upper part of the second connecting plate (106) on the side facing the first turntable (104), the second connecting plate (106) is fixedly mounted on the upper surface of the linear module (102), thereby enabling the linear module (102) to push the first connecting plate (103) through the moving block to clamp the quartz boat between the first turntable (104) and the second turntable (107); The grinding mechanism (3) includes a docking plate (301), the docking plate (301) is fixedly mounted on the lower surface of the connecting rod (207), and a C-shaped plate (302) is welded to both ends of the lower surface of the docking plate (301), and two connecting tubes (303) are rotatably mounted in each of the C-shaped plates (302). The connecting tubes (303) on the two C-shaped plates (302) are arranged opposite to each other, and a fixing rod (31) is fixedly mounted between the connecting tubes (303) on the two C-shaped plates (302). 3) A connecting disk (312) is rotatably mounted on one end of each connecting tube (303) away from the fixing rod (313), and a torsion spring (304) is mounted inside each connecting tube (303), a torsion arm at one end of the torsion spring (304) is inserted into the fixing rod (313), and a torsion arm at the other end of the torsion spring (304) is inserted into the connecting disk (312), and the torsion spring (304) is used to apply an inward rotational traction force to the connecting disk (312); A connecting arm (314) is fixedly mounted on each connecting disk (312), and a movable arm (305) is hingedly connected to one end of the connecting arm (314) away from the connecting disk (312), and the two movable arms (305) on the same side of the U-shaped plate (302) are arranged in an inverted V shape; A Y-shaped frame (307) is fixedly mounted on one end of each movable arm (305) away from the connecting arm (314), two transmission columns (311) are rotatably mounted in each Y-shaped frame (307), a grinding belt (310) is sleeved on the outer surface of the two transmission columns (311), and the outer surface of the grinding belt (310) is in the shape of an elliptical protrusion, a fourth motor (308) is fixedly mounted on the outer side surface of the Y-shaped frame (307), and the output shaft of the fourth motor (308) rotates through the Y-shaped frame (307) and is fixedly connected to one of the transmission columns (311), so that the two opposite movable arms (305) can drive the grinding belt (310) to touch the two sides of the outer surface of the quartz boat through the applied inward rotating traction force; A laser distance sensor (309) is installed in an inclined manner at one end of the inner side of each movable arm (305). The laser emission point of the laser distance sensor (309) is flush with the end of the grinding belt (310), so that the laser distance sensor (309) can accurately detect the distance between the end of the grinding belt (310) and the quartz boat. The signal emission end of the laser distance sensor (309) is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric control end of the electric push rod (306). The electric push rod (306) is rotatably installed on the outer surface of the U-shaped plate (302), and the piston rod of the electric push rod (306) is rotatably installed on the side of the movable arm (305) near the upper end.

2. The quartz boat polishing device according to claim 1, characterized in that: A first motor (108) is fixedly mounted on a side of the second connecting plate (106) away from the first turntable (104), and an output shaft of the first motor (108) rotates through the second connecting plate (106) and is fixedly connected to the second turntable (107), thereby enabling the quartz boat clamped by the first turntable (104) and the second turntable (107) to rotate driven by the first motor (108) through the second turntable (107), and the rotating quartz boat can be fully polished by the polishing mechanism (3) in an all-round manner of 360°.

3. The quartz boat polishing device according to claim 1, characterized in that: An arc-shaped bracket (105) is fixedly mounted on one end of the moving block of the linear module (102), and the other end of the arc-shaped bracket (105) slides through the second connecting plate (106), so that after the quartz boat is polished, when the linear module (102) pulls out the first turntable (104), the clamped quartz boat can fall into the arc-shaped bracket (105) for reception.

4. The quartz boat polishing device according to claim 1, characterized in that: The cross sliding mechanism (2) comprises an L-shaped plate (202) and a first guide bar (206), wherein the first guide bar (206) is fixedly mounted on the upper surface of the cross bar (101), and the L-shaped plate (202) is slidably mounted on the outer surface of the first guide bar (206). A second motor (203) is fixedly mounted on the upper surface of the L-shaped plate (202), and a first gear (204) is fixedly mounted on one end of the output shaft of the second motor (203). The first gear (204) is meshed with a first rack (201), and the first rack (201) is fixedly mounted on the upper surface of the cross bar (101), thereby enabling the second motor (203) to drive the L-shaped plate (202) to slide horizontally on the outer surface of the cross bar (101) by driving the first gear (204) to mesh with the first rack (201).

5. The quartz boat polishing device according to claim 4, characterized in that: A third motor (205) is fixedly mounted on the outer surface of the L-shaped plate (202), a second gear (209) is fixedly mounted on one end of the output shaft of the third motor (205), the second gear (209) is meshed with a second rack (208), the second rack (208) is fixedly mounted on a side of the connecting rod (207) away from the cross bar (101), a second guide bar (210) is fixedly mounted on a side of the connecting rod (207) close to the cross bar (101), and the connecting rod (207) is slidably mounted on the second guide bar (210). The third motor (205) is mounted on the outer surface of the L-shaped plate (202), so that the connecting rod (207) that drives the second gear (209) and the second rack (208) to engage with each other and slide vertically on one end of the L-shaped plate (202) through the second guide rail (210). The lower surface of the connecting rod (207) is fixedly connected to the grinding mechanism (3), so that the connecting rod (207) that slides vertically can cooperate with the L-shaped plate (202) that slides horizontally to make the grinding mechanism (3) slide in a cross direction.

6. The quartz boat polishing device according to claim 1, characterized in that: The movable arm (305) can activate the electric push rod (306) through the distance from the quartz boat detected by the laser distance sensor (309), so that the electric push rod (306) pushes the movable arm (305) to drive the polishing belt (310) to adaptively touch the outer surface of the quartz boat.

7. The quartz boat polishing device according to claim 6, characterized in that: The displacement x(t) of the electric push rod (306) is dynamically adjusted by the following equation: ,in: d(t) is the distance between the end of the polishing belt (310) and the surface of the quartz boat detected in real time by the laser distance sensor (309); d set To preset the best grinding distance; R(t) is the real-time curvature radius of the quartz boat surface; F k is the equivalent elastic force of the torsion spring (304); C is the calibration constant; β is the convergence attenuation coefficient.

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