Extreme ultraviolet light output control system, control method and computer equipment

Abstract

The invention relates to the technical field of extreme ultraviolet light output, in particular to an extreme ultraviolet light output control system, a control method and computer equipment. The control system comprises an energy supply circuit, a first coupling unit, a magnetic pulse compression circuit, a second coupling unit, a gas chamber and a detection unit. The input end of the first coupling unit is connected with the output end of the energy supply circuit, the output end of the first coupling unit, the magnetic pulse compression circuit and the input end of the second coupling unit are sequentially connected, the output end of the second coupling unit is a current output end, and the output end of the second coupling unit and at least part of the detection unit are arranged in the gas chamber; the energy supply circuit is used for generating a high-current pulse capable of forming plasma after providing current and voltage, and the plasma outputs extreme ultraviolet light under continuous pinch of the high-current pulse; the detection unit generates a feedback signal, and the energy supply circuit adjusts the provided current and voltage based on the feedback signal so as to optimize the extreme ultraviolet light. The problem that the quality of the output extreme ultraviolet light is poor when the extreme ultraviolet light source is generated is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of extreme ultraviolet light output, and particularly to an extreme ultraviolet light output control system, a control method, and a computer device.

Background Art

[0002] As one of the important pillar devices for the development of the integrated circuit industry, a lithography machine is the main technical support for the development of the entire semiconductor industry. With the development of lithography technology, extreme ultraviolet lithography (EUV for short) has become the consensus in the semiconductor industry. As a potential extreme ultraviolet light generation mechanism, the electrodeless pinch (Z-pinch for short) device can generate an extreme ultraviolet light source, which reduces the requirements for the discharge device compared with other generation mechanisms and has high spatial stability and temporal stability.

[0003] During the energy input process of the electrodeless pinch device, it is usually very difficult to control the plasma loop current. Specifically, during the process of the electrodeless pinch device generating an extreme ultraviolet light source by pinch, it is difficult to adjust the power supply according to the actual situation to output better-quality extreme ultraviolet light.

Summary of the Invention

[0004] In order to solve the problem that it is difficult to adjust the power supply according to the actual situation to output better-quality extreme ultraviolet light during the process of the electrodeless pinch device generating an extreme ultraviolet light source by pinch, the present invention provides an extreme ultraviolet light output control system, a control method, and a computer device.

[0005] To solve the above technical problems, the present invention provides the following technical solution: An extreme ultraviolet light output control system for optimizing the output extreme ultraviolet light, the control system includes an energy supply circuit, a first coupling unit, a magnetic pulse compression circuit, a second coupling unit, a gas chamber, and a detection unit;

[0006] The input end of the first coupling unit is connected to the output end of the energy supply circuit, and its output end, the magnetic pulse compression circuit, and the input end of the second coupling unit are connected in sequence. The output end of the second coupling unit is the current output end, and the output end of the second coupling unit and at least part of the detection unit are both arranged in the gas chamber;

[0007] The energy supply circuit is used to provide current and voltage. The current and voltage are coupled by the first coupling unit and then transmitted to the magnetic pulse compression circuit to generate a high-current pulse. The gas in the gas chamber forms a plasma under the high-current pulse, and the plasma outputs extreme ultraviolet light under the continuous pinch of the high-current pulse;

[0008] The detection unit detects the plasma current in the gas chamber, or detects the plasma density and plasma temperature to generate a feedback signal, and the power supply circuit adjusts the supplied current and voltage based on the feedback signal to optimize the output extreme ultraviolet light.

[0009] Preferably, the first coupling unit includes a coupled first coil and second coil, and the second coupling unit includes a coupled third coil and equivalent coil; the output end of the power supply circuit is connected to the first coil, the first coil and the second coil are coupled and connected, the second coil, the magnetic pulse compression circuit and the third coil are connected in series in sequence, the third coil and the equivalent coil are coupled and connected, and the third coil is the current output end.

[0010] Preferably, the power supply circuit includes a power supply, a control switch and a protection capacitor; the control switch is connected in parallel with the power supply; the power supply, the first coil and the protection capacitor are connected in series in sequence to form a closed loop.

[0011] Preferably, the magnetic pulse compression circuit includes a charging capacitor and a magnetic switch, and the magnetic switch includes an input end and an output end; after the second coil is connected in parallel with the charging capacitor, one end thereof is connected in series with the input end of the magnetic switch, and the other end is connected to one end of the third coil; the output end of the magnetic switch is connected to the other end of the third coil.

[0012] Preferably, the magnetic pulse compression circuit is provided with at least two, and at least two of the magnetic pulse compression circuits are connected in parallel in sequence at both ends of the second coil.

[0013] Preferably, the detection unit includes a detection module, a signal receiving module, a signal processing module and an execution module that are electrically connected in sequence;

[0014] The detection module is used to detect the plasma current, or detect the plasma density and plasma temperature to generate detection information, the signal receiving module is used to receive the detection information and deliver the detection information to the signal processing module, the signal processing module is used to process the detection information to generate a feedback signal, and the execution module is used to adjust the current and voltage of the power supply circuit based on the feedback signal.

[0015] Preferably, the detection unit is a Rogowski coil and / or a spectral diagnostic instrument.

[0016] To solve the above technical problems, the present invention provides another technical solution as follows: An extreme ultraviolet light output control method, which is applied to the above-mentioned extreme ultraviolet light output control system, and the method includes the following steps:

[0017] Provide current and voltage;

[0018] Magnetically pulse-compress the current and voltage to generate a high-current pulse;

[0019] Ionize a preset gas by the action of the high-current pulse to form a plasma, wherein the plasma outputs extreme ultraviolet light under continuous pinch of the high-current pulse;

[0020] The plasma outputs extreme ultraviolet light under continuous pinch of the high-current pulse;

[0021] Detect the current of the plasma and / or the plasma density and plasma temperature to generate a feedback signal;

[0022] Adjust the current and voltage based on the feedback signal to optimize the output extreme ultraviolet light.

[0023] Preferably, generating the feedback signal specifically includes:

[0024] Detect the current of the plasma to obtain a first detection value and / or detect the plasma density and plasma temperature to obtain a second detection value;

[0025] Judge whether the first detection value and / or the second detection value meets a preset range;

[0026] If not, generate a feedback signal.

[0027] To solve the above technical problems, the present invention provides another technical solution as follows: A computer device, applied to the above extreme ultraviolet light output control method, includes a memory, a processor, and a computer program stored on the memory, and the processor executes the above computer program to implement the extreme ultraviolet light output control method.

[0028] To solve the above technical problems, the present invention provides another technical solution as follows: A computer device, applied to the above extreme ultraviolet light output control system, includes a memory, a processor, and a computer program stored on the memory, and the processor executes the above computer program to implement the extreme ultraviolet light output control system.

[0029] Compared with the prior art, the extreme ultraviolet light output control system, control method, and computer device provided by the present invention have the following beneficial effects:

[0030] 1. An extreme ultraviolet light output control system provided by an embodiment of the present invention is used to optimize the output extreme ultraviolet light. The control system includes an energy supply circuit, a first coupling unit, a magnetic pulse compression circuit, a second coupling unit, a gas chamber, and a detection unit;

[0031] The input end of the first coupling unit is connected to the output end of the power supply circuit. Its output end, the magnetic pulse compression circuit, and the input end of the second coupling unit are connected in sequence. The output end of the second coupling unit is the current output end, and the output end of the second coupling unit and at least part of the detection unit are both arranged in the gas chamber.

[0032] The power supply circuit is used to provide current and voltage. The current and voltage are coupled by the first coupling unit and then delivered to the magnetic pulse compression circuit to generate a high-current pulse. The gas in the gas chamber forms a plasma based on the high-current pulse, and the plasma outputs extreme ultraviolet light under the continuous pinch of the high-current pulse.

[0033] The detection unit detects the plasma current in the gas chamber, or detects the plasma density and plasma temperature to generate a feedback signal. The power supply circuit adjusts the provided current and voltage based on the feedback signal to optimize the output extreme ultraviolet light. The control logic of the control system in this embodiment is simple and convenient, enabling the extreme ultraviolet light output control system to adjust the output extreme ultraviolet light in real time according to the detection unit to optimize the output extreme ultraviolet light, and thus obtaining an extreme ultraviolet light radiation range that meets the actual requirements.

[0034] 2. The first coupling unit of the embodiment of the present invention includes a coupled first coil and second coil, and the second coupling unit includes a coupled third coil and equivalent coil. The output end of the power supply circuit is connected to the first coil. The first coil and the second coil are coupled and connected. The second coil, the magnetic pulse compression circuit, and the third coil are connected in series in sequence. The third coil and the equivalent coil are coupled and connected. The third coil is the current output end. The alternating current is converted into direct current by the power supply circuit. Since a stable and unidirectional current is required during the output process of extreme ultraviolet light. And the unipolar electric pulse can exactly provide a stable and consistent current output during the output process of extreme ultraviolet light, making it have the advantages of stability and controllability in the process of generating extreme ultraviolet light.

[0035] 3. The power supply circuit of the embodiment of the present invention includes a power supply, a control switch, and a protection capacitor. The control switch is connected in parallel with the power supply. The power supply, the first coil, and the protection capacitor are connected in series in sequence to form a closed loop. The reverse pulse of the second coil acting on the first coil can be absorbed by the protection capacitor, thereby protecting the power supply circuit and preventing the components in the power supply circuit from being damaged.

[0036] 4. The magnetic pulse compression circuit of the embodiment of the present invention includes a charging capacitor and a magnetic switch. The magnetic switch includes an input end and an output end. After the second coil is connected in parallel with the charging capacitor, one end is connected in series with the input end of the magnetic switch, and the other end is connected to one end of the third coil. The output end of the magnetic switch is connected to the other end of the third coil. After the compression of the charging capacitor and the magnetic switch, the current becomes a high-current pulse, improving the output quality of the extreme ultraviolet light.

[0037] 5. The magnetic pulse compression circuits in the embodiments of the present invention are arranged to be at least two, and at least two magnetic pulse compression circuits are connected in parallel to both ends of the second coil in sequence. After multiple compressions, a superior extreme ultraviolet light emission component is obtained after the final pinch of the plasma loop.

[0038] 6. The detection unit in the embodiments of the present invention includes a detection module, a signal receiving module, a signal processing module, and an execution module that are electrically connected in sequence; the detection module is used to detect the plasma current, or detect the plasma density and plasma temperature to generate detection information, the signal receiving module is used to receive the detection information and transmit the detection information to the signal processing module, the signal processing module is used to process the detection information to generate a feedback signal, and the execution module is used to adjust the current and voltage of the power supply circuit based on the feedback signal. According to the generated feedback signal, the execution module will adjust the current and voltage of the power supply circuit based on the generated feedback signal to optimize the output extreme ultraviolet light.

[0039] 7. The detection unit in the embodiments of the present invention is a Rogowski coil and / or a spectroscopic diagnostic instrument. There are various ways to obtain the feedback signal in this embodiment. It can be selectively determined according to the actual usage requirements of the user whether to use the Rogowski coil or the spectroscopic diagnostic instrument alone, or to use a combination of the Rogowski coil and the spectroscopic diagnostic instrument, with high selectivity.

[0040] 8. The embodiments of the present invention also provide an extreme ultraviolet light output control method, which has the same beneficial effects as the above-mentioned extreme ultraviolet light output control system, and will not be elaborated here.

[0041] 9. The embodiments of the present invention also provide a computer device, which has the same beneficial effects as the above-mentioned extreme ultraviolet light output control method, and will not be elaborated here.

Description of the Drawings

[0042] Figure 1 It is a schematic structural diagram of an extreme ultraviolet light output control system provided by the first embodiment of the present invention.

[0043] Figure 2 It is a schematic structural diagram of the power supply circuit of an extreme ultraviolet light output control system provided by the first embodiment of the present invention.

[0044] Figure 3 It is a partial schematic structural diagram of an extreme ultraviolet light output control system provided by the first embodiment of the present invention.

[0045] Figure 4 It is a schematic structural diagram of the magnetic pulse compression circuit of an extreme ultraviolet light output control system provided by the first embodiment of the present invention.

[0046] Figure 5It is a schematic structural diagram of another extreme ultraviolet light output control system provided by the first embodiment of the present invention.

[0047] Figure 6 It is a schematic flowchart of an extreme ultraviolet light output control method provided by the second embodiment of the present invention.

[0048] Figure 7 It is a schematic structural diagram of a computer device provided by the third embodiment of the present invention.

[0049] Explanation of the attached drawing reference numerals:

[0050] 1. Extreme ultraviolet light output control system; 2. Computer device;

[0051] 11. Energy supply circuit; 12. First coupling unit; 13. Magnetic pulse compression circuit; 14. Second coupling unit; 15. Gas chamber; 16. Plasma loop; 17. Detection unit; 21. Memory; 22. Processor; 23. Computer program.

[0052] 111. Power supply; 112. Control switch; 113. Protection capacitor; 121. First coil; 122. Second coil; 131. Charging capacitor; 132. Magnetic switch; 141. Third coil; 142. Equivalent coil; 161. Plasma resistance; 162. Plasma self-inductance; 171. Detection module; 172. Signal receiving module; 173. Signal processing module; 174. Execution module.

Detailed implementation manners

[0053] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the following further elaborates on the present invention in conjunction with the attached drawings and implementation examples. It should be understood that the specific implementation examples described herein are only used to explain the present invention and are not used to limit the present invention.

[0054] In the embodiments provided by the present invention, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined according to A. However, it should also be understood that determining B according to A does not mean determining B only according to A, and B can also be determined according to A and / or other information.

[0055] It should be understood that throughout the specification, "an embodiment" or "an embodiment" means that a specific feature, structure or characteristic related to the embodiment is included in at least one embodiment of the present invention. Therefore, the appearances of "in an embodiment" or "in an embodiment" throughout the specification do not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. Those skilled in the art should also be aware that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0056] In various embodiments of the present invention, it should be understood that the magnitude of the sequence numbers of the above processes does not necessarily mean the order of execution. The order of execution of each process should be determined by its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.

[0057] As one of the important pillar devices for the development of the integrated circuit industry, the lithography machine is the main technical support for the development of the entire semiconductor industry. With the development of lithography technology, extreme ultraviolet lithography (EUV for short) has become the consensus in the semiconductor industry. As a potential extreme ultraviolet light generation mechanism, the electrodeless pinch (abbreviated as Z-pinch) device can generate an extreme ultraviolet light source with lower requirements for the discharge device compared to other generation mechanisms, and has high spatial stability and temporal stability.

[0058] The working process of the electrodeless pinch device is that the power system generates high-frequency pulses, supplies energy to the gas chamber through the coupling unit to generate plasma, and forms a circuit in the vacuum gas chamber. At this time, the magnetic field generated in the circuit causes the plasma to pinch towards the axis, resulting in intensified collisions between particles to generate high-valence gas ions, and finally extreme ultraviolet light is radiated through transitions. The energy input of the electrodeless pinch device depends on the electrical pulse, which is realized through the magnetic pulse compression circuit. Usually, it is very difficult to control the current of the plasma circuit. On the one hand, since the impedance changes when the plasma forms a circuit and reaches the pinch equilibrium, the current coupled into the plasma also changes accordingly. On the other hand, due to the electrical components in the pinch device, especially the switches, when operating at high frequencies, the device performance deteriorates, resulting in low working efficiency and reduced energy in the coupled plasma circuit. For example, the impedance of the plasma changes during the glow discharge process. When the pinch occurs, the current in the plasma circuit will be uncontrollable. In order to ensure stable glow discharge, the user hopes that the current in the plasma circuit remains in the optimal condition when the pinch occurs. That is to say, in the process of the electrodeless pinch device generating an extreme ultraviolet light source by pinching, it is difficult to adjust the power supply according to the actual situation to output better-quality extreme ultraviolet light.

[0059] Please refer to Figure 1 , a first embodiment of the present invention provides an extreme ultraviolet light output control system 1 for optimizing the output extreme ultraviolet light. The control system includes an energy supply circuit 11, a first coupling unit 12, a magnetic pulse compression circuit 13, a second coupling unit 14, a gas chamber 15, and a detection unit 17.

[0060] The input end of the first coupling unit 12 is connected to the output end of the power supply circuit 11. The output end of the first coupling unit 12, the magnetic pulse compression circuit 13, and the input end of the second coupling unit 14 are connected in sequence. The output end of the second coupling unit 14 is the current output end, and the output end of the second coupling unit 14 and at least part of the detection unit 17 are both arranged in the gas chamber 15.

[0061] Specifically, the power supply circuit 11 is used to provide rectified current and voltage. The current and voltage are coupled by the first coupling unit 12 and then transmitted to the magnetic pulse compression circuit 13. After being compressed by the magnetic pulse compression circuit 13, a high-current pulse is generated. The gas in the gas chamber 15 forms a plasma based on the high-current pulse, and the plasma continuously collapses under the action of the high-current pulse to output extreme ultraviolet light. It should be understood that the gas in the gas chamber 15 can be tin gas or xenon gas. Preferably, the gas is xenon gas, and xenon gas generates a plasma under the action of the high-current pulse. Further, a plasma loop 16 is formed in the gas chamber 15 by the plasma. At this time, the magnetic field generated in the plasma loop causes the plasma to collapse towards the axis, resulting in an increase in particle collisions and generating high-valence Xe 10+ ions, and finally extreme ultraviolet light is radiated through transitions.

[0062] Specifically, the plasma current refers to the current on the plasma loop. When the plasma in the gas chamber 15 is continuously affected by the high-current pulse, it can form a circular loop, and the circular loop can be equivalent to a circuit, and the current in its loop is the plasma current. The plasma temperature and plasma density refer to the temperature and density of the plasma in the gas chamber 15. In one possible way, the detection unit 17 can detect the plasma current. Specifically, a Rogowski coil can be used to detect the current on the plasma loop, and the value of the plasma current can be obtained. In one possible way, the detection unit 17 can also detect the plasma temperature and plasma density. Specifically, a spectral diagnostic instrument can be used to detect the plasma temperature and plasma density in the gas chamber 15, and the corresponding temperature and density values can be obtained. It should be noted that the above detection can be to detect the plasma current alone, or to detect the plasma density and plasma temperature alone. It can also detect the plasma current, plasma density, and plasma temperature. Further, a feedback signal can be obtained after detection, and the power supply circuit 11 adjusts the provided current and voltage based on the feedback signal to optimize the output extreme ultraviolet light.

[0063] Understandably, in the prior art, after extreme ultraviolet light is radiated, it is impossible to determine whether the radiation range of the radiated extreme ultraviolet light meets the actual needs of users. That is, it is impossible to judge the quality of the directly radiated extreme ultraviolet light. And the radiation range of the extreme ultraviolet light is directly related to the current and voltage provided by the power supply circuit 11. Therefore, in this embodiment, by setting the detection unit 17, the detection unit 17 can detect the plasma current in the gas chamber 15 and / or detect the plasma density and plasma temperature in the gas chamber 15 to generate a feedback signal. Finally, based on the feedback signal, the power supply circuit 11 can be controlled to adjust the current and voltage it provides. The control logic is simple and convenient, enabling the extreme ultraviolet light output control system 1 to adjust the output extreme ultraviolet light in real time according to the feedback signal to optimize the output extreme ultraviolet light, thereby obtaining an extreme ultraviolet light radiation range that meets the actual needs.

[0064] It should be noted that according to the Bennett relation of kinetic theory of gases, the relationship between the plasma density, plasma temperature value and the preset pinch current value at pinch equilibrium can satisfy the following formula:

[0065] Formula 1: PV = NRT;

[0066] Formula 2:

[0067] Specifically, Formula 1 is the ideal gas state equation, where P is the pressure, V is the gas volume, T is the temperature, N is the amount of substance of the gas, and R is the molar gas constant (also called the universal gas constant). In Formula 2, I is the preset pinch current value, n e is the plasma density, T e is the plasma temperature, and the rest of the parameters are constants.

[0068] Understandably, since the radiation range of the extreme ultraviolet light is directly related to the current and voltage provided by the power supply circuit 11. Exemplarily, in Formula 2 above, considering the factors affecting the current, the preset pinch current is associated with the plasma density and plasma temperature. Therefore, when using the detection unit 17 for detection, there are three ways to obtain the feedback signal. And the ultimate goal of setting the detection unit 17 is still to optimize the extreme ultraviolet light with poor output quality. Therefore, before obtaining the feedback signal, there will be a screening and comparison process regardless of which method is used to judge whether it is necessary to optimize the extreme ultraviolet light.

[0069] Specifically, the first method is to directly detect the plasma current in the gas chamber 15. It should be understood that the value of the plasma current is directly related to the final output quality of the extreme ultraviolet light. Therefore, a preset range of current can be correspondingly set for the output quality of the extreme ultraviolet light. That is, if the value of the plasma current is within the preset range, it indicates that the output quality of the extreme ultraviolet light is good. Further, at this time, by comparing whether the value of the plasma current is within the preset range, it can be determined whether a feedback signal is obtained. The second method is to detect the plasma density and plasma temperature in the gas chamber 15, and the obtained plasma density and plasma temperature are used to obtain the corresponding preset pinch current value based on Formula Two. Similarly, the preset pinch current value is similar to the above-mentioned value of the plasma current. Further, by determining whether the preset pinch current value is within the preset range, it can be determined whether a feedback signal is obtained. The third method is to simultaneously detect the plasma current, plasma density, and plasma temperature in the gas chamber 15. The method of obtaining the feedback signal is a combination of the above two methods, so it will not be elaborated here.

[0070] It should be understood that based on the detection unit 17, the plasma current in the gas chamber can be detected and / or the plasma density and plasma temperature can be detected. Furthermore, the feedback signal generated after the detection can be used to control the power supply circuit 11 in turn, so as to adjust the current and voltage in real time, and then optimize the output extreme ultraviolet light. This solves the problem of poor output of extreme ultraviolet light in the prior art during the generation of extreme ultraviolet light sources.

[0071] Furthermore, please refer to Figure 1 、 Figure 2 and Figure 3 The first coupling unit 12 includes a coupled first coil 121 and second coil 122, and the second coupling unit 14 includes a coupled third coil 141 and equivalent coil 142; the output end of the power supply circuit 11 is connected to the first coil 121, the first coil 121 and the second coil 122 are coupled and connected, the second coil 122, the magnetic pulse compression circuit 13 and the third coil 141 are connected in series in sequence, the third coil 141 and the equivalent coil 142 are coupled and connected, and the third coil 141 is the current output end. It should be noted that when the high-current pulse generated by the magnetic pulse compression circuit 13 is transmitted to the third coil 141, the pulse energy can first ionize the gas in the gas chamber 15 into plasma, and then the plasma will form a plasma loop 16 under the continuous action of the high-current pulse. After the plasma loop 16 is formed, there is an inductive coupling between the third coil 141 and the plasma loop 16. Part of the plasma loop 16 can be regarded as the equivalent coil 142, and the equivalent coil 142 and the third coil 141 can form the second coupling unit 14.

[0072] It should be understood that the power supply circuit 11 is externally connected to the mains power supply. The alternating current input from the mains power supply can be converted into direct current after being rectified by the power supply circuit 11. Since a stable and unidirectional current is required during the output process of extreme ultraviolet light. And the unipolar electrical pulse can exactly provide a stable and consistent current output during the output process of extreme ultraviolet light, making it have the advantages of stability and controllability during the generation of extreme ultraviolet light. In addition, the rectified pulse has phase consistency, that is, the initial current and voltage input into the entire power supply circuit 11 have the characteristic of phase consistency, thereby avoiding the influence of the phase difference on the final output power of extreme ultraviolet light, and then obtaining better-quality extreme ultraviolet light. Specifically, in order to be able to adapt to the extreme ultraviolet light output control system 1, a power supply circuit 11 with high voltage, high current, and high repetition frequency is required.

[0073] Specifically, both the first coupling unit 12 and the second coupling unit 14 can be regarded as transformers. The first coupling unit 12 can be composed of a copper structure with low leakage inductance and a ferrite magnetic core. The leakage inductance can be 10 - 50 nH. The first coupling unit 12 can ensure that the current rise edge and width are maintained at the nanohenry (nH) level. The direct current rectified by the power supply circuit 11 is coupled through the first coil 121 and the second coil 122 of the first coupling unit 12, and then delivered to the magnetic pulse compression circuit 13 for compression to form a high-current pulse. The high-current pulse is coupled through the third coil 141 and the equivalent coil 142 of the second coupling unit 14, and then output from the output end of the second coupling unit 14.

[0074] Further, please refer to Figure 2 , the power supply circuit 11 includes a power supply 111, a control switch 112, and a protection capacitor 113; the control switch 112 is connected in parallel with the power supply 111; the power supply 111, the first coil 121, and the protection capacitor 113 are connected in series in sequence to form a closed loop. It should be understood that the alternating current is converted into direct current after passing through the power supply 111. The pulse formed by the chopping action of the control switch 112 on the direct current charges the protection capacitor 113. After the protection capacitor 113 is fully charged, the pulse is further transmitted to the first coil 121 on the first coupling unit 12, and is further transmitted to the second coil 122 through the coupling action and then delivered to the magnetic pulse compression circuit 13. In addition, the reverse pulse from the second coil 122 acting on the first coil 121 can be absorbed by the protection capacitor 113, thereby protecting the power supply circuit 11. It should be understood that the electrical pulse generated after the protection capacitor 113 is fully charged can be directly transmitted to the next-stage circuit, which is simple and convenient.

[0075] Further, please refer to Figure 3, the magnetic pulse compression circuit 13 includes a charging capacitor 131 and a magnetic switch 132. The magnetic switch 132 includes an input end and an output end. After the second coil 122 is connected in parallel with the charging capacitor 131, one end of it is connected in series with the input end of the magnetic switch 132, and the other end is connected to one end of the third coil 141. The output end of the magnetic switch 132 is connected to the other end of the third coil 141. It should be understood that the current and voltage input by the second coil 122 are transmitted to the charging capacitor 131, and the charging capacitor 131 can be charged. When the charging capacitor 131 is not fully charged, the magnetic switch 132 is in an unsaturated state at this time and can be regarded as a high-impedance element, that is, the magnetic switch 132 can be regarded as disconnected, and the magnetic pulse compression circuit 13 and the second coupling unit 14 are in an open circuit state. When the charging capacitor 131 is fully charged, the current is further transmitted to the magnetic switch 132, making the magnetic switch 132 in a saturated state, that is, the magnetic switch 132 can be regarded as connected, and the magnetic pulse compression circuit 13 and the second coupling unit 14 are in a conducting state. At this time, after the compression of the charging capacitor 131 and the magnetic switch 132, the current becomes a high-current pulse, and then the high-current pulse can be output through the output end of the second coupling unit 14.

[0076] Preferably, please combine Figure 3 and Figure 4 , the magnetic pulse compression circuit 13 is set to at least two, and at least two magnetic pulse compression circuits 13 are connected in parallel to both ends of the second coil 122 in sequence. It should be understood that the current can form a high-current pulse through the magnetic pulse compression circuit 13. The more the number of magnetic pulse compression circuits 13 set, that is, the more times the pulse is compressed.

[0077] It should be noted that better extreme ultraviolet light requires a more matching high-current pulse. However, after the pulse is compressed, the pulse width becomes narrower and the amplitude becomes higher. If the number of pulse compressions is too high, it will become a pulse with a higher amplitude and a too narrow pulse width, and the shape of the overall waveform is relatively sharp. First, for a large pulse current, the instrument cannot withstand it, and the load heat borne by the components in the system may cause the components in the system to burn out. And the too narrow pulse width is equivalent to reducing the number of times the final plasma circuit 16 is pinched, resulting in a poor emission component. If the number of pulse compressions is too low, the obtained pulse width and amplitude are not enough, and a good emission component cannot be obtained either.

[0078] Preferably, the number of the magnetic pulse compression circuits 13 is 2 to 3 times. The pulse compressed by the magnetic pulse compression circuits 13 of this number has both a higher amplitude and a wider pulse width, so that an excellent extreme ultraviolet light emission component can be obtained after the final pinch.

[0079] Specifically, when the plasma is affected by a high-current pulse, it can form a ring-shaped circuit, and this ring-shaped circuit is called the plasma circuit 16. Please refer to Figure 3 , Figure 3The plasma circuit 16 therein is an equivalent circuit. The plasma circuit 16 includes a plasma self-inductance 162 and a plasma resistance 161. The plasma self-inductance 162, the plasma resistance 161, and the equivalent coil 142 are connected in series in sequence. The plasma resistance 161 is used to impede the current in the circuit, and the plasma self-inductance 162 is an element for self-inductance phenomenon of the magnetic field in the circuit. The plasma self-inductance 162, the plasma resistance 161, and the equivalent coil 142 are connected in series in sequence to form the plasma circuit 16, and the plasma circuit 16 can form extreme ultraviolet light under the pinch of a high-current pulse.

[0080] Further, please combine Figure 3 and Figure 5 The detection unit 17 includes a detection module 171, a signal receiving module 172, a signal processing module 173, and an execution module 174 that are electrically connected in sequence; the detection module 171 is used to detect the plasma current and / or detect the plasma density and plasma temperature to generate detection information, the signal receiving module 172 is used to receive the detection information and transmit the detection information to the signal processing module 173, the signal processing module 173 is used to process the detection information to generate a feedback signal, and the execution module 174 is used to adjust the current and voltage of the power supply circuit 11 based on the feedback signal.

[0081] It can be understood that after the plasma circuit 16 is pinched to form extreme ultraviolet light, at least part of the detection unit 17 disposed in the gas chamber 15 can perform detection to obtain detection information. Specifically, there are three types of detection information. For example, the detection information can be the plasma current value in the gas chamber 15. It can also be the plasma density and plasma temperature in the gas chamber 15. It can also be the plasma current value, plasma density, and plasma temperature in the gas chamber 15.

[0082] After the detection is completed, the detection information can be sent to the signal receiving module 172. The signal receiving module 172 further transmits the detection information into the signal processing module 173. At this time, the signal processing module 173 will process the detection information based on a preset range and decide whether to generate a feedback signal. It should be noted that the detection information is a specific current value, temperature value, or density value, representing some physical detection parameters. And the feedback signal is an electrical signal. It mainly converts the physical parameters detected by the detection module 171 into electrical signals through the signal processing module 173. If a feedback signal is generated, the execution module 174 will adjust the current and voltage of the power supply circuit 11 based on the generated feedback signal to optimize the output extreme ultraviolet light.

[0083] Optionally, the signal receiving module 172 includes, but is not limited to, scientific instruments or devices such as high-precision oscilloscopes and computers that can receive optoelectronic signals. It should be understood that the signal receiving module 172 has a wide range of options and high selectivity.

[0084] Specifically, please continue to combine Figure 3 and Figure 5 , the optimized extreme ultraviolet light radiation band range is 13.5 nm ± 2%. It should be understood that if the extreme ultraviolet light radiation band is output within this range, it indicates that the quality of the output extreme ultraviolet light is relatively good. Through the detection unit 17 provided in this embodiment, the extreme ultraviolet light output by the extreme ultraviolet light output control system 1 can be detected in real time, and then the current and voltage provided by the power supply circuit 11 can be adjusted in real time, so that the radiation band range of the finally output extreme ultraviolet light is 13.5 nm ± 2%.

[0085] Optionally, the detection unit 17 is a Rogowski coil and / or a spectral diagnostic instrument. It should be understood that a Rogowski coil is a sensor used to measure current. Using Ampere's law, it measures the current by detecting the magnetic field change generated by the current. It is mainly composed of a wire wound into a circular or spiral shape, usually wound on a non-magnetic support structure. When current passes through the wire, the generated magnetic field will induce current in the coil, and the magnitude of the induced current is measured to determine the magnitude of the current in the plasma circuit. And the Rogowski coil has the characteristic of non-contact measurement, that is, it does not need to directly contact the current carrier, so it does not affect the normal operation of the circuit. Specifically, when it detects the plasma current in the gas chamber 15, it does not affect the properties of the plasma. This makes its measurement scenarios widely applicable, including high-frequency and alternating currents. In addition, the Rogowski coil has a relatively simple structure, reliable use, and low cost.

[0086] Furthermore, a spectral diagnostic instrument is an instrument used to analyze and measure the spectral characteristics of substances. It obtains information about the composition, temperature, density, etc. of substances by measuring the spectral information of light emitted, absorbed, or scattered by substances. It can provide high-precision plasma density measurement. And it can provide spatial resolution, that is, the ability to measure plasma density at different positions. In addition, the spectral diagnostic instrument can provide the distribution of plasma temperature at different spatial positions. Similarly, the spectral diagnostic instrument has the characteristic of non-invasiveness. When measuring plasma density and plasma temperature, it does not interfere with the properties of the plasma.

[0087] Understandably, in a possible implementation, the detection unit 17 is a Rogowski coil, and the Rogowski coil can directly detect the plasma current value in the gas chamber 15. Then, the plasma current value is directly compared with the preset range preset by the user, and then it is determined whether a feedback signal is generated. In another possible implementation, the detection unit 17 is a spectroscopic diagnostic instrument, and the spectroscopic diagnostic instrument can directly detect the plasma density and plasma temperature in the gas chamber 15. Then, after calculating and converting the plasma density and plasma temperature, they are compared with the preset range preset by the user, and then it is determined whether a feedback signal is generated. In yet another possible implementation, the detection unit 17 is a Rogowski coil and a spectroscopic diagnostic instrument. The Rogowski coil can directly detect the plasma current value in the gas chamber 15. The spectroscopic diagnostic instrument can directly detect the plasma density and plasma temperature in the gas chamber 15. Further, the obtained plasma current, plasma density, and plasma temperature are compared with the preset range preset by the user, and then it is determined whether a feedback signal is generated. It should be understood that there are various ways to obtain the feedback signal in this embodiment. The user can choose to use only the Rogowski coil or the spectroscopic diagnostic instrument alone, or choose to use the Rogowski coil and the spectroscopic diagnostic instrument in combination according to the actual usage requirements. The selectivity is high. And ultimately, the function of detecting the output extreme ultraviolet light and determining whether a feedback signal is generated can be realized, which is simple and convenient.

[0088] Further, the detection unit 17 can also be a probe or a high-speed camera. It should be understood that the detection unit 17 is not limited to devices that can directly or indirectly detect plasma parameters.

[0089] It should be noted that the main gas in the gas chamber 15 is xenon. Specifically, the gas flow rate of xenon can be 5 - 30 sccm, and the gas pressure is 50 - 500 mtorr. Since during the output process of extreme ultraviolet light, after adjusting the current and voltage of the power supply circuit 11, the final high-current pulse will act on the xenon gas in the gas chamber 15, thereby ionizing the xenon gas. However, different gas pressures and gas flow rates in the gas chamber 15 will also indirectly affect the final adjustment effect of the current and voltage. Therefore, by controlling the gas pressure and gas flow rate of the working gas in the gas chamber 15, during the adjustment process of the voltage and current of the power supply circuit 11, the density and temperature of the finally generated plasma during pinch-off are maintained within the optimal range to obtain the optimal radiation power.

[0090] To solve the above technical problems, please refer to Figure 6 , the second embodiment of the present invention also provides an extreme ultraviolet light output control method, which is applied to the above extreme ultraviolet light output control system. The method includes:

[0091] S1, providing current and voltage;

[0092] S2. Magnetically pulse - compress the current and voltage to generate a high - current pulse;

[0093] S3. Ionize a preset gas by the action of the high - current pulse to form a plasma. Among them, the plasma outputs extreme ultraviolet light under continuous pinch of the high - current pulse;

[0094] S4. Detect the plasma density, plasma temperature, and / or plasma current to generate a feedback signal;

[0095] S5. Adjust the current and voltage based on the feedback signal to optimize the output extreme ultraviolet light.

[0096] It can be understood that in order to enable the extreme ultraviolet light output control system to output high - quality extreme ultraviolet light. This method first provides current and voltage. After the current and voltage are magnetically pulse - compressed, a high - current pulse can be generated. The high - current pulse ionizes the gas in the gas chamber to generate a plasma. The plasma forms a loop in the vacuum chamber. And the loop radiates extreme ultraviolet light under continuous pinch of the high - current pulse. Further, the plasma current and / or plasma density and plasma temperature can be detected to generate a feedback signal. Finally, the current and voltage are adjusted based on the feedback signal to optimize the output extreme ultraviolet light. That is, the method provided in this embodiment can respond to the actual output situation of the extreme ultraviolet light, specifically adjust the power supply, optimize the output extreme ultraviolet light, and thus obtain better - quality extreme ultraviolet light.

[0097] In the above step S5, generating the feedback signal specifically includes:

[0098] S51. Detect the plasma current to obtain a first detection value and / or detect the plasma density and plasma temperature to obtain a second detection value;

[0099] S52. Determine whether the first detection value and / or the second detection value meets a preset range;

[0100] S53. If not, generate a feedback signal.

[0101] It can be understood that in a possible implementation manner, the plasma is detected to obtain a first detection value. Specifically, the first detection value can be a current value. Further, after obtaining the first detection value, it can be determined whether the first detection value meets the preset range. If it meets, it indicates that the quality of the output extreme ultraviolet light is good and there is no need to generate a feedback signal. If it does not meet, it indicates that the quality of the output extreme ultraviolet light is poor and a feedback signal needs to be generated.

[0102] In another possible implementation, the plasma is detected to obtain a second detection value. Specifically, the second detection value can be the values of the plasma density and the plasma temperature in the gas chamber. Further, after obtaining the second detection value, it can be determined whether the second detection value meets a preset range. If it meets, it indicates that the quality of the output extreme ultraviolet light is good and no feedback signal needs to be generated. If it does not meet, it indicates that the quality of the output extreme ultraviolet light is poor and a feedback signal needs to be generated. In one possible implementation, detecting the plasma can obtain a first detection value and a second detection value. This situation is a combination of the above two situations and will not be elaborated here.

[0103] It should be noted that the preset range can be understood as a certain numerical range or a set of certain numerical ranges. For example, the preset range is A: the plasma density range needs to meet 10 18 cm -3 ~10 19 cm -3 . B: the plasma temperature range needs to meet 20eV to 40eV. Then the preset range can be understood as the union of A and B. That is, only when the detected second detection value meets the ranges of both A and B can it be said that the second detection value meets the preset range.

[0104] To solve the above technical problems, the third embodiment of the present invention further provides a computer device 2, which is applied to the above extreme ultraviolet light output control method, including a memory 21, a processor 22, and a computer program 23 stored on the memory 21. The processor 22 executes the above computer program 23 to implement the extreme ultraviolet light output control method.

[0105] The computer device 2 provided by the embodiment of the present invention has the same beneficial effects as the above extreme ultraviolet light output control method and will not be elaborated here.

[0106] Compared with the prior art, the extreme ultraviolet light output control system, control method, and computer device provided by the present invention have the following beneficial effects:

[0107] 1. An extreme ultraviolet light output control system provided by an embodiment of the present invention is used to optimize the output extreme ultraviolet light. The control system includes an energy supply circuit, a first coupling unit, a magnetic pulse compression circuit, a second coupling unit, a gas chamber, and a detection unit;

[0108] The input end of the first coupling unit is connected to the output end of the energy supply circuit, and its output end, the magnetic pulse compression circuit, and the input end of the second coupling unit are connected in sequence. The output end of the second coupling unit is the current output end, and the output end of the second coupling unit and at least part of the detection unit are arranged in the gas chamber;

[0109] The power supply circuit is used to provide current and voltage. After being coupled by the first coupling unit, the current and voltage are transmitted to the magnetic pulse compression circuit to generate a high-current pulse. The gas in the gas chamber forms a plasma based on the high-current pulse, and the plasma outputs extreme ultraviolet light under the continuous pinch of the high-current pulse.

[0110] The detection unit detects the plasma current in the gas chamber, or detects the plasma density and plasma temperature to generate a feedback signal. The power supply circuit adjusts the provided current and voltage based on the feedback signal to optimize the output extreme ultraviolet light. The control logic of the control system in this embodiment is simple and convenient, enabling the extreme ultraviolet light output control system to adjust the output extreme ultraviolet light in real time according to the detection unit, so as to optimize the output extreme ultraviolet light, and then obtain an extreme ultraviolet light radiation range that meets the actual requirements.

[0111] 2. The first coupling unit of the embodiment of the present invention includes a coupled first coil and a second coil, and the second coupling unit includes a coupled third coil and an equivalent coil; the output end of the power supply circuit is connected to the first coil, the first coil and the second coil are coupled and connected, the second coil, the magnetic pulse compression circuit and the third coil are connected in series in sequence, the third coil and the equivalent coil are coupled and connected, and the third coil is the current output end. The alternating current is converted into direct current by the power supply circuit. Since a stable and unidirectional current is required during the output process of extreme ultraviolet light. And the unipolar electric pulse can exactly provide a stable and consistent current output during the output process of extreme ultraviolet light, making it have the advantages of stability and controllability in the process of generating extreme ultraviolet light.

[0112] 3. The power supply circuit of the embodiment of the present invention includes a power supply, a control switch and a protection capacitor; the control switch is connected in parallel with the power supply; the power supply, the first coil and the protection capacitor are connected in series in sequence to form a closed loop. The reverse pulse of the second coil acting on the first coil can be absorbed by the protection capacitor, thereby protecting the power supply circuit and preventing the components in the power supply circuit from being damaged.

[0113] 4. The magnetic pulse compression circuit of the embodiment of the present invention includes a charging capacitor and a magnetic switch. The magnetic switch includes an input end and an output end; after the second coil is connected in parallel with the charging capacitor, one end of it is connected in series with the input end of the magnetic switch, and the other end is connected to one end of the third coil; the output end of the magnetic switch is connected to the other end of the third coil. After being compressed by the charging capacitor and the magnetic switch, the current becomes a high-current pulse, improving the output quality of extreme ultraviolet light.

[0114] 5. The magnetic pulse compression circuits of the embodiment of the present invention are set to at least two, and at least two magnetic pulse compression circuits are connected in parallel to both ends of the second coil in sequence. After multiple compressions, an excellent extreme ultraviolet light emission component is finally obtained after the plasma loop is pinched.

[0115] 6. The detection unit of the embodiment of the present invention includes a detection module, a signal receiving module, a signal processing module, and an execution module that are electrically connected in sequence; the detection module is used to detect the plasma current, or detect the plasma density and plasma temperature to generate detection information, the signal receiving module is used to receive the detection information and transmit the detection information to the signal processing module, the signal processing module is used to process the detection information to generate a feedback signal, and the execution module is used to adjust the current and voltage of the power supply circuit based on the feedback signal. According to the generated feedback signal, the execution module will adjust the current and voltage of the power supply circuit based on the generated feedback signal to optimize the output extreme ultraviolet light.

[0116] 7. The detection unit of the embodiment of the present invention is a Rogowski coil and / or a spectroscopic diagnostic instrument. There are various ways to obtain the feedback signal in this embodiment. It can be selectively determined according to the actual usage requirements of the user whether to use the Rogowski coil or the spectroscopic diagnostic instrument alone, or to use the combination of the Rogowski coil and the spectroscopic diagnostic instrument, with high selectivity.

[0117] 8. The embodiment of the present invention also provides an extreme ultraviolet light output control method, which has the same beneficial effects as the above-mentioned extreme ultraviolet light output control system, and will not be elaborated here.

[0118] 9. The embodiment of the present invention also provides a computer device, which has the same beneficial effects as the above-mentioned extreme ultraviolet light output control method, and will not be elaborated here.

[0119] The above has introduced in detail an extreme ultraviolet light output control system, control method, and computer device disclosed in the embodiments of the present invention. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation of the present invention. Any modifications, equivalent replacements, and improvements made within the principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An extreme ultraviolet light output control system for optimizing the output extreme ultraviolet light, characterized in that The control system includes a power supply circuit, a first coupling unit, a magnetic pulse compression circuit, a second coupling unit, a gas chamber, and a detection unit; The input end of the first coupling unit is connected to the output end of the power supply circuit. The output end of the first coupling unit, the magnetic pulse compression circuit, and the input end of the second coupling unit are connected in sequence. The output end of the second coupling unit is the current output end, and both the output end of the second coupling unit and at least part of the detection unit are arranged in the gas chamber; The power supply circuit is used to provide current and voltage. The current and voltage are coupled by the first coupling unit and then transmitted to the magnetic pulse compression circuit to generate a high-current pulse. The gas in the gas chamber forms a plasma based on the high-current pulse, and the plasma outputs extreme ultraviolet light under continuous pinch of the high-current pulse; The detection unit detects the plasma current in the gas chamber and / or detects the plasma density and plasma temperature to generate a feedback signal; The power supply circuit adjusts the provided current and voltage based on the feedback signal to optimize the output extreme ultraviolet light.

2. The extreme ultraviolet light output control system according to claim 1, wherein: The first coupling unit includes a coupled first coil and a second coil, and the second coupling unit includes a coupled third coil and an equivalent coil; the output end of the power supply circuit is connected to the first coil, the first coil and the second coil are coupled and connected, the second coil, the magnetic pulse compression circuit, and the third coil are connected in series in sequence, the third coil and the equivalent coil are coupled and connected, and the third coil is the current output end.

3. The extreme ultraviolet light output control system according to claim 1, wherein: The power supply circuit includes a power supply, a control switch, and a protection capacitor; the control switch is connected in parallel with the power supply; the power supply, the first coil, and the protection capacitor are connected in series in sequence to form a closed loop.

4. The extreme ultraviolet light output control system according to claim 2, wherein: The magnetic pulse compression circuit includes a charging capacitor and a magnetic switch. The magnetic switch includes an input end and an output end; after the second coil is connected in parallel with the charging capacitor, one end of it is connected in series with the input end of the magnetic switch, and the other end is connected to one end of the third coil; the output end of the magnetic switch is connected to the other end of the third coil.

5. The extreme ultraviolet light output control system according to claim 4, characterized in that: At least two magnetic pulse compression circuits are provided, and at least two magnetic pulse compression circuits are connected in parallel to both ends of the second coil in sequence.

6. The extreme ultraviolet light output control system according to claim 1, characterized in that: The detection unit includes a detection module, a signal receiving module, a signal processing module, and an execution module that are electrically connected in sequence; The detection module is used to detect the plasma current, or detect the plasma density and plasma temperature, to generate detection information. The signal receiving module is used to receive the detection information and transmit the detection information to the signal processing module. The signal processing module is used to process the detection information to generate a feedback signal. The execution module is used to adjust the current and voltage of the power supply circuit based on the feedback signal.

7. The extreme ultraviolet light output control system according to claim 1, wherein: The detection unit is a Rogowski coil and / or a spectroscopic diagnostic instrument.

8. A method for controlling extreme ultraviolet light output, applied to the extreme ultraviolet light output control system according to any one of claims 1-7, characterized in that: The method includes the following steps: Provide current and voltage; Perform magnetic pulse compression processing on the current and voltage to generate a high-current pulse; Ionize a preset gas by the action of the intense current pulse to form a plasma, wherein the plasma outputs extreme ultraviolet light under continuous pinch of the intense current pulse; Detect the current of the plasma and / or the plasma density and plasma temperature to generate a feedback signal; Adjust the current and voltage based on the feedback signal to optimize the output extreme ultraviolet light.

9. The extreme ultraviolet light output control method according to claim 8, wherein: Generating the feedback signal specifically includes: Detect the current of the plasma to obtain a first detection value and / or detect the plasma density and plasma temperature to obtain a second detection value; Judge whether the first detection value and / or the second detection value meet a preset range; If not, generate a feedback signal.

10. A computer device, applied to the extreme ultraviolet light output control method as described in claims 8-9, characterized in that: It includes a memory, a processor, and a computer program stored on the memory, and the processor executes the above computer program to implement the extreme ultraviolet light output control method.

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