Force actuator used in vacuum

Abstract

The invention provides a force actuator used in vacuum, and relates to the field of precision opto-electro-mechanics. The invention provides a force actuator used in vacuum, which comprises a closed mounting shell, a sleeve and a fastener are arranged in an inner cavity of the mounting shell, the sleeve and the fastener are detachably connected with the mounting shell, and the outer wall of the sleeve is in contact with the inner wall of the mounting shell; a magnet movement type voice coil motor and a mass block surrounding the outer part of the voice coil motor are arranged in an inner cavity of the sleeve, a coil module of the voice coil motor is connected with the fastener, and a magnet module of the voice coil motor is connected with the mass block; the top of the mass block is connected with the top of the sleeve through a first movement assembly, and the bottom of the mass block is connected with the bottom of the sleeve through a second movement assembly. According to the invention, a device produced by a traditional process is packaged in a low-outgassing-rate material to form closed equipment, so that the device can be applied to a vacuum system without changing the use condition of the traditional equipment.

Description

Technical Field

[0001] The present invention relates to the field of precision opto-mechatronics, and particularly to a force actuator for use in a vacuum. Background Art

[0002] A vacuum system refers to a device used to generate, maintain, and measure an environment below atmospheric pressure. Its main purpose is to remove air or other gases within a specific area to meet specific industrial, scientific research, or experimental requirements. To ensure the effective operation and long-term stability of the vacuum system, its internal devices need to meet a series of strict requirements. For example, the selected materials need to have an extremely low gas release rate to avoid introducing unnecessary gas molecules in high vacuum or ultra-high vacuum. Generally, stainless steel is widely used for vacuum chambers and pipelines due to its good mechanical properties and low gas release rate. Copper is commonly used for electrical connections and heat dissipation components, having good electrical conductivity and weldability. Glass and ceramics are used for optical windows and other components that require transparent or insulating properties.

[0003] Within a vacuum system, special designs are required for equipment within the vacuum according to different vacuum degrees and usage conditions, especially for some force actuators used within a vacuum. Traditional force actuators cannot meet specific vacuum degree requirements due to the high outgassing rate of the materials used in the vacuum environment, so special customization is required for various devices, which not only wastes time but also increases costs. Therefore, it is necessary to apply traditional equipment to a vacuum system without changing its usage conditions (outside the vacuum).

[0004] In summary, there is an urgent need for a force actuator that can apply traditional equipment to a vacuum system without changing its usage conditions. Summary of the Invention

[0005] To solve the above problems, the present invention provides a force actuator for use in a vacuum, which can encapsulate a device produced by a traditional process in a material with a low outgassing rate to form a closed device, thereby realizing the application of the traditional equipment to a vacuum system without changing its usage conditions.

[0006] A force actuator for use in a vacuum provided by the present invention includes a sealed mounting housing. A sleeve and a fastener are provided in the inner cavity of the mounting housing. The sleeve and the fastener are respectively detachably connected to the mounting housing, and the outer wall of the sleeve is in contact with the inner wall of the mounting housing. A voice coil motor of the magnet motion type and a mass block surrounding the outside of the voice coil motor are provided in the inner cavity of the sleeve. The coil module of the voice coil motor is connected to the fastener, and the magnet module of the voice coil motor is connected to the mass block. A first motion assembly is connected between the top of the mass block and the top of the sleeve, and a second motion assembly is connected between the bottom of the mass block and the bottom of the sleeve.

[0007] In a feasible embodiment, the first moving component includes a first spring piece and a first fixing member. The first spring piece includes an inner ring, a connecting ring, and an outer ring in sequence from the inside to the outside. The inner ring of the first spring piece is detachably connected to the top of the mass block through the first fixing member, and the outer ring of the first spring piece is clamped between the top of the sleeve and the bottom of the fastener.

[0008] In a feasible embodiment, the first moving component further includes a spring cushion block. The bottom of the spring cushion block is in contact with the top of the first spring piece, and the spring cushion block and the first spring piece are clamped between the top of the sleeve and the bottom of the fastener.

[0009] In a feasible embodiment, the second moving component includes a second spring piece and a second fixing member. The second spring piece includes an inner ring, a connecting ring, and an outer ring in sequence from the inside to the outside. The inner ring of the second spring piece is detachably connected to the top of the mass block through the second fixing member, and the outer ring of the second spring piece is clamped between the bottom of the sleeve and the inner bottom surface of the mounting housing.

[0010] In a feasible embodiment, a step is provided on the inner wall of the mounting housing, and the outer ring of the second spring piece is clamped between the step and the bottom of the sleeve.

[0011] In a feasible embodiment, a thread is provided on the outer wall of the fastener, and a thread is also provided on a part of the inner wall of the mounting housing. The outer wall of the fastener and a part of the inner wall of the mounting housing are connected by a thread.

[0012] In a feasible embodiment, a sensor is further provided at the bottom of the mass block.

[0013] In a feasible embodiment, a vacuum feedthrough is provided on the side wall of the mounting housing.

[0014] In a feasible embodiment, a sealing cover for closing the inner cavity of the mounting housing is further provided at the top of the mounting housing.

[0015] The present invention further provides a method for using a force actuator in a vacuum, including the following steps:

[0016] Step 1) The coil module of the voice coil motor is powered on, and the magnet module moves relative to the coil module;

[0017] Step 2) The mass block moves with the magnet module, and the first moving component and the second moving component transmit the vibration of the mass block to the sleeve;

[0018] Step 3) The sleeve transmits the vibration to the mounting housing.

[0019] The method for using a force actuator in a vacuum provided by the present invention has the following beneficial effects:

[0020] The present invention can release force by using the reaction force generated by the vibration of the mass block in the inner cavity of the installation housing, thereby encapsulating the device produced by the traditional process in a low outgassing rate material to form a closed device, so as to realize the application of the traditional device in the vacuum system without changing its usage conditions, and is particularly suitable for the field of vibration control of precision instruments. At the same time, since the present invention can use the devices applicable to the vacuum environment, such as motors, sensors, and wires, without re-designing them and using them in the vacuum environment, the usage cost is saved. Brief Description of the Drawings

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0022] Figure 2 It is a sectional view of the present invention.

[0023] Figure 3 It is a sectional view of the present invention after removing the installation housing.

[0024] Figure 4 It is a schematic diagram of the structures of the first spring piece and the second spring piece of the present invention.

[0025] Reference Signs

[0026] Installation housing 1

[0027] Vacuum feedthrough 11

[0028] Sealing cover 12

[0029] Step 13

[0030] Sleeve 2

[0031] Fastener 3

[0032] Voice coil motor 4

[0033] Coil module 41

[0034] Magnet module 42

[0035] Mass block 5

[0036] First moving component 6

[0037] First spring piece 61

[0038] First fixing part 62

[0039] Second moving component 7

[0040] Second spring piece 71

[0041] Second fixing part 72

[0042] Spring pad 8

[0043] Sensor 9

[0044] Inner ring 101

[0045] Connecting ring 102

[0046] Outer ring 103 Detailed implementation mode

[0047] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention. In the description of the present invention, it should be noted that the orientation or positional relationship indicated by terms such as "left side", "right side", "upper side", "lower side", "above", "below", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0048] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0049] In addition, in the description of the present invention, unless otherwise stated, the meaning of "a plurality" is two or more.

[0050] The embodiment of the present invention provides a force actuator for use in a vacuum. With reference to Figure 2 and Figure 3 , it can be additionally referred to Figure 1, including a sealed mounting housing 1. A sleeve 2 and a fastener 3 are provided in the inner cavity of the mounting housing 1. The sleeve 2 and the fastener 3 are respectively detachably connected to the mounting housing 1. The outer wall of the sleeve 2 is in contact with the inner wall of the mounting housing 1 and is used to transmit the vibration generated by the voice coil motor 4 to the side wall of the mounting housing 1 through the side wall of the sleeve 2. A voice coil motor 4 of the magnet moving type and a mass block 5 surrounding the outside of the voice coil motor 4 are provided in the inner cavity of the sleeve 2. The coil module 41 of the voice coil motor 4 is connected to the fastener 3, and the magnet module 42 of the voice coil motor 4 is connected to the mass block 5. The mass block 5 is used to vibrate at the same frequency as the magnet module 42 and transmit the vibration of the magnet module 42 outward. As an illustration, in the voice coil motor 4 of the magnet moving type, the coil module 41 is fixed. The magnet module 42 includes a permanent magnet and a magnetic shaft body provided on the permanent magnet. The coil in the coil module 41 is wound around the shaft body, and at the same time, the permanent magnet is wound around the coil module 41. When the coil module 41 is energized, the current generated by the coil in the coil module 41 cuts the magnetic induction lines of the magnetic shaft body to generate an Ampere force consistent with the axial direction of the magnetic shaft body, so that the magnet module 42 moves relative to the coil module 41. Continue to refer to Figure 2 and Figure 3 , a first motion assembly 6 is connected between the top of the mass block 5 and the top of the sleeve 2, and a second motion assembly 7 is connected between the bottom of the mass block 5 and the bottom of the sleeve 2. It can be understood that the functions of the first motion assembly 6 and the second motion assembly 7 are both to transmit the vibration of the mass block 5 to the sleeve 2, and then transmit the vibration to the mounting housing 1 through the sleeve 2, so that the mounting housing 1 vibrates. As a supplementary explanation, a wire groove for the wire to pass through should be provided in the side wall of the mounting housing 1. The present invention can release force by using the reaction force generated by the vibration of the mass block 5 in the inner cavity of the mounting housing 1, and encapsulate the device produced by the traditional process in a low outgassing rate material to form a closed device, so as to realize the application of the traditional device in the vacuum system without changing the use conditions of the traditional device, and is particularly suitable for the vibration control field of precision instruments. At the same time, because the present invention can use devices suitable for the vacuum environment, such as motors, sensors, and wires, without re-designing them, the use cost is saved.

[0051] In the force actuator for use in a vacuum provided by the embodiment of the present invention, with reference to Figure 2 and Figure 3 , with reference to Figure 4, the first motion component 6 includes a first spring piece 61 and a first fixing member 62. The first spring piece 61 sequentially includes an inner ring 101, a connecting ring 102, and an outer ring 103 from the inside to the outside. The inner ring 101 of the first spring piece 61 is detachably connected to the top of the mass block 5 through the first fixing member 62. The outer ring 103 of the first spring piece 61 is clamped between the top of the sleeve 2 and the bottom of the fastener 3. For illustration, the mass block 5 and the sleeve 2 do not directly contact. The function of the first spring piece 61 is to transmit the vibration of the mass block 5 to the sleeve 2. Further, the first motion component 6 further includes a spring cushion block 8. The bottom of the spring cushion block 8 contacts the top of the first spring piece 61, specifically contacts the outer ring 103 of the first spring piece 61. The spring cushion block 8 and the first spring piece 61 are clamped between the top of the sleeve 2 and the bottom of the fastener 3. Specifically, the spring cushion block 8 and the outer ring 103 of the first spring piece 61 can be approximately regarded as integrally connected. In a specific embodiment, a plurality of protrusions are provided on the top of the mass block 5, and a plurality of through holes are provided in the inner ring 101 of the first spring piece 61. Each protrusion corresponds to a through hole. When installing the first spring piece 61, align each through hole with the protrusion, and then the inner ring 101 of the first spring piece 61 can be placed on the top of the mass block 5. A plurality of grooves are provided at the bottom of the first fixing member 62. Each groove corresponds to a protrusion. When installing the first fixing member 62, align each groove with the protrusion, and then the first fixing member 62 can be installed on the mass block 5. At this time, the bottom of the first fixing member 62 will press on the inner ring 101 of the first spring ring. Finally, the first fixing member 62, the first spring piece 61, and the mass block 5 are fixed together by bolts.

[0052] In the force actuator for use in a vacuum provided by the embodiment of the present invention, with reference to Figure 2 and Figure 3 , for auxiliary reference Figure 4, the second moving component 7 includes a second spring piece 71 and a second fixing member 72. The second spring piece 71 successively includes an inner ring 101, a connecting ring 102, and an outer ring 103 from the inside to the outside. The inner ring 101 of the second spring piece 71 is detachably connected to the bottom of the mass block 5 through the second fixing member 72. The outer ring 103 of the second spring piece 71 is clamped between the bottom of the sleeve 2 and the inner bottom surface of the mounting housing 1. It can be understood that the function of the second spring piece 71 is to transmit the vibration of the mass block 5 to the sleeve 2. Further, a step 13 is provided on the inner wall of the mounting housing 1, and the outer ring 103 of the second spring piece 71 is clamped between the step 13 and the bottom of the sleeve 2. In a specific embodiment, a plurality of protrusions are provided on the bottom of the mass block 5, and a plurality of through holes are provided in the inner ring 101 of the second spring piece 71. Each protrusion corresponds to a through hole. When installing the second spring piece 71, align each through hole with the protrusion, and then the inner ring 101 of the second spring piece 71 can be placed on the bottom of the mass block 5. A plurality of grooves are provided on the top of the second fixing member 72, and each groove corresponds to a protrusion. When installing the second fixing member 72, align each groove with the protrusion, and then the second fixing member 72 can be installed on the mass block 5. At this time, the top of the second fixing member 72 will press on the inner ring 101 of the second spring ring. Finally, fix the second fixing member 72, the second spring piece 71, and the mass block 5 together with bolts.

[0053] In the force actuator for use in a vacuum provided by an embodiment of the present invention, with reference to Figure 2 and Figure 3 , a thread is provided on the outer wall of the fastener 3, which can usually be a full thread. A thread is also provided on a part of the inner wall of the mounting housing 1. The outer wall of the fastener 3 and a part of the inner wall of the mounting housing 1 are connected by a thread to form a thread pair. It can be understood that the connection between the fastener 3 and the mounting housing 1 can be realized not only by the threaded connection method, but also for adjusting the relative height between the fastener 3 and the inner cavity of the mounting housing 1, so as to compress the first spring piece 61 or adjust the positional relationship between the coil module 41 and the magnet module 42, and further adjust the vibration magnitude of the voice coil motor 4. In a specific embodiment, the fastener 3 and the coil module 41 are connected by screws.

[0054] In the force actuator for use in a vacuum provided by an embodiment of the present invention, referring to Figure 1 , a sensor 9 is further provided on the bottom of the mass block 5, and the sensor 9 is used to detect the vibration of the mass block 5.

[0055] In the force actuator for use in a vacuum provided by an embodiment of the present invention, with reference to Figures 1 to 3, a vacuum feedthrough 11 is provided on the side wall of the installation housing 1. The vacuum feedthrough 11 can be connected to the installation housing 1 by means such as welding, or the vacuum feedthrough 11 and the installation housing 1 can be connected by a sealing ring. In short, it is necessary to ensure that the gas in the inner cavity of the installation housing 1 cannot exchange with the outside through the connection between the vacuum feedthrough 11 and the installation housing 1.

[0056] In the force actuator for use in a vacuum provided by the embodiments of the present invention, with reference to Figures 1 to 3 , a sealing cover 12 for closing the inner cavity of the installation housing 1 is further provided on the top of the installation housing 1. The sealing cover 12 can be connected to the installation housing 1 by means such as welding, and a completely insulating liquid or gas can be filled inside the installation housing 1 to improve the internal damping of the entire device. In a feasible embodiment, the vacuum feedthrough 11 can also be provided on the sealing cover 12.

[0057] The embodiments of the present invention also provide a method for using a force actuator for use in a vacuum, including the following steps:

[0058] Step 1) The coil module 41 of the voice coil motor 4 is energized, and the magnet module 42 moves relative to the coil module 41;

[0059] Step 2) The mass block 5 follows the movement of the magnet module 42, and the first moving component 6 and the second moving component 7 transmit the vibration of the mass block 5 to the sleeve 2; specifically, the movement of the mass block 5 causes the inner rings 101 of the first spring piece 61 and the second spring piece 71 to vibrate, and then the vibration is transmitted to the outer ring 103 through the connecting ring 102, and the outer ring 103 transmits the vibration to the sleeve 2;

[0060] Step 3) The sleeve 2 transmits the vibration to the installation housing 1.

Claims

1. A force actuator for use in a vacuum, characterized in that: Comprising a sealed mounting housing (1), a sleeve (2) and a fastener (3) are provided in the inner cavity of the mounting housing (1), the sleeve (2) and the fastener (3) are respectively detachably connected to the mounting housing (1), and the outer wall of the sleeve (2) is in contact with the inner wall of the mounting housing (1); A voice coil motor (4) of the magnet movement type and a mass (5) surrounding the outside of the voice coil motor (4) are provided in the inner cavity of the sleeve (2), the coil module (41) of the voice coil motor (4) is connected to the fastener (3), and the magnet module (42) of the voice coil motor (4) is connected to the mass (5); A first motion assembly (6) is connected between the top of the mass (5) and the top of the sleeve (2), and a second motion assembly (7) is connected between the bottom of the mass (5) and the bottom of the sleeve (2).

2. The force actuator for use in a vacuum according to claim 1, characterized in that: The first motion assembly (6) includes a first spring piece (61) and a first fixing member (62), the first spring piece (61) sequentially includes an inner ring (101), a connecting ring (102) and an outer ring (103) from the inside to the outside, the inner ring (101) of the first spring piece (61) is detachably connected to the top of the mass (5) through the first fixing member (62), and the outer ring (103) of the first spring piece (61) is clamped between the top of the sleeve (2) and the bottom of the fastener (3).

3. The force actuator for use in a vacuum according to claim 2, characterized in that: The first motion assembly (6) further includes a spring spacer block (8), the bottom of the spring spacer block (8) is in contact with the top of the first spring piece (61), and the spring spacer block (8) and the first spring piece (61) are clamped between the top of the sleeve (2) and the bottom of the fastener (3).

4. The force actuator for use in a vacuum according to claim 1, characterized in that: The second motion assembly (7) includes a second spring piece (71) and a second fixing member (72), the second spring piece (71) sequentially includes an inner ring (101), a connecting ring (102) and an outer ring (103) from the inside to the outside, the inner ring (101) of the second spring piece (71) is detachably connected to the bottom of the mass (5) through the second fixing member (72), and the outer ring (103) of the second spring piece (71) is clamped between the bottom of the sleeve (2) and the inner bottom surface of the mounting housing (1).

5. The force actuator for use in a vacuum according to claim 4, characterized in that: A step (13) is provided on the inner wall of the mounting housing (1), and the outer ring (103) of the second spring piece (71) is clamped between the step (13) and the bottom of the sleeve (2).

6. The force actuator for use in a vacuum according to claim 1, characterized in that: Threads are provided on the outer wall of the fastener (3), and threads are also provided on a part of the inner wall of the mounting housing (1), and the outer wall of the fastener (3) is threadedly connected to a part of the inner wall of the mounting housing (1).

7. The force actuator for use within a vacuum according to claim 1, characterized in that: A sensor (9) is further provided at the bottom of the mass (5).

8. The force actuator for use in a vacuum according to claim 1, characterized in that: A vacuum feedthrough (11) is provided on the side wall of the mounting housing (1); and / or, a sealing cover (12) for closing the inner cavity of the mounting housing (1) is further provided on the top of the mounting housing (1).

9. Use of the force actuator for use in a vacuum according to any one of claims 1 to 8 for vibration suppression or vibration excitation.

10. A method for using a force actuator in a vacuum according to any one of claims 1 to 8, comprising the following steps: Step 1) The coil module (41) of the voice coil motor (4) is energized, and the magnet module (42) moves relative to the coil module (41); Step 2) The mass block (5) moves with the magnet module (42), and the first moving component (6) and the second moving component (7) transmit the vibration of the mass block (5) to the sleeve (2); Step 3) The sleeve (2) transmits the vibration to the mounting housing (1).

Images