Inert gas multi-purification circulating device

Abstract

The invention provides an inert gas multi-purification circulating device, and relates to the technical field of gas purification equipment, the inert gas multi-purification circulating device comprises a purification tank body and a composite plate arranged in the purification tank body, the purification tank body is used for being communicated with a storage tank for storing inert gas, the composite plate comprises two detachably connected plate bodies and a plurality of through holes formed in each plate body, and the through holes are communicated with the purification tank body. Each through hole in one plate body is opposite to each through hole in the other plate body, so that when the two plate bodies are connected, every two corresponding through holes in the two plate bodies form a closed containing cavity, the internal volume of the containing cavity is larger than that of the molecular sieve, and the hole diameter of each through hole extends from small to large in the direction of the corresponding through hole. When inert gas is input into the purification tank body, the molecular sieve is directly driven to relatively move in the accommodating cavity, so that each part of the surface of the molecular sieve can be ensured to be in direct contact with the inert gas, and the surface of the molecular sieve is utilized to purify the inert gas to the greatest extent.

Description

Technical Field

[0001] The present invention relates to the technical field of gas purification equipment, and particularly relates to a device for multiple purification and circulation of inert gases. Background Art

[0002] Inert gases refer to a class of gases with very stable chemical properties that hardly react with other substances. Usually, any one of the methods of cryogenic distillation, adsorption, and membrane separation is used to remove impurities in the inert gas to achieve the purification of the inert gas.

[0003] Currently, when purifying inert gases by the adsorption method, it is usually necessary to use molecular sieves (silicoaluminate microporous crystals). The molecular sieves are placed in the purification cavity so that the molecular sieves can adsorb impurities in the inert gas on the surface to purify the inert gas.

[0004] However, in order to ensure the full purification of inert gases, a large number of molecular sieves are usually stacked in the purification cavity. The large number of molecular sieves can adsorb impurities sufficiently to ensure the purification effect. However, due to the way of stacking the molecular sieves, the surface of some molecular sieves will contact the surface of adjacent molecular sieves, resulting in the underutilization of the adsorption area on the surface of some molecular sieves. Summary of the Invention

[0005] Based on this, the purpose of the present invention is to provide a device for multiple purification and circulation of inert gases to solve the technical problem in the background art that the existing way of stacking molecular sieves will cause the surface of some molecular sieves to contact the surface of adjacent molecular sieves, resulting in the underutilization of the adsorption area on the surface of some molecular sieves.

[0006] The present invention provides a device for multiple purification and circulation of inert gases, including a purification tank body and at least one composite plate. The composite plate is arranged in the purification tank body, and the purification tank body is used to communicate with a storage tank for storing inert gases.

[0007] The composite plate includes two detachably connected plate bodies and a plurality of through holes arranged on each plate body. Each through hole on one plate body is arranged opposite to each through hole on the other plate body. When the two plate bodies are connected, each pair of corresponding through holes on the two plate bodies form a closed accommodation chamber. The internal volume of the accommodation chamber is larger than that of the molecular sieve, and the molecular sieve is used to adsorb impurities in the inert gas.

[0008] Wherein, the aperture of each through hole extends from small to large in the direction opposite to the through hole.

[0009] Further, at least one partition is arranged in the purification tank body to divide the internal space of the purification tank body into at least one purification cavity and at least one high-temperature cavity.

[0010] Among them, the composite plate is arranged in the purification cavity.

[0011] Furthermore, the purification circulation device further includes a rotation driving assembly for driving the composite plate to circulate between the purification cavity and the high-temperature cavity.

[0012] When the composite plate is located in the purification cavity, the molecular sieve is used to adsorb impurities in the inert gas.

[0013] When the composite plate is located in the high-temperature cavity, the high-temperature gas in the high-temperature cavity removes the impurities on the surface of the molecular sieve.

[0014] Among them, an opening is provided on the partition plate for the composite plate to circulate between the purification cavity and the high-temperature cavity.

[0015] Furthermore, a seal is provided on one end face of the composite plate close to the opening, and the thickness of the seal extends from small to large.

[0016] Furthermore, the purification circulation device includes multiple groups of composite plates.

[0017] Among them, each group of composite plates includes two oppositely arranged composite plates, and the two oppositely arranged composite plates are respectively arranged in the purification cavity and the high-temperature cavity, so as to drive the two composite plates in each group of composite plates to circulate between the purification cavity and the high-temperature cavity through the rotation driving assembly.

[0018] Furthermore, multiple groups of composite plates are arranged at intervals along the length direction of the purification tank body.

[0019] Furthermore, the rotation driving assembly includes a driver and a rotating shaft, and the driver is connected to the rotating shaft for driving the rotating shaft to rotate.

[0020] Among them, the driver is arranged outside the purification tank body, the rotating shaft is arranged inside the purification tank body and is connected to the composite plate, and the rotating shaft is used to drive the composite plate to rotate relative to the purification tank body.

[0021] Furthermore, the purification circulation device further includes an air inlet pipe having an input end and multiple output ends.

[0022] Among them, the input end is communicated with the storage tank, multiple output ends are all communicated with the purification tank body, and each output end is respectively arranged opposite to each group of composite plates.

[0023] Further, the purification circulation device further includes a first output pipe, a second output pipe, a first valve, a second valve, a third valve, and a transfer box body;

[0024] The first output pipe is used to connect the transfer box body, the first valve, and the second valve in parallel to the input end, and the second output pipe and the third valve are communicated with the transfer box body;

[0025] Wherein, the first valve and the second valve are respectively arranged at both ends of the transfer box body.

[0026] Further, the composite plate includes a first plate body, a second plate body, a plurality of first through holes arranged on the first plate body, and a plurality of second through holes arranged on the second plate body;

[0027] The first plate body and the second plate body are detachably connected to each other, and each of the first through holes is arranged opposite to a second through hole;

[0028] Wherein, the aperture of the first through hole extends from small to large in the direction towards the second through hole, and the aperture of the second through hole extends from small to large in the direction towards the first through hole.

[0029] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0030] In an inert gas multi - purification circulation device proposed by the present invention, a composite plate includes two detachably connected plate bodies. A plurality of through - holes are provided on each plate body, and each through - hole on one plate body is arranged opposite to each through - hole on the other plate body. When the two plate bodies are connected, each pair of corresponding through - holes on the two plate bodies form a closed accommodation chamber, and the internal volume of the accommodation chamber is larger than that of the molecular sieve. When purifying the inert gas, the two plate bodies can be disassembled first. The plurality of through - holes on one plate body can be used to preliminarily accommodate a plurality of molecular sieves. Then, the other plate body is installed, so that the two plate bodies form a composite plate, and the corresponding two through - holes can form a closed accommodation chamber, and the internal volume of the accommodation chamber is larger than that of the molecular sieve. The closed accommodation chamber can prevent the molecular sieve from falling out of the through - hole, and at the same time can ensure that the molecular sieve can move correspondingly in the accommodation chamber. When the inert gas is input into the purification tank body, the input of the inert gas will directly drive the molecular sieve to move relatively in the accommodation chamber, such as moving up and down, or rotating when moving up and down. The movement of the molecular sieve can ensure that every part of the surface of the molecular sieve can be in direct contact with the inert gas, so that the surface of the molecular sieve can be used to purify the inert gas to the greatest extent. And each molecular sieve has a single accommodation chamber, thus avoiding direct contact between adjacent two molecular sieves, and preventing part of the surface of the molecular sieve from not being able to contact the inert gas. Thereby, it can solve the technical problem that in the existing method of stacking molecular sieves, the surface of the molecular sieve contacts the surface of the adjacent molecular sieve, resulting in insufficient utilization of the adsorption area on the surface of some molecular sieves. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 Schematic diagram of the overall structure of the inert gas multi - purification circulation device in an embodiment of the present invention;

[0032] Figure 2 Front view of the purification tank body in an embodiment of the present invention;

[0033] Figure 3 For Figure 2 Schematic perspective view of the A - A cross - section;

[0034] Figure 4 For Figure 3 Enlarged schematic view of part A;

[0035] Figure 5 Schematic diagram of the internal structure of the purification tank body in an embodiment of the present invention;

[0036] Figure 6 Stereogram of the composite plate in an embodiment of the present invention;

[0037] Figure 7 For Figure 6 Enlarged schematic view of part B;

[0038] Figure 8 Schematic diagram of a usage state of a composite board in an embodiment of the present invention;

[0039] Figure 9 Another schematic diagram of a usage state of a composite board in an embodiment of the present invention;

[0040] Figure 10 Schematic diagram of a usage state of a molecular sieve in an embodiment of the present invention.

[0041] Reference numerals

[0042] In the figure: 100, purification tank body; 110, partition board; 111, opening part; 120, purification cavity; 130, high-temperature cavity; 200, composite board; 210, first board body; 211, first through hole; 220, second board body; 221, second through hole; 230, accommodation chamber; 300, storage tank; 400, molecular sieve; 500, rotation driving assembly; 510, driver; 520, rotating shaft; 600, seal; 700, intake pipe; 710, input end; 720, output end; 800, first output pipe; 810, second output pipe; 820, first valve; 830, second valve; 840, third valve; 850, transfer box body. Detailed implementation manners

[0043] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the disclosure of the present invention more thorough and comprehensive.

[0044] It should be noted that when an element is referred to as "fixedly arranged on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for illustration.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present invention belongs. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0046] Please refer to Figures 1 to 10, shown is an inert gas multi - purification recycling device in an embodiment of the present invention, including a purification tank body 100, at least one composite plate 200. The composite plate 200 is arranged inside the purification tank body 100. The purification tank body 100 is used to communicate with a storage tank 300 storing inert gas. It should be noted that, in this embodiment, the storage tank 300 stores inert gas with impurities. To facilitate the use of inert gas, the inert gas needs to be purified of impurities.

[0047] Specifically, in this embodiment, the composite plate 200 includes two detachably connected plate bodies, and a plurality of through - holes arranged on each plate body. Each through - hole on one plate body is arranged opposite to each through - hole on the other plate body. When the two plate bodies are connected, each pair of corresponding through - holes on the two plate bodies form a closed accommodation chamber 230. The internal volume of the accommodation chamber 230 is larger than that of the molecular sieve 400. The molecular sieve 400 is used to adsorb impurities in the inert gas;

[0048] Wherein, the aperture diameter of each through - hole extends from small to large in the direction towards the opposite through - hole.

[0049] It should be noted that the molecular sieve 400 belongs to the conventional prior art in this field. Specifically, the molecular sieve 400 is a material containing precise and single tiny pores, which can be used to adsorb gases or liquids and is in the shape of a sphere.

[0050] In specific implementation, the composite plate 200 in this example includes two detachably connected plate bodies. A plurality of through holes are provided on each plate body, and each through hole on one plate body is disposed opposite to each through hole on the other plate body. When the two plate bodies are connected, each pair of corresponding through holes on the two plate bodies form a closed accommodation chamber 230, and the internal volume of the accommodation chamber 230 is larger than that of the molecular sieve 400. That is to say, when putting the molecular sieve 400 into the purification tank body 100, the two plate bodies can be disassembled first. The plurality of through holes on one plate body can be used to preliminarily accommodate a plurality of molecular sieves 400. Subsequently, the other plate body is installed, so that the two plate bodies form a composite plate 200, and the corresponding two through holes can form a closed accommodation chamber 230, and the internal volume of the accommodation chamber 230 is larger than that of the molecular sieve 400. The closed accommodation chamber 230 can prevent the molecular sieve 400 from falling out of the through hole, and at the same time can ensure that the molecular sieve 400 can perform corresponding activities in the accommodation chamber 230. That is to say, when an inert gas is input into the purification tank body 100, the input of the inert gas will directly drive the molecular sieve 400 to move relatively in the accommodation chamber, such as moving up and down, or rotating when moving up and down. The movement of the molecular sieve 400 can ensure that each part of the surface of the molecular sieve 400 can be in direct contact with the inert gas, so that the surface of the molecular sieve 400 can be used to purify the inert gas to the greatest extent, and each molecular sieve 400 has a single accommodation chamber 230, thereby avoiding direct contact between two adjacent molecular sieves 400, and causing part of the surface of the molecular sieve 400 not to be in contact with the inert gas, so as to solve the technical problem that in the existing method of stacking and putting the molecular sieve 400, the surface of the molecular sieve 400 is in contact with the surface of the adjacent molecular sieve 400, resulting in the adsorption area on the surface of some molecular sieves 400 not being fully utilized.

[0051] For further understanding of this case, please refer to Figure 6 , Figure 7 and Figure 10 As shown, the two plate bodies in the composite plate 200 shown in this example can be a first plate body 210 and a second plate body 220 respectively. A plurality of first through holes 211 are provided on the first plate body 210, and a plurality of second through holes 221 are provided on the second plate body 220. The first plate body 210 and the second plate body 220 are detachably connected to each other, and each first through hole 211 is disposed opposite to a second through hole 221. Among them, the aperture of the first through hole 211 extends from small to large in the direction towards the second through hole 221, and the aperture of the second through hole 221 extends from small to large in the direction towards the first through hole 211.

[0052] Specifically, the accommodation chamber 230 formed by the first through hole 211 and the corresponding second through hole 221 has a shape that is narrow at the top, wide in the middle, and narrow at the bottom. By restricting the shapes of the first through hole 211 and the second through hole 221, while accommodating the molecular sieve 400, it is ensured that the molecular sieve 400 can move within the accommodation chamber 230 and prevent the molecular sieve 400 from falling out of the accommodation chamber 230.

[0053] In addition, since the use effect of the molecular sieve 400 is not good after adsorbing impurities, to realize the recycling of the molecular sieve 400, the impurities on the surface of the molecular sieve 400 can be removed by high temperature. It should be noted that in the prior art, when the saturated molecular sieve 400 is heated at 149°C - 343°C, the adsorbed impurities (such as moisture, carbon dioxide, etc.) can be desorbed by blowing with air or steam.

[0054] To realize the reuse of the molecular sieve 400, in this embodiment, at least one partition 110 is provided in the purification tank 100 to divide the internal space of the purification tank 100 into at least one purification cavity 120 and at least one high - temperature cavity 130. Among them, the composite plate 200 is arranged in the purification cavity 120. Specifically, the purification recycling device further includes a rotation driving assembly 500. The rotation driving assembly 500 is used to drive the composite plate 200 to move cyclically between the purification cavity 120 and the high - temperature cavity 130. When the composite plate 200 is located in the purification cavity 120, the molecular sieve 400 is used to adsorb impurities in the inert gas. When the composite plate 200 is located in the high - temperature cavity 130, the high - temperature gas in the high - temperature cavity 130 removes the impurities on the surface of the molecular sieve 400. Among them, an opening 111 for the composite plate 200 to move cyclically between the purification cavity 120 and the high - temperature cavity 130 is provided on the partition 110.

[0055] Specifically, a pipe body for blowing out high - temperature gas can be arranged in the high - temperature cavity 130. The pipe body can be directly opposite to the composite plate 200 located in the high - temperature cavity 130, so that the high - temperature gas can remove the impurities on the surface of the molecular sieve 400. And when inputting high - temperature gas, the high - temperature gas can be output with a certain air pressure. Then when the high - temperature gas passes through the first through hole 211 and acts on the molecular sieve 400, the impurities can be separated from the molecular sieve 400, and the separated impurities can be blown out from the bottom of the second through hole 221. Thus, the molecular sieve 400 can be reused, and in some actual situations, the molecular sieve 400 does not need to be taken out from the composite plate 200, so as to improve the practicality of the purification recycling device in this embodiment.

[0056] In some other actual situations, when the molecular sieve 400 is repeatedly used multiple times, there will be a problem of poor adsorption effect. In the purification circulation device of this example, there is also an ejector plate corresponding to the second plate body 220. A plurality of ejector columns are arranged on the ejector plate, and the plurality of ejector columns can be arranged opposite to the plurality of second through holes 221. For details, please refer to Figure 8 and Figure 9 As shown, that is to say, when the first plate body 210 and the second plate body 220 are separated, due to the action of gravity, the molecular sieve 400 will be located in the second through hole 221 of the second plate body 220, and is ejected upward from the bottom of the second plate body 220 through the ejector plate, so that the plurality of ejector columns eject the molecular sieve 400 from the second through hole 221, making it convenient to operate when cleaning the molecular sieve 400 with poor adsorption effect.

[0057] In addition, a closing door can be arranged on one side of the purification tank body 100 close to the high-temperature cavity 130, and the closing door and the purification tank body 100 can be connected by a hinge in the prior art.

[0058] In addition, to ensure the stability of the composite plate 200 in the purification cavity 120 and the high-temperature cavity 130, and to prevent high-temperature gas from being introduced into the purification cavity 120, in this example, a sealing member 600 is provided on one end face of the composite plate 200 close to the opening 111. The thickness of the sealing member 600 extends from small to large, and the sealing member 600 can be used to seal the opening 111. In this example, the partition plate 110 can be an insulating plate in the prior art.

[0059] At the same time, to drive the composite plate 200 to perform cyclic motion in the purification cavity 120 and the high-temperature cavity 130, in this example, the rotary drive assembly 500 includes a driver 510 and a rotating shaft 520. The driver 510 is connected to the rotating shaft 520 and is used to drive the rotating shaft 520 to rotate. Among them, the driver 510 is arranged outside the purification tank body 100, and the rotating shaft 520 is arranged inside the purification tank body 100 and is connected to the composite plate 200. The rotating shaft 520 is used to drive the composite plate 200 to rotate relative to the purification tank body 100.

[0060] Specifically, the driver 510 can adopt a servo motor to drive the rotating shaft 520 to rotate.

[0061] To improve the purification efficiency of the inert gas, in some preferred embodiments, the purification circulation device includes multiple groups of composite plates 200, and the multiple groups of composite plates 200 are arranged at intervals along the length direction of the purification tank body 100;

[0062] Among them, each group of composite plates 200 includes two oppositely arranged composite plates 200, and the two oppositely arranged composite plates 200 are respectively arranged in the purification cavity 120 and the high-temperature cavity 130, so as to drive the two composite plates 200 in each group of composite plates 200 to circulate between the purification cavity 120 and the high-temperature cavity 130 through the rotation driving assembly 500.

[0063] Specifically, please refer to Figure 3 As shown, the two composite plates 200 in each group of composite plates 200 can be the left composite plate 200 and the right composite plate 200 respectively. By using the two composite plates 200, when the molecular sieve 400 in the purification cavity 120 has a poor adsorption effect, the composite plate 200 in the high-temperature cavity 130 can be rotated into the purification cavity 120 to remove impurities from the inert gas. At the same time, the composite plate 200 in the purification cavity 120 can be rotated into the high-temperature cavity 130 to remove impurities from the molecular sieve 400, so as to realize the replacement of the molecular sieve 400 in the purification cavity 120 without stopping the machine operation, and further ensure the purification effect.

[0064] To further improve the purification effect of the inert gas, the purification circulation device further includes an intake pipe 700 having an input end 710 and a plurality of output ends 720;

[0065] Among them, the input end 710 is communicated with the storage tank 300, and the plurality of output ends 720 are all communicated with the purification tank body 100, and each output end 720 is respectively arranged opposite to each group of composite plates 200. That is to say, the inert gas will be input into the purification tank body 100 through a plurality of transmission paths. By using the relative arrangement of each transmission path for each group of composite plates 200, the inert gas can be purified in a short time.

[0066] Moreover, since the composite plate 200 circulates between the purification cavity 120 and the high-temperature cavity 130, it will cause the inert gas to be introduced into the high-temperature cavity 130 through the opening 111 of the partition plate 110. Then, in this embodiment, the purification circulation device further includes a first output pipe 800, a second output pipe 810, a first valve 820, a second valve 830, a third valve 840 and a transfer box body 850. The first output pipe 800 is used to connect the transfer box body 850, the first valve 820 and the second valve 830 in parallel to the input end 710, and the second output pipe 810 and the third valve 840 are communicated with the transfer box body 850, wherein the first valve 820 and the second valve 830 are respectively arranged at both ends of the transfer box body 850.

[0067] Please refer to Figure 1As shown, during specific implementation, since the inert gas needs to be adsorbed multiple times to be completely purified, when performing the first purification, the inert gas will enter and exit the storage tank 300 and enter the purification tank body 100 for purification. At this time, the first purification does not completely remove the impurities in the inert gas. At this time, the first valve 820 and the second valve 830 are opened, and the inert gas in the purification tank body 100 will be transmitted along the first output pipe 800 and the transfer box body 850 to the input end 710 of the intake pipe 700. Subsequently, the inert gas that has completed the first purification is input into the purification tank body 100 again for the second purification, and this cycle is repeated to perform multiple cycles of purification on the inert gas. During the purification process, the molecular sieve 400 needs to be replaced. At this time, the inert gas in the purification tank body 100 is input into the transfer box body 850, and the first valve 820, the second valve 830, and the third valve 840 are closed, so that the inert gas will be directly stored in the transfer box body 850. After the molecular sieve 400 is replaced, the first valve 820 is opened again, so that the inert gas can enter the purification tank body 100 again for purification treatment. When the purification is completed, the first valve 820 is closed, and the third valve 840 is opened, so that the purified inert gas can be output to the outside.

[0068] In summary, in an inert gas multiple purification and recycling device provided by an embodiment of the present invention, since the composite plate 200 includes two detachably connected plate bodies, and a plurality of through holes are provided on each plate body, and each through hole on one plate body is disposed opposite to each through hole on the other plate body, when the two plate bodies are connected, each pair of corresponding through holes on the two plate bodies form a closed accommodation chamber 230, and the internal volume of the accommodation chamber 230 is larger than that of the molecular sieve 400. When purifying the inert gas, the two plate bodies can be first disassembled, and the plurality of through holes on one plate body can be used to preliminarily accommodate a plurality of molecular sieves 400. Subsequently, the other plate body is installed, so that the two plate bodies form a composite plate 200, and the corresponding two through holes can form a closed accommodation chamber 230, and the internal volume of the accommodation chamber 230 is larger than that of the molecular sieve 400. The closed accommodation chamber 230 can prevent the molecular sieve 400 from falling out of the through hole, and at the same time can ensure that the molecular sieve 400 performs corresponding activities in the accommodation chamber 230. When the inert gas is input into the purification tank body 100, the input of the inert gas will directly drive the molecular sieve 400 to move relatively in the accommodation chamber, such as moving up and down, or rotating when moving up and down. The movement of the molecular sieve 400 can ensure that every part of the surface of the molecular sieve 400 can be directly contacted with the inert gas, so that the surface of the molecular sieve 400 can be used to purify the inert gas to the greatest extent, and each molecular sieve 400 has a single accommodation chamber 230, thereby avoiding direct contact between two adjacent molecular sieves 400, and causing some surfaces of the molecular sieve 400 not to be in contact with the inert gas. Therefore, the technical problem that in the existing method of stacking and placing the molecular sieve 400, the surface of the molecular sieve 400 is in contact with the surface of the adjacent molecular sieve 400, so that the adsorption area on the surface of some molecular sieves 400 cannot be fully utilized can be solved.

[0069] In the description of the present specification, the descriptions referring to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In the present specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0070] The above embodiments only represent several implementation manners of the present invention, and the descriptions thereof are relatively specific and detailed, but should not be construed as limiting the scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. An inert gas multiple purification and recycling device, characterized in that, It includes a purification tank body and at least one composite plate. The composite plate is arranged inside the purification tank body, and the purification tank body is used to communicate with a storage tank storing inert gas; The composite plate includes two detachably connected plate bodies and a plurality of through holes arranged on each of the plate bodies. Each of the through holes on one plate body is arranged opposite to each of the through holes on the other plate body, so that when the two plate bodies are connected, each pair of corresponding through holes on the two plate bodies form a closed accommodation chamber. The internal volume of the accommodation chamber is larger than that of the molecular sieve, and the molecular sieve is used to adsorb impurities in the inert gas; Wherein, the aperture of each through hole extends from small to large in the direction opposite to the through hole.

2. The inert gas multiple purification and recycling device according to claim 1, wherein At least one partition is arranged inside the purification tank body to divide the internal space of the purification tank body into at least one purification cavity and at least one high-temperature cavity; Wherein, the composite plate is arranged inside the purification cavity.

3. The inert gas multi-purification recycling device according to claim 2, wherein, The purification circulation device further includes a rotation driving assembly, and the rotation driving assembly is used to drive the composite plate to circulate between the purification cavity and the high-temperature cavity; When the composite plate is located inside the purification cavity, the molecular sieve is used to adsorb impurities in the inert gas; When the composite plate is located inside the high-temperature cavity, the high-temperature gas in the high-temperature cavity removes the impurities on the surface of the molecular sieve; Wherein, an opening is arranged on the partition for the composite plate to circulate between the purification cavity and the high-temperature cavity.

4. The inert gas multi - purification recycling device according to claim 3, characterized in that, A sealing member is arranged on one end face of the composite plate close to the opening, and the thickness of the sealing member extends from small to large.

5. The inert gas multi-purification recycling device according to claim 3, characterized in that, The purification circulation device includes multiple groups of composite plates; Wherein, each group of composite plates includes two relatively arranged composite plates, and the two relatively arranged composite plates are respectively arranged inside the purification cavity and the high-temperature cavity, so as to drive the two composite plates in each group of composite plates to circulate between the purification cavity and the high-temperature cavity through the rotation driving assembly.

6. The inert gas multiple purification and recycling device according to claim 5, characterized in that, Multiple groups of composite plates are arranged at intervals along the length direction of the purification tank body.

7. The inert gas multiple purification and recycling device according to claim 5, characterized in that, The rotation driving assembly includes a driver and a rotating shaft. The driver is connected to the rotating shaft and is used to drive the rotating shaft to rotate; Wherein, the driver is arranged outside the purification tank body, the rotating shaft is arranged inside the purification tank body and is connected to the composite plate, and the rotating shaft is used to drive the composite plate to rotate relative to the purification tank body.

8. The inert gas multi-purification recycling device according to claim 5, characterized in that, The purification circulation device further includes an inlet pipe having an input end and a plurality of output ends; Wherein, the input end is communicated with the storage tank, and a plurality of output ends are all communicated with the purification tank body, and each output end is respectively arranged opposite to each group of composite plates.

9. The inert gas multi-purification recycling device according to claim 8, characterized in that, The purification circulation device further includes a first output pipe, a second output pipe, a first valve, a second valve, a third valve and a transfer box body; The first output pipe is used to connect the transfer box body, the first valve and the second valve in parallel to the input end, and the second output pipe and the third valve are communicated with the transfer box body; Wherein, the first valve and the second valve are respectively arranged at both ends of the transfer box body.

10. The inert gas multi - purification recycling device according to claim 1, characterized in that, The composite board includes a first board body, a second board body, a plurality of first through holes provided on the first board body, and a plurality of second through holes provided on the second board body; The first board body and the second board body are detachably connected to each other, and each of the first through holes is disposed opposite to one of the second through holes; Wherein, the aperture of the first through hole extends from small to large in the direction towards the second through hole, and the aperture of the second through hole extends from small to large in the direction towards the first through hole.

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