Air duct structure furnace body for rapid cooling

Abstract

The application relates to the technical field of semiconductors, in particular to a wind channel structure furnace body for rapid cooling, which is composed of a vertical furnace, an air inlet system, a heat preservation structure, a bearing container, an air outlet, an axial air inlet channel, a wind channel structure group, a furnace wire, an air outlet control valve, an air inlet control valve, a thermocouple sensor and a water cooling system. The application can achieve the purposes of rapid cooling, reducing the erosion of cooling gas to the inner wall of the furnace body, reducing the generation of fine pollution particles and prolonging the service life of the furnace body by reasonably arranging the space and optimizing the structure of the wind channel structure, so that the vertical furnace can be operated more safely and reliably.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and in particular to a furnace body with a wind channel structure for rapid cooling. BACKGROUND

[0002] In the chip manufacturing process, the heat treatment equipment process is a very critical link. Through oxidation, deposition, annealing, diffusion and other processes on the wafer, the physical and electrical properties of the chip can be precisely controlled. After completing the heat treatment process step, the wafer in the furnace body needs to be cooled. In order to ensure the overall performance consistency and quality stability of the produced chips, the cooling rate needs to be reasonably controlled.

[0003] In the prior art, some heat treatment equipment adopts a natural cooling method. This method has the problems of slow cooling speed and long process time, which seriously affects the production efficiency. At the same time, for some processes that require a cooling rate, the heat treatment equipment cannot meet the corresponding production requirements. Some heat treatment equipment uses air cooling, but the design of the air channel structure does not fully consider the particularity of the semiconductor heat treatment process. For example, the air channel layout is not reasonable, which causes the cold air to be unable to uniformly cover the furnace body, resulting in inconsistent cooling rates of different parts of the furnace body, and thus affecting the uniformity of the performance of the semiconductor device.

[0004] In the process of cooling the wafer in the furnace body using the existing air channel structure, a fan is often used to accelerate the flow speed of the cooling gas in the air channel structure to carry away the heat inside the furnace body. When the fan accelerates the flow of the cooling gas, the high-speed flowing cooling gas will generate a large impact force and friction force on the heat preservation material of the inner wall of the furnace body, thereby accelerating the erosion of the heat preservation material. With the passage of time, the structure and performance of the heat preservation material will be gradually destroyed, and the heat preservation fibers on its surface will gradually fall off, and small particles will fall off inside the furnace body. In the production process of semiconductor wafers, the cleanliness of the production environment is extremely high. If these small pollution particles are scattered everywhere in the furnace body under the action of the airflow, it will have a bad impact on the internal environment of the furnace body. At the same time, if the furnace body has an exhaust system, it may reduce the impact of these small pollution particles on the internal environment, but it will adversely affect the service life and normal operation of the furnace body, thereby affecting the performance and yield of the entire semiconductor chip and increasing the maintenance cost and production risk of the equipment.

[0005] Therefore, under the premise of realizing air cooling of the wafer in the furnace body, how to reasonably arrange the space and optimize the structure of the air channel structure to achieve rapid cooling, reduce the erosion of the cooling gas to the inner wall of the furnace body, reduce the generation of small pollution particles, and improve the service life of the furnace body has become a technical problem that needs to be solved by those skilled in the art. SUMMARY

[0006] The present application aims to overcome the above-mentioned defects existing in the prior art, and provides a wind channel structure furnace body for rapid cooling, so as to reduce the erosion of the cooling gas to the inner wall of the furnace body, reduce the generation of fine pollution particles, improve the service life of the vertical furnace, and realize safer and more reliable operation of the vertical furnace.

[0007] To achieve the above-mentioned purpose, the present application provides a wind channel structure furnace body for rapid cooling, comprising: a vertical furnace, an air inlet system arranged outside the vertical furnace, a heat preservation structure arranged on the inner wall of the vertical furnace, and a bearing container arranged inside the vertical furnace, the space between the heat preservation structure and the bearing container constitutes a furnace chamber, the heat preservation structure is provided with an axial air inlet channel and a wind channel structure group extending along the axial direction and the circumferential direction of the vertical furnace respectively, the input end of the axial air inlet channel is communicated with the output end of the air inlet system, the input end of the wind channel structure group is communicated with the output end of the axial air inlet channel, and the output end of the wind channel structure group is communicated with the furnace chamber; the vertical furnace is divided into multiple temperature zones according to the height of the vertical furnace, at least one wind channel structure group is arranged in each temperature zone, and the number of wind channel structure groups in each temperature zone is arranged according to a preset number ratio; along the circumferential direction of the vertical furnace, each wind channel structure group comprises multiple transverse wind channel structures, and adjacent two transverse wind channel structures are distributed according to a first preset included angle; along the axial direction of the vertical furnace, adjacent two transverse wind channel structures in adjacent two wind channel structure groups are distributed according to a second preset included angle; each transverse wind channel structure comprises a long wind channel and an air exchange chamber which are communicated, and the long wind channel and the air exchange chamber are arranged according to a preset length ratio and a preset diameter ratio, so as to reduce the wind pressure intensity of the cooling gas at the output end of the transverse wind channel structure.

[0008] Preferably, the number of wind channel structure groups in each temperature zone is arranged according to a preset number ratio, which comprises: according to the height of the vertical furnace, the vertical furnace is divided into X temperature zones, the number of wind channel structure groups in the bottom temperature zone is set to Y, Y is an integer greater than 1, and from the top to the bottom of the vertical furnace, the number ratio of wind channel structure groups in each temperature zone is: (Y X +1~2) : (Y X-1 +1~2) :... : (Y1~1), wherein: Y X represents the number of wind channel structure groups in the Xth temperature zone, and Y X , Y X-1 ,..., Y1 all have the same value.

[0009] Preferably, along the circumferential direction of the vertical furnace, each wind channel structure group comprises multiple transverse wind channel structures, and adjacent two transverse wind channel structures are distributed according to a first preset included angle, which comprises: along the circumferential direction of the vertical furnace, the number of transverse wind channel structures of each wind channel structure group is 2-30, and the included angle between adjacent two transverse wind channel structures is 12-180°.

[0010] Preferably, the second preset included angle is 0-90° between the two adjacent transverse air duct structures in the two adjacent air duct structure groups along the axial direction of the vertical furnace.

[0011] Preferably, the number of the long air ducts is two, which are a first long air duct and a second long air duct, the first long air duct, the air exchange chamber and the second long air duct are sequentially arranged along the transverse extension direction of the vertical furnace, the first long air duct is arranged close to the hearth, the length ratio between the first long air duct, the air exchange chamber and the second long air duct is (1-10):(1-10):(1-10), and the diameter ratio between the first long air duct, the air exchange chamber and the second long air duct is (1-10):(1-10):(1-10).

[0012] Preferably, the inner side surface of the heat preservation structure is coated with a furnace wire made of a material with high temperature resistance and fast heating.

[0013] Preferably, the top of the vertical furnace is provided with an exhaust port, the outside of the vertical furnace is provided with an exhaust system, an exhaust control valve is arranged at the exhaust port, the exhaust outlet of the exhaust control valve is in communication with the input end of the exhaust system, and the output end of the exhaust system is in communication with the external plant end, for discharging the exhaust gas in the vertical furnace to the external plant end.

[0014] Preferably, the axial air inlet duct is provided with an air inlet port in communication with the outside of the heat preservation structure, the air inlet port is provided with an air inlet control valve, the air inlet of the air inlet control valve is in communication with the output end of the air inlet system, for guiding the cooling gas flow conveyed by the air inlet system to pass through the axial air inlet duct and the air duct structure group in sequence to enter the hearth, and then discharged by the exhaust port after heat exchange.

[0015] Preferably, the outer wall of the vertical furnace is provided with a plurality of thermocouple sensors, and one thermocouple sensor is arranged for each temperature zone.

[0016] Preferably, the outer wall of the vertical furnace is further provided with a water cooling system for cooling the outer wall of the vertical furnace.

[0017] The application has the advantages and beneficial effects that the air duct structure furnace body for rapid cooling provided by the application can realize rapid cooling of the furnace chamber by setting the air inlet system, the air inlet, the axial air inlet duct, the air duct structure group and the air outlet, introducing the cooling air flow conveyed by the air inlet system through the air inlet, and making the cooling gas enter the furnace chamber through the axial air inlet duct and the air duct structure group in sequence and then discharged by the air outlet after heat exchange; by dividing multiple temperature zones according to the height of the vertical furnace and optimizing the number of air duct structure groups in each temperature zone, the cooling effect of the upper part of the furnace chamber can be effectively increased when the cooling gas flows from the bottom temperature zone to the upper temperature zone of the furnace chamber; by optimizing the number of transverse air duct structures, the included angle between the adjacent two transverse air duct structures and the included angle between the adjacent two transverse air duct structures in the adjacent two air duct structure groups along the circumferential direction and the axial direction of the vertical furnace, not only the cooling rate of the vertical furnace in the circumferential direction and the cooling effect in the axial direction can be improved, but also the problem of reduced heat preservation effect of the vertical furnace caused by too many transverse air duct structures can be avoided, so that the heat preservation effect of the vertical furnace is ensured; by setting the transverse air duct structure composed of the long air duct and the air exchange chamber, not only the wind pressure intensity and the gas turbulence effect of the cooling gas at the output end of the transverse air duct structure can be effectively reduced, so that the erosion degree of the cooling gas to the inner wall of the vertical furnace is reduced, but also the problem of reduced yield of wafers caused by the generation of fine pollution particles can be avoided, and the service life of the vertical furnace can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a structural schematic view of the air duct structure furnace body for rapid cooling of the application.

[0019] Figure 2 It is a top view of the air duct structure group of the application.

[0020] Figure 3 It is a structural schematic view of the transverse air duct structure of the application.

[0021] Figure 4 It is a flow chart of the air cooling of the application.

[0022] Figure 5 It is a schematic view of the adjacent two transverse air duct structures in the adjacent two air duct structure groups distributed at the second preset included angle.

[0023] Figure 6 It is a schematic view of the adjacent two transverse air duct structures distributed at the first preset included angle in the scene of uneven arrangement of multiple transverse air duct structures.

[0024] Figures: vertical furnace 1, axial air inlet duct 2, air duct structure group 3, bearing container 4, air inlet system 5, air outlet system 6, furnace wire 7, heat preservation structure 8, thermocouple sensor 9, air outlet 10, air outlet control valve 11, air inlet 12, air inlet control valve 13, water cooling system 14, upper temperature zone 15, middle temperature zone 16, lower temperature zone 17, transverse air duct structure 3.1, first long air duct 3.1.1, air exchange chamber 3.1.2, second long air duct 3.1.3, transverse air duct structure A of the current layer, transverse air duct structure B of the adjacent layer, second preset included angle a. DETAILED DESCRIPTION

[0025] The embodiments of the present application will be described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only, for the purpose of explanation, and are not to be understood as limiting the present application, and the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0026] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0027] Referring to the drawings Figures 1-3 A furnace body with air duct structure for rapid cooling, which is composed of vertical furnace 1, air inlet system 5, heat preservation structure 8, bearing container 4, air outlet 10, axial air inlet duct 2, air duct structure group 3, furnace wire 7, air outlet control valve 11, air inlet control valve 13, thermocouple sensor 9 and water cooling system 14.

[0028] In the present embodiment, referring to the drawings Figure 1The inner wall of the vertical furnace 1 is provided with a heat preservation structure 8, the inside of the vertical furnace 1 is provided with a bearing container 4, the space between the heat preservation structure 8 and the bearing container 4 constitutes a furnace chamber, the inner side surface of the heat preservation structure 8 is paved with furnace wires 7, wherein the heat preservation structure 8 is made of high-temperature heat insulation material and composite material, for example, the heat preservation structure 8 can be made of polycrystalline alumina fiber heat preservation material, for improving the heat preservation effect of the vertical furnace 1; the bearing container 4 is made of quartz tube material, for loading a wafer boat, the wafer boat can accommodate a plurality of wafers; the furnace wires 7 are made of high-temperature resistant and fast heating material, the furnace wires 7 are uniformly installed and arranged on the inner side surface of the heat preservation structure 8, the furnace wires 7 can be made of iron-chromium-aluminum alloy resistance wire material, and can generate a large amount of heat during the working of the vertical furnace 1, so as to perform various process treatments on the wafers on the wafer boat through the bearing container 4.

[0029] In the embodiment, in order to realize the air cooling function of the furnace chamber, shorten the wafer processing process time, and further speed up the production efficiency, the application is provided with an air inlet system 5 outside the vertical furnace 1, and an axial air inlet channel 2 and a wind channel structure group 3 extending along the axial direction and the circumferential direction of the vertical furnace 1 are arranged inside the heat preservation structure 8, the axial air inlet channel 2 is used for conveying cooling gas along the axial extension direction of the vertical furnace 1, and the wind channel structure group 3 is used for conveying cooling gas along the radial extension direction of the vertical furnace 1, wherein the input end of the axial air inlet channel 2 is communicated with the output end of the air inlet system 5, the input end of the wind channel structure group 3 is communicated with the output end of the axial air inlet channel 2, and the output end of the wind channel structure group 3 is communicated with the furnace chamber, for conveying the cooling gas conveyed by the air inlet system 5 to the furnace chamber through the axial air inlet channel 2 and the wind channel structure group 3, rapidly cooling and cooling the furnace chamber by using the heat exchange principle, and finally discharging the waste gas in the vertical furnace 1 to the outside through the air outlet 10 and the air outlet system 6.

[0030] In the embodiment, since the temperature of the cooling gas gradually rises when flowing from the bottom of the furnace chamber to the upper part of the furnace chamber, the cooling effect will gradually decrease, in order to increase the cooling effect of the middle and upper parts of the furnace chamber to ensure the uniformity of the cooling, a plurality of wind channel structure groups 3 are arranged at the middle and upper parts of the furnace chamber to accelerate the introduction of the cooling gas, the vertical furnace 1 is divided into a plurality of temperature zones according to the height of the vertical furnace 1, and the number and spatial layout of the wind channel structure groups 3 in each temperature zone are optimized, so that the rapid cooling of the furnace chamber can be realized, the cooling effect of the middle and upper parts of the furnace chamber can be effectively increased, and the requirement of uniformity of the cooling can be ensured, so as to ensure the yield of the wafers; specifically, a plurality of temperature zones are divided according to the height of the vertical furnace 1, at least one wind channel structure group 3 is arranged in each temperature zone, and the number of the wind channel structure groups 3 in each temperature zone is arranged according to a preset number ratio, so as to increase the cooling effect of the middle and upper parts of the furnace chamber when the cooling gas flows from the bottom temperature zone to the upper temperature zone of the furnace chamber during the process of conveying the cooling gas to the furnace chamber through the axial air inlet channel 2 and the wind channel structure group 3.

[0031] In the embodiment, along the axial direction of the vertical furnace 1, a plurality of air duct structure groups 3 are arranged in each temperature zone of the vertical furnace 1, and the number of air duct structure groups 3 in each temperature zone is arranged according to a preset number ratio. Specifically, according to the height of the vertical furnace 1, the height is divided into X temperature zones, the number of air duct structure groups 3 in the bottom temperature zone is set to Y, Y is an integer greater than 1, and from the top to the bottom of the vertical furnace 1, the number ratio of air duct structure groups 3 in each temperature zone is (Y X +1~2) : (Y X-1 +1~2) :... : (Y1~1), wherein Y X represents the number of air duct structure groups 3 in the Xth temperature zone, and Y X , Y X-1 ,..., Y1 are the same; in addition, it should be noted that the more the number of temperature zones X is set, the fewer the number of air duct structure groups 3 in a single temperature zone is, and the height of the vertical furnace 1 is defined as H, the height h of the temperature zone is H / X, and the air duct structure groups 3 in each temperature zone can be arranged uniformly or non-uniformly, which can be adjusted flexibly according to actual production needs, and is not limited here.

[0032] For example, in the embodiment, referring to the accompanying drawings Figure 1 , according to the height of the vertical furnace 1, the height is divided into three temperature zones from top to bottom, which are the lower temperature zone 17, the middle temperature zone 16 and the upper temperature zone 15. Since the cooling gas is introduced from the lower air inlet 12, the cooling effect will decrease when it reaches the middle temperature zone 16 and the upper temperature zone 15, therefore, the number of air duct structure groups 3 arranged in the upper temperature zone 15 and the middle temperature zone 16 will exceed that arranged in the lower temperature zone 17, for example: the number ratio of air duct structure groups 3 in the upper temperature zone 15, the middle temperature zone 16 and the lower temperature zone 17 is (10~2) : (10~2) : (10~1), preferably, the number ratio of air duct structure groups 3 in the upper temperature zone 15, the middle temperature zone 16 and the lower temperature zone 17 is 3:3:2.

[0033] In the embodiment, the number of the lateral air duct structures 3.1 in the same lateral direction affects the cooling rate in the lateral direction, and a large number of the lateral air duct structures 3.1 also reduces the heat preservation effect of the vertical furnace 1. Therefore, in order to improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, and ensure the heat preservation effect of the vertical furnace 1, the number and spatial layout of the lateral air duct structures 3.1 in the same circumferential direction and the spatial layout between the adjacent two lateral air duct structures 3.1 in the axial direction of the vertical furnace 1 are optimized, so as to improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, avoid the problem of reducing the heat preservation effect of the vertical furnace 1 caused by arranging too many lateral air duct structures 3.1, and ensure the heat preservation effect of the vertical furnace 1. Specifically, along the circumferential direction of the vertical furnace 1, each air duct structure group 3 includes a plurality of lateral air duct structures 3.1, and the adjacent two lateral air duct structures 3.1 are distributed at a first preset angle, and along the axial direction of the vertical furnace 1, the adjacent two lateral air duct structures 3.1 in the adjacent two air duct structure groups 3 are distributed at a second preset angle. Referring to FIG. 2, the solid part represents one lateral air duct structure 3.1 included in the air duct structure group of the current layer, for example, A represents the lateral air duct structure of the current layer, the dashed part represents the lateral air duct structure 3.1 adjacent to A in the air duct structure group of the adjacent layer (i.e., the air duct structure group of the layer above or below the current layer), for example, B represents the lateral air duct structure of the adjacent layer, and the angle between A and B is the second preset angle, for example, a represents the second preset angle, which is used to improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, and ensure the heat preservation effect of the vertical furnace 1. Figure 5 , the solid part represents one lateral air duct structure 3.1 included in the air duct structure group of the current layer, for example, A represents the lateral air duct structure of the current layer, the dashed part represents the lateral air duct structure 3.1 adjacent to A in the air duct structure group of the adjacent layer (i.e., the air duct structure group of the layer above or below the current layer), for example, B represents the lateral air duct structure of the adjacent layer, and the angle between A and B is the second preset angle, for example, a represents the second preset angle, which is used to improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, and ensure the heat preservation effect of the vertical furnace 1.

[0034] In the embodiment, in the same lateral direction, the air duct structure group 3 is composed of a plurality of lateral air duct structures 3.1, the number of the lateral air duct structures 3.1 of each air duct structure group 3 is 2-30, and the angle between the adjacent two lateral air duct structures 3.1 is 12-180°, and in the axial direction of the vertical furnace 1, the angle between the adjacent two lateral air duct structures 3.1 in the adjacent two air duct structure groups 3 is 0-90°, for example, referring to FIG. 2, the angle a between A and B is 15°. Figure 5 , the solid part represents one lateral air duct structure 3.1 included in the air duct structure group of the current layer, for example, A represents the lateral air duct structure of the current layer, the dashed part represents the lateral air duct structure 3.1 adjacent to A in the air duct structure group of the adjacent layer (i.e., the air duct structure group of the layer above or below the current layer), for example, B represents the lateral air duct structure of the adjacent layer, and the angle between A and B is the second preset angle, for example, a represents the second preset angle, which is used to improve the cooling rate of the vertical furnace 1 in the circumferential direction and the cooling effect in the axial direction, and ensure the heat preservation effect of the vertical furnace 1.

[0035] For example, in the embodiment, referring to FIG. 2, the angle a between A and B is 15°. Figure 2In the same transverse direction, the wind channel structure group 3 includes three transverse wind channel structures 3.1, and the included angle between adjacent two transverse wind channel structures 3.1 is 120°; in addition, it should be noted that in the same transverse direction, the plurality of transverse wind channel structures 3.1 can be arranged uniformly at equal intervals or unevenly, which can be flexibly adjusted according to actual production needs, and will not be limited here. If the plurality of transverse wind channel structures 3.1 are arranged uniformly at equal intervals, the efficiency and airflow uniformity of the incoming air can be further improved.

[0036] For example, in the present embodiment, for the scenario of uneven arrangement of the plurality of transverse wind channel structures 3.1, in the circumferential direction of the vertical furnace 1, the wind channel structure group 3 includes six transverse wind channel structures 3.1, which can be equally divided into three in the circumferential extension direction of the vertical furnace, and two transverse wind channel structures 3.1 are arranged at each 120° angle position. The included angle between the two transverse wind channel structures 3.1 is 20° (see FIG. 2). Figure 6 On the premise of ensuring that the cooling gas blown out by the adjacent two transverse wind channel structures 3.1 does not interfere with each other, a better cooling effect can be achieved.

[0037] In the present embodiment, since the single-diameter traditional wind channel structure cannot reduce the wind pressure intensity and gas turbulence effect of the cooling gas at the output end of the transverse wind channel structure 3.1, the high-pressure flowing cooling gas can cause serious erosion to the inner wall of the vertical furnace 1. Therefore, the present application optimizes the structure of the transverse wind channel structure 3.1 by adopting the transverse wind channel structure 3.1 composed of a long wind channel and an air exchange chamber 3.1.2, so that when the cooling gas passes through the air exchange chamber 3.1.2 to reach the output end of the transverse wind channel structure 3.1, it can not only effectively reduce the wind pressure intensity and gas turbulence effect of the cooling gas at the output end of the transverse wind channel structure 3.1, thereby reducing the erosion degree of the flowing cooling gas to the inner wall of the vertical furnace 1, but also can avoid the problem of reducing the yield rate of wafers caused by the generation of fine pollution particles, and can improve the service life of the vertical furnace 1. Specifically, each transverse wind channel structure 3.1 includes a long wind channel and an air exchange chamber 3.1.2 in communication, and the long wind channel and the air exchange chamber 3.1.2 are arranged according to a preset length ratio and a preset diameter ratio, for reducing the wind pressure intensity of the cooling gas at the output end of the transverse wind channel structure 3.1, thereby reducing the erosion degree of the flowing cooling gas to the inner wall of the vertical furnace 1.

[0038] In the embodiment, the number of long wind channels is two, which are the first long wind channel 3.1.1 and the second long wind channel 3.1.3, the first long wind channel 3.1.1, the air exchange chamber 3.1.2 and the second long wind channel 3.1.3 are sequentially arranged along the transverse extension direction of the vertical furnace 1, and the first long wind channel 3.1.1 is arranged close to the hearth, the length ratio between the first long wind channel 3.1.1, the air exchange chamber 3.1.2 and the second long wind channel 3.1.3 is (1-10):(1-10):(1-10), the diameter ratio between the first long wind channel 3.1.1, the air exchange chamber 3.1.2 and the second long wind channel 3.1.3 is (1-10):(1-10):(1-10), by optimizing the length ratio and the diameter ratio of the first long wind channel 3.1.1, the air exchange chamber 3.1.2 and the second long wind channel 3.1.3, the wind pressure intensity of the flowing cooling gas at the output end of the transverse wind channel structure 3.1 can be reduced by 6-12% under the condition of the same air inlet amount, and the pressure contour can be reduced by 8-16%, so as to effectively reduce the erosion of the inner wall of the vertical furnace 1, and further reduce the generation of small pollution particles.

[0039] For example, in the embodiment, reference is made to the accompanying drawings Figure 2 and the accompanying drawings Figure 3 , the length ratio between the first long wind channel 3.1.1, the air exchange chamber 3.1.2 and the second long wind channel 3.1.3 is 1:1:2, and the diameter ratio between the first long wind channel 3.1.1, the air exchange chamber 3.1.2 and the second long wind channel 3.1.3 is 1:2:1, the detection results show that compared with the traditional wind channel structure with a single diameter, the wind pressure intensity of the flowing cooling gas at the output end of the transverse wind channel structure 3.1 can be reduced by 8% under the condition of the same air inlet amount, and the pressure contour can be reduced by 11%, the wind pressure of the cooling gas is reduced, which can effectively reduce the erosion of the inner wall of the vertical furnace 1 and reduce the generation of small pollution particles.

[0040] In the embodiment, reference is made to the accompanying drawings Figure 4 , the top of the vertical furnace 1 is provided with an air outlet 10, the outside of the vertical furnace 1 is provided with an air exhaust system 6, an air outlet control valve 11 is arranged at the air outlet 10, the air outlet of the air outlet control valve is communicated with the input end of the air exhaust system 6, the output end of the air exhaust system 6 is communicated with the outside plant end, which is used for discharging the waste gas in the vertical furnace 1 to the outside plant end; the axial air inlet channel 2 is provided with an air inlet 12 communicated with the outside of the heat preservation structure 8, the air inlet 12 is provided with an air inlet control valve 13, the air inlet of the air inlet control valve 13 is communicated with the output end of the air inlet system 5, which is used for guiding the cooling gas flow conveyed by the air inlet system 5 to enter the hearth through the axial air inlet channel 2 and the wind channel structure group 3 in sequence, and the cooling gas flow is discharged by the air outlet 10 after heat exchange, so as to realize rapid cooling of the hearth.

[0041] In the embodiment, the outer wall of the vertical furnace 1 is provided with a plurality of thermocouple sensors 9, and one thermocouple sensor 9 is arranged for each temperature zone, and the thermocouple sensors 9 are arranged and installed according to the divided temperature zones, so as to monitor the real-time temperature of each temperature zone in real time.

[0042] In the embodiment, the outer wall of the vertical furnace 1 is further provided with a water cooling system 14 for cooling the outer wall of the vertical furnace 1, and the water cooling system 14 can cool the outer wall of the vertical furnace 1.

[0043] The above is a further detailed description of the present application in combination with specific embodiments, and the specific implementation of the present application cannot be limited to these descriptions. For ordinary skilled persons in the technical field to which the present application belongs, a number of simple deductions or replacements can be made without departing from the concept of the present application, and all of them should be regarded as falling within the protection scope of the present application.

Claims

1. A duct structure furnace for rapid cooling, characterized by, The vertical furnace, the air inlet system arranged outside the vertical furnace, the heat preservation structure arranged on the inner wall of the vertical furnace, and the bearing container arranged inside the vertical furnace, the space between the heat preservation structure and the bearing container constitutes a hearth, the heat preservation structure is provided with an axial air inlet channel and an air channel structure group extending along the axial direction and the circumferential direction of the vertical furnace respectively, the input end of the axial air inlet channel is communicated with the output end of the air inlet system, the input end of the air channel structure group is communicated with the output end of the axial air inlet channel, and the output end of the air channel structure group is communicated with the hearth. The vertical furnace is divided into multiple temperature zones according to the height of the vertical furnace, at least one air channel structure group is arranged in each temperature zone, and the number of air channel structure groups in each temperature zone is arranged according to a preset number ratio; along the circumferential direction of the vertical furnace, each air channel structure group comprises multiple transverse air channel structures, and adjacent two transverse air channel structures are distributed at a first preset included angle; along the axial direction of the vertical furnace, adjacent two transverse air channel structures in adjacent two air channel structure groups are distributed at a second preset included angle. Each transverse air channel structure comprises a long air channel and an air exchange chamber which are communicated, and the long air channel and the air exchange chamber are arranged according to a preset length ratio and a preset diameter ratio, so as to reduce the wind pressure intensity of the cooling gas at the output end of the transverse air channel structure. Along the circumferential direction of the vertical furnace, each air channel structure group comprises multiple transverse air channel structures, and adjacent two transverse air channel structures are distributed at a first preset included angle, which comprises: along the circumferential direction of the vertical furnace, the number of transverse air channel structures of each air channel structure group is 2-30, and the included angle between adjacent two transverse air channel structures is 12-180°. The quantity ratio of the air duct structure groups in each temperature zone is preset, including: according to the height of the vertical furnace, the height is divided into X temperature zones, the quantity of the air duct structure groups in the bottom temperature zone is set as Y, Y is an integer greater than 1, then from the top to the bottom of the vertical furnace, the quantity ratio of the air duct structure groups in each temperature zone is: (Y X + (1-2)): (Y X-1 + (1-2)):... : (Y1-1), wherein: Y X represents the quantity of the air duct structure groups in the Xth temperature zone, and Y X , Y X-1 ,..., Y1 all have the same value; Along the axial direction of the vertical furnace, adjacent two transverse air channel structures in adjacent two air channel structure groups are distributed at a second preset included angle, which comprises: along the axial direction of the vertical furnace, the included angle between adjacent two transverse air channel structures in adjacent two air channel structure groups is 0-90°. The number of long air channels is two, which are a first long air channel and a second long air channel, the first long air channel, the air exchange chamber and the second long air channel are sequentially arranged along the transverse extension direction of the vertical furnace, and the first long air channel is arranged close to the hearth, the length ratio between the first long air channel, the air exchange chamber and the second long air channel is (1-10):(1-10):(1-10), and the diameter ratio between the first long air channel, the air exchange chamber and the second long air channel is (1-10):(1-10):(1-10). The inner side surface of the heat preservation structure is coated with furnace wires made of high-temperature-resistant and fast-heating materials.

2. The air duct structure furnace body for rapid cooling according to claim 1, characterized in that, The top of the vertical furnace is provided with an air outlet, the outer part of the vertical furnace is provided with an air exhaust system, an air outlet control valve is arranged at the air outlet, the air outlet of the air outlet control valve is communicated with the input end of the air exhaust system, and the output end of the air exhaust system is communicated with the external plant end, so as to discharge the waste gas in the vertical furnace to the external plant end.

3. The air duct structure furnace body for rapid cooling according to claim 1, characterized in that, ​ 4. The air duct structure furnace body for rapid cooling according to claim 3, characterized in that, The axial air inlet channel is provided with an air inlet connected with the outside of the heat preservation structure, and the air inlet is provided with an air inlet control valve, an air inlet of the air inlet control valve is connected with an output end of an air inlet system, and the air inlet control valve is used for guiding the cooling air flow conveyed by the air inlet system into the air inlet.

5. The air duct structure furnace body for rapid cooling according to claim 1, characterized in that, The outer wall of the vertical furnace is provided with a plurality of thermocouple sensors, and one thermocouple sensor is arranged for each temperature zone.

6. The air duct structure furnace body for rapid cooling according to claim 1, characterized by The outer wall of the vertical furnace is also provided with a water cooling system for cooling the outer wall of the vertical furnace.

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