Information management system and method for micro-nano processing experimental platform

Abstract

The application discloses an information management system and method of a micro-nano machining experiment platform, and is used for solving the problems of great difficulty in personnel management and poor information display effect in the prior art. The information management system comprises an identification and tracking module, an alarm module, an intelligent pushing module and a rendering module. The identity information data of the micro-nano machining laboratory personnel in a monitoring area is acquired through the identification and tracking module. The first type of identity information is extracted from the identity information data of the micro-nano machining laboratory personnel through the intelligent pushing module, and the first type of identity information is displayed at a preset position of the real scene image of the micro-nano machining laboratory personnel through the rendering module. When the alarm information of the violation is received from the alarm module, the intelligent pushing module can determine the second type of identity information according to the preset display rule, and the second type of identity information is displayed at the preset position of the real scene image of the micro-nano machining laboratory personnel through the rendering module.

Description

[0001] This application is a divisional application of Chinese invention patent application No. 202410956484.0, filed on July 17, 2024, entitled "Information Management System and Method for Micro-Nano Fabrication Experimental Platform". Technical Field

[0002] This invention relates to the field of micro-nano fabrication technology, and in particular to an information management system for a micro-nano fabrication experimental platform, an information management method for a micro-nano fabrication experimental platform, and a terminal device. Background Technology

[0003] Micro-nano fabrication technology is the technology for designing, processing, integrating, testing, optimizing, and applying devices at the micrometer and nanometer scale. It is widely used in integrated circuits, flexible electronic devices, microelectromechanical devices and systems, optoelectronic devices, biochips, and 3D hybrid integrated devices. It is one of the key technologies for measuring the level of high-end manufacturing.

[0004] Micro-nano fabrication experimental platforms are multifunctional public technical support platforms integrating education, research and development, and industrialization of micro-nano fabrication technology. With the rapid development of the semiconductor industry, universities and research institutions have successively established various micro-nano fabrication experimental platforms based on micro-nano fabrication technology. These platforms are equipped with large-scale precision instruments for micron and nanoscale processing, forming a complete micro-nano fabrication process chain. These platforms in universities and research institutions are not only open to faculty and students within the university but also to external research institutions and enterprises. In this context, personnel management and equipment operation and maintenance become more complex and diverse, thus increasing the challenges of platform management and rapid training.

[0005] On the one hand, current training and communication on micro-nano fabrication experimental platforms typically rely on traditional text, images, and videos as teaching materials. This approach suffers from drawbacks such as inability to directly correlate with actual on-site conditions, difficulty for trainees and communicators to quickly understand the material, inability to rapidly integrate the on-site experience with the teaching materials, and the time-consuming and labor-intensive updating and improvement of these materials. Furthermore, the complex personnel interactions within the experimental platform increase the difficulty of personnel management. On the other hand, micro-nano fabrication experimental platforms involve a large number and variety of semiconductor process equipment and supporting plant facilities. Each piece of equipment manages a vast amount and variety of information. Due to the complexity and high level of specialization of this information, staff must combine on-site conditions with backend data. Simultaneously, the lifecycle status of equipment is difficult to access and monitor, and there is a disconnect between backend and real-time equipment information, resulting in insufficient basis for maintenance decisions and poor information display. Summary of the Invention

[0006] This invention provides an information management system for a micro-nano fabrication experimental platform, an information management method for a micro-nano fabrication experimental platform, and a terminal device, which are used to solve or partially solve the problems of difficult personnel management and poor information display in the management of existing experimental platforms.

[0007] This invention provides an information management system for a micro / nano fabrication experimental platform. The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device; wherein,

[0008] The identification and tracking module is used to acquire the identity information data of personnel in the micro-nano fabrication laboratory in the monitoring area, and to track the activity location and equipment operation behavior of the personnel in the micro-nano fabrication laboratory in real time.

[0009] The alarm module is used to generate a violation alarm message and send it to the person in charge when the activity location is determined based on the identity information data, and / or when the operation behavior on the device meets the preset violation conditions.

[0010] The intelligent push module is used to obtain the personnel identity data corresponding to the terminal device and automatically match the virtual display data related to the personnel identity data from the data module;

[0011] The rendering module is used to overlay the virtual display data onto the real-time relative position of the real-scene image to obtain the rendered image.

[0012] Optionally, the identity information data includes the current appointment range and equipment usage qualification information of the personnel in the micro-nano fabrication laboratory, and the alarm module is specifically used for:

[0013] When it is detected that the personnel of the micro-nano fabrication laboratory are outside the current reservation range but within the range that needs to be reserved, an out-of-range violation alarm message is generated;

[0014] When it is detected that personnel in the micro-nano fabrication laboratory are operating other equipment that does not match the equipment's eligibility information, an equipment violation alarm is generated.

[0015] Optionally, the intelligent push module is specifically used for:

[0016] Extract the first type of identity information from the identity information data of the personnel in the micro-nano fabrication laboratory, and display the first type of identity information at a preset position in the real-scene image of the personnel in the micro-nano fabrication laboratory through the rendering module;

[0017] When the violation alarm information is received, the second type of identity information is determined according to the preset display rules, and the second type of identity information is displayed at the preset position of the real-scene image of the personnel in the micro-nano processing laboratory through the rendering module.

[0018] Optionally, the intelligent push module is specifically used for:

[0019] When the violation alarm information is received, the violation warning range corresponding to the violation alarm information is determined, and the violation behavior within the violation warning range is analyzed based on preset risk conditions to determine the corresponding violation behavior level;

[0020] Retrieve warning display information and warning display format that match the level of violation from the data module;

[0021] The warning display information is used as the second type of identity information, and the second type of identity information is displayed above the current location of the personnel in the micro-nano fabrication laboratory in the form of the warning display through the rendering module.

[0022] Optionally, the identity information data includes the identity type and basic identity information of the personnel in the micro-nano fabrication laboratory, the person in charge includes a first type of person in charge and a second type of person in charge, and the alarm module is further used for:

[0023] The person in charge of the currently reserved equipment of the micro-nano fabrication laboratory personnel is extracted from the basic identity information and designated as the first type of person in charge.

[0024] Based on the identity type, the second type of person in charge corresponding to the personnel of the micro-nano fabrication laboratory is determined.

[0025] Optionally, the alarm module is specifically used for:

[0026] When the personnel in the micro-nano fabrication laboratory are of the first type, the identification and tracking module identifies and determines the first target device corresponding to the current location of the first type of personnel, and obtains the person in charge of the first target device as the second type of person in charge from the data module;

[0027] When the personnel in the micro-nano fabrication laboratory are the second type of personnel, the relevant person in charge within the university is extracted from the basic identity information of the second type of personnel. The second target device and the nearest person are identified and determined through the identification and tracking module. The person in charge corresponding to the second target device is obtained from the data module, and the person in charge corresponding to the second target device and the nearest person are taken as the second type of person in charge.

[0028] Optionally, the alarm module is further configured to:

[0029] The violation alert information will be pushed to both the first type of responsible person and the second type of responsible person.

[0030] When the violation alarm information contains violations related to the currently reserved device, the first type of person in charge will be designated as the primary person in charge;

[0031] When the violation alarm information contains violations related to the target equipment corresponding to the current location of the personnel in the micro-nano fabrication laboratory, the second type of person in charge will be designated as the primary person in charge.

[0032] Optionally, the alarm module is specifically used for:

[0033] When the personnel in the micro-nano fabrication laboratory are classified as Category 1 personnel, the violation alarm information will be pushed to the Category 1 responsible person and the responsible person corresponding to the first target device;

[0034] When the personnel in the micro-nano fabrication laboratory are classified as second-category personnel, the violation alarm information is pushed to the first-category responsible person, the relevant responsible person within the university, the responsible person corresponding to the second target device, and the closest personnel. At the same time, the information of the relevant responsible person within the university is pushed to the closest personnel.

[0035] Optionally, the second category of personnel includes enterprise users and suppliers. The equipment usage qualification information corresponding to the enterprise users includes independent equipment operation qualification information, and the equipment usage qualification information corresponding to the suppliers includes professional qualification certificate information. The alarm module is specifically used for:

[0036] When it is detected that the enterprise user is operating other devices that do not match the independent operation qualification information of the device, or when it is detected that the supplier is operating other devices that do not match the professional qualification certificate information, a device violation alarm message is generated.

[0037] Optionally, the alarm module is further configured to:

[0038] When a temporary authorization instruction or violation cancellation instruction is received from the first type of responsible person or the second type of responsible person through a terminal device, the violation alarm is lifted and the violation information is recorded.

[0039] Optionally, the identification and tracking module is further configured to:

[0040] When a temporary equipment operation request is received from personnel in the micro-nano fabrication laboratory, the temporary requesting equipment and the person in charge of the temporary requesting equipment are identified.

[0041] The data module obtains the reservation application data of the temporary requesting device, and determines the current reservation status of the temporary requesting device through the reservation application data.

[0042] When it is detected that the temporary requesting device is currently unused, the temporary operation device request is sent to the person in charge of the current operation device and the person in charge of the temporary requesting device.

[0043] Upon receiving a temporary application approval instruction from the person in charge of the currently operating device and / or the person in charge of the temporary requesting device, the temporary application approval information is sent to the terminal device of the personnel in the micro-nano fabrication laboratory, and the equipment operation information of the personnel in the micro-nano fabrication laboratory is recorded.

[0044] Optionally, the identification and tracking module is further configured to:

[0045] When an idle device with no current task is detected within the monitoring area, temporary authorization opening information for the idle device is generated;

[0046] The temporary authorization information is sent to the terminal devices of all personnel in the micro-nano fabrication laboratories within the monitoring area, so that personnel in need can send a request to the person in charge of the available device to use the device.

[0047] Optionally, the identification and tracking module is further configured to:

[0048] When a temporary access request is received from personnel in the micro-nano fabrication laboratory, the temporary access area corresponding to the temporary access request and the person in charge of the temporary access area are determined.

[0049] Send the temporary permission granting request to the person in charge of the temporarily open area;

[0050] Upon receiving the temporary opening permission instruction from the person in charge of the temporary open area, the temporary opening permission information is sent to the terminal device of the personnel in the micro-nano fabrication laboratory, and the equipment operation information and / or visit record information of the personnel in the micro-nano fabrication laboratory are recorded.

[0051] Optionally, the intelligent push module is specifically used for:

[0052] Determine real-scene images of all real target objects within the current field of view of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information;

[0053] For each virtual anchor point, the virtual anchor point data corresponding to the virtual anchor point is retrieved from the data module, and based on the virtual anchor point data, first type of display data, second type of display data, third type of display data and fourth type of display data are generated respectively.

[0054] Optionally, the personnel identity data includes the personnel type corresponding to the terminal device, and the intelligent push module is specifically used for:

[0055] When the personnel type is a manager, the first type of display data will be used as automatically pushed virtual display data;

[0056] When the person type is a visitor, the visitor's background information is obtained, and the information with the highest matching degree with the background information is filtered from the second type of display data as the automatically pushed virtual display data;

[0057] When the personnel type is a trainee, the current ability level of the trainee is obtained, and training content data that matches the current ability level is filtered from the third type of display data as automatically pushed virtual display data;

[0058] When the personnel type is a device user, the device operation level of the device user is obtained, and device-related data that matches the device operation level is filtered from the fourth type of display data as automatically pushed virtual display data.

[0059] Optionally, the first type of displayed data includes equipment operation data, equipment management forecast data, and data being viewed by visitors or trainees within the current field of view of the terminal device;

[0060] The second type of data includes different types of recommendation information generated based on the background characteristics of visitors;

[0061] The third type of data includes training content data of different levels generated based on trainees of different ability levels;

[0062] The fourth type of data includes different levels of device-related data generated by device users based on different device operation levels.

[0063] Optionally, the intelligent push module is specifically used for:

[0064] When a visitor sends an information viewing instruction via a corresponding terminal device, the system determines the display information corresponding to the information viewing instruction and the level of the person who can view it, and obtains the visitor's viewing permission level.

[0065] The viewing access level is matched with the viewing permission level. If the match fails, a viewing failure reminder message is pushed to the visitor's terminal device, and a viewing request is pushed to the on-campus person in charge corresponding to the visitor.

[0066] When a match is successful, or when the information returned by the person in charge of the school's association is approved, the display information is obtained from the data module as the currently displayed virtual display data.

[0067] Optionally, the intelligent push module is specifically used for:

[0068] When a temporary viewing instruction is received from the trainee through the corresponding terminal device, the training content information corresponding to the temporary viewing instruction and the viewable ability level are determined.

[0069] The viewable ability level is matched with the current ability level. If the match fails, a viewing failure reminder message is pushed to the trainee's terminal device, and a temporary viewing request is pushed to the trainee's corresponding training teacher.

[0070] When the level is successfully matched, or when a temporary viewing pass instruction is received from the training teacher, the information corresponding to the temporary viewing pass instruction is obtained from the data module as the currently displayed virtual display data.

[0071] Optionally, the information management system further includes a voice interaction module, which is used for:

[0072] When a voice control command is issued by personnel in the micro-nano fabrication laboratory, the target control entity and key action information are extracted from the voice control command.

[0073] The data module retrieves the equipment usage permissions of the personnel in the micro-nano fabrication laboratory, and based on the equipment usage permissions, it determines whether the personnel in the micro-nano fabrication laboratory have control permissions for the target control entity.

[0074] If so, the information management system controls the target control entity to perform the action corresponding to the key action information; otherwise, the alarm module pushes alarm information to the person in charge of the target control entity.

[0075] Optionally, the voice interaction module is further used for:

[0076] When an alarm message is pushed to the person in charge of the target control entity through the alarm module, if a control authorization instruction is received from the person in charge of the target control entity, the target control entity is controlled to perform an action corresponding to the key action information through the information management system, and the control information is recorded.

[0077] If a control denial authorization instruction is received from the person in charge of the target control entity, the voice control instruction is determined to be invalid, and an invalid prompt message is sent to the personnel in the micro-nano fabrication laboratory.

[0078] If no authorization instruction is received from the person in charge of the target control entity within the preset waiting period, the next-level person in charge corresponding to the person in charge of the target control entity is obtained from the data module, and an alarm message is pushed to the next-level person in charge.

[0079] Optionally, the information management system further includes a usage frequency recording module, which is used for:

[0080] Record the usage frequency data of each device used in the micro-nano fabrication experimental platform;

[0081] For any of the devices used, personnel type record information for the devices used is extracted from the usage frequency data. The personnel type record information records the frequency of use or number of clicks to view the devices by different types of personnel in the micro-nano fabrication laboratory.

[0082] Based on the personnel type record information, determine the target personnel type that has the highest frequency of use or the most clicks on the used equipment, and adjust the management and maintenance plan of the used equipment accordingly based on the target personnel type.

[0083] This invention also provides an information management method for a micro / nano fabrication experimental platform, comprising:

[0084] The system acquires personnel identity data and identity information data of the personnel in the micro-nano fabrication laboratory corresponding to the terminal device, and automatically matches virtual display data related to the personnel identity data.

[0085] The virtual display data is superimposed on the real-time relative position of the real-scene image to obtain the rendered image;

[0086] Acquire and track in real time the activity locations of personnel in the micro-nano fabrication laboratory within the monitoring area, as well as their operational behaviors on the equipment;

[0087] When the location of the activity of the personnel in the micro-nano fabrication laboratory is determined based on the identity information data, and / or the operation of the equipment meets the preset violation conditions, a violation alarm message is generated and sent to the person in charge and the terminal device.

[0088] The present invention also provides a terminal device for use in the information management system of the micro / nano fabrication experimental platform as described in any of the preceding claims, the terminal device being used for:

[0089] The identity information data of the personnel in the micro-nano fabrication laboratory is obtained from the data module, and personnel binding is performed based on the identity information data;

[0090] The system can locate the spatial position and angle of the terminal device in the real environment in real time, and acquire real-scene images of the real target objects within the current visible range through its own camera.

[0091] It interacts with the identification and tracking module, and / or the alarm module, and / or the intelligent push module, and / or the data module;

[0092] The rendered image obtained after processing by the rendering module is displayed in real time.

[0093] As can be seen from the above technical solutions, the present invention has the following advantages:

[0094] An information management system and method for a micro-nano fabrication experimental platform are provided. The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. First, the identification and tracking module acquires the identity information data of personnel in the micro-nano fabrication laboratory within the monitoring area and tracks their activity locations and equipment operation behaviors in real time. When the activity location is determined based on the identity information data, and / or the equipment operation behavior meets preset violation conditions, the alarm module generates a violation alarm message and sends it to the person in charge. Thus, through the alarm module and the interactive settings of violation triggering and alarm push, more targeted and efficient personnel management can be achieved. Second, the intelligent push module acquires the personnel identity data corresponding to the terminal device and automatically matches virtual display data related to the personnel identity data from the data module. The rendering module overlays the virtual display data onto the real-time relative position of the real-scene image to obtain the rendered image. On the one hand, by identifying and tracking personnel activities in the laboratory through the identification and tracking module and the alarm module, multiple responsible persons can be quickly identified when violations occur, simplifying personnel management in the laboratory and enabling timely identification of different responsible persons to avoid management risks when problems arise. On the other hand, the intelligent push module automatically pushes and displays more interesting information to relevant personnel based on different personnel types, realizing differentiated intelligent filtering and push based on personnel type. Compared with the current information display method, it has a better information display effect and improves the user information viewing experience. Attached Figure Description

[0095] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0096] Figure 1 A schematic diagram of the structure of an information management system for a micro / nano fabrication experimental platform;

[0097] Figure 2 This is a schematic diagram of a micro / nano fabrication equipment.

[0098] Figure 3 This is a schematic diagram of a micro-nano processing facility.

[0099] Figure 4(a) is a schematic diagram showing the personnel in a micro-nano fabrication laboratory;

[0100] Figure 4(b) is another schematic diagram showing the personnel in a micro / nano fabrication laboratory;

[0101] Figure 5(a) shows a rendered image displayed on a terminal device;

[0102] Figure 5(b) shows the rendered image displayed on another terminal device;

[0103] Figure 6 A flowchart illustrating the steps of an information management method for a micro / nano fabrication experimental platform. Detailed Implementation

[0104] This invention provides an information management system for a micro-nano fabrication experimental platform, an information management method for a micro-nano fabrication experimental platform, and a terminal device, which are used to solve or partially solve the problems of difficult personnel management and poor information display in the management of existing experimental platforms.

[0105] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0106] As an example, existing training or exchanges for personnel on micro-nano fabrication experimental platforms generally use traditional text, images, and videos as teaching materials. This approach has several drawbacks, including the inability to directly correlate materials with the actual on-site conditions, difficulties in quickly understanding the material for trainees and those exchanging information, the inability to rapidly integrate the on-site experience with the teaching materials, and the time-consuming and labor-intensive process of updating and improving the teaching materials.

[0107] Furthermore, the complex personnel flow within the experimental platform increases the difficulty of personnel management. In addition, the micro-nano fabrication experimental platform involves a large number and variety of semiconductor process equipment and supporting plant facilities. Each piece of equipment manages a vast amount and variety of information. Due to the complexity and high level of specialization of this information, staff must combine on-site conditions with backend data for effective work. Moreover, the lifecycle status of equipment is difficult to access and monitor, and there is a disconnect between backend and real-time equipment information, resulting in insufficient basis for maintenance decisions and poor information display.

[0108] In summary, there is currently a lack of an information management system that can better manage personnel and more intelligently push and display relevant data from equipment in the operation, maintenance, and on-site training of micro-nano fabrication experimental platforms and semiconductor factories.

[0109] Therefore, one of the core inventive points of this invention is to provide an information management system and method for a micro-nano fabrication experimental platform, addressing the shortcomings of existing technologies. The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. First, the identification and tracking module acquires the identity information data of personnel in the micro-nano fabrication laboratory within the monitoring area and tracks their activity locations and equipment operation behaviors in real time. When the activity location is determined based on the identity information data, and / or the equipment operation behavior meets preset violation conditions, the alarm module generates a violation alarm message and sends it to the responsible person. Thus, through the alarm module and the interactive settings of violation triggering and alarm push, more targeted and efficient personnel management can be achieved. Second, the intelligent push module acquires the personnel identity data corresponding to the terminal device and automatically matches virtual display data related to the personnel identity data from the data module. The rendering module overlays the virtual display data onto the real-time relative position of the real-scene image to obtain a rendered image. On the one hand, by identifying and tracking personnel activities in the laboratory through the identification and tracking module and the alarm module, multiple responsible persons can be quickly identified when violations occur, simplifying personnel management in the laboratory and enabling timely identification of different responsible persons to avoid management risks when problems arise. On the other hand, the intelligent push module automatically pushes and displays more interesting information to relevant personnel based on different personnel types, realizing differentiated intelligent filtering and push based on personnel type. Compared with the current information display method, it has a better information display effect and can better improve the user information viewing experience.

[0110] Reference Figure 1 The diagram shows a schematic representation of the structure of an information management system for a micro-nano fabrication experimental platform provided in an embodiment of the present invention.

[0111] Combination Figure 1 The information management system 100 provided in this embodiment of the invention can be mainly divided into two parts: a server-side part, which mainly includes an identification and tracking module 101, an alarm module 102, an intelligent push module 103, a data module 104, and a rendering module 105; and a user-side part, which includes at least one terminal device 106. Each terminal device 106 is communicatively connected to the server.

[0112] Among them, the terminal devices 106 include, but are not limited to, AR (Augmented Reality) glasses, MR (Mixed Reality) glasses, tablets, and mobile phones.

[0113] On the one hand, when personnel in the micro-nano fabrication laboratory need to enter the laboratory for visits, training, or equipment operation, they need to wear AR or MR glasses, or hold a tablet or mobile phone, to receive relevant virtual display information or perform some interactive operations in real time. At this time, personnel need to be bound one-to-one with the terminal device so that in the event of an emergency due to violation of regulations, the relevant personnel can be quickly located through the terminal device. Specifically, the terminal device 106 can be used to obtain the identity information data (such as basic identity information, identity type, etc.) of the personnel in the micro-nano fabrication laboratory from the data module 104, and bind the personnel to the micro-nano fabrication laboratory based on the identity information data.

[0114] On the other hand, the terminal device 106 can also be used to locate its spatial position and angle in the real environment in real time, acquire real-scene images of the real target object through its own camera, and display the rendered image.

[0115] Furthermore, the terminal device 106 can also interact with other modules in the information management system 100, such as the identification and tracking module 101, the alarm module 102, the intelligent push module 103, and the data module 104. The specific information interactions between the terminal device 106 and other modules will be explained in detail in the subsequent descriptions of the respective modules, and will not be elaborated here.

[0116] The real target audience includes, but is not limited to, micro-nano fabrication equipment, micro-nano fabrication facilities, and micro-nano fabrication laboratory personnel in the real environment of the micro-nano fabrication platform.

[0117] As an optional embodiment, the terminal device 106 can determine its spatial position and angle in the real environment based on the SLAM (Simultaneous Localization and Mapping) algorithm. SLAM refers to the process by which a moving object calculates its own position and constructs an environmental map simultaneously based on sensor information. Currently, SLAM is mainly used in robotics, virtual reality (VR), and augmented reality (AR).

[0118] In one optional embodiment, the information management system 100 may further include a spatial construction module. The spatial construction module is primarily used to construct a 3D spatial model of the micro / nano fabrication experimental platform. Specifically, the 3D spatial model may include 3D models and location information of micro / nano fabrication equipment and plant facilities, as well as a display area for virtual information set according to the location information.

[0119] Furthermore, the spatial construction module first acquires anchor point data from micro-nano fabrication equipment and facilities using point 3D scanning technology. Then, a 3D spatial model of the micro-nano fabrication experimental platform is constructed based on this anchor point data. Each anchor point contains its X, Y, and Z coordinates in space. A single device has over ten million anchor points, achieving contour coverage.

[0120] It is understood that the anchor point data referred to in the embodiments of the present invention corresponds to the coordinate information of multiple anchor points of the actual device and the corresponding 3D spatial model. The virtual anchor point data corresponds to virtual information displayed at specific or calibrated anchor point locations, such as device operating data, current health status information, etc.

[0121] The spatial construction module receives anchor point data for the designated display area of ​​the virtual information, thus obtaining the display area of ​​the virtual information. Developers can define the area near the micro / nano fabrication equipment or facility as the display area for the virtual information based on the location information of the equipment or facility. Specifically, the anchor point data of the designated area is input into the spatial construction module, which then constructs the display area of ​​the virtual information in a 3D spatial model. Developers then define the anchor points or anchor point areas where the virtual information needs to be displayed, i.e., the specified locations of the virtual information.

[0122] Regarding data module 104, on one hand, data module 104 can be used to acquire and store the operational data of the micro-nano fabrication experimental platform. For example, the operational data of the micro-nano fabrication experimental platform can mainly include real-time operational data and operational principle data of the micro-nano fabrication equipment and micro-nano fabrication plant facilities. Specifically, the operational principle data can mainly include 3D exploded views of the equipment and operational principle videos.

[0123] Among them, micro-nano fabrication equipment covers various equipment for micro-nano fabrication, such as photolithography, plate making, deposition, bonding, etching, and measurement. Micro-nano fabrication plant facilities include, but are not limited to, cooling water systems, power systems, air conditioning and ventilation systems, process ventilation systems, wastewater systems, pure water systems, gas supply systems, and chemical supply systems.

[0124] Furthermore, the data module 104 can also be used to establish an association mapping table between the runtime data and the display area of ​​the virtual information, and synchronize all runtime data in the constructed 1:1 3D spatial model to achieve binding and synchronization. For example, the data to be displayed is extracted and embedded into Arkit (an AR development platform). In response to a developer clicking on the display area of ​​the virtual information, a data box pops up, allowing the developer to select the corresponding data to be displayed and establish an association mapping table. Then, the system automatically pushes real-time data to Arkit, and achieves integration and real-time push through the web API (web application programming interface).

[0125] The information management system 100 for the micro-nano fabrication experimental platform provided in this embodiment of the invention can serve not only as an operation and maintenance tool but also as a training platform for technical personnel. Trainees can include university students, enterprise users, or operation and maintenance personnel. In the actual operation scenario of the lithography machine, trainees can use this system to view videos of the machine's structural location, internal operating process, and lithography principles. Combining theory with corresponding real-world scenarios leads to better perception and retention, and eliminates the need for on-site instruction from teachers.

[0126] In practice, due to the open nature of university micro-nano fabrication experimental platforms, there are numerous users with diverse professional backgrounds and high turnover, making personnel management challenging. Furthermore, the stringent cleanliness requirements of semiconductor processes necessitate that personnel in cleanrooms wear full-body protective suits, further complicating the process of obtaining user information from on-site maintenance staff.

[0127] Based on this, data module 104 can also be used to acquire and store the identity information data of personnel in the micro-nano fabrication laboratory. This identity information data mainly includes the current location and identity information of the personnel in the micro-nano fabrication laboratory, such as currently reserved equipment information, equipment usage qualification information, identity type, and basic identity information.

[0128] Among them, personnel in the micro-nano fabrication laboratory include, but are not limited to, visitors, trainees, operation and maintenance personnel, laboratory staff, micro-nano fabrication personnel, and other personnel listed in this application.

[0129] Each personnel in the micro-nano fabrication laboratory can wear an RFID card. After passing through an RFID device, the card's identity information is identified and stored in a database. Data module 104 can then retrieve the personnel's identity information from the database. When identity information needs to be displayed (e.g., when management needs to view the personnel's identity information, or when personnel violate regulations and need to be quickly located), rendering module 105 can overlay the corresponding identity information onto a real-world image based on the personnel's location.

[0130] For example, Figure 2 A schematic diagram of a micro / nano fabrication equipment is shown. Combined with... Figure 2 When the actual target is micro-nano fabrication equipment, taking a lithography machine as an example, maintenance personnel wearing terminal devices (106) enter the real-world scenario of the micro-nano fabrication test platform. They can see the lithography machine and the real-time virtual operating parameters superimposed above it. These real-time virtual operating parameters include, but are not limited to, temperature, humidity, alarm status, and the normal operation of various components. The parameter display positions match the positions of the various structures within the lithography machine. For example, if the actual internal temperature of the lithography machine cavity is 23±0.1℃, a line will appear next to the cavity displaying the characters "23±0.1℃". Thus, maintenance personnel can directly see the combination of the real-world scene and the corresponding parameters without needing to retrieve temperature parameters from the machine on-site or search for them in the backend system. Cleanrooms have numerous devices and are noisy; when an anomaly occurs, such as unauthorized operation of the lithography machine, it is difficult to quickly identify the source of the alarm based solely on hearing and sight. Therefore, assuming that the alarm module 102 issues an alarm message for personnel's unauthorized operation of the lithography machine, the relevant responsible personnel can also see the alarm situation in AR technology.

[0131] Figure 3 A schematic diagram illustrating a micro-nano processing facility provided in an embodiment of the present invention is shown. Figure 3 As shown, taking the pipelines of a micro-nano processing plant as an example, this information management system 100 allows managers or maintenance personnel to easily and intuitively view pipeline information when relevant operation and maintenance data is displayed at the real-time relative location of the pipeline. For example, by displaying virtual information in a corresponding real-world scene, personnel can quickly understand that the pipeline is a compressed air pipeline, its internal gas flow rate, specific flow direction, pipeline pressure value, and whether there are any leaks, etc. Furthermore, through this information management system 100, based on the overlay display of virtual information related to equipment operation at the corresponding location in the real-world scene, trainees can directly match pipelines and their information on-site, eliminating the need for back-and-forth checks or instructor accompaniment.

[0132] Without affecting the access to information of other personnel, or based on certain special circumstances, it is necessary to display the identity information of personnel in the micro-nano fabrication laboratory. For example, if the manager wants to quickly understand what types of personnel are currently in the laboratory, and the personnel have not violated any rules (i.e., under normal circumstances), the intelligent push module 103 can quickly extract the first type of identity information from the personnel's identity information data, and the rendering module 105 can quickly overlay and display the first type of identity information on a preset position in the corresponding personnel's real-scene image, such as above their current location.

[0133] If the displayed identity information is categorized according to urgency or risk level, the first type of identity information can be classified as Level 0 basic information. Specifically, the first type of identity information may include: the person's name, their college (for internal staff) / unit (for external staff), their supervisor (for internal staff) / internal contact person (for external staff), and the name of the currently reserved device (including the device, time slot, and security risks).

[0134] If the person violates the rules, when the intelligent push module 103 receives the violation alarm information issued by the alarm module 102, it can quickly identify the second type of identity information that meets the preset display rules, and then quickly overlay the second type of identity information on the preset position of the corresponding person's real-scene image through the rendering module 105, such as the displayable area above or next to the current location, so that the managers or relevant persons in charge can quickly locate the relevant person.

[0135] Furthermore, the confirmation and display of the second type of identity information can be as follows:

[0136] First, when the intelligent push module 103 receives a violation alarm message from the alarm module 102, it can determine the corresponding violation warning range based on the violation alarm message. For example, if the violator is currently operating the equipment in violation of regulations, the area within a preset range (such as within 3 meters) centered on the equipment will be used as the violation warning range. Alternatively, if the violator is currently in an area that has been entered without authorization, the area entered or the area within a preset range (such as within 3 meters) centered on the violator will be used as the violation warning range.

[0137] Then, based on preset risk conditions, violation analysis is performed on violations within the violation warning range to determine the corresponding violation level, and warning display information and warning display format matching the violation level are retrieved from data module 104.

[0138] The second type of identity information corresponds to the information displayed when a warning is issued. Based on the actual risk level at the time of the violation, and still categorized according to urgency or risk level, the information to be displayed above the violator when a violation occurs can be further divided into Level 1, Level 2, and Level 3 warning displays.

[0139] Specifically, Level 1 alert display information corresponds to a low warning risk, involving only violations of equipment or area reservation rules. For example, suppose person A originally reserved to operate equipment A from 9:00 to 10:00, but the system detects that they operated equipment A from 7:00 to 8:00. At this time, the intelligent push module 103 receives the corresponding violation alarm information and quickly identifies equipment A and its surrounding area as the violation warning range. Based on the violation alarm information and the detected on-site situation, it analyzes the violations occurring within the current warning range. For example, it determines whether the behavior only involves violations of equipment or area reservation rules, and further determines whether an accident or emergency has occurred. If it is determined that it only involves violations of equipment or area reservation rules, the warning risk is low, and the current violation level is determined to be a Level 1 warning risk. In this case, the Level 1 alert display information that needs to be displayed for person A is a warning of mismatched operation time and the contact information of the person in charge of equipment A. At this time, the Level 1 alert display information corresponding to person A that matches the Level 1 warning risk can be retrieved from the data module 104, and the Level 1 alert display information can be automatically pushed to the person in charge of equipment A.

[0140] For example, if person B originally only booked machine A but actually operated machine B, through the aforementioned similar analysis process, it can be determined that this violation also corresponds to a Level 1 warning risk. In this case, the Level 1 warning display information that needs to be displayed for person B is a warning about the mismatch in operation time and the contact information of the person in charge of the equipment B. At this time, the Level 1 warning display information corresponding to person B that matches the Level 1 warning risk can be retrieved from data module 104 and automatically pushed to the person in charge of equipment B.

[0141] Similarly, suppose person C accidentally enters an area within an electronic fence without prior reservation or authorization. In this case, the Level 1 alert information that should be displayed to person C is "accidental entry or lack of authorization," along with a warning to evacuate immediately.

[0142] Level 2 warning information corresponds to a medium risk level, involving equipment damage. For example, if improper operation of device C by the user causes equipment accidents such as fragmentation, impact, or cavity contamination, the intelligent push module 103 receives the corresponding violation alarm information and quickly identifies device C and its surrounding area as the violation warning range. Based on the violation alarm information and the detected on-site situation, it analyzes the violations occurring within the current warning range. It first determines whether the behavior only involves violating equipment or area reservation rules, and then further determines whether an accident or emergency has occurred. If the assessment confirms equipment damage (such as the detection of fragmentation within the violation warning range, cavity contamination, or a sudden abnormality in equipment operating data), the warning risk is determined to be medium, and the current violation level is set at Level 2. In this case, the Level 2 warning information displayed, in addition to the information required for Level 1 warning risk, also needs to display details of the misoperation, contact information for the person in charge of the equipment, and prompts to resolve the misoperation. For example, if an impact occurred due to an incorrect operating sequence, the correct operating sequence can be displayed, providing real-time prompts. At the same time, the Level 2 alert information can be automatically pushed to the equipment manager to inform them to deal with the on-site accident in a timely manner and avoid greater losses.

[0143] Level 3 warning information indicates a high risk level, involving personal safety. For example, if a user accidentally touches a chemical solution, causing a gas leak in the equipment, or other experimental accidents, these accidents can easily threaten personal safety, such as causing fainting, vomiting, or even coma. In this case, the intelligent push module 103 receives the corresponding violation alarm information and quickly identifies the current user and their surrounding area as the violation warning zone. Based on the violation alarm information and the detected on-site situation, it analyzes the violations occurring within the current warning zone. It first determines whether the behavior only involves violating equipment or area reservation rules, and then further determines whether an accident or emergency has occurred. If, after assessment, it is confirmed that an experimental accident has occurred and may pose a threat to the personal safety of the violating personnel (such as detecting a gas leak in the equipment, personnel collapsing, vomiting, etc.), the warning risk is determined to be high, and the current violation level is set at Level 3. In this case, the Level 3 warning information displayed, in addition to the information required for Level 1 and Level 2 warning risks, also needs to display the equipment manager's contact information, emergency contact person's contact information, and emergency response measures. For example, if it is detected that a person has touched hydrofluoric acid, an emergency response plan for hydrofluoric acid should be displayed; similarly, if a chlorine leak is detected, an emergency response plan for chlorine leak should be displayed. This real-time display of emergency response plans avoids situations where the first person to arrive at the scene is unsure of the correct procedure, or reduces the risks associated with improper handling. It also reduces training costs, allowing inexperienced or non-professional personnel to quickly and intuitively understand how to handle emergencies on-site, without needing to make phone calls or consult reference materials. This speeds up the response time and further minimizes the negative impact of improper handling.

[0144] Finally, the warning display information is treated as a second type of identity information, and the rendering module 105 displays this second type of identity information in a corresponding warning display format at a preset location in the real-world image of the personnel's current location in the micro-nano fabrication laboratory, such as above or next to the current location. Therefore, when a person commits a violation, the warning display information shown at the preset location allows relevant personnel to quickly locate the person engaging in the violation within the laboratory, facilitating timely intervention or prompt handling of the violation.

[0145] For the information display interface, to enable those who can see the information to intuitively judge the urgency of the abnormal situation on site, the font background of the display interface can be set to use different colored blocks for intuitive display. For example, for the display interface of the first type of identity information (i.e., level 0 basic information), the font background can be set to gray or transparent; for the second type of identity information, the font background of the warning display information corresponding to level 1 warning risk is set to light blue, the font background of the warning display information corresponding to level 2 warning risk is set to yellow, and the font background of the warning display information corresponding to level 3 warning risk is set to red.

[0146] Furthermore, based on the actual situation on site, information can be prioritized for display. If the on-site display space is sufficient to show all the necessary information, then all information can be displayed. If the on-site space is limited and only a portion of the information can be displayed, then higher-level alert information can be prioritized for display, while lower-level alert information can be temporarily collapsed and hidden. When the collapsed lower-level alert information needs to be viewed, personnel can manually click to trigger its expansion.

[0147] Based on real-world scenarios and considering various potential situations in the laboratory, different information display content and methods related to personnel are set up accordingly. When it's necessary to quickly view basic personnel information, or when an anomaly or violation occurs on-site, corresponding information displays are set up according to different risk levels or urgency levels. In cases of high-risk anomalies, the display of emergency measures is enhanced, enabling on-site personnel to take faster and more accurate actions based on the provided information, preventing greater losses. Simultaneously, priority information displays are set based on risk levels, allowing other on-site personnel to quickly access the most critical information, further reducing the time spent handling on-site incidents and improving efficiency.

[0148] Based on the above embodiments, this application further discloses a hazard warning method for a micro / nano fabrication experimental platform. As an example, the method includes:

[0149] In the first state, first-type identity information, such as name, work unit, and laboratory role (see the aforementioned laboratory personnel types), is displayed at a preset location on the physical image of the laboratory staff. In some feasible solutions, the first-type identity information further includes the equipment that can be visited, learned about, and used, as well as the preset usage time. In some feasible solutions, the first-type identity information also includes the area of ​​permitted activity; in some implementations, when the first-type identity information in the first state is rendered and displayed on the terminal devices of other personnel, it is displayed on a background with a first preset transparency. That is, the background of the information box in Figure 4(b) has a certain transparency to avoid interfering with the view of other personnel. It should be noted that the first preset transparency can be completely transparent or relatively high transparency. In specific implementations, the transparency can be adjusted to between 70% and 100% depending on the experimental equipment and background color.

[0150] In the second state, second-class identity information and warning information are displayed at a preset position on the physical image of the laboratory staff, and rendered with a color different from that in the first state according to preset rules.

[0151] The preset rules include at least: determining the emergency or risk level corresponding to the second state; and rendering the first-class identity information and warning information (see the aforementioned content) in a color different from that in the first state when a first-class alert is issued. In some implementations of this example, only the warning information is rendered differently, and the rendered warning information is stopped from being displayed after the alert ends.

[0152] Upon the occurrence of a Type II alert, the system acquires the location information of the alerted laboratory personnel and, based on pre-set emergency measures, establishes a warning zone with the location of the alerted event as a reference point and a preset duration. The system then displays incident information and precautions or necessary safety measures for entering the warning zone. In some specific implementations, the system further displays the safety measures taken by approaching personnel within the warning zone. If the safety measures taken by approaching personnel do not meet the requirements of the warning zone, this information is displayed and a warning message is pushed to the approaching personnel's terminal devices.

[0153] It should be noted that the pre-set emergency measures can be tailored to the risk level of different areas within the laboratory and the materials used. In other words, the relevant parts of the emergency measures are pre-set in conjunction with laboratory management requirements and can be adjusted in real time according to changes in laboratory management. Understandably, the alert range and duration in the emergency measures change based on the laboratory incident, while safety measures need to be pre-set. For example, the protection level, required skills, or equipment for personnel entering the laboratory can be determined based on other modules in the management system. This could be based on image recognition, or by obtaining barcode or RFID chip information from protective equipment or carried equipment; these details will not be elaborated upon here.

[0154] When a third type of alert is triggered, in some examples, the status of personnel within the alert area is further obtained, and the rendering method is adjusted based on this status. Specifically, this may include: obtaining the status of personnel within the area, determining whether the safety measures for those personnel are sufficient to meet the alert requirements, and if not, rendering an alarm message at a preset location and pushing it to the current personnel's terminal. Safety measures and alert requirements are the same as for the second type of alert, and the preset location can be adaptively adjusted based on the various types of information already rendered and displayed.

[0155] It should be noted that the preset rules further include adjustments to the rendering display position. In some implementations, when rendering information obtained from the perspective of other personnel's terminals, it can be rendered above or beside the current person. In some implementations, when the current person falls to the ground, the rendered information is displayed above or below the current person's body. In some implementations, according to alert requirements, when various types of information are superimposed, the alarm information is displayed at the forefront with a solid color opaque background to avoid overlapping and obstruction.

[0156] It should be noted that the preset rules further include adjustments to the transparency of the rendered interface. In some implementations, when the second type of identity information or alarm in the second state is rendered and displayed on other people's terminal devices, it is displayed on a solid color background with a second preset transparency or an opaque background. That is, referring to the information boxes of different colors in Figure 4(b), the background has a certain transparency, but the transparency is relatively low. In some implementations, the second preset transparency is 40% to 70%. It should be noted that when setting, the second preset transparency is greater than or equal to the first transparency.

[0157] In some implementations, when the second and third types of warnings occur in the second state, the transparency of the corresponding rendered information background box is further reduced. That is, under the second and third types of warnings, a third preset transparency is applied, which is 60% to 100%. In some cases, the transparency is 100%, meaning the rendered information is displayed on a completely opaque background. It should be noted that the third transparency is less than the first and second transparencyes.

[0158] It should be noted that the preset rules further include adjustments to the rendering interface colors. In some specific implementations, the warning display and prompts are rendered in front of the user's terminal device, and the colors and light intensity of the surrounding devices and environment of the person whose identity information and warning information are being rendered are obtained. The colors of the identity information, warning information, and background frame are then adjusted according to the colors of the devices and environment.

[0159] In some specific implementations, the first, second, and third preset transparency levels are adjusted simultaneously based on the device and ambient color. For example, in some specific examples, when the reflectivity of the devices surrounding the person whose identity information or warning information is being rendered is high, a background with low transparency is used for rendering, or a bright, solid color background with low transparency is used for rendering.

[0160] For example, Figure 4(a) shows a simplified display diagram of personnel in a micro-nano fabrication laboratory provided by an embodiment of the present invention. As can be seen from Figure 4(a), because personnel in a cleanroom must wear cleanroom suits, caps, masks, and gloves, it is difficult to distinguish them from one another. The information management system 100 can display virtual information superimposed above the heads of corresponding personnel, including name, organization, and which equipment was reserved. This facilitates on-site personnel management. Simultaneously, due to the large number of users on the open platform, including students, personnel from off-campus research institutions, and enterprise personnel, managers or maintenance personnel can also use this intuitively displayed information to match the actually entered reservation information, confirming whether the user has made a reservation, whether they are in an inappropriate area, using equipment not reserved in advance, making equipment usage errors, or entering the cleanroom without a reservation, among other violations.

[0161] Figure 4(b) illustrates another schematic diagram of personnel display in a micro / nano fabrication laboratory provided by an embodiment of the present invention. As can be seen from Figure 4(b), the warning information and specific information display methods differ for different violations and different levels of security risks. For example, information corresponding to different warning risk levels uses different fonts, backgrounds, and transparency levels. Taking a real-world scenario as an example, while personnel are operating the equipment, managers or maintenance personnel can view the personnel's identity information, the equipment currently being used, and the usage time at any time through terminal device 106 to quickly understand the personnel information and equipment usage status within the laboratory.

[0162] By employing the aforementioned information display method for personnel in the micro-nano fabrication laboratory, visitors can quickly understand the laboratory's personnel structure and important personnel-related information from the outside, even without entering the laboratory, through VR or AR glasses or other available terminal devices. For example, using the personnel information display method provided in this embodiment of the invention, when leaders from within or outside the university visit, even if the laboratory personnel are fully equipped from head to toe, the laboratory's ability to manage complex personnel can be quickly demonstrated.

[0163] For the identification and tracking module 101, firstly, the identification and tracking module 101 can be used to calculate the real-time relative position between the real target object and the display area of ​​virtual information based on the spatial position and angle of the terminal device 106 and the 3D spatial model. That is, by locating the spatial position and angle of the terminal device 106 in the real environment in real time, the real-time relative position between the real device and the display area of ​​virtual information is calculated.

[0164] Furthermore, the identification and tracking module 101 can also be used to acquire the identity information data of personnel in the micro-nano fabrication laboratory within the monitoring area, and to track the activity locations and equipment operation behaviors of these personnel in real time. The identity information data includes:

[0165] The personnel in the micro-nano fabrication laboratory should be categorized into at least two groups: those from within the university and those from outside the university. Within the university, personnel can be further divided into laboratory staff, members of various experimental teams, and students from different grades. Outside the university can be further categorized into corporate users, suppliers, visitors, etc.

[0166] Basic identity information, such as name, student ID, campus (e.g., Qingshuiwan / Guangzhou) and tutor name for on-campus personnel, and name of person or organization, company or unit, and the person invited by the university or the relevant person in charge on campus for off-campus personnel.

[0167] Information about the currently reserved equipment, such as the reserved equipment, the corresponding area where it can be used (current reservation area), and the available time period.

[0168] Equipment usage qualification information, for example, for on-campus personnel, it can be a list of machines that have passed the assessment; for off-campus personnel, if they are enterprise users, it can be a list of machines that have passed the assessment; if they are suppliers, it can be supplier certificates or equipment-related professional qualification certificates, etc.

[0169] Educational or work background information, for example, obtaining educational information such as major and academic qualifications of personnel entering the laboratory from the platform's database, and obtaining work background information such as brief work experience of personnel entering the laboratory.

[0170] Furthermore, based on one or more of the aforementioned identity types, basic identity information, currently reserved device information, device usage qualification information, and education or work background information, violations can be monitored or information can be pushed.

[0171] Furthermore, to better manage different types of personnel, corresponding direct or indirect responsible persons can be assigned according to the actual situation. This allows for the rapid identification of the responsible person in case of abnormal situations or violations, thus achieving more standardized personnel management.

[0172] For example, for on-campus personnel, the person in charge of the reserved equipment can be designated as the first type of person in charge, and the person in charge of the equipment that exists within a preset range (such as within a radius of 3 meters) of the person's current location or the equipment that has been used by the person without authorization or reservation can be designated as the second type of person in charge. Both the first and second type of person in charge can be designated as the person in charge corresponding to the on-campus personnel.

[0173] For off-campus personnel, the person in charge of the reserved device can be designated as the first type of person in charge. The person who invited the off-campus personnel (i.e., the person in charge of the off-campus personnel within the school), the person in charge of the device that exists within a preset range (e.g., within a radius of 3 meters) of the current location of the off-campus personnel or the device that was used by the off-campus personnel without authorization or reservation, and the person closest to the off-campus personnel can be designated as the second type of person in charge. The first type of person in charge and the second type of person in charge can be designated as the person in charge of the off-campus personnel.

[0174] Therefore, when personnel in the corresponding type of micro-nano fabrication laboratory violate regulations, the violation information can be quickly sent to the relevant responsible persons to promptly stop the violation. In particular, when the person committing the violation is from outside the university, the relevant university-invited person can be quickly identified, allowing administrators to determine, based on the actual situation, whether to make the university-invited person jointly responsible for the violation and hold them partially accountable for the violation.

[0175] In a specific implementation, the alarm module 102 can also be used to: extract the person in charge of the currently reserved equipment of the micro-nano processing laboratory personnel from the basic identity information as the first type of person in charge; and determine the second type of person in charge of the micro-nano processing laboratory personnel according to the identity type.

[0176] Specifically, the determination of the second type of person in charge for different types of micro-nano fabrication laboratory personnel can be as follows: When the micro-nano fabrication laboratory personnel are the first type of personnel (i.e., on-campus personnel), the alarm module 102 can identify and determine the first target device corresponding to the current location of the first type of personnel through the identification and tracking module 101, and obtain the person in charge of the device corresponding to the first target device from the data module 104 as the second type of person in charge; when the micro-nano fabrication laboratory personnel are the second type of personnel (i.e., off-campus personnel), the on-campus associated person in charge is extracted from the basic identity information of the second type of personnel, the second target device corresponding to the current location of the second type of personnel is identified and determined by the identification and tracking module 101, and the nearest person is identified, and one or more of these persons are designated as the second type of person in charge.

[0177] In practice, it is common for micro-nano fabrication laboratory personnel to make reservations to visit or operate equipment in a certain area. However, due to unforeseen circumstances or other reasonable needs, they may need to visit or operate equipment in another area (which was not previously reserved). In such cases, the micro-nano fabrication laboratory personnel can send a request to the relevant person in charge for temporary access to the unreserved area. Upon receiving the request, the person in charge can grant temporary authorization or refuse authorization based on the actual situation.

[0178] Specifically, the identification and tracking module 101 can also be used to: when receiving a temporary access request from personnel in the micro-nano fabrication laboratory, determine the temporary access area corresponding to the request and the person in charge of the temporary access area; send the temporary access request to the person in charge of the temporary access area; and after receiving a temporary access approval instruction from the person in charge of the temporary access area, send temporary access approval information to the terminal device 106 of the personnel in the micro-nano fabrication laboratory, and record the equipment operation information and / or visit record information of the personnel in the micro-nano fabrication laboratory. If, based on confidentiality or other factors, the person in charge of the temporary access area does not grant temporary authorization, they can also send a denial instruction to the terminal device 106 of the personnel in the micro-nano fabrication laboratory.

[0179] In addition to the above situations, there may also be cases where personnel in the micro-nano fabrication laboratory have reserved a piece of equipment but want to operate equipment that has not been reserved in advance. If there is an available time slot for the equipment, or if the equipment is fully booked but no one is operating it at the moment (i.e., the equipment is currently unused), the personnel in the micro-nano fabrication laboratory can also send a temporary operation request to the relevant person in charge for the unreserved equipment. After receiving the request, the relevant person in charge can grant temporary authorization or refuse authorization based on the actual situation.

[0180] Specifically, the identification and tracking module 101 can also be used to: when receiving a temporary operation equipment request from personnel in the micro-nano fabrication laboratory, determine the temporary requesting equipment and the person in charge of the temporary requesting equipment; obtain the reservation application data of the temporary requesting equipment from the data module 104, and determine the current reservation status of the temporary requesting equipment through the reservation application data; when it is detected that the temporary requesting equipment is currently unused, send the temporary operation equipment request to the person in charge of the current operating equipment and the person in charge of the temporary requesting equipment; after receiving a temporary application approval instruction from the person in charge of the current operating equipment and / or the person in charge of the temporary requesting equipment, send temporary application approval information to the terminal device 106 of the personnel in the micro-nano fabrication laboratory, and record the equipment operation information of the personnel in the micro-nano fabrication laboratory. Similarly, assuming that neither the person in charge of the current operating equipment nor the person in charge of the temporary requesting equipment grants temporary operation authorization, a temporary operation rejection instruction can also be sent to the terminal device 106 of the personnel in the micro-nano fabrication laboratory.

[0181] In another possible scenario, assuming there are idle devices that are not currently performing any tasks, the device idleness information can be sent to the terminal devices 106 of the personnel in the micro-nano fabrication laboratory within the monitoring area to inform these personnel that there are currently idle devices in the laboratory, and they can apply for operation if they need to use them.

[0182] The identification and tracking module 101 can also be used to: when it detects that there is an idle device in the monitoring area that is not currently performing a task, generate temporary authorization information for the idle device; and send the temporary authorization information to the terminal devices 106 of all personnel in the micro-nano fabrication laboratory in the monitoring area, so that the personnel in the micro-nano fabrication laboratory who need it can send a device usage request to the person in charge of the idle device.

[0183] The alarm module 102 is used to generate a violation alarm message and send it to the person in charge when the activity location of personnel in the micro-nano fabrication laboratory is detected based on identity information data, and / or when their operation of the equipment meets preset violation conditions.

[0184] In one optional embodiment, different violation alarm messages can be generated based on different violation types. Specifically, based on a preset electronic fence, the activity area (activity location) of the micro-nano fabrication laboratory personnel tracked by the identification and tracking module 101, and / or the operational behavior of the equipment, when it is detected that the micro-nano fabrication laboratory personnel are outside the currently reserved area but within the area that needs to be reserved, an out-of-range violation alarm message can be generated by the alarm module 102; when it is detected that the micro-nano fabrication laboratory personnel are operating other equipment that does not match the equipment use qualification information, an equipment violation operation alarm message is generated.

[0185] Furthermore, the alarm module 102 can also be used to push violation alarm information to the first and second categories of responsible persons identified based on identity information data, so that the relevant responsible persons can handle the violation in a timely manner. In specific implementation, in order to deal with different equipment violations, when the violation alarm information contains violations related to the currently reserved equipment, the first category of responsible persons can be designated as the primary responsible person (direct responsible person); when the violation alarm information contains violations related to the target equipment corresponding to the current location of the personnel in the micro-nano fabrication laboratory, the second category of responsible persons can be designated as the primary responsible person (direct responsible person).

[0186] Therefore, when the violation alarm information contains violations related to the currently reserved equipment, the alarm module 102 can simultaneously push the corresponding violation alarm information to both the first-type and second-type responsible persons, and additionally send a key reminder message to the first-type responsible person to remind them to handle the violation promptly. When the violation alarm information contains violations related to the target equipment corresponding to the current location of the personnel in the micro-nano fabrication laboratory, the alarm module 102 can simultaneously push the corresponding violation alarm information to both the first-type and second-type responsible persons, and additionally send a key reminder message to the second-type responsible person to remind them to handle the violation promptly.

[0187] In a preferred embodiment, when the alarm module 102 determines that a violation has occurred, it further obtains the location of the violator and determines the nearest qualified person as the authorized manager based on the violator's location. This authorized manager can be a laboratory maintenance personnel or a laboratory staff member with management authority.

[0188] In a more preferred embodiment, the alarm module 102 can further acquire information on multiple laboratory staff members within a certain distance, and determine the authorized management personnel responsible for on-site management based on the work progress registered by these staff members in the laboratory. For example, different priorities can be determined based on the work situation. The first priority is personnel identity; within a preset range, laboratory maintenance personnel are prioritized as authorized management personnel. Secondly, laboratory staff responsible for on-site explanations, tour guidance, and completing the previous stage of work are further prioritized as authorized management personnel. Thirdly, based on the laboratory staff's work experience in the laboratory, within a preset range, laboratory staff with more work experience are prioritized as authorized management personnel. Thus, personnel are determined based on priority and distance, and the finally determined authorized management personnel are designated as the third category of responsible persons.

[0189] In one feasible approach, the priority and distance of authorized managers are assigned specific coefficients, and the authorized manager with the highest score is selected as the final authorized manager.

[0190] In one feasible approach: assuming distance is L and distance parameter is A; the value is X when the person is a laboratory maintenance worker, and Y when the person is a laboratory staff member responsible for on-site explanation, tour guidance, or completion of the previous stage of work; work experience is E and work experience parameter is B, then when an alarm occurs, the priority score for each authorized manager is calculated as: L*A+X+E*B or L*A+Y+E*B.

[0191] Alarm module 102 can also be used to simultaneously push violation alarm information to the aforementioned third-category responsible persons identified based on identity information data, so that violations can be promptly confirmed and handled.

[0192] More specifically, to achieve more targeted alarm information push, the alarm module 102 is specifically used to: push violation alarm information to the first type of person in charge and the person in charge of the first target device when the personnel of the micro-nano fabrication laboratory are the first type of personnel; when the personnel of the micro-nano fabrication laboratory are the second type of personnel, push violation alarm information to the first type of person in charge, the relevant person in charge within the university, the person in charge of the second target device, and the nearest person. Furthermore, the nearest person can be the third type of person in charge determined in the aforementioned manner, namely the authorized management personnel, and at the same time push the information of the relevant person in charge within the university to the authorized management personnel.

[0193] Based on the foregoing, the second category of personnel referred to in this embodiment of the invention mainly includes off-campus personnel such as visitors, enterprise users, and suppliers. The equipment usage qualification information differs for these two different types of off-campus personnel: enterprise users and suppliers. Specifically, the equipment usage qualification information for enterprise users may include information on their independent operation of the equipment, while the equipment usage qualification information for suppliers may include professional qualification certificate information.

[0194] Therefore, for determining violations by off-campus personnel, the alarm module 102 can specifically be used to generate an out-of-scope violation alarm when it detects that visitors, enterprise users, or suppliers are located outside the area of ​​the currently reserved equipment. Specifically, for determining equipment usage violations by enterprise users and suppliers (two types of off-campus personnel), the alarm module 102 can specifically be used to generate an equipment violation alarm when it detects that an enterprise user is operating other equipment whose independent operation qualification information does not match, or that a supplier is operating other equipment whose professional qualification certificate information does not match.

[0195] Furthermore, regarding the removal of violations, the alarm module 102 is also used to: remove the current violation alarm and record the violation information when it receives a temporary authorization instruction or violation removal instruction sent by the first type of responsible person, the second type of responsible person, or the authorized management personnel through the terminal device 106.

[0196] To enable those skilled in the art to better understand the technical solutions of the present invention, several specific examples will be used to provide supplementary explanations of the relevant modules described in the foregoing embodiments.

[0197] As described above, when a person is detected in the monitoring area, the identification and tracking module 101 can automatically match the identity information data with the actual pre-stored reservation information. When a violation occurs (such as not having a reservation or appearing near an unreserved area / device), the alarm module 102 issues a warning or push notification. Simultaneously, the intelligent push module 103 determines the warning display information to be displayed based on preset display rules, and the rendering module 105 simultaneously displays the corresponding warning display information at a preset position on the person's real-world image (such as above their current location), allowing management or maintenance personnel to quickly understand the person's violation or unauthorized operation information.

[0198] For example, suppose a student originally booked machine 1 but appears within the area of ​​machine 2 (e.g., an electronic fence), and the student did not book machine 2 that day. Then, alarm module 102 can generate an out-of-range violation alarm and automatically push this alarm to the student's direct supervisor (mentor or lab instructor) and the equipment manager of machine 2. The receiving supervisor can investigate the violation alarm information; for example, the equipment manager can use experience to determine whether the student's presence within the electronic fence of machine 2 is reasonable, such as the student temporarily studying at machine 2 or under the guidance of a mentor. When an authorization command is received from the direct supervisor's or equipment manager's terminal, the alarm is deactivated based on the location of the supervisor or equipment manager, whether it's on-site authorization, on-site exclusion of the violation, or remote authorization. However, alarm module 102 will record the violation information, on-site video, and operation log for subsequent review or information organization by management or maintenance personnel.

[0199] It should be noted that various types of machines exist in the laboratory based on confidentiality or operational permissions. When there is a conflict between the authorization and permissions granted to a student by the direct supervisor or equipment manager on-site or remotely, authorization will be denied and a denial reason message will be returned to the terminals of both the direct supervisor, equipment manager, and the student. Specifically, when an authorization instruction is received from the management terminal, it is determined whether the instruction complies with confidentiality or operational permission requirements based on the authorized personnel information. If it does, authorization is granted; otherwise, if it does not comply with preset rules, the alarm module 102 returns denial information including the reason.

[0200] As a specific example, confidentiality permissions include access to or use of the current area or equipment, as well as access to information about operations performed on the equipment (e.g., the equipment contains undisclosed experimental processes or data that need to be kept confidential). Access to or use can be determined based on basic identity information or equipment usage qualifications, with different preset levels of requirements. Access to information about operations performed on the equipment is determined according to the level and settings of the user team, and can be set to preset levels of requirements for different types of operation information, such as open to team members, open within the laboratory, open to internal staff, and open to the public. When the alarm module 102 receives authorization information for an area or equipment for an authorized person, it compares the number of authorized person's identity information with the preset level requirements of the area or equipment, and grants authorization or returns a message indicating non-authorization.

[0201] Furthermore, suppose that while using machine 1, the student needs to temporarily use machine 2 for some reason, but the student did not reserve machine 2 in advance. Suppose that a temporary reservation is not possible on-site, or machine 2 has already been reserved by someone else, but is currently unused. In this case, the student can use terminal device 106 to send a temporary operation request to the person in charge of machine 1 and machine 2 obtained from the information management system 100, specifying the reserved equipment and the corresponding time slot. After the person in charge confirms and agrees, they send an authorization instruction to the information management system 100 through the management terminal. The information management system 100 then sends a temporary application approval message to the student's terminal device 106, which includes the specified time range and machine operation requirements. The student can then use machine 2 within the specified time range, guided by the machine operation requirements. During the equipment operation, the system can record the student's equipment operation information.

[0202] Regarding equipment operation, assuming the student has passed the assessment for machine 1, meaning they are qualified to use machine 1 independently. If the student is independently operating another machine not designated as machine 1, it indicates a violation. The alarm module 102 will then generate a violation alarm and push it to the person in charge of machine 1, as well as the persons in charge of the other machines the student is operating. The responsible persons will then assess the situation and determine whether to grant temporary authorization or lift the violation. Regardless of the approach taken, the alarm module 102 will record the violation information.

[0203] Furthermore, the identity information of on-campus personnel can also include profile information, including students' historical appointment records and violation records, as well as actual recorded operation data or violation records. Students can also be further categorized as novice users, experienced users, or users requiring special attention. In practice, administrators can use this information to assess a student's learning or operational performance, analyze which devices they are prone to violating rules or making mistakes on, and provide focused guidance or attention during subsequent training or operation.

[0204] When the person being viewed by the tracking module 101 is an off-campus personnel (such as corporate users, suppliers, or visitors), the basic information that can be displayed mainly includes: basic identity information, including the person's name, company name, and the person who invited them from the university (or the person in charge within the university); currently reserved equipment information, including the currently reserved equipment and time period, the person in charge of the currently reserved equipment, the laboratory safety officer, other equipment reserved for the day and their time, the entry time period, and the entry area; if the person is not a visitor, the information may also include equipment usage qualification information. For corporate users, the equipment usage qualification information may be the equipment independent operation qualification information, corresponding to a list of machines that have passed the assessment, i.e., a list of equipment with independent operation qualifications. For suppliers, the equipment usage qualification information may be professional qualification certificate information, i.e., the supplier's certificates and professional qualification information, such as a "Special Operation Certificate".

[0205] Similar to on-campus personnel, when a person is detected in the monitoring area, the system can automatically match the above information with the actual pre-stored reservation information. When there is a violation (such as not having a reservation or being near an unreserved area / device), a warning or push notification will be issued, and the corresponding violation information can be displayed above the person so that managers or maintenance personnel can quickly understand the person's violation.

[0206] For example, suppose a supplier who was supposed to replace parts at machine 1 is instead located within the area of ​​machine 2 (e.g., an electronic fence), and the supplier did not have an appointment with machine 2 that day. The alarm module 102 can then generate an out-of-range violation alarm and automatically push this alarm to the equipment managers of machine 1 and machine 2, the school representative who invited them, and the nearest person (or the nearest equipment manager). The relevant personnel can use their experience to determine whether the supplier's presence within the electronic fence of machine 2 at that time is reasonable. Once on-site authorization is obtained or the violation is ruled out, the alarm is deactivated, but the alarm module 102 records the violation information for later review or information organization by management or maintenance personnel. To avoid duplicate processing, if one of the notified personnel has already provided a result, that result can be automatically pushed to other personnel, and the alarm will be deactivated.

[0207] Accordingly, if a user originally applied to work in maintenance area A, but due to an emergency or certain needs (such as needing to check parameters or temporarily retrieve items not in area A) requires them to go to maintenance area B, the user can also submit a temporary access authorization request to the person in charge of maintenance area B via terminal device 106. Alternatively, the user can submit a temporary access authorization request to the school's inviter, who will then indirectly request access from the person in charge of maintenance area B. After actual confirmation and approval, the person in charge of maintenance area B can issue a temporary access authorization instruction, sending temporary access authorization information to the user's terminal device 106, and recording the user's equipment operation information within the permitted scope, and / or, visit record information.

[0208] Similarly, assuming a visitor is authorized to visit the second floor, but appears on the third floor (i.e. not within the currently authorized visit area), alarm module 102 will also generate an out-of-range violation alarm, and will be handed over to the school's inviter or the area's authorized person for processing through the same steps mentioned above. The school's inviter or the area's authorized person will then decide whether to temporarily add a visit area for that person.

[0209] Regarding the equipment operation of enterprise users, assuming the enterprise user has passed the assessment for machine 1, meaning they are qualified to use machine 1 independently. If the enterprise user is independently operating a machine other than machine 1, it indicates a violation. The alarm module 102 will generate an equipment violation alarm and push this alarm to the person in charge of machine 1, the persons in charge of the other machines the enterprise user is operating, the school's inviter, and the nearest person (authorized administrator or the person in charge of the nearest device), to promptly stop the violation or temporarily grant authorization. The person in charge then assesses and handles the situation based on the actual circumstances, determining whether to grant temporary authorization or lift the violation. Regardless of the handling method, the alarm module 102 will record the violation information.

[0210] The micro-nano fabrication experimental platform described in this application involves a large number of flammable, explosive, toxic, and harmful chemicals and gases, and operates in a unique environment. Therefore, it is essential to require the professional qualifications of the maintenance personnel from relevant suppliers. For example, supplier personnel replacing gas cylinders need to hold a "Special Operation Certificate," and suppliers using acetone, sulfuric acid, or hydrochloric acid need to hold an "Acetone, Sulfuric Acid, and Hydrochloric Acid Operation Certificate," and so on. Similarly, if the personnel's virtual information does not contain the required certificate, it indicates that the personnel are operating in violation of regulations. By executing the aforementioned steps, a corresponding alarm message will be generated and pushed to the relevant responsible person for timely action.

[0211] Furthermore, the identity information of off-campus personnel can also include profiling information, including their historical appointment records and violation records, as well as actual recorded operational data or violation records. Specifically, enterprise users or suppliers can be further categorized into novice users, experienced users, or users requiring special attention. In practice, managers can use this information to assess a user's operational behavior and provide targeted guidance or attention during subsequent equipment operation.

[0212] The intelligent push module 103 is used to obtain the personnel identity data corresponding to the terminal device 106 (mainly the specific personnel type corresponding to the personnel using the terminal device 106), and automatically match the virtual display data related to the personnel identity data from the data module 104. Then, the rendering module 105 can overlay the virtual display data onto the real-time relative position of the real-scene image. That is, based on the association mapping table, the running data corresponding to the display area of ​​the virtual information is overlaid onto the real-time relative position of the real-scene image to obtain the rendered image.

[0213] For example, considering the actual situation, the personnel in the micro-nano fabrication laboratory can be specifically divided into management personnel, visitors, trainees, and equipment users. Furthermore, based on the characteristics of these different personnel types, different types of display data can be generated from the virtual anchor data of the real target object (i.e., the object to which virtual information needs to be displayed), focusing on different information display priorities. In the subsequent intelligent information push process, different virtual display data are triggered based on the acquired personnel type. Thus, through the intelligent push module 103, personalized information push and display can be performed based on the actual personnel type in the micro-nano fabrication laboratory.

[0214] Specifically, for the generation of different types of display information, the intelligent push module 103 is specifically used to: determine the real-scene images of all real target objects within the current visible range of the terminal device 106, and at least one virtual anchor point corresponding to the real-scene image for displaying information; for each virtual anchor point, retrieve the virtual anchor point data corresponding to the virtual anchor point from the data module 104, and generate the first type of display data, the second type of display data, the third type of display data, and the fourth type of display data respectively based on the virtual anchor point data.

[0215] The data presented can be categorized into four types: The first type includes equipment operation data within the terminal device's current field of view, equipment management forecast data, and data currently being viewed by visitors or trainees. The second type includes different types of recommendation information generated based on the background characteristics of visitors (e.g., technical personnel, industry professionals, and non-industry personnel). The third type includes training content data of different levels generated based on trainees' skill levels (e.g., categorized as beginner, intermediate, and advanced based on training ability). The fourth type includes equipment-related data of different levels generated by equipment users based on their equipment operation levels (e.g., categorized as beginner, intermediate, and advanced based on equipment operation skills or relevant equipment operation certificates).

[0216] In the specific implementation of intelligent information push, when the personnel type is a manager, the intelligent push module 103 can be used to: directly push the first type of display data as virtual display data to the manager automatically.

[0217] For example, when the person viewing the AR is an administrator, that person has the highest level of access. They can view not only any information within the lab, but also information available to trainees and visitors.

[0218] The equipment operation data may include current operation data, comparison results between current operation data and normal values, and historical operation data.

[0219] Specifically, the data that can be displayed within the current field of view of the management personnel may include: current operating data, such as current power consumption, exhaust volume, gas flow rate, pressure, wastewater and exhaust gas discharge flow rate, various equipment operating parameters, equipment alarm information, etc.

[0220] Comparison of current operating data with normal values: For example, assuming the current pressure value is 200 Pa, which is within the normal range of 100-300 Pa, the display will show "Pressure value is normal". If you want to view further details, you can trigger the data display by tapping with your finger to view detailed operating parameters.

[0221] Historical operating data: For example, displaying historical data curves (such as pressure value curves for the past 6 months), fault records, historical maintenance records (including text descriptions, drawings, videos, exploded diagrams of maintenance improvement points, etc.), replacement parts or consumables records, etc.

[0222] Estimated Data and Alerts: Based on the specific maintenance type of the equipment, relevant data can be further categorized, such as into regular maintenance, regular repairs, technical upgrades, and emergency response, to facilitate quick retrieval and viewing by personnel. Furthermore, this data for different maintenance types can also be displayed to maintenance personnel or equipment users according to actual needs.

[0223] Regarding the implementation of the interactive display function, administrators can obtain the content currently viewed by visitors or trainees at any time through terminal device 106. Based on the currently viewed content, a judgment is made, such as the richness of the currently displayed information or the necessity of displaying operation and maintenance data, to determine whether it is necessary to display the operation and maintenance data in the current situation within a short period of time. If necessary, the operation and maintenance data is obtained from the data module 104 through the management terminal and pushed to the terminal device of the visitor or trainee through the intelligent push module 103, and then displayed through the rendering module 105. Through this intelligent push method, visitors and trainees can avoid obtaining too much data at the data anchor point and missing or missing viewing more important operation and maintenance data.

[0224] Furthermore, maintenance personnel can be considered management personnel to some extent. Maintenance personnel can be further divided into plant maintenance personnel and equipment maintenance personnel, depending on the specific circumstances. For plant maintenance personnel, the main focus is on displaying plant-related information such as power consumption, ventilation volume, gas flow and pressure, and wastewater and exhaust gas discharge flow. For equipment maintenance personnel, the main focus is on displaying important equipment operating parameters and alarm information.

[0225] When the personnel type is a visitor, the intelligent push module 103 is specifically used to: obtain the visitor's background information from the data module 104, and filter out the information with the highest matching degree with the personnel background information from the second type of display data, as virtual display data for automatic push and priority display.

[0226] Specifically, when the person viewing AR is a visitor, the academic background and purpose of the visit can be obtained from the data module 104. Based on the background information, information that the visitor may be more interested in can be intelligently and differentiatedly filtered from the second type of display data and pushed to different visitors.

[0227] For example, based on personnel background information, visitors can be mainly divided into technical personnel, industry personnel, and non-industry personnel.

[0228] For technical personnel who may be more interested in the equipment's parameters, intelligent push notifications can be sent to display the equipment's parameters, operating data, cleanroom environmental parameters, relevant technical challenges and key points, patent information, and so on.

[0229] For industry professionals who may be more interested in industry developments, priority can be given to intelligently pushing information on industry developments, industry comparisons, the unique features of this experimental platform or equipment, existing cooperation models, and case studies. Users can also choose whether to push information such as device parameters, depending on the specific needs.

[0230] For those outside the industry who are not familiar with the relevant technologies, intelligent push notifications of popular science information on micro-nano fabrication can be prioritized. For example, information on the relevance of micro-nano fabrication products to daily life, parameters and purchasing information of lithography machines, how to ensure temperature, humidity and cleanliness in clean rooms, and the structural design of semiconductor laboratories can be pushed.

[0231] In addition, the intelligent push module 103 can also obtain visitor permissions and prioritize the display of information at different levels. For example, different emphases can be displayed based on the permissions of faculty members, students, researchers from external research institutes, corporate visitors, government officials, and investors.

[0232] Meanwhile, the intelligent push module 103 can also acquire the visitors' points of interest and interact based on those interests. For example, during a visit, the intelligent push module 103 can intelligently push a list of information that visitors may be interested in at appropriate times (such as when there is no content currently displayed, or when the currently displayed content has been displayed for a long time), and display it in front of the visitors through the rendering module 105.

[0233] Visitors can tap on specific items of interest in the information list within their authorized access range to select the information they wish to see or hear. The intelligent push module 103 then retrieves the selected information from the data module 104 and displays it via the rendering module 105.

[0234] If visitors are not interested in the pushed information, they can tap "Skip" with their finger. At this time, the intelligent push module 103 can select other potentially interesting information and push it to the visitors for them to choose from again. If there are several "Skip" operations (e.g., 3 times), the intelligent push mode will be temporarily suspended, and the system will wait for the next suitable time to push the information again.

[0235] If visitors wish to view information beyond their current viewing permissions, they need to send a temporary permission request to the school's inviter through the AR system. Once the request is approved, they can view the relevant content.

[0236] In a specific implementation, the intelligent push module 103 can also be used to: when receiving an information viewing instruction sent by a visitor through the corresponding terminal device 106, determine the display information corresponding to the information viewing instruction and the level of the person who can view it, and obtain the visitor's viewing permission level; match the level of the person who can view it with the viewing permission level, and when the match fails, push a viewing failure reminder message to the visitor's terminal device 106, and at the same time push an information viewing request to the relevant person in charge within the school corresponding to the visitor; when the match succeeds, or when receiving an information viewing approval instruction returned by the relevant person in charge within the school, obtain the display information from the data module 104 as the currently displayed virtual display data.

[0237] When the personnel type is trainees, the intelligent push module 103 is specifically used to: obtain the trainee's current ability level, and filter training content data that matches the current ability level from the third type of display data, as virtual display data for automatic push.

[0238] When the person viewing AR is a trainee, based on their access permissions, they can primarily view maintenance information, equipment schematics, videos, 3D models, exploded views, VR operation models, and other information. During the viewing process, they can also perform actions such as clicking, zooming in, zooming out, rotating, and disassembling related information.

[0239] The intelligent automatic push of information to trainees can not only display basic information about equipment / facilities, but also further display the principle and structural information of equipment / facilities, such as VR models, BIM models (Building Information Modeling), exploded views, etc.

[0240] It is understandable that different trainees have different skill levels, and therefore their access permissions to view information will also differ. Therefore, when automatically pushing information or when trainees actively want to view certain information, it is advisable to first determine the individual's viewability level and then, based on that level, decide which information can be displayed.

[0241] For example, equipment training is divided into beginner, intermediate, and advanced levels. Intermediate training content can only be displayed after trainees complete the beginner level training and pass the assessment, and advanced training content can only be displayed after completing the intermediate level training and passing the assessment. If a trainee has not passed the beginner level assessment but wants to view the intermediate level training content, the intelligent push module 103 can determine whether to display the content based on the trainee's viewable ability level. If it determines that the trainee cannot view the intermediate level training content, it pushes a viewing failure reminder to the trainee's terminal device 106, indicating that their current ability does not meet the level and they need to pass the beginner level assessment to access the intermediate course. In this case, to view the training content, the trainee can directly send an assessment application to the training instructor through the system.

[0242] In its specific implementation, the intelligent push module 103 is used to: when receiving a temporary viewing instruction sent by a trainee through the corresponding terminal device 106, determine the training content information and viewable ability level corresponding to the temporary viewing instruction; match the viewable ability level with the current ability level; if the match fails, push a viewing failure reminder message to the trainee's terminal device 106, and simultaneously push a temporary viewing request to the trainee's corresponding training teacher; when the level match is successful, or when a temporary viewing pass instruction is received from the training teacher, retrieve the information corresponding to the temporary viewing pass instruction from the data module 104 as the currently displayed virtual display data.

[0243] For example, if a trainee only applied for training on device 1, or if the current viewable skill level only allows display of training content for device 1, then information display is limited, and training content for device 2 cannot be displayed. Simultaneously, a corresponding reminder can be sent to the trainee's terminal device 106.

[0244] Furthermore, when a teacher accompanies trainees during on-site training, the teacher can temporarily authorize access to training courses that are not within the teacher's authorized or ability limits, based on the students' situation and relevant access rules. For example, the teacher can grant access to all courses within a 10-meter radius of their current location, or select a specific device and grant access to all courses related to that device. Specifically, the intelligent push module 103 receives the temporary access authorization command sent by the trainee through the terminal device 106, retrieves data that meets the access authorization requirements from the data module 104 (e.g., all courses within a 10-meter radius of the trainee's current location as mentioned above), and displays the retrieved data through the rendering module 105.

[0245] In a more specific implementation, when the intelligent push module 103 receives a course or device information opening instruction from the management terminal, it obtains all trainees within a 10-meter radius of the current location of the management terminal and pushes the designated training courses, designated device training courses, or designated device operation information to the terminals carried by these trainees.

[0246] For example, designated training courses can be made available to all personnel within a 10-meter radius of the teacher's current location; or a specific device can be selected to provide access to designated courses or data related to that device. In this way, teachers can easily adjust their teaching or presentation content on-site based on the actual venue conditions or the students' situations and problems.

[0247] That is, in specific implementation, when no preset instruction is received, the virtual display data opened to the trainee's terminal is preset authorized data or first type of data; when a preset instruction is received, the virtual display data opened to the trainee's terminal is temporary authorized data or second type of data.

[0248] Among them, the preset authorized data or the first type of data is the data that trainees can display on their terminals based on their historical learning progress and permissions, or the data that trainees choose to view themselves; the temporary authorized data or the second type of data is the data that the management terminal temporarily pushes from the database to the trainees' terminals for display.

[0249] It should be noted that temporary authorized data or second-category data can be displayed synchronously in a preset order according to the instructions of the management terminal, or it can be pushed to the trainee's terminal and displayed by the trainee himself.

[0250] Furthermore, this system can also display different course content based on the current batch of trainees. For example, if the current batch of trainees are from outside the industry, basic training access to all equipment can be granted first; if the current batch of trainees are from within the industry and wish to continue with in-depth learning, access to basic, intermediate, and advanced course content can be granted simultaneously, depending on the actual situation; if the current batch of trainees are factory management personnel, access to factory management course content can be granted simultaneously, and so on.

[0251] Specifically, the intelligent push module 103 obtains the trainee type of the current batch of trainees from the data module 104, determines the corresponding temporary access permissions for courses based on the trainee type, retrieves the corresponding permission data from the data module 104 based on the temporary access permissions, and displays the retrieved permission data through the rendering module 105. This allows for differentiated generation of corresponding training content access permissions based on the training level of different batches of trainees, and pushes corresponding training courses accordingly.

[0252] When the personnel type is equipment user, the intelligent push module 103 can be used to: obtain the equipment operation level of the equipment user, and filter equipment-related data that matches the equipment operation level from the fourth type of display data, as virtual display data to be automatically pushed.

[0253] When the person viewing AR is a device user, the system can intelligently push and display the current device's SOP (Standard Operating Procedure), error-prone operation details, safety risks, emergency contact information, and laboratory safety contact information based on the user's current device operation level, so that the user can view and contact these information in a timely manner.

[0254] The rendering module 105 can also be used to render interactive buttons at the real-time relative position of the real-scene image. These interactive buttons are primarily used for interaction between the user and operational information, as well as for filtering or manipulating the operational information. This embodiment of the invention not only enables virtual display but also allows for real-world operations on virtual information. For example, a real click action can open a filter button to access different information levels. Real click actions include real finger clicks, zooming in, zooming out, rotating, disassembling VR models, exploded views, and schematic diagrams of equipment or factory operations.

[0255] The rendering module 105 then displays real-time information, overlaying virtual information onto the corresponding real objects (including equipment, facilities, and personnel) as virtual information. This allows personnel to directly see both the real objects and the virtual information mapped onto them, representing their current operational status, within the actual scene. This eliminates the need for manual searching and matching of real objects with backend real-time information; the information is directly and intuitively displayed on the real objects on-site, enabling on-site maintenance and training at any time, significantly improving efficiency.

[0256] As an optional embodiment, the information management system 100 also includes a voice interaction module. Specifically, the voice interaction module can be used to: extract the target control entity and key action information from the voice control command when a voice control command is detected by the terminal; retrieve the equipment usage permissions of the personnel in the micro-nano fabrication laboratory from the data module 104, and determine whether the personnel have control permissions for the target control entity based on the equipment usage permissions; if so, control the target control entity to perform actions corresponding to the key action information through the information management system 100; when the voice control command is an instruction to display information, the rendering module 105 can overlay the relevant operating information or parameter information corresponding to the voice control command onto the real-time relative position of the corresponding real-scene image of the target control entity; otherwise, push alarm information to the person in charge of the target control entity through the alarm module 102.

[0257] For example, suppose a person in the micro-nano fabrication laboratory issues a voice control command, "View the monthly chlorine usage data for the etching machine." The voice interaction module can extract information to determine that the target control entity is "etching machine," the key action information is "view," the action object information is "chlorine," and the action range information is "monthly usage data." Then, the voice interaction module retrieves the equipment usage permissions of the equipment maintenance personnel from the data module 104, and determines whether the equipment maintenance personnel have control permissions for the "key action," "action object information," and "action range information" of the target control entity, the etching machine, based on the equipment usage permissions.

[0258] When the personnel in the micro-nano fabrication laboratory have the corresponding control permissions, the voice interaction module can retrieve the monthly chlorine usage data of the etching machine from the data module 104, and display this information overlaid on the real-time relative position of the corresponding real-scene image of the etching machine through the rendering module 105.

[0259] When the personnel in the micro-nano fabrication laboratory do not have the corresponding control permissions, they can return the reason and request whether to apply for the relevant permissions to the terminal. When the terminal returns the request for permission, an authorization request is sent to the person in charge of the target control entity or the person in charge of the key action information, action object information, and action scope information of the target control entity. When the person in charge returns the authorization instruction, the personnel in the micro-nano fabrication laboratory are notified and the data is retrieved and displayed according to the instructions of the personnel in the micro-nano fabrication laboratory.

[0260] For example, suppose an administrator issues a voice control command, "Please show the appointment information of user xx." Through similar steps, the system can automatically retrieve the corresponding personnel information from the massive amount of data and overlay the information above the user's current location. This avoids administrators having to search for the desired data from a huge amount of data, thus improving the user experience.

[0261] Furthermore, after the alarm module 102 pushes alarm information to the person in charge of the target control entity, if the terminal receives a control authorization instruction returned by the person in charge of the target control entity, it controls the target control entity to perform the action corresponding to the key action information through the information management system 100 and records the control information; if it receives a control denial authorization instruction returned by the person in charge of the target control entity, it determines that the voice control instruction is invalid and sends an invalid prompt message to the personnel of the micro-nano fabrication laboratory; if no authorization instruction returned by the person in charge of the target control entity is received within the preset waiting period, it retrieves the superior person in charge corresponding to the person in charge of the target control entity from the data module 104 and pushes alarm information to the superior person in charge.

[0262] For example, suppose a person in the micro-nano fabrication laboratory issues a voice command to "turn on lithography machine A". When the voice interaction module receives the voice command, it extracts information from the voice command and, based on the extracted information, retrieves the person's device access permissions from the data module 104 to determine whether the person has the authority to control the physical device.

[0263] If authorized, the command is valid, and the information management system 100 controls the opening of lithography machine A. If not authorized, an alarm message is sent to the person in charge of lithography machine A via alarm module 102.

[0264] If the equipment manager refuses authorization, the voice command is deemed invalid, and an invalid message is sent to that person. If the equipment manager grants authorization, the information management system 100 can be used to control and open lithography machine A, and the control information is recorded. If the relevant person in charge cannot make a decision, and the voice interaction module does not receive the relevant instruction within a preset waiting period, it can retrieve the next-level person in charge of lithography machine A from the data module 104 and push an alarm message to that person for further handling.

[0265] In addition, the voice interaction module can also provide voice suggestions. Anyone (such as visitors, trainees, or maintenance personnel) can leave suggestions or questions via voice. The voice interaction module will convert the acquired voice information into text, record it, and store it in the data module 104 for management personnel to view.

[0266] In the specific implementation, the voice interaction module can also be used to: respond to voice control commands issued by personnel in the micro-nano fabrication laboratory; when the voice control command is determined to be a voice suggestion command (e.g., analyzing the voice content based on a large language model to determine whether the voice content is suggestive or a problem), extract voice suggestion information from the voice suggestion command; the voice suggestion information includes, but is not limited to, the target control entity and the suggestion object; convert the voice suggestion information into text suggestion content; send the text suggestion content to the data module 104 for storage; and display the suggestion content of the suggester to the person in charge of the target control entity or other suggestion objects.

[0267] As an example, if a visitor, Professor Liu, says, "The content displayed on machine A is too technical," the voice interaction module will recognize "machine A" and send a message to the person in charge of "machine A," Professor Liu, to provide feedback that "the content displayed on machine A is too technical."

[0268] Among them, other suggested targets are further identified based on the target control entity, role, and time range obtained from the voice, and then suggestions are pushed to them.

[0269] As an example, if maintenance worker Liu says, "There have been too many instances of improper use of a certain module on machine A in the past two months, resulting in increased equipment maintenance frequency. It is recommended that the instructor strengthen the pre-training guidance for trainees," then after the voice interaction module recognizes "machine A," it will obtain the "person in charge of machine A" and the corresponding "instructor" and "trainee" in the "past two months," and push usage suggestions or usage guidance suggestions for the module to these personnel.

[0270] As an optional embodiment, during the operation of equipment in the micro-nano fabrication experimental platform by personnel in the micro-nano fabrication laboratory, when questions arise, the personnel can issue voice questions at any time. The voice interaction module, based on AI (Artificial Intelligence) and a large language model, can match recommended answers from the data module 104 according to the question content and provide feedback to the personnel via voice broadcast. Therefore, the voice interaction module can also be used to: respond to receiving a voice question instruction from the personnel in the micro-nano fabrication laboratory, extract key question information from the voice question instruction; match the information with the highest correlation to the key question information from the data module 104 and broadcast it to the personnel in the micro-nano fabrication laboratory; if no second question or voice broadcast feedback is received from the personnel in the micro-nano fabrication laboratory within a preset time period, the voice interaction ends; if voice broadcast feedback is received from the personnel in the micro-nano fabrication laboratory within the preset time period, a satisfaction analysis is performed on the voice broadcast feedback. If the satisfaction analysis result indicates that the personnel in the micro-nano fabrication laboratory are dissatisfied with the voice broadcast, the voice question instruction and voice broadcast feedback are pushed to the equipment manager corresponding to the equipment operated by the personnel in the micro-nano fabrication laboratory. Therefore, based on voice question-and-answer interaction, problems encountered by users during operation can be solved or partially solved. Even if the currently selected responses cannot completely solve the user's problem, the problem can be sent to the equipment manager so that the equipment manager can handle the problem in a timely manner or provide answers and assistance to the user.

[0271] As an optional implementation, when an emergency occurs on-site, the person in charge of the equipment can see the real-world scene through the remote expert guidance system within the AR system, meaning they are in the same field of vision as the user. At this time, the person in charge can issue commands to the site via the voice interaction module, and can also remotely annotate the scene in 3D to guide the user in handling the problem.

[0272] In its implementation, when an emergency is detected on-site, the alarm module 102 can send an emergency assistance command to the terminal device 106 of the relevant equipment manager. Based on this command, the equipment manager accesses the remote expert guidance system to view the same screen as the user on their terminal device 106. The voice interaction module receives the voice guidance command from the equipment manager, extracts the voice content, and broadcasts it as a voice message or sends it as text to the user's terminal device 106. The rendering module 105 then displays this text content. Furthermore, when the recognition and tracking module 101 detects a remote 3D annotation by the equipment manager, it acquires the 3D annotation content and displays it at the corresponding location within the user's field of vision using the rendering module 105.

[0273] Simultaneously, users can also directly call the device's emergency contact and the nearest manager through the AR system. Specifically, the voice interaction module detects a call notification, generates a call communication prompt, and sends this prompt to the device's emergency contact terminal 106 and the nearest manager's terminal 106, enabling relevant personnel to establish telephone contact with the user and resolve related issues via on-site connection.

[0274] In an optional embodiment, the information management system 100 may further include a usage frequency recording module. This module records the frequency and duration of use of the 3D models of each micro / nano fabrication equipment and facility, allowing analysis of which equipment or area is viewed most frequently, thus enabling targeted management improvements. For example, if analysis using the frequency recording module reveals that the usage frequency of the 3D model of the power system is significantly higher than in other time periods during a given month, it is highly likely that frequent maintenance issues have occurred. In such cases, maintenance personnel need to pay close attention when managing the power system.

[0275] In the specific implementation, the frequency recording module is used to: record the usage frequency data of each device used in the micro-nano fabrication experimental platform; for any device used, extract the personnel type record information of the device used from the usage frequency data. The personnel type record information records the usage frequency or click-view count of different types of micro-nano fabrication laboratory personnel for the device used; based on the personnel type record information, determine the target personnel type with the highest usage frequency or click-view count for the device used, and adjust the management and maintenance plan of the device used accordingly based on the target personnel type.

[0276] Suppose that for device A, analysis shows it is used most frequently by maintenance personnel, indicating a need for enhanced management of this device. The frequency recording module can then send maintenance reminders to maintenance personnel, allowing them to improve management based on the actual situation. Simultaneously, the frequency recording module can also send user feedback suggestions, advising maintenance personnel to provide user feedback based on the actual maintenance situation. When the frequency recording module receives user feedback information from maintenance personnel, it can send it to data module 104 for storage. This allows for comprehensive analysis of the device based on user feedback during subsequent maintenance processes, enabling more comprehensive and targeted device maintenance.

[0277] If analysis reveals that device B receives the most repeated clicks from trainees, it indicates that enhanced demonstrations or training are needed for this group of trainees using device B. In this case, the frequency recording module can send enhanced training suggestions for device B to the trainer's terminal device 106, allowing the trainer to focus on enhancing the demonstration of device B or adding training content during training sessions.

[0278] Suppose that for device C, analysis shows that visitors clicked the most repeatedly, indicating that this section of content is the most popular and therefore should be highlighted. In this case, the frequency recording module can generate a suggestion to enhance the display and send it to the terminal device 106 of the person in charge of device C, so that the person in charge can increase the display frequency of this content when configuring the display settings. Alternatively, the suggestion can be sent to the intelligent push module 103, which can then prioritize the display of this content or increase its display frequency when intelligently pushing information.

[0279] Similarly, if device C receives the fewest clicks, it indicates that this part of the information is not receiving attention. If attention is desired, administrators or relevant maintenance personnel need to redescribe or plan this part of the content. In this case, the frequency recording module can generate content optimization instructions and send them to the terminal device 106 of the person in charge of device C, so that the person in charge can adjust and optimize this part of the content. The updated content is then sent to the data module 104 for data replacement. In the next information display, the modified content is displayed, and the effect is analyzed based on the click data of the modified content. If the number of clicks increases, it means that the modification is effective; if the number of clicks remains almost unchanged or decreases, it means that further modification and optimization are still needed.

[0280] For example, Figures 5(a) and 5(b) both show rendered images displayed by a terminal device 106 provided in an embodiment of the present invention. As can be seen from Figures 5(a) and 5(b), the user can simultaneously see the real object and the virtual information mapped onto the real object, representing the current operating state of the real object, through the terminal device 106.

[0281] It should be noted that, in order to enable those skilled in the art to better distinguish data of the same type but with different actual meanings, the embodiments of the present invention use terms such as "first" and "second" to distinguish and describe some technical features. The terms "first" and "second" are used only for data differentiation and have no other special meanings. It is understood that the present invention does not impose any limitations on them.

[0282] In this embodiment of the invention, an information management system for a micro-nano fabrication experimental platform is provided. The information management system includes at least an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. Combined with the information management method provided by this invention, firstly, through the alarm module and the interactive settings for violation triggering and alarm push, more targeted and efficient personnel management can be achieved. On the one hand, the identification and tracking module and the alarm module acquire information about personnel activities in the laboratory, and when violations occur, multiple responsible persons can be quickly identified, simplifying personnel management in the laboratory and enabling timely identification of different responsible persons to avoid management risks when problems arise. On the other hand, the intelligent push module intelligently pushes and displays more relevant information to relevant personnel based on different personnel types, realizing differentiated intelligent filtering and push based on personnel type. Compared with current information display methods, this has a better information display effect and improves the user information viewing experience.

[0283] Reference Figure 6 The diagram illustrates a flowchart of an information management method for a micro / nano fabrication experimental platform provided by an embodiment of the present invention. The method may specifically include the following steps:

[0284] Step 601: Obtain the personnel identity data and identity information data of the personnel in the micro-nano fabrication laboratory corresponding to the terminal device, and automatically match the virtual display data related to the personnel identity data;

[0285] Step 602: Overlay the virtual display data onto the real-time relative position of the real-scene image to obtain the rendered image;

[0286] Step 603: Acquire and track in real time the activity locations and equipment operation behaviors of the personnel in the micro-nano fabrication laboratory within the monitoring area;

[0287] Step 604: When the location of the activity of the personnel in the micro-nano fabrication laboratory is determined based on the identity information data, and / or the operation behavior of the equipment meets the preset violation conditions, a violation alarm message is generated and sent to the person in charge and the terminal device.

[0288] As the method embodiments are basically similar to the aforementioned device embodiments, they are described in a relatively simple manner. For relevant details, please refer to the descriptions of the aforementioned device embodiments.

[0289] In this embodiment of the invention, an information management system based on the proposed micro-nano fabrication experimental platform provides a corresponding information management method. First, an identification and tracking module acquires the identity information data of personnel in the micro-nano fabrication laboratory within the monitoring area, and tracks their activity locations and equipment operation behaviors in real time. When the activity location is determined based on the identity information data, and / or the equipment operation behavior meets preset violation conditions, a violation alarm message is generated by the alarm module and sent to the responsible person. Thus, through the alarm module and the interactive settings for violation triggering and alarm push, more targeted and efficient personnel management can be achieved. Second, an intelligent push module acquires the personnel identity data corresponding to the terminal device, and automatically matches virtual display data related to the personnel identity data from the data module. A rendering module overlays the virtual display data onto the real-time relative position of the real-scene image to obtain the rendered image. On the one hand, by identifying and tracking personnel activities in the laboratory through the identification and tracking module and the alarm module, multiple responsible persons can be quickly identified when violations occur, simplifying personnel management in the laboratory and enabling timely identification of different responsible persons to avoid management risks when problems arise. On the other hand, the intelligent push module automatically pushes and displays more interesting information to relevant personnel based on different personnel types, realizing differentiated intelligent filtering and push based on personnel type. Compared with the current information display method, it has a better information display effect and improves the user information viewing experience.

[0290] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0291] In the embodiments provided by this invention, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection between devices or units through some interfaces, and may be electrical, mechanical, or other forms.

[0292] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0293] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0294] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0295] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An information management system for a micro / nano fabrication experimental platform, characterized in that, The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device; wherein, The identification and tracking module is used to acquire the identity information data of personnel in the micro-nano fabrication laboratory in the monitoring area; The intelligent push module is used to extract a first type of identity information from the identity information data of the personnel in the micro-nano fabrication laboratory, and display the first type of identity information at a preset position on the real-scene image of the personnel in the micro-nano fabrication laboratory through the rendering module; obtain personnel identity data corresponding to the terminal device, automatically match virtual display data related to the personnel identity data from the data module, and overlay the virtual display data onto the real-time relative position of the real-scene image of the personnel in the micro-nano fabrication laboratory through the rendering module; when a violation alarm information is received from the alarm module, a second type of identity information is determined according to preset display rules, and the second type of identity information is displayed at a preset position on the real-scene image of the personnel in the micro-nano fabrication laboratory through the rendering module; The personnel identity data includes the personnel type corresponding to the terminal device; the intelligent push module is specifically used for: Determine real-scene images of all real target objects within the current field of view of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information; For each virtual anchor point, the corresponding virtual anchor point data is retrieved from the data module, and based on the virtual anchor point data, first type of display data, second type of display data, third type of display data, and fourth type of display data are generated respectively. The first type of display data includes equipment operation data, equipment management prediction data, and data currently being viewed by visitors or trainees within the current visible range of the terminal device. The second type of display data includes different types of recommendation information generated based on the background characteristics of visitors. The third type of display data includes different levels of training content data generated based on different ability levels of trainees. The fourth type of display data includes different levels of equipment-related data generated based on different equipment operation levels of equipment users. When the personnel type is a manager, the first type of display data is used as the automatically pushed virtual display data; when the personnel type is a visitor, the visitor's background information is obtained, and the information with the highest matching degree with the background information is filtered from the second type of display data as the automatically pushed virtual display data; when the personnel type is a trainee, the trainee's current ability level is obtained, and training content data matching the current ability level is filtered from the third type of display data as the automatically pushed virtual display data; when the personnel type is a device user, the device user's device operation level is obtained, and device-related data matching the device operation level is filtered from the fourth type of display data as the automatically pushed virtual display data. When the alarm module receives a violation alert, the intelligent push module is specifically used for: Determine the violation alert range corresponding to the violation alert information; Violation analysis is performed on violations within the aforementioned violation warning range; When it is determined that the violation involves a breach of equipment or area reservation rules, it is further determined whether an experimental accident or emergency has occurred within the monitoring area; If not, the violation is determined to be a Level 1 violation. If so, then it is further determined whether the experimental accident or the emergency situation poses a threat to the personal safety of the personnel in the micro-nano fabrication laboratory; If not, the violation is determined to be a Level 2 violation. If so, the violation is determined to be a Level 3 violation. The level of violation is used to match the second type of identity information of the personnel in the micro-nano fabrication laboratory.

2. The information management system according to claim 1, characterized in that, The intelligent push module is also specifically used for: Retrieve warning display information and warning display format that match the level of violation from the data module; The warning display information is used as a second type of identity information, and the second type of identity information is displayed in the form of warning display at a preset position in the real-world image of the personnel in the micro-nano fabrication laboratory through the rendering module.

3. The information management system according to claim 2, characterized in that, The intelligent push module is specifically used for: When it is determined from the violation alarm information that the personnel in the micro-nano fabrication laboratory are currently operating the equipment in violation of regulations, the area within a first preset range centered on the equipment being operated in violation of regulations shall be designated as the violation warning range. When it is determined, based on the violation alarm information, that the personnel of the micro-nano fabrication laboratory are currently in an area where they have entered without authorization, the area where they entered, or the area within a second preset range centered on the personnel of the micro-nano fabrication laboratory, will be designated as the violation warning range.

4. The information management system according to claim 2, characterized in that, When the violation is classified as a Level 1 violation, the Level 1 violation corresponds to a Level 1 warning display message; When the Level 1 violation is that the actual operation time of the micro-nano fabrication laboratory personnel for the scheduled operation equipment does not match the scheduled time, the Level 1 warning display information includes a warning message about the mismatched operation time, as well as the equipment manager information corresponding to the scheduled operation equipment. When the Level 1 violation is that the equipment actually operated by the personnel in the micro-nano fabrication laboratory does not match the equipment scheduled for operation, the Level 1 warning display information includes a warning message about mismatched operating equipment, as well as the equipment manager information corresponding to the scheduled operating equipment. When the Level 1 violation is that personnel in the micro-nano fabrication laboratory are currently in an area where they have entered without authorization, the Level 1 warning display information includes an evacuation warning message; When the violation is classified as a Level 2 violation, the Level 2 violation corresponds to a Level 2 warning display message; the Level 2 warning display message includes the Level 1 warning display message, details of the misoperation, information of the person in charge of the equipment, and prompts for resolving the misoperation. When the violation is classified as a Level 3 violation, the Level 3 violation corresponds to a Level 3 warning display; the Level 3 warning display includes the Level 2 warning display, machine operator information, emergency contact information, and emergency response measures information.

5. The information management system according to claim 4, characterized in that, The violation level corresponding to the first type of identity information is level 0; the rendering module is specifically used for: When displaying the first type of identity information and / or the second type of identity information, the display interface displays different colored font backgrounds for different levels of violations; the lower the level of violation, the lighter the font background color and / or the higher the transparency; the higher the level of violation, the brighter the font background color and / or the lower the transparency. When presenting information, determine whether the on-site display space is sufficient to display all the information that needs to be presented; If so, then display all the information that needs to be displayed; If not, extract the information with the highest level of violation from all the information that needs to be displayed and display it first, while folding and hiding information with a lower level of violation.

6. The information management system according to claim 5, characterized in that, The first type of identity information corresponds to a first state; the second type of identity information corresponds to a second state; the rendering module is specifically used for: In the first state, the first type of identity information is displayed at a preset location in the real-scene image of the personnel in the micro-nano fabrication laboratory; When it is necessary to render and display the first type of identity information on the terminal devices of personnel other than those in the micro-nano fabrication laboratory, the first type of identity information is displayed on the basis of a first preset transparency background. In the second state, the second type of identity information is displayed at a preset location in the real-world image of the personnel in the micro-nano fabrication laboratory, and rendered with a color different from that in the first state according to preset rules.

7. The information management system according to claim 6, characterized in that, The rendering module is specifically used for: Determine the urgency or risk level in the second state; When the first type of alert occurs, the second type of identity information and warning information are rendered with a color different from that in the first state, or only the warning information is rendered differently. When a second type of alert occurs, the location information of the personnel in the micro-nano fabrication laboratory under alert is obtained, and according to the preset emergency measures, an alert range is established with the location of the alerted event as the reference point and the duration as the preset duration. Accident information, precautions for entering the alert range, and / or the safety measures to be taken are rendered on the alert range. When a third type of alert is triggered, the personnel status of the micro-nano fabrication laboratory personnel within the alert range is further obtained, and the rendering method is adjusted according to the personnel status.

8. The information management system according to claim 6, characterized in that, The rendering module is specifically used for: When it is necessary to render and display the second type of identity information in the second state on the terminal devices of personnel other than those in the micro-nano processing laboratory, the second type of identity information is displayed on the basis of the second preset transparency, or an opaque solid color background.

9. An information management method for a micro / nano fabrication experimental platform, characterized in that, include: Acquire the identity information data of the personnel in the micro-nano fabrication laboratory corresponding to the terminal devices in the monitoring area; Extract a first type of identity information from the identity information data of the personnel in the micro-nano fabrication laboratory, and display the first type of identity information at a preset position in the real-scene image of the personnel in the micro-nano fabrication laboratory; Automatically match virtual display data related to the identity information data, and overlay the virtual display data onto the real-time relative position of the personnel in the micro-nano fabrication laboratory's real-scene image; When a violation alarm is received, the second type of identity information is determined according to the preset display rules, and the second type of identity information is displayed at a preset position in the real-scene image of the personnel in the micro-nano fabrication laboratory. The personnel identity data includes the personnel type corresponding to the terminal device; the automatic matching of virtual display data related to the identity information data includes: Determine real-scene images of all real target objects within the current field of view of the terminal device, and at least one virtual anchor point corresponding to the real-scene images for displaying information; For each virtual anchor point, the corresponding virtual anchor point data is retrieved from the data module, and based on the virtual anchor point data, first type of display data, second type of display data, third type of display data, and fourth type of display data are generated respectively. The first type of display data includes equipment operation data, equipment management prediction data, and data currently being viewed by visitors or trainees within the current visible range of the terminal device. The second type of display data includes different types of recommendation information generated based on the background characteristics of visitors. The third type of display data includes different levels of training content data generated based on different ability levels of trainees. The fourth type of display data includes different levels of equipment-related data generated based on different equipment operation levels of equipment users. When the personnel type is a manager, the first type of display data is used as the automatically pushed virtual display data; when the personnel type is a visitor, the visitor's background information is obtained, and the information with the highest matching degree with the background information is filtered from the second type of display data as the automatically pushed virtual display data; when the personnel type is a trainee, the trainee's current ability level is obtained, and training content data matching the current ability level is filtered from the third type of display data as the automatically pushed virtual display data; when the personnel type is a device user, the device user's device operation level is obtained, and device-related data matching the device operation level is filtered from the fourth type of display data as the automatically pushed virtual display data. The step of determining the second type of identity information according to preset display rules includes: When a violation alert is received, the violation warning range corresponding to the violation alert is determined; Violation analysis is performed on violations within the aforementioned violation warning range; When it is determined that the violation involves a breach of equipment or area reservation rules, it is further determined whether an experimental accident or emergency has occurred within the monitoring area; If not, the violation is determined to be a Level 1 violation. If so, then it is further determined whether the experimental accident or the emergency situation poses a threat to the personal safety of the personnel in the micro-nano fabrication laboratory; If not, the violation is determined to be a Level 2 violation. If so, the violation is determined to be a Level 3 violation. The level of violation is used to match the second type of identity information of the personnel in the micro-nano fabrication laboratory.

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