Planar three-degree-of-freedom direct-driven flexible precision motion platform

Abstract

The invention relates to a planar three-degree-of-freedom direct-drive type flexible precision motion platform, which comprises a bottom plate, voice coil motors, a flexible connection structure and an output platform, and is characterized in that the voice coil motors are uniformly distributed on the bottom plate along the circumferential direction, and each voice coil motor is provided with a moving rotor; the flexible connecting structure comprises a connecting piece and an elastic sheet; each connecting piece is connected with each rotor, and each connecting piece is provided with two connecting parts; an output platform is connected between two adjacent connecting parts of two adjacent connecting pieces; the two sides of the output platform are connected with one ends of the two elastic pieces respectively to support the rotor, and the other ends of the two elastic pieces are connected with fixing pieces arranged on the bottom plate respectively. The extension lines of the two adjacent elastic sheets connected to the two adjacent output platforms intersect. And the rotor drives the output platform to move at three degrees of freedom during movement. According to the invention, the response speed of the whole device is obviously improved, and the movement precision and stability of the device are effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical fields of precise positioning and precise operation, and more specifically, to a planar three-degree-of-freedom direct-drive flexible precision motion platform. Background Art

[0002] At present, most traditional flexible precision motion platforms adopt an indirect drive configuration. The driving force of the motor needs to act on the end output platform through the step-by-step transmission of flexible joints and motion chains. The too-long transmission path of the driving force not only affects the accuracy of the nano motion platform but also reduces the response speed of the platform. Summary of the Invention

[0003] In order to overcome the problems of slow response speed, low motion accuracy and poor stability existing in the flexible precision motion platform in the above-mentioned prior art due to the adoption of the indirect drive configuration, the present invention provides a planar three-degree-of-freedom direct-drive flexible precision motion platform.

[0004] To solve the above technical problems, the technical solution adopted by the present invention is: a planar three-degree-of-freedom direct-drive flexible precision motion platform, including: a base plate, voice coil motors, a flexible connection structure and an output platform. A plurality of voice coil motors are provided, and each voice coil motor is evenly distributed on the base plate along the circumferential direction. The voice coil motor has a moving rotor; the flexible connection structure includes a connecting member and an elastic sheet; each connecting member is respectively connected to each rotor, and the connecting member has two connecting parts; the output platform is connected between two adjacent connecting parts of two adjacent connecting members; both sides of the output platform are respectively connected to one ends of two elastic sheets to support the rotor, and the other ends of the two elastic sheets are respectively connected to fixing members provided on the base plate; the extension lines of two adjacent elastic sheets connected to two adjacent output platforms intersect; when the rotor moves, it has the ability to drive the output platform to translate along a first direction or a second direction and rotate about an axis perpendicular to the plane where the first direction and the second direction are located.

[0005] In the technical solution of the present application, since the voice coil motors are evenly distributed on the bottom plate in the circumferential direction, and the extension lines of two adjacent elastic pieces connected to two adjacent output platforms intersect at a point, the three-degree-of-freedom movement of the planar three-degree-of-freedom direct-drive flexible precision motion platform can be realized by controlling the current passing through different voice coil motors. In the technical solution of the present application, the connecting piece is connected to the mover, the output platform is connected between two adjacent connecting parts of two adjacent connecting pieces, both sides of the output platform are respectively connected to one ends of two elastic pieces to support the mover, and the other ends of the two elastic pieces are respectively connected to the fixing pieces arranged on the bottom plate; thus, the driving force of the mover can be directly output to the output platform without the participation of an additional intermediate structure in the transmission of the driving force, significantly improving the response speed of the entire device and effectively improving the precision and stability of the device movement.

[0006] Preferably, the connecting parts and the output platform are alternately connected in sequence to form an annular structure. Due to such a structural arrangement, the output of the mover is more stable, which is beneficial to the stability of the operation of the motion platform.

[0007] Preferably, there are four voice coil motors, wherein the movers of two voice coil motors on one diagonal have the movement parallel to the first direction, and the movers of two voice coil motors on the other diagonal have the movement parallel to the second direction; the two connecting parts are respectively the first connecting part and the second connecting part, the first connecting part is arranged along the first direction, and the second connecting part is arranged along the second direction; the output platform is respectively connected between the first connecting parts of two adjacent connecting pieces and between the second connecting parts of two adjacent connecting pieces.

[0008] In the technical solution of the present application, since the four voice coil motors are diagonally distributed at the four corner positions, when current is applied to the two voice coil motors on one diagonal line, the rotors of the two voice coil motors move along the first direction. Since the rotors will push the output platform to move through the first connecting portion during the movement, the planar three-degree-of-freedom direct-drive flexible precision motion platform is realized to move along the first direction. When current is applied to the two voice coil motors on the other diagonal line, the two rotors of the two voice coil motors move along the second direction. Since the rotors will push the output platform to move through the second connecting portion during the movement, the planar three-degree-of-freedom direct-drive flexible precision motion platform is realized to move along the second direction. When current is applied to the two motors on one diagonal line, the rotor of one voice coil motor moves along the first direction, and the rotor of the other voice coil motor moves along the opposite direction of the first direction. The two rotors apply force to the corresponding output platform through the first connecting portion; current is applied to the two motors on the other diagonal line, the rotor of one voice coil motor moves along the second direction, and the rotor of the other voice coil motor moves along the opposite direction of the second direction. The two rotors apply force to the corresponding two output platforms; under the action of these four rotors, the planar three-degree-of-freedom direct-drive flexible precision motion platform can generate a rotation action on the plane formed by the first direction and the second direction. By controlling the current applied to different voice coil motors, the three-degree-of-freedom motion of the planar three-degree-of-freedom direct-drive flexible precision motion platform can be realized. Since in the technical solution of the present application, the connecting member is connected to the rotor, the adjacent two first connecting portions or / and second connecting portions are connected to the output platform, one end of the elastic sheet is connected to the fixed member, and the other end of the elastic sheet is connected to one side of the output platform. The elastic sheet is used to support the rotor, so that the driving force of the rotor can be directly output to the output platform without the participation of an additional intermediate structure in the transmission of the driving force, significantly improving the response speed of the entire device and effectively improving the precision and stability of the device movement.

[0009] Preferably, the rotor moving parallel to the first direction is the first rotor, and the rotor moving parallel to the second direction is the second rotor; the first direction is perpendicular to the second direction.

[0010] Preferably, the connecting member connected to the first rotor further has a third connecting portion, and the third connecting portion is connected to the first rotor; the connecting member connected to the second rotor further has a fourth connecting portion, and the fourth connecting portion is connected to the second rotor.

[0011] Preferably, the first connection portion of the connecting member connected to the first mover is aligned with the first connection portion of the connecting member connected to the adjacent second mover, and the two aligned first connection portions are connected to an output platform; the second connection portion of the connecting member connected to the first mover is aligned with the second connection portion of the connecting member connected to another adjacent second mover, and the two aligned second connection portions are connected to another output platform.

[0012] Preferably, both sides of the output platform connected to the two first connection portions / second connection portions are respectively connected to one end of two elastic sheets, and the other ends of the two elastic sheets are connected to the fixing member; the elastic sheet is an L-shaped sheet structure, one strip-shaped side surface of the L-shaped sheet structure is perpendicular to the first connection portion / second connection portion connected to the output platform, and the other strip-shaped side surface of the L-shaped sheet structure is mounted on the fixing member.

[0013] Preferably, a limiting block is provided on the bottom plate and outside the output platform, and the limiting block is located at the bending portion of the two L-shaped sheet structures.

[0014] Preferably, the upper and lower yoke portions of the stator of the voice coil motor are of a wide-tooth structure so that the mover does not exceed the projection area of the teeth of the upper and lower yoke portions during the movement in the first direction and the second direction.

[0015] Preferably, an electromagnetic eddy current damping plate is further provided at the bottom end position of the teeth of the voice coil motor, and the mover is located between the two electromagnetic eddy current damping plates.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: in the present invention, in the technical solution of the present application, the connecting member is connected to the mover, the output platform is connected between the adjacent two connection portions of the adjacent two connecting members, both sides of the output platform are respectively connected to one end of two elastic sheets to support the mover, and the other ends of the two elastic sheets are respectively connected to the fixing member provided on the bottom plate; thereby, the driving force of the mover can be directly output to the output platform without the participation of an additional intermediate structure in the transmission of the driving force, significantly improving the response speed of the entire device, and effectively improving the accuracy and stability of the movement of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a perspective view of the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention;

[0018] Figure 2 is a perspective view of the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention with the cover removed;

[0019] Figure 3It is a perspective view of the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention after removing the cover plate and part of the voice coil motor;

[0020] Figure 4 It is a perspective view of the flexible connection structure in the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention;

[0021] Figure 5 It is a sectional structure diagram of the voice coil motor in the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention;

[0022] Figure 6 It is a structural schematic diagram of the flexible connection structure in the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention;

[0023] Figure 7 It is a schematic diagram of the eddy current generated by the voice coil motor in the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention;

[0024] Figure 8 It is a schematic diagram of the eddy current generated by the voice coil motor in the planar three-degree-of-freedom direct-drive flexible precision motion platform of the present invention.

[0025] In the drawings: 1, bottom plate; 2, voice coil motor; 3, flexible connection structure; 21, mover; 31, connecting piece; 32, elastic sheet; 311, first connection part; 312, second connection part; 4, output platform; 5, fixing piece; 211, first mover; 212, second mover; 313, third connection part; 314, fourth connection part; 6, limit block; 7, electromagnetic eddy current damping plate; 8, cover plate; 22, upper left yoke; 23, upper right yoke; 25, lower left yoke; 26, lower right yoke; 24, coil. Detailed implementation manners

[0026] The drawings are only for illustrative purposes and should not be construed as a limitation of this patent; for better illustration of this embodiment, some components in the drawings may be omitted, enlarged or reduced, which do not represent the dimensions of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted. The positional relationships described in the drawings are only for illustrative purposes and should not be construed as a limitation of this patent.

[0027] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components; in the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "left", "right", "long", "short", etc. indicating the orientation or positional relationship, they are based on the orientation or positional relationship shown in the accompanying drawings. This is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the accompanying drawings are only for illustrative purposes and cannot be construed as a limitation of this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0028] The technical solution of the present invention will be further specifically described below through specific embodiments in conjunction with the accompanying drawings:

[0029] Embodiment 1

[0030] As Figures 1 to 4 shown, a planar three-degree-of-freedom direct-drive flexible precision motion platform includes: a bottom plate 1, voice coil motors 2, a flexible connection structure 3, and an output platform 4. A plurality of voice coil motors 2 are provided, and each voice coil motor 2 is uniformly distributed on the bottom plate 1 in the circumferential direction. The voice coil motor 2 has a moving rotor 21; the flexible connection structure 3 includes a connecting member 31 and an elastic sheet 32; each connecting member 31 is respectively connected to each rotor 21, and the connecting member 31 has two connecting portions; an output platform 4 is connected between two adjacent connecting portions of two adjacent connecting members 31; both sides of the output platform 4 are respectively connected to one end of two elastic sheets 32 to support the rotor 21, and the other ends of the two elastic sheets 32 are respectively connected to a fixing member 5 provided on the bottom plate 1; the extension lines of two adjacent elastic sheets 32 connected to two adjacent output platforms 4 intersect; when the rotor 21 moves, it has the ability to drive the output platform 4 to translate along the first direction or the second direction and rotate about an axis perpendicular to the plane where the first direction and the second direction are located.

[0031] In this embodiment, since the voice coil motors 2 are evenly distributed on the bottom plate 1 in the circumferential direction, and the extension lines of two adjacent elastic pieces 32 connected to two adjacent output platforms 4 intersect at a point, the three-degree-of-freedom movement of the planar three-degree-of-freedom direct-drive flexible precision motion platform can be realized by controlling the current supply to different voice coil motors 2. Since the connecting member 31 is connected to the mover 21, an output platform 4 is connected between two adjacent connecting portions of two adjacent connecting members 31. Both sides of the output platform 4 are respectively connected to one end of two elastic pieces 32 to support the mover 21, and the other ends of the two elastic pieces 32 are respectively connected to a fixing member 5 provided on the bottom plate 1. Thus, the driving force of the mover 21 can be directly output to the output platform 4 without the participation of an additional intermediate structure in the transmission of the driving force, significantly improving the response speed of the entire device and effectively enhancing the precision and stability of the device movement. It should be noted that when the number of voice coil motors 2 is 3, the 3 voice coil motors are evenly arranged in the circumferential direction; when the number of voice coil motors 2 is 4, the 4 voice coil motors are evenly arranged in the circumferential direction. The connecting portions, the output platform 4, and the connecting portions are alternately connected in sequence to form a closed-loop structure. It should also be noted that the second direction is perpendicular to the first direction, and the flexible precision motion platform can move along the first direction or the second direction and can also rotate about an axis perpendicular to the plane where the first direction and the second direction are located. The fact that an output platform 4 is connected between two adjacent connecting portions of two adjacent connecting members 31 means that an output platform is connected between one connecting portion of a connecting member 31 and a connecting portion of an adjacent connecting member 31, and these two connecting portions are also adjacent.

[0032] As Figure 4 shown, the connecting portions and the output platform 4 are alternately connected in sequence and form an annular structure. Due to such a structural arrangement, the output of the mover 21 is more stable, which is beneficial to the stability of the operation of the motion platform. It should be noted that when there are four output platforms 4, a connecting structure can also be connected between two opposite output platforms 4.

[0033] Among them, a plurality of voice coil motors 2 are provided. Four voice coil motors 2 are distributed on the bottom plate 1 in the circumferential direction. Two voice coil motors 2 on one diagonal line have a mover 21 moving parallel to the first direction, and two voice coil motors 2 on the other diagonal line have a mover 21 moving parallel to the second direction; the flexible connection structure 3 includes a connecting member 31 and an elastic sheet 32; each connecting member 31 is respectively connected to each mover 21. The two connecting parts are respectively a first connecting part 311 and a second connecting part 312. The first connecting part 311 is arranged along the first direction, and the second connecting part 312 is arranged along the second direction; an output platform 4 is respectively connected between the first connecting parts 311 of adjacent two connecting members 31 and / or between the second connecting parts 312 of adjacent two connecting members 31; both sides of the output platform 4 are connected to one ends of the two elastic sheets 32 to support the mover 21, and the other ends of the two elastic sheets 32 are respectively connected to a fixing member 5 arranged on the bottom plate 1.

[0034] In this embodiment, as Figure 6 shown, since the four voice coil motors 2 are diagonally distributed at the four corner positions, when current is applied to the two voice coil motors 2 on one diagonal line, the movers 21 of the two voice coil motors 2 move along the first direction. Since the mover 21 will push the output platform 4 to move through the first connecting part 311 during the movement process, the planar three-degree-of-freedom direct-drive flexible precision motion platform is realized to move along the first direction. When current is applied to the two voice coil motors 2 on the other diagonal line, the two movers 21 of the two voice coil motors 2 move along the second direction. Since the mover 21 will push the output platform 4 to move through the second connecting part 312 during the movement process, the planar three-degree-of-freedom direct-drive flexible precision motion platform is realized to move along the second direction. When current is applied to the two motors on one diagonal line, the mover 21 of one voice coil motor 2 moves along the first direction, and the mover 21 of the other voice coil motor 2 moves along the opposite direction of the first direction. The two movers 21 apply forces to the corresponding output platform 4 through the first connecting part 311; current is applied to the two motors on the other diagonal line, the mover 21 of one voice coil motor 2 moves along the second direction, and the mover 21 of the other voice coil motor 2 moves along the opposite direction of the second direction. The two movers 21 apply forces to the corresponding two output platforms 4; under the action of these four movers 21, the planar three-degree-of-freedom direct-drive flexible precision motion platform can generate a rotation action on the plane formed by the first direction and the second direction. By controlling the application of current to different voice coil motors 2, the control here can be understood as whether to apply current to different voice coil motors 2 and whether to apply forward or reverse current, so that the three-degree-of-freedom motion of the planar three-degree-of-freedom direct-drive flexible precision motion platform can be realized.

[0035] It should be noted that the first direction is the X-axis direction, and the second direction is the Y-axis direction perpendicular to the X-axis direction. The planar three-degree-of-freedom direct-drive flexible precision motion platform generates a rotational motion on the plane formed by the first direction and the second direction, which is a rotation around the Z-axis perpendicular to the XY plane. In this embodiment, the number of voice coil motors 2 can be four, and the four voice coil motors 2 can be arranged in a matrix. It should be noted that the voice coil motor 2 can adopt a voice coil motor 2 with a toothed groove structure on the upper and lower sides, and the mover 21 of the voice coil motor 2 is suspended in the voice coil motor 2. The elastic sheet 32 has relatively low stiffness in the Dx, Dy, and Rz directions and relatively high stiffness in the RX, RY, and DZ directions. In this way, under the action of the mover 21, the motion platform can move in the Dx, Dy, and Rz directions.

[0036] It should also be noted that the moving part, the mover 21, of the voice coil motor 2 is composed of a permanent magnet and is located in the center of the voice coil motor 2. There are certain air gaps on the upper and lower sides of the permanent magnet to ensure that the permanent magnet does not come into direct contact with the stator part during the movement. The stator of the voice coil motor 2 includes a motor yoke, and the motor yoke includes an upper left yoke 22, an upper right yoke 23, a lower left yoke 25, and a lower right yoke 26, and coils 24 are wrapped on each yoke. The bottom end of the yoke of the voice coil motor 2 is designed with a special tooth-shaped structure, and these tooth-shaped structures are used to generate an approximately uniform excitation magnetic field. When the coil 24 is energized, the interaction between the excitation magnetic field and the magnetic field of the permanent magnet itself can cause suction and thrust to be generated at both ends of the permanent magnet respectively. This interaction force enables the mover 21 of the voice coil motor 2 to effectively generate displacement and force output. When the yoke iron core of the voice coil motor is in an unsaturated state, the magnetic induction intensity of the yoke iron core no longer increases significantly, but the magnetic field intensity can still continue to increase; at this time, the output force of the voice coil motor 2 is proportional to the input current. As the direction of the input current changes, the direction of the output force of the voice coil motor 2 will also change with the change of the input current direction, so as to achieve motion in different directions.

[0037] As Figure 3 shown, the mover 21 moving parallel to the first direction is the first mover 211, and the mover 21 moving parallel to the second direction is the second mover 212; the first direction is perpendicular to the second direction.

[0038] As Figure 3As shown, the connecting member 31 connected to the first mover 211 further has a third connecting portion 313, and the third connecting portion 313 is connected to the first mover 211. In this embodiment, when the first mover 211 moves along the first direction, since the first mover 211 is connected to the third connecting portion 313, and the third connecting portion 313 is connected to the output platform 4 through the first connecting portion 311, the first mover 211 can drive the output platform 4 to move along the first direction during the movement. The connecting member 31 connected to the second mover 212 further has a fourth connecting portion 314, and the fourth connecting portion 314 is connected to the second mover 212, and the fourth connecting portion 314 is arranged along the first direction. In this embodiment, when the second mover 212 moves along the second direction, since the second mover 212 is connected to the fourth connecting portion 314, and the fourth connecting portion 314 is connected to the output platform 4 through the second connecting portion 312, the second mover 212 can drive the output platform 4 to move along the second direction during the movement.

[0039] As Figure 3 , Figure 4 shown, the first connecting portion 311 of the connecting member 31 connected to the first mover 211 is aligned with the first connecting portion 311 of the connecting member 31 connected to the adjacent second mover 212, and the two aligned first connecting portions 311 are connected to an output platform 4; the second connecting portion 312 of the connecting member 31 connected to the first mover 211 is aligned with the second connecting portion 312 of the connecting member 31 connected to another adjacent second mover 212, and the two aligned second connecting portions 312 are connected to another output platform 4. In this embodiment, since the output platform 4 is connected to two adjacent and aligned first connecting portions 311 or two adjacent and aligned second connecting portions 312, the movement of the output platform 4 can be made more stable. It should be noted that the first connecting portion 311, the output platform 4, the first connecting portion 311, the output platform 4, the second connecting portion 312, the output platform 4, the second connecting portion 312, the output platform 4, the first connecting portion 311, the output platform 4, the first connecting portion 311, the output platform 4, the second connecting portion 312, the output platform 4, the second connecting portion 312 are connected in sequence to form a closed-loop structure.

[0040] As Figure 3 , Figure 4As shown, both sides of the output platform 4 connected to the two first connection parts 311 / second connection parts 312 are respectively connected to one end of two elastic pieces 32, and the other ends of the two elastic pieces 32 are connected to the fixing member 5. In this embodiment, when both sides of the output platform 4 are connected to the two first connection parts 311 or the two second connection parts 312, both sides of the output platform 4 are respectively connected to one end of the elastic piece 32, and the other end of the elastic piece 32 is connected to the fixing member 5. The first connection part 311 and the second connection part 312 are parts of the connection member 31, and the connection member 31 is further connected to the first mover 211 or the second mover 212, so that the elastic piece 32 can support the corresponding first mover 211 or second mover 212.

[0041] As Figures 2 to 4 shown, the elastic piece 32 is an L-shaped sheet structure. One strip-shaped side surface of the L-shaped sheet structure is perpendicular to the first connection part 311 / second connection part 312 connected to the output platform 4, and the other strip-shaped side surface of the L-shaped sheet structure is mounted on the fixing member 5. In this embodiment, since the elastic piece 32 adopts an L-shaped sheet structure, and one strip-shaped side surface (the strip-shaped side surface refers to the side surface along the length direction of the elastic piece and flush with the side surface of the output platform 4) of the L-shaped sheet structure is connected to the output platform 4, and the other strip-shaped side surface of the L-shaped sheet structure is mounted on the fixing member 5, this can meet the translation and rotation of the output platform 4 with less constraint on the translation and rotation of the output platform 4. It should be noted that the stiffness of the elastic piece 32 in the direction perpendicular to the length direction of the elastic piece 32 connected to the first connection part 311 or the second connection part 312 is relatively low, so that it can deform under the action of the first connection part 311 and the second connection part 312, that is, the stiffness of the elastic piece 32 in the first direction and the second direction is relatively low, while it has a high support stiffness in other directions. It should also be noted that the first connection part 311 of the same connection member 31 is connected to an output platform 4, and one side surface of this output platform 4 is connected to one end of the elastic piece 32; the first connection part 312 of the same connection member 31 is connected to another output platform 4, and one side surface of this other output platform 4 is connected to one end of another elastic piece 32, and the other ends of the two elastic pieces 32 are connected to the same fixing member 5, so as to surround the mover 21 or the mover 22 in the space formed by the elastic piece 32, the first connection part 311, and the second connection part 312.

[0042] As Figures 1 to 3As shown, a limiting block 6 is provided on the bottom plate 1 and outside the output platform 4. The limiting block 6 is located at the bending part of two L-shaped sheet structures. In this embodiment, due to the setting of the limiting block 6, the limiting block 6 can restrain the infinite deformation of the elastic sheet 32, ensure that the elastic sheet 32 deforms within a limited range, and thus ensure the stability of the movement of the output platform 4. It should be noted that a cover plate 8 is installed on the top of each limiting block 6, and the cover plate 8 is provided with a hollow structure, which is convenient for the output platform 4 to be connected to the outside to provide a movement space.

[0043] Embodiment 2

[0044] The difference from Embodiment 1 is that the upper and lower yokes of the stator of the voice coil motor 2 are of a wide-tooth structure so that the mover 21 does not exceed the projection area of the teeth of the upper and lower yokes during the movement in the first direction and the second direction. In this embodiment, the upper and lower yokes of the stator of the voice coil motor 2 adopt a wide-tooth design, that is, during the movement of the mover 21, the mover 21 will not exceed the projection area of the teeth of the upper and lower yokes during the movement in the first direction and the second direction. Such a setting is beneficial to improving the linearity of the motor output force of the moving mover 21. Since the coils 24 of the voice coil motor 2 are arranged on both sides of the left and right yokes, heat concentration can be avoided, which is beneficial to dispersing heat and has the effect of improving heat dissipation.

[0045] Embodiment 3

[0046] The difference from Embodiment 1 is that, as Figure 5 shown, an electromagnetic eddy current damping plate 7 is also provided at the bottom end position of the tooth part of the voice coil motor 2, and the mover 21 is located between the two electromagnetic eddy current damping plates 7. The mover 21 is suspended between the two electromagnetic eddy current damping plates 7. Through the setting of the embedded electromagnetic eddy current damping plate 7, on the one hand, the damping ratio of the moving platform can be increased, the vibration suppression performance of the moving platform can be improved, and further the output of the moving platform can be made more stable and smooth, effectively solving the problems of low damping of the flexible system and easy vibration existing in the flexible precision moving platform in the prior art, and realizing the characteristics of high precision, large stroke and high bandwidth of the moving platform.

[0047] It should be noted that, as Figure 5 shown, an electromagnetic eddy current damping plate 7 is attached to the bottom end position of the tooth part of the voice coil motor 2. The electromagnetic eddy current damping plate 7 can be a copper plate, which plays the role of an eddy current damper. As Figure 7 、 Figure 8As shown, its principle is the electromagnetic induction principle. The magnetic field of the permanent magnet moves relative to the conductor plate, generating eddy currents in the copper plate. The eddy currents themselves generate a magnetic field, and these magnetic fields interact with the magnetic field of the permanent magnet, generating a reverse force that acts as a reaction force on the movement of the permanent magnet, hindering its movement. By pasting a copper plate on the tooth part of the voice coil motor 2, an efficient integration of the eddy current damper and the voice coil motor 2 is achieved, and the eddy current damper can play a role in vibration reduction and damping.

[0048] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A planar three-degree-of-freedom direct-drive flexible precision motion platform, characterized in that, Comprising: A base plate (1); A voice coil motor (2), with a plurality of the voice coil motors (2) provided, and each of the voice coil motors (2) being evenly distributed on the base plate (1) along the circumferential direction. The voice coil motor (2) has a moving rotor (21); A flexible connection structure (3), the flexible connection structure (3) including a connecting member (31) and an elastic sheet (32); each of the connecting members (31) is respectively connected to each of the rotors (21), and the connecting member (31) has two connecting portions; An output platform (4), with the output platform (4) connected between two adjacent connecting portions (311) of two adjacent connecting members (31); both sides of the output platform (4) are respectively connected to one end of two elastic sheets (32) to support the rotor (21), and the other ends of the two elastic sheets (32) are respectively connected to a fixing member (5) provided on the base plate (1); The extension lines of two adjacent elastic sheets (32) connected to two adjacent output platforms (4) intersect; when the rotor (21) moves, it has the function of driving the output platform (4) to translate along a first direction or a second direction and rotate around an axis perpendicular to the plane where the first direction and the second direction are located.

2. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 1, wherein The connecting portion and the output platform (4) are sequentially and alternately connected to form an annular structure.

3. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 1 or 2, wherein Four voice coil motors are provided, and the rotors (21) of two voice coil motors (2) on one diagonal have rotors (21) moving parallel to the first direction, and the rotors (21) of two voice coil motors (2) on the other diagonal have rotors (21) moving parallel to the second direction; the two connecting portions are respectively a first connecting portion (311) and a second connecting portion (312), the first connecting portion (311) is arranged along the first direction, and the second connecting portion (312) is arranged along the second direction; The output platform (4) is respectively connected between the first connecting portions (311) of two adjacent connecting members (31) and between the second connecting portions (312) of two adjacent connecting members (31).

4. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 3, characterized in that, The rotor (21) moving parallel to the first direction is a first rotor (211), and the rotor (21) moving parallel to the second direction is a second rotor (212); the first direction is perpendicular to the second direction.

5. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 4, wherein The connecting member (31) connected to the first rotor (211) further has a third connecting portion (313), and the third connecting portion (313) is connected to the first rotor (211); the connecting member (31) connected to the second rotor (212) further has a fourth connecting portion (314), and the fourth connecting portion (314) is connected to the second rotor (212).

6. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 4, wherein The first connecting portion (311) of the connecting member (31) connected to the first rotor (211) is aligned with the first connecting portion (311) of the connecting member (31) connected to the adjacent second rotor (212), and the two aligned first connecting portions (311) are connected to an output platform (4); The second connecting portion (312) of the connecting member (31) connected to the first mover (211) is aligned with the second connecting portion (312) of the connecting member (31) connected to another adjacent second mover (212), and the two aligned second connecting portions (312) are connected to the other output platform (4).

7. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 6, wherein: Both sides of the output platform (4) connected to the two first connecting portions (311) / second connecting portions (312) are respectively connected to one ends of the two elastic sheets (32), and the other ends of the two elastic sheets (32) are connected to the fixing member (5); The elastic sheet (32) is an L-shaped sheet structure. One strip-shaped side surface of the L-shaped sheet structure is perpendicular to the first connecting portion (311) / second connecting portion (312) connected to the output platform (4), and the other strip-shaped side surface of the L-shaped sheet structure is mounted on the fixing member (5).

8. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 1, wherein: A limiting block (6) is provided on the bottom plate (1) and outside the output platform (4), and the limiting block (6) is located at the bending portion of the two L-shaped sheet structures.

9. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 1, characterized in that, The upper and lower yoke portions of the stator of the voice coil motor (2) are of a wide tooth structure so that the mover (21) does not exceed the projection area of the tooth portions of the upper and lower yoke portions during the movement in the first direction and the second direction.

10. The planar three-degree-of-freedom direct-drive flexible precision motion platform according to claim 1, characterized in that, An electromagnetic eddy current damping plate (7) is further provided at the bottom end position of the tooth portion of the voice coil motor (2), and the mover (21) is located between the two electromagnetic eddy current damping plates (7).

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