Graphite boat disassembling and assembling method

Abstract

The invention provides a graphite boat dismounting and mounting method, and relates to the field of graphite boat dismounting and mounting. The graphite boat disassembling and assembling method comprises the following steps that a graphite boat in a horizontal state is placed on an overturning station of a graphite boat overturning device, a clamping mechanism of the graphite boat overturning device is driven to clamp graphite boat feet at the two ends of the graphite boat in the length direction, and an overturning driving mechanism of the graphite boat overturning device is controlled to overturn the overturning station; the graphite boat in the horizontal state is overturned to be in the vertical state, the overturning station and the clamping mechanism are driven to drive the graphite boat to move in the width direction and the length direction of the second supporting platform till the nut on the bottom face of the graphite boat falls into a working through hole of the second supporting platform, and the disassembling and assembling positioning assembly is driven to fix the nut on the bottom face of the graphite boat. The graphite boat can be simply, conveniently and efficiently disassembled and assembled.

Description

Technical Field

[0001] This application relates to the field of graphite boat disassembly and assembly, and particularly to a method for disassembling and assembling a graphite boat. Background Art

[0002] As a core carrier in the coating of photovoltaic cells and the diffusion process of semiconductors, the structure of a graphite boat typically includes graphite boat plates arranged in parallel, series rods passing through each graphite boat plate, and nuts connected to both ends of the series rods. Since the graphite boat operates in a high-temperature and strongly corrosive atmosphere for a long time, the graphite boat plates and their components are prone to failure due to oxidation or thermal stress deformation. Therefore, it is necessary to regularly disassemble the boat to replace components, clean reaction by-products, or adjust the spacing between the boat plates. Traditional methods for disassembling and assembling graphite boats mainly rely on manual operations, which have problems such as low efficiency, poor accuracy, and easy damage to the graphite boat, and it is difficult to meet the requirements of modern industrial production for high efficiency, precision, and automation.

[0003] With the rapid development of the photovoltaic and semiconductor industries, automated graphite boat disassembly and assembly equipment has gradually become a necessity in the industry. Existing automated equipment usually includes modules such as a loading and unloading platform, a gripper handling mechanism, and a disassembly and assembly mechanism. Its working process is as follows: The graphite boat is first placed on the loading and unloading platform, the gripper handling mechanism grabs the graphite boat and flips it by a certain angle, then transports it above the disassembly and assembly mechanism and places it on the disassembly and assembly platform, and finally the disassembly and assembly mechanism performs positioning and disassembly and assembly operations on the graphite boat. However, this method has many and complex steps, and each functional module (such as the handling mechanism, the disassembly and assembly mechanism, and the disassembly and assembly platform) is relatively independent, resulting in a complex overall structure of the equipment, a large floor area, being unfavorable for the compact layout of the production line, and reducing the disassembly and assembly efficiency.

[0004] To solve the above problems, there is an urgent need for a new method for disassembling and assembling graphite boats, which can simplify the equipment structure, reduce the floor area, and lower the equipment cost while ensuring the disassembly and assembly accuracy and efficiency. The present invention aims to provide a simple, efficient, and highly integrated graphite boat disassembly and assembly equipment and method to meet the high requirements of the photovoltaic and semiconductor industries for automated equipment. Summary of the Invention

[0005] In view of the above problems, this application provides a method for disassembling and assembling a graphite boat, which can achieve efficient disassembly and assembly of the graphite boat.

[0006] To achieve the objectives of this application, the following technical solutions are provided in this application:

[0007] This application provides a method for disassembling and assembling a graphite boat, the method comprising:

[0008] Place the graphite boat on the flipping station of the graphite boat flipping device, and the clamping mechanism clamps the feet of the graphite boat; wherein, the flipping station includes a connected first support platform and a second support platform, the first support platform includes a first lifting drive mechanism, and the clamping mechanisms are symmetrically arranged in the length direction of the first support platform;

[0009] The flipping drive mechanism of the graphite boat flipping device flips the flipping station;

[0010] The first lifting drive mechanism drives the graphite boat to move in the width direction of the second support platform;

[0011] The clamping mechanism moves in a direction perpendicular to the first support platform to ensure that the clamping mechanism adapts to the movement of the graphite boat in the width direction of the second support platform;

[0012] The clamping mechanism moves along the length direction of the first support platform, driving the graphite boat to move in the length direction of the second support platform until the nut on the bottom surface of the graphite boat falls into the working through hole of the second support platform;

[0013] The drive disassembly and assembly positioning component fixes the nut on the bottom surface of the graphite boat.

[0014] In a possible implementation manner, placing the graphite boat on the flipping station of the graphite boat flipping device includes:

[0015] Place the horizontally placed graphite boat on the first platform plate, wherein the angle between the first support platform and the second support platform matches the angle between the side surface and the bottom surface of the graphite boat; the first support platform and the second support platform are respectively used to support the side surface and the bottom surface of the graphite boat during flipping; the first support platform further includes a first translation drive mechanism, and the first translation drive mechanism includes a first fixed platform plate, a first platform plate, and a first drive module; the plane where the first fixed platform plate is located is parallel to the plane where the first platform plate is located; the first platform plate is connected to the first fixed platform plate through the first drive module;

[0016] The first drive module drives the graphite boat on the first platform plate to approach the second support platform until it fits with the second support platform.

[0017] In a possible implementation manner, the first lifting drive mechanism drives the graphite boat to move in the width direction of the second support platform, including:

[0018] Drive the second driving module to drive the graphite boat on the second platform plate to approach or move away from the first platform plate, so as to adjust the position of the graphite boat in the width direction of the second support platform. Wherein, the first lifting driving mechanism includes a second platform plate, a lifting assembly and a second driving module; the planes where the first fixed platform plate, the first platform plate and the second platform plate are located are parallel to each other; the second platform plate is connected to the first platform plate through the lifting assembly and the second driving module.

[0019] In a possible implementation manner, the clamping mechanism includes clamping jaws, a third driving module and a fourth driving module;

[0020] The clamping jaws are connected to the first fixed platform plate through the third driving module, and the third driving module is used to drive the two clamping jaws to move along the length direction of the first fixed platform plate;

[0021] The fourth driving module is used to adjust the opening size of the clamping jaws to clamp or release the graphite boat feet, and is used to drive the clamping jaws to move in a direction perpendicular to the plane where the first support platform is located.

[0022] In a possible implementation manner, the clamping jaws include: a first clamping member, a second clamping member and a third clamping member;

[0023] The first clamping member is connected to the second clamping member through a sliding module, the first clamping member and the second clamping member are opposite and parallel, and the second clamping member is vertically connected to the third clamping member;

[0024] The first clamping member is vertically connected to the first fixed platform plate through the third driving module, the free end of the telescopic rod of the third driving module is connected to the first clamping member, and the free end of the telescopic rod of the fourth driving module is connected to the second clamping member. Wherein, the third driving module is used to drive the clamping jaws to move in the length direction of the first fixed platform plate, and the fourth driving module is used to drive the second clamping member and the third clamping member to move synchronously in a direction away from or close to the first fixed platform plate;

[0025] Wherein, the graphite boat feet include a first side surface perpendicular to the graphite boat sheet, and also include a second side surface and a third side surface. The first side surface is vertically connected to the second side surface, the second side surface is vertically connected to the third side surface, the first side surface is parallel and opposite to the third side surface, the second clamping member is parallel to the second side surface, and the third clamping member is parallel to the first side surface; when the clamping jaws clamp the graphite boat feet, the second clamping member is attached to the second side surface, and the third clamping member is attached to the first side surface.

[0026] In a possible implementation manner, the movement of the clamping mechanism in a direction perpendicular to the first support platform further includes:

[0027] The fourth driving module drives the jaws that clamp the graphite boat feet to move synchronously in a direction away from or close to the first fixed platform plate. Among them, the movement directions and movement distances of the telescopic rods of the second driving module and the fourth driving module are the same.

[0028] In a possible implementation manner, the clamping mechanism moves along the length direction of the first support platform, driving the graphite boat to move along the length direction of the second support platform, including:

[0029] The third driving module drives the corresponding jaws to move in the length direction of the first fixed platform, so as to drive the graphite boat to move in the length direction of the second support platform.

[0030] In a possible implementation manner, the disassembly and assembly positioning component fixes the nuts on the bottom surface of the graphite boat, and further includes:

[0031] The first lifting driving module drives the second fixed platform plate to approach the second support platform in a horizontal state, so that the nut positioning column continuously approaches the working through hole of the second support platform in the vertical direction until the nut positioning column contacts and fixes the nut on the bottom surface of the graphite boat;

[0032] After the graphite boat slices are disassembled, the second lifting driving module drives the clamping seat on the lifting platform plate to rise until the series connection rod that clamps the graphite boat is reached;

[0033] Among them, the disassembly and assembly positioning component includes a second fixed platform plate, a first lifting driving module, a second lifting driving module, a lifting platform plate, a nut positioning column and a clamping seat; a plurality of the nut positioning columns perpendicular to the second fixed platform plate are installed on the edge of the second fixed platform plate, and the positions of the nut positioning columns correspond to the positions of the working through holes of the second support platform. The second fixed platform plate is connected with a lifting platform plate through a second lifting driving module, and a plurality of clamping seats opposite to the nut positioning columns are installed on the lifting platform plate.

[0034] In a possible implementation manner, the method further includes: the disassembly and assembly mechanism disassembles and reassembles the graphite boat, including:

[0035] The disassembly and assembly mechanism disassembles and removes the nuts on the top surface of the graphite boat, and disassembles and removes the graphite boat slices, ceramic rings and electrode blocks;

[0036] The disassembly and assembly mechanism transports the graphite boat slices, ceramic rings and electrode blocks to the second support platform for assembly;

[0037] The gantry handling mechanism transports the assembled graphite boat from the second support platform to the loading and unloading mechanism.

[0038] In a possible implementation, the disassembly and assembly mechanism disassembles and removes the nuts on the top surface of the graphite boat, as well as disassembles and removes the graphite boat plates, ceramic rings, and electrode blocks, and further includes:

[0039] The nut disassembly and assembly machine disassembles and removes the nuts on the top surface of the graphite boat. Among them, the disassembly and assembly mechanism includes a nut disassembly and assembly mechanism integrated on the bracket, a graphite boat plate handling mechanism, and a clamping jaw;

[0040] The graphite boat plate handling mechanism removes the graphite boat plates;

[0041] The clamping jaw disassembles and removes the ceramic ring;

[0042] Drive the clamping jaw to disassemble and remove the electrode block.

[0043] In a possible implementation, the clamping jaw disassembles and removes the electrode block, and further includes:

[0044] The clamping jaw grabs the electrode block; among them, the clamping jaw is used to grab the electrode block of the graphite boat leg and place the electrode block on the electrode block buffer mechanism, and the electrode block buffer mechanism is arranged in the length direction of the bracket;

[0045] The buffer platform drive module drives the buffer platform to rise to a position close to the top of the buffer column. Among them, the electrode block buffer mechanism includes a buffer fixed platform, a buffer platform, a buffer column, and a buffer platform drive module; the buffer platform and the buffer fixed platform are opposite and parallel, the fixed platform is vertically connected with a plurality of buffer columns and the buffer columns penetrate the buffer platform, and the buffer columns match the holes of the electrode block for connecting the electrode blocks in series; the buffer platform is connected to the buffer platform drive module;

[0046] The clamping jaw sleeves the electrode block on the buffer column above the buffer platform;

[0047] The buffer platform drive module descends until the buffer platform is attached to the buffer fixed platform.

[0048] The graphite boat disassembly and assembly method provided by this application includes: placing the graphite boat in the flipping station, the clamping mechanism clamps the graphite boat, the flipping drive mechanism drives the flipping station to rotate, so that the graphite boat is converted from a horizontal position to a vertical position conducive to disassembly and assembly, and then the flipping station displaces the graphite boat so that the nut on the bottom surface of the graphite boat is aligned with the graphite boat disassembly and assembly positioning component, the disassembly and assembly positioning component fixes the nut on the bottom surface of the graphite boat, and then continues with the disassembly and assembly of the graphite boat.

[0049] The beneficial effects are as follows: By integrating the steps of inverting, positioning, disassembling, and assembling the graphite boat in the same device, the method of this application avoids the cumbersome operations of repeatedly handling and transferring the graphite boat in traditional devices. This integrated design significantly reduces the number of transfers of the graphite boat, shortens the disassembly and assembly cycle, thereby greatly improving production efficiency, reducing equipment costs and maintenance difficulties, while enhancing the versatility and safety of the equipment, and has broad application prospects. At the same time, by integrating the inversion station and the disassembly and assembly platform, and driving the first lifting drive mechanism and the clamping mechanism to drive the graphite boat to move in the length and width directions of the second support platform, precise alignment between the disassembly and assembly positioning component and the bottom nut of the graphite boat is achieved. This dynamic adjustment method not only simplifies the equipment structure and improves the equipment integration degree, but also improves the alignment accuracy, realizing the integrated operation of graphite boat inversion, displacement, disassembly, and assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] The drawings are used to provide a further understanding of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application, and do not constitute a limitation to the present application.

[0051] Figure 1 It is a schematic structural diagram of a graphite boat provided by an embodiment of the present application;

[0052] Figure 2 It is a schematic structural diagram of a graphite boat inversion and disassembly integrated device provided by an embodiment of the present application;

[0053] Figure 3 It is Figure 2 a schematic structural diagram of the back of

[0054] Figure 4 It is a schematic structural diagram of the graphite boat placed on the graphite boat inversion and disassembly integrated device provided by an embodiment of the present application;

[0055] Figure 5 It is Figure 4 a schematic structural diagram after the inversion of the inversion station of

[0056] Figure 6 It is a schematic structural diagram of the inverted graphite boat placed on the graphite boat inversion and disassembly integrated device provided by an embodiment of the present application;

[0057] Figure 7 It is a schematic structural diagram of the first lifting drive mechanism provided by an embodiment of the present application;

[0058] Figure 8 It is a schematic structural diagram of the clamping mechanism provided by an embodiment of the present application;

[0059] Figure 9 It is a schematic structural diagram of the disassembly and assembly positioning component provided by an embodiment of the present application;

[0060] Figure 10 Schematic diagram of the structure with a clamping module provided on the back of the second support platform according to an embodiment of the present application;

[0061] Figure 11 is Figure 10 Enlarged schematic diagram of area A in

[0062] Figure 12 Schematic diagram of the structure of a clamping module provided by an embodiment of the present application;

[0063] Figure 13 Schematic diagram of the structure of a disassembly and assembly component provided by an embodiment of the present application;

[0064] Figure 14 Schematic diagram of the structure of an electrode block buffer mechanism provided by an embodiment of the application;

[0065] Figure 15 Shows the flow chart of the graphite boat flipping disassembly and assembly method provided by an embodiment of the present application;

[0066] Illustration:

[0067] 1. Graphite boat; 11. Graphite boat sheet; 12. Graphite boat foot; 13. Nut; 14. Graphite boat bottom surface; 15. Series rod; 2. Bracket; 3. Flipping station; 31. First support platform; 311. First fixed platform plate; 312. First platform plate; 313. First driving module; 314. Second platform plate; 315. Lifting assembly; 3151. Bottom plate; 3152. Connecting column; 3153. Telescopic module; 316. Second driving module; 32. Second support platform; 4. Flipping driving mechanism; 5. Clamping mechanism; 51. Claw; 511. First clamping member; 512. Second clamping member; 513. Third clamping member; 52. Third driving module; 53. Fourth driving module; 6. Graphite boat disassembly and assembly mechanism; 61. Disassembly and assembly positioning component; 611. Second fixed platform plate; 612. First lifting driving module; 613. Second lifting driving module; 614. Lifting platform plate; 615. Nut positioning column; 616. Clamping seat; 617. Linking rod; 618. Driving link; 62. Disassembly and assembly component; 621. Opening and closing claw; 622. Electrode block buffer mechanism; 6221. Buffer fixed platform; 6222. Buffer platform; 6223. Buffer column; 6224. Buffer platform driving module; 7. Working through hole; 8. Clamping module; 81. First fixture; 811. First clamping plate; 812. Second clamping plate; 813. Groove. Detailed implementation manners

[0068] To make the objectives, technical solutions and advantages of this application clearer, the following will clearly and completely describe the technical solutions in this application with reference to the accompanying drawings in this application. Apparently, the described embodiments are some, but not all, of the embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without creative efforts shall fall within the scope of protection of this application.

[0069] The terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features; in the description of this application, unless otherwise stated, the meaning of "a plurality" is two or more.

[0070] During the manufacturing process of solar cells, uncoated silicon wafers need to be inserted onto the wafer carrier of a vacuum coating equipment and sent into the furnace tube for coating. Specifically, fixed clamping points are set on the graphite boat plates of a wafer carrier such as graphite boat 1 to fix the silicon wafers, and then the graphite boat is placed into the furnace tube to deposit a passivation film on the front or back of the silicon wafers. After the coating is completed, the graphite boat is taken out of the furnace tube, and finally the coated silicon wafers are unloaded from the graphite boat.

[0071] Figure 1 The following is a schematic structural diagram of a graphite boat provided by an embodiment of this application. As Figure 1 shown, the graphite boat 1 includes graphite boat plates 11, ceramic rings, series connection rods, and graphite boat feet 12. The graphite boat plates 11 are arranged in parallel at a preset distance from each other, and ceramic rings are provided between the graphite boat plates 11 to ensure the interval between the graphite boat plates 11. The series connection rods sequentially pass through the fixing holes opened on the first graphite boat plate, the ceramic rings, and the fixing holes opened on the second graphite boat plate, and both ends of the series connection rods are fastened by nuts 13 to achieve stable connection between the graphite boat plates 11; a plurality of slots are spaced apart on each graphite boat plate 11, and a plurality of clamping point holes are opened around each slot. The clamping point holes are connected to clamping points, and the silicon wafers can be fixed on the surface of the graphite boat plates 11 through the clamping points around the slots. Exemplarily, the series connection rods are rods with threads and having an insulating property.

[0072] Both ends in the length direction of the graphite boat are graphite boat feet 12. The graphite boat feet 12 are composed of boat plate ears at both ends of the graphite boat plates 11, electrode blocks, electrode rods, and nuts 13. Specifically, electrode blocks are provided between the boat plate ears. The electrode rods pass through the boat plate ears and electrode blocks of the graphite boat plates 11 and both ends of the electrode rods are fastened by nuts 13. The electrode rods are rods with threads.

[0073] The graphite boat flipping device provided by the embodiment of the present application is used to flip the graphite boat 1 in a horizontal state to a vertical state. The horizontal state of the graphite boat 1 means that the plane where the graphite boat slices are located is perpendicular to the horizontal plane. Generally, the graphite boat 1 is placed in the furnace tube in a horizontal state. The vertical state of the graphite boat 1 means that the plane where the graphite boat slices are located is parallel to the horizontal plane. When the graphite boat is in the vertical state, the graphite boat slices of the graphite boat 1 are stacked in sequence in the vertical direction. Such a state is beneficial to the disassembly and assembly of the nuts on the top surface of the graphite boat and is beneficial to grasping or placing the graphite boat slices, facilitating the disassembly and assembly of the graphite boat.

[0074] Embodiment 1

[0075] The embodiment of the present application provides a graphite boat flipping disassembly and assembly method, which is applied to a graphite boat disassembly and assembly device. The graphite boat disassembly and assembly device includes a bracket 2, a graphite boat flipping device, and a disassembly and assembly positioning component 61. Refer to Figure 2 is a schematic structural diagram of a graphite boat flipping disassembly and assembly integrated device provided by the embodiment of the present application; Figure 3 is Figure 2 a schematic structural diagram of the back of Figure 4 is a schematic structural diagram of the graphite boat placed on the graphite boat flipping disassembly and assembly integrated device provided by the embodiment of the present application; Figure 5 is Figure 4 a schematic structural diagram after flipping at the flipping station 3 of Figure 6 is a schematic structural diagram of the flipped graphite boat placed on the graphite boat flipping disassembly and assembly integrated device provided by the embodiment of the present application. Among them, the graphite boat flipping device is used to flip the graphite boat and to shift the graphite boat so that the nut 13 on the bottom surface 14 of the graphite boat is aligned with the nut retention mechanism of the disassembly and assembly positioning component 61, and includes a flipping station 3, a clamping mechanism 5, and a flipping drive mechanism 4. The disassembly and assembly positioning component 61 is used to retain the nut 13 on the bottom surface 14 of the graphite boat.

[0076] Figure 15 shows a flowchart of the graphite boat flipping disassembly and assembly method provided by the embodiment of the present application. As Figure 15 shown, the graphite boat flipping disassembly and assembly method includes the following steps:

[0077] S100 Place the graphite boat on the flipping station of the graphite boat flipping device, and the clamping mechanism clamps the graphite boat feet.

[0078] The flipping station 3 includes a connected first support platform 31 in a horizontal state and a second support platform 32 in a vertical state. The graphite boat in a horizontal state is transported to the flipping station 3 of the graphite boat flipping device through a graphite boat handling mechanism or an AGV (Automated Guided Vehicle), specifically transported to the first support platform 31 of the flipping station 3.

[0079] The flipping drive mechanism 4 flips the flipping station 3, causing the graphite boat 1 in the horizontal state to flip to the vertical state. After flipping, the second support platform 32 is in the horizontal state, and the graphite boat 1 in the vertical state is placed on the second support platform 32.

[0080] Exemplarily, the flipping drive mechanism 4 includes a rotating motor. The rotating shaft of the rotating motor is rotationally connected to the flipping station 3 through a bearing. The rotating shaft of the rotating motor is parallel to the length direction of the graphite boat 1 and parallel to the length direction of the flipping station 3.

[0081] It should be noted that the graphite boat flipping device provided in the embodiment of the present application can not only flip the graphite boat 1 from the horizontal state to the vertical state, but also flip the graphite boat 1 from the vertical state to the horizontal state. The flipping drive mechanism 4 provided in the embodiment of the present application can achieve clockwise and counterclockwise rotation. Therefore, when the usage scenario of the graphite boat flipping device is not limited to the graphite boat disassembly and assembly process, the graphite boat flipping device can also place the graphite boat in the vertical state and flip the graphite boat in the vertical state to the horizontal state.

[0082] S300 The first lifting drive mechanism drives the graphite boat (1) to move in the width direction of the second support platform (32).

[0083] The second support platform 32 is provided with a working through hole 7. The position of the working through hole 7 corresponds to the distribution position of the nuts 13 on the bottom surface 14 of the graphite boat. The minimum area of the working through hole 7 needs to be slightly larger than the area of the nuts on the bottom surface of the graphite boat, for example, it can just allow the nuts 13 on the bottom surface of the graphite boat to pass through. The maximum area of the working through hole 7 needs to be smaller than the area of the bottom surface 14 of the graphite boat.

[0084] S400 The clamping mechanism (5) moves in a direction perpendicular to the first support platform (31) to ensure that the clamping mechanism (5) adapts to the movement of the graphite boat (1) in the width direction of the second support platform (32).

[0085] S500 The clamping mechanism (5) moves along the length direction of the first support platform (31), driving the graphite boat (1) to move in the length direction of the second support platform (32) until the nuts (13) on the bottom surface (14) of the graphite boat fall into the working through hole (7) of the second support platform (32).

[0086] S600 The disassembly and assembly positioning assembly 61 fixes the nuts 13 on the bottom surface of the graphite boat, facilitating subsequent manual or disassembly and assembly mechanisms to disassemble and assemble the graphite boat.

[0087] The graphite boat disassembly and assembly mechanism is vertically opposite to the second support platform 32 in the horizontal state.

[0088] Embodiment 2

[0089] In S100 of Embodiment 1, the graphite boat 1 is placed on the flipping station 3 of the graphite boat flipping device, which further includes:

[0090] S110 places the horizontally placed graphite boat 1 on the first platform plate 312.

[0091] Wherein, as Figures 2 - 6 shown, the angle between the first support platform 31 and the second support platform 32 matches the angle between the side surface of the graphite boat and the bottom surface of the graphite boat.

[0092] The first support platform 31 and the second support platform 32 are respectively used to support the side surface of the graphite boat and the bottom surface 14 of the graphite boat during the flipping process; the first support platform further includes a first translation driving mechanism, and the first translation driving mechanism includes a first fixed platform plate 311, a first platform plate 312 and a first driving module 313; the plane where the first fixed platform plate 311 is located is parallel to the plane where the first platform plate 312 is located.

[0093] The first platform plate 312 is connected to the first fixed platform plate 311 through the first driving module 313. Specifically, the moving end of the first driving module 313 is connected to the first platform plate 312, and the axis where the first driving module 313 is located is perpendicular to the plane where the second support platform 32 is located. The first platform plate 312 is driven by the first driving module 313 to approach or move away from the second support platform 32 in a direction perpendicular to the second support platform 32.

[0094] S120 drives the first driving module 313 to drive the graphite boat 1 on the first platform plate 312 to approach the second support platform 32 until it fits with the second support platform 32. The horizontally placed graphite boat 1 is placed on the flipping station 3. The horizontally placed first support platform 31 supports the side surface of the graphite boat, and the vertically placed second support platform 32 is attached to the bottom surface 14 of the graphite boat, which can provide the supporting force from the first support platform 31 and the second support platform 32 for the graphite boat 1 during the flipping process and ensure the stable flipping of the graphite boat 1.

[0095] Embodiment 3

[0096] After flipping, the graphite boat 1 is placed on the second support platform 32 in a vertical state. At this time, the graphite boat 1 needs to be displaced to ensure that the nut 13 on the bottom surface 14 of the graphite boat is aligned with and penetrates the working through hole 7 of the second support platform 32, so as to prepare for the next step of S500 to fix the nut 13 on the bottom surface 14 of the graphite boat.

[0097] Therefore, in S400 of Embodiment 1, the flipping station 3 and the clamping mechanism 5 are driven to drive the graphite boat 1 to move in the width direction and the length direction of the second support platform 32 respectively, which further includes:

[0098] The first lifting drive mechanism drives the graphite boat 1 to move in the width direction of the second support platform 32.

[0099] Among them, as Figure 7 shown in the structural schematic diagram of the first lifting drive mechanism provided by the embodiment of the present application, the first lifting drive mechanism includes a second platform plate 314, a lifting component 315 and a second drive module 316; the planes where the first fixed platform plate 311, the first platform plate 312 and the second platform plate 314 are located are parallel to each other; the second platform plate 314 is connected to the first platform plate 312 through the lifting component 315 and the second drive module 316.

[0100] Among them, the lifting component 315 includes a bottom plate 3151, a connecting column 3152 and a telescopic module 3153; the bottom plate 3151 is parallel to the first translation platform, the bottom plate 3151 is connected to the first platform plate 312 through the connecting column 3152, the first platform plate 312 is connected to the second platform plate 314 through a telescopic component, one end of the bottom plate 3151 is connected to one end of the second drive module 316, and one end of the telescopic rod of the second drive module 316 can pass through the first fixed platform plate 311, the first platform plate 312 and is movably connected to the second platform plate 314.

[0101] Through the above settings, it is possible to drive the second drive module 316 to drive the graphite boat 1 on the second platform plate 314 to approach or move away from the first platform plate 312, so as to adjust the position of the graphite boat 1 in the width direction of the second support platform 32.

[0102] S420 The clamping mechanism 5 moves in a direction perpendicular to the first support platform 31 to ensure that the clamping mechanism 5 adapts to the movement of the graphite boat 1 in the width direction of the second support platform 32.

[0103] In order to adapt to the movement of the second drive module 316 driving the graphite boat 1 in the width direction of the second support platform 32, it is also necessary to drive the second clamping member 512 and the first clamping member 511 to move the same distance in the same direction, so as to ensure that the clamping mechanism 5 can always clamp the graphite boat 1 during the movement and alignment of the graphite boat 1.

[0104] See Figure 8 For the structural schematic diagram of the clamping mechanism provided by the embodiment of the present application, as Figure 8 shown, the clamping mechanism 5 includes a jaw 51, a third drive module 52 and a fourth drive module 53.

[0105] The jaw 51 is connected to the first fixed platform plate 311 through the third drive module 52 and the fourth drive module 53. The jaw 51 is driven by the third drive module 52 to move along the length direction of the first fixed platform plate 311, and the jaw 51 is driven by the fourth drive module 53 to move in a direction perpendicular to the plane where the first support platform 31 is located.

[0106] Among them, the gripper 51 includes: a first clamping member 511, a second clamping member 512, and a third clamping member 513.

[0107] Specifically, the first clamping member 511 is connected to the second clamping member 512 through a sliding module. The first clamping member 511 and the second clamping member 512 are opposite and parallel to each other, and the second clamping member 512 is perpendicularly connected to the third clamping member 513. The sliding module includes a slider and a slide rail that is slidably connected to the slider. The length direction of the slide rail is perpendicular to the first fixed platform.

[0108] The first clamping member 511 is perpendicularly connected to the first fixed platform plate 311 through a third driving module 52. Specifically, the moving end of the third driving module 52 is connected to the first clamping member 511, and the movement trajectory of the moving end of the third driving module 52 is perpendicular to the plane where the first clamping member 511 is located; the moving end of the fourth driving module 53 is connected to the second clamping member 512, and the movement direction of the moving end of the fourth driving module 53 is parallel to the plane where the second clamping member 512 is located.

[0109] The third driving module 52 is used to drive the gripper 51 to move in the length direction of the first fixed platform plate 311, and the fourth driving module 53 is used to drive the second clamping member 512 and the third clamping member 513 to move in a direction perpendicular to the plane where the first fixed platform plate 311 is located;

[0110] Among them, the graphite boat leg 12 includes a first side surface perpendicular to the graphite boat sheet, and also includes a second side surface and a third side surface. The first side surface is perpendicularly connected to the second side surface, the second side surface is perpendicularly connected to the third side surface, the first side surface is parallel and opposite to the third side surface, the second clamping member 512 is parallel to the second side surface, and the third clamping member 513 is parallel to the first side surface; when the gripper 51 clamps the graphite boat leg 12, the second clamping member 512 abuts against the second side surface to apply a clamping force perpendicular to the second side surface, and the third clamping member 513 abuts against the first side surface to apply a pulling force perpendicular to the first side surface.

[0111] When the second driving module 316 drives the graphite boat 1 to move in the width direction of the second support platform 32, the movement direction and movement distance of the telescopic rod of the fourth driving module 53 are the same as those of the second driving module 316, so as to synchronously drive the fourth driving module 53 to drive the second clamping member 512 and the third clamping member 513 that clamp the graphite boat leg 12 to move synchronously in the same distance in a direction perpendicular to the plane where the first fixed platform plate 311 is located, so as to ensure that the clamping mechanism 5 always clamps the graphite boat 1.

[0112] S430 The clamping mechanism 5 moves along the length direction of the first support platform 31, driving the graphite boat 1 to move in the length direction of the second support platform 32.

[0113] Two third driving modules 52 are movably connected in the length direction of the first fixed platform. Each third driving module 52 is connected with a clamping jaw 51. The openings of the two clamping jaws 51 face each other and can clamp the graphite boat feet 12 at both ends of the graphite boat. The two third driving modules 52 move in the same direction in the length direction of the first fixed platform, driving the graphite boat 1 to move in the length direction of the second support platform 32.

[0114] Embodiment 4

[0115] The nut 13 on the bottom surface 14 of the graphite boat is fixed by the disassembly and assembly positioning component 61 of Embodiment 1, and further includes:

[0116] S510 The first lifting driving module 612 drives the second fixed platform plate 611 to approach the second support platform 32 in a horizontal state, so that the nut positioning column 615 continuously approaches the working through hole 7 of the second support platform 32 in the vertical direction until the nut positioning column 615 contacts and fixes the nut 13 on the bottom surface of the graphite boat.

[0117] S520 After the graphite boat slices are disassembled, the second lifting driving module 613 drives the clamping seat 616 on the lifting platform plate 614 to rise until it clamps the series connection rod 15 of the graphite boat 1.

[0118] Figure 9 The structural schematic diagram of the disassembly and assembly positioning component 61 provided by the embodiment of the present application is as Figure 9 shown. The disassembly and assembly positioning component 61 includes a second fixed platform plate 611, a first lifting driving module 612, a second lifting driving module 613, a lifting platform plate 614, a nut positioning column 615 and a clamping seat 616.

[0119] The second fixed platform plate 611 is connected with a first lifting driving module 612. A plurality of nut positioning columns 615 perpendicular to the second fixed platform plate 611 are installed on the edge of the second fixed platform plate 611. The positions of the nut positioning columns 615 correspond to the positions of the working through holes 7 of the second support platform 32. The second fixed platform plate 611 is connected with a lifting platform plate 614 through a second lifting driving module 613, and a plurality of clamping seats 616 opposite to the nut positioning columns 615 are installed on the lifting platform plate 614. The clamping seat 616 is used to support the series connection rod 15 of the graphite boat 1. When the graphite boat slices, ceramic rings and electrode blocks are removed from the second support platform 32, in order to prevent the series connection rod 15 from shaking, the clamping seat 616 is lifted through the lifting platform plate 614, and the clamping seat 616 supports the series connection rod 15.

[0120] The clamping seat 616 performs the clamping action through the following settings: Two linkage rods 617 are slidably arranged on the lifting platform plate 614. Two groups of horizontal pushing cylinders are respectively arranged below both ends of the lifting platform plate 614. The telescopic end of the horizontal pushing cylinder is fixed to one end of the connecting arm, and the other end of the connecting arm is fixedly connected to the linkage rod 617. A number of driving linkages 618 are fixedly installed on the linkage rod 617, and the clamping seat 616 is installed at the end of the driving linkage 618, and the clamping seats 616 are staggeredly clamped. Of course, the clamping seat 616 can also be a fixture that is the same in number as the nut positioning posts 615, aligned with the nut positioning posts 615 in position, can be independently opened and closed, and is arranged on the lifting platform plate 614.

[0121] The embodiment of the present application further provides a device for fixing the nuts on the bottom surface of the graphite boat, including the disassembly and assembly positioning component and the end positioning mechanism introduced above. The disassembly and assembly positioning component is used to fix the nuts on the body position of the graphite boat, and the end positioning mechanism is used to fix the nuts on the feet of the graphite boat. Therefore, both the disassembly and assembly positioning component and the end positioning mechanism are located below the second support platform in the horizontal state, and the end positioning mechanism is located on both sides of the length direction of the disassembly and assembly positioning component. The end positioning mechanism includes a third lifting drive module, which is connected to the lifting seat and is used to lift and lower the lifting seat. A supporting claw, a lifting cylinder, and a supporting positioning post are arranged on the lifting seat, and the lifting cylinder is connected to the supporting claw to drive the supporting claw to lift and lower. When disassembling the boat slice, the nut at the lower end of the series rod 15 of the graphite boat foot 12 is fixed by the rising nut positioning post 615, which facilitates the rotation and disassembly of the nut on the graphite boat foot 12. After the boat slice is disassembled, the nut positioning post 615 descends, and the supporting claw rises to clamp the series rod 15 to prevent the series rod 15 from shaking.

[0122] Embodiment 5

[0123] The S500 disassembly and assembly positioning component 61 in Embodiment 1 fixes the nut 13 on the bottom surface of the graphite boat, and further includes: clamping the nut 13 on the bottom surface of the graphite boat through the clamping module 8.

[0124] Another embodiment of the present application provides another disassembly and assembly positioning component 61, including a plurality of clamping modules 8, as Figure 10 shows the schematic structural diagram of the clamping module 8 arranged on the back of the second support platform 32 provided in the embodiment of the present application. Figure 11 For Figure 10 the enlarged schematic diagram of area A in, the clamping module 8 is used to fix the nut on the bottom surface of the graphite boat placed on the second support platform 32. The clamping module 8 is connected to the back of the second support platform 32, and the clamping part of the clamping module 8 faces the working through hole 7.

[0125] Among them, Figure 12 shows the schematic structural diagram of a clamping module 8 provided in the embodiment of the present application, as Figure 12As shown, the clamping module 8 includes: a fixture and a fixture driving component. The fixture driving component drives the fixture to open and close and drives the fixture to move in a direction parallel to the disassembly and assembly platform, such as moving the fixture along the length or width direction of the disassembly and assembly platform.

[0126] The fixture driving component includes a pneumatic driving mechanism, and the pneumatic driving mechanism is used to drive the fixture to open and close and drive the fixture to approach or move away from the nut.

[0127] The nuts 13 on the bottom surface of the graphite boat of general specifications are distributed at intervals according to a preset distance on the bottom surface 14 of the graphite boat. When the distance between the nuts 13 is greater than the preset distance, a clamping module 8 that can only clamp one nut 13 can be connected to the back of the disassembly and assembly platform at the edge of the working through hole 7 corresponding to the nut 13; when the distance between two nuts 13 is relatively close, such as less than the preset distance, a clamping module 8 that can clamp two nuts 13 simultaneously can be connected to the back of the disassembly and assembly platform at the edge of the working through hole 7 corresponding to the two nuts 13. As Figure 1 shown in the graphite boat 1, the distance between the two nuts 13 in the middle of the bottom surface 14 of the graphite boat and the two nuts 13 of the graphite boat feet 12 is relatively close (less than the preset distance), so a clamping module 8 with a double-nut 13 clamping part that can clamp two nuts 13 simultaneously can be selected for clamping. The distance between the other nuts 13 on the bottom surface 14 of the graphite boat is relatively far (greater than the preset distance), so a clamping module 8 with a single-nut 13 clamping part that can clamp one nut 13 can be selected for clamping.

[0128] The fixture of the clamping module 8 includes a first fixture 81. As Figure 12 shown, the first fixture 81 includes a first clamping plate 811 and a second clamping plate 812 arranged oppositely. Two grooves 813 are provided on each of the two opposite surfaces of the first clamping plate 811 and the second clamping plate 812, and the four grooves 813 are opposite to each other in pairs. The distance between the grooves 813 on each clamping plate is the same as the distance between the two nuts 13 located on the graphite boat feet 12.

[0129] Embodiment 6

[0130] This embodiment provides another method for disassembling and assembling a graphite boat, including the following steps:

[0131] S100 Place the graphite boat 1 in a horizontal state on the flipping station 3 of the graphite boat flipping device, where the flipping station 3 includes a horizontally arranged first support platform 31 and a vertically arranged second support platform 32 connected to each other;

[0132] S200 The clamping mechanism 5 of the graphite boat flipping device clamps the graphite boat feet at both ends of the length direction of the graphite boat;

[0133] The flipping drive mechanism 4 of the S300 graphite boat flipping device flips the flipping station 3, causing the graphite boat in a horizontal state to flip to a vertical state. After flipping, the second support platform 32 is in a horizontal state, and the graphite boat 1 in a vertical state is placed on the second support platform 32.

[0134] S400 The flipping station 3 and the clamping mechanism 5 drive the graphite boat 1 to move in the width direction and length direction of the second support platform 32 respectively until the bottom nut of the graphite boat falls into the working through-hole 7 of the second support platform 32, facilitating the disassembly and assembly of the positioning component for fastening.

[0135] S500 The disassembly and assembly positioning component 61 fixes the nut 13 on the bottom surface of the graphite boat.

[0136] S600 The disassembly and assembly mechanism disassembles and reassembles the graphite boat.

[0137] Figure 13 Shown in the figure is a schematic structural diagram of a disassembly and assembly component 62 provided by an embodiment of the present application. As Figure 13 shown, the disassembly and assembly mechanism includes a frame, a graphite boat plate handling mechanism, a nut disassembler and assembler, and an opening and closing jaw 621. The graphite boat plate handling mechanism, the nut disassembler and assembler, and the opening and closing jaw 621 are integrated above a frame. The graphite boat plate handling mechanism, the nut disassembler and assembler, and the opening and closing jaw 621 can move along the three-axis directions of the frame. The frame is arranged above and on both sides of the second support platform 32. The frames on both sides of the second support platform 32 are provided with a ceramic ring placement platform and an electrode block buffer mechanism 622, etc.

[0138] The working principle is as follows: Drive the nut disassembler and assembler to disassemble and remove the top nut of the graphite boat, drive the graphite boat plate adsorption and handling mechanism to sequentially adsorb and place the graphite boat plates on the graphite boat plate transmission device. Then, the opening and closing jaw 621 clamps and places the ceramic ring on the ceramic ring placement platform, and the opening and closing jaw 621 clamps and places the electrode block on the electrode block buffer mechanism 622. After replacing the scrapped graphite boat plates, nuts, and ceramic rings, then through the graphite boat plate adsorption and handling mechanism and the opening and closing jaw 621, they are sequentially transported to the second disassembly and assembly platform for assembly. Finally, drive the gantry handling mechanism to unload the assembled graphite boat. Specifically, it includes the following steps:

[0139] S610 The disassembly and assembly mechanism disassembles and removes the nut 13 on the top surface of the graphite boat, and disassembles and removes the graphite boat plates, ceramic rings, and electrode blocks.

[0140] S620 The disassembly and assembly mechanism transports the graphite boat plates, ceramic rings, and electrode blocks to the second support platform 32 for assembly; and assembles them into a graphite boat.

[0141] S630 The gantry handling mechanism transports the assembled graphite boat from the second support platform 32 to the loading and unloading mechanism.

[0142] Example 7

[0143] The S610 driving disassembly and assembly mechanism of Example 6 disassembles and removes the nut 13 on the top surface of the graphite boat, and disassembles and removes the graphite boat pieces, ceramic rings and electrode blocks, further including:

[0144] The S611 nut disassembly and assembly machine disassembles and removes the nut 13 on the top surface of the graphite boat. Among them, the disassembly and assembly mechanism includes a nut disassembly and assembly mechanism integrated on the bracket 2, a graphite boat piece handling mechanism and an opening and closing jaw 621;

[0145] The S612 graphite boat piece handling mechanism removes the graphite boat pieces;

[0146] The S613 opening and closing jaw 621 disassembles and removes the ceramic ring;

[0147] The S614 opening and closing jaw 621 disassembles and removes the electrode block. Specifically, the electrode block is placed on the electrode block buffer mechanism 622, further including the following steps:

[0148] The S6141 opening and closing jaw 621 clamps the electrode block; among them, the opening and closing jaw 621 is used to clamp the electrode block of the graphite boat leg 12 and place the electrode block on the electrode block buffer mechanism 622. The electrode block buffer mechanism 622 is arranged in the length direction of the bracket 2;

[0149] The S6142 buffer platform driving module 6224 drives the buffer platform 6222 to rise to a position close to the top of the buffer column 6223. Figure 14 A structural schematic diagram of an electrode block buffer mechanism 622 provided for the application example, as Figure 14 shown, the electrode block buffer mechanism 622 includes a buffer fixed platform 6221, a buffer platform 6222, a buffer column 6223 and a buffer platform 6222 driving module; the buffer platform 6222 and the buffer fixed platform 6221 are opposite and parallel, the buffer fixed platform 6221 is vertically connected with a plurality of buffer columns 6223 and the buffer columns 6223 penetrate through the buffer platform 6222, and the buffer columns 6223 match the holes of the electrode block for connecting the electrode blocks in series; the buffer platform 6222 is connected to the buffer platform driving module 6224;

[0150] The S6143 opening and closing jaw 621 sleeves the electrode block on the buffer column 6223 above the buffer platform 6222;

[0151] The S6144 buffer platform driving module 6224 descends until the buffer platform 6222 is attached to the buffer fixed platform 6221.

[0152] Another embodiment of the present application provides a graphite boat flipping device which further includes a positioning controller. Exemplarily, the positioning controller includes a position sensor and / or a detection camera and / or a photoelectric detector, etc., and a controller, and the controller is electrically connected or communicatively connected to each driving mechanism and driving module.

[0153] The positioning controller is installed on the first support platform 31 and the second support platform 32. The positioning controller can collect the position information and / or image information and / or photoelectric information of the placed graphite boat, and control each driving mechanism or driving module to drive according to the position information and / or image information and / or photoelectric information, so as to clamp the graphite boat, rotate the flipping station 3, and move the graphite boat, improving production efficiency and saving labor costs.

[0154] The working process of the graphite boat disassembly and assembly method of the present application includes: placing the graphite boat in the flipping station 3, clamping the graphite boat by the clamping mechanism 5, driving the flipping station 3 to rotate by the flipping driving mechanism 4, so that the graphite boat is converted from a horizontal position to a vertical position conducive to disassembly and assembly, and then the flipping station 3 displaces the graphite boat so that the bottom nuts of the graphite boat are aligned with the graphite boat disassembly and assembly positioning component 61, and the disassembly and assembly positioning component 61 fixes the bottom nuts of the graphite boat, and then continues with the disassembly and assembly of the graphite boat.

[0155] The beneficial effects of adopting the embodiment of the present application are as follows: By integrating the steps of flipping, positioning, and disassembling and assembling the graphite boat in the same device, the present application method avoids the cumbersome operations of repeatedly transporting and transferring the graphite boat in traditional devices. This integrated design significantly reduces the transfer times of the graphite boat, shortens the disassembly and assembly cycle, thereby greatly improving production efficiency, reducing equipment costs and maintenance difficulties, and at the same time enhancing the versatility and safety of the equipment, and has a wide application prospect.

[0156] In several embodiments provided by the present application, it should be understood that the disclosed system, module, and method can be implemented in other ways. For example, the module embodiments described above are only illustrative. For example, the division of units is only a logical function division, and there can be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point, the displayed or discussed coupling or direct coupling or communication connection between each other can be through some interfaces, and the indirect coupling or communication connection of modules or units can be in electrical, mechanical or other forms.

[0157] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. The present application is not limited to the exact structures described above and illustrated in the drawings, and it cannot be determined that the specific implementation of the present application is only limited to these descriptions. For those of ordinary skill in the technical field to which the present application pertains, various changes and deformations made without departing from the concept of the present application should be regarded as falling within the protection scope of the present application.

Claims

1. A method for disassembling and assembling a graphite boat, characterized in that, The method includes: Placing the graphite boat on the flipping station (3) of the graphite boat flipping device, and clamping the graphite boat feet (12) with the clamping mechanism (5); wherein, the flipping station includes a connected first support platform (31) and a second support platform (32), the first support platform (31) includes a first lifting drive mechanism, and the clamping mechanism (5) is symmetrically arranged in the length direction of the first support platform (31); The flipping drive mechanism (4) of the graphite boat flipping device flips the flipping station (3); The first lifting drive mechanism drives the graphite boat (1) to move in the width direction of the second support platform (32); The clamping mechanism (5) moves in a direction perpendicular to the first support platform (31) to ensure that the clamping mechanism (5) adapts to the movement of the graphite boat (1) in the width direction of the second support platform (32); The clamping mechanism (5) moves along the length direction of the first support platform (31), driving the graphite boat (1) to move in the length direction of the second support platform (32) until the nut (13) on the bottom surface (14) of the graphite boat falls into the working through hole (7) of the second support platform (32); The disassembly and assembly positioning component (61) fixes the nut (13) on the bottom surface (14) of the graphite boat.

2. The method for disassembling and assembling a graphite boat according to claim 1, wherein The placing the graphite boat on the flipping station (3) of the graphite boat flipping device includes: Placing the horizontally placed graphite boat (1) on the first platform plate (312), wherein the angle between the first support platform (31) and the second support platform (32) matches the angle between the side surface of the graphite boat and the bottom surface (14) of the graphite boat; the first support platform (31) and the second support platform (32) are respectively used to support the side surface of the graphite boat and the bottom surface (14) during the flipping process; the first support platform (31) further includes a first translation drive mechanism, and the first translation drive mechanism includes a first fixed platform plate (311), a first platform plate (312) and a first drive module (313); the plane where the first fixed platform plate (311) is located is parallel to the plane where the first platform plate (312) is located; the first platform plate (312) is connected to the first fixed platform plate (311) through the first drive module (313); The first drive module (313) drives the graphite boat (1) on the first platform plate (312) to approach the second support platform (32) until it fits with the second support platform (32).

3. The graphite boat disassembly and assembly method according to claim 2, characterized in that, The first lifting drive mechanism drives the graphite boat (1) to move in the width direction of the second support platform (32), including: Drive the second driving module (316) to drive the susceptor (1) on the second platform plate (314) to approach or move away from the first platform plate (312), so as to adjust the position of the susceptor (1) in the width direction of the second support platform (32). Among them, the first lifting driving mechanism includes a second platform plate (314), a lifting assembly (315) and a second driving module (316); the planes where the first fixed platform plate (311), the first platform plate (312) and the second platform plate (314) are located are parallel to each other; the second platform plate (314) is connected to the first platform plate (312) through the lifting assembly (315) and the second driving module (316).

4. The graphite boat disassembly and assembly method according to claim 2, characterized in that, The clamping mechanism (5) includes clamping jaws (51), a third driving module (52) and a fourth driving module (53); The clamping jaws (51) are connected to the first fixed platform plate (311) through the third driving module (52), and the third driving module (52) is used to drive the two clamping jaws (51) to move along the length direction of the first fixed platform plate (311); The fourth driving module (53) is used to adjust the opening size of the clamping jaws (51) to clamp or release the susceptor feet (12), and is used to drive the clamping jaws (51) to move in a direction perpendicular to the plane where the first support platform (31) is located.

5. The method for disassembling and assembling a graphite boat according to claim 4, wherein, The clamping jaws (51) include: a first clamping member (511), a second clamping member (512) and a third clamping member (513); The first clamping member (511) is connected to the second clamping member (512) through a sliding module. The first clamping member (511) and the second clamping member (512) are opposite and parallel to each other, and the second clamping member (512) is vertically connected to the third clamping member (513); The first clamping member (511) is vertically connected to the first fixed platform plate (311) through the third driving module (52). The free end of the telescopic rod of the third driving module (52) is connected to the first clamping member (511), and the free end of the telescopic rod of the fourth driving module (53) is connected to the second clamping member (512). Among them, the third driving module (52) is used to drive the clamping jaws (51) to move in the length direction of the first fixed platform plate (311), and the fourth driving module (53) is used to drive the second clamping member (512) and the third clamping member (513) to move synchronously in a direction away from or close to the first fixed platform plate (311); Among them, the susceptor feet (12) include a first side surface perpendicular to the susceptor sheet (11), and also include a second side surface and a third side surface. The first side surface is vertically connected to the second side surface, the second side surface is vertically connected to the third side surface, the first side surface is parallel and opposite to the third side surface, the second clamping member (512) is parallel to the second side surface, and the third clamping member (513) is parallel to the first side surface; when the clamping jaws (51) clamp the susceptor feet (12), the second clamping member (512) is in contact with the second side surface, and the third clamping member (513) is in contact with the first side surface.

6. The graphite boat disassembly and assembly method according to claim 5, characterized in that, The movement of the clamping mechanism (5) in a direction perpendicular to the first support platform (31) further includes: The fourth driving module (53) drives the jaws (51) that clamp the graphite boat feet (12) to move synchronously in a direction away from or towards the first fixed platform plate (311), wherein the movement directions and movement distances of the telescopic rods of the second driving module (316) and the fourth driving module (53) are the same.

7. The graphite boat disassembly and assembly method according to claim 6, characterized in that, The clamping mechanism (5) moves along the length direction of the first support platform (31), driving the graphite boat to move along the length direction of the second support platform (32), including: The third driving module (52) drives the corresponding jaws (51) to move in the length direction of the first fixed platform, so as to drive the graphite boat (1) to move in the length direction of the second support platform (32).

8. The graphite boat disassembly and assembly method according to claim 1, characterized in that The disassembly and assembly positioning component (61) fixes the nuts (13) on the bottom surface of the graphite boat (14), and further includes: The first lifting driving module (612) drives the second fixed platform plate (611) to approach the second support platform (32) in a horizontal state, so that the nut positioning column (615) continuously approaches the working through hole (7) of the second support platform (32) in the vertical direction until the nut positioning column (615) contacts and fixes the nut (13) on the bottom surface of the graphite boat (14); After the graphite boat slices (11) are disassembled, the second lifting driving module (613) drives the clamping seat (616) on the lifting platform plate (614) to rise until it holds the series connection rod (15) of the graphite boat (1); Wherein, the disassembly and assembly positioning component (61) includes a second fixed platform plate (611), a first lifting driving module (612), a second lifting driving module (613), a lifting platform plate (614), a nut positioning column (615) and a clamping seat (616); a plurality of the nut positioning columns (615) perpendicular to the second fixed platform plate (611) are installed on the edge of the second fixed platform plate (611), the positions of the nut positioning columns (615) correspond to the positions of the working through holes (7) of the second support platform (32), the lifting platform plate (614) is connected to the second fixed platform plate (611) through the second lifting driving module (613), and a plurality of clamping seats (616) opposite to the nut positioning columns (615) are installed on the lifting platform plate (614).

9. The graphite boat disassembly and assembly method according to claim 1, characterized in that, The method further includes: the disassembly and assembly mechanism disassembles and reassembles the graphite boat (1), including: The disassembly and assembly mechanism disassembles and removes the nuts (13) on the top surface of the graphite boat, and disassembles and removes the graphite boat slices (11), ceramic rings and electrode blocks; The disassembly and assembly mechanism transports the graphite boat slices (11), ceramic rings and electrode blocks to the second support platform (32) for assembly; The gantry handling mechanism transports the assembled graphite boat (1) from the second support platform (32) to the loading and unloading mechanism.

10. The graphite boat disassembly and assembly method according to claim 9, characterized in that, The disassembly and assembly mechanism disassembles and removes the nuts (13) on the top surface of the graphite boat, and disassembles and removes the graphite boat slices (11), ceramic rings and electrode blocks, and further includes: The nut disassembling and assembling machine disassembles and removes the nut (13) on the top surface of the graphite boat. Among them, the disassembly and assembly mechanism includes a nut disassembly and assembly mechanism integrated on the bracket (2), a graphite boat sheet handling mechanism, and an opening and closing jaw (621); The graphite boat sheet handling mechanism removes the graphite boat sheet (11); The opening and closing jaw (621) disassembles and removes the ceramic ring; The opening and closing jaw (621) disassembles and removes the electrode block.

11. The graphite boat disassembly and assembly method according to claim 10, wherein, The opening and closing jaw (621) disassembling and removing the electrode block further includes: The opening and closing jaw (621) clamps the electrode block. Among them, the opening and closing jaw (621) is used to clamp the electrode block of the graphite boat leg (12) and place the electrode block on the electrode block buffer mechanism (622), and the electrode block buffer mechanism (622) is arranged in the length direction of the bracket (2); The lifting drive module of the buffer platform (6222) drives the buffer platform (6222) to rise to a position close to the top of the buffer column (6223). Among them, the electrode block buffer mechanism (622) includes a buffer fixed platform (6221), a buffer platform (6222), a buffer column (6223), and a buffer platform drive module (6224); the buffer platform (6222) and the buffer fixed platform (6221) are opposite and parallel, the fixed platform is vertically connected with a plurality of buffer columns (6223), and the buffer column (6223) penetrates the buffer platform (6222), and the buffer column (6223) matches the hole of the electrode block for connecting the electrode blocks in series; the buffer platform (6222) is connected to the buffer platform drive module (6224); The opening and closing jaw (621) sleeves the electrode block on the buffer column (6223) above the buffer platform (6222); The lifting drive module of the buffer platform (6222) descends until the buffer platform (6222) is attached to the buffer fixed platform (6221).

Images