Glass substrate mounting device

Abstract

The invention provides a glass substrate mounting device, and belongs to the technical field of chemical mechanical polishing, the glass substrate mounting device comprises a retaining ring, a loading table, a lifting assembly and a detection assembly, the retaining ring is provided with an accommodating hole matched with a glass substrate, and the accommodating hole is used for being in clearance fit with the glass substrate; the loading table is arranged below the retaining ring, and a mounting cavity with a rectangular cross section is formed in the top of the loading table; the lifting assembly is arranged in the mounting cavity and is used for controlling the glass substrate to enter and exit from the accommodating hole; the detection assembly is arranged on the retaining ring and used for detecting the relative positions of the retaining ring and the loading table in the horizontal direction and the vertical direction. The glass substrate mounting device provided by the invention aims to solve the problems that a square glass substrate is easy to deviate during mounting, so that the polishing is not uniform, and the glass substrate is easy to damage.

Description

Technical Field

[0001] The present invention belongs to the technical field of chemical mechanical polishing, and more specifically, relates to a glass substrate mounting device. Background Art

[0002] A glass substrate is an important basic material for manufacturing semiconductor devices, display devices, etc. Since chips are usually square, during packaging, a square glass substrate can better match the shape of the chip, reduce waste at the edges, and improve material utilization. Especially in the packaging of large-sized chips, the area utilization rate of a square glass substrate is higher, which can effectively reduce costs. In addition, the square glass substrate has a larger size and can package more chips simultaneously, making it suitable for large-scale integrated packaging. Therefore, in the field of chip packaging, square glass substrates have gradually replaced traditional circular substrates due to their excellent physical properties and become a key material for advanced packaging processes.

[0003] However, the large size, quadrilateral structure, and relatively large weight of the square glass substrate pose unique challenges during the chemical mechanical polishing (CMP) process. Due to the problem of unstable gap control in the cooperation between the corner regions of the square glass substrate and the retainer ring, the glass substrate is prone to collide with the retainer ring during the polishing process, which may lead to wear at the corners of the substrate or even the risk of slipping. Such collisions not only affect the surface quality of the glass substrate but also may reduce the qualification rate and production efficiency of the polishing process.

[0004] To reduce the probability of collision between the glass substrate and the retainer ring during the polishing process, the gap between the retainer ring and the glass substrate is usually reduced. However, due to the reduction of the gap between the retainer ring and the glass substrate, the difficulty of installing the glass substrate increases, and it is extremely easy to cause deviation in the installation position of the glass substrate. Once the installation position of the glass substrate deviates, it will not only lead to uneven polishing and easily scratch the surface of the glass substrate but also cause wear at the corners of the glass substrate or even overall cracking. Summary of the Invention

[0005] The purpose of the present invention is to provide a glass substrate mounting device, aiming to solve the problem that the square glass substrate is prone to deviation during installation, resulting in uneven polishing and easy damage to the glass substrate.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is:

[0007] Provide a glass substrate mounting device, including:

[0008] A retainer ring, provided with a receiving hole adapted to the glass substrate, and the receiving hole is used for clearance fit with the glass substrate;

[0009] A loading platform is provided below the holding ring. An installation cavity with a rectangular cross-section is formed at the top of the loading platform.

[0010] A lifting assembly is arranged in the installation cavity and is used to control the glass substrate to enter and exit the accommodation hole; and

[0011] A detection assembly is arranged on the holding ring and is used to detect the relative positions of the holding ring and the loading platform in the horizontal direction and the vertical direction.

[0012] In a possible implementation manner, the detection assembly includes:

[0013] A controller;

[0014] A detector is arranged on the holding ring and is in communication connection with the controller. The detector is used to detect the relative positions of the holding ring and the loading platform in the horizontal direction and the vertical direction; and

[0015] An adjuster is in communication connection with the controller and is connected to the holding ring. The adjuster is used to adjust the correspondence between the holding ring and the loading platform in the horizontal direction and the vertical direction.

[0016] In a possible implementation manner, the top of the loading platform has an inclined detection slope. A plurality of detectors are provided, and the plurality of detectors are at least distributed on two adjacent side plates of the holding ring. Among them, at least one side plate of the holding ring is provided with a plurality of detectors, and the detectors are used to detect the distance between the holding ring and the detection slope.

[0017] In a possible implementation manner, the top of the loading platform further has an adjustment slope. The inner side of the adjustment slope inclines downward and communicates with the installation cavity.

[0018] In a possible implementation manner, the glass substrate mounting device further includes an air floating nozzle and a pressure sensor arranged in the installation cavity. The air floating nozzle is used to form an air film at the bottom of the glass substrate, and the pressure sensor is used to monitor the air film pressure below the glass substrate.

[0019] In a possible implementation manner, the glass substrate mounting device further includes shock damping dampers arranged at the bottom and / or the outer wall of the holding ring.

[0020] In a possible implementation manner, an elastic buffer pad is arranged on the inner wall of the holding ring, and the elastic buffer pad is used to contact the glass substrate.

[0021] In a possible implementation, the retaining ring includes a plurality of limiting bars sequentially distributed at an angle. The plurality of limiting bars enclose to form the accommodating hole. Each limiting bar is connected to a corresponding driving module. The driving module is used to adjust the position of the limiting bar, thereby adjusting the size of the accommodating hole. The glass substrate mounting device further includes a controller and a distance measuring instrument disposed on the retaining ring. The driving module and the distance measuring instrument are respectively communicatively connected to the controller. The distance measuring instrument is used to detect the distance between the limiting bar and the glass substrate.

[0022] In a possible implementation, a plurality of air pressure adjustment holes are provided on the inner peripheral surface of the retaining ring. The glass substrate mounting device further includes a fixing assembly. The fixing assembly includes:

[0023] A controller;

[0024] A pressure sensor disposed on the loading table for detecting the weight of the glass substrate and communicatively connected to the controller; and

[0025] A pressure regulating mechanism including an air flow pipe inserted into the air pressure adjustment hole, and a regulating valve and a delivery pump disposed on the air flow pipe. The delivery pump and the regulating valve are respectively communicatively connected to the controller.

[0026] In a possible implementation, the lifting assembly includes a lead screw and a lifting plate connected to the lead screw, and further includes a shock absorber disposed on the lead screw.

[0027] The beneficial effects of the glass substrate mounting device provided by the present invention are as follows: Compared with the prior art, the glass substrate mounting device of the present invention can effectively solve the problem that the square glass substrate is prone to deviation during the installation process through the coordinated cooperation of the retaining ring, the loading table, the lifting assembly and the detection assembly, and significantly improve the installation accuracy and stability. The detection assembly monitors the relative positions of the retaining ring and the loading table in the horizontal and vertical directions in real time to ensure accurate alignment between the two, and avoid corner wear or uneven polishing of the glass substrate caused by misalignment. The setting of the lifting assembly enables the glass substrate to smoothly enter and exit the accommodating hole, reduces mechanical impact, and lowers the installation difficulty. At the same time, the matching structure design of the retaining ring and the loading table is reasonable, and can effectively prevent the risk of the glass substrate slipping during the polishing process on the premise of ensuring stable gap control. The device not only improves the installation efficiency and positioning accuracy of the glass substrate, but also greatly reduces the probability of substrate damage, thereby improving the yield and production efficiency of the chemical mechanical polishing process, and is particularly suitable for the high-precision polishing requirements of large-size square glass substrates. Description of the Drawings

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0029] Figure 1 The sectional view of the glass substrate mounting device provided in the first embodiment of the present invention;

[0030] Figure 2 The top view of the retaining ring during rotation adopted in the first embodiment of the present invention;

[0031] Figure 3 For Figure 2 The partial schematic view of the detector and the loading table during detection on the same side plate;

[0032] Figure 4 The top view of the retaining ring during offset adopted in the first embodiment of the present invention;

[0033] Figure 5 For Figure 4 The partial schematic view of the detector and the loading table during detection;

[0034] Figure 6 The top view of the retaining ring adopted in the second embodiment of the present invention;

[0035] Figure 7 The top view of the retaining ring adopted in the third embodiment of the present invention;

[0036] Figure 8 The sectional view of the glass substrate mounting device provided in the fourth embodiment of the present invention.

[0037] In the figure: 1. Loading table; 101. Detection inclined plane; 102. Installation cavity; 2. Lifting assembly; 3. Glass substrate; 4. Retaining ring; 401. Accommodation hole; 402. Limiting strip; 403. Elastic buffer pad; 5. Detection assembly; 6. Air flotation nozzle; 7. Pressure sensor. Detailed implementation manners

[0038] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] In the claims, the description and the above-mentioned drawings of the present invention, unless otherwise clearly defined, when terms such as "first", "second" or "third" are used, they are for distinguishing different objects rather than for describing a specific order. Unless otherwise specified, the remaining orientation terms, such as "vertical", "clockwise", "counterclockwise", etc., indicating orientation or positional relationship are based on the orientation and positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, so it should not be construed as limiting the specific protection scope of the present invention. In the claims, the description and the above-mentioned drawings of the present invention, unless otherwise clearly defined, when terms such as "fixed connection" or "fixedly connected" are used, they should be understood in a broad sense, that is, any connection method without displacement relationship and relative rotation relationship between the two, that is, including non-detachable fixed connection, detachable fixed connection, being integrated as one body, and being fixedly connected through other devices or elements. In the claims, the description and the above-mentioned drawings of the present invention, when terms such as "comprising", "having" and their variants are used, are intended to mean "including but not limited to".

[0040] It should be noted that in Figure 5 , the dashed line indicates the position when the retaining ring corresponds to the loading table, and the solid line indicates the position when the retaining ring is misaligned with the loading table.

[0041] Please refer to Figures 1 to 8 together. Now, the glass substrate mounting device provided by the present invention will be described. The glass substrate mounting device includes a retaining ring 4, a loading table 1, a lifting assembly 2 and a detection assembly 5. The retaining ring 4 is provided with an accommodation hole 401 adapted to the glass substrate 3, and the accommodation hole 401 is used for clearance fit with the glass substrate 3; the loading table 1 is arranged below the retaining ring 4, and a mounting cavity 102 with a rectangular cross-section is provided at the top of the loading table 1; the lifting assembly 2 is arranged in the mounting cavity 102, and the lifting assembly 2 is used to control the glass substrate 3 to enter and exit the accommodation hole 401; the detection assembly 5 is arranged on the retaining ring 4, and the detection assembly 5 is used to detect the relative positions of the retaining ring 4 and the loading table 1 in the horizontal direction and the up-and-down direction.

[0042] The glass substrate 3 mounting device provided by the present invention, compared with the prior art, can effectively solve the problem that the square glass substrate 3 is prone to deviation during the installation process through the coordinated cooperation of the retaining ring 4, the loading table 1, the lifting assembly 2 and the detection assembly 5, significantly improving the installation accuracy and stability. The detection assembly 5 monitors the relative positions of the retaining ring 4 and the loading table 1 in the horizontal and vertical directions in real time to ensure accurate alignment between the two and avoid corner wear or uneven polishing of the glass substrate 3 caused by misalignment. The setting of the lifting assembly 2 enables the glass substrate 3 to smoothly enter and exit the accommodation hole 401, reducing mechanical shock and lowering the installation difficulty. At the same time, the matching structure of the retaining ring 4 and the loading table 1 is reasonably designed, which can effectively prevent the risk of the glass substrate 3 slipping during the polishing process on the premise of ensuring stable gap control. This device not only improves the installation efficiency and positioning accuracy of the glass substrate 3, but also significantly reduces the probability of substrate damage, thereby improving the yield and production efficiency of the chemical mechanical polishing process, and is particularly suitable for the high-precision polishing requirements of large-size square glass substrates 3.

[0043] It should be noted that the existing polishing head generally includes a carrier with an accommodation cavity, a retaining ring 4 connected to the bottom of the carrier, and an elastic membrane assembly disposed in the accommodation cavity. The carrier is used to carry the lifting of each component and transmit gas pressure and motor torque. The elastic membrane assembly realizes the pressurization of the glass substrate 3 through the expansion of the air chamber. The substrate retaining ring 4 holds the glass substrate 3 during the polishing process of the glass substrate 3, prevents the glass substrate 3 from popping out of the retaining ring 4 during the polishing process, and at the same time ensures the positioning accuracy of the glass substrate 3, prompting the glass substrate 3 to remain stable to meet the requirement of the surface planarization of the glass substrate 3.

[0044] It should be noted that the relative positions in the horizontal direction and the up and down direction mean that the retaining ring 4 and the loading table 1 not only need to correspond up and down, but also need to be in a parallel state to avoid damage during the assembly process of the glass substrate 3.

[0045] As a specific implementation manner of the detection assembly 5, the detection assembly 5 includes optical marking points and a vision detection module, and also includes an image processing module and a position adjustment module connected to the retaining ring 4. The retaining ring 4 and the loading table 1 are respectively provided with optical marking points. The vision detection system (such as a CCD camera or a laser sensor) is used to monitor the position of the glass substrate 3 in real time. The image processing module is used to analyze the alignment situation between the glass substrate 3 and the retaining ring 4, and automatically adjust the position of the retaining ring 4 through the position adjustment module to ensure accurate alignment.

[0046] In some embodiments, please refer to Figure 1, the detection component 5 includes a controller, a detector, and an adjuster; the detector is disposed on the holding ring 4 and is communicatively connected to the controller. The detector is used to detect the relative positions of the holding ring 4 and the loading table 1 in the horizontal direction and the vertical and horizontal directions; the adjuster is communicatively connected to the controller and is connected to the holding ring 4. The adjuster is used to adjust the correspondence between the holding ring 4 and the loading table 1 in the horizontal direction and the vertical and horizontal directions.

[0047] The detector collects the position data of the holding ring 4 in the horizontal direction and the vertical direction in real time and transmits it to the controller. After analysis, the controller drives the adjuster to perform precise position compensation to ensure that the holding ring 4 and the loading table 1 always maintain the best alignment state. This embodiment effectively solves the problem of position deviation caused by the accumulation of mechanical errors in the traditional installation method, can automatically compensate for the small displacements during the operation of the equipment, significantly improves the installation and positioning accuracy of the glass substrate 3, avoids the corner wear and uneven polishing of the glass substrate 3 caused by inaccurate alignment, reduces the frequency of manual intervention at the same time, improves the production efficiency and product yield, and is particularly suitable for the polishing process of large-size square glass substrates 3 with strict requirements for position accuracy.

[0048] Optionally, the adjuster can be a drive module of the polishing equipment. The drive module is connected to the polishing head and is used to control the position of the polishing head. The controller can be a control module of the polishing equipment.

[0049] Optionally, the drive module includes a telescopic driver or a lead screw, and can also include a rotary motor, so that the holding ring 4 can rotate around its own axis and move in the vertical and horizontal planes.

[0050] In some embodiments, please refer to Figure 1 , the loading table 1 has an inclined detection slope 101. There are multiple detectors. The multiple detectors are at least distributed on two adjacent side plates of the holding ring 4. Among them, at least one side plate of the holding ring 4 is provided with multiple detectors. The detectors are used to detect the distance between the holding ring 4 and the detection slope 101.

[0051] A plurality of detectors are arranged on the adjacent side plates of the retaining ring 4, and with the unique structure of the tilt detection bevel 101, when the retaining ring 4 deflects angularly, the plurality of sensors distributed on the same side can detect the difference displacement (the distances between the plurality of detectors and the detection bevel 101 are different), and the deflection angle can be accurately derived by calculating the displacement difference, thereby realizing automatic angle correction. At the same time, the detectors of the adjacent two side plates can independently detect the spacing offset in each direction, and accurately judge and correct the horizontal displacement of the retaining ring 4 by real-time comparison with the preset center position reference value. This scheme integrates the angle detection and distance detection functions into the same detection component 5, and through the closed-loop feedback control mechanism, the retaining ring 4 can automatically adjust the positioning, ensuring that the retaining ring 4 and the glass substrate 3 are always in the precise center position, completely solving the technical problem of the difficulty in taking into account the angle and position deviation in the traditional installation method, improving the installation positioning accuracy, significantly reducing the risk of edge and corner damage of the glass substrate 3 during the polishing process, greatly improving the production yield and process stability, and providing a reliable technical guarantee for the high-precision polishing of large-size square glass substrates 3.

[0052] It should be noted that the side plate refers to the plate surface of the loading platform 1 that forms the installation cavity 102 .

[0053] Alternatively, the detector may be located at the bottom or outer wall of the side panel.

[0054] Optionally, the detector is a displacement sensor.

[0055] In some embodiments, see Figure 1 The top of the loading platform 1 also has an adjustment slope, the inner side of the adjustment slope is tilted downward and connected to the installation cavity 102.

[0056] This embodiment realizes the dual functions of automatic centering and precise positioning of the glass substrate 3 by setting an adjustment bevel with a downward inner side on the top of the loading platform 1. The adjustment bevel allows the glass substrate 3 to automatically slide to the preset center position along the bevel with the help of gravity if the position is offset during initial placement, which significantly improves the accuracy and efficiency of initial positioning. At the same time, the adjustment bevel works in conjunction with the detection component 5 of the retaining ring 4 to provide a reliable centering positioning reference for the system. The relative position relationship between the retaining ring 4 and the adjustment bevel is monitored in real time by the detection component 5, so that the positioning deviation can be accurately judged and corrected. This innovative combination of the bevel guide structure and the detection system not only solves the problem of inaccurate initial positioning of the substrate in the traditional loading method, but also realizes position monitoring and automatic correction throughout the process, ensuring that the glass substrate 3 always maintains precise centering during the entire loading process, greatly reducing the risk of damage to the corners of the substrate caused by positioning deviation, and improving the stability of the polishing process and the product yield, which is particularly suitable for the high-precision polishing requirements of large-sized glass substrates 3.

[0057] In some embodiments, referring to Figure 8 , the glass substrate 3 mounting device further includes an air-floating nozzle 6 and a pressure sensor disposed in the mounting cavity 102. The air-floating nozzle 6 is used to form an air film at the bottom of the glass substrate 3, and the pressure sensor is used to monitor the air film pressure below the glass substrate 3.

[0058] The air-floating nozzle 6 forms a uniform air film at the bottom of the glass substrate 3, keeping the glass substrate 3 in a horizontal posture in a suspended state, effectively eliminating the frictional resistance and positioning deviation brought by the traditional mechanical contact method. The pressure sensor monitors the air film pressure in real time, accurately senses the spatial position and levelness of the substrate through the air pressure change, and provides high-precision feedback data for position adjustment. The coordinated cooperation of this air-floating suspension module and the detection component 5 not only greatly reduces the risk of mechanical damage to the glass substrate 3 during installation, but also ensures the smooth descent and precise positioning of the glass substrate 3 through dynamic air flow regulation, effectively improving the installation accuracy, and at the same time significantly improving the production efficiency and product yield.

[0059] Specifically, the air-floating nozzle 6 is connected to an external air source.

[0060] In some embodiments, not shown in the figure, the glass substrate 3 mounting device further includes shock dampers disposed at the bottom and / or outer wall of the retaining ring 4.

[0061] The shock dampers significantly reduce the risk of rigid collision between the retaining ring 4 and the glass substrate 3 by absorbing and buffering mechanical vibration energy, especially having an excellent inhibitory effect on the low-frequency vibration generated during the polishing of large-size glass substrates 3. This shock-absorbing structure can not only protect the corners of the glass substrate 3 from impact damage, but also maintain the stability of the polishing process, ensure polishing uniformity, and at the same time extend the service life of key components such as the retaining ring 4. Combined with the real-time monitoring function of the detection component 5, a complete vibration protection system is formed, enabling the device to still operate with high precision under high-speed polishing conditions, greatly improving the product yield and process reliability, and being particularly suitable for the polishing process of precision glass substrates 3 sensitive to vibration.

[0062] Optionally, the shock damper is an air spring or a hydraulic buffer.

[0063] Optionally, the shock dampers are evenly distributed along the circumferential direction of the retaining ring.

[0064] In some embodiments, referring to Figure 6 , an elastic buffer pad 403 is provided on the inner wall of the retaining ring 4, and the elastic buffer pad 403 is used to contact the glass substrate 3.

[0065] The elastic buffer pad 403 forms a flexible contact with the edge of the glass substrate 3, which can not only provide a stable clamping force, but also absorb the vibration and impact energy during the polishing process, significantly reducing the risk of mechanical damage to the corners of the glass substrate 3. The elastic buffer pad 403 has self - adaptability and can automatically adjust the contact pressure according to glass substrates 3 of different sizes, ensuring uniform distribution of the clamping force and avoiding substrate breakage caused by local stress concentration. At the same time, the elastic buffer pad 403 can also compensate for the tiny gap between the retaining ring 4 and the glass substrate 3, preventing secondary pollution caused by the infiltration of the polishing liquid, protecting the integrity of the glass substrate 3, and improving the stability of the polishing process and the product yield.

[0066] Optionally, the elastic buffer pad 403 is a hemispherical protrusion, and a plurality of them are arranged at intervals along the circumference of the retaining ring 4.

[0067] Optionally, the elastic buffer pad 403 is made of a highly elastic composite material, such as polyurethane or rubber material.

[0068] In some embodiments, refer to Figure 7 , the retaining ring 4 includes a plurality of limiting strips 402 that are sequentially distributed at an angle. The plurality of limiting strips 402 enclose a receiving hole 401. Each limiting strip 402 is connected to a corresponding driving module. The driving module is used to adjust the position of the limiting strip 402, thereby adjusting the size of the receiving hole 401. The glass substrate 3 mounting device further includes a controller and a rangefinder disposed on the retaining ring 4. The driving module and the rangefinder are respectively communicatively connected to the controller. The rangefinder is used to detect the distance between the limiting strip 402 and the glass substrate 3.

[0069] The plurality of limiting strips 402 are independently controlled by the driving module. According to the distance data real - time feedback by the rangefinder, the size of the receiving hole 401 can be dynamically adjusted, so that the retaining ring 4 and the edge of the glass substrate 3 always maintain an optimal fitting gap. This modular adjustment method not only solves the problem that the traditional fixed retaining ring 4 is difficult to adapt to substrates of multiple specifications, but also can automatically compensate for the dimensional changes caused by processing errors and thermal deformations, ensuring uniform distribution of the clamping force. The controller precisely coordinates the displacement amounts of the respective limiting strips 402 through a closed - loop feedback system, effectively eliminating the risks of glass substrate 3 offset and angular deflection, and greatly improving the stability and yield of the polishing process. This solution is particularly suitable for the production requirements of multi - variety and high - precision glass substrates 3, significantly enhancing the versatility and intelligent level of the equipment.

[0070] It should be noted that this embodiment is mainly for fine - tuning of glass substrates 3 with relatively small size differences within a certain range, such as glass substrates with a size difference less than 5 mm.

[0071] In some embodiments, not shown in the figures, the inner circumferential surface of the retaining ring 4 is provided with a plurality of air pressure adjustment holes. The glass substrate 3 mounting device further includes a fixing assembly, and the fixing assembly includes a controller, a pressure sensor 7, and a pressure regulating mechanism. The pressure sensor 7 is disposed on the loading table 1 for detecting the weight of the glass substrate 3 and is communicatively connected to the controller. The pressure regulating mechanism includes an air flow pipe inserted into the air pressure adjustment hole, and a regulating valve and a delivery pump disposed on the air flow pipe. The delivery pump and the regulating valve are respectively communicatively connected to the controller.

[0072] The pressure sensor 7 detects the weight data of the glass substrate 3 in real time and transmits it to the controller. The controller intelligently adjusts the air flow pressure and flow rate of each air pressure adjustment hole according to the weight information, and precisely controls the air pressure output of the air flow pipe through the pressure regulating mechanism, so as to form a dynamically distributed air cushion with uniform distribution on the inner circumferential surface of the retaining ring 4. This non-contact fixing method completely eliminates the problem of edge stress concentration of the glass substrate 3 caused by traditional mechanical clamping. The multi-point layout of the air pressure adjustment holes can automatically optimize the pressure distribution according to the size and weight of the glass substrate 3, which can not only ensure the stable positioning of the glass substrate 3, but also avoid micro-damage caused by local overpressure. The coordinated operation of the delivery pump and the regulating valve realizes the rapid response and precise control of the air pressure, enabling the system to adapt to different specifications of the glass substrate 3, greatly improving the versatility and process stability of the equipment. This technology is particularly suitable for the high-precision polishing process of ultra-thin and large-size glass substrates 3, significantly reducing the product breakage rate while ensuring the positioning accuracy, and providing a reliable guarantee for the advanced packaging process.

[0073] In some embodiments, not shown in the figures, the lifting assembly 2 includes a lead screw and a lifting plate connected to the lead screw, and further includes a shock absorber disposed on the lead screw.

[0074] The structure of the lead screw driving in cooperation with the lifting plate ensures high-precision displacement control in the vertical direction, and the shock absorber integrated on the lead screw effectively absorbs the mechanical vibration and impact energy generated during the transmission process, so that the glass substrate 3 always maintains a stable posture during the lifting process. This shock absorption design not only eliminates the common jitter problem of traditional lifting mechanisms, but also buffers the inertial impact during start and stop, avoiding micro-displacement or collision damage of the substrate caused by sudden acceleration and deceleration. The coordinated action of the shock absorber and the precision lead screw enables the system to have both high rigidity and good buffering characteristics, ensuring both the repeat accuracy of lifting and positioning and extending the service life of the transmission components.

[0075] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A glass substrate mounting device, characterized in that, Comprising: A retaining ring, which is provided with a receiving hole adapted to a glass substrate, and the receiving hole is used for clearance fit with the glass substrate; A loading table, which is arranged below the retaining ring, and the top of the loading table is provided with a mounting cavity with a rectangular cross-section; A lifting assembly, which is arranged in the mounting cavity, and the lifting assembly is used for controlling the glass substrate to enter and exit the receiving hole; And A detection assembly, which is arranged on the retaining ring, and the detection assembly is used for detecting the relative positions of the retaining ring and the loading table in the horizontal direction and the vertical direction.

2. The glass substrate mounting device according to claim 1, characterized in that, The detection assembly includes: A controller; A detector, which is arranged on the retaining ring and is communicatively connected to the controller, and the detector is used for detecting the relative positions of the retaining ring and the loading table in the horizontal direction and the vertical direction; and An adjuster, which is communicatively connected to the controller and is connected to the retaining ring, and the adjuster is used for adjusting the correspondence between the retaining ring and the loading table in the horizontal direction and the vertical direction.

3. The glass substrate mounting device according to claim 2, wherein The top of the loading table has an inclined detection slope, and a plurality of the detectors are provided. The plurality of detectors are at least distributed on two adjacent side plates of the retaining ring. Among them, at least one side plate of the retaining ring is provided with a plurality of the detectors, and the detectors are used for detecting the distance between the retaining ring and the detection slope.

4. The glass substrate mounting device according to claim 1, wherein The top of the loading table also has an adjustment slope, and the inner side of the adjustment slope inclines downward and communicates with the mounting cavity.

5. The glass substrate mounting device according to claim 1, wherein The glass substrate mounting device further includes an air floating nozzle and a pressure sensor arranged in the mounting cavity. The air floating nozzle is used for forming an air film at the bottom of the glass substrate, and the pressure sensor is used for monitoring the air film pressure below the glass substrate.

6. The glass substrate mounting device according to claim 1, wherein, The glass substrate mounting device further includes shock damping devices arranged at the bottom and / or the outer wall of the retaining ring.

7. The glass substrate mounting device according to claim 1, wherein, An elastic buffer pad is arranged on the inner wall of the retaining ring, and the elastic buffer pad is used for contacting the glass substrate.

8. The glass substrate mounting device according to claim 1, wherein, The retaining ring includes a plurality of limiting strips sequentially distributed at an angle. The plurality of limiting strips enclose to form the receiving hole. Each limiting strip is connected with a corresponding driving module. The driving module is used for adjusting the position of the limiting strip, so as to adjust the size of the receiving hole. The glass substrate mounting device further includes a controller and a rangefinder arranged on the retaining ring. The driving module and the rangefinder are respectively communicatively connected to the controller, and the rangefinder is used for detecting the distance between the limiting strip and the glass substrate.

9. The glass substrate mounting device according to claim 1, characterized in that, A plurality of air pressure adjustment holes are arranged on the inner peripheral surface of the retaining ring. The glass substrate mounting device further includes a fixing assembly, and the fixing assembly includes: A controller; A pressure sensor, which is arranged on the loading table, is used for detecting the weight of the glass substrate, and is communicatively connected to the controller; and A pressure regulating mechanism, which includes an air flow pipe inserted into the air pressure adjustment hole, and a regulating valve and a delivery pump arranged on the air flow pipe. The delivery pump and the regulating valve are respectively communicatively connected to the controller.

10. The glass substrate mounting device according to claim 1, characterized in that, The lifting assembly includes a lead screw and a lifting plate connected to the lead screw, and further includes a shock absorber arranged on the lead screw.

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