Powder recovery device for polycrystalline silicon processing

Abstract

The invention relates to a powder recovery device for polycrystalline silicon processing. The powder recovery device comprises a recovery box, an external channel I and an external channel II, the upper half section is in butt joint with an external channel I, and the lower half section is in butt joint with an external channel II; a pair of guide frames are distributed on the inner edge of the recycling box in a mirror image mode, a frame type grating is embedded in the guide frames, bolts are arranged on the guide frames in a telescopic movement mode, a linkage module is arranged in the recycling box, and an inner treatment module is arranged on the inner edge of the lower portion of the recycling box. The linkage module is located between the frame type grating and the inner treatment module. According to the powder recovery device for polycrystalline silicon processing, through the synergistic effect of the linkage module and the reciprocating unit, the dredging pad and the hair pad conduct reciprocating type dredging on the frame type grating, accumulated powder is effectively removed, and smooth circulation of a gaseous medium is ensured.

Description

Technical Field

[0001] The present invention belongs to the technical field of powder recovery, and specifically relates to a powder recovery device for polysilicon processing. Background Art

[0002] Polysilicon processing is an important link in the semiconductor and photovoltaic industries, involving processes such as silicon material crushing, grinding, and screening. During these processes, a large amount of powder particles are generated. These powders not only affect the cleanliness of the processing environment but may also diffuse through gaseous media (such as air or process gas), causing blockages in the filtering devices (such as grilles) inside the equipment, thereby hindering the normal flow of the gaseous media. In the prior art, recovery devices are usually used to collect and process these powders; in common recovery devices, there are grilles, and powders are easily stuck on the grilles, resulting in blocked airflows and affecting the operating efficiency of the equipment; In view of this, a powder recovery device for polysilicon processing is proposed. Summary of the Invention

[0003] The purpose of this part is to outline some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Simplifications or omissions may be made in this part, as well as in the abstract and title of the present application, to avoid obscuring the purpose of this part, the abstract, and the title, but such simplifications or omissions shall not be used to limit the scope of the present invention.

[0004] In view of the following technical problems existing in the prior art: in common recovery devices, there are grilles, and powders are easily stuck on the grilles, resulting in blocked airflows and affecting the operating efficiency of the equipment.

[0005] To solve the above technical problems, the present invention provides the following technical solution: a powder recovery device for polysilicon processing, including a recovery box, an external channel one, and an external channel two; The upper half is docked with the external channel one, and the lower half is docked with the external channel two; The inner edge of the recovery box is mirror - symmetrically distributed with guide frames. The number of installed guide frames is one pair. A frame - type grille is embedded in the guide frames. A bolt is telescopically moved on the guide frames. A linkage module is installed in the recovery box. An internal treatment module is installed on the inner edge of the lower part of the recovery box. The linkage module is located in the middle position between the frame - type grille and the internal treatment module; The linkage module includes a bearing platform, a bearing seat, and a motor one. The bearing platform is fixedly connected to the inner edge of the recovery box. The motor one is arranged on the back of the recovery box. The bearing seat is telescopically moved in the recovery box. The moving part of the motor one extends into the recovery box and is docked with a linkage roller. A linkage ring is hinged on the bearing platform. The outer contour of the linkage ring is fixedly connected with a linkage sleeve.

[0006] As a preferred technical solution of a powder recovery device for polysilicon processing, an irregular disk two is fixedly connected to the upper position of the linkage ring, a groove one is milled in the lower position of the bearing seat, a dredging pad is installed in the upper position of the bearing seat, a reciprocating unit is installed on the bearing platform, and an auxiliary unit is configured at the extreme position of the bearing seat; the irregular disk two and the groove one perform a cooperative rotational motion, a spiral tooth groove is milled on the linkage roller, a tooth groove matching with the linkage roller is milled on the back of the linkage sleeve, and the linkage sleeve and the linkage roller are engaged.

[0007] As a preferred technical solution of a powder recovery device for polysilicon processing, the reciprocating unit includes a moving space, a linkage platform and a fixed seat. The moving space is reserved in the bearing seat, the linkage platform is fixedly connected to the extreme position of the bearing seat, the fixed seat is fixedly connected to the inner edge of the recovery box, a tooth groove pattern is milled on one side of the fixed seat, a linkage frame performs a telescopic motion on the moving space, and a wool pad is installed in the upper position of the linkage frame.

[0008] As a preferred technical solution of a powder recovery device for polysilicon processing, a linkage column is hinged on the linkage platform, an irregular disk one is installed in the upper position of the linkage column, a linkage disk two is installed in the lower position of the linkage column, a tooth groove pattern is milled on the outer contour of the linkage disk two, a linkage disk one is hinged at the end of the linkage platform, a tooth groove pattern is milled on the outer contour of the linkage disk one, the linkage disk one and the linkage disk two are engaged, and the linkage disk one and the fixed seat are engaged.

[0009] As a preferred technical solution of a powder recovery device for polysilicon processing, the auxiliary unit includes a fixed pad and a slope seat. The fixed pad is fixedly connected to the edge of the bearing seat, the slope seat is fixedly connected to the edge of the guide frame, a telescopic column performs a telescopic motion on the fixed pad, a shaking bead is installed in the upper position of the telescopic column, and a round pad is installed in the lower position of the telescopic column.

[0010] As a preferred technical solution of a powder recovery device for polysilicon processing, a first elastic member is installed at the middle position between the round pad and the fixed pad, the first elastic member surrounds the telescopic column, and a poking column is installed outside the part of the telescopic column that abuts against the shaking bead.

[0011] As a preferred technical solution of a powder recovery device for polysilicon processing, the internal treatment module includes an inner empty seat and a collecting hopper. The inner empty seat is fixedly connected to the inner edge of the lower position of the recovery box, the collecting hopper is fixedly connected to the edge position of the bearing seat, the number of installed collecting hoppers is a pair, a U-shaped channel is connected between the pair of collecting hoppers, and a drainer is installed on the back of the inner empty seat.

[0012] As an optimal technical solution for a powder recovery device for polysilicon processing, the diverter is docked with an arc-shaped channel on the outside, the arc-shaped channel is docked with one of the collecting buckets, the diverter is docked with a built-in channel at the part facing the inner empty seat, the built-in channel extends into the inner empty seat, an anti-overflow unit is installed at the upper corner of the inner empty seat, and a mixing unit is hinged in the inner empty seat.

[0013] As an optimal technical solution for a powder recovery device for polysilicon processing, the mixing unit includes a mixing rack, a transfer column and motor 2. Motor 2 is arranged on the side of the inner empty seat. The movable part of motor 2 extends into the inner empty seat and is docked with the transfer column. A mixing rack is installed outside the transfer column.

[0014] As an optimal technical solution for a powder recovery device for polysilicon processing, the anti-overflow unit includes an outer shell and a dense grille, the outer shell is docked on an inner empty seat, the peripheral wall of the outer shell is milled with an L-groove, the inner edge of the outer shell is fixedly connected with a fixed ring, the inner edge of the outer shell is telescopically movable with a moving ring, the moving ring is located above the fixed ring, and an elastic member 2 is installed in the middle position between the moving ring and the fixed ring, the dense grille is embedded in the outer shell, and the outer contour of the dense grille is provided with a protrusion.

[0015] Beneficial effects of the present invention: 1. The powder recovery device for polysilicon processing uses the synergistic effect of the linkage module and the reciprocating unit. The dredging pad and the wool pad dredge the frame grid in a reciprocating manner, effectively removing the accumulated powder and ensuring the smooth flow of the gaseous medium. 2. This powder recovery device for polysilicon processing relies on the auxiliary unit through the design of telescopic columns, shaking beads and slope seats. It uses the elastic force and inertia of the elastic member to generate force between the shaking beads and the frame grid, further improving the dredging efficiency and separating the powder particles. 3. The powder recovery device for polysilicon processing relies on the internal management module to introduce the separated powder into the liquid in the inner space through the collecting bucket, arc channel and built-in channel. The liquid is contained after contact with the powder to prevent the powder from spreading. 4. The powder recovery device for polysilicon processing relies on the mixing unit through the rotary motion of the mixing frame and motor 2 to make the liquid and powder fully contact, thereby enhancing the powder containment effect; 5. The powder recovery device for polysilicon processing relies on the dense grid of the anti-overflow unit to perform secondary isolation on the small amount of powder carried by the gaseous medium overflowing from the liquid, reducing powder overflow and ensuring the recovery effect. 6. The powder recovery device for polysilicon processing is designed with a detachable dense grid based on the anti-overflow unit. Through the cooperation of the protrusion, L groove and elastic parts, the grid is easy to remove and maintain, thus extending the service life of the equipment.

[0016] Other features and advantages of the present invention will be set forth in the following description, and in part will be obvious from the description, or may be learned by practice of the present invention. The objectives and other advantages of the present invention may be realized and attained by the structure particularly pointed out in the specification and the drawings. Brief Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings may be obtained based on these drawings. Among them: Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0018] Figure 2 It is a schematic diagram after the door panel of the present invention is opened.

[0019] Figure 3 It is based on the present invention Figure 2 Semi-sectioned schematic diagram.

[0020] Figure 4 It is based on the present invention Figure 3 Schematic diagram of the section of the linkage ring part.

[0021] Figure 5 It is a schematic diagram of the auxiliary unit of the present invention.

[0022] Figure 6 It is a schematic diagram of the collecting hopper of the present invention.

[0023] Figure 7 It is a schematic diagram of the section of the inner empty seat of the present invention.

[0024] Figure 8 It is a schematic diagram of the section of the anti-overflow unit of the present invention.

[0025] Figure 9 It is a schematic diagram of the outer shell of the present invention.

[0026] Figure 10 It is a schematic diagram of the fixed seat of the present invention.

[0027] Figure 11 It is a schematic diagram of the irregular disk II of the present invention.

[0028] Reference Signs: 100, recycling bin; 101, external channel 1; 102, external channel 2; 103, guide frame; 104, bolt; 105, frame grille; 200, linkage module; 201, carrier platform; 202, linkage ring; 203, linkage sleeve; 204, reciprocating unit; 205, moving space; 206, felt pad; 207, linkage platform; 208, irregular disk 1; 209, linkage disk 1; 210, linkage disk 2; 211, linkage column; 212, linkage frame; 213, fixed seat; 214, linkage roller; 215, auxiliary unit; 216, fixed pad; 217, puncture column; 218, shaking bead; 219, round pad; 220, telescopic column; 221, elastic part 1; 222, slope seat; 223, irregular disk 2; 224, groove 1; 225, dredging pad; 226, bearing seat; 227, motor 1; 300, internal treatment module; 301, internally hollow seat; 302, arc channel; 303, collecting hopper; 304, U-shaped channel; 305, drainer; 306, internal channel; 307, homogenizing unit; 308, homogenizing frame; 309, transfer column; 310, motor 2; 311, anti-overflow unit; 312, outer shell; 313, dense grille; 314, protrusion; 315, moving ring; 316, elastic part 2; 317, fixed ring; 318, L-shaped groove. Detailed Implementation Manner

[0029] To make the above objects, features, and advantages of the present invention more obvious and understandable, the following will describe the detailed implementation manner of the present invention with reference to the accompanying drawings of the specification.

[0030] In the following description, many specific details are set forth to fully understand the present invention. However, the present invention can also be implemented in other ways different from this description. Those skilled in the art can make similar generalizations without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0031] Secondly, the so-called "one embodiment" or "embodiment" herein refers to specific features, structures, or characteristics that can be included in at least one implementation manner of the present invention. The "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor is it an independent or selectively mutually exclusive embodiment with other embodiments.

[0032] Furthermore, the present invention is described in detail with reference to the schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional views showing the device structures will be enlarged locally out of the general proportion, and the schematic diagrams are only examples, which should not limit the protection scope of the present invention herein. In addition, in actual production, three-dimensional spatial dimensions including length, width, and depth should be included.

[0033] Embodiment, refer to Figure 1 and2 , a powder recovery device for polysilicon processing, comprising a recovery box 100, an external channel one 101 and an external channel two 102; The upper half of the 100 is docked with an external channel one 101, and the lower half of the 100 is docked with an external channel two 102; Guide frames 103 are distributed in a mirror image along the inner edge of the recovery box 100. The number of installed guide frames 103 is a pair. A frame grille 105 is embedded in the guide frames 103. A bolt 104 moves telescopically on the guide frames 103. A linkage module 200 is installed in the recovery box 100. An internal treatment module 300 is installed along the inner edge at the lower position of the recovery box 100. The linkage module 200 is located in the middle of the frame grille 105 and the internal treatment module 300.

[0034] Refer to Figure 2 , 3 , 4 and 11, the linkage module 200 includes a carrier table 201, a carrier seat 226 and a motor one 227. The carrier table 201 is fixedly connected to the inner edge of the recovery box 100. The motor one 227 is arranged on the back of the recovery box 100. The carrier seat 226 moves telescopically in the recovery box 100, and guides can be configured for its stable telescopic movement. The moving part of the motor one 227 extends into the recovery box 100 and is docked with a linkage roller 214. A linkage ring 202 is hinged on the carrier table 201. The outer contour of the linkage ring 202 is fixedly connected to a linkage sleeve 203. An irregular disk two 223 is fixedly connected to the upper position of the linkage ring 202. A groove one 224 is milled at the lower position of the carrier seat 226. A dredging pad 225 is installed at the upper position of the carrier seat 226. A reciprocating unit 204 is installed on the carrier table 201. An auxiliary unit 215 is configured at the extreme position of the carrier seat 226; the irregular disk two 223 and the groove one 224 perform a combined rotational movement. A spiral tooth groove is milled on the linkage roller 214. A tooth groove matching the linkage roller 214 is milled on the back of the linkage sleeve 203. The linkage sleeve 203 and the linkage roller 214 are engaged.

[0035] Through the above content, it can be realized that when the powder gets stuck on the frame grille 105 and affects the flow of the gaseous medium, the motor one 227 is driven. Under the action of the engagement, the linkage roller 214 makes the linkage sleeve 203 perform a rotational movement. The linkage ring 202 moves together with the linkage sleeve 203. The linkage ring 202 drives the irregular disk two 223. The irregular disk two 223 drives the groove one 224 and the carrier seat 226 to perform a telescopic movement. The carrier seat 226 drives the dredging pad 225 to dredge the frame grille 105, so that the gaseous medium can flow normally.

[0036] Refer to Figure 4 and 10, the reciprocating unit 204 includes a movable space 205, a linkage platform 207 and a fixed seat 213. The movable space 205 is reserved in the bearing seat 226. The linkage platform 207 is fixedly connected to the extreme position of the bearing seat 226. The fixed seat 213 is fixedly connected to the inner edge of the recycling box 100. A tooth groove pattern is milled on one side of the fixed seat 213. A linkage frame 212 moves telescopically on the movable space 205. A wool pad 206 is installed above the linkage frame 212. A linkage column 211 is hinged on the linkage platform 207. An irregular disk one 208 is installed above the linkage column 211. A linkage disk two 210 is installed below the linkage column 211. A tooth groove pattern is milled on the outer contour of the linkage disk two 210. The end of the linkage platform 207 is hinged with a linkage disk one 209. A tooth groove pattern is milled on the outer contour of the linkage disk one 209. The linkage disk one 209 meshes with the linkage disk two 210, and the linkage disk one 209 meshes with the fixed seat 213.

[0037] When the dredging pad 225 reciprocates against the frame grille 105, it dredges to ensure that the frame grille 105 can be better dredged; Through the above, it can be realized that the bearing seat 226 drives the linkage platform 207 and the linkage disk one 209 to move together. The linkage disk one 209 meshes with the fixed seat 213. The linkage disk one 209 acts on the linkage disk two 210. The irregular disk one 208 moves together with the linkage disk two 210. Under its contour shape, the irregular disk one 208 will drive the linkage frame 212 to reciprocate telescopically. The linkage frame 212 drives the wool pad 206, and the reciprocating telescopic movement of the wool pad 206 further improves the all-round dredging of the frame grille 105.

[0038] Refer to Figure 3 and 5 , the auxiliary unit 215 includes a fixed pad 216 and a slope seat 222. The fixed pad 216 is fixedly connected to the edge of the bearing seat 226. The slope seat 222 is fixedly connected to the edge of the guide frame 103. A telescopic column 220 moves telescopically on the fixed pad 216. A shaking bead 218 is installed above the telescopic column 220. A round pad 219 is installed below the telescopic column 220. An elastic member one 221 is installed at the middle position between the round pad 219 and the fixed pad 216. The elastic member one 221 surrounds the telescopic column 220. A puncture column 217 is installed outside the part of the telescopic column 220 that abuts against the shaking bead 218.

[0039] The following can be achieved: when the bearing seat 226 is in motion, relying on the fixed cushion 216, the telescopic column 220 and the punching column 217 move together. The punching column 217 touches against the slope seat 222. Under the action of the slope wall of the slope seat 222, the telescopic column 220 and the round cushion 219 move towards the direction of the linkage ring 202. At this moment, the first elastic member 221 expands. When the punching column 217 is no longer corresponding to the slope seat 222, the punching column 217 is no longer restricted. Under the action of the first elastic member 221, the telescopic column 220 and the shaking bead 218 move towards the position of the frame grille 105. Under the action of inertia, the shaking bead 218 touches against the frame grille 105 and generates a force, improving the dredging effect on the frame grille 105.

[0040] Referring to Figure 3 , 6 Referring to FIGS. 6 and 7, the internal treatment module 300 includes an internal empty seat 301 and a collecting hopper 303. The internal empty seat 301 is fixedly connected to the inner edge of the lower position of the recycling box 100. The collecting hopper 303 is fixedly connected to the edge position of the bearing seat 226. The number of installed collecting hoppers 303 is a pair. A U-shaped channel 304 is connected between the pair of collecting hoppers 303. A drainer 305 is installed on the back of the internal empty seat 301. An arc-shaped channel 302 is connected to the outside of the drainer 305. The arc-shaped channel 302 is connected to one of the collecting hoppers 303. A built-in channel 306 is connected to the part of the drainer 305 facing the internal empty seat 301. The built-in channel 306 extends into the internal empty seat 301. An anti-overflow unit 311 is installed at the upper corner of the internal empty seat 301. A mixing unit 307 is hinged in the internal empty seat 301.

[0041] The following can be achieved: when the dredging pad 225 and the wool pad 206 act on the frame grille 105 for dredging treatment, the drainer 305 operates. Under the action of the arc-shaped channel 302, the substances in the collecting hopper 303 can be transferred to the position of the built-in channel 306. When the bearing seat 226 is in motion, it will drive the collecting hopper 303 together. The powder separated by the dredging of the dredging pad 225 and the wool pad 206 will be introduced into the collecting hopper 303 and enter the internal empty seat 301 under the action of the arc-shaped channel 302 and the built-in channel 306. When the powder enters the liquid, it can achieve the effect of preventing overflow and achieve the effect of containment.

[0042] Referring to Figure 7 , the mixing unit 307 includes a mixing frame 308, a transfer column 309 and a second motor 310. The second motor 310 is arranged on the side of the internal empty seat 301. The movable part of the second motor 310 extends into the internal empty seat 301 and is connected to the transfer column 309. A mixing frame 308 is installed outside the transfer column 309.

[0043] The following can be achieved: the second motor 310 drives the transfer column 309 to perform a revolving motion, and the mixing frame 308 can better contact the liquid and the powder, strengthening the containment effect on the powder.

[0044] Reference Figure 6 、 8 9. The anti-overflow unit 311 includes an outer shell 312 and a dense grille 313. The outer shell 312 is docked on the inner empty seat 301. The peripheral wall of the outer shell 312 is milled with an L-groove 318. The inner edge of the outer shell 312 is fixedly connected with a fixed ring 317. The inner edge of the outer shell 312 is provided with a moving ring 315 for telescopic movement. The moving ring 315 is located above the fixed ring 317. An elastic member 316 is installed in the middle position between the moving ring 315 and the fixed ring 317. The dense grille 313 is embedded in the outer shell 312, and a protrusion 314 is installed on the outer contour of the dense grille 313.

[0045] The above content can achieve the following: after the gaseous medium and powder enter the liquid in the inner seat 301, the gaseous medium will be discharged from the liquid and carry some powder to the position of the dense grille 313. The dense grille 313 can play a secondary barrier effect. After a long period of use, the dense grille 313 is rotated so that the protrusion 314 is facing the vertical section of the L groove 318. Under the action of the elastic member 316, the dense grille 313 can be assisted to be removed and subsequent maintenance work can be carried out.

[0046] Working principle: Motor 1 227 drives linkage roller 214 to perform rotary motion, linkage roller 214 drives linkage sleeve 203, linkage ring 202 relies on irregular disk 223 to drive bearing seat 226 to perform telescopic motion, dredging pad 225 dredges frame grille 105 in a reciprocating motion, and under the action of poking post 217 and slope seat 222, the shaking bead 218 generates force against frame grille 105, so that the powder particles in frame grille 105 can be separated from it; The collecting hopper 303 introduces the separated powder into the inner space 301. After the liquid in the inner space 301 contacts the powder particles, it can contain them. Under the action of the mixing rack 308, the liquid and powder particles can be fully contacted. The dense grid 313 performs secondary processing on part of the powder overflowing from the liquid, and can quickly maintain it under the action of the protrusion 314, the second elastic member 316 and the L-groove 318.

[0047] It will be understood that in the development of any actual embodiment, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but for those of ordinary skill having the benefit of this disclosure, the development effort will be a routine task of design, fabrication, and production without undue experimentation.

[0048] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A powder recovery device for polysilicon processing, characterized in that: It includes a recycling bin, an external channel 1 and an external channel 2; The upper half is docked with an external channel 1, and the lower half is docked with an external channel 2; On the inner edge of the recycling bin, guide frames are distributed in a mirror image. The number of installed guide frames is a pair. A frame grille is embedded in the guide frames. Bolts are movably arranged on the guide frames. A linkage module is installed in the recycling bin. An internal treatment module is installed on the inner edge of the lower part of the recycling bin. The linkage module is located in the middle of the frame grille and the internal treatment module; The linkage module includes a bearing platform, a bearing seat and a motor 1. The bearing platform is fixedly connected to the inner edge of the recycling bin. The motor 1 is arranged on the back of the recycling bin. The bearing seat is movably arranged in the recycling bin. The moving part of the motor 1 extends into the recycling bin and is docked with a linkage roller. A linkage ring is hinged on the bearing platform. The outer contour of the linkage ring is fixedly connected with a linkage sleeve.

2. The powder recovery device for polysilicon processing according to claim 1, characterized in that: An irregular disk 2 is fixedly connected to the upper part of the linkage ring. A groove 1 is milled on the lower part of the bearing seat. A dredging pad is installed on the upper part of the bearing seat. A reciprocating unit is installed on the bearing platform. An auxiliary unit is arranged at the extreme position of the bearing seat; The irregular disk 2 and the groove 1 perform a cooperative rotational movement. A spiral tooth groove is milled on the linkage roller. A tooth groove matching the linkage roller is milled on the back of the linkage sleeve. The linkage sleeve and the linkage roller are engaged.

3. The powder recovery device for polysilicon processing according to claim 2, characterized in that: The reciprocating unit includes a moving space, a linkage platform and a fixed seat. The moving space is reserved in the bearing seat. The linkage platform is fixedly connected to the extreme position of the bearing seat. The fixed seat is fixedly connected to the inner edge of the recycling bin. A tooth groove pattern is milled on one side of the fixed seat. A linkage frame is movably arranged on the moving space. A wool pad is installed on the upper part of the linkage frame.

4. The powder recovery device for polysilicon processing according to claim 3, characterized in that: A linkage column is hinged on the linkage platform. An irregular disk 1 is installed on the upper part of the linkage column. A linkage disk 2 is installed on the lower part of the linkage column. A tooth groove pattern is milled on the outer contour of the linkage disk 2. A linkage disk 1 is hinged at the end of the linkage platform. A tooth groove pattern is milled on the outer contour of the linkage disk 1. The linkage disk 1 and the linkage disk 2 are engaged. The linkage disk 1 and the fixed seat are engaged.

5. The powder recovery device for polysilicon processing according to claim 2, wherein: The auxiliary unit includes a fixed pad and a slope seat. The fixed pad is fixedly connected to the edge of the bearing seat. The slope seat is fixedly connected to the edge of the guide frame. A telescopic column is movably arranged on the fixed pad. A shaking bead is installed on the upper part of the telescopic column. A round pad is installed on the lower part of the telescopic column.

6. The powder recovery device for polysilicon processing according to claim 5, wherein: An elastic part 1 is installed in the middle of the round pad and the fixed pad. The elastic part 1 surrounds the telescopic column. A puncture column is installed on the outside of the part of the telescopic column that abuts against the shaking bead.

7. The powder recovery device for polysilicon processing according to claim 1, wherein: The internal treatment module includes an inner empty seat and a collection hopper. The inner empty seat is fixedly connected to the inner edge of the lower part of the recycling bin. The collection hopper is fixedly connected to the edge of the bearing seat. The number of installed collection hoppers is a pair. A U-shaped channel is docked between the pair of collection hoppers. A drainer is installed on the back of the inner empty seat.

8. The powder recovery device for polysilicon processing according to claim 7, wherein: An arc-shaped channel is externally butted with the drainer, the arc-shaped channel is butted with one of the collecting hoppers, an internal channel is butted with the part of the drainer facing the inner empty seat, the internal channel extends into the inner empty seat, an anti-overflow unit is arranged at the upper corner of the inner empty seat, and a mixing unit is hinged in the inner empty seat.

9. The powder recovery device for polysilicon processing according to claim 8, characterized in that: The mixing unit includes a mixing frame, a transfer column and a second motor. The second motor is arranged on the side of the inner empty seat. The moving part of the second motor extends into the inner empty seat and is butted with the transfer column, and the mixing frame is arranged outside the transfer column.

10. The powder recovery device for polysilicon processing according to claim 8, wherein: The anti-overflow unit includes a housing and a dense grille. The housing is butted on the inner empty seat. An L-shaped groove is milled on the peripheral wall of the housing. A fixed ring is fixedly connected to the inner edge of the housing. A moving ring moves telescopically along the inner edge of the housing. The moving ring is located above the fixed ring. An elastic member II is arranged at the middle position between the moving ring and the fixed ring. The dense grille is embedded in the housing, and a protrusion is arranged on the outer contour of the dense grille.

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