Synchronous polishing device for inner wall and outer wall of furnace body in single crystal furnace

Abstract

The invention relates to the technical field of single crystal furnace maintenance, in particular to a synchronous polishing device for inner and outer walls of a furnace body in a single crystal furnace, which comprises an electric workbench, a driving motor and a polishing machine body, the driving motor is fixedly connected to the upper surface of the electric workbench, and the lower end of a fixed plate on the electric workbench is rotatably connected with a rotating plate; a guiding mechanism is installed at the lower end of the rotating plate, a limiting control mechanism is fixedly connected to the lower surface of the rotating plate, an inner wall grinding mechanism is arranged between the guiding mechanism and the limiting control mechanism, and an outer wall grinding mechanism is arranged between the guiding mechanism and the limiting control mechanism. According to the single crystal furnace polishing machine, the two polishing machine bodies are attached to the inner wall and the outer wall of the single crystal furnace at the same time, synchronous polishing can be achieved, the polishing machine bodies act on the inner wall and the outer wall at the same time, time loss of step-by-step operation is reduced, the polishing efficiency is improved, the polishing precision and roughness of the inner wall and the outer wall are kept consistent, and the process difference caused by step-by-step operation is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnace maintenance, and specifically to a device for synchronously polishing the inner and outer walls of the furnace body in a single crystal furnace. Background Art

[0002] The inner wall of the single crystal furnace is directly in contact with the silicon melt and the gas-phase reactants. If the surface is rough, it will have various adverse effects on crystal growth. On the one hand, the rough surface will interfere with the melt flow, making the melt flow state unstable, and thus affecting the uniform deposition of silicon atoms. On the other hand, it will hinder gas diffusion, resulting in uneven distribution of reaction gases in the furnace body, seriously affecting the quality of single crystal silicon. Polishing can make the surface roughness of the inner wall meet the requirements and provide a good environment for crystal growth.

[0003] However, when polishing the inner and outer walls separately during the polishing process, not only is the efficiency low, but it is also difficult to maintain the same polishing accuracy and roughness of the inner and outer walls. It may also lead to process differences due to step-by-step operations. Moreover, when polishing separately, it is difficult to make the polishing components act on the inner and outer walls simultaneously, and step-by-step operations will increase the loss of time and manpower. Summary of the Invention

[0004] The purpose of the present invention is to provide a device for synchronously polishing the inner and outer walls of the furnace body in a single crystal furnace to solve the problems raised in the above background art. To achieve the above purpose, the present invention provides the following technical solution: A device for synchronously polishing the inner and outer walls of the furnace body in a single crystal furnace, including an electric workbench, a driving motor, and a polishing machine body. The driving motor is fixedly connected to the upper surface of the electric workbench. The lower end of the fixed plate on the electric workbench is rotatably connected to a rotating plate. A guiding mechanism is installed at the lower end of the rotating plate. A limiting control mechanism is fixedly connected to the lower surface of the rotating plate. An inner wall polishing mechanism is arranged between the guiding mechanism and the limiting control mechanism. An outer wall polishing mechanism is arranged between the guiding mechanism and the limiting control mechanism. A control locking mechanism is fixedly connected between the inner wall polishing mechanism and the outer wall polishing mechanism.

[0005] Preferably, the guiding mechanism includes a rotating roller. The rotating roller passes through the rotating plate and is fixedly connected to the output shaft of the driving motor. A rotating ring is rotatably connected to the surface of the rotating roller. An L-shaped support rod is hinged to the side of the rotating ring. A hollow roller is sleeved on the surface of the rotating roller. A support rod is rotatably and hingedly connected to the side of the rotating roller. A first connecting rod is hinged to one side of the support rod. An inclined groove is formed on the surface of the rotating roller, and the hollow roller is slidably connected inside the inclined groove at the same time. A second connecting rod is hinged to the surface of the L-shaped support rod. The ends of the L-shaped support rod and the support rod are fixedly connected to the polishing machine body.

[0006] Preferably, the inner wall grinding mechanism includes a first limiting ring sleeved on the surface of the hollow roller. One side of the first limiting ring is hinged with a first connecting rod at the same time. A damping block is fixedly connected to the inner wall of the first limiting ring. A threaded rod is rotatably connected to the side surface of the first limiting ring. One end of the threaded rod is fixedly connected with an extrusion ball. The other end of the threaded rod is fixedly connected with a Z-shaped rod. Two ends of the Z-shaped rod are respectively hinged to both sides at the opening of one side of the first limiting ring. An inclined groove is fixedly connected to the surface of the Z-shaped rod. A sliding rod is fixedly connected to the surface of the hollow roller. The sliding rod is slidably connected inside the inclined groove. A sleeve rod is arranged on the surface of the threaded rod. An inclined surface sliding groove is formed inside the sleeve rod. A spring is installed inside the sleeve rod. A resistance ball is slidably connected between the inside of the sleeve rod and one end of the spring. The resistance ball also slides inside the inclined surface sliding groove.

[0007] Preferably, the limit control mechanism includes a limit sliding groove. The upper end of the limit sliding groove is fixedly connected to the lower surface of the rotating plate. A clamping groove is formed inside the limit sliding groove. A progressive clamping groove is fixedly connected to the surface of the limit sliding groove. The hollow roller is slidably connected to the side surface of the limit sliding groove. One end of the rotating ring is fixedly connected to the surface of the limit sliding groove. The sleeve rod linearly slides inside the limit sliding groove.

[0008] Preferably, the outer wall grinding mechanism includes a second limiting ring sleeved on the surface of the hollow roller. One end of a second connecting rod is hinged to the second limiting ring. A fixed block is fixedly connected to one side of the second limiting ring. An inclined groove slider vertically slides inside the fixed block. A spline rod horizontally slides inside the fixed block. One end of the spline rod is fixedly connected with a conical block. A telescopic spring is arranged between the surface of the spline rod and the inside of the fixed block. A round rod is fixedly connected to the side surface of the spline rod.

[0009] Preferably, the control locking mechanism includes a rectangular limiting sliding sleeve. The bottom end of the rectangular limiting sliding sleeve is fixedly connected to the surface of the first limiting ring. A limiting sliding rod slides inside the rectangular limiting sliding sleeve. The upper end of the limiting sliding rod is fixedly connected to the lower surface of the second limiting ring. A horizontal sliding rod is fixedly connected to the inside of the limiting sliding rod. A pressing plate slides inside the limiting sliding rod. One end of the pressing plate is fixedly connected with an extrusion rod. A return spring is arranged between the pressing plate and the inside of the limiting sliding rod. A first sliding rod slides on the surface of the horizontal sliding rod. A clamping groove one is formed on the surface of the rectangular limiting sliding sleeve. One end of the first sliding rod is fixedly connected with an inclined surface block. The other end of the first sliding rod is fixedly connected with a triangular block.

[0010] In the present invention, by simultaneously fitting two grinding machine bodies to the inner and outer walls of the single crystal furnace, synchronous grinding can be achieved, acting on the inner and outer walls simultaneously, reducing the time loss of step-by-step operation, improving the grinding efficiency, making the grinding accuracy and roughness of the inner and outer walls consistent, and avoiding process differences caused by step-by-step operation.

[0011] In the present invention, the sliding rod 1 drives the triangular block to slide outward and is stuck in the inside of the clamping groove 1, so that the limiting ring 1 and the limiting ring 2 can be stuck at the same time, thereby ensuring the stability of the two grinder bodies and further improving the grinding efficiency.

[0012] In the present invention, the automation of the device can replace manual entry into the narrow furnace body to work, avoiding uneven grinding or missing grinding caused by manual operation. At the same time, manual grinding has risks such as mechanical injury. The automated device can significantly reduce the incidence of safety accidents through remote control or robotic arm operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the three-dimensional appearance of the present invention; Figure 2 This is a schematic diagram of the electric workbench structure when viewed from above; Figure 3 This is a schematic diagram of the internal structure of the electric workbench of the present invention; Figure 4 This is a schematic structural diagram of the guidance mechanism of the present invention; Figure 5 This is a structural schematic diagram of the other side of the guidance mechanism of the present invention; Figure 6 This is an enlarged structural diagram of a limiting ring 1 of the present invention; Figure 7 This is an enlarged structural diagram of the threaded rod of the present invention; Figure 8 This is a schematic diagram of the cross-sectional structure of the sleeve rod of the present invention; Figure 9 Schematic diagram of the structure of the limiting ring 1 and the limiting ring 2 of the present invention; Figure 10 It is a schematic side cross-sectional view of the limit control mechanism of the present invention; Figure 11 This is a schematic diagram of the outer wall grinding mechanism structure of the present invention; Figure 12 This is an enlarged structural diagram of the spline rod of the present invention; Figure 13 This is a schematic diagram of the control locking mechanism structure of the present invention; Figure 14 This is a schematic side sectional view of the rectangular limiting sliding sleeve of the present invention; Figure 15 This is an enlarged structural diagram of the rectangular limiting sleeve of the present invention; Figure 16 This is an enlarged structural diagram of the sliding rod of the present invention.

[0014] In the figure: 1. Electric workbench; 2. Drive motor; 3. Rotating plate; 4. Guiding mechanism; 5. Grinding machine body; 6. Inner wall grinding mechanism; 7. Limit control mechanism; 8. Outer wall grinding mechanism; 9. Control locking mechanism; 41. Rotating roller; 42. Rotating ring; 43. L-shaped support rod; 44. Hollow roller; 45. Support rod; 46. Connecting rod 1; 47. Inclined groove; 48. Connecting rod 2; 61. Limiting ring 1; 62. Damping block; 63. Threaded rod; 64. Squeeze ball; 65. Z-shaped rod; 66. Inclined groove; 67. Sliding rod; 68. Sleeve rod; 69. Inclined slide; 610. Spring; 611. Resistance ball; 71. Limiting slide; 72. Slot; 73. Progressive slot; 81. Limiting ring 2; 82. Fixed block; 83. Inclined groove slider; 84. Spline rod; 85. Conical block; 86. Telescopic spring; 87. Round rod; 91. Rectangular limiting sleeve; 92. Limiting slide rod; 93. Horizontal slide rod; 94. Pressure plate; 95. Extrusion rod; 96. Return spring; 97. Slide rod 1; 98. Slot 1; 99. Inclined block; 910. Triangular block. DETAILED DESCRIPTION

[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0016] See also Figures 1 to 16 The present invention provides a technical solution: a synchronous grinding device for the inner and outer walls of a furnace body in a single crystal furnace, comprising an electric workbench 1, a driving motor 2, and a grinding machine body 5. The driving motor 2 is fixedly connected to the upper surface of the electric workbench 1, and the lower end of the fixed plate on the electric workbench 1 is rotatably connected to a rotating plate 3. The lower end of the rotating plate 3 is installed with a guiding mechanism 4. The lower surface of the rotating plate 3 is fixedly connected to a limit control mechanism 7. An inner wall grinding mechanism 6 is arranged between the guiding mechanism 4 and the limit control mechanism 7. An outer wall grinding mechanism 8 is arranged between the guiding mechanism 4 and the limit control mechanism 7. A control locking mechanism 9 is fixedly connected between the inner wall grinding mechanism 6 and the outer wall grinding mechanism 8.

[0017] The guiding mechanism 4 includes a rotating roller 41. The rotating roller 41 penetrates through the rotating plate 3 and is fixedly connected to the output shaft of the driving motor 2. A rotating ring 42 is rotatably connected to the surface of the rotating roller 41. An L-shaped support rod 43 is hinged to the side surface of the rotating ring 42. A hollow roller 44 is sleeved on the surface of the rotating roller 41. A support rod 45 is rotatably and hingedly connected to the side surface of the rotating roller 41. One side of the support rod 45 is hinged to a first connecting rod 46. When the rotating roller 41 rotates, it drives the inclined groove 47 to rotate simultaneously, driving the hollow roller 44 limited by the limiting chute 71 to slide downward on the surface of the rotating roller 41. When the hollow roller 44 slides downward, it drives the first limiting ring 61 and the second limiting ring 81 to slide downward simultaneously. When the first limiting ring 61 slides downward, it pushes the support rod 45 through the first connecting rod 46. The support rod 45 drives the grinding machine body 5 to expand outward until it fits with the inside of the single crystal furnace. An inclined groove 47 is formed on the surface of the rotating roller 41, and the hollow roller 44 is slidably connected inside the inclined groove 47 at the same time. A second connecting rod 48 is hinged to the surface of the L-shaped support rod 43. The ends of the L-shaped support rod 43 and the support rod 45 are fixedly connected to the grinding machine body 5.

[0018] The inner wall grinding mechanism 6 includes a first limiting ring 61. The first limiting ring 61 is sleeved on the surface of the hollow roller 44. One side of the first limiting ring 61 is simultaneously hinged to a first connecting rod 46. When the first limiting ring 61 slides downward, it pushes the support rod 45 through the first connecting rod 46. The support rod 45 drives the grinding machine body 5 to expand outward until it fits with the inside of the single crystal furnace. A damping block 62 is fixedly connected to the inner wall of the first limiting ring 61. A threaded rod 63 is rotatably connected to the side surface of the first limiting ring 61. One end of the threaded rod 63 is fixedly connected to an extrusion ball 64. The other end of the threaded rod 63 is fixedly connected to a Z-shaped rod 65. Both ends of the Z-shaped rod 65 are hinged to both sides of the opening on one side of the first limiting ring 61. An inclined groove opening 66 is fixedly connected to the surface of the Z-shaped rod 65. A sliding rod 67 is fixedly connected to the surface of the hollow roller 44. The sliding rod 67 is slidably connected inside the inclined groove opening 66. A sleeve rod 68 is arranged on the surface of the threaded rod 63. An inclined surface chute 69 is formed inside the sleeve rod 68. A spring 610 is installed inside the sleeve rod 68. A resistance ball 611 is slidably connected between the inside of the sleeve rod 68 and one end of the spring 610. The resistance ball 611 slides inside the inclined surface chute 69 at the same time. When the Z-shaped rod 65 rotates, it drives the threaded rod 63 to rotate simultaneously. The threaded rod 63 will rotate inside the sleeve rod 68 and move a certain distance into the sleeve rod 68. The threaded rod 63 drives the extrusion ball 64 to move simultaneously. When the extrusion ball 64 moves, it will squeeze the resistance ball 611. After being squeezed, the resistance ball 611 will slide outward inside the inclined surface chute 69. The resistance ball 611 slides into the clamping groove 72, locking the entire first limiting ring 61.

[0019] The limit control mechanism 7 includes a limit chute 71. The upper end of the limit chute 71 is fixedly connected to the lower surface of the rotating plate 3. A clamping groove 72 is formed inside the limit chute 71. A progressive clamping groove 73 is fixedly connected to the surface of the limit chute 71. The hollow roller 44 is slidably connected to the side of the limit chute 71. One end of the rotating ring 42 is fixedly connected to the surface of the limit chute 71. The sleeve rod 68 linearly slides inside the limit chute 71. The driving motor 2 can rotate the roller 41, but cannot drive the rotating plate 3 to rotate. The unactivated rotating plate 3 is in a relatively stationary state, making the limit chute 71 also in a relatively stationary state.

[0020] The outer wall grinding mechanism 8 includes a second limit ring 81. The second limit ring 81 is sleeved on the surface of the hollow roller 44. One end of the second connecting rod 48 is hinged to the second limit ring 81. When the hollow roller 44 moves downward, it simultaneously drives the second limit ring 81 to slide downward. When the second limit ring 81 slides, it pulls the second connecting rod 48. The second connecting rod 48 simultaneously pulls the L-shaped support rod 43. The L-shaped support rod 43 pulls the grinding machine body 5 to rotate inward and fit with the outer wall of the single crystal furnace. One side of the second limit ring 81 is fixedly connected with a fixed block 82. An inclined groove slider 83 is vertically slidably connected inside the fixed block 82. A spline rod 84 is horizontally slidably connected inside the fixed block 82. One end of the spline rod 84 is fixedly connected with a conical block 85. A telescopic spring 86 is arranged between the surface of the spline rod 84 and the inside of the fixed block 82. A round rod 87 is fixedly connected to the side of the spline rod 84. The protruding part at the upper end of the hollow roller 44 will squeeze the inclined groove slider 83. When the inclined groove slider 83 is squeezed, it will squeeze the round rod 87 through its own notch. When the round rod 87 is squeezed, it drives the spline rod 84 to slide outward inside the fixed block 82. When the spline rod 84 slides, it drives the conical block 85 to slide outward and get stuck inside the progressive clamping groove 73. The whole second limit ring 81 is locked by the friction force of the conical block 85.

[0021] The control locking mechanism 9 includes a rectangular limit sliding sleeve 91. The bottom end of the rectangular limit sliding sleeve 91 is fixedly connected to the surface of the first limit ring 61. A limit sliding rod 92 is slidably connected inside the rectangular limit sliding sleeve 91. The upper end of the limit sliding rod 92 is fixedly connected to the lower surface of the second limit ring 81. A transverse sliding rod 93 is fixedly connected inside the limit sliding rod 92. A pressing plate 94 is slidably connected inside the limit sliding rod 92. The lower end of the pressing plate 94 is fixedly connected to a pressing rod 95. A return spring 96 is arranged between the pressing plate 94 and the inside of the limit sliding rod 92. A first sliding rod 97 is slidably connected to the surface of the transverse sliding rod 93. A first slot 98 is formed on the surface of the rectangular limit sliding sleeve 91. The upper end of the first sliding rod 97 is fixedly connected to an inclined surface block 99. The lower end of the first sliding rod 97 is fixedly connected to a triangular block 910. When the inclined slot slider 83 moves downward, it will squeeze the pressing plate 94. When the pressing plate 94 is squeezed, it will drive the pressing rod 95 to slide downward. When the pressing rod 95 slides downward, it will squeeze the inclined surface block 99. When the inclined surface block 99 is squeezed, it will drive the first sliding rod 97 to slide on the surface of the transverse sliding rod 93. When the first sliding rod 97 slides, it will drive the triangular block 910 to slide outward and be stuck inside the first slot 98, so that the first limit ring 61 and the second limit ring 81 can be simultaneously stuck.

[0022] The usage method and advantages of the present invention: For the device for synchronously grinding the inner and outer walls of the furnace body in the single crystal furnace, during use, the working process is as follows: During use, the single crystal furnace to be ground is vertically fixed on the special fixture of the electric workbench 1 to ensure that its axis is aligned with the center of the rotating plate 3, avoiding displacement during the grinding process. Start the drive motor 2. The drive motor 2 drives the rotating roller 41 to rotate, but cannot drive the rotating plate 3 to rotate. The unstarted rotating plate 3 is in a relatively static state, making the limit sliding groove 71 also in a relatively static state. When the rotating roller 41 rotates, it drives the inclined slot 47 to rotate simultaneously, driving the hollow roller 44 limited by the limit sliding groove 71 to slide downward on the surface of the rotating roller 41. When the hollow roller 44 slides downward, it drives the first limit ring 61 and the second limit ring 81 to slide downward simultaneously. When the first limit ring 61 slides downward, it pushes the support rod 45 through the first connecting rod 46. The support rod 45 drives the grinding machine body 5 to expand outward until it fits with the inside of the single crystal furnace. After the grinding machine body 5 fits with the inner wall, it will give a supporting force to the support rod 45, making the support rod 45 unable to expand further. At this time, the sliding force of the hollow roller 44 is greater than the resistance of the first limit ring 61, and the hollow roller 44 will still continue to slide downward. When the hollow roller 44 slides downward, it drives the sliding rod 67 to slide downward simultaneously. When the sliding rod 67 slides downward, it will squeeze the inclined slot opening 66. When the inclined slot opening 66 is squeezed, it drives the Z-shaped rod 65 to rotate. When the Z-shaped rod 65 rotates, it will open the first limit ring 61 and temporarily separate it from the hollow roller 44.

[0023] When the Z-shaped rod 65 rotates, it drives the threaded rod 63 to rotate simultaneously. The threaded rod 63 will rotate inside the sleeve rod 68 and move a certain distance into the sleeve rod 68. The threaded rod 63 drives the extrusion ball 64 to move simultaneously. When the extrusion ball 64 moves, it will extrude the resistance ball 611. After being extruded, the resistance ball 611 will slide outward inside the inclined chute 69. The resistance ball 611 slides into the clamping groove 72, locking the entire limiting ring one 61. Consequently, the grinding machine body 5 under the support rod 45 will always be in contact with the inner wall of the single crystal furnace.

[0024] At the same time, when the hollow roller 44 moves downward, it drives the limiting ring two 81 to slide downward simultaneously. When the limiting ring two 81 slides, it pulls the connecting rod two 48. The connecting rod two 48 simultaneously pulls the L-shaped support rod 43. The L-shaped support rod 43 pulls the grinding machine body 5 to rotate inward and be in contact with the outer wall of the single crystal furnace. After the grinding machine body 5 is in contact with the outer wall, it gives a supporting force to the L-shaped support rod 43, making the L-shaped support rod 43 unable to rotate anymore. At this time, the limiting ring two 81 also moves. Similarly, the hollow roller 44 slides downward a certain distance again. The protruding part at the upper end of the hollow roller 44 will squeeze the inclined groove slider 83. When the inclined groove slider 83 is squeezed, it will squeeze the round rod 87 through its own notch. When the round rod 87 is squeezed, it drives the spline rod 84 to slide outward inside the fixed block 82. When the spline rod 84 slides, it drives the tapered block 85 to slide outward and get stuck inside the progressive clamping groove 73. Through the friction force of the tapered block 85, the entire limiting ring two 81 is locked. Consequently, the grinding machine body 5 under the L-shaped support rod 43 will always be in contact with the outer wall of the single crystal furnace. At this time, the two grinding machine bodies 5 are simultaneously in contact with the inner and outer walls of the single crystal furnace, so that synchronous grinding can be carried out, acting on the inner and outer walls simultaneously, reducing the time loss of step-by-step operation, improving the grinding efficiency, making the grinding accuracy and roughness of the inner and outer walls consistent, and avoiding process differences caused by step-by-step operation.

[0025] While the inclined groove slider 83 moves downward, it will squeeze the pressure plate 94. When the pressure plate 94 is squeezed, it drives the extrusion rod 95 to slide downward. When the extrusion rod 95 slides downward, it will squeeze the inclined plane block 99. When the inclined plane block 99 is squeezed, it drives the sliding rod one 97 to slide on the surface of the horizontal sliding rod 93. When the sliding rod one 97 slides, it drives the triangular block 910 to slide outward and get stuck inside the clamping groove one 98. In this way, the limiting ring one 61 and the limiting ring two 81 can be simultaneously clamped, ensuring the stability of the two grinding machine bodies, further improving the grinding efficiency. Then the drive motor 2 stops operating. Finally, the electric workbench 1 drives the rotating plate 3 to rotate, adjusting the rotation of the entire device, so that the two grinding machines simultaneously grind the inner and outer walls of the single crystal furnace.

[0026] Finally, after the polishing is completed, start the driving motor 2 to rotate in the reverse direction to reset the entire device, so that automatic polishing can be achieved. The automation can replace manual labor to enter the narrow furnace body for operation, avoiding problems such as uneven polishing or missed polishing caused by manual operation. At the same time, there are risks such as mechanical injuries in manual polishing. The automatic device can significantly reduce the incidence of safety accidents through remote control or robotic arm operation.

[0027] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art of this industry should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for synchronously grinding the inner and outer walls of a furnace body in a single crystal furnace, comprising an electric workbench (1) and a driving motor (2), characterized in that: The driving motor (2) is fixedly connected to the upper surface of the electric workbench (1). The rotating plate (3) is rotatably connected to the lower end of the fixed plate of the electric workbench (1). The guiding mechanism (4) is installed at the lower end of the rotating plate (3). The grinding machine body (5) is respectively connected to the end of the guiding mechanism (4). The inner wall grinding mechanism (6) is arranged between the guiding mechanism (4) and the limit control mechanism (7). The limit control mechanism (7) is fixedly connected to the lower surface of the rotating plate (3). The outer wall grinding mechanism (8) is arranged between the guiding mechanism (4) and the limit control mechanism (7). The control locking mechanism (9) is fixedly connected between the inner wall grinding mechanism (6) and the outer wall grinding mechanism (8).

2. A device for synchronously polishing the inner and outer walls of a furnace body in a single crystal furnace according to claim 1, characterized in that: The guiding mechanism (4) includes a rotating roller (41), a hollow roller (44), and an L-shaped support rod (43) and a support rod (45) that are hinged. The grinding machine body (5) is installed at the end of the support rod.

3. A synchronous grinding device for the inner and outer walls of a furnace body in a single crystal furnace according to claim 2, characterized in that: The inner wall grinding mechanism (6) includes a first limit ring (61), a damping block (62), and a Z-shaped rod (65) driven by a threaded rod (63) for controlling the radial displacement of the inner wall grinding machine body.

4. A device for synchronously polishing the inner and outer walls of a furnace body in a single crystal furnace according to claim 3, characterized in that: The outer wall grinding mechanism (8) includes a second limit ring (81), a spline rod (84), and a tapered block (85) for controlling the radial displacement of the outer wall grinding machine body (5).

5. A device for synchronously polishing the inner and outer walls of a furnace body in a single crystal furnace according to claim 4, characterized in that: The control locking mechanism (9) includes a linkage pressure plate (94), an inclined plane block (99), and a triangular block (910) to achieve synchronous locking of the inner and outer wall grinding mechanisms.

6. The synchronous grinding device for the inner and outer walls of the furnace body in a single crystal furnace according to claim 5, wherein: The driving motor (2) drives the hollow roller (44) to axially move through the rotating roller (41), so that the inner and outer wall grinding machine bodies (5) are synchronously unfolded and locked to the working position.

7. A device for synchronously polishing the inner and outer walls of a furnace body in a single crystal furnace according to claim 6, characterized in that: When the grinding machine body (5) contacts the furnace wall, the tapered block (85) and the triangular block (910) are locked in sequence to achieve triple positioning.

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