Vacuum heat treatment device

Abstract

The present invention relates to a vacuum heat treatment apparatus capable of permeating a process gas even in a deep hole formed in a processed article to be subjected to heat treatment, comprising: a chamber in which the processed article is loaded; and a gas input part which is provided in the chamber and is inserted into a deep hole formed in the processing product to supply a process gas. With this configuration, the process gas can penetrate into the deep hole formed in the processed product, thereby improving the quality of the processed product.

Description

Technical Field

[0001] The present invention relates to a vacuum heat treatment apparatus, and more particularly, to a vacuum heat treatment apparatus capable of allowing a process gas to penetrate into deep holes formed in a workpiece to be heat treated. Background Art

[0002] Generally, the vacuum carburizing method has been successfully evaluated in terms of economy and quality improvement because it significantly shortens the carburizing time and ensures the uniformity of the carburized layer. This vacuum carburizing is a high-temperature carburizing process carried out in a vacuum, and is generally carried out at a high temperature of about 800 to 1100 °C.

[0003] In this vacuum carburizing method, generally, after heating a workpiece to a predetermined carburizing temperature in a vacuum state, a hydrocarbon gas such as acetylene is introduced in a vacuum state, and carburizing is performed with carbon generated during the decomposition process. Then, after diffusion treatment is performed again in a vacuum state, cooling is performed by oil quenching or gas quenching, and thus carburizing and diffusion treatment are repeated to form a desired carburized layer. Thereafter, the carburizing process is performed for a short time to allow carbon to penetrate, thereby obtaining a predetermined surface carbon content.

[0004] Moreover, instead of continuously injecting a hydrocarbon gas, it is supplied at predetermined time intervals in a pulse manner, and nitrogen is introduced when the hydrocarbon gas is not supplied to maintain the process pressure.

[0005] However, as Figure 1 shown, when a narrow and deep hole, i.e., a deep hole 11, is formed in the workpiece 10, there is a problem that a process gas, which is a gas supplied to the inside of the chamber 20, cannot flow into the deep hole 11.

[0006] That is, since the vacuum carburizing process is completed in a vacuum atmosphere, it is difficult to form forced convection inside the chamber 20, and thus there is a problem that it is difficult for the process gas to penetrate into the deep hole 11. Summary of the Invention

[0007] Technical Problem

[0008] The present invention is proposed to solve the above-described problems, and an object thereof is to provide a vacuum heat treatment apparatus capable of allowing a process gas to penetrate into deep holes formed in a workpiece to be heat treated.

[0009] Technical Solution

[0010] In order to achieve the above-described object, a vacuum heat treatment apparatus according to a preferred embodiment of the present invention is configured to include: a chamber for loading a workpiece; and a gas introduction unit provided in the chamber and inserted into a deep hole formed in the workpiece to supply a process gas.

[0011] More specifically, the gas introduction unit can be configured to include: a communication flow path configured to penetrate the chamber and move, with a process gas flowing inside; an exhaust unit provided at an end of the communication flow path to discharge the process gas into the deep hole; and a driving unit provided in the chamber and having the communication flow path, configured to move the communication flow path so that the exhaust unit is inserted into the deep hole.

[0012] Moreover, the driving unit can be configured to include: a guide frame provided in the chamber; a moving frame slidably fastened to the guide frame and having the communication flow path; and an actuator for moving the moving frame.

[0013] In addition, a vacuum heat treatment apparatus according to an embodiment of the present invention can be configured to include a first guiding jig inserted and arranged in the deep hole to guide the process gas supplied through the gas introduction unit to be discharged from an end of the deep hole.

[0014] Here, the first guiding jig can be configured to include: a supply pipe inserted and arranged in the deep hole with a through hole formed in the center; an inflow portion formed to be inclined in a direction of diameter expansion at an end of the supply pipe to allow the gas introduction unit to be inserted; and a plurality of support portions protruding from the inflow portion and arranged on an outer peripheral surface of the workpiece to support the inflow portion.

[0015] Furthermore, it can be configured to include a second guiding jig inserted and arranged in the deep hole to guide the process gas supplied through the gas introduction unit to be discharged along a height direction of the deep hole.

[0016] Here, the second guiding jig can be configured to include: a guiding pipe inserted and arranged in the deep hole with a through hole formed in the center and having a plurality of through holes formed separately in the height direction; guide plates formed in a plurality in the guiding pipe in the height direction and inclined to supply the process gas flowing into the guiding pipe to the through holes; and a support flange portion formed to expand in a radial direction at an end of the guiding pipe and arranged on an outer peripheral surface of the workpiece to support the guiding pipe.

[0017] Moreover, the guiding pipe can be formed such that diameters of the through holes are different from a side where the process gas flows in to the other side.

[0018] Advantages of the Invention

[0019] According to the vacuum heat treatment apparatus of the present invention, process gas can penetrate into deep holes formed in a workpiece, and thus an effect of improving the quality of the workpiece can be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 FIG. 1 schematically shows a state in which a workpiece having deep holes formed therein in a conventional chamber is heat treated.

[0021] Figure 2 FIG. 2 schematically shows a vacuum heat treatment apparatus according to an embodiment of the present invention.

[0022] Figure 3 FIG. 3 schematically shows a main part extracted from the vacuum heat treatment apparatus according to an embodiment of the present invention.

[0023] Figure 4 FIG. 4 is an exploded perspective view schematically showing a jig provided on a workpiece in the vacuum heat treatment apparatus according to an embodiment of the present invention.

[0024] Figure 5 FIG. 5 is a perspective view schematically showing a state in which a jig is provided on a workpiece in the vacuum heat treatment apparatus according to an embodiment of the present invention.

[0025] Figure 6 FIG. 6 is a cross-sectional view schematically showing a state in which a jig is provided on a workpiece in the vacuum heat treatment apparatus according to an embodiment of the present invention.

[0026] DESCRIPTION OF REFERENCE NUMERALS

[0027] 10: Workpiece

[0028] 11: First deep hole 12: Second deep hole

[0029] 100: Vacuum heat treatment apparatus 210: Chamber

[0030] 220: Housing 230: Workpiece tray

[0031] 300: Gas introduction part 310: Communication flow path

[0032] 320: Exhaust part 330: Driving part

[0033] 331: Guide frame 332: Moving frame

[0034] 333: Lead screw 334: Driving motor

[0035] 410: First guide jig 411: Supply pipe

[0036] 412: Inlet portion 413: Support portion

[0037] 420: Second guiding jig 421: Guide tube

[0038] 421a: Through hole 422: Guide plate

[0039] 423: Support flange portion Detailed implementation mode

[0040] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0041] Various changes can be made to the present invention, and the present invention can have various embodiments. Specific embodiments are illustrated in the accompanying drawings and detailed descriptions thereof are given. This is not intended to limit the present invention to a specific implementation mode, but should be construed as including all changes, equivalents and substitutes included in the spirit and technical scope of the present invention.

[0042] The terms used in the present application are only used to describe specific embodiments and are not intended to limit the present invention. Unless clearly indicated otherwise in the context, a single expression may also include multiple expressions.

[0043] Unless otherwise defined, all terms used herein, including technical or scientific terms, may have the same meaning as generally understood by those skilled in the art. Terms identical to those defined in a general use dictionary can be construed to have a meaning consistent with the meaning in the context of the related art, and unless clearly defined in the present application, they may not be construed as ideal or overly formal meanings.

[0044] Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.

[0045] Figure 2 is a diagram schematically showing a vacuum heat treatment apparatus based on an embodiment of the present invention, Figure 3 is a diagram schematically showing the main part extracted from the above vacuum heat treatment apparatus. And, Figure 4 is an exploded perspective view schematically showing a jig provided on a workpiece in the above vacuum heat treatment apparatus, Figure 5 and Figure 6 are a perspective view and a cross-sectional view schematically showing a state in which a jig is provided in a workpiece in the above vacuum heat treatment apparatus.

[0046] Refer to Figures 2 to 6, the vacuum heat treatment apparatus 100 according to an embodiment of the present invention is configured to include: a chamber 210 for loading a workpiece 10; and a gas injection unit 300 provided in the chamber 210 and inserted into a deep hole formed in the workpiece 10 to supply a process gas.

[0047] As Figure 1 shown, when a narrow-width and deep hole, i.e., a deep hole 11, is formed in the workpiece 10, there is a problem that the gas supplied into the interior of the chamber 20, i.e., the process gas, cannot flow into the deep hole 11.

[0048] That is, since the vacuum carburizing process is completed in a vacuum atmosphere, it is difficult to form forced convection inside the chamber 20, making it difficult for the process gas to penetrate into the deep hole 11, and there is a problem of uneven quality of the workpiece 10.

[0049] In response to this, the present invention is configured to have a gas injection unit 300 in the chamber 210, so that the process gas can also be supplied to the deep holes 11 and 12 formed in the workpiece 10.

[0050] Here, as Figure 2 shown, the chamber 210 can be configured to be disposed inside a housing 220. Such a housing 220 can be configured to be provided with a gas supply device for supplying the process gas to the chamber 210, an exhaust hole for discharging the process gas inside the chamber 210 to the outside, and a plurality of devices required for heat-treating the workpiece.

[0051] Moreover, the gas injection unit 300 can be configured to include: a communication flow path 310 configured to penetrate the chamber 210 and move, with the process gas flowing inside; an exhaust unit 320 provided at an end of the communication flow path 310 for discharging the process gas to the deep holes 11 and 12; and a driving unit 330 provided in the chamber 210 and having the communication flow path 310, which moves the communication flow path 310 to insert the exhaust unit 320 into the deep holes 11 and 12.

[0052] That is, it can be configured that after loading the workpiece 10 inside the chamber 210 and placing it on a workpiece tray 230, the driving unit 330 is operated to insert the exhaust unit 320 into the deep holes 11 and 12, thereby forcibly injecting the process gas into the deep holes 11 and 12.

[0053] Here, the driving unit 330 can be configured to include: a guide frame 331 provided in the chamber 210; a moving frame 332 slidably fastened to the guide frame 331 and having the communication flow path 310; and an actuator capable of moving the moving frame 332.

[0054] And, as an example, as Figure 2 and Figure 3 shown, the above actuator can be composed of a lead screw 333 rotatably fastened to the above moving frame 332 and a drive motor 334 that rotates the above lead screw 333 to perform linear movement.

[0055] With this structure, when the above drive motor 334 operates to rotate the above lead screw 333, the above lead screw 333 moves linearly while rotating, and the above moving frame 332 fastened to the end of the above lead screw 333 slides along the above guiding frame 331.

[0056] In addition, as another example, although not shown, the above actuator can also be composed of a linear actuator. At this time, it can also be configured such that the end of the rod that linearly moves on the above linear actuator is fastened with the above moving frame 332, and the above moving frame 332 slides along the above guiding frame 331 corresponding to the linear movement of the above rod.

[0057] Of course, the above actuator is not limited to this, and as long as it can operate to enable the above moving frame 332 to slide along the above guiding frame 331, it can also be composed of any known device.

[0058] And, the above exhaust part 320 can be configured to rotate left and right or the end part to tilt up and down in a state of being connected to the above communication flow path 310. That is, the above exhaust part 320 can be configured to adjust the position of the end part that discharges the process gas.

[0059] With this structure, as Figure 3 shown, the position of the above exhaust part 320 can be adjusted such that in a state where the above processed product 10 is disposed below the above gas input part 300, the end part of the above exhaust part 320 is located above the above deep holes 11, 12. Thus, when the above drive part 330 operates and the above exhaust part 320 moves downward, the end part of the above exhaust part 320 can be inserted into the above deep holes 11, 12.

[0060] And, the vacuum heat treatment apparatus 100 of the present invention can be configured to further include guiding jigs 410, 420 inserted and disposed in the above deep holes 11, 12 so that the process gas can be better input into the above deep holes 11, 12.

[0061] As an example, as Figure 4 shown, when the above deep holes 11, 12 are formed by a first deep hole 11 and a second deep hole 12 having different forms from each other, there can be a first guiding jig 410 and a second guiding jig 420 respectively inserted into the first deep hole 11 and the second deep hole 12.

[0062] Here, asFigure 6 As shown, the above-described first deep hole 11 has an elongated shape, and the end portion has a blocked groove shape. The diameter of the above-described second deep hole 12 is formed to be larger than the diameter of the above-described first deep hole 11, and can be configured to have a shape in which the end portion is penetrated. In addition, in the above-described second deep hole 12, a plurality of grooves having different diameters from each other can be formed along the height direction.

[0063] The above-described first guiding jig 410 can be configured to be inserted and disposed in the above-described first deep hole 11, and guide the process gas supplied through the above-described gas input unit 300 to be discharged from the end portion of the above-described first deep hole 11.

[0064] That is, the above-described first deep hole 11 is formed in an elongated groove shape. When the process gas is forcibly input from the opening side of the above-described first deep hole 11, the process gas cannot be input to the lowermost end portion of the above-described first deep hole 11.

[0065] In this regard, in the present invention, the guiding can be performed in the following manner: after the process gas is input into the interior of the above-described first deep hole 11 through the above-described first guiding jig 410, it is discharged from the lowermost end portion of the above-described first deep hole 11, so that the process gas flows from the lowermost end portion of the above-described first deep hole 11 to the uppermost opening.

[0066] As an example, the above-described first guiding jig 410 can be configured to include: a supply pipe 411, which is inserted and disposed in the above-described first deep hole 11 and has a through hole formed at the center; an inflow portion 412, which is inclined in a direction of diameter expansion at the end portion of the above-described supply pipe 411 to insert the end portion of the exhaust portion 320 of the above-described gas input unit 300; and a plurality of support portions 413, which project from the above-described inflow portion 412 and are disposed on the outer peripheral surface of the above-described processed product 10 to support the above-described inflow portion 412.

[0067] Here, the above-described inflow portion 412 is inclined downward to guide the movement of the end portion of the above-described exhaust portion 320 when the above-described exhaust portion 320 moves downward, so that the end portion of the above-described exhaust portion 320 can be more easily guided to be located at the end portion of the above-described supply pipe 411.

[0068] Moreover, when the above-described supply pipe 411 is inserted into the above-described first deep hole 11, in a state where the above-described supply pipe 411 is located at the center of the above-described first deep hole 11, the above-described support portions 413 can support the end portion of the above-described supply pipe 411 in a state of maintaining a predetermined interval from the lowermost end portion of the above-described first deep hole 11.

[0069] With this structure, as Figure 6As shown, it can be configured in the following state: with the above-mentioned first guiding jig 410 inserted into the above-mentioned first deep hole 11 and the supply pipe 411 located at the center of the first deep hole 11, the end of the supply pipe 411 is separated from the lowermost end portion of the first deep hole 11 by a predetermined interval. Also, it can be configured such that, in this set state, the workpiece 10 is loaded into the chamber 210.

[0070] Also, the second guiding jig 420 can be configured to be inserted and arranged in the second deep hole 12, guide the process gas supplied through the gas input portion 300, and discharge it along the height direction of the second deep hole 12.

[0071] That is, the second deep hole 12 is formed with a plurality of grooves having different diameters along the height direction. When the process gas is supplied at the uppermost opening or the lowermost side of the second deep hole 12, it is possible that the process gas cannot be uniformly introduced into the region where the grooves are formed.

[0072] In this regard, in the present invention, it can be guided in the following manner: the process gas is uniformly discharged along the height direction of the second deep hole 12 through the second guiding jig 420, so as to uniformly introduce the process gas into the region of the grooves formed in the height direction of the second deep hole 12.

[0073] As an example, the second guiding jig 420 can be configured to include: a guiding pipe 421, which is inserted and arranged in the second deep hole 12, has a through hole formed in the center, and is formed with a plurality of through holes 421a separated in the height direction; guide plates 422, which are formed in the guiding pipe 421 in the height direction and are inclined to supply the process gas flowing into the guiding pipe 421 to the through holes 421a; and a supporting flange portion 423, which is formed to expand in the radial direction at the end of the guiding pipe 421 and is arranged on the outer peripheral surface of the workpiece 10 to support the guiding pipe 421.

[0074] Here, as Figure 5 shown, the supporting flange portion 423 is formed in a shape where a ring-shaped rib connects a plurality of linear ribs, so that the process gas passing through the second deep hole 12 can pass through.

[0075] Also, the plurality of through holes 421a formed in the guiding pipe 421 can be formed such that their diameters are different from each other in the direction from the side where the process gas flows in to the other side.

[0076] As an example, as Figure 6As shown, in the above-mentioned guide pipe 421, a through-hole 421a with the smallest diameter can be formed on the side that is the uppermost side where the process gas is forcibly introduced through the above-mentioned exhaust part 320. As it goes towards the other side which is the lowermost side, the diameter of the through-hole 421a becomes larger.

[0077] That is, the uppermost side of the above-mentioned guide pipe 421 is the area where the process gas is forcibly introduced, and relatively more process gas is supplied. Therefore, the diameter of the through-hole 421a is minimized. The process gas is discharged through the through-hole 421a and supplied to the lowermost side of the above-mentioned guide pipe 421, and relatively less process gas is supplied. Therefore, the diameter of the through-hole 421a is made larger. Thus, the amount of the process gas discharged through the through-hole 421a along the height direction of the above-mentioned guide pipe 421 can be made more uniform.

[0078] Moreover, the above-mentioned guide plate 422 can also be formed in different sizes corresponding to the diameter of the through-hole 421a. That is, as Figure 6 shown, the guide plate 422 with a relatively small size is provided at the part where the through-hole 421a with a relatively small diameter is formed, and the guide plate 422 with a relatively large size is provided at the part where the through-hole 421a with a relatively large diameter is formed.

[0079] Thus, the process gas guided to the through-hole 421a through the above-mentioned guide plate 422 is supplied in a manner corresponding to the diameter of the through-hole 421a, so that the amount of the process gas discharged through the through-hole 421a along the height direction of the above-mentioned guide pipe 421 can be made more uniform.

[0080] As above, although the present invention has been described in detail through specific embodiments, this is for specifically illustrating the present invention, and the present invention is not limited thereto. It is clear that the present invention can be deformed or improved by those skilled in the art within the technical idea of the present invention.

[0081] Simple deformations and changes of the present invention all fall within the scope of the present invention, and the specific protection scope of the present invention will be clarified by the claims.

Claims

1. A vacuum heat treatment apparatus, comprising: a chamber for loading workpieces to be processed; and a gas introduction part provided in the chamber and inserted into a deep hole formed in the workpiece to supply process gas.

2. The vacuum heat treatment apparatus according to claim 1, wherein the gas introduction part includes: a communication flow path configured to penetrate the chamber and move, with process gas flowing therein; an exhaust part provided at an end of the communication flow path for discharging the process gas into the deep hole; and a driving part provided in the chamber and having the communication flow path, configured to move the communication flow path so that the exhaust part is inserted into the deep hole.

3. The vacuum heat treatment apparatus according to claim 2, wherein the driving part includes: a guiding frame provided in the chamber; a moving frame slidably fastened to the guiding frame and having the communication flow path; and an actuator for moving the moving frame.

4. The vacuum heat treatment apparatus according to claim 1, wherein the vacuum heat treatment apparatus includes a first guiding jig inserted and disposed in the deep hole, for guiding the process gas supplied through the gas introduction part to be discharged from an end of the deep hole.

5. The vacuum heat treatment apparatus according to claim 4, wherein the first guiding jig includes: a supply pipe inserted and disposed in the deep hole, with a through hole formed at the center; an inflow part formed to be inclined in a direction of diameter expansion at an end of the supply pipe for inserting the gas introduction part; and a plurality of supporting parts protruding from the inflow part and disposed on an outer peripheral surface of the workpiece to support the inflow part.

6. The vacuum heat treatment apparatus according to claim 1, wherein the vacuum heat treatment apparatus includes a second guiding jig inserted and disposed in the deep hole, for guiding the process gas supplied through the gas introduction part to be discharged along a height direction of the deep hole.

7. The vacuum heat treatment apparatus according to claim 6, wherein the second guiding jig includes: a guiding pipe inserted and disposed in the deep hole, with a through hole formed at the center and a plurality of through holes formed separately in the height direction; guide plates formed in a plurality in the height direction inside the guiding pipe and inclined to supply the process gas flowing into the guiding pipe to the through holes; and a supporting flange part formed to expand in a radial direction at an end of the guiding pipe and disposed on an outer peripheral surface of the workpiece to support the guiding pipe.

8. The vacuum heat treatment apparatus according to claim 7, wherein the guiding pipe is formed such that diameters of the through holes are different from a side where the process gas flows in to the other side.

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