Vapor phase epitaxy equipment for special glove box cabinet body for MOCVD (Metal Organic Chemical Vapor Deposition)

Abstract

The invention discloses vapor phase epitaxy equipment for a special glove box cabinet body for MOCVD, and relates to the technical field of general experimental equipment.The vapor phase epitaxy equipment comprises a box body, a control pedal, a panel mechanism, a wearing mechanism, a glove mechanism, an operation table and a crate, a window is formed in the box body, the panel mechanism comprises a sliding rail and an installation sleeve plate, and the sliding rail is arranged on the control pedal; the wearing mechanism comprises a transverse rail and a negative pressure mechanism, the negative pressure mechanism comprises a sleeve, a magnetic suction port is formed in the sleeve, the glove mechanism comprises a magnetic suction cup and a double-port glove, the transverse rail, the operation table and the machine box are fixedly connected with the box body, the sliding rail is fixedly connected with the window, the control pedal is hinged to the machine box, and the double-port glove is fixedly connected with the mounting sleeve plate. The magnetic suction cup is connected with the magnetic suction port through magnetic force, and the control pedal, the wearing mechanism and the operation table are all connected with the case through electric signals. According to the invention, one-side multi-person cooperation operation is satisfied, visual inspection actively carries out automatic wearing and smoothing on the gloves, the wearing comfort and the operation precision are improved, and the gloves are automatically cleaned after the operation is completed.

Description

Technical Field

[0001] The present invention relates to the technical field of general experimental equipment, and in particular to a gas phase epitaxy device for a special glove box cabinet of MOCVD. Background Art

[0002] A special glove box designed for the metal organic chemical vapor deposition (MOCVD) process is a special airtight device that plays a key role in the scientific research and industrial fields, and is mainly applied to high-precision and advanced technology fields such as the epitaxial growth of semiconductor materials and optoelectronic materials. This device supports operators to complete fine process operations by constructing an operating space that isolates the external environment, and its performance needs to meet strict technical requirements such as maintaining an ultra-pure inert atmosphere, controlling a dust-free environment, and anti-corrosion.

[0003] There is room for optimization in the glove system design of existing MOCVD special glove boxes: on the one hand, in the single-operator scenario, it is inconvenient for the operator to independently put on and take off the gloves; on the other hand, in order to achieve efficient dust isolation, research gloves mostly use sealed rubber materials, and independent wearing is likely to result in insufficient fit, which is likely to cause discomfort to the operator's hands and affect the comfort and accuracy of long-term fine operations. In addition, gloves used for a long time need to be cleaned and maintained in a timely manner to avoid interference with the precision process caused by the deposition of pollutants. Summary of the Invention

[0004] The purpose of the present invention is to provide a gas phase epitaxy device for a special glove box cabinet of MOCVD to solve the problems in the prior art.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A gas phase epitaxy device for a special glove box cabinet of MOCVD includes a box body, a control pedal, a panel mechanism, a wearing mechanism, a glove mechanism, an operating table, and a chassis. A window is provided on the box body. The panel mechanism includes a slide rail and a mounting sleeve plate. The wearing mechanism includes a cross rail and a negative pressure mechanism. The negative pressure mechanism includes a sleeve, and a magnetic attraction port is provided on the sleeve. The glove mechanism includes a magnetic chuck and a double-port glove. The cross rail, the operating table, and the chassis are all fixedly connected to the box body. The slide rail is fixedly connected to the window. The control pedal is hinged to the chassis. The double-port glove is fixedly connected to the mounting sleeve plate. The magnetic chuck and the magnetic attraction port are connected by magnetic force. The control pedal, the wearing mechanism, and the operating table are all electrically connected to the chassis through electrical signals.

[0006] The present invention relates to a special glove box for MOCVD process. The staff controls the MOCVD process operation by stepping on the pedal. The chassis transmits an electrical signal to the operating platform. The panel mechanism displaces along the window through the slide rail, enabling the staff to meet the requirement of multi-person cooperation on one side. When the staff wears gloves, they pre-place their hands in the glove mechanism, position the glove mechanism in the wearing mechanism, and fix and assemble it through the magnetic connection between the magnetic chuck and the magnetic suction port. A negative pressure is generated inside the wearing mechanism to inflate the plastic glove. After the staff finishes wearing the glove, it is visually inspected whether the glove is worn neatly. The wearing mechanism generates a leveling circulating air flow inside the rubber glove to make the automatically worn glove fit the staff's hand, improving the comfort of the staff when wearing gloves during operation and the accuracy of the staff wearing gloves for operation. After the operation is completed, the glove mechanism can be placed back into the wearing mechanism for self-cleaning.

[0007] Further, the panel mechanism further includes a large transparent panel, a ring rail, and a small transparent panel. The large transparent panel is slidably connected to the slide rail. There are two sets of circular windows, ring rails, and mounting sleeve plates on the large transparent panel. The two sets of circular windows, ring rails, and mounting sleeve plates are arranged mirror-symmetrically along the central axis of the large transparent panel. The ring rail is fixedly connected to the circular window, the mounting sleeve plate is fixedly connected to the small transparent panel, and the mounting sleeve plate and the small transparent panel are rotatably connected to the ring rail.

[0008] The large transparent panel displaces along the window through the slide rail, and the mounting sleeve plate and the small transparent panel both rotate within the circular window along the slide rail. The double-port glove can rotate freely by 360 degrees, enabling the staff to meet the requirement of multi-person cooperation on one side and greatly improving the operation efficiency.

[0009] Further, the wearing mechanism further includes a base mechanism and an adjustment mechanism. The base mechanism includes a rotary table, a hinge frame, and a spring buckle. There is also a rotating shaft on the sleeve. The rotary table is slidably connected to the cross rail, the rotating shaft is rotatably connected to the hinge frame, and the hinge frame and the rotating shaft are both fixedly connected to the spring buckle. The negative pressure mechanism further includes a limiting frame. The adjustment mechanism includes a ring shell. The ring shell and the limiting frame are both fixedly connected to the sleeve. The glove mechanism further includes a positioning ring, and positioning beads are provided on the positioning ring. Ball chutes are provided on the limiting frame. There are several groups of positioning beads and ball chutes, and the several groups of positioning beads and ball chutes are evenly distributed along the circumference of the positioning ring. The positioning beads are in contact with the ball chutes.

[0010] When the staff wears gloves, they pre-place their hands in the double-port glove, place the double-port glove in the sleeve, and several groups of positioning beads evenly distributed along the circumference of the positioning ring are snapped into the ball chutes. It is fixed and assembled through the magnetic connection between the magnetic chuck and the magnetic suction port. The rotating shaft on the sleeve is rotationally assembled with the hinge frame. The rotary table can be driven along the cross rail by hand movement, and the sleeve tilts around the axis of the rotating shaft, enabling the staff's hand to be in a natural and comfortable state when wearing gloves. After wearing, the sleeve resets under the action of the spring buckle restoring deformation, making the magnetic suction port vertically upward.

[0011] Furthermore, the base mechanism further includes a vacuum pump, a liquid pump, and a circulation pump. The articulated frame is fixedly connected to the rotary table, the vacuum pump, the liquid pump, and the circulation pump. The sleeve is also provided with a bottom opening, and the bottom opening is connected to the vacuum pump through a hose. The negative pressure mechanism further includes a liquid pipe, and the liquid pipe is connected to the liquid pump through a hose. The annular shell is provided with an air inlet cavity and an air outlet cavity, and both the air inlet cavity and the air outlet cavity are connected to the circulation pump through hoses.

[0012] When the staff wears gloves, the hand is pre-placed in the double-port glove, and the double-port glove is placed in the sleeve. It is fixedly assembled through the magnetic connection between the magnetic suction cup and the magnetic suction port, so as to form a sealed space between the sleeve and the double-port glove. The vacuum pump is connected to the bottom opening of the sleeve through a hose. The vacuum pump evacuates the inside of the sleeve to form a negative pressure. The plastic glove bulges under the action of the negative pressure, which is convenient for the staff to wear. After the initial wearing is completed, the hand actively disengages from the sleeve, and the magnetic suction cup is separated from the magnetic suction port. The inside of the sleeve is no longer sealed. The plastic glove is adsorbed and attached to the staff's hand under the action of the atmospheric pressure. Subsequently, the double-port glove is placed in the sleeve again, and the magnetic suction cup is magnetically connected to the magnetic suction port. The visual inspection checks whether the glove is worn neatly. The circulation pump generates an air flow that enters the glove through the air inlet cavity and is discharged through the air outlet cavity. By setting the air inlet and outlet positions, a designated area route leveling circulating air flow is generated inside the rubber glove, so that the non-fitting area of the automatically worn glove bulges again. After the operation is completed, the double-port glove can be placed in the sleeve again. The liquid pump sprays the externally stored cleaning water mist evenly on the double-port glove through the liquid pipe, and the vacuum pump evacuates the air again to dry the water mist, completing self-cleaning.

[0013] Furthermore, the negative pressure mechanism further includes a liquid spraying cylinder and a visual inspection table. Both the liquid spraying cylinder and the visual inspection table are fixedly connected to the sleeve, and the liquid pipe is fixedly connected to the liquid spraying cylinder.

[0014] When the staff wears gloves, the vacuum pump evacuates the inside of the sleeve to form a negative pressure. The plastic glove bulges under the action of the negative pressure, which is convenient for the staff to wear. Through the visual inspection table, it is visually inspected whether the glove is worn neatly. After the operation is completed, the double-port glove can be placed in the sleeve again. The liquid pump transports the externally stored cleaning water mist to the liquid spraying cylinder through the liquid pipe and sprays it evenly on the double-port glove.

[0015] Furthermore, the adjustment mechanism further includes a servo motor, a first gear rod, a second gear rod, a gear ring, and an electromagnetic block. There are two sets of servo motors, gear rings, and electromagnetic blocks. The servo motor is fixedly connected to the annular shell. The output end of one set of servo motors is fixedly connected to the first gear rod, and the output end of the other set of servo motors is fixedly connected to the second gear rod. Both the first gear rod and the second gear rod are meshed with the tooth surface of the gear ring. One set of gear rings is rotatably connected to the air inlet cavity, and the other set of gear rings is rotatably connected to the air outlet cavity. The vacuum pump, the liquid pump, the circulation pump, the visual inspection table, the servo motor, and the electromagnetic block are all connected to the chassis through electrical signals.

[0016] The unevenly wrinkled areas of the glove during wearing are detected by the inspection table, and data signals are fed back to the chassis. The chassis feeds back control signals to the servo motors. Two sets of servo motors respectively output fixed-axis torques to the first gear rod and the second gear rod. Through the meshing of the tooth surfaces between the first gear rod, the second gear rod and the gear ring, the torques are transmitted to rotate the gear ring by different angles, so that the two electromagnetic blocks are located on both sides of the cross-section of the unevenly wrinkled area of the glove during wearing. The air flow ports at the corresponding positions are opened by magnetic force. The air intake and outlet positions are set. The circulation pump generates an air flow that enters the glove interior through the intake cavity and is discharged through the outlet cavity, generating a leveling circulating air flow along a specified area route inside the rubber glove, so that the non-fitting areas of the automatically worn glove are bulged again.

[0017] Furthermore, the glove mechanism further includes a positioning ring and a reflux mechanism. The reflux mechanism includes a cylindrical tube. The magnetic suction cup, the positioning ring and the cylindrical tube are all fixedly connected to the double-port glove, and the cylindrical tube contacts the ring shell.

[0018] When the staff wears the glove, the hand is pre-placed in the double-port glove, and the double-port glove is placed in the sleeve. Several groups of positioning beads evenly distributed along the circumference of the positioning ring are snapped into the ball chutes, and are fixedly assembled through the magnetic connection between the magnetic suction cup and the magnetic suction port. The electromagnetic block opens the air flow ports at the corresponding positions of the cylindrical tube by magnetic force, and sets the air intake and outlet positions.

[0019] Furthermore, the reflux mechanism further includes an intake magnetic valve and an exhaust magnetic valve. The cylindrical tube is provided with channels, and several groups of channels, intake magnetic valves and exhaust magnetic valves are all provided. Several groups of channels, intake magnetic valves and exhaust magnetic valves are evenly distributed along the circumference of the cylindrical tube. The intake magnetic valve and the exhaust magnetic valve are both fixedly connected to the channels, and the intake magnetic valve and the exhaust magnetic valve are both magnetically connected to the electromagnetic block.

[0020] The servo motor outputs torque to drive the gear ring to rotate by different angles, so that the two electromagnetic blocks are located on both sides of the cross-section of the unevenly wrinkled area of the glove during wearing. The intake magnetic valve and the exhaust magnetic valve at the corresponding positions are opened by magnetic force respectively, and the air intake and outlet positions are set.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention designs a panel mechanism. The large transparent panel displaces along the window through a slide rail. The mounting sleeve plate and the small transparent panel both rotate along the slide rail on the circular window. The double-port glove can rotate freely by 360 degrees, enabling multiple workers to cooperate on one side, greatly improving the operation efficiency. The present invention designs a wearing mechanism and a glove mechanism cooperating therewith. When wearing the glove, the hand is pre-placed in the double-port glove, and the double-port glove is placed in the sleeve. The sleeve and the double-port glove are fixedly assembled through the magnetic force connection between the magnetic suction cup and the magnetic suction port, forming a sealed space between the sleeve and the double-port glove. The vacuum pump is connected to the bottom port of the sleeve through a hose. The vacuum pump evacuates the inside of the sleeve to form a negative pressure. The plastic glove bulges under the action of the negative pressure, facilitating the worker to wear. After the initial wearing is completed, the hand actively disengages from the sleeve, and the magnetic suction cup and the magnetic suction port are separated. The inside of the sleeve is no longer sealed. The plastic glove is adsorbed and attached to the worker's hand under the action of the atmospheric pressure. Subsequently, the double-port glove is placed in the sleeve again, and the visual inspection checks whether the glove is worn neatly. The circulation pump generates air flow, which enters the glove interior from the intake cavity and is discharged through the outlet cavity. By setting the intake and outlet positions, a specified area route leveling and circulating air flow is generated inside the rubber glove, causing the non-fitting area of the automatically worn glove to bulge again, making the automatically worn glove fit the worker's hand, improving the comfort of the worker wearing the glove during operation and the accuracy of the worker wearing the glove for operation. After the operation is completed, the double-port glove is placed back in the sleeve. The liquid pump evenly sprays the external stored cleaning water mist on the double-port glove through the liquid pipe, and the vacuum pump evacuates the air again to dry the water mist, completing self-cleaning. The present invention satisfies the cooperation of multiple workers on one side, visually inspects and actively automatically wears and smooths the glove, improves the comfort of wearing the glove and the accuracy of the worker's operation, and self-cleans the glove after the operation is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the overall structure of the present invention; Figure 2 is a schematic diagram of the structure of the panel mechanism of the present invention; Figure 3 is a partial cross-sectional view of the panel mechanism of the present invention; Figure 4 is a partial cross-sectional view of the overall structure of the present invention; Figure 5 is a schematic diagram of the structure of the wearing mechanism of the present invention; Figure 6 is a schematic diagram of the structure of the negative pressure mechanism of the present invention; Figure 7 is a schematic diagram of the structure of the adjustment mechanism of the present invention; Figure 8 is Figure 7 a partially enlarged schematic view of A of

[0023] In the figure: 1. Cabinet; 11. Window; 2. Control pedal; 3. Panel mechanism; 31. Slide rail; 32. Large transparent panel; 321. Round window; 33. Ring rail; 34. Mounting sleeve plate; 35. Small transparent panel; 4. Wearing mechanism; 41. Horizontal rail; 42. Base mechanism; 421. Rotary table; 422. Hinge frame; 423. Spring buckle; 424. Vacuum pump; 425. Liquid pump; 426. Circulation pump; 43. Negative pressure mechanism; 431. Sleeve; 4311. Bottom opening; 4312. Magnetic suction port; 4313. Rotating shaft; 432. Liquid spraying cylinder; 433. Liquid pipe; 434. Visual inspection table; 435. Limiting frame; 4351. Ball chute; 44. Adjustment mechanism; 45. Ring shell; 451. Intake cavity; 452. Exhaust cavity; 46. Servo motor; 47. First gear rod; 48. Second gear rod; 49. Tooth ring; 491. Electromagnetic block; 5. Glove mechanism; 51. Magnetic chuck; 52. Positioning ring; 521. Positioning bead; 53. Return mechanism; 54. Ring cylinder; 541. Channel; 55. Intake magnetic valve; 56. Exhaust magnetic valve; 57. Double-port glove; 6. Operating table; 7. Chassis. Detailed implementation mode

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] As Figure 1 、 Figure 2 、 Figure 4 、 Figure 7 shown, the present invention provides a technical solution for a gas-phase epitaxy device for a MOCVD special glove box cabinet, including a cabinet 1, a control pedal 2, a panel mechanism 3, a wearing mechanism 4, a glove mechanism 5, an operating table 6 and a chassis 7. A window 11 is provided on the cabinet 1. The panel mechanism 3 includes a slide rail 31 and a mounting sleeve plate 34. The wearing mechanism 4 includes a horizontal rail 41 and a negative pressure mechanism 43. The negative pressure mechanism 43 includes a sleeve 431, and a magnetic suction port 4312 is provided on the sleeve 431. The glove mechanism 5 includes a magnetic chuck 51 and a double-port glove 57. The horizontal rail 41, the operating table 6 and the chassis 7 are all fixedly connected to the cabinet 1. The slide rail 31 is fixedly connected to the window 11. The control pedal 2 is hinged to the chassis 7. The double-port glove 57 is fixedly connected to the mounting sleeve plate 34. The magnetic chuck 51 and the magnetic suction port 4312 are magnetically connected. The control pedal 2, the wearing mechanism 4 and the operating table 6 are all electrically connected to the chassis 7 through electrical signals.

[0026] The present invention is a special glove box for the MOCVD process. The staff controls the MOCVD process operation by operating the pedal 2. The chassis 7 transmits an electrical signal to the operating console 6. The panel mechanism 3 displaces along the window 11 through the slide rail 31, enabling the staff to meet the requirement of multi-person cooperation on one side. When the staff wears gloves, the hand is pre-placed in the glove mechanism 5, and the glove mechanism 5 is positioned and placed in the wearing mechanism 4. It is fixedly assembled through the magnetic connection between the magnetic suction cup 51 and the magnetic suction port 4312. A negative pressure is generated inside the wearing mechanism 4 to inflate the plastic gloves. After the staff finishes wearing the gloves, it is visually detected whether the gloves are worn neatly. The wearing mechanism 4 generates a flattening circulating air flow inside the rubber gloves to make the automatically worn gloves fit the staff's hands, improving the comfort of the staff when wearing gloves during operation and enhancing the accuracy of the staff wearing gloves for operation. After the operation is completed, the glove mechanism 5 can be placed back into the wearing mechanism 4 for self-cleaning.

[0027] As Figure 2 、 Figure 3 shown, the panel mechanism 3 further includes a large transparent panel 32, an annular rail 33, and a small transparent panel 35. The large transparent panel 32 is slidably connected to the slide rail 31. There is a circular window 321 on the large transparent panel 32. There are two sets of circular windows 321, annular rails 33, and mounting sleeve plates 34. The two sets of circular windows 321, annular rails 33, and mounting sleeve plates 34 are arranged mirror-symmetrically along the central axis of the large transparent panel 32. The annular rail 33 is fixedly connected to the circular window 321, and the mounting sleeve plate 34 is fixedly connected to the small transparent panel 35. The mounting sleeve plate 34 and the small transparent panel 35 are both rotatably connected to the annular rail 33.

[0028] The large transparent panel 32 displaces along the window 11 through the slide rail 31. The mounting sleeve plate 34 and the small transparent panel 35 both rotate along the annular rail 33 at the circular window 321. The double-port glove 57 can rotate freely by 360 degrees, enabling the staff to meet the requirement of multi-person cooperation on one side and greatly improving the operation efficiency.

[0029] As Figure 5 、 Figure 6 、 Figure 7As shown, the wearing mechanism 4 further includes a base mechanism 42 and an adjustment mechanism 44. The base mechanism 42 includes a rotary table 421, a hinge frame 422 and a spring buckle 423. A rotating shaft 4313 is also provided on the sleeve 431. The rotary table 421 is slidably connected to the cross rail 41. The rotating shaft 4313 is rotatably connected to the hinge frame 422. The hinge frame 422 and the rotating shaft 4313 are both fixedly connected to the spring buckle 423. The negative pressure mechanism 43 further includes a limit frame 435. The adjustment mechanism 44 includes an annular housing 45. The annular housing 45 and the limit frame 435 are both fixedly connected to the sleeve 431. The glove mechanism 5 further includes a positioning ring 52. A positioning bead 521 is provided on the positioning ring 52. A spherical chute 4351 is provided on the limit frame 435. There are several groups of the positioning beads 521 and the spherical chutes 4351. The several groups of positioning beads 521 and spherical chutes 4351 are evenly distributed along the circumference of the positioning ring 52. The positioning beads 521 are in contact with the spherical chutes 4351.

[0030] When the staff wears the gloves, the hand is pre-placed in the double-port glove 57, and the double-port glove 57 is placed in the sleeve 431. Several groups of positioning beads 521 evenly distributed along the circumference of the positioning ring 52 are snapped into the spherical chutes 4351, and are fixedly assembled through the magnetic connection between the magnetic suction cup 51 and the magnetic suction port 4312. The rotating shaft 4313 on the sleeve 431 is rotatably assembled with the hinge frame 422. The rotary table 421 can be driven along the cross rail 41 by hand movement, and the sleeve 431 is tilted around the axis of the rotating shaft 4313, so that when the staff wears the gloves, the hand is in a natural and comfortable state. After wearing, the sleeve 431 is reset under the action of the spring buckle 423 recovering deformation, so that the magnetic suction port 4312 is vertically upward.

[0031] As Figure 5 、 Figure 6 shown, the base mechanism 42 further includes a vacuum pump 424, a liquid pump 425 and a circulation pump 426. The hinge frame 422 is fixedly connected to the rotary table 421, the vacuum pump 424, the liquid pump 425 and the circulation pump 426. A bottom port 4311 is also provided on the sleeve 431. The bottom port 4311 is connected to the vacuum pump 424 through a hose. The negative pressure mechanism 43 further includes a liquid pipe 433. The liquid pipe 433 is connected to the liquid pump 425 through a hose. An air inlet chamber 451 and an air outlet chamber 452 are provided on the annular housing 45. The air inlet chamber 451 and the air outlet chamber 452 are both connected to the circulation pump 426 through a hose.

[0032] When the staff wears gloves, the hand is pre-placed in the double-port glove 57, and the double-port glove 57 is placed in the sleeve 431. It is fixedly assembled through the magnetic connection between the magnetic chuck 51 and the magnetic suction port 4312, so as to form a sealed space between the sleeve 431 and the double-port glove 57. The vacuum pump 424 is connected to the bottom port 4311 of the sleeve 431 through a hose. The vacuum pump 424 evacuates the inside of the sleeve 431 to form a negative pressure, and the plastic glove bulges under the action of the negative pressure, which is convenient for the staff to wear. After the initial wearing of the work is completed, the hand actively disengages from the sleeve 431, and the magnetic chuck 51 is separated from the magnetic suction port 4312. The inside of the sleeve 431 is no longer sealed, and the plastic glove is adsorbed and attached to the staff's hand under the action of the atmospheric pressure. Subsequently, the double-port glove 57 is placed in the sleeve 431 again, and the magnetic chuck 51 is magnetically connected to the magnetic suction port 4312 to visually detect whether the glove is worn neatly. The circulation pump 426 generates an air flow that enters the glove interior from the intake chamber 451 and is discharged through the outlet chamber 452. By setting the intake and outlet positions, a leveling circulating air flow in a specified area route is generated inside the rubber glove, so that the non-fitting area of the automatically worn glove bulges again. After the operation is completed, the double-port glove 57 can be re-placed in the sleeve 431. The liquid pump 425 evenly sprays the externally stored cleaning water mist on the double-port glove 57 through the liquid pipe 433, and the vacuum pump 424 evacuates the air again to dry the water mist, completing self-cleaning.

[0033] As Figure 6 shown, the negative pressure mechanism 43 further includes a liquid spraying cylinder 432 and a visual inspection table 434. The liquid spraying cylinder 432 and the visual inspection table 434 are both fixedly connected to the sleeve 431, and the liquid pipe 433 is fixedly connected to the liquid spraying cylinder 432.

[0034] When the staff wears gloves, the vacuum pump 424 evacuates the inside of the sleeve 431 to form a negative pressure, and the plastic glove bulges under the action of the negative pressure, which is convenient for the staff to wear. Through the visual inspection table 434, it is visually detected whether the glove is worn neatly. After the operation is completed, the double-port glove 57 can be re-placed in the sleeve 431. The liquid pump 425 transports the externally stored cleaning water mist to the liquid spraying cylinder 432 through the liquid pipe 433 and evenly sprays it on the double-port glove 57.

[0035] As Figure 7 、 Figure 8As shown in the figure, the adjustment mechanism 44 further includes a servo motor 46, a first gear rod 47, a second gear rod 48, a gear ring 49, and an electromagnetic block 491. There are two sets of servo motors 46, gear rings 49, and electromagnetic blocks 491. The servo motor 46 is fixedly connected to the ring housing 45. The output end of one set of servo motors 46 is fixedly connected to the first gear rod 47, and the output end of the other set of servo motors 46 is fixedly connected to the second gear rod 48. The first gear rod 47 and the second gear rod 48 are both in meshing engagement with the tooth surface of the gear ring 49. One set of gear rings 49 is rotatably connected to the intake cavity 451, and the other set of gear rings 49 is rotatably connected to the exhaust cavity 452. The vacuum pump 424, the liquid pump 425, the circulation pump 426, the inspection table 434, the servo motor 46, and the electromagnetic block 491 are all electrically connected to the chassis 7 through electrical signals.

[0036] The inspection table 434 detects the unevenly wrinkled areas of the glove during wearing, and feeds back data signals to the chassis 7. The chassis 7 feeds back control signals to the servo motor 46. The two sets of servo motors 46 respectively output fixed-axis torques to the first gear rod 47 and the second gear rod 48. Through the meshing of the tooth surfaces between the first gear rod 47 and the second gear rod 48 and the gear ring 49, the torques are transmitted to rotate the gear ring 49 by different angles respectively, so that the two sets of electromagnetic blocks 491 are located on both sides of the cross-section of the unevenly wrinkled area of the glove during wearing. The airflow ports at the corresponding positions are opened by magnetic force, the intake and exhaust positions are set, and the circulation pump 426 generates airflow that enters the glove interior through the intake cavity 451 and is discharged through the exhaust cavity 452, generating a leveling circulating airflow in a specified area route inside the rubber glove, and causing the non-fitting area of the automatically worn glove to bulge again.

[0037] As Figure 4 、 Figure 6 shown in the figure, the glove mechanism 5 further includes a positioning ring 52 and a reflux mechanism 53. The reflux mechanism 53 includes a ring cylinder 54. The magnetic suction cup 51, the positioning ring 52, and the ring cylinder 54 are all fixedly connected to the double-port glove 57. The ring cylinder 54 is in contact with the ring housing 45.

[0038] When the staff wears the glove, the hand is pre-placed in the double-port glove 57, and the double-port glove 57 is placed in the sleeve 431. Several groups of positioning beads 521 evenly distributed along the circumference of the positioning ring 52 are snapped into the spherical chute 4351, and are fixedly assembled through the magnetic connection between the magnetic suction cup 51 and the magnetic suction port 4312. The electromagnetic block 491 opens the airflow port at the corresponding position of the ring cylinder 54 by magnetic force, and sets the intake and exhaust positions.

[0039] As Figure 8As shown, the reflux mechanism 53 further includes an intake solenoid valve 55 and an exhaust solenoid valve 56. The annular cylinder 54 is provided with a channel 541. There are several groups of the channel 541, the intake solenoid valve 55, and the exhaust solenoid valve 56. The several groups of the channel 541, the intake solenoid valve 55, and the exhaust solenoid valve 56 are evenly distributed along the circumference of the annular cylinder 54. The intake solenoid valve 55 and the exhaust solenoid valve 56 are both fixedly connected to the channel 541, and the intake solenoid valve 55 and the exhaust solenoid valve 56 are both magnetically connected to the electromagnetic block 491.

[0040] The servo motor 46 outputs torque to drive the gear ring 49 to rotate at different angles, so that the two electromagnetic blocks 491 are located on both sides of the cross-section of the uneven area of the glove wearing fold. The intake solenoid valve 55 and the exhaust solenoid valve 56 at the corresponding positions are opened by magnetic force respectively to set the intake and exhaust positions.

[0041] The working principle of the present invention: The staff controls the MOCVD process operation through the control pedal 2. The chassis 7 transmits an electrical signal to the operation console 6. The large transparent panel 32 displaces along the window 11 through the slide rail 31. The double-port glove 57 can rotate freely by 360 degrees, enabling the staff to meet the multi-person cooperation operation on one side, greatly improving the operation efficiency. When the staff wears the gloves, the hand is pre-placed in the double-port glove 57, and the double-port glove 57 is placed in the sleeve 431. It is fixedly assembled through the magnetic connection between the magnetic chuck 51 and the magnetic suction port 4312, so as to form a sealed space between the sleeve 431 and the double-port glove 57. The vacuum pump 424 is connected to the bottom port 4311 of the sleeve 431 through a hose. The vacuum pump 424 evacuates the inside of the sleeve 431 to form a negative pressure. The plastic glove bulges under the action of the negative pressure, facilitating the staff to wear. After the initial wearing of the work is completed, the hand actively disengages from the sleeve 431, and the magnetic chuck 51 is separated from the magnetic suction port 4312. The inside of the sleeve 431 is no longer sealed. The plastic glove is adsorbed and attached to the staff's hand under the action of the atmospheric pressure. Subsequently, the double-port glove 57 is placed in the sleeve 431 again, and the magnetic chuck 51 is magnetically connected to the magnetic suction port 4312. The vision detects whether the gloves are worn neatly. The circulation pump 426 generates air flow that enters the glove interior through the intake cavity 451 and is discharged through the outlet cavity 452. By setting the intake and exhaust positions, a leveling circulating air flow in a specified area route is generated inside the rubber glove, so that the non-fitting area of the automatically worn glove bulges again, making the automatically worn glove fit the staff's hand, improving the comfort of the staff wearing gloves during operation, and improving the accuracy of the staff wearing gloves for operation. After the operation is completed, the double-port glove 57 can be placed back in the sleeve 431. The liquid pump 425 evenly sprays the external stored cleaning water mist on the double-port glove 57 through the liquid pipe 433, and the vacuum pump 424 evacuates the air again to dry the water mist, completing the self-cleaning.

[0042] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-mentioned exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, in any regard, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present invention. Any reference signs in the claims should not be construed as limiting the claims involved.

Claims

1. A gas phase epitaxy device for a glove box cabinet dedicated to MOCVD, characterized in that: The vapor phase epitaxy equipment includes a box body (1), a control pedal (2), a panel mechanism (3), a wearing mechanism (4), a glove mechanism (5), an operating table (6) and a chassis (7). A window (11) is provided on the box body (1). The panel mechanism (3) includes a slide rail (31) and a mounting sleeve plate (34). The wearing mechanism (4) includes a horizontal rail (41) and a negative pressure mechanism (43). The negative pressure mechanism (43) includes a sleeve (431), and a magnetic suction port (4312) is provided on the sleeve (431). The glove mechanism (5) includes a magnetic suction disc (51) and a double-port glove (57). The horizontal rail (41), the operating table (6) and the chassis (7) are all fixedly connected to the box body (1). The slide rail (31) is fixedly connected to the window (11). The control pedal (2) is hinged to the chassis (7). The double-port glove (57) is fixedly connected to the mounting sleeve plate (34). The magnetic suction disc (51) is magnetically connected to the magnetic suction port (4312). The control pedal (2), the wearing mechanism (4) and the operating table (6) are all electrically connected to the chassis (7) through electrical signals.

2. The vapor phase epitaxy device for the glove box cabinet dedicated to MOCVD according to claim 1, wherein: The panel mechanism (3) further includes a large transparent panel (32), a ring rail (33) and a small transparent panel (35). The large transparent panel (32) is slidably connected to the slide rail (31). A circular window (321) is provided on the large transparent panel (32). There are two sets of the circular window (321), the ring rail (33) and the mounting sleeve plate (34). The two sets of the circular window (321), the ring rail (33) and the mounting sleeve plate (34) are all arranged mirror-symmetrically along the central axis of the large transparent panel (32). The ring rail (33) is fixedly connected to the circular window (321). The mounting sleeve plate (34) is fixedly connected to the small transparent panel (35). The mounting sleeve plate (34) and the small transparent panel (35) are both rotatably connected to the ring rail (33).

3. The gas phase epitaxy equipment for the glove box cabinet dedicated to MOCVD according to claim 1, wherein: The wearing mechanism (4) further includes a base mechanism (42) and an adjustment mechanism (44). The base mechanism (42) includes a rotary table (421), a hinge bracket (422) and a spring buckle (423). A rotating shaft (4313) is further provided on the sleeve (431). The rotary table (421) is slidably connected to the horizontal rail (41). The rotating shaft (4313) is rotatably connected to the hinge bracket (422). The hinge bracket (422) and the rotating shaft (4313) are both fixedly connected to the spring buckle (423). The negative pressure mechanism (43) further includes a limiting frame (435). The adjustment mechanism (44) includes a ring shell (45). The ring shell (45) and the limiting frame (435) are both fixedly connected to the sleeve (431). The glove mechanism (5) further includes a positioning ring (52). A positioning bead (521) is provided on the positioning ring (52). A ball chute (4351) is provided on the limiting frame (435). There are several groups of the positioning beads (521) and the ball chutes (4351). The several groups of the positioning beads (521) and the ball chutes (4351) are all evenly distributed along the circumference of the positioning ring (52). The positioning beads (521) are in contact with the ball chutes (4351).

4. The vapor phase epitaxy equipment for the glove box cabinet dedicated to MOCVD according to claim 3, characterized in that: The base mechanism (42) further includes a vacuum pump (424), a liquid pump (425), and a circulation pump (426). The articulated frame (422) is fixedly connected to the rotary table (421), the vacuum pump (424), the liquid pump (425), and the circulation pump (426). A bottom opening (4311) is further provided on the sleeve (431). The bottom opening (4311) is connected to the vacuum pump (424) through a hose. The negative pressure mechanism (43) further includes a liquid pipe (433). The liquid pipe (433) is connected to the liquid pump (425) through a hose. An air inlet cavity (451) and an air outlet cavity (452) are provided on the ring shell (45). The air inlet cavity (451) and the air outlet cavity (452) are both connected to the circulation pump (426) through hoses.

5. The gas phase epitaxy device for the glove box cabinet dedicated to MOCVD according to claim 4, characterized in that: The negative pressure mechanism (43) further includes a liquid spraying cylinder (432) and an inspection table (434). The liquid spraying cylinder (432) and the inspection table (434) are both fixedly connected to the sleeve (431). The liquid pipe (433) is fixedly connected to the liquid spraying cylinder (432).

6. The vapor phase epitaxy device for the glove box cabinet dedicated to MOCVD according to claim 5, wherein: The adjustment mechanism (44) further includes a servo motor (46), a first gear rod (47), a second gear rod (48), a gear ring (49), and an electromagnetic block (491). There are two sets of the servo motor (46), the gear ring (49), and the electromagnetic block (491). The servo motor (46) is fixedly connected to the ring shell (45). The output end of one set of the servo motor (46) is fixedly connected to the first gear rod (47), and the output end of the other set of the servo motor (46) is fixedly connected to the second gear rod (48). The first gear rod (47) and the second gear rod (48) are both in meshing engagement with the tooth surface of the gear ring (49). One set of the gear ring (49) is rotatably connected to the air inlet cavity (451), and the other set of the gear ring (49) is rotatably connected to the air outlet cavity (452). The vacuum pump (424), the liquid pump (425), the circulation pump (426), the inspection table (434), the servo motor (46), and the electromagnetic block (491) are all connected to the chassis (7) through electrical signals.

7. The gas phase epitaxy equipment for the glove box cabinet dedicated to MOCVD according to claim 3, characterized in that: The glove mechanism (5) further includes a positioning ring (52) and a reflux mechanism (53). The reflux mechanism (53) includes a ring cylinder (54). The magnetic suction cup (51), the positioning ring (52), and the ring cylinder (54) are all fixedly connected to the double-port glove (57). The ring cylinder (54) is in contact with the ring shell (45).

8. A vapor phase epitaxy device for a MOCVD dedicated glove box cabinet according to claim 7, characterized in that: The reflux mechanism (53) further includes an intake magnetic valve (55) and an exhaust magnetic valve (56). A channel (541) is provided on the ring cylinder (54). There are several groups of the channel (541), the intake magnetic valve (55), and the exhaust magnetic valve (56). Several groups of the channel (541), the intake magnetic valve (55), and the exhaust magnetic valve (56) are evenly distributed along the circumference of the ring cylinder (54). The intake magnetic valve (55) and the exhaust magnetic valve (56) are both fixedly connected to the channel (541). The intake magnetic valve (55) and the exhaust magnetic valve (56) are both connected to the electromagnetic block (491) through magnetic force.

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