A heat dissipation device for high-power plasma structure
By introducing an inner spiral air guide pipe and a complex water channel structure into the plasma structure, the problems of low ion state conversion efficiency and unsatisfactory heat dissipation of the plasma generator are solved, efficient heat dissipation and ion state conversion are achieved, and the risk of overheating of the magnetic core is reduced.
Patent Information
- Application Number
- CN202510896856.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-01
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2045-07-01
AI Technical Summary
When operating at high power, existing plasma generators have problems such as low ion state conversion efficiency and unsatisfactory heat dissipation efficiency, especially the risk of demagnetization and burning caused by overheating of the magnetic core.
A heat dissipation device for a high-power plasma structure is designed, comprising an ionization chamber and heat dissipation components arranged on both sides thereof. The first, second and third water channels are provided inside the ionization chamber. The complex structure consisting of an inner spiral air guide pipe and a vertical cavity, combined with a rotating seal and a fan blade drive sleeve, improves the gas residence time and the mixing efficiency of the cooling water, thereby enhancing the heat dissipation effect.
By extending the gas residence time and improving the mixing efficiency of the cooling water, the heat dissipation efficiency and ion state conversion efficiency of the ionization chamber are improved, ensuring the long-term stable operation of the equipment.
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Figure CN120417202B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of plasma generators, in particular to a heat dissipation device for a high-power plasma structure. Background Art
[0002] When exposed to high temperatures or strong electromagnetic fields, gases can become plasma, the fourth state of matter after solid, liquid, and gas. In this state, the atoms in the gas have more or fewer electrons than normal, forming anions or cations—negatively or positively charged particles. Any covalent bonds in the gas also break down.
[0003] The plasma generator increases the low voltage to positive high voltage and negative high voltage through the boost circuit, and uses the positive high voltage and negative high voltage to ionize the air to produce a large number of positive ions and negative ions, so that the number of negative ions is greater than the number of positive ions. During its operation, it is easy to cause problems such as overheating of the magnetic core and uneven heat dissipation of the cavity. If the temperature of the magnetic core exceeds the critical point, it will cause demagnetization and burning.
[0004] For example, a remote plasma generator described in publication number CN116390317B uses an external heat dissipation device in conjunction with a cooling water channel in the ionization chamber to achieve synchronous heat exchange inside and outside, thereby improving heat dissipation efficiency, extending the service life of the chamber and seals, and improving production efficiency. However, when it is working, air passes directly through the air cavity, the gas residence time is short, and the ion state conversion efficiency is low. In addition, when the existing technology uses a built-in cooling water channel to dissipate heat from the ionization chamber, only the cooling water channel is added, and there is still a defect that the heat dissipation efficiency is not ideal.
[0005] In view of this, a heat dissipation device for a high-power plasma structure is proposed to improve the ion state conversion efficiency while ensuring high heat dissipation efficiency of the device. Summary of the Invention
[0006] In view of the deficiencies of the prior art, the present invention provides a heat dissipation device for a high-power plasma structure, which solves the problems of low ion state conversion efficiency and less than ideal heat dissipation efficiency of the existing plasma generator.
[0007] To achieve the above objectives, the present invention is implemented through the following technical solution: a heat dissipation device for a high-power plasma structure, comprising an ionization chamber and heat dissipation components arranged on the front and rear sides of the ionization chamber, wherein a first water channel, a second water channel, and a third water channel are opened inside the ionization chamber, the first water channel, the second water channel, and the third water channel are connected in sequence, and an internal spiral air guide pipe is rotatably installed inside the second water channel.
[0008] The present invention is further configured as follows: the ionization chamber includes, from top to bottom, an air inlet chamber, an upper sealed chamber, an upper cooling liquid inlet chamber, two vertical chambers, a lower cooling liquid outlet chamber, and a sealed air outlet chamber; the air inlet chamber, the upper sealed chamber, and the upper cooling liquid inlet chamber are fixed by long fastening bolts; the two vertical chambers are both clamped between the upper cooling liquid inlet chamber and the lower cooling liquid outlet chamber; and the lower cooling liquid outlet chamber and the sealed air outlet chamber are fixed by short fastening bolts;
[0009] There are two inner spiral air guide pipes, which are rotatably installed in the two vertical cavities respectively, and one end thereof passes through the upper cooling liquid inlet cavity and the upper sealing cavity respectively, and the other end thereof passes through the lower cooling liquid outlet cavity, so as to realize the connection between the air inlet cavity and the sealed air outlet cavity.
[0010] The present invention is further configured as follows: a magnetic core assembly is commonly sleeved on the outer peripheries of the two vertical cavities, and the upper sealed cavity, the magnetic core assembly and the sealed air outlet cavity are fixed by a reinforcement bracket;
[0011] The reinforcement bracket includes a male fixing plate and a female fixing plate, and the male fixing plate and the female fixing plate are matched with each other through a slot. The male fixing plate is fixedly installed on one side of the upper sealed cavity by bolts, and the female fixing plate is fixedly connected to the magnetic core assembly and one side of the sealed air outlet cavity by bolts respectively.
[0012] The present invention is further configured such that: the second water channel is provided through the top of the vertical cavity; four first water channels are provided, all of which are provided through the top of the vertical cavity; and the four first water channels are evenly spaced and distributed around the outer periphery of the second water channel; four guide grooves are provided at the bottom of the vertical cavity, and the guide grooves are respectively connected to the first water channel and the second water channel;
[0013] The inner spiral air guide pipe comprises a pipe body, a spiral guide plate is fixedly installed inside the pipe body, a vertical fan blade drive sleeve is sleeved and fixedly installed on the outer periphery of the pipe body, and the guide grooves are evenly distributed on the outer periphery of the vertical fan blade drive sleeve.
[0014] The present invention is further configured as follows: rotary seals are sleeved on the top and bottom of the outer periphery of the tube body, and the rotary seals are used in conjunction with the upper sealing cavity and the sealed air outlet cavity respectively.
[0015] The present invention is further configured as follows: two liquid inlet blind holes are provided on both sides of the upper cooling liquid inlet cavity; two liquid guide blind holes connected to the liquid inlet blind holes are provided at the bottom of the upper cooling liquid inlet cavity; the four liquid guide blind holes are connected to the four first water channels respectively;
[0016] First three-way pipes are fixedly installed on both sides of the upper cooling liquid inlet cavity, and two water outlet ends of the first three-way pipes are respectively arranged on the periphery of the two liquid inlet blind holes.
[0017] The present invention is further configured such that: the third water channel is opened at the bottom of the vertical cavity, and the top of the second water channel inner cavity is connected to the third water channel through an opening;
[0018] The lower cooling liquid outlet cavity includes an upper cold plate and a lower cold plate. A liquid guide port connected to the third water channel is opened on the top of the upper cold plate. A rectangular groove and a mixed flow circular hole are opened on opposite sides of the upper cold plate and the lower cold plate. The rectangular groove is respectively connected to the two liquid guide ports, and the mixed flow circular hole is connected to the rectangular groove through two offset grooves.
[0019] The bottom of the lower cold plate is connected with a second three-way pipe connected with the mixed flow circular hole.
[0020] The present invention is further configured as follows: the heat dissipation assembly includes a heat-conducting back plate and a cover plate, the heat-conducting back plate and the cover plate are fixedly connected by bolts, and the heat-conducting back plate and the cover plate are provided with a curved water trough on opposite sides thereof;
[0021] A liquid inlet connector connected to the water inlet end of the curved water tank is fixedly installed on the opposite side of the two heat-conducting back plates, and the two liquid inlet connectors are respectively connected to the two water outlet ends of the second three-way pipe;
[0022] The two cover plates are fixedly connected to opposite sides with liquid outlet pipes, and the liquid outlet pipes are communicated with the water outlet end of the curved water tank;
[0023] The two heat-conducting back plates are respectively fixedly mounted on the front and rear sides of the magnetic core assembly by bolts.
[0024] The present invention provides a heat dissipation device for a high-power plasma structure. It has the following beneficial effects:
[0025] (1) The present invention utilizes an inner spiral air guide pipe as an airway to increase the gas residence time while driving the inner spiral air guide pipe to rotate. In conjunction with the arrangement of the first water channel, the second water channel and the third water channel, when cooling water passes through at high speed, the rotation of the inner spiral air guide pipe is accelerated, so that the core area density of the gas is increased by the centrifugal force generated by the rotation, the collision frequency of electrons and molecules is increased, and the ionization efficiency is improved. The inner spiral air guide pipe is placed in the second water channel, and heat is dissipated during the rotation of the inner spiral air guide pipe, which effectively improves the heat dissipation efficiency of the ionization chamber and provides efficient and reliable protection for the long-term stable use of the equipment.
[0026] (2) The present invention uses rectangular grooves to guide and mix the cooling water after the two cooling waters have undergone heat exchange with the vertical cavity. With the cooperation of the offset grooves and the mixed flow holes, the mixing efficiency of the cooling water is further improved, so as to ensure the consistency of the initial temperature of the cooling water introduced into the two heat dissipation components, thereby providing support for the uniform heat dissipation of the periphery of the magnetic core component. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] Figure 1 Schematic diagram of the external structure of the present invention;
[0028] Figure 2 Schematic diagram of the structure of the ionization chamber of the present invention;
[0029] Figure 3 Schematic diagram of the expanded structure of the ionization chamber of the present invention;
[0030] Figure 4 This is a schematic diagram of the internal structure of the cooling liquid inlet cavity of the present invention;
[0031] Figure 5 This is a schematic diagram of the structure of the lower cooling liquid outlet cavity of the present invention;
[0032] Figure 6 Schematic diagram of the internal structure of the ionization chamber of the present invention;
[0033] Figure 7 This is a schematic structural diagram of the inner spiral air guide pipe of the present invention;
[0034] Figure 8 It is a schematic diagram of the expansion of the heat dissipation assembly structure of the present invention;
[0035] Figure 9 It is a schematic structural diagram of the vertical cavity of the present invention from an upward perspective.
[0036] In the picture:
[0037] 1. Ionization chamber;
[0038] 2. Heat dissipation assembly; 201. Thermal conductive back plate; 202. Cover plate; 203. Curved water tank; 204. Liquid inlet connector; 205. Liquid outlet pipe;
[0039] 3. First Waterway;
[0040] 4. Second waterway;
[0041] 5. Reinforcement bracket; 501. Male fixing plate; 502. Female fixing plate;
[0042] 6. The third waterway;
[0043] 7. Air intake cavity;
[0044] 8. Upper sealing cavity;
[0045] 9. Upper cooling liquid inlet cavity; 901. Liquid inlet blind hole; 902. Liquid guide blind hole; 903. First three-way pipe;
[0046] 10. Vertical cavity; 1001. Diversion trough;
[0047] 11. Lower cooling liquid outlet cavity; 1101. Upper cold plate; 1102. Lower cold plate; 1103. Liquid guide port; 1104. Rectangular slot; 1105. Mixing hole; 1106. Offset slot; 1107. Second three-way pipe;
[0048] 12. Seal the air outlet cavity;
[0049] 13. Magnetic core assembly;
[0050] 14. Inner spiral air guide pipe; 1401. Tube body; 1402. Spiral guide plate; 1403. Vertical fan blade drive sleeve; 1404. Rotary seal. DETAILED DESCRIPTION
[0051] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.
[0052] See also Figure 1-9 , the embodiment of the present invention provides the following technical solutions:
[0053] Example 1
[0054] A heat dissipation device for a high-power plasma structure includes an ionization chamber 1 and two heat dissipation components 2. The ionization chamber 1 includes, from top to bottom, an air inlet chamber 7, an upper sealed chamber 8, an upper cooling liquid inlet chamber 9, two vertical chambers 10, a lower cooling liquid outlet chamber 11, and a sealed air outlet chamber 12. The outer peripheries of the two vertical chambers 10 are jointly sleeved with a magnetic core component 13. The upper sealed chamber 8, the magnetic core component 13, and the sealed air outlet chamber 12 are fixed by a reinforcement bracket 5. The reinforcement bracket 5 includes a male fixing plate 501 and a female fixing plate 502. The male fixing plate 501 and the female fixing plate 502 are matched by a slot. The male fixing plate 501 is fixed to one side of the upper sealed chamber 8 by bolts, and the female fixing plate 502 is fixed by a slot. The bolts are fixedly connected to the magnetic core assembly 13 and one side of the sealed air outlet cavity 12 respectively. The air inlet cavity 7, the upper sealed cavity 8 and the upper cooling liquid inlet cavity 9 are fixed by long fastening bolts, and the air inlet cavity 7 and the upper sealed cavity 8 are sealed by a sealing gasket to ensure air tightness. An air inlet is opened at the top of the air inlet cavity 7. The two vertical cavities 10 are both clamped between the upper cooling liquid inlet cavity 9 and the lower cooling liquid outlet cavity 11. The opposite sides of the upper cooling liquid inlet cavity 9 and the lower cooling liquid outlet cavity 11 are fixedly installed with mounting groove frames, and sealing gaskets are embedded in the mounting groove frames to ensure the sealing effect of the connection. The lower cooling liquid outlet cavity 11 and the sealed air outlet cavity 12 are fixed by short fastening bolts.
[0055] As a preferred solution, in order to extend the gas residence time, an inner spiral air guide pipe 14 is rotatably installed in each of the two vertical cavities 10, and one end of the inner spiral air guide pipe 14 passes through the upper cooling liquid inlet cavity 9 and the upper sealing cavity 8 respectively, and the other end passes through the lower cooling liquid outlet cavity 11, which is used to achieve communication between the air inlet cavity 7 and the sealed air outlet cavity 12.
[0056] As a preferred solution, the inner spiral air guide pipe 14 includes a tube body 1401, a spiral guide plate 1402 is fixedly installed inside the tube body 1401, and the top and bottom of the outer periphery of the tube body 1401 are both provided with rotating seals 1404, and the rotating seals 1404 are respectively used in conjunction with the upper sealing cavity 8 and the sealed air outlet cavity 12 to ensure the sealing effect during the rotation process.
[0057] To further illustrate, a number of sealing rings are also provided on the outer periphery of the tube body 1401 , and these sealing rings are respectively arranged between the bottom of the upper cooling liquid inlet cavity 9 and the top of the vertical cavity 10 , and between the upper cold plate 1101 and the lower cold plate 1102 described below.
[0058] As a preferred solution, in order to improve the heat dissipation efficiency, a first water channel 3, a second water channel 4 and a third water channel 6 are provided inside the ionization chamber 1. The first water channel 3, the second water channel 4 and the third water channel 6 are connected in sequence, and the inner spiral air guide pipe 14 is rotatably installed inside the second water channel 4. Specifically, the second water channel 4 is opened through the top of the vertical cavity 10, and there are four first water channels 3, all of which are opened through the top of the vertical cavity 10, and the four first water channels 3 are evenly distributed around the outer periphery of the second water channel 4. Four guide grooves 1001 are provided at the bottom of the vertical cavity 10, and the guide grooves 1001 are respectively connected to the first water channel 3 and the second water channel 4. The third water channel 6 is opened at the bottom of the vertical cavity 10, and the top of the inner cavity of the second water channel 4 is connected to the third water channel 6 through an opening.
[0059] As a preferred solution, in order to further improve the ionization efficiency and heat dissipation efficiency, a vertical fan blade drive sleeve 1403 is sleeved and fixedly installed on the outer periphery of the tube body 1401. The vertical fan blade drive sleeve 1403 rotates inside the second water channel 4, and the vertical fan blade drive sleeve 1403 contacts the top of the lower cooling liquid outlet cavity 11, and the guide grooves 1001 are evenly distributed on the outer periphery of the vertical fan blade drive sleeve 1403.
[0060] In order to increase the coverage area of cooling water and improve the heat dissipation efficiency of the equipment, two liquid inlet blind holes 901 are provided on both sides of the upper cooling liquid inlet cavity 9, and two liquid guide blind holes 902 connected to the liquid inlet blind holes 901 are provided at the bottom of the upper cooling liquid inlet cavity 9. The four liquid guide blind holes 902 are respectively connected to the four first water channels 3. A first three-way pipe 903 is fixedly installed on both sides of the upper cooling liquid inlet cavity 9, and the two water outlet ends of the first three-way pipe 903 are respectively arranged on the outer periphery of the two liquid inlet blind holes 901. The water inlet end of the first three-way pipe 903 is connected to the external cooling water high-speed supply equipment, such as pumping, to ensure the high-speed supply of cooling water. The liquid outlet end of the lower cooling liquid outlet cavity 11 is connected to the second three-way pipe 1107.
[0061] During use, the cooling water is introduced into the upper cooling liquid inlet cavity 9 through the two first three-way pipes 903, so that the cooling water enters the liquid guide blind hole 902 through the liquid inlet blind hole 901, and then enters the first water channel 3. The cooling water then enters the second water channel 4 through the guide groove 1001, and drives the vertical fan blade drive sleeve 1403 to drive the tube body 1401 to rotate. After the cooling water exchanges heat with the tube body 1401 in the upper flow of the second water channel 4, it enters the third water channel 6 through the opening, and then the cooling water enters the heat dissipation component 2 through the second three-way pipe 1107.
[0062] As a preferred solution, the heat dissipation component 2 includes a heat-conducting back plate 201 and a cover plate 202. The two heat-conducting back plates 201 are fixedly installed on the front and rear sides of the magnetic core component 13 by bolts respectively. The heat-conducting back plate 201 and the cover plate 202 are fixedly connected by bolts. The opposite sides of the heat-conducting back plate 201 and the cover plate 202 are provided with a curved water trough 203 for matching use, and a sealing gasket is embedded between the heat-conducting back plate 201 and the cover plate 202 to ensure the sealing effect. The opposite sides of the two heat-conducting back plates 201 are fixedly installed with a liquid inlet connector 204 connected to the water inlet end of the curved water trough 203, and the two liquid inlet connectors 204 are respectively connected to the two water outlet ends of the second three-way pipe 1107. The opposite sides of the two cover plates 202 are fixedly connected with a liquid outlet pipe 205, and the liquid outlet pipe 205 is connected to the water outlet end of the curved water trough 203.
[0063] During use, the cooling liquid is diverted through the second three-way pipe 1107 and enters the two heat dissipation components 2 respectively, and flows along the curved water trough 203. During the process, heat is exchanged with the magnetic core component 13 through the thermal back plate 201, and then the cooling water is discharged through the liquid outlet pipe 205, completing the circulation of the cooling water.
[0064] In this embodiment, while increasing the gas residence time, the heat dissipation efficiency of the device can also be improved, and the gas density can be increased through centrifugal action to improve the ionization efficiency.
[0065] Example 2
[0066] On the basis of Example 1, the lower cooling liquid outlet cavity 11 includes an upper cold plate 1101 and a lower cold plate 1102. The top of the upper cold plate 1101 is provided with a liquid guide port 1103 connected to the third water channel 6. The upper cold plate 1101 and the lower cold plate 1102 are provided with rectangular grooves 1104 and mixed flow circular holes 1105 on the opposite sides. The rectangular grooves 1104 are respectively connected to the two liquid guide ports 1103, and the mixed flow circular holes 1105 are connected to the rectangular grooves 1104 through two offset grooves 1106. The bottom of the lower cold plate 1102 is connected to a second three-way pipe 1107 connected to the mixed flow circular hole 1105.
[0067] During use, the cooling water exchanges heat with the tube body 1401 upstream in the second water channel 4, then enters the third water channel 6 through the opening, and then the cooling water enters the rectangular groove 1104 through the liquid guide port 1103. The cooling water enters the mixed flow circular hole 1105 through the two offset grooves 1106 and is mixed, and then discharged from the lower cooling liquid outlet cavity 11 through the second three-way pipe 1107. After being diverted by the second three-way pipe 1107, it enters the two heat dissipation components 2 respectively.
[0068] The advantage of the second embodiment over the first embodiment is that the coolant can be mixed in the mixed flow circular hole 1105 to ensure the uniformity of the temperature of the coolant introduced into the two heat dissipation components 2, thereby providing support for the uniform heat dissipation of the magnetic core component 13.
[0069] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.
Claims
1. A heat dissipation device for a high-power plasma structure, comprising an ionization chamber (1) and heat dissipation components (2) arranged on the front and rear sides of the ionization chamber (1), characterized in that: A first water channel (3), a second water channel (4) and a third water channel (6) are provided inside the ionization chamber (1); the first water channel (3), the second water channel (4) and the third water channel (6) are connected in sequence, and an inner spiral air guide pipe (14) is rotatably installed inside the second water channel (4); The second water channel (4) is provided through the top of the vertical cavity (10) in the ionization chamber (1), four first water channels (3) are provided, all of which are provided through the top of the vertical cavity (10), and the four first water channels (3) are evenly distributed around the periphery of the second water channel (4), and four guide grooves (1001) are provided at the bottom of the vertical cavity (10), and the guide grooves (1001) are respectively connected to the first water channel (3) and the second water channel (4); The inner spiral air guide pipe (14) comprises a pipe body (1401), a spiral guide plate (1402) is fixedly installed inside the pipe body (1401), a vertical fan blade drive sleeve (1403) is sleeved and fixedly installed on the outer periphery of the pipe body (1401), and the guide grooves (1001) are evenly distributed on the outer periphery of the vertical fan blade drive sleeve (1403).
2. The heat dissipation device for a high-power plasma structure according to claim 1, characterized in that: The ionization chamber (1) comprises, from top to bottom, an air inlet chamber (7), an upper sealing chamber (8), an upper cooling liquid inlet chamber (9), two vertical chambers (10), a lower cooling liquid outlet chamber (11) and a sealed air outlet chamber (12); the air inlet chamber (7), the upper sealing chamber (8) and the upper cooling liquid inlet chamber (9) are fixed by long fastening bolts; the two vertical chambers (10) are clamped between the upper cooling liquid inlet chamber (9) and the lower cooling liquid outlet chamber (11); and the lower cooling liquid outlet chamber (11) and the sealed air outlet chamber (12) are fixed by short fastening bolts; Two inner spiral air guide pipes (14) are provided and are rotatably mounted in the two vertical cavities (10), and one end thereof respectively penetrates the upper cooling liquid inlet cavity (9) and the upper sealing cavity (8), and the other end thereof penetrates the lower cooling liquid outlet cavity (11), so as to realize the communication between the air inlet cavity (7) and the sealed air outlet cavity (12).
3. The heat dissipation device for a high-power plasma structure according to claim 2, characterized in that: The outer peripheries of the two vertical cavities (10) are jointly sleeved with a magnetic core assembly (13), and the upper sealed cavity (8), the magnetic core assembly (13) and the sealed air outlet cavity (12) are fixed by a reinforcement bracket (5); The reinforcement bracket (5) comprises a male fixing plate (501) and a female fixing plate (502), wherein the male fixing plate (501) and the female fixing plate (502) are engaged with each other via a slot, the male fixing plate (501) is fixedly mounted on one side of the upper sealing cavity (8) via bolts, and the female fixing plate (502) is fixedly connected to one side of the magnetic core assembly (13) and the sealed air outlet cavity (12) via bolts, respectively.
4. The heat dissipation device for a high-power plasma structure according to claim 2, characterized in that: The top and bottom of the outer periphery of the tube body (1401) are both sleeved with rotating seals (1404), and the rotating seals (1404) are used in conjunction with the upper sealing cavity (8) and the sealed air outlet cavity (12), respectively.
5. The heat dissipation device for a high-power plasma structure according to claim 2, characterized in that: Two liquid inlet blind holes (901) are provided on both sides of the upper cooling liquid inlet cavity (9), and two liquid guide blind holes (902) communicating with the liquid inlet blind holes (901) are provided at the bottom of the upper cooling liquid inlet cavity (9), and the four liquid guide blind holes (902) are respectively communicated with the four first water channels (3); A first three-way pipe (903) is fixedly installed on both sides of the upper cooling liquid inlet cavity (9), and the two water outlet ends of the first three-way pipe (903) are respectively arranged on the periphery of the two liquid inlet blind holes (901).
6. The heat dissipation device for a high-power plasma structure according to claim 2, characterized in that: The third water channel (6) is opened at the bottom of the vertical cavity (10), and the top of the inner cavity of the second water channel (4) is connected to the third water channel (6) through an opening; The lower cooling liquid outlet cavity (11) comprises an upper cold plate (1101) and a lower cold plate (1102), the top of the upper cold plate (1101) is provided with a liquid guide port (1103) connected to the third water channel (6), and the upper cold plate (1101) and the lower cold plate (1102) are provided with rectangular grooves (1104) and mixed flow circular holes (1105) on opposite sides, the rectangular grooves (1104) are respectively connected to the two liquid guide ports (1103), and the mixed flow circular holes (1105) are connected to the rectangular grooves (1104) through two offset grooves (1106); The bottom of the lower cold plate (1102) is connected to a second three-way pipe (1107) connected to the mixed flow circular hole (1105).
7. The heat dissipation device for a high-power plasma structure according to claim 6, characterized in that: The heat dissipation assembly (2) comprises a heat-conducting back plate (201) and a cover plate (202), wherein the heat-conducting back plate (201) and the cover plate (202) are fixedly connected by bolts, and the heat-conducting back plate (201) and the cover plate (202) are both provided with a curved water trough (203) on opposite sides thereof for use with each other; A liquid inlet connector (204) connected to the water inlet end of the curved water trough (203) is fixedly mounted on opposite sides of the two heat-conducting back plates (201), and the two liquid inlet connectors (204) are respectively connected to the two water outlet ends of the second three-way pipe (1107); The two opposite sides of the two cover plates (202) are both fixedly connected with a liquid outlet pipe (205), and the liquid outlet pipe (205) is communicated with the water outlet end of the curved water tank (203); The two heat-conducting back plates (201) are respectively fixedly mounted on the front and rear sides of the magnetic core assembly (13) by means of bolts.
Citation Information
Patent Citations
A remote plasma generator
CN116390317B
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CN115151012A
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CN115175427A