Detection module and electron microscope

Abstract

The invention relates to a detection module. The detection module comprises a first shell, a second shell, a detector and a telescopic tube, the first shell is provided with a first accommodating cavity and a detection opening; the second shell is provided with a second accommodating cavity and a first through hole; the detector is positioned in the first accommodating cavity; the telescopic pipe is contained in the second containing cavity, the telescopic pipe is connected with the first shell and the second shell in an airtight mode, when the telescopic pipe stretches out and draws back, the first shell moves relative to the second shell, and the second containing cavity comprises a first sub-cavity which is located between the telescopic pipe and the second shell or located among the telescopic pipe, the first shell and the second shell. When the detection module is used, no large friction force is generated between the first shell and the second shell, and the transmission part of the driving mechanism is not in contact with the telescopic pipe, so that the difficulty of driving the first shell to move is reduced; the transmission part cannot enter the vacuum in the electron microscope, a sealing ring is not needed, and gas adsorbed on the surface of the transmission part cannot be released into the vacuum of the electron microscope.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of electron microscopes, and in particular, to a detection module and an electron microscope. Background Art

[0002] An electron microscope is a microscopic device that uses an electron beam instead of a light beam to observe a sample, and it can provide a higher resolution than a traditional optical microscope. The detection module of an electron microscope is one of its core components, responsible for receiving the electron signals reflected or transmitted from the surface of the sample in the electron microscope and converting them into observable images. The detection module usually includes a series of precise electronic components and optical systems, and these components need to work in a high-vacuum environment to avoid the scattering and absorption of the electron beam by air molecules.

[0003] The detection module is generally set to be retractable, that is, the detector can extend out of the housing of the detection module or retract into the housing of the detection module. In order to drive the movement of the detector, a cylinder is usually used. In this case, the cylinder is connected to the component that houses or supports the detector via a drive rod. Since the inside of the electron microscope is vacuum and the cylinder is usually arranged outside the electron microscope, when driving the detector to extend out of the housing of the detection module, the drive rod usually needs to be inserted into its interior from the outside of the electron microscope. In order to maintain the vacuum inside the electron microscope, a sealing ring must be provided between the outer shell of the electron microscope and the drive rod. However, since the drive rod is in close contact with the sealing ring, when the drive rod is inserted into the interior of the electron microscope from the outside, it is necessary to overcome the large frictional force generated between the drive rod and the sealing ring. Therefore, the cylinder needs to generate a large driving force, resulting in an increased difficulty in driving the detector to move. In addition, due to the relative movement between the drive rod and the sealing ring, the sealing ring is gradually worn, so the sealing performance of the sealing ring is gradually reduced, which has an adverse effect on the vacuum inside the electron microscope. Moreover, since the surface of the drive rod can adsorb gas, after the drive rod enters the interior of the electron microscope, the adsorbed gas may be released from the surface of the drive rod, which also has an adverse effect on the vacuum inside the electron microscope. Summary of the Invention

[0004] In view of the above problems, the embodiments of the present application provide a detection module and an electron microscope, which overcome the above problems or at least partially solve the above problems.

[0005] According to one aspect of the embodiments of the present application, a detection module is provided, including a first housing, a second housing, a detector, and a telescopic tube; the first housing has a first receiving cavity and a detection port, and the detection port communicates the first receiving cavity with the outside of the first housing; the second housing has a second receiving cavity and a first through hole, and the first through hole communicates the second receiving cavity with the outside of the second housing; the detector is located in the first receiving cavity; the telescopic tube is received in the second receiving cavity, one axial end of the telescopic tube is hermetically connected to the first housing, and the other axial end of the telescopic tube is hermetically connected to the second housing. When the telescopic tube expands and contracts, the first housing moves relative to the second housing. The second receiving cavity includes a first sub-chamber, and the first sub-chamber is located between the telescopic tube and the second housing or between the telescopic tube, the first housing and the second housing. The first sub-chamber communicates with the outside of the second housing through the first through hole, and the inside of the telescopic tube is not communicated with the first receiving cavity and the first sub-chamber.

[0006] In an alternative manner, at least a part of the first housing is received in the second receiving cavity. When the telescopic tube contracts, the first housing retracts into the second receiving cavity through the first through hole. When the telescopic tube does not contract, the first housing extends out of the second receiving cavity through the first through hole.

[0007] In an alternative manner, a first spacer is provided between the one end of the telescopic tube and the second housing, and the first spacer is located in the first sub-chamber.

[0008] In an alternative manner, a second spacer is provided between the first housing and the second housing, and the second spacer is located in the first sub-chamber.

[0009] In an alternative manner, the telescopic tube is a corrugated tube or an elastic rubber tube.

[0010] In an alternative manner, the detection module further includes a first sleeve and a second sleeve; the first sleeve is nested outside the telescopic tube and is located in the first sub-chamber; the second sleeve is nested inside the telescopic tube; one of the first sleeve and the second sleeve is adjacent to the one end of the telescopic tube and can move together with the one end of the telescopic tube, and the other of the first sleeve and the second sleeve is adjacent to the other end of the telescopic tube; when the telescopic tube does not contract, the first sleeve and the second sleeve are spaced apart in the axial direction of the telescopic tube, and when the telescopic tube contracts, the second sleeve is inserted into the first sleeve.

[0011] In an alternative manner, the detection module further includes a driving mechanism, the driving mechanism includes a driving part and a transmission part, the transmission part is connected to the driving part, and the driving part drives the first housing to move relative to the second housing via the transmission part; the transmission part is directly or indirectly connected to one end of the telescopic tube in the axial direction of the telescopic tube.

[0012] In an alternative manner, the driving part is arranged outside the second housing, the transmission part penetrates through the second housing, passes through the opening at the other end of the telescopic tube and is directly or indirectly connected to one end of the telescopic tube in the axial direction.

[0013] In an alternative manner, the detection module further includes a connecting mechanism, and the transmission part is indirectly connected to one end of the telescopic tube in the axial direction via the connecting mechanism.

[0014] In an alternative manner, the detection module further includes a locked part and a locking mechanism, and the locking mechanism can lock the locked part; the locked part is directly or indirectly connected to one end of the telescopic tube in the telescopic tube.

[0015] In an alternative manner, the locking mechanism is arranged outside the second housing, the locked part penetrates through the second housing, passes through the opening at the other end of the telescopic tube and is directly or indirectly connected to one end of the telescopic tube in the axial direction.

[0016] In an alternative manner, the detection module further includes a connecting mechanism, and the locked part is indirectly connected to one end of the telescopic tube in the axial direction via the connecting mechanism.

[0017] In an alternative manner, the first housing further has a third receiving cavity and a second through hole, a partition part is arranged inside the first housing, the partition part divides the interior of the first housing into the first receiving cavity and the third receiving cavity, and the third receiving cavity is communicated with the inside of the telescopic tube via the second through hole and the opening at one end of the telescopic tube; the detection module further includes a cooling component and a cooling tube, the cooling component is located in the third receiving cavity, cools the detector via the partition part, and the cooling tube is connected to the cooling component and fixed to the locked part.

[0018] In an alternative manner, the partition portion has a third through hole that allows the first receiving cavity to communicate with the third receiving cavity; the detection module further includes a sealing member, a first electrical connector, a second electrical connector, a plurality of electrical connecting rods, and a data transmission line. The sealing member hermetically seals the third through hole. The first electrical connector and the second electrical connector are respectively disposed on two sides of the sealing member. The plurality of electrical connecting rods hermetically penetrate through the sealing member and electrically connect the first electrical connector and the second electrical connector. The detector is electrically connected to the first electrical connector, and the data transmission line is electrically connected to the second electrical connector and fixed to the locked member.

[0019] In an alternative manner, the first housing further has a third through hole that allows the first receiving cavity to communicate with the interior of the telescopic tube; the detection module further includes a sealing member, a first electrical connector, a second electrical connector, a plurality of electrical connecting rods, and a data transmission line. The sealing member hermetically seals the third through hole. The first electrical connector and the second electrical connector are respectively disposed on two sides of the sealing member. The plurality of electrical connecting rods hermetically penetrate through the sealing member and electrically connect the first electrical connector and the second electrical connector. The detector is electrically connected to the first electrical connector, and the data transmission line is electrically connected to the second electrical connector and fixed to the locked member.

[0020] In an alternative manner, the locked member has a groove, and the locking mechanism includes a driver and a locking tongue. The driver can drive the locking tongue to move back and forth. When the locking tongue is aligned with the groove, the driver can drive the locking tongue to insert into the groove, thereby locking the locked member.

[0021] In an alternative manner, the locking mechanism further includes a protrusion connected to the locking tongue, and the detection module further includes an unlocking tool that has a fourth through hole. When the protrusion inserts into the fourth through hole, the locking tongue can insert into the groove, thereby locking the locked member. When the protrusion does not insert into the fourth through hole and abuts against the unlocking tool, the locking tongue does not insert into the groove, and the locked member is not locked.

[0022] In an alternative embodiment, the first housing further has a third receiving cavity and a second through hole. A partition is provided inside the first housing, which divides the interior of the first housing into the first receiving cavity and the third receiving cavity. The third receiving cavity communicates with the interior of the telescopic tube through the second through hole and the opening at one end of the telescopic tube. The detection module further includes a cooling component and a cooling tube. The cooling component is located in the third receiving cavity and cools the detector through the partition. The cooling tube is connected to the cooling component.

[0023] In an alternative embodiment, the partition has a third through hole that allows the first receiving cavity to communicate with the third receiving cavity. The detection module further includes a sealing component that hermetically seals the third through hole.

[0024] In an alternative embodiment, the first housing further has a third through hole that allows the first receiving cavity to communicate with the interior of the telescopic tube. The detection module further includes a sealing component that hermetically seals the third through hole.

[0025] According to one aspect of the embodiments of the present application, an electron microscope is provided, which includes a housing and the detection module described above. The housing has an access hole. The second housing is hermetically connected to the housing, and the first through hole faces the access hole. The first housing can enter the interior of the housing through the access hole, and the detection port communicates the first receiving cavity with the interior of the housing. The first sub-chamber communicates with the interior of the housing through the first through hole and the access hole. The interior of the telescopic tube is not in communication with the interior of the housing.

[0026] The beneficial effects of the embodiments of the present application include: providing a detection module, which includes a first housing, a second housing, a detector, and a telescopic tube; the first housing has a first receiving cavity and a detection port, and the detection port communicates the first receiving cavity with the outside of the first housing; the second housing has a second receiving cavity and a first through hole, and the first through hole communicates the second receiving cavity with the outside of the second housing; the detector is located in the first receiving cavity; the telescopic tube is received in the second receiving cavity, one axial end of the telescopic tube is airtightly connected to the first housing, and the other axial end of the telescopic tube is airtightly connected to the second housing. When the telescopic tube expands and contracts, the first housing moves relative to the second housing. The second receiving cavity includes a first sub-chamber, and the first sub-chamber is located between the telescopic tube and the second housing or between the telescopic tube, the first housing and the second housing. The first sub-chamber communicates with the outside of the second housing through the first through hole, and the inside of the telescopic tube is not connected to the first receiving cavity and the first sub-chamber. In this detection module, by providing the telescopic tube, it not only ensures that the first housing for housing the detector can move relative to the second housing, but also forms a first sub-chamber between the telescopic tube and the second housing or between the telescopic tube, the first housing and the second housing. Therefore, it is ensured that when the first housing moves relative to the second housing, there is no close contact between the telescopic tube and the second housing or between the telescopic tube, the first housing and the second housing, no large frictional force is generated, and the difficulty of driving the first housing to move is reduced. Furthermore, the transmission part (for example, the driving rod) of the driving mechanism is located inside the telescopic tube and does not contact the telescopic tube. Therefore, when the driving mechanism drives the first housing to move relative to the second housing, no frictional force is generated in the transmission part, and the difficulty of driving the first housing to move is also reduced.

[0027] In addition, the beneficial effects of the embodiments of the present application further include: providing an electron microscope, including a housing and the detection module; the housing has an access hole; the second housing is hermetically connected to the housing, and the first through hole faces the access hole; the first housing can enter the interior of the housing through the access hole, and the detection port communicates the first accommodation cavity with the interior of the housing; the first sub-chamber communicates with the interior of the housing through the first through hole and the access hole; the interior of the telescopic tube is not communicated with the interior of the housing. Since the interior of the telescopic tube is not communicated with the first accommodation cavity and the first sub-chamber, when installing the detection module on the electron microscope, although the first accommodation cavity and the first sub-chamber are communicated with the interior of the housing, the interior of the telescopic tube is not communicated with the interior of the housing and becomes a vacuum. Therefore, the transmission part located inside the telescopic tube will not enter and be exposed to the vacuum inside the electron microscope. Therefore, there is no need to provide a sealing ring between the housing of the electron microscope and the transmission part as in the prior art. Moreover, the gas adsorbed on the surface of the transmission part will not be released into the vacuum inside the electron microscope, avoiding the adverse effects on the vacuum inside the electron microscope caused by the wear of the sealing ring and the release of gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] One or more embodiments are illustrated by way of example in the accompanying drawings, which illustrations do not constitute a limitation of the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements, unless otherwise stated, and the drawings in the figures do not constitute a scale limitation.

[0029] Figure 1 is a schematic view of one perspective of the detection module provided by the embodiment of the present application;

[0030] Figure 2 is a schematic view of another perspective of the detection module provided by the embodiment of the present application;

[0031] Figure 3 is provided by the embodiment of the present application along Figure 1 a cross-sectional view taken along P in;

[0032] Figure 4 is provided by the embodiment of the present application along Figure 1 a three-dimensional cross-sectional view taken along P in;

[0033] Figure 5 is a schematic view of the cooling component connected with a temperature sensor provided by the embodiment of the present application;

[0034] Figure 6 is a partial schematic view of the cooling component provided by the embodiment of the present application;

[0035] Figure 7It is another partial schematic diagram of the cooling component provided by the embodiment of the present application;

[0036] Figure 8 It is a partial exploded schematic diagram of the detection module including the locked component and the unlocking tool provided by the embodiment of the present application;

[0037] Figure 9 It is a partial schematic diagram of the detection module including the locked component and the unlocking tool provided by the embodiment of the present application;

[0038] Figure 10 It is a cross-sectional view of the electron microscope provided by the embodiment of the present application.

[0039] The reference numerals in the drawings are as follows:

[0040] 100. Detection module;

[0041] 1. First housing; 2. Second housing; 3a. First spacer; 3b. Second spacer; 4. First seal; 5. Protective component; 7. Sealing component; 8. Detector; 9. Second seal; 10. Detection circuit board; 11. Data transmission line; 12. Electric control board; 13. First electrical connector; 14. Second electrical connector; 15. Electrical connecting rod; 16. Third housing; 17. Third seal; 18. Driving mechanism; 19. Connecting mechanism; 20. Locked component; 21. Telescopic tube; 22. Fourth seal; 23. Fifth seal; 24. First sleeve; 25. Second sleeve; 26. Locking mechanism; 27. Mounting seat; 28. Unlocking tool; 29. Cooling component; 30. Cooling tube; 31. Pump; 32. Temperature sensor;

[0042] 101. First receiving cavity; 102. Detection port; 103. Third through hole; 104. Third receiving cavity; 105. Partition part; 106. Second through hole; 107. Support part;

[0043] 201. Second receiving cavity; 202. First sub-chamber; 204. First through hole;

[0044] 2a. First part; 2b. Second part;

[0045] 2s. Inner cavity;

[0046] 161. Unlocking port;

[0047] 181. Driving part; 182. Transmission part;

[0048] 2001. Inner surface; 2002. Outer surface; 2003. Groove;

[0049] 251. Metal sleeve; 252. Nylon sleeve;

[0050] 261. Driver; 262. Lock tongue; 2621. Protrusion; 26211. Inclined surface;

[0051] 271. Mounting hole;

[0052] 281. Fourth through-hole;

[0053] 291. Refrigerator; 292. Cooling member; 293. Heat insulation member; 294. Heat conducting member;

[0054] 2911. Cold end; 2912. Hot end; 2913. Power cord;

[0055] 2921. Main body part; 2922. Liquid inlet pipe; 2923. Liquid outlet pipe;

[0056] 2931. Accommodating cavity; 2932. First opening; 2933. Second opening; 2934. Blocking member.

[0057] 2941. Jack;

[0058] 1000. Electron microscope;

[0059] 200. Outer shell; 200s. Access hole. Detailed implementation manners

[0060] For the convenience of understanding the present application, the present application will be described in more detail below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is expressed as "fixed to" another element, it can be directly on the other element, or there can be one or more intermediate elements therebetween. When an element is expressed as "connected to" another element, it can be directly connected to the other element, or there can be one or more intermediate elements therebetween. The terms "vertical", "horizontal", "left", "right", "inner", "outer" and similar expressions used in this specification are only for the purpose of illustration.

[0061] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the technical field to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not used to limit this application. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0062] Please refer to Figures 1 to 4, an embodiment of the present application provides a detection module 100. The detection module 100 includes a first housing 1, a second housing 2, a first spacer 3a, a second spacer 3b, a first seal 4, a protection component 5, a sealing component 7, a detector 8, a second seal 9, a detection circuit board 10, a data transmission line 11, an electronic control board 12, a first electrical connector 13, a second electrical connector 14, an electrical connecting rod 15, a third housing 16, a third seal 17, a driving mechanism 18, a connecting mechanism 19, a locked component 20, a telescopic tube 21, a fourth seal 22, a fifth seal 23, a first sleeve 24, a second sleeve 25, a locking mechanism 26, a mounting seat 27, an unlocking tool 28, a cooling component 29, a cooling tube 30, and a pump 31.

[0063] As Figure 10 shown, the detection module 100 is used for an electron microscope 1000. In order for the electronic components in the electron microscope 1000 to work stably, the vacuum pressure in the electron microscope 1000 is usually 10 -5 to 10 -8 Pa. The electron microscope 1000 has a housing 200. The housing 200 has an access hole 200s. When the detection module 100 is installed in the electron microscope 1000, the first housing 1 can enter the interior of the housing 200 through the access hole 200s.

[0064] The structures, functions, and connection relationships of the various components in the detection module 100 are briefly described as follows:

[0065] The first housing 1 is plugged into the second housing 2, and the first housing 1 is movable relative to the second housing 2. A second spacer 3a is disposed between the telescopic tube 21 and the second housing 2. A second spacer 3b is disposed between the first housing 1 and the second housing 2. A first seal 4 is disposed on the second housing 2. When the detection module 100 is installed in the electron microscope 1000, the second housing 2 is hermetically connected to the outer housing 200 of the electron microscope 1000, and the first seal 4 is used for sealing between the second housing 2 and the outer housing 200. A protection member 5 is disposed between the first housing 1 and the second housing 2. A sealing member 7 is disposed within the first housing 1. A second seal 9 seals between the first housing 1 and the sealing member 7. The detection circuit board 10 is located within the first housing 1 and is electrically connected to the detector 8. The electrical connecting rod 15 is hermetically plugged into the sealing member 7. The first electrical connector 13 is located within the first housing 1, and the first electrical connector 13 and the second electrical connector 14 are electrically connected to both ends of the electrical connecting rod 15. The detection circuit board 10 is electrically connected to the first electrical connector 13. The data transmission line 11 is electrically connected to the second electrical connector 14. The electronic control board 12 is disposed within the third housing 16, and the data transmission line 11 is electrically connected to the electronic control board 12. The third housing 16 covers at least a part of the outside of the second housing 2. A third seal 17 is used for sealing between two parts of the second housing 2. A driving mechanism 18 is disposed on the second housing 2, and a connecting mechanism 19 connects an axial end portion of the telescopic tube 21 to the driving mechanism 18, and the driving mechanism 18 is used for driving the first housing 1 to move relative to the second housing 2. The locked member 20 is connected to an axial end portion of the telescopic tube 21 via the connecting mechanism 19, and the locked member 20 is used for fixing the data transmission line 11. An axial end portion of the telescopic tube 21 is hermetically connected to an end portion of the first housing 1 plugged into the second housing 2 through a fourth seal 22. An axial other end portion of the telescopic tube 21 is hermetically connected to the second housing 2 through a fifth seal 23. When the first housing 1 moves relative to the second housing 2, the telescopic tube 21 expands and contracts. A first sleeve 24 is nested outside the telescopic tube 21, and a second sleeve 25 is nested inside the telescopic tube 21. A locking mechanism 26 is disposed on the second housing 2 for locking the locked member 20 to limit the position of the first housing 1. A mounting seat 27 is disposed on the second housing 2, and an unlocking tool 28 is used to cooperate with the mounting seat 27 to unlock the locked member 20 by the locking mechanism 26. A cooling assembly 29 is disposed within the first housing 1 for cooling the detector 8. A cooling pipe 30 connects the cooling assembly 29 and the pump 31 so that the coolant flowing in the cooling pipe 30 exchanges heat with the cooling assembly 29. The cooling pipe 30 is fixed to the locked member 20. When the detection module 100 is installed on the electron microscope 1000, the detector 8 can receive the electron signal reflected or transmitted from the surface of the sample within the electron microscope 1000 and convert it into an observable image for the user to use.

[0066] For the first housing 1 and the detector 8 described above, the first housing 1 has a first accommodation cavity 101, a detection port 102, a third accommodation cavity 104, and a second through hole 106. A partition portion 105 is provided inside the first housing 1, and the partition portion 105 has a third through hole 103. The detector 8 is accommodated in the first accommodation cavity 101, and the detector 8 is arranged corresponding to the detection port 102. The detection port 102 communicates the first accommodation cavity 101 with the outside of the first housing 1. The detection port 102 allows the electron beam in the electron microscope 1000 to pass through, so that the detector 8 receives the electron signal reflected or transmitted from the surface of the sample. The third through hole 103 is formed in the partition portion 105, and the third through hole 103 allows the first accommodation cavity 101 to communicate with the third accommodation cavity 104. The partition portion 105 divides the interior of the first housing 1 into a first accommodation cavity 101 and a third accommodation cavity 104. The third accommodation cavity 104 communicates with the inside of the telescopic tube 21 via the second through hole 106 and the opening at one end of the telescopic tube 21. The second through hole 106 allows data transmission between the detector 8 and the electronic control board 12. The third accommodation cavity 104 is used to accommodate the cooling component 29.

[0067] It should be noted that, in some embodiments, a support portion 107 is further provided inside the first housing 1. The support portion 107 is connected to the partition portion 105, and the support portion 107 contacts the back surface of the detector 8. In some other embodiments, the support portion 107 may not be provided. In this case, the partition portion 105 directly contacts the back surface of the detector 8.

[0068] For the above-mentioned sealing member 7 and the second seal 9, both the partition portion 105 and the sealing member 7 are provided inside the first housing 1. The partition portion 105 is used to support the detector 8 via the support portion 107. The sealing member 7 hermetically seals the third through hole 103 through the second seal 9 to form a first accommodation cavity 101 between the partition portion 105, the sealing member 7 and the first housing 1. When the second housing 2 is hermetically connected to the housing 200 of the electron microscope 1000, the detection port 102 communicates the first accommodation cavity 101 with the inside of the electron microscope 1000, and a vacuum can be formed in the first accommodation cavity 101 to ensure the accuracy and precision of the sample detection by the detection module 100.

[0069] In addition, in some embodiments, the third through hole may not be formed in the partition portion 105, but in a portion of the first housing 1 that allows the first accommodation cavity 101 to directly communicate with the inside of the telescopic tube 21. Thus, in the absence of the sealing member 7, the first accommodation cavity 101 communicates with the inside of the telescopic tube 21 directly via the third through hole and the opening at one end of the telescopic tube 21 without passing through the third accommodation cavity 104.

[0070] It should be noted that, in some embodiments, the pressure of the vacuum formed in the first accommodation cavity 101 is 10 -5 to 10-8 Pa.

[0071] Regarding the above-mentioned detection circuit board 10, data transmission line 11, electronic control board 12, first electrical connector 13, second electrical connector 14, and multiple electrical connecting rods 15, the detection circuit board 10 is located in the first accommodation cavity 101. The first electrical connector 13 and the second electrical connector 14 are respectively arranged on both sides of the sealing member 7. A part of the data transmission line 11 is located in the second accommodation cavity 201 of the second housing 2. The detection circuit board 10 electrically connects the detector 8 and the first electrical connector 13. The multiple electrical connecting rods 15 hermetically penetrate through the sealing member 7. The first electrical connector 13 and the second electrical connector 14 are respectively electrically connected to both ends of the multiple electrical connecting rods 15. The data transmission line 11 is electrically connected between the second electrical connector 14 and the electronic control board 12. Through this setting, the detection module 100 can efficiently transmit the electrical signals received by the detector 8 to the electronic control board 12 for processing, and then convert them into observable images. The first electrical connector 13 and the second electrical connector 14 achieve a stable and sealed connection through the electrical connecting rods 15, ensuring the stability and reliability of signal transmission. In addition, the setting of the data transmission line 11 makes the connection between the electronic control board 12 and the detection circuit board 10 more flexible.

[0072] Regarding the above-mentioned cooling assembly 29, cooling pipe 30, and pump 31, the cooling assembly 29 is arranged in the third accommodation cavity 104 of the first housing 1. The third accommodation cavity 104 is separated from the first accommodation cavity 101. Specifically, the first accommodation cavity 101 is formed between the partition 105, one side of the sealing member 7, and the first housing 1, and the third accommodation cavity 104 is formed between the partition 105, the other side of the sealing member 7, and the first housing 1. Since the detector 8 and the cooling assembly 29 with liquid cooling function are respectively located in the non-communicating first accommodation cavity 101 and third accommodation cavity 104, even if the coolant in the cooling assembly 29 leaks, it is difficult to damage the detector 8, detection circuit board 10, etc. arranged in the first accommodation cavity 101. And when the second housing 2 is hermetically connected to the housing 200 of the electron microscope 1000 and the first accommodation cavity 101 is communicated with the inside of the electron microscope 1000, the risk of liquid leakage into the inside of the electron microscope 1000 is avoided. In addition, a large amount of heat generated by the detector 8 during operation can be quickly absorbed by the cooling assembly 29 with stronger refrigeration capacity through the partition 105, effectively cooling the detector 8 and improving the stability and accuracy of the detection module 100.

[0073] A part of the cooling pipe 30 is arranged in the second housing 2. The cooling pipe 30 connects the cooling assembly 29 and the pump 31. The pump 31 pumps the coolant into the cooling assembly 29 through the cooling pipe 30 to achieve the heat exchange between the coolant and the cooling assembly 29.

[0074] It should be noted that the detector 8 of the detection module 100 is disposed on the partition portion 105 via the support portion 107. Therefore, the heat generated by the detector 8 can be transferred to the cooling component 29 through the support portion 107 and the partition portion 105 for heat exchange, thereby reducing the temperature of the detector 8 and ensuring the accuracy and reliability of the detector 8.

[0075] For the above-mentioned cooling component 29, please refer to Figures 3 to 7 simultaneously. The cooling component 29 is located in the third receiving cavity 104 of the first housing 1 and cools the detector 8 via the partition portion 105 of the first housing 1.

[0076] In some embodiments, the cooling component 29 includes a refrigerator 291, a cooling member 292, a heat insulation member 293, and a heat conducting member 294. The refrigerator 291 is disposed between the heat conducting member 294 and the cooling member 292. The heat conducting member 294 is disposed on the side of the partition portion 105 facing away from the detector 8 and is used to conduct the heat from the detector 8 to the refrigerator 291. The cooling member 292 is used to perform heat exchange with the refrigerator 291. The heat insulation member 293 houses at least a part of the cooling member 292. Through the cooling component 29, the detector 8 can be effectively cooled to ensure its stable operation within a suitable temperature range.

[0077] For the above-mentioned refrigerator 291, the refrigerator 291 has a cold end 2911 and a hot end 2912. The cold end 2911 faces the partition portion 105 and is used to cool the detector 8, and the hot end 2912 is disposed facing away from the partition portion 104.

[0078] In some embodiments, the refrigerator 291 is a thermoelectric refrigerator, and the thermoelectric refrigerator can generate a temperature difference between the cold end 2911 and the hot end 2912, thereby realizing effective cooling of the detector 8.

[0079] It can be understood that the power cord 2913 of the refrigerator 291 is electrically connected to the electronic control board 12.

[0080] For the above-mentioned cooling member 292, the cooling member 292 is in contact with the hot end 2912 of the refrigerator 291, and the cooling member 292 performs heat exchange with the hot end 2912 of the refrigerator 291.

[0081] In some embodiments, the cooling member 292 includes a main body portion 2921, a liquid inlet pipe 2922, and a liquid outlet pipe 2923. A cooling channel is provided inside the main body portion 2921, and the liquid inlet pipe 2922 and the liquid outlet pipe 2923 are respectively communicated with the cooling channel. The cooling pipe 30 communicates the liquid inlet pipe 2922 and the liquid outlet pipe 2923 with the pump 31.

[0082] For the above heat insulation member 293, the heat insulation member 293 is provided with a receiving cavity 2931, and the receiving cavity 2931 is used to receive at least a part of the cooling member 292, such as the main body portion 2921. The liquid inlet pipe 2922 and the liquid outlet pipe 2923 respectively extend out of the heat insulation member 293. Through the arrangement of the heat insulation member 293, the heat of the cooling member 292 is effectively isolated from the outside.

[0083] It should be noted that, in some embodiments, the receiving cavity 2931 is further used to receive at least a part of the cooler 291, and the cold end 2921 of the cooler 291 is exposed.

[0084] It should be noted that, in some embodiments, the heat insulation member 293 is provided with a first opening 2932 and a second opening 2933 communicating with the receiving cavity 2931. The liquid inlet pipe 2922 penetrates through the first opening 2932, and the liquid outlet pipe 2923 penetrates through the second opening 2933.

[0085] It should be noted that, in some embodiments, a blocking member 2934 is formed between the first opening 2932 and the second opening 2933. The main body portion 2921 of the cooling member 292 abuts against the blocking member 2934, and the blocking member 2934 restricts the position of the cooling member 292 and fixes the cooling member 292.

[0086] For the above heat conducting member 294, the heat conducting member 294 is attached to the cold end 2911 of the cooler 291. The heat conducting member 294 is disposed between the cooler 291 and the partition portion 105 of the first housing 1. One side of the heat conducting member 294 is in contact with the cold end 2921 of the cooler 291, and the other side of the heat conducting member 294 is in contact with the partition portion 105 of the first housing 1. The heat conducting member 294 conducts the heat from the detector 8 to the cooler 291.

[0087] In some embodiments, the heat conducting member 294 covers the opening of the receiving cavity 2931 of the heat insulation member 293, which makes the cooling assembly 29 integrated and enhances the structural stability of the cooling assembly 29.

[0088] In some embodiments, the heat conducting member 294 is provided with a jack 2941, and the jack 2941 is used to set the temperature sensor 32. The temperature sensor 32 is connected to the electronic control board 12. The electronic control board 12 can monitor the temperature of the heat conducting member 294 and adjust the working state of the cooler 291 according to the monitoring result to ensure that the cooling assembly 29 can effectively maintain the detector 8 within a suitable working temperature range. The setting of the temperature sensor 32 enables the cooling system to monitor the temperature change in real time, thereby realizing precise temperature control.

[0089] It should be noted that when a support portion 107 is further provided in the first housing 1, the support portion 107 transfers the heat generated by the detector 8 to the partition portion 105, and further transfers it to the cooling assembly 29.

[0090] In some embodiments, the heat conducting member 294 is made of a high heat conducting material, such as copper or aluminum, to ensure that heat can be quickly conducted from the detector 8 to the cooler 291.

[0091] Please refer to Figure 3 and Figure 4 For the second housing 2, the second spacer 3b, the first seal 4 and the protective member 5 described above, the second housing 2 has a second receiving cavity 201 and a first through hole 204. The first through hole 204 communicates the second receiving cavity 201 with the outside of the second housing 2. The second receiving cavity 201 is used to receive the telescopic tube 21.

[0092] The first housing 1 is inserted into the second receiving cavity 201 of the second housing 2, that is, at least a part of the first housing 1 is received in the second receiving cavity 201. The first housing 1 can move relative to the second housing 2 so that the first housing 1 is received in the second receiving cavity 201 of the second housing 2, or the first housing 1 extends out of the second receiving cavity 201 of the second housing 2. The second spacer 3b is disposed between the first housing 1 and the second housing 2 and is located in the first sub - cavity 202. By providing the second spacer 3b, friction between the first housing 1 and the second housing 2 due to contact with each other is avoided, ensuring the smooth movement of the first housing 1 relative to the second housing 2 and extending the service life of the detection module 100 at the same time.

[0093] It should be noted that, in some embodiments, the second spacer 3b is made of a wear - resistant material.

[0094] The first seal 4 is disposed at the edge of the first through hole 204 of the second housing 2. When the second housing 2 is hermetically connected to the housing 200 of the electron microscope 1000, the first seal 4 can ensure the sealing between the second housing 2 and the housing 200.

[0095] The protective member 5 is disposed between the first housing 1 and the second housing 2. In some embodiments, the protective member 5 is made of lead. By providing the protective member 5, the leakage of radiation inside the electron microscope 1000 to the external environment can be effectively shielded.

[0096] For the above - mentioned second housing 2, in some embodiments, the second housing 2 includes a connected first part 2a and a second part 2b. The second spacer 3b is disposed between the first part 2a and the first housing 1. A third seal 17 seals between the first part 2a and the second part 2b. The first part 2a is in the shape of a cylinder with both ends open, and one end opening is the first through hole 204. The second part 2b has an inner cavity 2s. One end of the inner cavity 2s is an open end connected to the opening of the other end of the first part 2a, and the other end is a closed end. The second part 2b is used to dispose the telescopic tube 21 and the driving mechanism 18.

[0097] For the above-mentioned driving mechanism 18, the driving mechanism 18 drives the first housing 1 to move relative to the second housing 2. The driving mechanism 18 includes a driving part 181 and a transmission part 182.

[0098] In some embodiments, the output end of the driving part 181 is connected to the transmission part 182, and the driving part 181 drives the first housing 1 to move relative to the second housing 2 via the transmission part 182. The transmission part 182 is directly or indirectly connected to one end of the telescopic tube 21 in the axial direction within the telescopic tube 21.

[0099] In some embodiments, both the driving part 181 and the transmission part 182 are disposed within the telescopic tube 21.

[0100] In some embodiments, as Figure 3 、 4 shown, the driving part 181 is disposed outside the second housing 2, and the transmission part 182 penetrates through the second housing 2 (the closed end of the inner cavity 2s of the second part 2b), passes through the opening at the other end of the telescopic tube 21, and is directly or indirectly connected to one end of the telescopic tube 21 in the axial direction.

[0101] In some embodiments, the driving part 181 is a cylinder, and the transmission part 182 is a driving rod.

[0102] It should be noted that the specific implementation manner of the driving mechanism 18 is not limited to the above structure, and there may be other forms. For example, the driving mechanism 18 includes a driving motor, a transmission gear, and a driving member. The driving motor is connected to the driving member through the transmission gear to drive the driving member to act, so that the first housing 1 connected to the driving member moves relative to the second housing 2.

[0103] For the above-mentioned connecting mechanism 19, the connecting mechanism 19 is connected to one end of the telescopic tube 21 in the axial direction, and the transmission part 182 of the driving mechanism 18 is indirectly connected to one end of the telescopic tube 21 in the axial direction through the connecting mechanism 19. By providing the connecting mechanism 19, the convenience of connecting the transmission part 182 of the driving mechanism 18 to the telescopic tube 21 is improved.

[0104] In some embodiments, the transmission part 182 is directly connected to one end of the telescopic tube 21 in the axial direction within the telescopic tube 21.

[0105] Please also refer to Figure 3 、 Figure 4 and Figure 8, for the above-mentioned locked component 20, the locked component 20 is connected to the connecting mechanism 19 within the telescopic tube 21, that is, the locked component 20 is indirectly connected to one axial end of the telescopic tube 21 via the connecting mechanism 19. When the driving mechanism 18 drives the first housing 1 to move relative to the second housing 2, the first housing 1, the connecting mechanism 19, and the locked component 20 move together.

[0106] In some embodiments, the locked component 20 is directly connected to one axial end of the telescopic tube 21 within the telescopic tube 21.

[0107] In some embodiments, as Figure 3 , Figure 4 shown, the locked component 20 penetrates through the second housing 2 (the closed end of the inner cavity 2s of the second part 2b), passes through the opening at the other end of the telescopic tube 21, and is directly or indirectly connected to one axial end of the telescopic tube 21.

[0108] In some embodiments, the locked component 20 is disposed within the telescopic tube 21.

[0109] In addition, the locked component 20 is used to fix the data transmission line 11.

[0110] In some embodiments, as Figure 3 , Figure 4 , Figure 8 and Figure 9 shown, the locked component 20 is a U-shaped member. The opening of the locked component 20 faces the first housing 1, that is, the inner surface 2001 of the locked component 20 faces the first housing 1, and the outer surface 2002 of the locked component 20 faces away from the first housing 1. A part of the data transmission line 11 is fixed to the outer surface 2002 of the locked component 20. Thus, when the first housing 1 moves relative to the second housing 2, this part of the data transmission line 11 moves together with the locked component 20, the connecting mechanism 19, one axial end of the telescopic tube 21, and the first housing 1, thereby avoiding excessive bending or pulling due to the movement of the data transmission line 11 relative to the first housing 1, ensuring the reliability of the use of the data transmission line 11, and ensuring the stability and reliability of the connection between the data transmission line 11 and the second electrical connector 14 and the electronic control board 12.

[0111] In addition, a part of the cooling pipe 30 connected to the cooling assembly 29 is fixed to the inner surface 2001 of the locked member 20. With this arrangement, when the first housing 1 moves relative to the second housing 2, this part of the cooling pipe 30 moves together with the locked member 20, the connecting mechanism 19, one axial end of the telescopic pipe 21, and the first housing 1, thereby avoiding excessive bending or pulling due to the movement of the cooling pipe 30 relative to the first housing 1, ensuring the reliability of use of the cooling pipe 30, and ensuring the stability and reliability of the connection between the cooling pipe 30 and the cooling assembly 29 and the pump 31.

[0112] Please refer to Figure 3 , Figure 4 For the above-mentioned telescopic pipe 21, the fourth seal 22, and the fifth seal 23, the telescopic pipe 21 is received in the second receiving cavity 201 of the second housing 2. Specifically, one axial end of the telescopic pipe 21 is hermetically connected to the part of the first housing 1 inserted into the second housing 2 through the fourth seal 22, and the other axial end of the telescopic pipe 21 is hermetically connected to the closed end of the inner cavity 2s of the second part 2b of the second housing 2 through the fifth seal 23. When the telescopic pipe 21 expands and contracts, the first housing 1 moves relative to the second housing 2. A first sub-chamber 202 is formed between the telescopic pipe 21 and the second housing 2 or between the telescopic pipe 21, the first housing 1, and the second housing 2. The first sub-chamber 202 communicates with the outside of the second housing 2 through the first through-hole 204. The inside of the telescopic pipe 21 is not in communication with the first receiving cavity 101 and the first sub-chamber 202. When the second housing 2 is hermetically connected to the housing 200 of the electron microscope 1000, a vacuum is formed in the first sub-chamber 202.

[0113] It should be noted that, in some embodiments, the vacuum pressure formed in the first sub-chamber 202 is 10 -5 to 10 -8 Pa.

[0114] At least a part of the first housing 1 is received in the second receiving cavity 201 of the second housing 2. When the telescopic pipe 21 contracts, the first housing 1 retracts into the second receiving cavity 201 through the first through-hole 204 of the second housing 2. When the telescopic pipe 21 is not contracted, the first housing 1 extends out of the second receiving cavity 201 through the first through-hole 204.

[0115] It should be noted that, in some embodiments, the telescopic pipe 21 is a corrugated pipe or an elastic rubber pipe.

[0116] It should be noted that in some embodiments, a first spacer 3a is provided between one end of the telescopic tube 21 and the second housing 2. The first spacer 3a is located in the first sub-chamber 202. By providing the first spacer 3a, friction caused by the contact between the telescopic tube 21 and the second housing 2 is avoided, ensuring the smooth movement of the telescopic tube 21 relative to the second housing 2 and extending the service life of the detection module 100 at the same time.

[0117] It should be noted that in some embodiments, the first spacer 3a is made of wear-resistant material.

[0118] For the above-mentioned first sleeve 24 and second sleeve 25, as Figure 3 、 Figure 4 shown, the first sleeve 24 is nested outside the telescopic tube 21 and is located in the first sub-chamber 202. The telescopic tube 21 can telescopically move relative to the first sleeve 24; the second sleeve 25 is nested inside the telescopic tube 21.

[0119] One of the first sleeve 24 and the second sleeve 25 is adjacent to one end of the telescopic tube 21 and can move together with one end of the telescopic tube 21, and the other of the first sleeve 24 and the second sleeve 25 is adjacent to the other end of the telescopic tube 21; when the telescopic tube 21 is not contracted, the first sleeve 24 and the second sleeve 25 are spaced apart in the axial direction of the telescopic tube 21, and when the telescopic tube 21 is contracted, the second sleeve 25 is inserted into the first sleeve 24.

[0120] Specifically, in some embodiments, as Figure 3 、 Figure 4 shown, the first sleeve 24 is disposed in the inner cavity 2s of the second part 2b of the second housing 2 and is connected to the closed end of the inner cavity 2s, and the second sleeve 25 is connected to one end of the telescopic tube 21 and can move together with one end of the telescopic tube 21. In other embodiments, the second sleeve 25 is disposed in the inner cavity 2s of the second part 2b of the second housing 2 and is connected to the closed end of the inner cavity 2s, and the first sleeve 24 is connected to one end of the telescopic tube 21 and can move together with one end of the telescopic tube 21.

[0121] When the second housing 2 is airtightly connected to the housing 200 of the electron microscope 1000, a vacuum is formed in the first sub-chamber 202 outside the telescopic tube 21, while the inside of the telescopic tube 21 is not a vacuum, that is, the pressures inside and outside the telescopic tube 21 are different. Therefore, the telescopic tube 21 has a risk of deformation when telescoping. By providing the first sleeve 24 and the second sleeve 25, the telescopic tube 21 is restricted, reducing the risk of deformation and failure of the telescopic tube 21.

[0122] It should be noted that in some embodiments, as Figure 9As shown, the first sleeve 24 is divided into two parts.

[0123] It should be noted that, in some embodiments, the material of the first sleeve 24 is nylon.

[0124] It should be noted that, in some embodiments, as Figure 3 、 Figure 4 shown, the second sleeve 25 includes a metal sleeve 251 and a nylon sleeve 252 that are connected to each other. The metal sleeve 251 is connected to one axial end of the telescopic tube 21. The metal sleeve 251 is disposed close to the first housing 1, and the nylon sleeve 252 is disposed away from the first housing 1. The setting of the metal sleeve 251 improves the structural strength of the second sleeve 25, while the setting of the nylon sleeve 252 effectively reduces the wear of the second sleeve 25 on the telescopic tube 21 due to possible contact, and extends the service life of the telescopic tube 21. In other embodiments, the metal sleeve 251 of the second sleeve 25 may be connected to the closed end of the inner cavity 2s of the second part 2b of the second housing 2, disposed away from the first housing 1, and the nylon sleeve 252 is disposed close to the first housing 1.

[0125] Please refer to Figure 3 、 Figure 4 、 Figure 8 and Figure 9 together. For the above locking mechanism 26, the locking mechanism 26 is disposed outside the second housing 2, and the locking mechanism 26 is used to lock the first housing 1 relative to the second housing 2.

[0126] In some embodiments, the locking mechanism 26 includes a driver 261 and a locking tongue 262. The driver 261 can drive the locking tongue 262 to move back and forth. The locked component 20 has a groove 2003. When the locking tongue 262 is aligned with the groove 2003, the driver 261 can drive the locking tongue 262 to insert into the groove 2003, thereby locking the locked component 20. Since the locked component 20 is disposed on the connecting mechanism 19, the connecting mechanism 19 is connected to one axial end of the telescopic tube 21, and one axial end of the telescopic tube 21 is connected to the first housing 1, the first housing 1 can be locked by the locking mechanism 26.

[0127] In some embodiments, the driver 261 is an electromagnet. When the driver 261 is powered off and loses magnetism, the locking tongue 262 inserts into the groove 2003 of the locked component 20. At this time, the first housing 1 is stationary relative to the second housing 2, that is, the locking mechanism 26 locks the first housing 1 relative to the second housing 2. When the driver 261 is powered on and has magnetism, it attracts the locking tongue 262 to disengage (not insert) from the groove 2003 of the locked component 20, so that the first housing 1 can move relative to the second housing 2. Through the setting of this locking mechanism 26, the convenience of using the detection module 100 is improved. ​

[0128] It should be noted that, in some embodiments, the locked component 20 has two grooves 2003 respectively formed on its two side edges, and the number of the locking mechanisms 26 is also two accordingly. The two locking mechanisms 26 are oppositely arranged on both sides of the locked component 20, thereby improving the locking stability of the locking mechanism 26 to the locked component 20.

[0129] For the above mounting seat 27, the mounting seat 27 is arranged on the second housing 2, the driver 261 is arranged on the mounting seat 27, the mounting seat 27 has a mounting hole 271, and the locking tongue 262 can pass through the mounting hole 271 to insert into the groove 2003 of the locked component 20.

[0130] It should be noted that, in some embodiments, when the number of the locking mechanisms 26 is two, the number of the mounting seats 27 is also two accordingly. The mounting holes 271 of the two mounting seats 27 are oppositely arranged, and the mounting hole 271 of each mounting seat 27 is used for the locking tongue 262 of one locking mechanism 26 to pass through.

[0131] In some embodiments, the locked component 20, the locking mechanism 26 and the mounting seat 27 are all arranged in the telescopic tube 21.

[0132] For the above unlocking tool 28, the unlocking tool 28 is used to manually operate the locking mechanism 26 to unlock the locked component 20. Specifically, the locking mechanism 26 has a protrusion 2621 connected to the locking tongue 262, and the protrusion 2621 is provided with an inclined surface 26211. The unlocking tool 28 has a fourth through hole 281, and the protrusion 2621 can be inserted into the fourth through hole 281. Generally, the unlocking tool 28 is inserted from the unlocking port 161 of the third housing 16, plugged into the mounting seat 27, and the protrusion 2621 is inserted into the fourth through hole 281. At this time, the locking tongue 262 is inserted into the groove 2003 of the locked component 20. When the unlocking tool 28 is manually pulled out of the third housing 16, the unlocking tool 28 abuts against the inclined surface 26211 and drives the inclined surface 26211, so that the protrusion 2621 drives the locking tongue 262 to retract, and the locking tongue 262 disengages from the groove 2003 of the locked component 20, realizing the unlocking of the locked component 20 by the locking mechanism 26.

[0133] It should be noted that, in some embodiments, when the number of the locking mechanisms 26 is two and the number of the mounting seats 27 is also two, the number of the fourth through holes 281 of the unlocking tool 28 is also two accordingly. The two fourth through holes 281 are oppositely arranged, and each fourth through hole 281 is used to allow the protrusion 2621 of one locking mechanism 26 to be inserted.

[0134] It should be noted that, in some embodiments, the unlocking tool 28 is detachably connected to the second housing 2 by screws.

[0135] In an embodiment of the present application, the detection module 100 is provided with a first housing 1, a second housing 2, a detector 8, and a telescopic tube 21. The first housing 1 has a first accommodation cavity 101 and a detection port 102, and the detection port 102 communicates the first accommodation cavity 101 with the outside of the first housing 1. The second housing 2 has a second accommodation cavity 201 and a first through hole 204, and the first through hole 204 communicates the second accommodation cavity 201 with the outside of the second housing 2. The detector 8 is located in the first accommodation cavity 101. The telescopic tube 21 is accommodated in the second accommodation cavity 201. One end portion of the telescopic tube 21 in the axial direction is hermetically connected to the first housing 1, and the other end portion of the telescopic tube 21 in the axial direction is hermetically connected to the second housing 2. When the telescopic tube 21 expands and contracts, the first housing 1 moves relative to the second housing 2. The second accommodation cavity 201 includes a first sub-chamber 202, and the first sub-chamber 202 is located between the telescopic tube 21 and the second housing 2 or between the telescopic tube 21, the first housing 1, and the second housing 2. The first sub-chamber 202 communicates with the outside of the second housing 2 through the first through hole 204, and the inside of the telescopic tube 21 is not communicated with the first accommodation cavity 101 and the first sub-chamber 202. Through the arrangement of the telescopic tube 21, the detection module 100 not only ensures the moving function of the first housing 1 accommodating the detector 8 relative to the second housing 2, but also forms a first sub-chamber 202 between the telescopic tube 21 and the second housing 2 or between the telescopic tube 21, the first housing 1, and the second housing 2. Therefore, it is ensured that when the first housing 1 moves relative to the second housing 2, there is no close contact between the telescopic tube 21 and the second housing 2 or between the telescopic tube 21, the first housing 1, and the second housing 2, no large frictional force is generated, and the difficulty of driving the first housing 1 to move is reduced. Furthermore, the transmission part 182 (for example, a driving rod) of the driving mechanism 18 is located inside the telescopic tube 21 and does not contact the telescopic tube. Therefore, when the driving mechanism 18 drives the first housing 1 to move relative to the second housing 2, no frictional force is generated on the transmission part 182, and the difficulty of driving the first housing 1 to move is also reduced.

[0136] An embodiment of the present application further provides an electron microscope 1000. As Figure 10 shown, the electron microscope 1000 includes a housing 200 and the above-mentioned detection module 100. Usually, the vacuum pressure inside the electron microscope 1000 is 10 -5 to 10 -8 Pa.

[0137] The housing 200 has an access hole 200s. The second housing 2 is hermetically connected to the housing 200. Specifically, the second housing 2 of the detection module 100 is hermetically connected to the electron microscope 1000 through the first seal 4. And, the first through hole 204 faces the access hole 200s. In some embodiments, the line connecting the geometric center of the first through hole 204 and the geometric center of the access hole 200s is perpendicular to the plane where the first through hole 204 is located and the plane where the access hole 200s is located.

[0138] The first housing 1 of the detection module 100 can enter the interior of the housing 200 through the access hole 200s. The detection port 102 communicates the first accommodation cavity 101 with the interior of the housing 200. The first sub-cavity 101 communicates with the interior of the housing 200 through the first through hole 204 and the access hole 200s. At this time, the first accommodation cavity 101 and the first sub-cavity 202 also become the same vacuum as that inside the electron microscope 1000. The vacuum in the first accommodation cavity 101 is beneficial to the normal operation of the detector 8. In addition, since the two end portions of the axial direction of the telescopic tube 21 are hermetically connected to the first housing 1 and the second housing 2 respectively, the interior of the telescopic tube 21 is not communicated with the interior of the housing 200, and the interior of the telescopic tube 21 still maintains atmospheric pressure. Moreover, since the interior of the telescopic tube 21 is not communicated with the first accommodation cavity 101 and the first sub-cavity 202, when the detection module 100 is installed on the electron microscope 1000, although the first accommodation cavity 101 and the first sub-cavity 202 are communicated with the interior of the housing 200 and become vacuum, the interior of the telescopic tube 21 is not communicated with the interior of the housing 200. Therefore, the transmission part 182 located inside the telescopic tube 21 will not enter and be exposed to the vacuum inside the electron microscope 1000. Therefore, it is not necessary to provide a sealing ring between the housing 200 of the electron microscope 1000 and the transmission part 182 as in the prior art. Moreover, the gas adsorbed on the surface of the transmission part 182 will not be released into the vacuum inside the electron microscope 1000, avoiding the adverse effects on the vacuum inside the electron microscope 1000 caused by the wear of the sealing ring and the release of gas.

[0139] It should be noted that the specification and the drawings of the present application give the preferred embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described in this specification. These embodiments are not additional limitations to the content of the present application. The purpose of providing these embodiments is to make the understanding of the disclosed content of the present application more thorough and comprehensive. And, the above technical features continue to be combined with each other to form various embodiments not listed above, which are all regarded as the scope described in the specification of the present application; further, for those of ordinary skill in the art, improvements or transformations can be made according to the above description, and all these improvements and transformations should fall within the protection scope of the appended claims of the present application.

Claims

1. A detection module, characterized in that, Comprising: A first housing, a second housing, a detector, and a telescopic tube; The first housing has a first receiving cavity and a detection port, and the detection port communicates the first receiving cavity with the outside of the first housing; The second housing has a second receiving cavity and a first through hole, and the first through hole communicates the second receiving cavity with the outside of the second housing; The detector is located in the first receiving cavity; The telescopic tube is received in the second receiving cavity. One axial end of the telescopic tube is hermetically connected to the first housing, and the other axial end of the telescopic tube is hermetically connected to the second housing. When the telescopic tube expands and contracts, the first housing moves relative to the second housing. The second receiving cavity includes a first sub-chamber, and the first sub-chamber is located between the telescopic tube and the second housing or between the telescopic tube, the first housing, and the second housing. The first sub-chamber communicates with the outside of the second housing via the first through hole, and the inside of the telescopic tube is not connected to the first receiving cavity and the first sub-chamber.

2. The detection module according to claim 1, wherein At least a part of the first housing is received in the second receiving cavity. When the telescopic tube contracts, the first housing retracts into the second receiving cavity via the first through hole. When the telescopic tube does not contract, the first housing extends out of the second receiving cavity via the first through hole.

3. The detection module according to claim 1 or 2, characterized in that A first spacer is provided between the one end of the telescopic tube and the second housing, and the first spacer is located in the first sub-chamber.

4. The detection module according to claim 2, wherein A second spacer is provided between the first housing and the second housing, and the second spacer is located in the first sub-chamber.

5. The detection module according to claim 1, wherein The telescopic tube is a corrugated tube or an elastic rubber tube.

6. The detection module according to claim 1, wherein The detection module further includes a first sleeve and a second sleeve; The first sleeve is nested outside the telescopic tube and is located in the first sub-chamber; The second sleeve is nested inside the telescopic tube; One of the first sleeve and the second sleeve is adjacent to the one end of the telescopic tube and can move together with the one end of the telescopic tube, and the other of the first sleeve and the second sleeve is adjacent to the other end of the telescopic tube; When the telescopic tube does not contract, the first sleeve and the second sleeve are spaced apart axially of the telescopic tube. When the telescopic tube contracts, the second sleeve is inserted into the first sleeve.

7. The detection module according to claim 1, wherein The detection module further includes a driving mechanism, and the driving mechanism includes a driving part and a transmission part. The transmission part is connected to the driving part, and the driving part drives the first housing to move relative to the second housing via the transmission part; The transmission part is directly or indirectly connected to the one axial end of the telescopic tube inside the telescopic tube.

8. The detection module according to claim 7, wherein The driving part is arranged outside the second housing, and the transmission part penetrates through the second housing, passes through the opening at the other end of the telescopic tube, and is directly or indirectly connected to one axial end of the telescopic tube.

9. The detection module according to claim 7 or 8, characterized in that The detection module further includes a connection mechanism, and the transmission part is indirectly connected to one axial end of the telescopic tube via the connection mechanism.

10. The detection module according to claim 1, wherein The detection module further includes a locked component and a locking mechanism, and the locking mechanism can lock the locked component; The locked component is directly or indirectly connected to one axial end of the telescopic tube inside the telescopic tube.

11. The detection module according to claim 10, wherein The locking mechanism is arranged outside the second housing, and the locked component penetrates through the second housing, passes through the opening at the other end of the telescopic tube, and is directly or indirectly connected to one axial end of the telescopic tube.

12. The detection module according to claim 10 or 11, characterized in that, The detection module further includes a connection mechanism, and the locked component is indirectly connected to one axial end of the telescopic tube via the connection mechanism.

13. The detection module according to claim 10, wherein The first housing further has a third receiving cavity and a second through hole. A partition part is arranged inside the first housing. The partition part divides the interior of the first housing into the first receiving cavity and the third receiving cavity. The third receiving cavity is communicated with the interior of the telescopic tube via the second through hole and the opening at one end of the telescopic tube; The detection module further includes a cooling component and a cooling tube. The cooling component is located in the third receiving cavity and cools the detector via the partition part. The cooling tube is connected to the cooling component and fixed to the locked component.

14. The detection module according to claim 13, wherein The partition part has a third through hole, and the third through hole allows the first receiving cavity to communicate with the third receiving cavity; The detection module further includes a sealing component, a first electrical connector, a second electrical connector, a plurality of electrical connecting rods and a data transmission line. The sealing component hermetically seals the third through hole. The first electrical connector and the second electrical connector are respectively arranged on both sides of the sealing component. The plurality of electrical connecting rods hermetically penetrate through the sealing component and electrically connect the first electrical connector and the second electrical connector. The detector is electrically connected to the first electrical connector, and the data transmission line is electrically connected to the second electrical connector and fixed to the locked component.

15. The detection module according to claim 10, wherein The first housing further has a third through hole, and the third through hole allows the first receiving cavity to communicate with the interior of the telescopic tube; The detection module further includes a sealing member, a first electrical connector, a second electrical connector, a plurality of electrical connecting rods, and a data transmission line. The sealing member hermetically seals the third through hole. The first electrical connector and the second electrical connector are respectively disposed on both sides of the sealing member. The plurality of electrical connecting rods hermetically penetrate the sealing member and electrically connect the first electrical connector and the second electrical connector. The detector is electrically connected to the first electrical connector. The data transmission line is electrically connected to the second electrical connector and fixed to the locked member.

16. The detection module according to claim 10, wherein The locked member has a groove. The locking mechanism includes a driver and a locking tongue. The driver can drive the locking tongue to move back and forth. When the locking tongue is aligned with the groove, the driver can drive the locking tongue to insert into the groove, thereby locking the locked member.

17. The detection module according to claim 16, wherein the locking mechanism further includes a protrusion connected to the locking tongue. The detection module further includes an unlocking tool. The unlocking tool has a fourth through hole; when the protrusion inserts into the fourth through hole, the locking tongue can insert into the groove, thereby locking the locked member; when the protrusion does not insert into the fourth through hole and abuts against the unlocking tool, the locking tongue does not insert into the groove, and the locked member is not locked.

18. The detection module according to claim 1, wherein the first housing further has a third receiving cavity and a second through hole. A partition is provided inside the first housing. The partition divides the interior of the first housing into the first receiving cavity and the third receiving cavity. The third receiving cavity communicates with the interior of the telescopic tube through the second through hole and the opening at one end of the telescopic tube; the detection module further includes a cooling assembly and a cooling tube. The cooling assembly is located in the third receiving cavity and cools the detector through the partition. The cooling tube is connected to the cooling assembly.

19. The detection module according to claim 18, wherein the partition has a third through hole. The third through hole allows the first receiving cavity to communicate with the third receiving cavity; the detection module further includes a sealing member. The sealing member hermetically seals the third through hole.

20. The detection module according to claim 1, wherein the first housing further has a third through hole. The third through hole allows the first receiving cavity to communicate with the interior of the telescopic tube; the detection module further includes a sealing member. The sealing member hermetically seals the third through hole.

21. An electron microscope, characterized in that, Comprising: a housing and the detection module according to any one of claims 1-20; the housing has an access hole; the second housing is hermetically connected to the housing, and the first through hole faces the access hole; the first housing can enter the interior of the housing through the access hole. The detection port communicates the first receiving cavity with the interior of the housing; the first sub-chamber communicates with the interior of the housing through the first through hole and the access hole; The interior of the telescopic tube is not in communication with the interior of the housing.

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