Feeding mechanism for CVD furnace

Abstract

The invention provides a feeding mechanism for a CVD furnace. The feeding mechanism comprises a moving assembly. The connecting assembly is arranged at one end of the moving assembly; a plurality of mounting assemblies; the connecting components are arranged on the top of the connecting component in sequence; the driving assembly is arranged on one side wall of the mounting assembly; and the multiple feeding rods are evenly arranged on the side, away from the driving assembly, of the mounting assembly and connected to the output end of the driving assembly through a transmission assembly, and feeding grooves used for containing catalysts are formed in the upper surfaces of the ends, away from the driving assembly, of the feeding rods. The feeding device can be more evenly laid in the CVD furnace, accurate feeding can be achieved, feeding time can be effectively shortened through simultaneous feeding of the multiple feeding rods, the workload of workers can be effectively reduced, and the production efficiency can be improved.

Description

Technical Field

[0001] The invention relates to the technical field of carbon nanotube processing equipment, and in particular to a feeding mechanism for a CVD furnace. Background Art

[0002] A chemical vapor deposition (CVD) furnace is the core equipment for producing carbon nanotubes. It grows carbon nanotubes on a substrate surface through the decomposition and reaction of gaseous precursors at high temperatures. The reaction chamber of a CVD furnace is typically made of stainless steel or other non-metallic materials. When producing carbon nanotubes using a CVD furnace, the catalyst must be evenly distributed within the furnace.

[0003] Traditionally, the catalyst is added by placing the catalyst in several feed tubes, which are then extended into different positions of the chemical vapor deposition furnace and then pouring the catalyst into the chemical vapor deposition furnace. However, this will cause the catalyst to be unevenly laid in the chemical vapor deposition furnace, thereby affecting the preparation of carbon nanotubes. When adding the catalyst through the feed tube, a certain amount of catalyst needs to be manually weighed and placed on the feed tube, and finally the feed tube is placed in the furnace one by one to complete the catalyst feeding. In this process, the catalyst feeding time is relatively long, resulting in low production efficiency.

[0004] In the prior art, when the catalyst is fed into the CVD furnace, the catalyst in the furnace needs to be leveled, and the feeding time is long, which affects the production efficiency and cannot achieve accurate feeding. Summary of the Invention

[0005] Based on this, the purpose of the present invention is to provide a loading mechanism for a CVD furnace to solve the above-mentioned deficiencies in the prior art.

[0006] The present invention provides the following technical solution, a feeding mechanism for a CVD furnace, comprising:

[0007] Mobile components;

[0008] A connecting component is provided at one end of the moving component;

[0009] A plurality of mounting components are sequentially arranged longitudinally on top of the connecting component;

[0010] A driving assembly, disposed on a side wall of the mounting assembly;

[0011] A plurality of feeding rods are evenly arranged on a side of the mounting assembly away from the driving assembly and connected to the output end of the driving assembly through a transmission assembly. A feeding trough for holding the catalyst is provided on the upper surface of one end of the feeding rod away from the driving assembly;

[0012] Among them, the moving component drives the feeding rod to move via the connecting component, the mounting component, the driving component and the transmission component, so that the feeding rod moves into the CVD furnace, and the driving component drives the feeding rod to rotate via the transmission component to sprinkle the catalyst in the feeding trough into the CVD furnace.

[0013] Compared with the prior art, the beneficial effects of the present invention are: the feeding rod is moved by the moving component via the connecting component, the mounting component, the driving component and the transmission component, so that the feeding trough at one end of the feeding rod can enter the CVD furnace, and the feeding rod is rotated by the driving component via the transmission component, so that the feeding trough can sprinkle the catalyst into the CVD furnace. Since there are several feeding rods, and then several feeding troughs sprinkle the catalyst into the CVD furnace at the same time, the catalyst can be laid more evenly in the CVD furnace, and accurate feeding can be achieved. Moreover, by feeding by several feeding rods at the same time, the feeding time can be effectively reduced, and the workload of the staff can be effectively reduced, thereby improving production efficiency.

[0014] Furthermore, the moving component includes a supporting plate, a reduction motor, a gear pair, a transmission shaft and several walking wheels. The reduction motor is fixed at the bottom of the supporting plate, the output end of the reduction motor is connected to the transmission shaft via the gear pair, the two ends of the transmission shaft are respectively connected to two of the walking wheels, the transmission shaft is set at the bottom of the supporting plate, and several other walking wheels are connected to the bottom of the supporting plate via driven shafts.

[0015] Furthermore, the connecting component includes a connecting frame and a supporting plate. The connecting frame is fixed on the upper surface of the moving component, and two ends of the supporting plate are respectively connected to two inner walls of the connecting frame.

[0016] Furthermore, the mounting assembly includes a mounting seat and a supporting frame, the mounting seat is arranged on the top of the connecting assembly, the supporting frame is arranged on the top of the mounting seat, and the driving assembly is arranged at one end of the mounting seat and is located on one side of the supporting frame.

[0017] Furthermore, the bottom of each of the mounting seats is provided with four groups of screw seats, the four groups of screw seats are respectively connected to the four corners of the bottom of the mounting seat, and the four groups of screw seats are provided with adjusting screws.

[0018] Furthermore, the driving assembly includes a rotating cylinder, a first coupling, several output shafts and several second couplings. The rotating cylinder is fixed on the side wall of the mounting assembly. The two ends of the first coupling are respectively connected to the output end of the rotating cylinder and one end of one of the output shafts. Several of the output shafts are connected via the transmission assembly so that the output shafts are linked together. One end of several of the second couplings is respectively connected to the other end of several of the output shafts, and the other end of several of the second couplings is respectively connected to the end of several of the feeding rods away from the feeding trough.

[0019] Furthermore, the transmission assembly includes a synchronous sprocket and a clamping wheel. The synchronous sprocket is arranged on several of the output shafts and links the several output shafts. The clamping wheel is arranged on the top of the mounting assembly and presses the synchronous sprocket against the output shaft.

[0020] Furthermore, a rotating shaft fixing ring is sleeved on one end of the output shafts close to the second coupling.

[0021] Furthermore, one end of the first coupling and one end of the second coupling are connected to the side wall of the mounting assembly through an adjustable bearing seat.

[0022] Furthermore, the feeding rod is a stepped structure, the end of the feeding rod close to the mounting assembly is a solid structure, and the cross-section of the end of the feeding trough away from the mounting assembly is a triangular structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of the structure of the feeding mechanism for the CVD furnace in the embodiment of the present invention Figure 1 ;

[0024] Figure 2 Schematic diagram of the structure of the feeding mechanism for the CVD furnace in the embodiment of the present invention Figure 2 ;

[0025] Figure 3 Schematic diagram of the structure of the mobile component in an embodiment of the present invention;

[0026] Figure 4 Schematic diagram of the structure of the feeding mechanism for the CVD furnace in the embodiment of the present invention Figure 3 ;

[0027] Figure 5 Schematic diagram of the structure of the adjustable bearing seat in an embodiment of the present invention.

[0028] Description of main component symbols:

[0029] 10. Moving assembly; 11. Loading plate; 12. Reducer motor; 13. Gear pair; 14. Transmission shaft; 15. Travel wheel; 16. Driven shaft;

[0030] 20. Connecting assembly; 21. Connecting frame; 22. Support plate;

[0031] 30. Mounting assembly; 31. Mounting base; 32. Carrying frame;

[0032] 40. Drive assembly; 41. Rotating cylinder; 42. First coupling; 43. Output shaft; 44. Second coupling; 45. Fixed retaining ring;

[0033] 50. Feed rod; 51. Feed trough;

[0034] 60. Transmission assembly; 61. Synchronous sprocket; 62. Clamping wheel;

[0035] 70. Screw seat; 71. Adjusting screw;

[0036] 80. Adjustable bearing seat; 81. Bearing; 82. Retaining ring; 83. Inner bolt;

[0037] 90. CVD furnace.

[0038] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0039] To facilitate understanding of the present invention, the present invention will be described more fully below with reference to the accompanying drawings. The drawings illustrate several embodiments of the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the present invention.

[0040] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0042] See also Figures 1 to 5 , shown is a loading mechanism for a CVD furnace in an embodiment of the present invention, including a moving component 10, a connecting component 20, a mounting component 30, a driving component 40 and a feeding rod 50.

[0043] The mounting assembly 30 and the feeding rod 50 are both provided with several groups, the connecting assembly 20 is arranged at one end of the moving assembly 10, and several of the mounting assemblies 30 are longitudinally arranged in sequence on the top of the connecting assembly 20, the driving assembly 40 is arranged on a side wall of the mounting assembly 30, and several of the feeding rods 50 are evenly arranged on the side of the mounting assembly 30 away from the driving assembly 40, and are connected to the output end of the driving assembly 40 through the transmission assembly 60, and the upper surface of the feeding rod 50 away from the driving assembly 40 is provided with a feeding trough 51 for holding the catalyst, wherein the moving assembly 10 drives the feeding rod 50 to move via the connecting assembly 20, the mounting assembly 30, the driving assembly 40 and the transmission assembly 60, so that the feeding rod 50 moves into the CVD furnace 90, and the driving assembly 40 drives the feeding rod 50 to rotate via the transmission assembly 60 to sprinkle the catalyst in the feeding trough 51 into the CVD furnace 90.

[0044] It can be understood that the moving component 10 drives the feeding rod 50 through the connecting component 20, the mounting component 30, the driving component 40 and the transmission component 60, so that one end of the feeding rod 50 can place the feeding trough 51 into the CVD furnace 90, and then the driving component 40 drives the feeding rod 50 to rotate via the transmission component 60, so that the rotating feeding rod 50 can drive the feeding trough 51 to flip, so that the catalyst in the feeding trough 51 can be sprinkled into the CVD furnace 90, and through several groups of evenly arranged feeding rods 50, the catalyst in the CVD furnace 90 can be effectively sprinkled more evenly, and multiple feeding rods 50 can be used for feeding at the same time, and the required catalyst can be weighed in the feeding trough 51 in advance before feeding, thereby effectively improving the feeding efficiency of the catalyst, and effectively reducing the workload of the staff and improving production efficiency.

[0045] It is worth noting that the feed rod 50 has a stepped structure. The end of the feed rod 50 closest to the mounting assembly 30 is solid, while the feed trough 51 has a triangular cross-section at the end away from the mounting assembly 30. The feed trough 51 and the feed rod 50 are integrally formed. The feed rod 50 is a circular tubular structure with the same diameter as the feed trough 51. This configuration allows the feed rod 50 to be more stably inserted into the CVD furnace 90. The solid structure also makes the entire structure of the feed rod 50 more stable, preventing instability and breakage during the feeding process.

[0046] Specifically, in this embodiment, the moving component 10 includes a supporting plate 11, a reduction motor 12, a gear pair 13, a transmission shaft 14 and several walking wheels 15. The reduction motor 12 is fixed at the bottom of the supporting plate 11, and the output end of the reduction motor 12 is connected to the transmission shaft 14 via the gear pair 13. The two ends of the transmission shaft 14 are respectively connected to two of the walking wheels 15. The transmission shaft 14 is arranged at the bottom of the supporting plate 11, and several of the walking wheels 15 are connected to the bottom of the supporting plate 11 via a driven shaft 16.

[0047] It is understood that when the reduction motor 12 is started, the output end of the reduction motor 12 drives the gear pair 13, and the gear pair 13 drives the running wheels 15 through the transmission shaft 14, so that the running wheels 15 drive the carrier plate 11 to move, and the other running wheels 15 rotate via the driven shaft 16 to assist the movement of the carrier plate 11. It is worth noting that in this embodiment, there are four sets of running wheels 15, two of which are connected to both ends of the transmission shaft 14, and the other two are connected to both ends of the driven shaft 16. The four sets of running wheels 15 move on tracks to improve stability during movement.

[0048] Specifically, in this embodiment, the connecting component 20 includes a connecting frame 21 and a supporting plate 22 . The connecting frame 21 is fixed to the upper surface of the moving component 10 , and both ends of the supporting plate 22 are respectively connected to two inner walls of the connecting frame 21 .

[0049] It should be explained that the connection frame 21 is fixedly disposed on the upper surface of the carrier plate 11 , and the support plate 22 is connected to two inner walls of the connection frame 21 to improve the stability of the connection frame 21 .

[0050] Specifically, in this embodiment, the mounting assembly 30 is provided in two groups, and the mounting assembly 30 includes a mounting seat 31 and a carrying frame 32. The mounting seat 31 is provided on the top of the connecting assembly 20, and the carrying frame 32 is provided on the top of the mounting seat 31. The driving assembly 40 is provided at one end of the mounting seat 31 and is located on one side of the carrying frame 32. The driving assembly 40 is placed on the mounting seat 31 so that the driving assembly 40 can operate stably, and the carrying frame 32 enables the transmission assembly 60 to operate stably.

[0051] Furthermore, four groups of screw seats 70 are provided at the bottom of the plurality of mounting seats 31 . The four groups of screw seats 70 are respectively connected to the four corners of the bottom of the mounting seat 31 . Adjustment screws 71 are provided on the four groups of screw seats 70 .

[0052] It can be understood that the bottom of the mounting seat 31 near the connecting frame 21 is connected to the top of the connecting frame 21 through four sets of screw seats 70, and the four sets of screw seats 70 are provided with adjusting screws 71. The adjusting screws 71 can adjust the height of the screw 71 seat 70, and then the height of the mounting seat 31 can be adjusted. The mounting seat 31 drives the feeding rod 50 to adjust the height through the driving component 40 and the transmission component 60, so that the feeding rod 50 can be accurately fed into the CVD furnace 90 to complete precise feeding.

[0053] It is worth noting that the two sets of mounting seats 31 are connected by screw seats 70, and the height of the mounting seats 31 can be adjusted by adjusting the screws 71, so that the feeding rod 50 can be accurately fed into the CVD furnace 90 to complete precise feeding.

[0054] Specifically, the driving assembly 40 includes a rotating cylinder 41, a first coupling 42, several output shafts 43 and several second couplings 44. The rotating cylinder 41 is fixed on the side wall of the mounting assembly 30. The two ends of the first coupling 42 are respectively connected to the output end of the rotating cylinder 41 and one end of one of the output shafts 43. Several of the output shafts 43 are connected via the transmission assembly 60 so that the output shafts 43 are linked together. One end of several of the second couplings 44 is respectively connected to the other end of several of the output shafts 43, and the other end of several of the second couplings 44 is respectively connected to the end of several of the feeding rods 50 away from the feeding trough 51.

[0055] It can be understood that the rotating cylinder 41 is arranged on one side of the upper surface of the mounting seat 31 and is located on one side of the supporting frame 32. One end of the output shaft 43 is connected to the output end of the rotating cylinder 41 through the first coupling 42. The two ends of the output shaft 43 are rotatably mounted on the two side walls of the supporting frame 32 and pass through the two side walls of the supporting frame 32. The other end of the output shaft 43 is connected to the feeding rod 50 through the second coupling 44. During the specific implementation, the rotating cylinder 41 is started, and the rotating cylinder 41 drives the feeding rod 50 to rotate via the first coupling 42, the output shaft 43 and the second coupling 44, so that the feeding trough 51 is flipped to sprinkle the catalyst into the CVD furnace 90.

[0056] Furthermore, the transmission assembly 60 includes a synchronous sprocket 61 and a holding wheel 62. The synchronous sprocket 61 is arranged on the plurality of output shafts 43 and links the plurality of output shafts 43. The holding wheel 62 is arranged on the top of the mounting assembly 30 and holds the synchronous sprocket 61 against the output shaft 43. It is understood that the holding wheel 62 can hold the synchronous sprocket 61 against the output shaft 43, so that the plurality of output shafts 43 can rotate stably and simultaneously, thereby enabling the feed rod 50 connected to the output shaft 43 via the second coupling 44 to rotate simultaneously, thereby achieving uniform dispensing of the catalyst. A rotating shaft fixing ring 45 is sleeved on one end of the plurality of output shafts 43 close to the second coupling 44 to enable the output shaft 43 to rotate stably.

[0057] It is worth noting that the pressing wheel 62 is connected via two support rods (not shown in the figure) placed on the top of the carrying frame 32 so that the pressing wheel 62 can stably press against the synchronous sprocket 61 .

[0058] Furthermore, in this embodiment, one end of each of the first coupling 42 and the second coupling 44 is connected to the side wall of the mounting assembly 30 via an adjustable bearing seat 80 .

[0059] It can be understood that the adjustable bearing seat 80 has a bearing 81 in the middle, the inner ring of the bearing 81 is provided with the first coupling 42 or the second coupling 44, the outer ring of the bearing 81 is provided with a fixing ring 82, and the outer wall of the fixing ring 82 is evenly provided with four adjustment holes, and the four adjustment holes are provided with inner bolts 83. One end of the inner bolt 83 is against the outer wall of the bearing 81. The inner bolt 83 is rotated by a wrench to change the position of the inner bolt 83 in the adjustment hole, which can change the position of the bearing 81, so that the bearing 81 drives the first coupling 42 or the second coupling 44 to adjust the position, so that the position of the feeding rod 50 connected to the second coupling 44 can be adjusted to more angles, thereby achieving more precise feeding and more convenient alignment of the feeding hole.

[0060] In summary, the loading mechanism for the CVD furnace in the above-mentioned embodiment of the present invention drives the feeding rod 50 to move through the moving component 10 via the connecting component 20, the mounting component 30, the driving component 40 and the transmission component 60, so that the feeding trough 51 at one end of the feeding rod 50 can enter the CVD furnace 90, and the driving component 40 drives the feeding rod 50 to rotate via the transmission component 60, so that the feeding trough 51 can sprinkle the catalyst into the CVD furnace 90. Since there are several feeding rods 50, and then several feeding troughs 51 sprinkle the catalyst into the CVD furnace 90 at the same time, the catalyst can be laid more evenly in the CVD furnace 90, and accurate feeding can be achieved. Moreover, by feeding by several feeding rods 50 at the same time, the feeding time can be effectively reduced, and the workload of the staff can be effectively reduced, thereby improving production efficiency.

[0061] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0062] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A feeding mechanism for a CVD furnace, characterized in that: include: Mobile components; A connecting component is provided at one end of the moving component; Several installation components; are sequentially arranged longitudinally on the top of the connecting assembly; A driving assembly, disposed on a side wall of the mounting assembly; A plurality of feeding rods are evenly arranged on a side of the mounting assembly away from the driving assembly and connected to the output end of the driving assembly through a transmission assembly. A feeding trough for holding the catalyst is provided on the upper surface of one end of the feeding rod away from the driving assembly; Among them, the moving component drives the feeding rod to move via the connecting component, the mounting component, the driving component and the transmission component, so that the feeding rod moves into the CVD furnace, and the driving component drives the feeding rod to rotate via the transmission component to sprinkle the catalyst in the feeding trough into the CVD furnace.

2. The loading mechanism for a CVD furnace according to claim 1, characterized in that: The moving assembly includes a supporting plate, a reduction motor, a gear pair, a transmission shaft and several traveling wheels. The reduction motor is fixed to the bottom of the supporting plate. The output end of the reduction motor is connected to the transmission shaft via the gear pair. The two ends of the transmission shaft are respectively connected to two of the traveling wheels. The transmission shaft is set at the bottom of the supporting plate, and several other traveling wheels are connected to the bottom of the supporting plate via driven shafts.

3. The loading mechanism for a CVD furnace according to claim 1, characterized in that: The connecting assembly includes a connecting frame and a supporting plate. The connecting frame is fixed on the upper surface of the moving assembly. Two ends of the supporting plate are respectively connected to two inner walls of the connecting frame.

4. The loading mechanism for a CVD furnace according to claim 1, characterized in that: The mounting assembly includes a mounting seat and a bearing frame, the mounting seat is arranged on the top of the connecting assembly, the bearing frame is arranged on the top of the mounting seat, and the driving assembly is arranged at one end of the mounting seat and located on one side of the bearing frame.

5. The loading mechanism for a CVD furnace according to claim 4, characterized in that: The bottoms of the plurality of mounting seats are each provided with four groups of screw seats, the four groups of screw seats are respectively connected to the four corners of the bottom of the mounting seat, and the four groups of screw seats are each provided with an adjusting screw.

6. The loading mechanism for a CVD furnace according to claim 1, characterized in that: The driving assembly includes a rotary cylinder, a first coupling, several output shafts and several second couplings. The rotary cylinder is fixed on the side wall of the mounting assembly. The two ends of the first coupling are respectively connected to the output end of the rotary cylinder and one end of one of the output shafts. The output shafts are connected via the transmission assembly so that the output shafts are linked together. One end of the second couplings is respectively connected to the other end of the output shafts, and the other end of the second couplings is respectively connected to the end of the feeding rods away from the feeding trough.

7. The loading mechanism for a CVD furnace according to claim 6, characterized in that: The transmission assembly includes a synchronous sprocket and a clamping wheel. The synchronous sprocket is arranged on the plurality of output shafts and links the plurality of output shafts. The clamping wheel is arranged on the top of the mounting assembly and presses the synchronous sprocket against the output shaft.

8. The loading mechanism for a CVD furnace according to claim 6, characterized in that: A rotating shaft fixing retaining ring is sleeved on one end of the output shafts close to the second coupling.

9. The loading mechanism for a CVD furnace according to claim 6, characterized in that: One end of the first coupling and one end of the second coupling are connected to the side wall of the mounting assembly through an adjustable bearing seat.

10. The loading mechanism for a CVD furnace according to claim 1, characterized in that: The feeding rod is a stepped structure, the end of the feeding rod close to the mounting assembly is a solid structure, and the cross-section of the end of the feeding trough away from the mounting assembly is a triangular structure.

Images