Rolling type strip target device and EUV light source generation system

Abstract

The invention relates to the technical field of photoetching, in particular to a rolling type strip target device and an EUV light source generation system.The rolling type strip target device comprises a fixing assembly, a roller assembly and a transmission assembly; the roller assembly comprises a feeding roller, a receiving roller and a bombardment rod; the feeding roller is used for winding a tin strip, one end of the tin strip is connected with the receiving roller, and the bombardment rod is in sliding connection with the surface of the tin strip; the transmission assembly comprises a motor, a motor shaft and a gear set in transmission connection with the motor shaft. The gear set is arranged on one side of the feeding roller and one side of the receiving roller. The tin strip is wound on the feeding roller, and the transmission assembly synchronously drives the feeding roller and the receiving roller to rotate, so that the tin strip moves at a constant speed; and then a high-energy laser beam is incident to the surface of the tin strip through the laser incidence window, the tin strip is bombarded, plasma is excited, and EUV light is radiated. And the tin strip subjected to laser bombardment is rolled up by the material receiving roller, so that continuous replacement of the surface of the target material is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography, and in particular to a rolling strip target device and an EUV light source generation system. Background Art

[0002] Current EUV lithography systems use liquid tin targets as their target material. This method of targeting is extremely challenging: producing uniformly sized and stably positioned tin droplets is extremely difficult; the high velocity of the droplets also complicates laser alignment. For basic research, solid tin targets are often used instead of liquid tin targets. This produces stable EUV radiation, enabling easy analysis of plasma spectra, EUV power, and debris properties.

[0003] However, the existing method uses a solid block tin target as the target material, and a high-energy laser beam bombards the solid tin block to generate plasma and radiate EUV light. After the solid tin block target is bombarded by a high-energy laser beam, a large number of ablation pits will be formed on its surface due to ablation, which will cause a significant change in surface roughness. This change in surface roughness will have an adverse effect on the subsequent laser absorption and plasma generation process. In order to enable the solid tin block target to work stably, the surface bombarded by the laser needs to be regularly precision-polished and cleaned to remove the ablation pits and restore the surface flatness. However, this polishing and cleaning process is not only time-consuming and labor-intensive, but also requires high-precision processing equipment and professional personnel to operate. It is relatively cumbersome and troublesome, greatly increasing the maintenance cost and downtime of the EUV light source, and it is difficult to ensure that the roughness is completely consistent.

[0004] Solid thin film targets are grown on a target substrate that generates laser plasma through electron beam evaporation, forming a finite-mass solid thin film target to replace the solid bulk tin target. However, this method of growing tin thin films on target substrates is complex and costly, and the bombardment area of the resulting thin film target is very limited, which greatly limits the effective operating time of the EUV light source.

[0005] Therefore, the existing technology still needs to be improved and developed. Summary of the Invention

[0006] In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a rolling strip target device and an EUV light source generation system, aiming to solve the problems of laser absorption efficiency and plasma instability caused by surface roughness of the existing solid tin target for generating extreme ultraviolet light.

[0007] The technical solutions of the present invention are as follows:

[0008] A rolling strip target device, comprising:

[0009] a fixed assembly, including a base plate and a top plate;

[0010] The roller assembly includes a feeding roller, a receiving roller, and a bombardment rod disposed between the feeding roller and the receiving roller; the feeding roller is used to reel in the tin strip, and one end of the tin strip is connected to the receiving roller, and the bombardment rod is slidably connected to the surface of the tin strip; the roller assembly is disposed between the bottom plate and the top plate;

[0011] The transmission assembly includes a motor, a motor shaft connected to the output end of the motor, and a gear set in transmission connection with the motor shaft; the gear set is arranged on one side of the feeding roller and the receiving roller.

[0012] The rolling strip target device, wherein the rolling strip target device also includes a fixing assembly arranged between the roller assembly and the top plate; the fixing assembly includes a flange plate respectively arranged with the feeding roller and the receiving roller close to one end of the top plate, and a first rolling bearing arranged on the flange plate close to one end of the top plate; the first rolling bearing is arranged in a first bearing slot of the top plate.

[0013] In the rolling strip target device, the motor shaft and the gear set are connected via an idler gear transmission; an idler gear adapter is further provided between the idler gear and the motor shaft.

[0014] The rolling strip target device, wherein the gear set includes a roller gear adapter respectively arranged with the feeding roller and the receiving roller near one end of the base plate, a driving gear arranged on the side of the roller gear adapter near the base plate, and a second rolling bearing arranged on the side of the driving gear near the base plate; the second rolling bearing is arranged in the second bearing slot of the base plate; the idle gear is meshed with the driving gear for transmission.

[0015] The rolling strip target device, wherein the bottom plate and the top plate are respectively provided with third bearing slots; bombardment rod connecting bearings are provided at both ends of the bombardment rod, and the bombardment rod connecting bearings are arranged in the third bearing slots.

[0016] In the rolling strip target device, the bombardment rod is arranged away from the common tangent plane of the feeding roller and the receiving roller, so that the tin strip forms an angle on both sides of the bombardment rod.

[0017] In the rolling strip target device, a plurality of support rods are provided between the bottom plate and the top plate; and the motor is provided on a side of the top plate facing away from the bottom plate.

[0018] In the rolling strip target device, feeding roller fixing parts are provided at positions of the bottom plate and the top plate corresponding to the feeding roller.

[0019] An EUV light source generation system comprises: a vacuum chamber, a rolling strip target device arranged in the vacuum chamber, a pulsed laser, a focusing lens system and an EUV light collecting mirror;

[0020] The focusing lens system is used to shape and converge the nanosecond laser emitted by the pulse laser to bombard the tin strip on the rolling strip target device; the EUV light collecting mirror is used to converge the EUV light radiated by the bombarded tin strip to the relay focus output.

[0021] The EUV light source generating system, wherein the rolling strip target device includes at least two; the EUV light collecting mirror is arranged in the vacuum chamber.

[0022] Beneficial Effects: The present invention provides a rolling strip target device and an EUV light source generation system. The rolling strip target device comprises: a fixing assembly comprising a bottom plate and a top plate; a roller assembly comprising a feed roller, a receiving roller, and a bombardment rod disposed between the feed roller and the receiving roller; the feed roller is used to rewind the tin strip, one end of the tin strip being connected to the receiving roller, and the bombardment rod being slidably connected to the surface of the tin strip; the roller assembly is disposed between the bottom plate and the top plate; a transmission assembly comprising a motor, a motor shaft connected to the output end of the motor, and a gear set in transmission connection with the motor shaft; the gear set being disposed on one side of the feed roller and the receiving roller. The present invention winds the tin strip around the feed roller, synchronously driving the feed roller and the receiving roller to rotate via the transmission assembly, thereby moving the tin strip at a constant speed; and then a high-energy laser beam is incident on the surface of the tin strip through a laser incident window, bombarding the tin strip and exciting plasma, thereby radiating EUV light. After laser bombardment, the tin strip is rolled up by a receiving drum, enabling continuous replacement of the target surface. By utilizing a rolling strip target device to continuously and stably replace the target surface, the present invention effectively solves the problems of laser absorption efficiency and plasma instability caused by surface roughness variations in solid block tin targets. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the overall structure of a rolling strip target device of the present invention;

[0024] Figure 2 This is a schematic diagram of the explosion structure of a rolling strip target device of the present invention;

[0025] Figure 3 This is a schematic diagram of an exploded structure from another perspective when a rolling strip target device of the present invention is provided with a tin strip;

[0026] Figure 4This is a structural schematic diagram of an EUV light source generation system of the present invention;

[0027] Explanation of the reference numerals: fixing assembly 10, bottom plate 11, second bearing slot 111, third bearing slot 112, top plate 12, first bearing slot 121, roller assembly 20, feeding roller 21, receiving roller 22, bombardment rod 23, bombardment rod connecting bearing 231, tin strip 30, transmission assembly 40, motor 41, bolt 411, motor shaft 42, idle gear 421, idle gear adapter 422, idle gear bearing 423, gear set 43, roller gear adapter 431, driving gear 432, second rolling bearing 433, fixing assembly 50, flange 51, first rolling bearing 52, support rod 60, feeding roller fixing member 70, rolling strip target device 100, vacuum chamber 200, pulse laser 300, focusing lens system 400, EUV light collecting mirror 500. DETAILED DESCRIPTION

[0028] The present invention provides a rolling strip target device and an EUV light source generation system. To make the objectives, technical solutions, and effects of the present invention more clear and explicit, the present invention is further described below in detail. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0029] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with their meanings in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0030] Extreme-UV lithography (EUVL) technology is a key technology for manufacturing chips with a process size of 7nm and below. At present, laser-induced plasma (LPP) is the mainstream technology for EUV light sources. Its principle is to use high-energy pulsed lasers to bombard tin metal targets to obtain the required extreme ultraviolet (EUV) light. In order to improve the power and life of LPP EUV light sources, it is necessary to deeply analyze the plasma spectrum and energy generated during the interaction between the laser pulse and the tin target, as well as the distribution of debris. There is currently a method of using solid tin targets to generate extreme ultraviolet light, but solid tin targets have problems with laser absorption efficiency and plasma instability caused by surface roughness.

[0031] like Figure 1 、 Figure 2 and Figure 3As shown, the present invention provides a rolling strip target device 100, comprising:

[0032] The fixing assembly 10 includes a bottom plate 11 and a top plate 12;

[0033] The roller assembly 20 includes a feeding roller 21, a receiving roller 22, and a bombardment rod 23 disposed between the feeding roller 21 and the receiving roller 22; the feeding roller 21 is used to reel in the tin strip 30, and one end of the tin strip 30 is connected to the receiving roller 22, and the bombardment rod 23 is slidably connected to the surface of the tin strip 30; the roller assembly 20 is disposed between the bottom plate 11 and the top plate 12;

[0034] The transmission assembly 40 includes a motor 41, a motor shaft 42 connected to the output end of the motor 41, and a gear set 43 in transmission connection with the motor shaft 42; the gear set 43 is arranged on one side of the feeding roller 21 and the receiving roller 22.

[0035] In this embodiment, the tin strip 30 is wound around the feed roller 21, and the transmission assembly 40 synchronously drives the feed roller 21 and the receiving roller 22 to rotate, causing the tin strip 30 to move at a constant speed. A high-energy laser beam is then incident on the surface of the tin strip 30 through a laser entrance window, bombarding the strip and exciting plasma, which radiates EUV light. After laser bombardment, the tin strip is rolled up by the receiving roller 22, thereby achieving continuous replacement of the target surface. By utilizing a rolling strip target device to continuously and stably replace the target surface, the present invention effectively addresses the issues of laser absorption efficiency and plasma instability caused by surface roughness variations in solid block tin targets.

[0036] Specifically, the rolling strip target device of the present invention, through its mechanical rolling structure, can ensure that the laser always bombards the flat target surface, without causing secondary bombardment at the existing bombardment point, and can achieve stable interaction between the laser and the target, thereby facilitating spectral and power detection, as well as analysis of debris properties and distribution. In other words, the rolling strip target device avoids the instability caused by the difficulty in accurately controlling the droplets and jets in the liquid tin target, and also eliminates the negative impact of the surface roughness variation of the solid block tin target on the laser absorption and plasma generation process, thereby significantly improving the stability and repeatability of the EUV light source; and avoids the complex and time-consuming polishing and cleaning process required for the solid block tin target. Only the tin strip needs to be replaced regularly, which greatly simplifies the maintenance process, reduces maintenance costs, and significantly extends the effective operation time of the EUV light source. In addition, the rolling strip target device has strong scalability and can optimize the performance of the EUV light source by adjusting the thickness and movement speed of the tin strip to meet the needs of different applications. At the same time, the rolling strip target device is used to realize the excitation of EUV light source, which has the advantages of low target material cost, easy adjustment of parameters, mechanical rolling to avoid secondary bombardment at the same position, high stability, small size, and easy maintenance.

[0037] In some embodiments, the tin strip 30 is produced by a multi-pass cold rolling process using rollers with high-precision polished surfaces. This method of producing tin strips is very mature and can be purchased or customized at low cost. The thickness and width of the tin strip can also be selected or customized as needed. In addition, the tin strip is made of pure tin (Sn), which has excellent EUV light radiation efficiency and good ductility. Its surface is relatively smooth and has low roughness. The smooth surface can improve the absorption efficiency of the laser, reduce scattering, and ensure high absorption rate under laser bombardment.

[0038] In some embodiments, as Figure 2 and Figure 3 As shown, the rolling strip target device further includes a fixing assembly 50 disposed between the roller assembly 20 and the top plate 12; the fixing assembly 50 includes a flange 51 disposed on one end of the feed roller 21 and the receiving roller 22 near the top plate 12, and a first rolling bearing 52 disposed on the end of the flange 51 near the top plate 12; the first rolling bearing 52 is disposed in a first bearing slot 121 of the top plate 12. The flange 51 and the first rolling bearing 52 are used to fix one end of the feed roller 21 and the receiving roller 22 to the top plate 12, and the first rolling bearing 52 allows the feed roller 21 and the receiving roller 22 to be rotatably connected relative to the top plate 12, thereby achieving the positioning and rotation of the feed roller 21 and the receiving roller 22.

[0039] In some embodiments, the motor shaft 42 is connected to the gear set 43 via an idler gear 421. An idler gear adapter 422 is also provided between the idler gear 421 and the motor shaft 42. The idler gear adapter 422 and the idler gear 421 can transmit the driving force of the motor 41 to the gear set 43 via the motor shaft 42, thereby enabling the motor 41 to drive the synchronous rotation of the feed roller 21 and the receiving roller 22, thereby moving the tin strip at a constant speed.

[0040] Specifically, the rotational motion of the motor is transmitted to the feeding roller and the receiving roller, and the gear transmission mechanism has a precise transmission ratio, which can ensure that the feeding roller and the receiving roller move at the same speed. The synchronous motion ensures that the tin strip always remains straight and stable during the release and winding process, avoiding the interruption of laser bombardment caused by loosening or breaking of the tin strip.

[0041] In some embodiments, the transmission assembly is not limited to a gear transmission structure, and may also adopt a belt drive or a chain drive to achieve a longer transmission distance.

[0042] In some embodiments, an idler gear bearing 423 is further provided on the side of the idler gear 421 facing away from the motor shaft 42. The idler gear bearing 423 is used to form a rotational connection between the idler gear 421 and the base plate 11, thereby reducing the friction between the idler gear 421 and the base plate 11.

[0043] In some embodiments, as Figure 2 and Figure 3 As shown, the gear set 43 includes a roller gear adapter 431 respectively arranged on the end of the feeding roller 21 and the receiving roller 22 close to the bottom plate 11, a driving gear 432 arranged on the side of the roller gear adapter 431 close to the bottom plate 11, and a second rolling bearing 433 arranged on the side of the driving gear 432 close to the bottom plate 11; the second rolling bearing 433 is arranged in the second bearing slot 111 of the bottom plate 11; the idle gear 421 is engaged with the driving gear 432 for transmission. The roller gear adapter 431 is used to connect the driving gear 432 to one end of the roller, and the second rolling bearing 433 and the second bearing slot 111 are used to limit the roller, forming a clamping structure with the fixing assembly 50, so that the roller is clamped between the bottom plate and the top plate, and can rotate synchronously under the drive of the motor; and through the meshing transmission action of the idle gear 421 and the driving gear 432, the feeding roller can release the tin strip while the receiving roller collects the tin strip, so that the tin strip moves at a constant speed.

[0044] Specifically, the feed roller adopts a roller-type structure, capable of storing large quantities of unlaser-blasted tin strips. The feed roller 21 and the take-up roller 22 have the same diameter, preferably 20 mm, and can store tin strips exceeding 4 meters in length, ensuring the effective operation time of the EUV light source. Roller gear adapters and driving gears are provided at the ends of the feed roller 21 and the take-up roller 22 near the base plate 11, allowing the take-up roller 22 to actively wind up the blasted tin strips. This structure effectively prevents the tin strips from slipping during the winding process, ensuring smooth tin strip recovery. Furthermore, the gear set 43 drives the feed roller 21 and the take-up roller 22. The rotation of the motor drives the idler gear, which in turn drives two driving gears, which are respectively connected to the feed roller 21 and the take-up roller 22. This achieves synchronous rotation of the feed roller 21 and the take-up roller 22, ensuring continuous and stable tin strip movement.

[0045] In some embodiments, the bottom plate 11 and the top plate 12 are each provided with a third bearing slot 112; a bombardment rod connecting bearing 231 is provided at both ends of the bombardment rod 23, and the bombardment rod connecting bearing 231 is disposed in the third bearing slot 112. The bombardment rod 23 is fixed between the bottom plate 11 and the top plate 12 via the bombardment rod connecting bearing 231, so that the bombardment rod 23 is rotatably connected to the bottom plate 11 and the top plate 12, thereby reducing the friction between the tin strip 30 and the bombardment rod 23.

[0046] In some embodiments, the bombardment rod 23 is disposed away from the co-tangent plane of the feed roller 21 and the receiving roller 22, such that the tin strip 30 forms an angle on both sides of the bombardment rod 23. As the tin strip 30 moves, it passes the bombardment rod 23, which forms a raised structure on the tin strip 30. The bombardment rod is where the high-energy laser beam acts on the tin strip. The bombardment rod provides improved support and enhances the bombardment effect.

[0047] In some embodiments, a plurality of support rods 60 are provided between the bottom plate 11 and the top plate 12 for connecting the bottom plate and the top plate; the motor 41 is provided on the side of the top plate 12 away from the bottom plate 11; preferably, the motor is a stepper motor or a servo motor; the stepper motor has the advantages of small size, light weight, high control accuracy and high reliability. By controlling the pulse signal frequency of the stepper motor, the rotation speed of the roller can be accurately adjusted, thereby realizing precise control of the moving speed of the tin strip; the servo motor can achieve higher precision and faster response speed.

[0048] In some embodiments, the motor 41 is fixed by bolts 411 to improve the detachability of the device and facilitate subsequent maintenance.

[0049] In some embodiments, a feed roller fixing member 70 is provided at the position of the bottom plate 11 and the top plate 12 corresponding to the feed roller 21. The feed roller is designed to be detachable. When the tin strip is used up, the tin strip can be replaced or maintained by simply removing the feed roller fixing member without disassembling the entire device, thereby improving maintenance efficiency and reducing maintenance costs.

[0050] Specifically, a feed roller fixing member 70 is provided at the first bearing slot 121 and the second bearing slot 111 corresponding to the feed roller 21, making the feed roller 21 detachable and enabling convenient replacement of consumables. The power roller fixing member 70 is fixed to the bottom plate 11 and the top plate 12 by bolts 411.

[0051] In summary, the rolling strip target device has good stability and repeatability. It realizes precise control of the tin strip through a high-precision transmission component. The precise motion control ensures that the laser beam can always accurately bombard a specific position of the tin strip (at the bombardment rod), avoiding the loss of laser energy and degradation of beam quality due to position drift. The stable laser action position and the high uniformity of the tin strip surface make the plasma state generated by each laser pulse highly consistent, ensuring that key parameters such as the temperature, density and ionization degree of the plasma remain stable over time, thereby ensuring the consistency of the radiation intensity and spectral characteristics of the EUV light. This high degree of controllability enables the output of the EUV light source to remain stable for a long time, which is beneficial to the subsequent debris spatial distribution analysis and spectral detection work. The rolling strip target device continuously replaces the target surface through the feeding roller and the receiving roller, always providing a fresh and smooth tin surface for the high-energy laser beam. The smooth tin surface has a higher laser absorption efficiency, so that more laser energy can be effectively converted into plasma heat energy instead of being reflected or scattered. The continuously replaced tin strip can avoid the interference of surface effects, eliminate the interference of adverse factors such as surface roughness caused by laser ablation on the plasma excitation process, and ensure the purity and efficiency of plasma generation.

[0052] In addition, Figure 4The present invention further provides an EUV light source generation system, comprising: a vacuum chamber 200, a rolling strip target device 100 arranged in the vacuum chamber 200, a pulse laser 300, a focusing lens system 400 and an EUV light collecting mirror 500; the focusing lens system 400 is used to shape and converge the nanosecond laser emitted by the pulse laser 300 and then bombard the tin strip on the rolling strip target device 100; the EUV light collecting mirror 500 is used to converge the EUV light radiated by the bombarded tin strip to a relay focus for output.

[0053] In this embodiment, the pulsed laser 300 generates high-energy nanosecond laser light. After being shaped and focused by the focusing lens system 400, the laser light interacts with a strip target in a vacuum chamber, generating plasma and radiating EUV light. A collecting mirror converges the EUV light to a relay focus for output. The rolling strip target device avoids the instability caused by the difficulty in precisely controlling droplets and jets in a liquid tin target. It also eliminates the negative impact of surface roughness variations in a solid block tin target on laser absorption and plasma generation, significantly improving the stability and repeatability of the EUV light source.

[0054] In some embodiments, the rolling strip target device comprises at least two; the EUV light collecting mirror is disposed within the vacuum chamber. Preferably, two rolling strip target devices are disposed within the vacuum chamber. When one roll of tin strip is exhausted, a motor drives a mechanical system to move the other rolling strip target device, loaded with a new tin strip, to the laser focal point. After operation stops, the exhausted strip can be removed and replaced. This dual strip target system design ensures long-term continuous operation of the EUV light source.

[0055] In summary, the present invention provides a rolling strip target device and EUV light source generation system. The rolling strip target device includes: a fixing assembly including a bottom plate and a top plate; a roller assembly including a feeding roller, a receiving roller, and a bombardment rod disposed between the feeding roller and the receiving roller; the feeding roller is used to rewind the tin strip, and one end of the tin strip is connected to the receiving roller, and the bombardment rod is slidably connected to the surface of the tin strip; the roller assembly is disposed between the bottom plate and the top plate; a transmission assembly including a motor, a motor shaft connected to the output end of the motor, and a gear set connected to the motor shaft; the gear set is disposed on one side of the feeding roller and the receiving roller. The present invention winds the tin strip on the feeding roller, synchronously drives the feeding roller and the receiving roller to rotate through the transmission assembly, so that the tin strip moves at a constant speed; and then uses a high-energy laser beam to be incident on the surface of the tin strip through a laser incident window, bombarding the tin strip and exciting plasma, thereby radiating EUV light. After laser bombardment, the tin strip is rolled up by a receiving drum, enabling continuous replacement of the target surface. By utilizing a rolling strip target device to continuously and stably replace the target surface, the present invention effectively solves the problems of laser absorption efficiency and plasma instability caused by surface roughness variations in solid block tin targets.

[0056] It should be understood that the application of the present invention is not limited to the above examples. For those skilled in the art, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A rolling strip target device, characterized in that: include: a fixed assembly, including a base plate and a top plate; The roller assembly includes a feeding roller, a receiving roller, and a bombardment rod disposed between the feeding roller and the receiving roller; the feeding roller is used to reel in the tin strip, and one end of the tin strip is connected to the receiving roller, and the bombardment rod is slidably connected to the surface of the tin strip; the roller assembly is disposed between the bottom plate and the top plate; The transmission assembly includes a motor, a motor shaft connected to the output end of the motor, and a gear set in transmission connection with the motor shaft; the gear set is arranged on one side of the feeding roller and the receiving roller.

2. The rolling strip target device according to claim 1, characterized in that: The rolling strip target device also includes a fixing assembly arranged between the roller assembly and the top plate; the fixing assembly includes a flange plate respectively arranged on the feeding roller and the receiving roller close to one end of the top plate, and a first rolling bearing arranged on the flange plate close to one end of the top plate; the first rolling bearing is arranged in a first bearing slot of the top plate.

3. The rolling strip target device according to claim 1, characterized in that: The motor shaft and the gear set are connected via an idler gear transmission; an idler gear adapter is also provided between the idler gear and the motor shaft.

4. The rolling strip target device according to claim 3, characterized in that: The gear set includes roller gear adapters respectively arranged on one end of the feeding roller and the receiving roller close to the bottom plate, a driving gear arranged on the side of the roller gear adapter close to the bottom plate, and a second rolling bearing arranged on the side of the driving gear close to the bottom plate; the second rolling bearing is arranged in a second bearing slot of the bottom plate; the idle gear is meshed with the driving gear for transmission.

5. The rolling strip target device according to claim 1, characterized in that: The bottom plate and the top plate are respectively provided with third bearing slots; both ends of the bombardment rod are provided with bombardment rod connecting bearings, and the bombardment rod connecting bearings are arranged in the third bearing slots.

6. The rolling strip target device according to claim 1, characterized in that: The bombardment rod is arranged away from the co-tangent plane of the feeding roller and the receiving roller, so that the tin strip forms an angle on both sides of the bombardment rod.

7. The rolling strip target device according to claim 1, characterized in that: A plurality of support rods are arranged between the bottom plate and the top plate; and the motor is arranged on a side of the top plate facing away from the bottom plate.

8. The rolling strip target device according to claim 1, characterized in that: Feed roller fixing parts are provided at positions of the bottom plate and the top plate corresponding to the feed roller.

9. An EUV light source generation system, characterized in that: include: A vacuum chamber, a rolling strip target device according to any one of claims 1 to 8, a pulsed laser, a focusing lens system, and an EUV light collecting mirror arranged in the vacuum chamber; The focusing lens system is used to shape and converge the nanosecond laser emitted by the pulse laser to bombard the tin strip on the rolling strip target device; the EUV light collecting mirror is used to converge the EUV light radiated by the bombarded tin strip to the relay focus output.

10. The EUV light source generating system according to claim 9, characterized in that: The rolling strip target device includes at least two; the EUV light collecting mirror is arranged in the vacuum chamber.

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