Czochralski silicon single crystal rod production equipment

Abstract

The invention relates to the field of straight pull type silicon single crystal rod production and processing, and discloses straight pull type silicon single crystal rod production equipment which comprises an operation frame and further comprises two movable shells which are connected to the bottom of the operation frame in a sliding mode in the length direction of the operation frame, and two translation mechanisms are arranged on the operation frame. The two translation mechanisms are respectively used for driving the two movable shells to move; two movable shells are arranged on the base, overturning rings are rotationally connected into the two movable shells, notches are formed in the movable shells and the overturning rings, driving mechanisms are arranged on the two movable shells, and the driving mechanisms are used for driving the overturning rings to rotate; three telescopic clamping blocks are evenly connected into the overturning ring in a sliding mode, and the three telescopic clamping blocks are arranged in a radial mode. Through the notch design of the movable shell and the overturning ring, the device can complete lateral clamping without penetrating from the two ends of the silicon rod. The problem that in the prior art, due to the fact that the two ends of a silicon rod are blocked or clamping space is insufficient, operation cannot be achieved is solved, and equipment applicability is remarkably improved.

Description

Technical Field

[0001] The present invention belongs to the field of production and processing of Czochralski single crystal silicon rods, and in particular relates to production equipment for Czochralski single crystal silicon rods. Background Art

[0002] In the post-processing process of Czochralski single crystal silicon rods, 180° axial rotation is a necessary step for resistivity uniformity detection and defect analysis. Secondly, rotating the silicon rod can also solve the problem of non-uniform bending stress generated by the silicon rod's own weight, which leads to dislocations or hidden cracks in large-sized single crystals with a diameter greater than 200mm. Therefore, auxiliary flipping of the silicon rod is required.

[0003] When using the existing auxiliary turning device for silicon rod production, the clamping device needs to be passed through both ends of the silicon rod to clamp and turn the silicon rod, which makes the existing device poor in applicability. When there is obstruction or insufficient clamping space at both ends of the silicon rod, it cannot assist in turning the silicon rod, and therefore cannot meet the needs of silicon rod production. Summary of the Invention

[0004] The purpose of the embodiments of the present invention is to provide a production device for a Czochralski single crystal silicon rod, aiming to solve the problem that the existing silicon rod auxiliary turning device is inconvenient to use when both ends of the silicon rod are blocked or the clamping space is insufficient.

[0005] The present invention is implemented as follows: a production equipment for direct-pull single crystal silicon rods includes a running frame, and also includes: two movable shells slidably connected to the bottom of the running frame along the length direction of the running frame, two translation mechanisms are provided on the running frame, and the two translation mechanisms are respectively used to drive the two movable shells to move; a flip ring is rotatably connected in the two movable shells, and notches are provided on the movable shells and the flip rings, and a driving mechanism is provided on the two movable shells, and the driving mechanism is used to drive the flip ring to rotate; three telescopic clamps are evenly slidably connected in the flip ring, and the three telescopic clamps are radially arranged. A synchronous driving mechanism is provided on the flip ring, and the synchronous driving mechanism is used to drive the three telescopic clamps to move synchronously toward the center of the flip ring.

[0006] A further technical solution is that the end of the telescopic clamp is rotatably connected to a guide roller, a guide groove is provided in the guide roller along the length direction of the guide roller, a locking frame is slidably connected in the guide groove, one end of the locking frame is provided with an arc groove that cooperates with the side wall of the guide roller, the other end of the locking frame is connected to a compression spring and an armature, the end of the compression spring is connected in the guide groove, and an electromagnet is installed in the guide groove at one end close to the armature.

[0007] A further technical solution is that the end of the telescopic clamp is rotatably connected to a guide roller, a guide groove is provided in the guide roller along the length direction of the guide roller, a locking frame is slidably connected in the guide groove, one end of the locking frame is provided with an arc groove that cooperates with the side wall of the guide roller, the other end of the locking frame is connected to a compression spring and an armature, the end of the compression spring is connected in the guide groove, and an electromagnet is installed in the guide groove at one end close to the armature.

[0008] According to a further technical solution, a limiting protrusion is provided in the arc-shaped groove of the locking frame, and a plurality of limiting recessed grooves are evenly provided on the side wall of the guide roller.

[0009] A further technical solution is that the translation mechanism includes a screw rod rotatably connected in the moving shell, gear 1 is installed on the screw rod, motor 1 is installed on the top of the running frame, gear 2 is installed on the rotating end of motor 1, and gear 2 is engaged with gear 1.

[0010] According to a further technical solution, the driving mechanism includes a second motor mounted on the side wall of the movable housing, a third gear is fixed to the rotating end of the second motor, and meshing teeth engaged with the third gear are embedded on the side wall of the flip ring.

[0011] A further technical solution is that the synchronous drive mechanism includes a transmission ring rotatably connected in a flip ring, a notch is provided on the transmission ring, an avoidance groove is provided on the flip ring, a telescopic part is rotatably connected to the flip ring, the telescopic end of the telescopic part is rotatably connected to the transmission ring through the avoidance groove, three oblique long holes are evenly provided on the transmission ring, and transmission shafts are fixed on the three telescopic clamping blocks, and the three transmission shafts are respectively slidably connected in the three oblique long holes.

[0012] A further technical solution is that a cleaning component is provided on the movable shell, and the cleaning component includes an arc-shaped cavity 1 provided in the movable shell, and a plurality of exhaust holes 1 evenly provided on the inner wall of the movable shell, and the plurality of exhaust holes 1 are all connected to the arc-shaped cavity 1; a connecting pipe is installed on the side wall of the movable shell, and the connecting pipe is connected to the arc-shaped cavity 1, and a connecting hole 1 is provided in the arc-shaped cavity 1; an arc-shaped cavity 2 is provided in the flip ring, and a plurality of exhaust holes 2 are evenly provided on the inner wall of the flip ring, and the plurality of exhaust holes 2 are all connected to the arc-shaped cavity 2; a connecting hole 2 is provided in the arc-shaped cavity 2, and the connecting hole 2 cooperates with the connecting hole 1.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. The notch design of the movable housing and the flip ring allows the device to complete lateral clamping without inserting the silicon rod from both ends. This solves the problem of inoperability caused by obstruction of the silicon rod ends or insufficient clamping space in the existing technology, significantly improving the applicability of the device.

[0015] 2. The three radially distributed telescopic clamps achieve synchronous centripetal movement through a synchronous drive mechanism, automatically aligning the center of the silicon rod to ensure clamping stability.

[0016] 3. A guide roller with a soft cushion is added to the end of the telescopic clamp to avoid the risk of breakage caused by forced correction due to low coaxiality of the silicon rod, thereby improving safety.

[0017] 4. The locking frame is controlled by an electromagnet to disengage from the guide roller, releasing the rotation restriction; the translation mechanism drives the mobile housing at one end to move the silicon rod, and the guide roller at the other end provides rolling guidance, realizing the lateral transfer of the silicon rod to the belt conveyor or processing equipment, avoiding the upper space obstruction restriction.

[0018] 5. The cleaning component forms a circular air path through the arc-shaped cavity and exhaust holes, and the fan airflow sweeps the surface of the silicon rod; dust removal is completed synchronously during the flipping and translation of the silicon rod, improving post-processing efficiency.

[0019] 6. The guide roller is mechanically interlocked with the limiting protrusion and the limiting groove, and cooperates with the compression spring and electromagnet to achieve free switching between rigid fixation in the clamping state and flexible guidance in the conveying state, with accurate and reliable operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic structural diagram of a Czochralski single crystal silicon rod production device provided by the present invention;

[0021] Figure 2 The present invention provides Figure 1 Schematic diagram of the structure from an upward perspective;

[0022] Figure 3 A schematic diagram of the structure of a Czochralski single crystal silicon rod production device provided by the present invention in a silicon rod clamping state

[0023] Figure 4 The present invention provides Figure 1 Schematic diagram of the connection structure of the mobile shell;

[0024] Figure 5 The present invention provides Figure 4 Schematic diagram of the structure of the synchronous drive mechanism;

[0025] Figure 6 The present invention provides Figure 4 Schematic diagram of the internal structure of the moving shell and the flip ring;

[0026] Figure 7 The present invention provides Figure 3 Schematic diagram of the structure of the middle flip ring;

[0027] Figure 8 The present invention provides Figure 4 Schematic diagram of the internal structure of the middle telescopic clamp;

[0028] Figure 9 The present invention provides Figure 8 Schematic diagram of the structure of the middle locking frame;

[0029] Figure 10 This is a schematic diagram of the structure of the silicon rods provided by the present invention being transported horizontally to one side.

[0030] In the accompanying drawings: 101, running frame; 102, moving housing; 103, flip ring; 104, telescopic clamping block; 105, guide roller; 106, guide groove; 107, locking frame; 108, compression spring; 109, armature; 110, electromagnet; 111, limit groove; 112, limit protrusion;

[0031] 2. Translation mechanism; 201. Screw; 202. Gear 1; 203. Motor 1; 204. Gear 2;

[0032] 3. Driving mechanism; 301. Motor 2; 302. Gear 3; 303. Meshing gear;

[0033] 4. Synchronous drive mechanism; 401. Transmission ring; 402. Telescopic member; 403. Avoidance groove; 404. Oblique long hole; 405. Transmission shaft;

[0034] 5. Cleaning assembly; 501. Arc-shaped cavity 1; 502. Exhaust hole 1; 503. Connecting pipe; 504. Connecting hole 1; 505. Arc-shaped cavity 2; 506. Exhaust hole 2; 507. Connecting hole 2. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0036] The specific implementation of the present invention is described in detail below with reference to specific embodiments.

[0037] like Figures 1-4As shown, a production device for a CZ-type single crystal silicon rod provided by one embodiment of the present invention includes a running frame 101, and further includes: two movable shells 102 slidably connected to the bottom of the running frame 101 along the length direction of the running frame 101, the running frame 101 is provided with two translation mechanisms 2, and the two translation mechanisms 2 are respectively used to drive the two movable shells 102 to move; the two movable shells 102 are rotatably connected to the inside of each of the two movable shells 102, and the movable shells 102 and the flip ring 103 are both provided with notches, and the two movable shells 102 are A driving mechanism 3 is provided, and the driving mechanism 3 is used to drive the flip ring 103 to rotate; three telescopic clamps 104 are uniformly slidably connected in the flip ring 103, and the three telescopic clamps 104 are arranged radially. A synchronous driving mechanism 4 is provided on the flip ring 103, and the synchronous driving mechanism 4 is used to drive the three telescopic clamps 104 to move synchronously toward the center of the flip ring 103; the running frame 101 can be connected to the robot arm to drive the running frame 101 to move up and down or horizontally. When flipping the silicon rod, the two translation mechanisms 2 respectively drive the two moving shells 1 02 moves horizontally, thereby adjusting the clamping position of the silicon rod, the notches on the movable housing 102 and the flip ring 103 coincide, and the retractable clamping blocks 104 on the flip ring 103 move away from each other. The robotic arm drives the running frame 101 to move downward from above the silicon rod, and the running frame 101 drives the movable housing 102 and the flip ring 103 to move downward, so that the silicon rod passes through the notches on the movable housing 102 and the flip ring 103, so that the silicon rod is located in the flip ring 103, and the synchronous drive mechanism 4 drives the three retractable clamping blocks 104 on the flip ring 103 to move synchronously toward the center of the flip ring 103. Then, the three telescopic clamps 104 clamp the silicon rod. A soft buffer pad can be installed at the contact position between the telescopic clamp 104 and the silicon rod to prevent the silicon rod from breaking when the three telescopic clamps 104 forcibly correct the center of the silicon rod when the coaxiality of the silicon rod is low. The driving mechanism 3 drives the flip ring 103 to rotate, and the flip ring 103 drives the silicon rod to rotate 180° through the three telescopic clamps 104. By setting the notches on the movable shell 102 and the flip ring 103, when clamping the silicon rod, the device does not need to pass through the end of the silicon rod, and can clamp the silicon rod at any position, which is convenient and easy to use.

[0038] like Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 8 、 Figure 9 and Figure 10As shown, as a preferred embodiment of the present invention, the end of the telescopic clamp 104 is rotatably connected to a guide roller 105, and a guide groove 106 is provided in the guide roller 105 along the length direction of the guide roller 105. A locking frame 107 is slidably connected in the guide groove 106, and one end of the locking frame 107 is provided with an arc groove that cooperates with the side wall of the guide roller 105. The other end of the locking frame 107 is connected to a compression spring 108 and an armature 109. The end of the compression spring 108 It is connected to the guide groove 106, and an electromagnet 110 is installed at one end of the guide groove 106 near the armature 109; a limiting protrusion 112 is provided in the arc groove of the locking frame 107, and a plurality of limiting grooves 111 are evenly provided on the side wall of the guide roller 105; when clamping the silicon rod, the electromagnet 110 is in the power-off state, the compression spring 108 pushes the locking frame 107, and the arc groove at one end of the locking frame 107 presses against the side wall of the guide roller 105, limiting the rotation of the guide roller 105 by friction. The limiting protrusion 112 is inserted into the limiting groove 111, which can further limit the rotation of the guide roller 105. At this time, the movable housing 102 clamps the silicon rod through the telescopic clamping block 104 and the guide roller 105. When the silicon rod needs to be placed on the belt conveyor for transportation, or sent to the silicon rod processing device for processing, the electromagnet 110 on one of the movable housings 102 is energized, and the electromagnet 110 overcomes the elastic force of the compression spring 108 through magnetic force and drives the adsorption armature 109. The armature 109 drives the locking frame 107 away from the guide roller 105, thereby releasing the rotation restriction of the guide roller 105. At this time, the three guide rollers 105 on one of the movable housings 102 play a guiding role, and the translation mechanism 2 drives the other movable housing 102 to move. The other movable housing 102 drives one end of the silicon rod to move through the three telescopic clamping blocks 104 and the three guide rollers 105, so that the silicon rod moves under the guiding effect of the three guide rollers 105 on one of the movable housings 102 (such as Figure 10 As shown), at this time, even if there is an obstruction above the belt conveyor device or the processing device, the silicon rod can be fed into the belt conveyor device or the processing device from the side of the belt conveyor device or the processing device, and a soft sleeve can be installed on the side wall of the guide roller 105 to avoid rigid contact between the guide roller 105 and the silicon rod when the coaxiality of the silicon rod is low.

[0039] like Figure 1 and Figure 2As shown, as a preferred embodiment of the present invention, the translation mechanism 2 includes a screw rod 201 rotatably connected in the mobile shell 102, a gear 1 202 is installed on the screw rod 201, a motor 1 203 is installed on the top of the running frame 101, and a gear 2 204 is installed on the rotating end of the motor 1 203, the gear 2 204 is meshed with the gear 1 202, and the screw rod 201 is threadedly matched with one of the mobile shells 102; the motor 1 203 drives the gear 2 204 to rotate, the gear 2 204 drives the gear 1 202 to rotate, the gear 1 202 drives the screw rod 201 to rotate, and the screw rod 201 drives the mobile shell 102 to move through threaded transmission.

[0040] like Figure 3 、 Figure 4 and Figure 7 As shown, as a preferred embodiment of the present invention, the driving mechanism 3 includes a motor 2 301 installed on the side wall of the movable shell 102, a gear 302 is fixed to the rotating end of the motor 2 301, and a meshing tooth 303 engaged with the gear 302 is embedded on the side wall of the flip ring 103; the motor 2 301 drives the gear 3 302 to rotate, and the rotating gear 302 drives the flip ring 103 to rotate through the meshing tooth 303.

[0041] like Figure 3 、 Figure 4 and Figure 5 As shown, as a preferred embodiment of the present invention, the synchronous drive mechanism 4 includes a transmission ring 401 rotatably connected in the flip ring 103, a notch is provided on the transmission ring 401, a avoidance groove 403 is provided on the flip ring 103, a telescopic member 402 is rotatably connected to the flip ring 103, the telescopic member 402 can be an electric telescopic rod and a cylinder, etc., the telescopic end of the telescopic member 402 is rotatably connected to the transmission ring 401 through the avoidance groove 403, and three oblique long holes 404 are evenly provided on the transmission ring 401, and a transmission shaft 405 is fixed on the three telescopic clamping blocks 104. The transmission shafts 405 are respectively slidably connected in the three oblique long holes 404. In the initial state, the telescopic member 402 is in an extended state, and the multiple telescopic clamping blocks 104 on the movable housing 102 are away from each other. When clamping the silicon rod, the telescopic member 402 contracts, and the telescopic member 402 drives the transmission ring 401 to rotate in the flip ring 103. The transmission ring 401 pushes the three transmission shafts 405 to move synchronously through the three oblique long holes 404. The three transmission shafts 405 drive the three telescopic clamping blocks 104 to move synchronously. Through the synchronous movement of the three telescopic clamping blocks 104, the silicon rod can be centered and clamped.

[0042] like Figure 3 、 Figure 4 、 Figure 6 and Figure 7As shown, as a preferred embodiment of the present invention, the mobile housing 102 is provided with a cleaning assembly 5, the cleaning assembly 5 includes an arc-shaped cavity 501 provided in the mobile housing 102, and a plurality of exhaust holes 502 evenly provided on the inner wall of the mobile housing 102, the plurality of exhaust holes 502 are all connected to the arc-shaped cavity 501, a connecting pipe 503 is installed on the side wall of the mobile housing 102, the connecting pipe 503 is connected to the arc-shaped cavity 501, the arc-shaped cavity A connecting hole 504 is provided in the first 501, an arc-shaped cavity 505 is provided in the flip ring 103, and a plurality of exhaust holes 506 are evenly provided on the inner wall of the flip ring 103. The plurality of exhaust holes 506 are all connected to the arc-shaped cavity 505. A connecting hole 507 is provided in the arc-shaped cavity 505, and the connecting hole 507 cooperates with the connecting hole 504. When the notch on the flip ring 103 rotates to the top, the movable housing 102 and the flip ring 103 form a complete The exhaust hole 1 502 and the exhaust hole 2 506 on the movable housing 102 and the flip ring 103 form a ring, the connecting hole 1 504 and the connecting hole 2 507 are connected, the connecting pipe 503 is connected to an external air source such as a blower and blows air into the connecting pipe 503, the connecting pipe 503 blows air into the arc cavity 1 501, the arc cavity 1 501 blows air into the arc cavity 2 505 through the connecting hole 1 504 and the connecting hole 2 507, and the air in the arc cavity 1 501 and the arc cavity 2 505 is filled with air. The air is discharged from the exhaust hole 1 502 and the exhaust hole 2 506 and blown toward the silicon rod. When the translation mechanism 2 drives the movable housing 102 to move, the silicon rod can be blown to remove dust. Moreover, one of the movable housings 102 drives one end of the silicon rod to move. When the silicon rod passes through the other movable housing 102, the exhaust hole 1 502 and the exhaust hole 2 506 on the other movable housing 102 blow and clean the silicon rod. Then, when the silicon rod is transported to the belt conveyor or the processing device, the silicon rod can be cleaned.

[0043] In the above embodiment of the present invention, a production device for a straight-pull single crystal silicon rod is provided. The running frame 101 can be connected to a robotic arm to drive the running frame 101 to move up and down or horizontally. When flipping the silicon rod, the two translation mechanisms 2 respectively drive the two movable shells 102 to move horizontally, thereby adjusting the clamping position of the silicon rod. The notches on the movable shell 102 and the flip ring 103 coincide with each other, and the retractable clamping blocks 104 on the flip ring 103 move away from each other. The robotic arm drives the running frame 101 to move downward from above the silicon rod, and the running frame 101 drives the movable shell 102 and the flip ring 103 to move downward, so that the silicon rod passes through the notches on the movable shell 102 and the flip ring 103, so that the silicon rod is in the right position. Inside the flip ring 103, the synchronous drive mechanism 4 drives the three telescopic clamping blocks 104 on the flip ring 103 to move synchronously toward the center of the flip ring 103, thereby causing the guide rollers 105 on the three telescopic clamping blocks 104 to clamp the silicon rod. At this time, the electromagnet 110 is in a power-off state, and the guide rollers 105 are restricted from rotating to prevent the silicon rod from sliding along the length direction when the silicon rod rotates. Soft buffer pads can be installed at the contact position between the telescopic clamping blocks 104 and the silicon rod to prevent the silicon rod from breaking when the three telescopic clamping blocks 104 forcibly correct the center of the silicon rod when the coaxiality of the silicon rod is low. The drive mechanism 3 drives the flip ring 103 to rotate, and the flip ring 103 drives the silicon rod to rotate 180° through the three telescopic clamping blocks 104;

[0044] In addition to rotating the silicon rod, the silicon rod passes through the notch on the movable housing 102 and the flip ring 103. When the silicon rod is inside the flip ring 103, the driving mechanism 3 drives the flip ring 103 to rotate, and the notch on the flip ring 103 rotates upward. The movable housing 102 and the flip ring 103 form a complete ring. The exhaust hole 1 502 and the exhaust hole 2 506 on the movable housing 102 and the flip ring 103 form a ring. An external air source such as a fan blows air into the connecting pipe 503, and the exhaust hole 1 502 and the exhaust hole 2 506 blow air toward the side of the silicon rod. When the translation mechanism 2 drives the movable housing 102 to move, the silicon rod can be blown to remove dust.

[0045] Due to the obstruction above the belt conveyor or processing device, the silicon rod cannot be directly placed on the belt conveyor or processing device from above the belt conveyor or processing device. The electromagnet 110 on one of the mobile housings 102 is energized, and the electromagnet 110 overcomes the elastic force of the compression spring 108 through magnetic force and drives the adsorption armature 109. The armature 109 drives the locking frame 107 away from the guide roller 105, thereby releasing the rotation restriction of the guide roller 105. At this time, the three guide rollers 105 on one of the mobile housings 102 play a guiding role, and the translation mechanism 2 drives the other mobile housing 10 2 moves, and the other movable housing 102 drives one end of the silicon rod to move through three telescopic clamping blocks 104 and three guide rollers 105, so that the silicon rod moves under the guidance of the three guide rollers 105 on one movable housing 102, and the silicon rod can be sent from the side of the belt conveyor device or the processing device to the belt conveyor device or the processing device, and when the silicon rod passes through the other movable housing 102, the exhaust hole 1 502 and the exhaust hole 2 506 on the other movable housing 102 blow air to clean the silicon rod, thereby cleaning the silicon rod when it is transported to the belt conveyor device or the processing device.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A production equipment for a Czochralski single crystal silicon rod, comprising a running frame, characterized in that: Also includes: Two movable shells are connected to the bottom of the running frame in a sliding manner along the length of the running frame. The running frame is provided with two translation mechanisms, and the two translation mechanisms are used to drive the two movable shells to move respectively; A flip ring is rotatably connected in each of the two movable housings. Notches are provided on the movable housing and the flip ring. A driving mechanism is provided on each of the two movable housings for driving the flip ring to rotate. Three telescopic clamping blocks are evenly and slidably connected in the flip ring. The three telescopic clamping blocks are radially arranged. A synchronous driving mechanism is provided on the flip ring. The synchronous driving mechanism is used to drive the three telescopic clamping blocks to move synchronously toward the center of the flip ring.

2. The production equipment of a Czochralski single crystal silicon rod according to claim 1, characterized in that: The end of the telescopic clamp is rotatably connected to a guide roller, a guide groove is provided in the guide roller along the length direction of the guide roller, a locking frame is slidably connected in the guide groove, one end of the locking frame is provided with an arc groove that cooperates with the side wall of the guide roller, and the other end of the locking frame is connected to a compression spring and an armature, the end of the compression spring is connected in the guide groove, and an electromagnet is installed in the guide groove at one end close to the armature.

3. The production equipment of the Czochralski single crystal silicon rod according to claim 2, characterized in that: A limiting protrusion is provided in the arc-shaped groove of the locking frame, and a plurality of limiting recessed grooves are evenly provided on the side wall of the guide roller.

4. The production equipment of a Czochralski single crystal silicon rod according to claim 1, characterized in that: The translation mechanism includes a screw rod rotatably connected in a moving housing, a gear 1 is installed on the screw rod, a motor 1 is installed on the top of the running frame, a gear 2 is installed on the rotating end of the motor 1, and the gear 2 is meshed with the gear 1.

5. The production equipment of a Czochralski single crystal silicon rod according to claim 1, characterized in that: The driving mechanism includes a second motor installed on the side wall of the movable housing, a third gear is fixed to the rotating end of the second motor, and meshing teeth meshing with the third gear are embedded on the side wall of the flip ring.

6. The production equipment of a Czochralski single crystal silicon rod according to claim 1, characterized in that: The synchronous drive mechanism includes a transmission ring rotatably connected in a flip ring, a notch is provided on the transmission ring, an avoidance groove is provided on the flip ring, a telescopic part is rotatably connected to the flip ring, the telescopic end of the telescopic part is rotatably connected to the transmission ring through the avoidance groove, three oblique long holes are evenly provided on the transmission ring, and transmission shafts are fixed on the three telescopic clamping blocks, and the three transmission shafts are respectively slidably connected in the three oblique long holes.

7. The production equipment of a Czochralski single crystal silicon rod according to claim 1, characterized in that: The movable shell is provided with a cleaning component, and the cleaning component includes an arc-shaped cavity 1 provided in the movable shell, and a plurality of exhaust holes 1 evenly provided on the inner wall of the movable shell, and the plurality of exhaust holes 1 are all connected with the arc-shaped cavity 1. A connecting pipe is installed on the side wall of the movable shell, and the connecting pipe is connected with the arc-shaped cavity 1. The arc-shaped cavity 1 is provided with a connecting hole 1, and the flip ring is provided with an arc-shaped cavity 2. The flip ring is evenly provided with a plurality of exhaust holes 2 on the inner wall of the flip ring, and the plurality of exhaust holes 2 are all connected with the arc-shaped cavity 2. The arc-shaped cavity 2 is provided with a connecting hole 2, and the connecting hole 2 cooperates with the connecting hole 1.

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