Temperature decoupling method of optical fiber Fabry-Perot sensor and optical fiber Fabry-Perot sensor

Abstract

The invention provides a temperature decoupling method of an optical fiber Fabry-Perot sensor and the optical fiber Fabry-Perot sensor, the optical fiber Fabry-Perot sensor is provided with a Fabry-Perot cavity and comprises a first optical fiber and a sensing unit, the first optical fiber receives incident light generated by a broadband light source, and the sensing unit is provided with a first reflecting surface and comprises a decoupling material. The first reflecting surface is a reflecting surface used for forming a Fabry-Perot cavity, the decoupling material is a semiconductor material of which the forbidden bandwidth is related to the temperature, the wavelength of an absorption edge moves when the temperature changes, and the temperature decoupling method comprises the following steps: converting incident light into a first optical signal carrying sensing information by using the Fabry-Perot cavity; enabling the incident light to pass through a decoupling material to form a second optical signal carrying temperature information; a measured absorption edge wavelength is identified based on the second optical signal to determine measured temperature information, and information related to the first optical signal is temperature decoupled based on the measured temperature information. Therefore, the accuracy of sensing information can be improved, and the structure of the sensor can be simplified.

Description

Technical Field

[0001] The present disclosure relates to the core electronic industry field, and in particular to a temperature decoupling method for an optical fiber Fabry-Perot sensor and an optical fiber Fabry-Perot sensor. Background Art

[0002] Parameter monitoring in extreme temperature environments is increasingly being used in numerous fields, including oil production, power plants, aerospace, and the chemical industry. Fiber-optic Fabry-Perot sensors, with their resistance to electromagnetic interference, corrosion resistance, high precision, compact size, and long-distance transmission, play a crucial role in parameter measurement in extreme temperature environments. Fiber-optic Fabry-Perot sensors typically consist of a Fabry-Perot cavity, which consists of two reflective surfaces. Light reflects off the cavity's two reflective surfaces, forming an interference light signal. When the sensing information acting on the cavity (such as pressure) changes, the cavity length also changes, causing a corresponding change in the interference light signal. By analyzing the interference light signal, the sensing information can be deduced.

[0003] In extreme temperature environments, temperature significantly affects the cavity length of the Fabry-Perot (FP) cavity, thereby affecting the accuracy of the measured sensor information. Therefore, temperature decoupling of fiber-optic FP sensors is necessary to reduce the impact of temperature on sensor performance. Several solutions have been proposed, such as adding an additional temperature sensor to monitor temperature or deploying multiple FP cavities, each dedicated to measuring temperature and sensing information.

[0004] However, for solutions that require additional temperature sensors or multiple Fabry-Perot cavities, the temperature measurement unit (e.g., temperature sensor or Fabry-Perot cavity for temperature measurement) is far away from the Fabry-Perot cavity used to measure the sensing information, which increases the thermal response time and temperature inertia, resulting in a deviation between the measured temperature and the temperature (hereinafter referred to as the actual temperature) of the environment corresponding to the sensing information (hereinafter referred to as the actual working environment). In this case, temperature decoupling based on the deviated temperature will result in inaccurate sensing information. In addition, this approach also increases the complexity of the sensor structure to a certain extent. Summary of the Invention

[0005] The present disclosure is proposed in view of the above situation, and its purpose is to provide a temperature decoupling method of an optical fiber Fabry-Perot sensor and an optical fiber Fabry-Perot sensor that can improve the accuracy of sensing information and simplify the sensor structure.

[0006] To this end, a first aspect of the present disclosure provides a temperature decoupling method for an optical fiber Fabry-Perot sensor, wherein the optical fiber Fabry-Perot sensor has a Fabry-Perot cavity and includes a first optical fiber and a sensitive unit, wherein the first optical fiber is configured to receive incident light generated by a broadband light source, the sensitive unit has a first reflecting surface and includes a decoupling material, the first reflecting surface reflects the incident light and is a reflecting surface for forming the Fabry-Perot cavity, the decoupling material is a semiconductor material whose bandgap width is temperature-dependent, and when the temperature changes, the absorption edge wavelength of the decoupling material shifts, and the temperature decoupling method includes: receiving incident light through the first optical fiber; using the Fabry-Perot cavity to convert the incident light received by the first optical fiber into a first optical signal carrying sensing information; allowing the incident light received by the first optical fiber to pass through the decoupling material to form a second optical signal carrying temperature information; identifying and measuring the absorption edge wavelength based on the second optical signal; and performing temperature decoupling on information related to the first optical signal based on measured temperature information determined by the measured absorption edge wavelength to obtain decoupled sensing information.

[0007] In the first aspect of the present disclosure, the decoupling material combined with the Fabry-Perot cavity and the sensitive unit helps to measure the sensing information and temperature information simultaneously through a beam of light, which can reduce the deviation between the measured temperature information and the actual temperature. In addition, the decoupling material is part of the sensitive unit, which can simplify the sensor structure and facilitate in-situ measurement. In addition, the decoupling material is part of the sensitive unit, and the distance between the decoupling material and the Fabry-Perot cavity is almost negligible, which can reduce the thermal response time and temperature inertia, thereby further reducing the deviation between the measured temperature information and the actual temperature. In addition, as the temperature rises, the band gap of the decoupling material decreases, and the suppression of light by the decoupling material becomes weaker and weaker, so that more wavelengths in the incident light are absorbed by the decoupling material, which can cause the absorption edge wavelength of the decoupling material to move and gradually increase.

[0008] In addition, in the temperature decoupling method according to the first aspect of the present disclosure, the fiber Fabry-Perot sensor optionally includes a second reflective surface that receives incident light emitted from the decoupling material and reflects it to form a second light signal. The second reflective surface is formed by coating the end surface of the decoupling material on the side where the incident light exits with a high-reflective film. In this case, the first and second light signals can be received on the same side, further simplifying the sensor structure. Furthermore, when receiving the first and second light signals on the same side, without adding additional components to isolate the two light signals, the second and first light signals are typically mixed during reception. However, a sensor designed in this manner according to the present disclosure can separate the first and second light signals even if they are mixed, allowing for identification of the information they carry. Furthermore, the second reflective surface is located on the exit end surface of the decoupling material, shortening the distance between the second and first reflective surfaces, thereby reducing the sensor's size. Furthermore, the high-reflective film reduces light loss, thereby improving the quality of the second light signal.

[0009] Additionally, in the temperature decoupling method according to the first aspect of the present disclosure, optionally, the incident light received by the first optical fiber passes through the two reflective surfaces of the Fabry-Perot cavity before entering the decoupling material, and at least one of the two reflective surfaces is provided with a high-transmittance film. In this case, the amount of incident light entering the decoupling material can be increased, allowing the decoupling material to more fully absorb light of the corresponding wavelength, thereby facilitating highlighting the absorption edge wavelength characteristics of the second optical signal.

[0010] In the temperature decoupling method according to the first aspect of the present disclosure, the decoupling material may optionally be a direct-transition material and a wide-bandgap semiconductor material. In this case, the light intensity of the second optical signal increases abruptly at a specific wavelength, and after the specific wavelength, there is a regular light intensity variation (e.g., an approximately linear relationship). This facilitates identification of the absorption edge wavelength based on this regularity, thereby reducing the difficulty of analyzing the second optical signal.

[0011] In addition, in the temperature decoupling method involved in the first aspect of the present disclosure, optionally, the sensitive unit is made of the decoupling material; or the sensitive unit includes a measurement layer and a temperature decoupling layer stacked in sequence, the measurement layer is made of a non-decoupling material, and the temperature decoupling layer is made of the decoupling material, and the measurement layer is closer to the first optical fiber than the temperature decoupling layer.

[0012] In addition, in the temperature decoupling method of the first aspect of the present disclosure, the spectrum of the first optical signal and the spectrum of the second optical signal can optionally be formed within the same spectrum. In this case, there is no need to transmit the first and second optical signals separately, making it suitable for most measurement scenarios. Furthermore, based on the structural design of the sensor, although the first and second optical signals are mixed together, they are offset in the wavelength dimension, making it easier to extract the corresponding signal from the mixed signal, thereby reducing the complexity of signal processing.

[0013] In addition, in the temperature decoupling method according to the first aspect of the present disclosure, optionally, the sensing information includes at least one of pressure, strain, acceleration, temperature, and vibration, thereby facilitating measurement of multiple parameters and temperature decoupling.

[0014] In the temperature decoupling method according to the first aspect of the present disclosure, the other reflective surface of the Fabry-Perot cavity can optionally be the end face of the first optical fiber or a flat plate disposed between the first reflective surface and the end face of the first optical fiber. Thus, having the other reflective surface be the end face of the first optical fiber can simplify the sensor structure. Furthermore, having the other reflective surface be a flat plate disposed between the first reflective surface and the end face of the first optical fiber facilitates controllable cavity length of the Fabry-Perot cavity.

[0015] In addition, in the temperature decoupling method according to the first aspect of the present disclosure, the flat plate may optionally include at least one of a smooth metal surface and a semiconductor wafer. In this case, the smoothness of the reflective surface can be improved, allowing more optical signals to be reflected.

[0016] A second aspect of the present disclosure provides an optical fiber Fabry-Perot sensor, which has a Fabry-Perot cavity and includes a first optical fiber and a sensitive unit; the first optical fiber is configured to receive incident light generated by a broadband light source; the sensitive unit has a first reflecting surface and includes a decoupling material, the first reflecting surface reflects the incident light and is a reflecting surface for forming the Fabry-Perot cavity, the decoupling material is a semiconductor material whose bandgap width is related to temperature, and when the temperature changes, the absorption edge wavelength of the decoupling material moves; the Fabry-Perot cavity converts the incident light received by the first optical fiber into a first optical signal carrying sensing information, and the decoupling material receives the incident light received by the first optical fiber to form a second optical signal carrying temperature information, so that the second optical signal is used to identify the measured absorption edge wavelength, and the measured temperature information determined by the measured absorption edge wavelength is used to temperature-decouple information related to the first optical signal to obtain decoupled sensing information.

[0017] According to the present disclosure, a temperature decoupling method of an optical fiber Fabry-Perot sensor and an optical fiber Fabry-Perot sensor are provided, which can improve the accuracy of sensing information and simplify the sensor structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present disclosure will now be explained in further detail, by way of example only, with reference to the accompanying drawings.

[0019] Figure 1 is a schematic diagram illustrating a temperature decoupling environment involved in examples of the present disclosure.

[0020] Figure 2A Schematic diagram showing a first embodiment of a sensor according to an example of the present disclosure.

[0021] Figure 2B Schematic diagram showing a second embodiment of a sensor according to an example of the present disclosure.

[0022] Figure 2C Schematic diagram showing a third embodiment of the sensor according to the present disclosure example.

[0023] Figure 3A is a schematic diagram showing a spectrum of a first optical signal involved in an example of the present disclosure.

[0024] Figure 3B FIG. 4 is a schematic diagram illustrating a spectrum of a second optical signal generated by a decoupling material at a constant temperature according to an example of the present disclosure.

[0025] Figure 3C Schematic diagram showing a spectrum of a first optical signal and a second optical signal mixed according to an example of the present disclosure.

[0026] Figure 3D FIG. 1 is a schematic diagram showing a spectrum generated by a fiber Fabry-Perot sensor according to a conventional solution.

[0027] Figure 4A Schematic diagram showing a fourth embodiment of the sensor according to the present disclosure example.

[0028] Figure 4B Schematic diagram showing a fifth embodiment of the sensor according to the present disclosure.

[0029] Figure 5 is an exemplary flow chart illustrating a temperature decoupling method according to an example of the present disclosure. DETAILED DESCRIPTION

[0030] Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present disclosure will be described in detail. In the following description, identical symbols are assigned to identical components, and repeated descriptions are omitted. In addition, the accompanying drawings are only schematic diagrams, and the ratio of the dimensions of the components to each other or the shapes of the components, etc. may be different from the actual ones. It should be noted that the terms "include" and "have" in the present disclosure and any variations thereof, such as a process, method, system, product or device that includes or has a series of steps or units, are not necessarily limited to those steps or units clearly listed, but may include or have other steps or units that are not clearly listed or that are inherent to these processes, methods, products or devices.

[0031] First, the relevant terms involved in this disclosure are introduced.

[0032] "Sensory information" can refer to any information that can be sensed by a Fabry-Perot cavity. In some examples, the sensory information can include at least one of pressure, strain, acceleration, temperature, and vibration. This facilitates measurement of multiple parameters and temperature decoupling.

[0033] The “sensing parameter” may be any parameter that can reflect the sensing information, and the sensing information can be calculated based on the sensing parameter. In some examples, the sensing parameter may include at least one of an optical path difference and a cavity length of a Fabry-Perot cavity.

[0034] "Absorption edge wavelength" may mean that when light of multiple wavelengths (such as light from a broadband light source) is irradiated on a material, the intensity of light emitted from the material increases sharply at a specific wavelength, and there is a regular change in light intensity after the specific wavelength (for example, an approximately linear relationship). This specific wavelength can be called the absorption edge wavelength of the material.

[0035] “Thermal response time” may refer to the time required for the fiber optic Fabry-Perot sensor to respond to temperature changes in the actual working environment and achieve a stable output.

[0036] “In-situ measurement” may refer to temperature measurement performed in the actual working environment.

[0037] As mentioned above, existing solutions increase thermal response time and temperature inertia, resulting in a deviation between the measured temperature information and the actual temperature, and to a certain extent, increasing the complexity of the sensor structure. Through research, the inventors have found that using the decoupling material described in the examples of this disclosure and integrating the decoupling material into the sensitive unit can reduce the deviation between the measured temperature information and the actual temperature, thereby improving the accuracy of the sensing information. In addition, it has the advantages of simplifying the sensor structure, facilitating in-situ measurement, and simplifying the spectrum.

[0038] Therefore, the inventors have provided some solutions, and the corresponding embodiments can at least solve some of the above problems. In addition, the solution disclosed herein can be applied to scenarios where sensor information is measured, and is particularly suitable for measurements in extreme temperature environments (i.e., environments where temperature has a significant impact on sensor information).

[0039] The temperature decoupling method (hereinafter referred to as the temperature decoupling method) for an optical fiber Fabry-Perot sensor (hereinafter referred to as the sensor) disclosed in the examples of the present disclosure can improve the accuracy of sensor information. The temperature decoupling method disclosed in the examples of the present disclosure can also be referred to as a decoupling method, a temperature compensation method, or a correction method.

[0040] Hereinafter, examples of the present disclosure will be described in detail with reference to the accompanying drawings. Figure 1 Schematic diagram showing a temperature decoupling environment involved in the example of the present disclosure. It should be noted that it does not limit the present disclosure.

[0041] refer to Figure 1 , a sensor 1 may be included in the temperature decoupling environment. The sensor 1 may be configured to collect a signal related to the sensing information and a signal related to the temperature information (hereinafter referred to as the target signal). In some examples, the sensor 1 may include a Fabry-Perot cavity D1 (described later), through which the incident light C1 may be converted into an optical signal carrying the sensing information. In some examples, the sensor 1 may also convert the incident light C1 into an optical signal carrying the temperature information (described later).

[0042] In some examples, a processing device 2 may be included in the temperature decoupling environment. The processing device 2 may be configured to process the target signal to obtain measured temperature information, decoupled sensing parameters, and / or decoupled sensing information.

[0043] In some examples, reference Figure 1 The temperature decoupling environment may include an optical device 3 , which may be configured to generate incident light C1 and transmit the incident light C1 to the sensor 1 . The optical device 3 may also be configured to receive a target signal and transmit the target signal to the processing device 2 .

[0044] In some examples, the optical device 3 may include a broadband light source 31, which may be configured to generate incident light C1. Furthermore, the light emitted by the broadband light source 31 may cover a wide wavelength range, thereby helping to increase the significance of the absorption edge wavelength of the decoupling material.

[0045] In some examples, the optical device 3 may include a coupler 32 , which may be configured to transmit the incident light C1 and / or the target signal. In some examples, the coupler 32 may transmit the incident light C1 and / or the target signal between the broadband light source 31 and the sensor 1 .

[0046] In some examples, the coupler 32 may be a 1×2 multimode coupler. Figure 1 The 1×2 multimode coupler 32 may include three ports: a first port P1, a second port P2, and a third port P3. Incident light C1 generated by the broadband light source 31 may enter through the first port P1, exit through the second port P2, and reach the sensor 1. The target signal generated by the conversion by the sensor 1 may enter through the second port P2 and exit through the third port P3. In some examples, the target signal exiting the third port P3 may be received by the detector 33.

[0047] In some examples, the optical device 3 may include a detector 33, which may be configured to receive a target signal. In some examples, the detector 33 may also be configured to generate a spectrum based on the received target signal. By processing the spectrum generated by the detector 33, measured temperature information, decoupled sensing parameters, and / or decoupled sensing information may be obtained.

[0048] Before describing the examples of the temperature decoupling method in detail, we first describe sensor 1. All examples of sensor 1 can be used with the temperature decoupling method described in this disclosure. To facilitate understanding, the schematic diagrams of sensor 1 involved in the examples of this disclosure schematically illustrate the arrangement of the decoupling material in a simplified manner, where the diagonal lines in the schematic diagram represent the decoupling material. In addition, to facilitate understanding of the sensor structure, some schematic diagrams of sensor 1 also illustrate the path of light propagation. In some schematic diagrams of sensor 1, the extension of the reflective surface is shown as a dotted line to facilitate depicting the path of light propagation.

[0049] Figure 2A Schematic diagram showing a first embodiment of the sensor 1 according to the present disclosure example. Figure 2B Schematic diagram showing a second embodiment of the sensor 1 according to the present disclosure example. Figure 2C Schematic diagram showing a third embodiment of the sensor 1 according to the present disclosure example.

[0050] In some examples, reference Figures 2A to 2C Sensor 1 may include a first optical fiber 11. First optical fiber 11 may be configured to receive incident light C1 generated by a broadband light source 31. In this case, the light emitted by broadband light source 31 covers a wide wavelength range, allowing absorption by the decoupling material to generate a second optical signal including an absorption edge wavelength. For example, first optical fiber 11 may receive incident light C1 generated by broadband light source 31 from optical device 3.

[0051] In some examples, reference Figures 2A to 2C, the sensor 1 may include a sensitive unit 12. The sensitive unit 12 may be configured to sense changes in sensing information. The sensitive unit 12 may include a Fabry-Perot cavity D1 or may cooperate with other reflective surfaces (such as the end face A1 of the first optical fiber 11) to form a Fabry-Perot cavity D1. The Fabry-Perot cavity D1 can convert the incident light C1 received by the first optical fiber 11 into a first optical signal carrying sensing information. Specifically, the light is reflected and superimposed on the two reflective surfaces of the Fabry-Perot cavity D1 to form an interference light signal. By analyzing the interference light signal, the distance between the two reflective surfaces, that is, the cavity length of the Fabry-Perot cavity D1, can be obtained. When the sensing information causes the cavity length to change, the interference light signal also changes accordingly (that is, the interference light signal carries the sensing information). In addition, the first optical signal may be an interference light signal.

[0052] In some examples, reference Figures 2A to 2C The sensing unit 12 may have a first reflective surface A2. The first reflective surface A2 may reflect the incident light C1 and is a reflective surface for forming the Fabry-Perot cavity D1. That is, the first reflective surface A2 may cooperate with other reflective surfaces to form the Fabry-Perot cavity D1.

[0053] In some examples, a boss may be provided on the first reflective surface A2. When the sensor 1 is used to sense information, the first reflective surface A2 is susceptible to deformation, causing the direction of some reflected light to change and become difficult to receive. The boss can improve the consistency of the direction of the reflected light, thereby improving the quality of the first optical signal.

[0054] In addition, the present disclosure does not specifically limit the arrangement of other reflective surfaces, and other reflective surfaces may be any surface that can form a Fabry-Perot cavity D1 with the first reflective surface A2.

[0055] In some examples, reference Figures 2A to 2C The other reflective surface can be the end surface A1 of the first optical fiber 11. This simplifies the sensor structure. Specifically, the incident light C1 can be reflected by the first reflective surface A2 and the end surface A1 of the first optical fiber 11, and the two reflected incident light C1 can be superimposed to form a first optical signal.

[0056] In some examples, the additional reflective surface can be a flat plate disposed between the first reflective surface A2 and the end face A1 of the first optical fiber. This facilitates controllable cavity length of the Fabry-Perot cavity D1. In some examples, the flat plate can comprise at least one of a smooth metal surface and a semiconductor wafer. In this case, the smoothness of the reflective surface can be improved, allowing more optical signals to be reflected.

[0057] In some examples, reference Figures 2A to 2C , the sensitive unit 12 may include a decoupling material. That is, at least a portion of the sensitive unit 12 may be made of the decoupling material. In other words, the decoupling material may be integrated on the sensitive unit 12.

[0058] In some examples, the decoupling material can be a semiconductor material. This facilitates changing the bandgap of the decoupling material with temperature. Furthermore, the bandgap width can reflect the minimum energy required for electrons in the material to transition from the valence band to the conduction band.

[0059] In addition, the decoupling material can be configured to convert the incident light C1 passing through to generate a second optical signal carrying temperature information. Specifically, the decoupling material can receive the incident light C1 to form a second optical signal carrying temperature information. That is, the decoupling material of the sensitive unit 12 can be used to convert the incident light C1 into a second optical signal carrying temperature information. In other words, the second optical signal can be an optical signal generated after the incident light C1 is partially absorbed by the decoupling material when passing through the decoupling material. In this case, combining the Fabry-Perot cavity D1 and the decoupling material of the sensitive unit 12 helps to simultaneously measure the sensing information and temperature information through a beam of light, which can reduce the deviation between the measured temperature information (hereinafter referred to as the measured temperature information) and the actual temperature. In addition, the decoupling material is part of the sensitive unit 12, which can simplify the sensor structure and facilitate in-situ measurement. In addition, the decoupling material is part of the sensitive unit 12, and the distance between the decoupling material and the Fabry-Perot cavity D1 is almost negligible, which can reduce the thermal response time and temperature inertia, thereby further reducing the deviation between the measured temperature information and the actual temperature.

[0060] In some examples, the incident light C1 received by the first optical fiber 11 may pass through the two reflection surfaces of the Fabry-Perot cavity D1 before being incident on the decoupling material. In this case, the optical path can be simplified, thereby further simplifying the sensor structure.

[0061] Figure 3A is a schematic diagram showing a spectrum of a first optical signal involved in an example of the present disclosure. Figure 3B FIG. 4 is a schematic diagram illustrating a spectrum of a second optical signal generated by a decoupling material at a constant temperature according to an example of the present disclosure. Figure 3C Schematic diagram showing a spectrum of a first optical signal and a second optical signal mixed according to an example of the present disclosure. Figure 3D FIG. 1 is a schematic diagram showing a spectrum generated by a fiber Fabry-Perot sensor according to a conventional solution.

[0062] In some examples, the decoupling material can be configured to absorb light of different wavelengths in the incident light C1 as the temperature changes. In some examples, the decoupling material can be configured so that the absorption edge wavelength gradually increases as the temperature increases (i.e., more and more wavelengths of light are absorbed). In this case, the absorption edge wavelength moves in the direction of increasing wavelength as the temperature increases (for example, it can be reflected as moving to the right on the spectrum graph), which makes it easy to stagger the first light signal and the second light signal in the wavelength dimension and keep their relative positions basically fixed, so that the spectrum can be simplified (for example, assuming that on the same spectrum, most of the effective first light signal spectrum is on the left and the second light signal spectrum is on the right). When the first light signal and the second light signal are mixed, it is easy to separate the two to identify the information they carry, thereby reducing the complexity of signal processing. In other words, when the decoupling material involved in the example of the present disclosure is applied to the sensor 1, it can form a first light signal and a second light signal that are easy to analyze.

[0063] As an example of a spectrum, refer to Figure 3A 、 Figure 3B 、 Figure 3C and Figure 3D ,in Figure 3D This is the spectrum of the fiber optic Fabry-Perot sensor with multiple Fabry-Perot cavities in the existing solution. Its sensor structure includes a sapphire diaphragm, a vacuum cavity and a base cavity. The vacuum cavity and the base cavity measure external pressure and temperature respectively. The vacuum cavity is limited to make it difficult to transmit external pressure to the surface of the base cavity. The base cavity measures temperature based on the optical path difference between the base cavity and the sapphire diaphragm affected by thermal expansion.

[0064] from Figure 3A It can be seen that the spectrum of the first optical signal may be a sine wave. As the sensing information changes, the width of the sine wave may change or the sine wave may shift.

[0065] from Figure 3B As can be seen in the second optical signal's spectrum, the light intensity increases sharply near a wavelength of 850 nanometers, exhibiting a nearly linear relationship. This wavelength corresponds to the absorption edge wavelength of the decoupling material. As the temperature increases, the curve corresponding to the second spectrum shifts to the right (i.e., the absorption edge wavelength shifts to the right).

[0066] from Figure 3C It can be seen that in the mixed spectrum, the spectrum of the first light signal is mostly on the left, and the spectrum of the second light signal is on the right. Therefore, by identifying the shift of the absorption edge wavelength, the temperature information can be determined. Figure 3D In existing schemes, the spectra of pressure and temperature are intertwined, and generally need to be separated by converting them into frequency domain signals through Fourier transform. In addition, measuring pressure and temperature requires calculating the cavity length, which consumes a lot of hardware resources.

[0067] In some examples, the bandgap of the decoupling material may be temperature-dependent (ie, the bandgap of the decoupling material may have a temperature coefficient), and the absorption edge wavelength of the decoupling material may shift when the temperature changes.

[0068] In some examples, the bandgap of the decoupling material can be negatively correlated with temperature (i.e., the bandgap of the decoupling material has a negative temperature coefficient). In this case, as the temperature increases, the bandgap of the decoupling material decreases, and the decoupling material's suppression of light becomes increasingly weaker, so that more wavelengths of the incident light C1 are absorbed by the decoupling material, causing the absorption edge wavelength of the decoupling material to shift and gradually increase.

[0069] In some examples, the bandgap of the decoupling material may also be positively correlated with temperature (i.e., the bandgap of the decoupling material has a positive temperature coefficient). In this case, as the temperature increases, the absorption edge wavelength of the decoupling material may shift and gradually decrease.

[0070] In some examples, a high-transmittance film can be set on the propagation path of the incident light C1. The high-transmittance film can be configured to increase the transmittance. In this case, the amount of incident light C1 entering the decoupling material can be increased so that the decoupling material can more fully absorb the light of the corresponding wavelength, which is conducive to highlighting the characteristics of the absorption edge wavelength in the second optical signal. In some examples, for the case where the incident light C1 can pass through the two reflective surfaces of the Fabry-Perot cavity D1 and then enter the decoupling material, a high-transmittance film can be set on at least one of the two reflective surfaces. For example, referring to Figures 2A to 2C A high-transmittance film may be provided on the first reflective surface A2 and / or the end surface A1 of the first optical fiber 11. That is, a high-transmittance film may be provided on the surface where the incident light C1 enters the sensitive unit 12 and / or on the surface where the first optical fiber 11 emits the incident light C1.

[0071] In some examples, the decoupling material can be a transition-type material. When electrons in a material are excited by photons, they absorb light, causing a transition. In this case, compared to materials that measure temperature based on the principle of thermal expansion, the signal strength is higher, reducing the impact of interfering signals on the second optical signal.

[0072] In some examples, the decoupling material may be a direct transition material. If the transition caused by the material is a direct transition, the material may be considered a direct transition material. In this case, the light intensity in the second optical signal increases sharply at a specific wavelength, and there is a regular light intensity change after the specific wavelength (for example, an approximately linear relationship), which helps to identify the absorption edge wavelength according to the above-mentioned rules to reduce the difficulty of analyzing the second optical signal. In other examples, the decoupling material may also be an indirect transition material. In some examples, the decoupling material may be a direct transition material and a wide bandgap semiconductor material.

[0073] In some examples, the absorption edge wavelength can shift at a rate greater than 2 nanometers per degree Celsius. This can enhance the significance of the shift in the decoupling material's absorption edge wavelength, making it more sensitive to temperature changes and helping to more accurately detect even small temperature changes, thereby improving the accuracy of temperature information. Furthermore, the ability to distinguish between the first and second optical signals can be improved, thereby reducing the complexity of signal processing.

[0074] In some examples, the decoupling material may have properties such as high temperature resistance and good stability, thereby facilitating the application of the sensor 1 in extreme temperature environments.

[0075] Furthermore, because the decoupling material absorbs the incident light C1, the intensity of the second optical signal differs significantly from the intensity of the incident light C1 reflected by the reflective surface of the Fabry-Perot cavity D1, making it difficult to form an interference optical signal (even though the difficulty of forming a new Fabry-Perot cavity increases). In other words, the second optical signal can be a non-interference optical signal. In this case, when the first and second optical signals are mixed, the mutual influence between the second optical signal and the first optical signal can be essentially ignored, thereby improving the distinction between the first and second optical signals.

[0076] In some examples, the decoupling material may be gallium arsenide, cadmium telluride, or zinc oxide, etc. Therefore, compared with other materials, such materials have better temperature stability and their second optical signal has a more sensitive response to temperature.

[0077] In some examples, the decoupling material can be integrated onto the sensitive unit 12 using an intrinsic method or a coating method. In some examples, if the substrate material used to prepare the sensitive unit 12 is a decoupling material, the intrinsic method can be used to process the substrate material to form the sensitive unit 12. In some examples, if the substrate material is a non-decoupling material, the decoupling material can be coated onto the substrate material using a coating method. Both of the above solutions can make the distance between the decoupling material and the Fabry-Perot cavity D1 almost negligible, thereby reducing the thermal response time and temperature inertia.

[0078] In some examples, reference Figure 2A The sensitive unit 12 can be made of a decoupling material. This can further simplify the sensor structure. For example, a substrate made of a decoupling material can be processed (e.g., etched) to form the sensitive unit 12. Hereinafter, the sensitive unit 12 made of a decoupling material is referred to as an intrinsic sensitive unit.

[0079] In some examples, a portion of the sensitive unit 12 may be made of a decoupling material. Figure 2BThe sensitive unit 12 may include a measurement layer 121 and a temperature decoupling layer 122 stacked in sequence. The measurement layer 121 may be made of a non-decoupling material, and the temperature decoupling layer 122 may be made of a decoupling material. In this case, the flexibility of the structural design of the sensitive unit 12 can be increased, making it easier to customize the structure of the sensitive unit 12 to meet specific application requirements (for example, in some working environments, the shape of the sensitive unit 12 needs to be adjusted according to the sensing information). Hereinafter, the sensitive unit 12 partially made of decoupling material is referred to as a non-intrinsic sensitive unit.

[0080] In some examples, the measurement layer 121 may be closer to the first optical fiber 11 than the temperature decoupling layer 122. In some examples, when the measurement layer 121 is closer to the first optical fiber 11 than the temperature decoupling layer 122, the first reflection surface A2 may be the light reflection surface of the measurement layer 121 (refer to Figure 2B ), incident light C1 is converted into a first optical signal by the Fabry-Perot cavity D1 formed by the light-reflecting surface of the measurement layer 121 and other reflective surfaces. Incident light C1 also passes through the temperature decoupling layer 122 to form a second optical signal. In some examples, the temperature decoupling layer 122 can be formed by coating the measurement layer 121. For example, the coating can be performed by sputtering or chemical reaction.

[0081] In some examples, the thickness of temperature decoupling layer 122 can be precise down to the nanometer scale. In this case, temperature decoupling layer 122 is closer to Fabry-Perot cavity D1 than to some temperature sensors that are located at a micrometer distance from Fabry-Perot cavity D1, further reducing thermal response time and temperature inertia. For example, the thickness of temperature decoupling layer 122 can be 200 nm, 300 nm, 400 nm, or 500 nm.

[0082] Furthermore, the non-decoupling material can be any material that facilitates measuring sensor information. In some examples, the non-decoupling material can include at least one of silicon, sapphire, quartz, magnesium oxide, and silicon carbide. This facilitates measuring sensor information in extreme temperature environments (e.g., high temperature environments).

[0083] In some examples, a transition layer may be provided between measurement layer 121 and temperature decoupling layer 122. The material of the transition layer may be physically or chemically compatible with the materials of measurement layer 121 and temperature decoupling layer 122. In this case, the interfacial tension at the connection can be reduced, thereby lowering the risk of temperature decoupling layer 122 falling off, making sensor 1 more suitable for use in extreme temperature environments.

[0084] In some examples, reference Figures 2A to 2C, the sensor 1 may include a second reflective surface A3. The second reflective surface A3 may receive the incident light C1 emitted from the decoupling material of the sensitive unit 12 and reflect it to form a second optical signal. That is, the second optical signal may be an optical signal that is reflected after the incident light C1 passes through the decoupling material. In this case, it is convenient to receive the first optical signal and the second optical signal on the same side, which can further simplify the sensor structure. In addition, when receiving the first optical signal and the second optical signal on the same side, if no additional elements are added to isolate the two optical signals, the second optical signal and the first optical signal are generally mixed together when they are received (see Figure 3C As described above, the sensor 1 designed based on the present disclosure can easily separate the first light signal and the second light signal to identify the information they carry, even if the first light signal and the second light signal are mixed.

[0085] In some examples, the second reflective surface A3 can mix the first light signal and the second light signal. That is, the first light signal and the second light signal formed by the second reflective surface A3 can be combined into a single light signal. Thus, the sensor 1 can convert the incident light C1 into a single light signal that carries both sensing information and temperature information. In some examples, the combined single light signal can be received by the detector 33.

[0086] In addition, the second reflective surface A3 can be disposed at any position capable of reflecting the incident light C1 emitted from the decoupling material. In some examples, the second reflective surface A3 can be disposed at a position close to the decoupling material.

[0087] In some examples, reference Figures 2A to 2C , the second reflection surface A3 can be located on the end surface of the decoupling material on the side where the incident light C1 exits (hereinafter referred to as the exit end surface). In this case, the second reflection surface A3 is located on the exit end surface of the decoupling material, which can shorten the distance between the second reflection surface A3 and the first reflection surface A2, thereby reducing the volume of the sensor 1. In some examples, the second reflection surface A3 can be formed by a reflection film covering the exit end surface. In some examples, the reflection film can be a high-reflection film. That is, the second reflection surface A3 can be formed by covering the exit end surface of the decoupling material with a high-reflection film. The high-reflection film can be configured to increase the reflectivity. In this case, the high-reflection film can reduce the loss of light, thereby improving the quality of the second optical signal.

[0088] In some examples, reference Figure 2C , the sensor 1 may include a second optical fiber 13, and the second optical fiber 13 may be configured to support the sensitive unit 12. Thus, it is convenient to construct the sensor 1 using the optical fiber itself. For example, an optical fiber may be processed to form the sensor 1. In addition, Figure 2C The sensor 1 shown may also be referred to as an intrinsic fiber Fabry-Perot sensor.

[0089] In some examples, continue to refer to Figure 2C The sensor 1 may further include a sleeve 14, which may be configured to secure the first optical fiber 11 and the second optical fiber 13. In some examples, one end of the sleeve 14 may secure the first optical fiber 11, and the other end may secure the second optical fiber 13. A sensitive unit 12 may be formed on the second optical fiber 13, and a first reflective surface A2 of the sensitive unit 12 and an end surface A1 of the first optical fiber 11 may form a Fabry-Perot cavity D1.

[0090] In some examples, for the sensor 1 using the second optical fiber 13 to support the sensitive unit 12, the sensitive unit 12 can be made of a decoupling material (see Figure 2C In some examples, a film made of a decoupling material may be plated on the end face of the second optical fiber 13 to form the sensitive unit 12 .

[0091] Figure 4A Schematic diagram showing a fourth embodiment of the sensor 1 according to the present disclosure example. Figure 4B Schematic diagram showing a fifth embodiment of the sensor 1 according to the present disclosure. Figure 4A and Figure 4B , a sensor 1 with a cantilever beam structure is shown, wherein the sensitive units 12 thereof are an intrinsic sensitive unit and an extrinsic sensitive unit.

[0092] In some examples, the structure of sensor 1 can be adjusted based on the type of sensing information. That is, sensors 1 with different structures can be designed for different sensing information. In some examples, the structure of sensor 1 can include at least one of a diaphragm structure, a cantilever beam structure, and a sleeve structure.

[0093] In some examples, reference Figure 2A and Figure 2B In a diaphragm-type structure, a diaphragm (eg, a silicon wafer) serves as a sensitive unit 12, and one side of the diaphragm and the other reflective surface form a Fabry-Perot cavity D1. In some examples, the diaphragm-type structure can be suitable for measuring pressure.

[0094] In some examples, reference Figure 2C In the sleeve-type structure, the sensor 1 may further include a second optical fiber 13 and a sleeve 14. In some examples, the sleeve-type structure may be suitable for measuring strain, temperature, or pressure.

[0095] In some examples, reference Figure 4A and Figure 4B In a cantilever beam structure, the cantilever beam can serve as the sensitive element 12, and the free end of the cantilever beam can form a Fabry-Perot cavity D1 with other reflective surfaces. In some examples, the cantilever beam structure can be suitable for measuring vibration. When vibration acts on the cantilever beam, it causes the free end to move, thereby changing the length of the Fabry-Perot cavity D1.

[0096] In some examples, the processing method for forming the Fabry-Perot cavity D1 can include at least one of MEMS (micro-electromechanical system) processing, femtosecond laser processing, CO2 (carbon dioxide) laser processing, and mechanical processing. In some examples, for the intrinsic sensitive unit, preferably, the processing method for forming the Fabry-Perot cavity D1 can be mechanical processing. The decoupling material is generally hard. In this case, mechanical processing can reduce the risk of fracture of the decoupling material. In some examples, the end face formed by the processing can serve as the reflection surface of the Fabry-Perot cavity D1.

[0097] In some examples, the intrinsic fiber Fabry-Perot sensor can be a sensor 1 in which a Fabry-Perot cavity D1 is processed in the fiber itself. A decoupling material is provided on a portion of the fiber to measure temperature information (refer to Figure 2C ).

[0098] In some examples, the extrinsic fiber Fabry-Perot sensor can be a sensor 1 in which the reflective surface of the material different from the fiber and the fiber end face form a Fabry-Perot cavity D1. In some examples, the material different from the fiber can be a decoupling material, and the decoupling material is used to measure temperature information (refer to Figure 2A In some examples, the material different from the optical fiber can be a non-decoupling material, and a decoupling material is provided on the non-decoupling material to measure temperature information (refer to Figure 2B ).

[0099] Figure 5 It is an exemplary flow chart showing the temperature decoupling method involved in the example of the present disclosure. It should be noted that, unless there is a contradiction, the above description of the sensor 1 is also applicable to the temperature decoupling method.

[0100] In some examples, reference Figure 5The temperature decoupling method may include receiving incident light C1 through a first optical fiber 11 (step S101), converting the incident light C1 received by the first optical fiber 11 into a first optical signal carrying sensing information using a Fabry-Perot cavity D1 (step S102), passing the incident light C1 received by the first optical fiber 11 through a decoupling material of a sensitive unit 12 to form a second optical signal carrying temperature information (step S103), and performing temperature decoupling on information associated with the first optical signal based on the measured temperature information determined by the second optical signal to obtain decoupled sensing information (step S104). In this case, the combination of the Fabry-Perot cavity D1 and the decoupling material of the sensitive unit 12 facilitates simultaneous measurement of sensing information and temperature information using a single beam of light, thereby reducing the deviation between the measured temperature information (hereinafter referred to as the measured temperature information) and the actual temperature. In addition, the decoupling material is part of the sensitive unit 12, which can simplify the sensor structure and facilitate in-situ measurement. In addition, the decoupling material is part of the sensitive unit 12, and the distance between the decoupling material and the Fabry-Perot cavity D1 is almost negligible, which can reduce the thermal response time and temperature inertia, thereby further reducing the deviation between the measured temperature information and the actual temperature.

[0101] In some examples, reference Figure 5 In step S101, the incident light C1 may include light of multiple wavelengths. In some examples, the wavelength range of the multiple wavelengths may be 300 nm to 1100 nm. In some examples, the wavelength range of the multiple wavelengths may be 300 nm to 2000 nm.

[0102] In some examples, the incident light C1 may be generated by a broadband light source 31. In this case, the light emitted by the broadband light source 31 covers a wide wavelength range, so that the decoupling material can generate a second optical signal including an absorption edge wavelength after absorption.

[0103] In some examples, reference Figure 5 In step S102, one reflective surface of the Fabry-Perot cavity D1 can serve as the first reflective surface A2 of the sensing unit 12. Incident light C1 is reflected by the two reflective surfaces of the Fabry-Perot cavity D1 to form an interference light signal, which can serve as the first light signal. For details, see the description of the Fabry-Perot cavity D1 in sensor 1.

[0104] In some examples, reference Figure 5 In step S103, the decoupling material absorbs light within a certain wavelength range, forming an absorption edge wavelength in the second optical signal. The absorption wavelength range varies with temperature, and temperature information can be obtained by identifying the absorption edge wavelength. For details, see the description of the decoupling material in sensor 1.

[0105] In some examples, the spectrum of the first optical signal and the spectrum of the second optical signal can be formed in the same spectrum (see Figure 3C In this case, there is no need to transmit the first optical signal and the second optical signal separately, which is applicable to most measurement scenarios. In addition, based on the structural design of the sensor 1, although the first optical signal and the second optical signal are mixed together, they are staggered in the wavelength dimension, making it easy to intercept the corresponding signal from the mixed signal, which can reduce the complexity of signal processing. For example, the first optical signal and the second optical signal can be mixed and received by the same receiving device (such as the detector 33 of the optical device 3), thereby forming the same spectrum.

[0106] In some examples, the incident light C1 acting on the Fabry-Perot cavity D1 and the decoupling material can be the same beam of light, thereby improving the temporal resolution.

[0107] In some examples, reference Figure 5 In step S104, temperature decoupling can refer to eliminating or reducing the influence of temperature on the sensor information, which is included in the sensor information because the Fabry-Perot cavity D1 is sensitive to both temperature and sensor information, thereby obtaining more accurate sensor information. In other words, any operation that eliminates or reduces the influence of temperature on sensor information can be referred to as temperature decoupling.

[0108] Therefore, based on this basic concept, adjusting information related to the first optical signal based on measured temperature information (i.e., temperature information measured based on the second optical signal) can be considered temperature decoupling. Furthermore, the information related to the first optical signal can be any information that can be used to calculate sensory information. In other words, the information related to the first optical signal can be information that can be converted into sensory information.

[0109] In some examples, the information related to the first optical signal may not be limited to the first optical signal, the sensor parameter related to the sensor information parsed from the first optical signal, the sensor information itself, or the relationship between the sensor information and the sensor parameter. Taking pressure as an example, the information related to the first optical signal may not be limited to the first optical signal, the cavity length or optical path difference parsed from the first optical signal, the pressure value, or the relationship between pressure and the cavity length or optical path difference. For this purpose, the present disclosure also provides some examples, which should be noted that they do not limit the present disclosure. In addition, the decoupled sensor information can be sensor information after temperature decoupling based on the measured temperature information.

[0110] In some examples, a relationship between sensor information and sensor parameters at the measured temperature information can be selected based on the measured temperature information, and initial sensor parameters determined from the first optical signal are substituted into the relationship selected based on the measured temperature information to obtain decoupled sensor information. In some examples, the relationship between sensor information and sensor parameters at different temperatures can be determined through calibration. Alternatively, the initial sensor parameters can be sensor parameters directly obtained from the first optical signal.

[0111] In some examples, an offset of the sensory information itself, the sensory parameter, or the first light signal can be determined based on the measured temperature information. The sensory information itself, the sensory parameter, or the first light signal can then be adjusted based on the offset to bring the information closer to the actual value. In other words, any deviation from the actual value of the information due to temperature influence can be compensated.

[0112] Taking the sensing parameters as an example, the initial sensing parameters can be corrected based on the offset of the sensing parameters determined by measuring temperature information to obtain decoupled sensing parameters, and then decoupled sensing information can be obtained based on the decoupled sensing parameters. This makes it easier to correct the impact of temperature on the sensing information.

[0113] For the offset of the sensing parameter (e.g., the offset of the cavity length), the relationship between the sensing parameter and temperature can be determined when the Fabry-Perot cavity D1 is not affected by the sensing information. In some examples, the measured temperature information can be substituted into the relationship between the sensing parameter and temperature to obtain the offset. That is, the change in the sensing parameter when only the temperature effect is considered from the reference temperature to the measured temperature information can be determined from the relationship. In some examples, the decoupled sensing parameter can be substituted into the relationship between the sensing information and the sensing parameter determined at the reference temperature to obtain the decoupled sensing information.

[0114] In addition, the reference temperature may be a temperature at which the relationship between the sensor information and the sensor parameter is known. For example, the relationship between the sensor information and the sensor parameter may be determined by calibration at a specific temperature, and the specific temperature may be used as the reference temperature.

[0115] As described above, the measured temperature information can be determined from the second optical signal. In some examples, the measured absorption edge wavelength can be identified based on the second optical signal, and the measured temperature information can be determined based on the measured absorption edge wavelength. In addition, the measured absorption edge wavelength can be the absorption edge wavelength identified based on the second optical signal. As described above, the absorption edge wavelength of the decoupling material can shift with temperature. In some examples, the measured absorption edge wavelength can be substituted into the relationship between the absorption edge wavelength and temperature information to obtain the measured temperature information. In some examples, the relationship between the absorption edge wavelength and temperature information can be determined through calibration.

[0116] In some examples, the absorption edge wavelength can be identified and measured from the second optical signal based on the characteristics of the absorption edge wavelength. The present disclosure does not limit the method for identifying the absorption edge wavelength based on the second optical signal, and those skilled in the art can choose the method for identifying the absorption edge wavelength based on the characteristics of the absorption edge wavelength. For example, for the second optical signal represented by a spectrum, a spectral segment with a preset slope can be identified, the centroid of the area under the curve of the spectral segment can be calculated, and the wavelength corresponding to the centroid is used as the absorption edge wavelength. In addition, the preset slope can be determined based on the characteristics of the absorption edge wavelength. In some examples, the preset slope can be 0.91 to 0.93.

[0117] In some examples, the first and second optical signals can be represented in the form of spectra, and temperature decoupling can be performed based on a first spectrum representing the first optical signal and a second spectrum representing the second optical signal. That is, information associated with the first spectrum can be temperature-decoupled based on the measured temperature information determined by the second spectrum to obtain decoupled sensing information. In this case, the spectrum shows the intensity distribution of light at different wavelengths. As described above, the absorption edge wavelength shifts with temperature, and the spectrum helps highlight the characteristics of the absorption edge wavelength.

[0118] As described above, the spectrum of the first optical signal and the spectrum of the second optical signal can be formed in the same spectrum. In some examples, a first spectrum representing the first optical signal and a second spectrum representing the second optical signal can be intercepted from the spectrum. As described above, the first optical signal and the second optical signal can be offset in the wavelength dimension. This facilitates separation of the first and second optical signals by using the spectrum.

[0119] In some examples, the wavelength ranges corresponding to the first and second optical signals can be determined based on the temperature range of the operating environment (i.e., the temperature measurement range), and the first and second spectra can be extracted from the same spectrum based on the corresponding wavelength ranges. This facilitates separation of the first and second spectra.

[0120] For example, reference Figure 3C , the spectral segment from 600nm to 800nm or from 650nm to 750nm can be intercepted as the first spectrum, and the spectral segment from 800nm to 900nm or from 850nm to 950nm can be intercepted as the second spectrum.

[0121] The sensor 1 disclosed in the examples of this disclosure can be suitable for measuring sensor information in extreme temperature environments. In some examples, the operating environment of the sensor 1 can have a temperature range greater than 150 degrees Celsius and / or less than 0 degrees Celsius. This allows the sensor 1 to fully utilize its temperature decoupling effect. It should be noted that this does not mean that it cannot be used in operating environments with other temperatures.

[0122] In some examples, the sensor 1 can be fabricated at micro-nano scales. In this case, the volume of the sensor 1 can be reduced, which helps to improve the spatial resolution of the sensor 1.

[0123] The sensor 1 of the disclosed example utilizes a decoupling material and integrates it into the sensitive unit 12, thereby improving the spatiotemporal resolution of the working area within the working environment and enabling in-situ measurement. Furthermore, the sensor 1 simplifies the spectrum, thereby reducing the complexity of signal processing.

[0124] In addition, spatiotemporal resolution can be divided into spatial resolution and temporal resolution. Spatial resolution can refer to the number of sensors 1 that can be accommodated in a unit space. The sensor 1 involved in the example of the present disclosure can simplify the sensor structure, thereby improving spatial resolution.

[0125] In addition, time resolution can refer to the time difference between the light acting on the Fabry-Perot cavity D1 and the temperature measuring material. Generally speaking, a measuring device corresponding to a separate temperature sensor requires two beams of light to act on the temperature sensor and the Fabry-Perot cavity D1 respectively to reduce mutual influence. Such a solution increases the risk of time difference (for example, there may be a time interval of several microseconds or even milliseconds between the two beams of light). The sensor 1 involved in the example of the present disclosure can support a single beam of light to measure temperature information and sensor information simultaneously.

[0126] Examples of the present disclosure also disclose a computer-readable storage medium that can store at least one instruction that, when executed by a processor, implements one or more steps of the temperature decoupling method described above. The computer-readable storage medium can include, but is not limited to, any type of disk, including a floppy disk, an optical disk, a DVD, a CD-ROM, a microdrive, a magneto-optical disk, a ROM, a RAM, an EPROM, an EEPROM, a DRAM, a VRAM, a flash memory device, a magnetic or optical card, a nanosystem (including a molecular memory IC), or any type of medium or device suitable for storing instructions and / or data.

[0127] Although the present disclosure has been described in detail above with reference to the accompanying drawings and examples, it will be understood that the above description does not limit the present disclosure in any form. Those skilled in the art may modify and change the present disclosure as needed without departing from the spirit and scope of the present disclosure, and such modifications and variations all fall within the scope of the present disclosure.

Claims

1. A temperature decoupling method for an optical fiber Fabry-Perot sensor, characterized in that: The fiber Fabry-Perot sensor has a Fabry-Perot cavity and includes a first optical fiber and a sensitive unit. The first optical fiber is configured to receive incident light generated by a broadband light source. The sensitive unit has a first reflecting surface and includes a decoupling material. The first reflecting surface reflects the incident light and is a reflecting surface for forming the Fabry-Perot cavity. The decoupling material is a semiconductor material whose bandgap width is temperature-dependent, and when the temperature changes, the absorption edge wavelength of the decoupling material shifts. The temperature decoupling method includes: receiving incident light through the first optical fiber; using the Fabry-Perot cavity to convert the incident light received by the first optical fiber into a first optical signal carrying sensing information; allowing the incident light received by the first optical fiber to pass through the decoupling material to form a second optical signal carrying temperature information; identifying and measuring the absorption edge wavelength based on the second optical signal; and performing temperature decoupling on information related to the first optical signal based on measured temperature information determined by the measured absorption edge wavelength to obtain decoupled sensing information.

2. The temperature decoupling method according to claim 1, characterized in that: The optical fiber Fabry-Perot sensor includes a second reflective surface, which receives the incident light emitted from the decoupling material and reflects it to form the second optical signal. The end surface of the decoupling material on the side where the incident light is emitted is covered with a high-reflective film to form the second reflective surface.

3. The temperature decoupling method according to claim 1, characterized in that: The incident light received by the first optical fiber passes through the two reflection surfaces of the Fabry-Perot cavity and then enters the decoupling material. At least one of the two reflection surfaces is provided with a high-transmittance film.

4. The temperature decoupling method according to claim 1, characterized in that: The decoupling material is a direct transition material and a wide bandgap semiconductor material.

5. The temperature decoupling method according to claim 1, characterized in that: The sensitive unit is made of the decoupling material; or the sensitive unit includes a measurement layer and a temperature decoupling layer stacked in sequence, the measurement layer is made of a non-decoupling material, the temperature decoupling layer is made of the decoupling material, and the measurement layer is closer to the first optical fiber than the temperature decoupling layer.

6. The temperature decoupling method according to claim 1, characterized in that: The spectrum of the first optical signal and the spectrum of the second optical signal are formed in the same spectrum.

7. The temperature decoupling method according to claim 1, characterized in that: The sensing information includes at least one of pressure, strain, acceleration, temperature and vibration.

8. The temperature decoupling method according to claim 1, characterized in that: The other reflection surface of the Fabry-Perot cavity is the end face of the first optical fiber or a flat plate arranged between the first reflection surface and the end face of the first optical fiber.

9. The temperature decoupling method according to claim 8, characterized in that: The flat plate includes at least one of a smooth metal surface and a semiconductor wafer.

10. An optical fiber Fabry-Perot sensor, characterized in that: The fiber Fabry-Perot sensor has a Fabry-Perot cavity and includes a first optical fiber and a sensitive unit; the first optical fiber is configured to receive incident light generated by a broadband light source; the sensitive unit has a first reflecting surface and includes a decoupling material, the first reflecting surface reflects the incident light and is a reflecting surface used to form the Fabry-Perot cavity, the decoupling material is a semiconductor material whose bandgap width is related to temperature, and when the temperature changes, the absorption edge wavelength of the decoupling material moves; the Fabry-Perot cavity converts the incident light received by the first optical fiber into a first optical signal carrying sensing information, and the decoupling material receives the incident light received by the first optical fiber to form a second optical signal carrying temperature information, so the second optical signal is used to identify the measured absorption edge wavelength, and the measured temperature information determined by the measured absorption edge wavelength is used to temperature decouple information related to the first optical signal to obtain decoupled sensing information.

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