Method, device and equipment for continuously shooting images under electron microscope

Abstract

The embodiment of the invention discloses a method, a device and equipment for continuously shooting images under an electron microscope. The method comprises the following steps: acquiring a plurality of shooting positions in a target sample placed on an objective table of an electron microscope; acquiring a first working distance corresponding to a vertex shooting position in the plurality of shooting positions, wherein the first working distance is a working distance of the electron microscope in a focusing state at the vertex shooting position; determining a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position; and controlling the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position to obtain a target sample image shot at each shooting position. Through the technical scheme of the embodiment of the invention, the dynamic determination of the working distance can be realized, and continuous shooting is carried out according to the proper working distance at each shooting position, so that the image shooting quality is improved.

Description

Technical Field

[0001] The embodiments of the present invention relate to computer technology, and in particular to a method, device and apparatus for continuously capturing images under an electron microscope. Background Art

[0002] An electron microscope is a device that uses an electron beam as a light source and images a sample through an electromagnetic lens system. Because samples are large, it is necessary to use an electron microscope to continuously photograph the sample multiple times. Currently, electron microscopes typically photograph a sample multiple times at a fixed working distance, meaning that each photographic position within the sample has the same working distance. However, in implementing the present invention, the inventors discovered that the prior art has at least the following problems:

[0003] Due to the many uncertainties in the sample preparation process and the differences in the placement angle of the sample on the electron microscope stage, the sample may not have a sufficiently flat surface, making it impossible for the sample to maintain the same horizontal angle with the lens. As a result, the image quality of continuous shots taken at a fixed working distance is poor, which reduces the image capture quality. Summary of the Invention

[0004] Embodiments of the present invention provide a method, apparatus, and device for continuously capturing images under an electron microscope, so as to dynamically determine the working distance and perform continuous capturing at an appropriate working distance at each capturing position, thereby improving image capturing quality.

[0005] In a first aspect, an embodiment of the present invention provides a method for continuously capturing images under an electron microscope, comprising:

[0006] acquiring a plurality of photographic positions in a target sample placed on a stage of an electron microscope;

[0007] Acquire a first working distance corresponding to a vertex shooting position among the multiple shooting positions, where the first working distance refers to a working distance when the electron microscope is in a focused state at the vertex shooting position;

[0008] Determining a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position;

[0009] The electron microscope is controlled to continuously shoot the target sample according to the second working distance corresponding to each shooting position, so as to obtain an image of the target sample shot at each shooting position.

[0010] In a second aspect, an embodiment of the present invention further provides a device for continuously capturing images under an electron microscope, comprising:

[0011] A shooting position acquisition module is used to acquire multiple shooting positions in a target sample placed on the stage of the electron microscope;

[0012] A first working distance acquisition module is configured to acquire a first working distance corresponding to a vertex shooting position among the plurality of shooting positions, wherein the first working distance refers to a working distance when the electron microscope is in a focused state at the vertex shooting position;

[0013] a second working distance determining module, configured to determine a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position;

[0014] The continuous shooting control module is used to control the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and obtain the target sample image shot at each shooting position.

[0015] In a third aspect, an embodiment of the present invention further provides an electronic device, comprising:

[0016] one or more processors;

[0017] a memory for storing one or more programs;

[0018] When the one or more programs are executed by the one or more processors, the one or more processors implement the method for continuously capturing images under an electron microscope as provided in any embodiment of the present invention.

[0019] In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the method for continuously capturing images under an electron microscope as provided in any embodiment of the present invention.

[0020] In a fifth aspect, an embodiment of the present invention further provides a computer program product, comprising a computer program, which, when executed by a processor, implements the method for continuously capturing images under an electron microscope as provided in any embodiment of the present invention.

[0021] One embodiment of the above invention has the following advantages or beneficial effects:

[0022] By acquiring multiple shooting positions within a target sample placed on the stage of an electron microscope and obtaining a first working distance corresponding to a vertex shooting position among the multiple shooting positions, the first working distance refers to the working distance of the electron microscope when it is in focus at the vertex shooting position. In other words, the first working distance is an appropriate working distance for clearly capturing an image at the vertex shooting position. Based on the first working distance corresponding to the vertex shooting position, an appropriate second working distance can be dynamically determined for each shooting position within the target sample. The electron microscope is controlled to continuously shoot the target sample according to the second working distance corresponding to each shooting position, thereby obtaining an image of the target sample captured at each shooting position. By controlling the electron microscope to continuously shoot at an appropriate working distance at each shooting position, the image capture quality is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 This is a flow chart of a method for continuously capturing images under an electron microscope provided by one embodiment of the present invention;

[0025] Figure 2 is a flow chart of another method for continuously capturing images under an electron microscope provided by one embodiment of the present invention;

[0026] Figure 3 This is a flow chart of another method for continuously capturing images under an electron microscope provided by one embodiment of the present invention;

[0027] Figure 4 This is a schematic structural diagram of a device for continuously capturing images under an electron microscope provided by one embodiment of the present invention;

[0028] Figure 5 It is a structural diagram of an electronic device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0029] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It will be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all structures.

[0030] Figure 1This is a flow chart of a method for continuously photographing images under an electron microscope provided by one embodiment of the present invention. This embodiment is applicable to the case of continuously photographing samples using an electron microscope. The method can be performed by a device for continuously photographing images under an electron microscope, which can be implemented by software and / or hardware and integrated into an electronic device. Figure 1 As shown, the method specifically includes the following steps:

[0031] S110 , acquiring a plurality of shooting positions in a target sample placed on a stage of an electron microscope.

[0032] The target sample refers to any sample to be imaged. For example, the target sample may be an integrated circuit chip sample. The target sample is relatively large, so scanning and imaging are required to obtain a partial image of the sample at each imaging position within the target sample. The imaging position refers to the position of the sample during imaging with an electron microscope.

[0033] Specifically, all shooting positions in the target sample input by the user can be obtained, or all shooting positions in the target sample can be automatically determined based on the single shooting area size of the electron microscope and the sample size of the target sample, which can ensure a comprehensive and systematic scanning and shooting of the target sample to avoid missing important information.

[0034] Exemplarily, step S110 may include: dividing the target sample into regions according to the single shooting area size of the electron microscope and the sample size of the target sample placed on the stage of the electron microscope, obtaining multiple shooting areas in the target sample, and determining the center position of each shooting area as the shooting position.

[0035] The single-shot area size can refer to the size of the sample area that can be captured in a single shot of an electron microscope at a certain magnification. The sample size can refer to the overall size of the target sample placed on the electron microscope stage. This size may vary depending on the sample type, shape, and preparation method.

[0036] Specifically, the target sample can be logically divided into multiple shooting areas based on the size of the single shooting area and the size of the target sample. It should be noted that when dividing the area, it is necessary to ensure that each shooting area can be completely covered by a single shot while avoiding unnecessary overlap. Within each divided shooting area, the center position is determined as the shooting position. The center position is usually the most representative point and can reflect the overall characteristics of the area. The center position can be accurately determined using the microscope's built-in measurement function or software tools. By dividing the area and determining the shooting position, shooting can be carried out in an orderly manner to avoid missing or repeated shooting.

[0037] S120 , obtaining a first working distance corresponding to a vertex shooting position among the multiple shooting positions, where the first working distance refers to a working distance when the electron microscope is in a focused state at the vertex shooting position.

[0038] The vertex shooting position may refer to a shooting point selected at an edge vertex position in the target sample. For example, the vertex shooting position may include: the upper left corner shooting position, the lower left corner shooting position, the upper right corner shooting position, and the lower right corner shooting position of the target sample. The first working distance may refer to the working distance of the electron microscope when it is in a focused state at the vertex shooting position. The working distance is the distance between the microscope objective lens (or electron beam) and the sample, which is crucial to the clarity and resolution of the image.

[0039] Specifically, among the multiple shooting positions of the target sample, the upper left corner shooting position, the lower left corner shooting position, the upper right corner shooting position, and the lower right corner shooting position of the target sample can be selected as the vertex shooting position. The focal length of the electron microscope at each vertex shooting position is adjusted in sequence so that the electron microscope is in a focused state at the vertex shooting position. At this time, the electron microscope focuses the target sample area at the vertex shooting position to the clearest state. The working distance of the electron microscope at this time is recorded, i.e., the first working distance. By determining the first working distance, a reference benchmark can be provided for the subsequent determination of the working distances of other shooting positions, thereby improving the accuracy and consistency of shooting.

[0040] S130 , determining a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position.

[0041] The second working distance may refer to a working distance determined after calculation or adjustment for each specific shooting position in the target sample, based on the first working distance corresponding to the vertex shooting position and possible sample tilt, unevenness, and other factors.

[0042] Specifically, the first working distance corresponding to the vertex shooting position can be imported into a software tool corresponding to the electron microscope, wherein the software tool can be a statistical analysis tool used to construct, estimate, and evaluate complex multivariate relationship models. Using the automatic adjustment function or a preset algorithm in the software tool, the working distance corresponding to each shooting position in the target sample is adjusted based on the first working distance corresponding to the vertex shooting position, and the second working distance corresponding to each shooting position in the target sample is determined. This ensures that the optimal focusing effect is achieved at each shooting position, thereby improving the clarity and resolution of the image. For example, in this embodiment, the first working distance corresponding to the vertex shooting position can be directly used as the second working distance corresponding to the vertex shooting position.

[0043] Exemplarily, step S130 may include: according to the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the lower left corner shooting position, the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position, uniformly distributing the working distance deviation between the two adjacent corner shooting positions to each shooting position, and determining the second working distance corresponding to each shooting position in the target sample.

[0044] The working distance deviation may refer to the difference in working distances between two adjacent vertex shooting positions.

[0045] Specifically, the working distance deviations between the shooting positions corresponding to two adjacent corners can be calculated based on the first working distances corresponding to the upper left corner shooting position, the first working distances corresponding to the lower left corner shooting position, the first working distances corresponding to the upper right corner shooting position, and the first working distances corresponding to the lower right corner shooting position. Based on the working distance deviations between the shooting positions corresponding to the two adjacent corners, the working distance deviations are evenly distributed to each shooting position, and the second working distance corresponding to each shooting position in the target sample is determined. This ensures the uniformity of the working distance during the post-shooting process, improves the consistency of imaging quality, and reduces imaging errors caused by working distance deviations. For example, the working distance deviations between the upper left and lower left corner shooting positions and the working distance deviations between the upper right and lower right corner shooting positions can be evenly distributed to the shooting positions in each row and column to determine the second working distance corresponding to each shooting position in the target sample. Alternatively, the working distance deviations between the upper left and upper right corner shooting positions and the working distance deviations between the lower left and lower right corner shooting positions can be evenly distributed to the shooting positions in each row and column to determine the second working distance corresponding to each shooting position in the target sample. The process of uniform distribution of the two deviations mentioned above is the same.

[0046] S140 , controlling the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, to obtain an image of the target sample shot at each shooting position.

[0047] Specifically, the working distance of the electron microscope can be adjusted sequentially based on the second working distance corresponding to each shooting position and the preset shooting sequence, so that each shooting position is photographed according to the preset shooting sequence, and an image of the target sample captured by the electron microscope at each shooting position is obtained, thereby achieving an automated and continuous shooting process, improving shooting efficiency and image quality. After the shooting is completed, the image can be saved to a computer or other storage device for subsequent analysis and processing.

[0048] The technical solution of this embodiment is to obtain multiple shooting positions in the target sample placed on the stage of the electron microscope, and obtain the first working distance corresponding to the vertex shooting position among the multiple shooting positions. The first working distance refers to the working distance when the electron microscope is in a focused state at the vertex shooting position. In other words, the first working distance is a suitable working distance for clearly capturing images at the vertex shooting position. Based on the first working distance corresponding to the vertex shooting position, the suitable second working distance for each shooting position in the target sample can be dynamically determined; the electron microscope is controlled to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and an image of the target sample shot at each shooting position is obtained. By controlling the electron microscope to continuously shoot according to the suitable working distance at each shooting position, the image shooting quality is improved.

[0049] Figure 2 This is a flowchart of another method for continuously capturing images under an electron microscope, provided in accordance with one embodiment of the present invention. Building upon the aforementioned embodiments, this embodiment describes in detail the process of determining the second working distance corresponding to each capturing position, using the first working distance deviation between the upper left and lower left capturing positions, and the second working distance deviation between the upper right and lower right capturing positions, as examples. Explanations of terms that are identical or corresponding to those in the aforementioned embodiments are omitted.

[0050] See also Figure 2 Another method for continuously capturing images under an electron microscope provided in this embodiment specifically includes the following steps:

[0051] S210 , acquiring a plurality of shooting positions in a target sample placed on a stage of an electron microscope.

[0052] S220 , obtaining a first working distance corresponding to a vertex shooting position among a plurality of shooting positions, where the vertex shooting position includes: an upper left corner shooting position, a lower left corner shooting position, an upper right corner shooting position, and a lower right corner shooting position of the target sample.

[0053] S230 : Determine a first working distance deviation between the upper left corner shooting position and the lower left corner shooting position according to the first working distance corresponding to the upper left corner shooting position and the first working distance corresponding to the lower left corner shooting position.

[0054] The first working distance deviation may refer to a difference in working distance between the upper left corner shooting position and the lower left corner shooting position.

[0055] Specifically, the difference between the first working distances corresponding to the upper left corner shooting position and the first working distances corresponding to the lower left corner shooting position is used as the first working distance deviation between the upper left corner shooting position and the lower left corner shooting position. The first working distance deviation is a positive value. The first working distance deviation can reflect the overall change in the working distance in the vertical direction (i.e., the vertical line formed by the upper left and lower left corners), which helps improve the imaging quality of the entire target sample under the electron microscope.

[0056] S240 : Determine a second working distance deviation between the upper right corner shooting position and the lower right corner shooting position according to the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position.

[0057] The second working distance deviation may refer to a difference in working distance between the upper right corner shooting position and the lower right corner shooting position.

[0058] Specifically, the difference between the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position is used as the second working distance deviation between the upper right corner shooting position and the lower right corner shooting position. The second working distance deviation is a positive value. This second working distance deviation can reflect the change in working distance in another vertical direction (i.e., the vertical line formed by the upper right and lower right corners), helping to improve the imaging quality of the entire target sample under the electron microscope.

[0059] S250 , evenly distributing the first working distance deviation and the second working distance deviation to each shooting position, and determining the second working distance corresponding to each shooting position in the target sample.

[0060] Specifically, when calculating the second working distance for each shooting position, the working distance deviations between adjacent vertex shooting positions are evenly distributed based on the first and second working distance deviations, achieving a smooth and uniform transition of working distances across the entire sample. The corresponding second working distance for each shooting position in the target sample is then determined. Accurately calculating the second working distance for each shooting position improves the quality of the image captured at each shooting position.

[0061] Exemplarily, step S250 may include the following steps S2501-S2503:

[0062] S2501 : Determine a third working distance deviation between two adjacent rows in a first column and a fourth working distance deviation between two adjacent rows in a last column according to the number of rows corresponding to all shooting positions, the first working distance deviation, and the second working distance deviation.

[0063] The third working distance deviation may refer to a working distance deviation between every two adjacent rows of shooting positions in the first column (ie, the leftmost column consisting of the upper left corner and the lower left corner).

[0064] Specifically, based on the first and second working distance deviations, as well as the number of rows of each imaging position, the number of intervals between two rows corresponding to adjacent imaging positions in the first column can be calculated. The first working distance deviation is then averaged based on this number of intervals, and the averaged result is used as the third working distance deviation between two rows corresponding to adjacent imaging positions in the first column. Similarly, the number of intervals between two rows corresponding to adjacent imaging positions in the last column can be calculated. The second working distance deviation is then averaged based on this number of intervals, and the averaged result is used as the fourth working distance deviation between two rows corresponding to adjacent imaging positions in the last column. By accurately calculating the working distance deviations between rows and columns, a uniform distribution of working distances in the vertical direction can be ensured. For example, if all imaging positions corresponding to a target sample consist of m rows and n columns, i.e., both the first and last columns have m rows, then in the first column, there is one interval between adjacent imaging positions (in the vertical direction). Since there are m rows, there will be m-1 (number of intervals) such intervals in the first column (one interval between every two rows from the first to the mth row). Evenly distribute the first working distance deviation D among these m-1 intervals, with each interval receiving a deviation of D / (m-1). This evenly distributed deviation serves as the third working distance deviation between the two rows corresponding to adjacent shooting positions in the first column. In the last column, there is also an interval between adjacent shooting positions (also in the vertical direction). Similar to the first column, since there are m rows, there will be m-1 such intervals in the last column. Evenly distribute the second working distance deviation F among these m-1 intervals, with each interval receiving a deviation of F / (m-1). This evenly distributed deviation serves as the fourth working distance deviation between the two rows corresponding to adjacent shooting positions in the last column, thus achieving a uniform distribution of deviations in the first and last columns.

[0065] S2502. Determine the second working distance corresponding to the first column of shooting positions in each row and the second working distance corresponding to the last column of shooting positions based on the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the upper right corner shooting position, the third working distance deviation, and the fourth working distance deviation.

[0066] The fourth working distance deviation may refer to a working distance deviation between every two adjacent rows of shooting positions in the last column (ie, the rightmost column consisting of the upper right corner and the lower right corner).

[0067] Specifically, the first working distance corresponding to the upper left corner shooting position and the first working distance corresponding to the upper right corner shooting position can be used as the reference working distance. The number of inter-row intervals between each row in the first column and the first row is calculated. Based on the first working distance corresponding to the upper left corner shooting position, the product of the third working distance deviation and the number of inter-row intervals corresponding to that row is cumulatively added or subtracted row by row. The result of this accumulation or subtraction for each row is used as the second working distance corresponding to the shooting position in the first column of each row. The number of inter-row intervals between each row in the last column and the first row is calculated. Based on the first working distance corresponding to the upper right corner shooting position, the product of the fourth working distance deviation and the number of inter-row intervals corresponding to that row is cumulatively added or subtracted row by row. The result of this accumulation or subtraction for each row is used as the second working distance corresponding to the shooting position in the last column of each row. By determining the second working distances for the first and last columns of each row, the subsequent calculation of inter-column deviations can be simplified. For example, for shooting positions with m rows and n columns, in the first column, starting from the second row, the number of inter-row intervals between each row and the first row is calculated row by row. There is one interval between the second row and the first row, two intervals between the third row and the first row, and so on. Based on the known third working distance deviation, calculate the product of the inter-row spacing for each row and the deviation. Based on the first working distance corresponding to the upper left corner, multiply the calculated deviation product by the working distance for each row. The direction of the increase or decrease depends on the tilt of the upper left / right corner relative to the lower left / right corner (if the upper left / right corner is tilted downward compared to the lower left / right corner, the working distance needs to be increased; if the upper left / right corner is tilted upward compared to the lower left / right corner, the working distance needs to be decreased). Calculate the second working distance for the first column of each row. In the last column, starting from the second row, calculate the inter-row spacing between each row and the first row. Based on the known fourth working distance deviation, calculate the product of the inter-row spacing for each row and the deviation. Based on the first working distance corresponding to the upper right corner, multiply the deviation product calculated in the previous step, add or subtract the working distance for each row. The direction of the increase or decrease for the last column is determined in the same way as for the first column. Calculate the second working distance corresponding to the last column of shooting positions in each row.

[0068] Exemplarily, step S2502 may include: determining the first working distance corresponding to the upper left corner shooting position as the second working distance corresponding to the first column shooting position in the first row, and determining the first working distance corresponding to the upper right corner shooting position as the second working distance corresponding to the last column shooting position in the first row; for each row except the first row, determining the first deviation between the first column shooting position in the row and the first column shooting position in the first row according to the row number corresponding to the row and the third working distance deviation, and determining the second working distance corresponding to the first column shooting position in the row according to the second working distance and the first deviation corresponding to the first column shooting position in the first row; determining the second deviation between the last column shooting position in the row and the last column shooting position in the first row according to the row number corresponding to the row and the fourth working distance deviation, and determining the second working distance corresponding to the last column shooting position in the row according to the second working distance and the second deviation corresponding to the last column shooting position in the first row.

[0069] The first deviation may refer to a working distance deviation between the first column of shooting positions in a row other than the first row and the first column of shooting positions in the first row. The second deviation may refer to a working distance deviation between the last column of shooting positions in a row other than the first row and the last column of shooting positions in the first row.

[0070] Specifically, the first working distance corresponding to the upper left corner shooting position can be directly determined as the second working distance corresponding to the first column shooting position in the first row, and the first working distance corresponding to the upper right corner shooting position can be directly determined as the second working distance corresponding to the last column shooting position in the first row. This avoids additional calculations and directly utilizes the known first working distance as a reference. For each row except the first, the third working distance deviation is proportionally distributed to each row based on the row number corresponding to the row (starting from the second row) and the third working distance deviation, or linear interpolation is performed based on the row number to calculate the first deviation between the first column shooting position in the row and the first column shooting position in the first row. For example, the difference between the row number corresponding to the row and the row number corresponding to the first row is calculated, and this difference is multiplied by the third working distance. The product is used as the first deviation between the first column shooting position in the row and the first column shooting position in the first row. The second working distance corresponding to the first column shooting position in the first row is added to the calculated first deviation to obtain the second working distance corresponding to the first column shooting position in the row. By proportional distribution or linear interpolation, the third working distance deviation can be ensured to be evenly distributed in the vertical direction. Based on the row number corresponding to the row (starting from the second row) and the fourth working distance deviation, the fourth working distance deviation is proportionally distributed to each row, or linear interpolation is performed based on the row number to calculate the second deviation between the last column of shooting positions in the row and the last column of shooting positions in the first row. For example, the difference between the row number corresponding to the row and the row number corresponding to the first row is calculated, the difference is multiplied by the fourth working distance, and the product is used as the second deviation between the last column of shooting positions in the row and the last column of shooting positions in the first row. The second working distance corresponding to the last column of shooting positions in the first row is added to the calculated second deviation to obtain the second working distance corresponding to the last column of shooting positions in the row, thereby ensuring the uniform distribution of the fourth working distance deviation in the vertical direction, thereby maintaining the consistency of the working distance in the entire shooting area.

[0071] S2503. Determine the fifth working distance deviation between two adjacent columns in each row based on the second working distance corresponding to the first column of shooting positions in each row and the second working distance corresponding to the last column of shooting positions. Determine the second working distance corresponding to each column of shooting positions in each row based on the second working distance corresponding to the first column of shooting positions in each row and the fifth working distance deviation between two adjacent columns.

[0072] The fifth working distance deviation may refer to a working distance deviation between two adjacent columns of shooting positions in each row.

[0073] Specifically, the number of intervals between two columns corresponding to adjacent shooting positions in each row can be determined based on the number of columns in which each shooting position is located. Based on this number of intervals, the difference between the second working distance corresponding to the first shooting position in each row and the second working distance corresponding to the last shooting position in each row is evenly divided, and the result of this equalization is used as the fifth working distance deviation between the two columns corresponding to adjacent shooting positions in that row. By accurately calculating the working distance deviation between columns, a uniform distribution of working distances in the horizontal direction can be ensured. For example, each row can have m columns, and in each row, there is one interval between adjacent shooting positions (in the horizontal direction). Since there are m columns, there will be m-1 (number of intervals) such intervals in each row (one interval between every two columns from the first to the mth column). The difference N between the second working distance corresponding to the first shooting position in the first column and the second working distance corresponding to the last shooting position in each row is evenly distributed among these m-1 intervals, with each interval receiving a deviation of N / (m-1). This evenly divided deviation is used as the fifth working distance deviation between the two adjacent columns in that row. Calculate the number of column intervals between each column in each row and the first column. Based on the second working distance corresponding to the first column's shooting position in each row, cumulatively add or subtract the product of the fifth working distance deviation and the column interval number corresponding to that column, and use the cumulative or subtracted result for each column as the second working distance corresponding to each shooting position. For example, in each row, starting with the second column, calculate the number of column intervals between each column and the first column. There is one interval between the second column and the first column, two intervals between the third column and the first column, and so on. Based on the known fifth working distance deviation, calculate the product of the row interval number and the deviation for each column. Based on the second working distance corresponding to the first column's shooting position in each row, cumulatively add or subtract the working distance for each column based on the calculated deviation product. The direction of accumulation or decrement depends on the tilt of the upper left / lower left corner relative to the upper right / lower right corner (if the upper left / lower left corner is tilted downward compared to the upper right / lower right corner, it indicates that the working distance needs to be increased; if the upper left / lower left corner is tilted upward compared to the upper right / lower right corner, it indicates that the working distance needs to be decreased). The second working distance corresponding to each shooting position in each row and column is calculated. By determining the second working distance for each row and column, a uniform distribution of working distances is ensured throughout the entire shooting area.

[0074] S260 , controlling the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, to obtain an image of the target sample shot at each shooting position.

[0075] The technical solution of this embodiment determines the first working distance deviation between the upper left shooting position and the lower left shooting position based on the first working distance corresponding to the upper left shooting position and the first working distance corresponding to the lower left shooting position; and determines the second working distance deviation between the upper right shooting position and the lower right shooting position based on the first working distance corresponding to the upper right shooting position and the first working distance corresponding to the lower right shooting position. By calculating the working distance deviation in the horizontal direction, the degree of unevenness of the target sample in the horizontal direction can be understood, which can provide basic data for the subsequent uniform distribution of deviations. The first working distance deviation and the second working distance deviation are evenly distributed to each shooting position, and the second working distance corresponding to each shooting position in the target sample is determined. By evenly distributing the working distance deviation, it can be ensured that the working distance in the entire shooting area is more uniform, thereby improving the accuracy and consistency of shooting.

[0076] Figure 3 This is a flowchart of another method for continuously capturing images under an electron microscope, provided in accordance with one embodiment of the present invention. This embodiment, based on the above embodiments, optimizes the step of "controlling the electron microscope to continuously capture a target sample at a second working distance corresponding to each capturing position, thereby obtaining an image of the target sample captured at each capturing position." Explanations of terms identical or corresponding to those in the above embodiments are omitted here.

[0077] See also Figure 3 Another method for continuously capturing images under an electron microscope provided in this embodiment specifically includes the following steps:

[0078] S310 , acquiring a plurality of shooting positions in a target sample placed on a stage of an electron microscope.

[0079] S320: Acquire a first working distance corresponding to a vertex shooting position among the multiple shooting positions, where the first working distance refers to a working distance when the electron microscope is in a focused state at the vertex shooting position.

[0080] S330 , determining a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position.

[0081] S340: Randomly select at least one target shooting position from a plurality of shooting positions.

[0082] The target shooting position may refer to one or more shooting positions for verification that are randomly selected from a plurality of shooting positions.

[0083] Specifically, a list or array containing all shooting locations may be defined, and one or more shooting locations may be randomly selected from the list using random numbers as target shooting locations.

[0084] S350: Control the electron microscope to display an image capturing effect at the target capturing position according to a second working distance corresponding to the target capturing position.

[0085] Among them, the image shooting effect can refer to the quality performance of the image obtained by the electron microscope at the target shooting position, which can include the image clarity, contrast, brightness, color reproduction, and whether there are noise, blur or distortion.

[0086] Specifically, based on the second working distance of the selected target shooting position, the electron microscope can be controlled to adjust its focal length according to the second working distance corresponding to the target shooting position, trigger the electron microscope to shoot, and display the image capture effect at the target shooting position. By displaying the image capture effect, the operator can intuitively see the image effect at the target shooting position, thereby determining whether the preset shooting clarity is met and whether further adjustment of the working distance is needed, which helps to improve image capture quality.

[0087] S360. In response to the image shooting effect meeting the preset shooting clarity, control the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and obtain the target sample image shot at each shooting position.

[0088] Specifically, an image processing algorithm or manual determination can be used to determine whether the image capture effect meets a preset capture clarity threshold. If the image capture effect meets the preset capture clarity threshold, the electron microscope is controlled to continuously capture the target sample according to a preset capture sequence and the second working distance corresponding to each capture position, thereby obtaining an image of the target sample captured at each capture position. By detecting whether the image capture effect at the target capture position meets the preset capture clarity threshold, the accuracy and effectiveness of the second working distance determination can be further ensured, thereby improving the quality of images captured using the second working distance, meeting the requirements of subsequent analysis and processing, and enhancing the accuracy of continuous capture.

[0089] Exemplarily, the method also includes: in response to the image shooting effect not meeting the preset shooting clarity, adjusting the placement angle of the target sample on the stage of the electron microscope, and re-determining the working distance and performing continuous shooting operations on the adjusted target sample.

[0090] Specifically, if the image shooting effect does not meet the preset shooting clarity, it can be determined that the placement angle of the sample needs to be adjusted. Use the rotation or tilting device on the stage to adjust the placement angle of the target sample on the stage of the electron microscope. After adjusting the sample angle, it is necessary to redetermine the working distance of the electron microscope, that is, re-execute the above steps S320 and S330. After redetermining the second working distance of each shooting position, it is possible to re-detect whether the image shooting effect at the target shooting position meets the preset shooting clarity. If not, it is necessary to adjust the placement angle of the target sample on the stage of the electron microscope again until the image shooting effect at the target shooting position meets the preset shooting clarity, thereby ensuring the accuracy and effectiveness of the determination of the second working distance, and thus improving the quality of continuous image shooting. By adjusting the placement angle of the sample, redetermining the working distance and performing continuous shooting operations, the image quality captured by the electron microscope can be effectively improved, thereby improving the accuracy and reliability of image shooting.

[0091] The technical solution of this embodiment ensures the accuracy of the subsequent determination of the second working distance by randomly selecting at least one target shooting position from a plurality of shooting positions, thereby improving the shooting quality. In response to the image capture effect meeting the preset shooting clarity, the electron microscope is controlled to continuously capture the target sample according to the second working distance corresponding to each shooting position, obtaining an image of the target sample captured at each shooting position. This further ensures that each shooting position has an appropriate second working distance, thereby accurately and efficiently capturing the target sample continuously, thereby improving the image capture quality.

[0092] Figure 4 This is a schematic diagram of the structure of a device for continuously photographing images under an electron microscope provided by an embodiment of the present invention. This embodiment is applicable to the case where an electron microscope is used to continuously photograph a sample. Figure 4 As shown, the device specifically includes: a shooting position acquisition module 410 , a first working distance acquisition module 420 , a second working distance determination module 430 and a continuous shooting control module 440 .

[0093] Among them, the shooting position acquisition module 410 is used to acquire multiple shooting positions in the target sample placed on the stage of the electron microscope; the first working distance acquisition module 420 is used to acquire the first working distance corresponding to the vertex shooting position among the multiple shooting positions, and the first working distance refers to the working distance of the electron microscope when it is in a focused state at the vertex shooting position; the second working distance determination module 430 is used to determine the second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position; the continuous shooting control module 440 is used to control the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and obtain the target sample image shot at each shooting position.

[0094] The technical solution of this embodiment is to obtain multiple shooting positions in the target sample placed on the stage of the electron microscope, and obtain the first working distance corresponding to the vertex shooting position among the multiple shooting positions. The first working distance refers to the working distance when the electron microscope is in a focused state at the vertex shooting position. In other words, the first working distance is a suitable working distance for clearly capturing images at the vertex shooting position. Based on the first working distance corresponding to the vertex shooting position, the suitable second working distance for each shooting position in the target sample can be dynamically determined; the electron microscope is controlled to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and an image of the target sample shot at each shooting position is obtained. By controlling the electron microscope to continuously shoot according to the suitable working distance at each shooting position, the image shooting quality is improved.

[0095] Optionally, the shooting position acquisition module 410 is specifically used to: divide the target sample into regions according to the single shooting area size of the electron microscope and the sample size of the target sample placed on the stage of the electron microscope, obtain multiple shooting areas in the target sample, and determine the center position of each shooting area as the shooting position.

[0096] Optionally, the vertex shooting position includes: the upper left corner shooting position, the lower left corner shooting position, the upper right corner shooting position and the lower right corner shooting position of the target sample; the second working distance determination module 430 is specifically used to: according to the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the lower left corner shooting position, the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position, evenly distribute the working distance deviation between the two adjacent corner shooting positions to each shooting position, and determine the second working distance corresponding to each shooting position in the target sample.

[0097] The second working distance determining module 430 includes:

[0098] a first distance deviation determining unit, configured to determine a first working distance deviation between the upper left corner shooting position and the lower left corner shooting position according to a first working distance corresponding to the upper left corner shooting position and a first working distance corresponding to the lower left corner shooting position;

[0099] a second distance deviation determining unit, configured to determine a second working distance deviation between the upper right corner shooting position and the lower right corner shooting position according to the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position;

[0100] The second working distance determining unit is configured to evenly distribute the first working distance deviation and the second working distance deviation to each shooting position, and determine the second working distance corresponding to each shooting position in the target sample.

[0101] Optionally, the second working distance determining unit includes:

[0102] a fourth distance deviation determining subunit, configured to determine a third working distance deviation between two adjacent rows in a first column and a fourth working distance deviation between two adjacent rows in a last column according to the number of rows corresponding to all shooting positions, the first working distance deviation, and the second working distance deviation;

[0103] a first working distance determining subunit, configured to determine, based on the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the upper right corner shooting position, the third working distance deviation, and the fourth working distance deviation, a second working distance corresponding to the first column shooting position in each row and a second working distance corresponding to the last column shooting position;

[0104] The second working distance determination subunit is used to determine the fifth working distance deviation between two adjacent columns in each row based on the second working distance corresponding to the first column of shooting positions in each row and the second working distance corresponding to the last column of shooting positions, and to determine the second working distance corresponding to each column of shooting positions in each row based on the second working distance corresponding to the first column of shooting positions in each row and the fifth working distance deviation between two adjacent columns.

[0105] Optionally, the second working distance determination subunit is specifically used to: determine the first working distance corresponding to the upper left corner shooting position as the second working distance corresponding to the first column shooting position in the first row, and determine the first working distance corresponding to the upper right corner shooting position as the second working distance corresponding to the last column shooting position in the first row; for each row except the first row, determine the first deviation between the first column shooting position in the row and the first column shooting position in the first row according to the row serial number corresponding to the row and the third working distance deviation, and determine the second working distance corresponding to the first column shooting position in the row according to the second working distance corresponding to the first column shooting position in the first row and the first deviation; determine the second deviation between the last column shooting position in the row and the last column shooting position in the first row according to the row serial number corresponding to the row and the fourth working distance deviation, and determine the second working distance corresponding to the last column shooting position in the row according to the second working distance corresponding to the last column shooting position in the first row and the second deviation.

[0106] Optionally, the continuous shooting control module 440 is specifically used to: randomly select at least one target shooting position from a plurality of shooting positions; control the electron microscope to display the image shooting effect at the target shooting position according to the second working distance corresponding to the target shooting position; in response to the image shooting effect meeting the preset shooting clarity, control the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and obtain the target sample image shot at each shooting position.

[0107] Optionally, the continuous shooting control module 440 is further specifically used to: in response to the image shooting effect not meeting the preset shooting clarity, adjust the placement angle of the target sample on the stage of the electron microscope, and re-determine the working distance and perform continuous shooting operations on the adjusted target sample.

[0108] The device for continuously capturing images under an electron microscope provided in an embodiment of the present invention can execute the method for continuously capturing images under an electron microscope provided in any embodiment of the present invention, and has corresponding functional modules and beneficial effects for executing the method for continuously capturing images under an electron microscope.

[0109] It is worth noting that in the embodiment of the device for continuously capturing images under the above-mentioned electron microscope, the various units and modules included are only divided according to functional logic, but are not limited to the above-mentioned division, as long as the corresponding functions can be achieved; in addition, the specific names of the various functional units are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of the present invention.

[0110] Figure 5 A schematic structural diagram of an electronic device provided by an embodiment of the present invention. Figure 5A block diagram of an exemplary electronic device 12 suitable for implementing embodiments of the present invention is shown. Figure 5 The electronic device 12 shown is only an example and should not limit the functionality and scope of use of the embodiments of the present invention.

[0111] like Figure 5 As shown, electronic device 12 is implemented as a general-purpose computing device. Components of electronic device 12 may include, but are not limited to, one or more processors or processing units 16, system memory 28, and a bus 18 that connects various system components (including system memory 28 and processing unit 16).

[0112] Bus 18 represents one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, an accelerated graphics port, a processor, or a local bus using any of a variety of bus architectures. Examples of these architectures include, but are not limited to, an Industry Standard Architecture (ISA) bus, a Micro Channel Architecture (MAC) bus, an Enhanced ISA bus, a Video Electronics Standards Association (VESA) local bus, and a Peripheral Component Interconnect (PCI) bus.

[0113] The electronic device 12 typically includes a variety of computer system readable media. These media can be any available media that can be accessed by the electronic device 12, including volatile and non-volatile media, removable and non-removable media.

[0114] The system memory 28 may include computer system readable media in the form of volatile memory, such as random access memory 30 (RAM) and / or cache memory 32. The electronic device 12 may further include other removable / non-removable, volatile / non-volatile computer system storage media. By way of example only, the storage system 34 may be configured to read and write non-removable, non-volatile magnetic media ( Figure 5 Not shown, often called a "hard drive"). Although Figure 5 Not shown, a magnetic disk drive for reading and writing to a removable non-volatile magnetic disk (e.g., a "floppy disk"), and an optical disk drive for reading and writing to a removable non-volatile optical disk (e.g., a CD-ROM, DVD-ROM, or other optical media) may be provided. In these cases, each drive may be connected to bus 18 via one or more data media interfaces. System memory 28 may include at least one program product having a set (e.g., at least one) of program modules configured to perform the functions of various embodiments of the present invention.

[0115] A program / utility 40 having a set (at least one) of program modules 42 may be stored, for example, in system memory 28. Such program modules 42 include, but are not limited to, an operating system, one or more application programs, other program modules, and program data, each of which, or some combination thereof, may include an implementation of a network environment. Program modules 42 generally perform the functions and / or methods of the embodiments described herein.

[0116] The electronic device 12 can also communicate with one or more external devices 14 (e.g., a keyboard, pointing device, display 24, etc.), one or more devices that enable a user to interact with the electronic device 12, and / or any device that enables the electronic device 12 to communicate with one or more other computing devices (e.g., a network card, a modem, etc.). Such communication can occur via an input / output (I / O) interface 22. Furthermore, the electronic device 12 can communicate with one or more networks (e.g., a local area network (LAN), a wide area network (WAN), and / or a public network such as the Internet) via a network adapter 20. As shown, the network adapter 20 communicates with other modules of the electronic device 12 via a bus 18. It should be understood that, although not shown, other hardware and / or software modules can be used in conjunction with the electronic device 12, including but not limited to microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0117] The processing unit 16 executes various functional applications and data processing by running programs stored in the system memory 28, such as implementing the method steps for continuously capturing images under an electron microscope provided by any embodiment of the present invention.

[0118] Of course, those skilled in the art will appreciate that the processor may also implement the technical solution of the method for continuously capturing images under an electron microscope provided in any embodiment of the present invention.

[0119] This embodiment provides a computer-readable storage medium having a computer program stored thereon. When the program is executed by a processor, the method steps for continuously capturing images under an electron microscope as provided in any embodiment of the present invention are implemented.

[0120] The computer storage medium of the embodiment of the present invention can adopt any combination of one or more computer-readable media. The computer-readable medium can be a computer-readable signal medium or a computer-readable storage medium. The computer-readable storage medium can be, for example, but not limited to: an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or component, or any combination of the above. More specific examples (non-exhaustive list) of computer-readable storage media include: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this document, a computer-readable storage medium can be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device.

[0121] A computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, which carries computer-readable program code. Such propagated data signals may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A computer-readable signal medium may also be any computer-readable medium other than a computer-readable storage medium that can transmit, propagate, or transport a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0122] Program code embodied on a computer-readable medium may be transmitted using any appropriate medium, including but not limited to wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.

[0123] An embodiment of the present invention further provides a computer program product, including a computer program, which, when executed by a processor, implements the method for continuously capturing images under an electron microscope as provided in any embodiment of the present invention.

[0124] The computer program product may be implemented in a computer program code for performing the operations of the present invention written in one or more programming languages, or a combination thereof, including object-oriented programming languages and conventional procedural programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a stand-alone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving a remote computer, the remote computer may be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0125] Those skilled in the art will appreciate that the modules or steps of the present invention described above can be implemented using a general-purpose computing device. They can be centralized on a single computing device or distributed across a network of multiple computing devices. Alternatively, they can be implemented using program code executable by a computer device, which can then be stored in a storage device and executed by the computing device. Alternatively, they can be fabricated into separate integrated circuit modules, or multiple modules or steps can be fabricated into a single integrated circuit module. Thus, the present invention is not limited to any specific combination of hardware and software.

[0126] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A method for continuously capturing images under an electron microscope, characterized in that: include: acquiring a plurality of photographic positions in a target sample placed on a stage of an electron microscope; Acquire a first working distance corresponding to a vertex shooting position among the multiple shooting positions, where the first working distance refers to a working distance when the electron microscope is in a focused state at the vertex shooting position; Determining a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position; The electron microscope is controlled to continuously shoot the target sample according to the second working distance corresponding to each shooting position, so as to obtain an image of the target sample shot at each shooting position.

2. The method according to claim 1, characterized in that Acquire multiple image positions within the target sample placed on the electron microscope stage, including: According to the single shooting area size of the electron microscope and the sample size of the target sample placed on the stage of the electron microscope, the target sample is divided into regions to obtain multiple shooting areas in the target sample, and the center position of each shooting area is determined as the shooting position.

3. The method according to claim 1, characterized in that The vertex shooting positions include: the upper left corner shooting position, the lower left corner shooting position, the upper right corner shooting position and the lower right corner shooting position of the target sample; Determining a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position includes: According to the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the lower left corner shooting position, the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position, the working distance deviation between the two adjacent corner shooting positions is evenly distributed to each shooting position, and the second working distance corresponding to each shooting position in the target sample is determined.

4. The method according to claim 3, characterized in that According to the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the lower left corner shooting position, the first working distance corresponding to the upper right corner shooting position, and the first working distance corresponding to the lower right corner shooting position, the working distance deviation between two adjacent corner shooting positions is evenly distributed to each shooting position, and the second working distance corresponding to each shooting position in the target sample is determined, including: determining a first working distance deviation between the upper left corner shooting position and the lower left corner shooting position according to the first working distance corresponding to the upper left corner shooting position and the first working distance corresponding to the lower left corner shooting position; determining a second working distance deviation between the upper right corner shooting position and the lower right corner shooting position according to the first working distance corresponding to the upper right corner shooting position and the first working distance corresponding to the lower right corner shooting position; The first working distance deviation and the second working distance deviation are evenly distributed to each shooting position, and the second working distance corresponding to each shooting position in the target sample is determined.

5. The method according to claim 4, characterized in that Evenly distributing the first working distance deviation and the second working distance deviation to each shooting position, and determining the second working distance corresponding to each shooting position in the target sample, comprising: Determining a third working distance deviation between two adjacent rows in a first column and a fourth working distance deviation between two adjacent rows in a last column according to the number of rows corresponding to all shooting positions, the first working distance deviation, and the second working distance deviation; Determine, according to the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the upper right corner shooting position, the third working distance deviation, and the fourth working distance deviation, a second working distance corresponding to the first column shooting position in each row and a second working distance corresponding to the last column shooting position; Based on the second working distance corresponding to the first column of shooting positions in each row and the second working distance corresponding to the last column of shooting positions, the fifth working distance deviation between two adjacent columns in each row is determined, and based on the second working distance corresponding to the first column of shooting positions in each row and the fifth working distance deviation between two adjacent columns, the second working distance corresponding to each column of shooting positions in each row is determined.

6. The method according to claim 5, characterized in that Determining, according to the first working distance corresponding to the upper left corner shooting position, the first working distance corresponding to the upper right corner shooting position, the third working distance deviation, and the fourth working distance deviation, the second working distance corresponding to the first column shooting position in each row and the second working distance corresponding to the last column shooting position, includes: Determine the first working distance corresponding to the upper left corner shooting position as the second working distance corresponding to the shooting position in the first column of the first row, and determine the first working distance corresponding to the upper right corner shooting position as the second working distance corresponding to the shooting position in the last column of the first row; For each row except the first row, determining a first deviation between the first column of shooting positions in the row and the first column of shooting positions in the first row based on the row number corresponding to the row and the third working distance deviation, and determining a second working distance corresponding to the first column of shooting positions in the row based on the second working distance corresponding to the first column of shooting positions in the first row and the first deviation; According to the row number corresponding to the row and the fourth working distance deviation, the second deviation between the last column of shooting positions in the row and the last column of shooting positions in the first row is determined, and according to the second working distance corresponding to the last column of shooting positions in the first row and the second deviation, the second working distance corresponding to the last column of shooting positions in the row is determined.

7. The method according to claim 1, characterized in that Controlling the electron microscope to continuously photograph the target sample according to the second working distance corresponding to each photographing position to obtain an image of the target sample photographed at each photographing position, comprising: randomly selecting at least one target shooting position from a plurality of shooting positions; controlling the electron microscope to display an image capturing effect at the target capturing position according to a second working distance corresponding to the target capturing position; In response to the image shooting effect meeting the preset shooting clarity, the electron microscope is controlled to continuously shoot the target sample according to the second working distance corresponding to each shooting position to obtain the target sample image shot at each shooting position.

8. The method according to claim 7, characterized in that The method further comprises: In response to the image capture effect not meeting the preset capture clarity, the placement angle of the target sample on the stage of the electron microscope is adjusted, and the working distance is re-determined and the continuous capture operation is performed on the adjusted target sample.

9. A device for continuously capturing images under an electron microscope, characterized in that: include: A shooting position acquisition module is used to acquire multiple shooting positions in a target sample placed on the stage of the electron microscope; a first working distance acquisition module, configured to acquire a first working distance corresponding to a vertex shooting position among the plurality of shooting positions, wherein the first working distance refers to a working distance when the electron microscope is in a focused state at the vertex shooting position; a second working distance determining module, configured to determine a second working distance corresponding to each shooting position in the target sample according to the first working distance corresponding to the vertex shooting position; The continuous shooting control module is used to control the electron microscope to continuously shoot the target sample according to the second working distance corresponding to each shooting position, and obtain the target sample image shot at each shooting position.

10. An electronic device, characterized in that: The electronic device comprises: one or more processors; a memory for storing one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors implement the method for continuously capturing images under an electron microscope as described in any one of claims 1 to 8.

Images