Power-off protection device, spindle system and thinning machine

By designing a power-off protection device and using mechanical bearings and magnetic structures to provide spindle support when the power is off, the mechanical collision problem of non-contact bearings during power off is solved, and the stable rotation of the spindle and the protection of the wafer are achieved.

CN120461322BActive Publication Date: 2025-09-30BEIJING TESIDI SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202510827792.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-06-20
Publication Date
2025-09-30
Estimated Expiration
2045-06-20

AI Technical Summary

Technical Problem

When the power is off, the non-contact bearing loses its electromagnetic field, hydraulic or pneumatic support, causing mechanical collision between the spindle and surrounding components, damaging the spindle and wafer products.

Method used

A power-off protection device is designed, including a first power-off protection unit and a second power-off protection unit. It uses mechanical bearings and a magnetic structure to provide spindle support through the cooperation of a friction pair and a biasing member when the power is off, ensuring that the spindle continues to rotate and avoids collision.

Benefits of technology

In the event of a power outage, the spindle and wafer are protected, mechanical collisions are avoided, spindle stability and processing accuracy are ensured, and system safety and fault tolerance are improved.

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Abstract

The present application provides a power-off protection device, a spindle system, and a thinning machine, which relate to the technical field of semiconductor processing equipment and include a first power-off protection unit, which includes: a mating portion fixedly mounted on the spindle; a receiving portion coaxially sleeved on the outer periphery of the mating portion and located below the mating portion, capable of forming a friction pair with the mating portion, realizing torque transmission with the mating portion when engaged, and providing an upward support force to the mating portion and the spindle; a first sliding portion coaxially sleeved on the outer periphery of the receiving portion, forming a rotation pair with the receiving portion and forming an axial linkage fit; a biasing member acting on the first sliding portion and applying an upward biasing force to the first sliding portion in the axial direction, so that the receiving portion and the mating portion form a coupled state; a pressurizing mechanism, which generates a force in the opposite direction to the biasing force in the power-on state, and the force is greater than the biasing force, so as to release the coupled state; and the force is eliminated in the power-off state. The problem of using a non-contact bearing for reliable power-off protection is solved.
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