Gas path mechanism for vapor deposition heating block and gas distribution analysis method

Abstract

The invention discloses a gas path mechanism for a vapor deposition heating block and a gas distribution analysis method.The gas path mechanism comprises a supply end, a gas pipe, a vacuum pipe connector and a gas supply pipe connector, a supporting structure is arranged at the end of the vacuum pipe connector and / or the gas supply pipe connector, and when the vacuum pipe connector and / or the gas supply pipe connector are / is connected with a groove part of a base block, the supporting structure is connected with the base block. The supporting structure is arranged at one end serving as the connecting part, and the supporting structure of the vacuum pipe joint and / or the air supply pipe joint is welded with the groove part of the base block. The supporting structure specially used for being welded to the groove part of the base block is arranged on the connecting part of the connector, direct welding on the pipe body is avoided, traditional direct connection between the pipe body and the groove part of the base block is changed into indirect connection, and therefore leakage is reduced. And by arranging the supporting structure, when the pressure difference changes, the deformation quantity of the connector can be reduced, and the situation that cracks are generated on the welding portion due to micro-deformation is prevented.

Description

Technical Field

[0001] The present invention relates to the technical field of vapor deposition heating blocks, and more particularly to a gas path mechanism and a gas distribution analysis method for a vapor deposition heating block. Background Art

[0002] Important properties that raw material compounds used in vapor deposition methods should possess include high vapor pressure, liquid compounds, vaporization temperature and thermal stability during storage, easy handling, easy reaction with reactants during processing, simple deposition mechanism, etc. In addition, in the case of ITO thin films, since they must be deposited in the form of composite oxides, each deposition temperature and other process conditions must be consistent or similar. The applicant mentioned in the Korean patent previously applied for that "when the gas supply pipe is connected to the groove portion of the connecting channel connected to the base block in the vertical direction, direct welding on the pipe body will produce cracks." Figure 13 and Figure 14 Therefore, how to prevent cracks from occurring in the welded portion due to welding stress and thermal stress without directly welding to the pipe body is a technical problem to be solved by the present invention. Summary of the Invention

[0003] The Summary of the Invention introduces a series of simplified concepts that will be further described in the Detailed Description of the Invention. The Summary of the Invention is not intended to limit the key features and essential features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0004] In order to at least partially solve the above problems, the present invention provides a gas path mechanism and gas distribution analysis method for a vapor deposition heating block, including: a supply end, a gas pipe, a vacuum pipe joint and a gas supply pipe joint, the end of the vacuum pipe joint and / or the gas supply pipe joint is provided with a supporting structure, when the vacuum pipe joint and / or the gas supply pipe joint is connected to the groove part of the base block, the supporting structure is provided at one end serving as the connecting part, and the supporting structure of the vacuum pipe joint and / or the gas supply pipe joint is welded to the groove part of the base block.

[0005] Preferably, the vacuum pipe joint and / or the air supply pipe joint consists of a cylindrical section, a conical section and the support structure, one end of the cylindrical section is the joint end, which is connected to the air pipe, and the other end is connected to one end of the conical section, and the other end of the conical section is connected to the support structure, and the support structure is located in the groove portion of the base block and is fixed in the groove portion of the base block by welding, and the vacuum pipe joint and / or the air supply pipe joint is provided with a vent hole that passes through the cylindrical section, the conical section and the support structure.

[0006] Preferably, the outer diameter of the cylindrical section is r, and the outer diameters of the two ends of the conical section are r and R respectively, where R>r, and the end of the conical section with an outer diameter of r is connected to the end of the cylindrical section, and the end with an outer diameter of R is connected to the support structure.

[0007] Preferably, the support structure is in the shape of a truncated cone, and the outer diameters of the two ends of the support structure are d and D respectively, wherein D>d>R, the end of the support structure with an outer diameter d is connected to the end of the conical section with an outer diameter R, and the end with an outer diameter D is located on the inner end surface of the groove portion of the base block.

[0008] Preferably, the groove portion of the base block is a tapered groove, the opening diameter of the groove portion of the base block is T, and the inner end surface diameter of the groove portion of the base block is t, wherein T>t≥D.

[0009] Preferably, the side wall of the support structure is provided with a plurality of structural grooves along the circumferential direction.

[0010] Preferably, the inner wall of the vent hole of the air supply pipe joint is provided with wavy patterns.

[0011] Preferably, a diverter net is provided in the air vent of the air supply pipe joint or in the connecting channel connected to the groove portion of the base block, and the diverter net is a circular grid structure, and the diverter net consists of a first zone, a second zone and a third zone; when the airflow changes direction after passing through the diverter net, the turning path Y of the airflow flowing through the first zone is greater than the turning path Z of the airflow flowing through the second zone, and the turning path Z of the airflow flowing through the second zone is greater than the turning path J of the airflow flowing through the third zone.

[0012] Preferably, the grid density of the first zone is smaller than that of the second zone, and the grid density of the second zone is smaller than that of the third zone.

[0013] Preferably, the gas distribution analysis method for a gas path mechanism of a vapor deposition heating block of the present invention comprises:

[0014] According to the gas path distribution of the vapor deposition heating block and the status of the vacuum pipe joint and the gas supply pipe joint, the gas distribution is statistically analyzed; a thin film pressure sensor group is set around the vacuum negative pressure port of the vacuum pipe joint to detect the multi-point pressure signals around the vacuum pipe mouth; when the vacuum is evacuated, the negative pressure adsorbs the substrate on the heating block. When the negative pressure acts, the substrate base attachment surface and the heating block adsorption surface are not completely attached, and there are micro-gaps and micro-gaps extending non-directionally from the edge of the substrate to the vacuum port, resulting in non-uniform distribution of negative pressure; the thin film pressure sensor group detects the multi-point pressure signals around the vacuum pipe mouth between the substrate base attachment surface and the heating block adsorption surface; according to the multi-point pressure signals, the vacuum adsorption substrate pressure distribution is statistically analyzed; according to the statistics of the force characteristics of the non-uniformly distributed negative pressure substrate, the upper limit pressure difference of the negative pressure is set, and the negative pressure is adjusted according to the vacuum adsorption pressure. Attached to the base pressure distribution, control the difference of the non-uniform distribution of the negative pressure of the vacuum adsorption base to be less than the set upper limit pressure difference of the negative pressure; set a nano air pressure sensor around the gas outlet of the gas supply pipe joint to detect the gas pressure of the gas supply outlet and obtain multiple gas pressure signals of the gas supply outlet; based on the multiple gas pressure signals of the gas supply outlet, count the gas distribution of the gas supply outlet and obtain the statistical characteristics of the gas distribution of the gas supply outlet; based on the statistical characteristics of the gas distribution of the gas supply outlet, analyze the distribution state of the gas on the surface of the heating block and construct a gas distribution analysis model; based on the gas distribution analysis model, analyze the dynamic difference of the gas pressure distribution of the gas supply pipe and the gas supply path mechanism, keep the dynamic difference of the gas pressure distribution of the gas supply pipe and the gas supply path mechanism not greater than the set upper limit of the gas pressure difference, and keep the gas pressure of the gas supply pipe and the gas supply path mechanism uniformly distributed, and control the gas to be uniformly distributed on the surface of the heating block.

[0015] Compared with the prior art, the present invention has at least the following beneficial effects:

[0016] The present invention employs a support structure at the joint's connection point, specifically designed for welding to the base block's groove. This avoids direct welding on the tube body, replacing the traditional direct connection between the tube body and the base block's groove with an indirect connection, thereby reducing leakage. The support structure also minimizes deformation of the "joint" when pressure differentials occur, preventing cracks in the weld due to micro-deformation.

[0017] The gas path mechanism and gas distribution analysis method for the vapor deposition heating block described in the present invention, and other advantages, objectives and features of the present invention will be reflected in part through the following description, and in part will also be understood by technical personnel in this field through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0019] Figure 1 It is a cross-sectional view of the vacuum tube joint and the groove portion of the base block.

[0020] Figure 2 It is a cross-sectional view of the air supply pipe joint and the groove portion of the base block without a supporting structure.

[0021] Figure 3 Schematic diagram of a vacuum pipe joint with a support structure.

[0022] Figure 4 for Figure 3 Schematic diagram of the cross-section structure.

[0023] Figure 5 Schematic diagram of setting structural grooves on the supporting structure.

[0024] Figure 6 This is a schematic diagram of the cross-sectional structure of a gas supply pipe joint with wavy patterns.

[0025] Figure 7 This is a schematic diagram of a diversion network installed in the vent hole of the gas supply pipe joint.

[0026] Figure 8 Schematic diagram of a diverter net when it is installed in the vent hole of the gas supply pipe joint.

[0027] Figure 9 for Figure 7 Schematic diagram of the diversion network.

[0028] Figure 10 Schematic diagram of a flow diversion network provided in a connecting channel connected to the groove portion of a base block.

[0029] Figure 11 Schematic diagram of a flow diversion network when a flow diversion network is provided in a connecting channel connected to the groove portion of a base block.

[0030] Figure 12 for Figure 10 Schematic diagram of the diversion network.

[0031] Figure 13 、 Figure 14 This is a schematic diagram of the cracking of the welding part mentioned in the background technology.

[0032] In the figure: 1 vacuum pipe joint, 2 gas supply pipe joint, 3 cylindrical section, 4 conical section, 5 supporting structure, 6 vent hole, 7 structural groove, 8 diversion network, 81 first zone, 82 second zone, 83 third zone. DETAILED DESCRIPTION

[0033] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments so that those skilled in the art can implement the invention with reference to the description.

[0034] It should be understood that terms such as “having”, “including” and “comprising” used herein do not preclude the existence or addition of one or more other elements or combinations thereof.

[0035] like Figures 1-12 As shown, the present invention provides a gas path mechanism for a vapor deposition heating block, comprising: a supply end, an air pipe, a vacuum pipe joint 1 and a gas supply pipe joint 2, wherein the end of the vacuum pipe joint 1 and / or the gas supply pipe joint 2 is provided with a support structure 5, and when the vacuum pipe joint 1 and / or the gas supply pipe joint 2 is connected to the groove portion of the base block, the support structure 5 is provided at one end serving as the connecting portion, and the support structure 5 of the vacuum pipe joint 1 and / or the gas supply pipe joint 2 is welded to the groove portion of the base block.

[0036] The working principle and beneficial effects of the above technical solution are as follows: Through the above structural design, the present invention adopts a support structure 5 at the connection portion of the joint, which is specifically designed for welding to the groove portion of the base block. This avoids direct welding on the tube body, replacing the traditional direct connection between the tube body and the groove portion of the base block with an indirect connection, thereby reducing the occurrence of leakage. The provision of the support structure 5 also reduces the deformation of the "joint" when a pressure differential changes, preventing cracks in the weld due to micro-deformation.

[0037] Furthermore, the vacuum pipe joint 1 and / or the air supply pipe joint 2 is composed of a cylindrical section 3, a conical section 4 and the support structure 5, one end of the cylindrical section 3 is a joint end, which is connected to the air pipe, and the other end is connected to one end of the conical section 4, and the other end of the conical section 4 is connected to the support structure 5. The support structure 5 is located in the groove portion of the base block and is fixed in the groove portion of the base block by welding. The vacuum pipe joint 1 and / or the air supply pipe joint 2 is provided with a vent 6 that passes through the cylindrical section 3, the conical section 4 and the support structure 5.

[0038] The outer diameter of the cylindrical section 3 is r, and the outer diameters of the two ends of the conical section 4 are r and R respectively, where R>r. The end of the conical section 4 with an outer diameter of r is connected to the end of the cylindrical section 3, and the end with an outer diameter of R is connected to the support structure 5.

[0039] The support structure 5 is truncated cone-shaped, with outer diameters d and D at its ends, respectively, where D>d>R. The end of the support structure 5 with outer diameter d is connected to the end of the tapered section 4 with outer diameter R, while the end with outer diameter D is located on the inner end surface of the recessed portion of the base block. This allows the support structure 5 to protrude beyond the tapered section 4, making the vacuum pipe joint 1 and the gas supply pipe joint 2 more radially stable and reducing micro-deformation.

[0040] The groove portion of the base block is a tapered groove, the opening diameter of the groove portion of the base block is T, and the inner end diameter of the groove portion of the base block is t, wherein T>t≥D, such as Figure 1 shown.

[0041] Furthermore, the side wall of the support structure 5 is provided with a plurality of structural grooves 7 along the circumferential direction, such as Figure 5 As shown, adding the structural groove 7 will inevitably increase the number of welding points, but providing the structural groove 7 can increase the axial firmness of the vacuum pipe joint 1 and the gas supply pipe joint 2 and reduce the possibility of cracking caused by rotation.

[0042] Furthermore, the inner wall of the vent hole 6 of the air supply pipe joint 2 is provided with corrugations, thereby reducing the cyclone generated when the air supply pipe joint 2 enters the connection channel in the groove portion of the base block.

[0043] When the gas enters the connecting channel from the gas supply pipe joint 2, the cyclone will change the gas transportation direction, especially after entering the connecting channel. At this time, if the gas changes direction in the cyclonic state, it will cause the airflow entering the connecting channel to be turbulent.

[0044] Furthermore, after eliminating the cyclone as much as possible through the wave pattern, it is also necessary to guide the turned airflow to avoid turbulence as much as possible. In this embodiment, a diverter net 8 is provided in the vent hole 6 of the air supply pipe or in the connecting channel connected to the groove portion of the base block. The diverter net 8 is a circular grid structure, and the diverter net 8 consists of a first area 81, a second area 82 and a third area 83; when the airflow changes direction after passing through the diverter net 8, the turning path Y of the airflow flowing through the first area 81 is greater than the turning path Z of the airflow flowing through the second area 82, and the turning path Z of the airflow flowing through the second area 82 is greater than the turning path J of the airflow flowing through the third area 83, as shown in FIG. Figure 9 and Figure 12 The grid density of the first area 81 is smaller than that of the second area 82, and the grid density of the second area 82 is smaller than that of the third area 83. The grids are all hollow meshes to allow gas to flow, and the meshes can be rectangular, such as Figure 8 and Figure 11 As shown, it can also be a hexagon, triangle, circle, etc. By artificially partitioning the airflow without turning paths, the airflow with a large turning path flows through a small grid density, encounters small resistance, and has small flow losses. The airflow with a small turning path flows through a high grid density, encounters large resistance, and has large flow losses. As a result, after passing through the diversion network 8, the airflow can basically be transported in the same direction without generating cyclones. Moreover, because the flow velocity of the airflow at each position is basically consistent, turbulence can be avoided.

[0045] The gas distribution analysis method of the gas path mechanism of the vapor deposition heating block of the present invention comprises:

[0046] According to the gas path distribution of the vapor deposition heating block and the status of the vacuum pipe joint 1 and the gas supply pipe joint 2, the gas distribution is statistically analyzed; a thin film pressure sensor group is set around the vacuum negative pressure port of the vacuum pipe joint 1 to detect the pressure signals at multiple points around the vacuum pipe mouth; when vacuuming, the negative pressure adsorbs the substrate on the heating block. When the negative pressure acts, the substrate base attachment surface contacts the heating block adsorption surface and adheres to each other under the air pressure of the substrate non-attachment surface. Under actual process conditions, the substrate base attachment surface and the heating block adsorption surface are not completely attached. There are micro-gap areas and micro-gap areas that extend non-directionally from the edge of the substrate to the vacuum port. The non-directional extension of the micro-gap forms a small amount of leakage and local decompression. The external airflow flows into the vacuum tube through the non-directional extension of the micro-gap area. The negative pressure of the non-directional extension of the micro-gap area is less than the negative pressure of the fully attached non-leaking area, resulting in an uneven distribution of negative pressure; the thin film pressure sensor group detects the pressure signals at multiple points around the vacuum pipe mouth between the substrate base attachment surface and the heating block adsorption surface; according to the multi-point pressure signal, statistically analyze the pressure distribution of the vacuum adsorption base; according to the statistics of the force characteristics of the negative pressure non-uniform distribution base, set the upper limit pressure difference value of the negative pressure, and according to the pressure distribution of the vacuum adsorption base, control the non-uniform distribution difference of the negative pressure of the vacuum adsorption base to be less than the set upper limit pressure difference value of the negative pressure; set a nano-pressure sensor around the gas outlet of the gas supply pipe joint 2 to detect the gas pressure of the gas supply outlet and obtain multiple gas pressure signals of the gas supply outlet; according to the multiple gas pressure signals of the gas supply outlet, statistically analyze the gas distribution of the gas supply outlet and obtain the statistical characteristics of the gas distribution of the gas supply outlet; according to the statistical characteristics of the gas distribution of the gas supply outlet, analyze the distribution state of the gas on the surface of the heating block and construct a gas distribution analysis model; according to the gas distribution analysis model, analyze the dynamic difference of the gas pressure distribution of the gas supply pipe and gas path mechanism, keep the dynamic difference of the gas pressure distribution of the gas supply pipe and gas path mechanism not greater than the set upper limit of the gas pressure difference, and keep the gas pressure of the gas supply pipe and gas path mechanism uniformly distributed, and control the gas to be uniformly distributed on the surface of the heating block.

[0047] The working principle of the above technical solution: The gas distribution analysis method of the gas path mechanism of the vapor deposition heating block of the present invention comprises: due to the distribution characteristics of the gas path mechanism of the vapor deposition heating block, the vacuum pipe joint and the gas supply pipe joint are subjected to different pressure states; the vacuum negative pressure port of the vacuum pipe joint is subjected to vacuum negative pressure, and the gas supply pipe joint is subjected to gas positive pressure; statistical analysis of gas distribution; a thin film pressure sensor group is set around the vacuum negative pressure port of the vacuum pipe joint to detect pressure signals at multiple points around the vacuum pipe port; under the action of vacuum negative pressure; when vacuuming, the negative pressure action adsorbs the substrate on the heating block, and the negative pressure When in action, the base attachment surface of the substrate contacts the adsorption surface of the heating block and adheres to each other under the air pressure of the non-attached surface of the substrate. Under actual process conditions, the base attachment surface of the substrate and the adsorption surface of the heating block are not completely attached. There are micro-gap areas and micro-gap non-directionally extending micro-gap from the edge of the substrate to the vacuum port. The non-directional extension of the micro-gap causes a small amount of air leakage and local decompression. The external airflow flows into the vacuum tube through the non-directional extension of the micro-gap. The negative pressure of the non-directional extension of the micro-gap area is less than the negative pressure of the completely attached non-leakage area, resulting in non-uniform distribution of negative pressure; the thin film pressure sensor group detects the negative pressure between the base attachment surface of the substrate and the adsorption surface of the heating block. The multi-point pressure signals around the vacuum pipe mouth between the two are obtained; based on the multi-point pressure signals, the pressure distribution of the vacuum adsorption base is statistically analyzed; based on the statistics of the force characteristics of the negative pressure non-uniform distribution base, the upper limit pressure difference of the negative pressure is set, and based on the pressure distribution of the vacuum adsorption base, the difference of the negative pressure non-uniform distribution of the vacuum adsorption base is controlled to be less than the set upper limit pressure difference of the negative pressure; a nano-pressure sensor is set around the gas outlet of the gas supply pipe joint to detect the gas pressure of the gas supply outlet and obtain multiple gas pressure signals of the gas supply outlet; based on the multiple gas pressure signals of the gas supply outlet, the gas distribution of the gas supply outlet is statistically analyzed to obtain the gas supply pressure. Statistical characteristics of outlet gas distribution; based on the statistical characteristics of gas distribution at the gas supply outlet, analyze the gas distribution state on the surface of the heating block and construct a gas distribution analysis model; the gas distribution analysis model analyzes the gas distribution state on the surface of the heating block; based on the gas distribution analysis model, analyze the dynamic difference of gas pressure distribution of the gas supply pipe and gas supply path mechanism, maintain the dynamic difference of gas pressure distribution of the gas supply pipe and gas supply path mechanism not greater than the set upper limit of gas supply pressure difference, and maintain the gas pressure of the gas supply pipe and gas supply path mechanism uniformly distributed, and feed back to the gas supply end of the gas supply pipe and gas supply path mechanism to set a control device to control the gas to be uniformly distributed on the surface of the heating block.

[0048] The beneficial effects of the above technical solution: through the design of the above structure, the gas distribution analysis method of the gas path mechanism of the vapor deposition heating block of the present invention can, according to the distribution characteristics of the gas path mechanism of the vapor deposition heating block, count the pressure states of the vacuum pipe joint and the gas supply pipe joint; the vacuum negative pressure port of the vacuum pipe joint is subjected to vacuum negative pressure, and the gas supply pipe joint is subjected to gas positive pressure; count and analyze the gas distribution; set a thin film pressure sensor group around the vacuum negative pressure port of the vacuum pipe joint to detect the pressure signals at multiple points around the vacuum pipe mouth; under the action of vacuum negative pressure; when vacuuming, the negative pressure action adsorbs the substrate on the heating block, When negative pressure acts, the substrate base attachment surface contacts the heating block adsorption surface and adheres to each other under the air pressure of the substrate non-attachment surface. Under actual process conditions, the substrate base attachment surface and the heating block adsorption surface are not completely attached. There are micro-gap parts and micro-gap non-directionally extending from the edge of the substrate to the vacuum port. The non-directional extension of the micro-gap causes a small amount of air leakage and local decompression. The external air flows into the vacuum tube through the non-directional extension of the micro-gap. The negative pressure of the non-directional extension of the micro-gap part is less than the negative pressure of the completely attached non-leakage part, resulting in non-uniform distribution of negative pressure. The thin film pressure sensor group detects the vacuum between the substrate base attachment surface and the heating block adsorption surface. Multi-point pressure signals around the pipe mouth; based on the multi-point pressure signals, statistically analyze the pressure distribution of the vacuum adsorption base; based on the statistics of the force characteristics of the negative pressure non-uniform distribution base, set the upper limit pressure difference of the negative pressure, and based on the pressure distribution of the vacuum adsorption base, control the difference of the negative pressure non-uniform distribution of the vacuum adsorption base to be less than the set upper limit pressure difference of the negative pressure; set a nano-pressure sensor around the gas outlet of the gas supply pipe joint to detect the gas pressure of the gas supply outlet and obtain multiple gas pressure signals of the gas supply outlet; based on the multiple gas pressure signals of the gas supply outlet, statistically analyze the gas distribution of the gas supply outlet and obtain the statistical characteristics of the gas distribution of the gas supply outlet; based on According to the statistical characteristics of the gas distribution at the gas supply outlet, the gas distribution state on the surface of the heating block is analyzed, and a gas distribution analysis model is constructed; the gas distribution analysis model analyzes the gas distribution state on the surface of the heating block; according to the gas distribution analysis model, the dynamic difference of the gas pressure distribution of the gas supply pipe and the gas supply path mechanism is analyzed, and the dynamic difference of the gas pressure distribution of the gas supply pipe and the gas supply path mechanism is kept no greater than the set upper limit of the gas supply pressure difference, and the gas pressure of the gas supply pipe and the gas supply path mechanism is kept uniformly distributed, and the control device is set at the gas supply end of the gas supply pipe and the gas supply path mechanism to control the uniform distribution of the gas on the surface of the heating block; significantly improve the uniformity of gas distribution on the surface of the heating block.

[0049] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0050] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection, or communication; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0051] Although the embodiments of the connector present invention have been disclosed above, they are not limited to the applications listed in the description and the embodiments. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A gas path mechanism for a vapor deposition heating block, comprising: A supply end, an air pipe, a vacuum pipe joint (1) and an air supply pipe joint (2), characterized in that a support structure (5) is provided at the end of the vacuum pipe joint (1) and / or the air supply pipe joint (2); when the vacuum pipe joint (1) and / or the air supply pipe joint (2) are connected to the groove portion of the base block, the support structure (5) is provided at one end of the connection portion; and the support structure (5) of the vacuum pipe joint (1) and / or the air supply pipe joint (2) is welded to the groove portion of the base block.

2. The gas path mechanism for a vapor deposition heating block according to claim 1, characterized in that: The vacuum pipe joint (1) and / or the air supply pipe joint (2) is composed of a cylindrical section (3), a tapered section (4) and the support structure (5); one end of the cylindrical section (3) is a joint end connected to the air pipe, and the other end is connected to one end of the tapered section (4); the other end of the tapered section (4) is connected to the support structure (5); the support structure (5) is located in the groove portion of the base block and is fixed in the groove portion of the base block by welding; the vacuum pipe joint (1) and / or the air supply pipe joint (2) is provided with a vent hole (6) penetrating the cylindrical section (3), the tapered section (4) and the support structure (5).

3. The gas path mechanism for a vapor deposition heating block according to claim 2, characterized in that: The outer diameter of the cylindrical section (3) is r, and the outer diameters of the two ends of the conical section (4) are r and R respectively, wherein R>r. The end of the conical section (4) with an outer diameter of r is connected to the end of the cylindrical section (3), and the end with an outer diameter of R is connected to the supporting structure (5).

4. The gas path mechanism for a vapor deposition heating block according to claim 3, characterized in that: The support structure (5) is in the shape of a truncated cone, and the outer diameters of the two ends of the support structure (5) are d and D respectively, wherein D>d>R, the end of the support structure (5) with the outer diameter d is connected to the end of the tapered section (4) with the outer diameter R, and the end with the outer diameter D is located on the inner end surface of the groove portion of the base block.

5. The gas path mechanism for a vapor deposition heating block according to claim 4, characterized in that: The groove portion of the base block is a tapered groove, the opening diameter of the groove portion of the base block is T, and the inner end surface diameter of the groove portion of the base block is t, wherein T>t≥D.

6. The gas path mechanism for a vapor deposition heating block according to claim 4, characterized in that: The side wall of the support structure (5) is provided with a plurality of structural grooves (7) along the circumferential direction.

7. The gas path mechanism for a vapor deposition heating block according to claim 2, characterized in that: The inner wall of the vent hole (6) of the air supply pipe joint (2) is provided with wave patterns.

8. The gas path mechanism for a vapor deposition heating block according to claim 2, characterized in that: A diverter net (8) is provided in the vent hole (6) of the air supply pipe joint (2) or in the connecting channel connected to the groove portion of the base block. The diverter net (8) is a circular grid structure and is composed of a first area (81), a second area (82) and a third area (83). When the airflow changes direction after passing through the diverter net (8), the turning path Y of the airflow flowing through the first area (81) is greater than the turning path Z of the airflow flowing through the second area (82), and the turning path Z of the airflow flowing through the second area (82) is greater than the turning path J of the airflow flowing through the third area (83).

9. The gas path mechanism for a vapor deposition heating block according to claim 8, characterized in that: The grid density of the first area (81) is smaller than the grid density of the second area (82), and the grid density of the second area (82) is smaller than the grid density of the third area (83).

10. A method for analyzing gas distribution in a gas path mechanism of a vapor deposition heating block, characterized in that: include: According to the gas path mechanism distribution of the vapor deposition heating block and the states of the vacuum pipe joint (1) and the gas supply pipe joint (2), the gas distribution is statistically analyzed; a thin film pressure sensor group is set around the vacuum negative pressure port of the vacuum pipe joint (1) to detect the multi-point pressure signals around the vacuum pipe port; when the vacuum is drawn, the negative pressure adsorbs the substrate on the heating block. When the negative pressure acts, the substrate base attachment surface and the heating block adsorption surface are not completely attached, and there are micro-gap areas and micro-gap extending non-directionally from the edge of the substrate to the vacuum port, resulting in non-uniform distribution of negative pressure; the thin film pressure sensor group detects the multi-point pressure signals around the vacuum pipe port between the substrate base attachment surface and the heating block adsorption surface; according to the multi-point pressure signals, the pressure distribution of the vacuum adsorption substrate is statistically analyzed; according to the statistics of the force characteristics of the non-uniform distribution of negative pressure, the upper limit pressure difference value of the negative pressure is set, and the negative pressure difference value is calculated according to the pressure difference. The pressure distribution of the vacuum adsorption substrate is controlled to control the difference of the non-uniform distribution of the negative pressure of the vacuum adsorption substrate to be less than the set upper limit pressure difference of the negative pressure; a nanometer air pressure sensor is set around the air supply outlet of the air supply pipe joint (2) to detect the gas pressure of the air supply outlet and obtain a plurality of air supply outlet gas pressure signals; based on the plurality of air supply outlet gas pressure signals, the gas distribution of the air supply outlet is statistically analyzed to obtain the statistical characteristics of the gas distribution of the air supply outlet; based on the statistical characteristics of the gas distribution of the air supply outlet, the distribution state of the gas on the surface of the heating block is analyzed and a gas distribution analysis model is constructed; based on the gas distribution analysis model, the dynamic difference of the gas pressure distribution of the air supply pipe and the air supply path mechanism is analyzed to keep the dynamic difference of the gas pressure distribution of the air supply pipe and the air supply path mechanism not greater than the set upper limit of the gas pressure difference, and to keep the gas pressure of the air supply pipe and the air supply path mechanism uniformly distributed, thereby controlling the gas to be uniformly distributed on the surface of the heating block.

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