Device for dynamically controlling flow of electroplating liquid in multiple gears by utilizing Bernoulli principle

Abstract

The invention provides a device for multi-gear dynamic control of electroplating liquid flow by utilizing the Bernoulli principle, which comprises a multi-gear dynamic flow control assembly, and the multi-gear dynamic flow control assembly comprises a static pressure pipe, at least two groups of variable-diameter branch units arranged in parallel, converging pipes with the same number as the variable-diameter branch units, and a flow meter, each reducing branch unit comprises a plurality of first reducing branches, a plurality of small-pipe-diameter valves and a plurality of second reducing branches, the input ends of the first reducing branches are connected with the static pressure pipe, the output ends of the first reducing branches are connected with the input ends of the small-pipe-diameter valves, the output ends of the small-pipe-diameter valves are connected with the input ends of the second reducing branches, and the input ends of the second reducing branches are connected with the input ends of the first reducing branches. The output end of the second reducing branch is connected with the input end of the converging pipe, and the output end of the converging pipe is connected with the input end of the flowmeter. The invention relates to the field of TGV electroplating processes.

Description

Technical Field

[0001] The present invention relates to the field of TGV electroplating technology, and in particular to a device for dynamically controlling the flow rate of electroplating solution in multiple gears by utilizing the Bernoulli principle. Background Art

[0002] With the rapid development of high-density electronic packaging technology, the importance of TGV (Through Glass Via) electroplating processes in fields such as three-dimensional integration and advanced packaging is becoming increasingly prominent. The precision and dynamic adjustment capabilities of plating solution flow control directly impact coating uniformity, hole filling quality, and process stability. Traditional plating solution flow control often relies on a single throttle valve or direct pressure regulation with a variable frequency pump. However, these methods have significant limitations when dealing with complex operating conditions: the throttle valve has a limited adjustment range and is prone to energy loss, while frequent starting and stopping of the variable frequency pump leads to large pressure fluctuations and delayed response, making it difficult to meet the multi-speed, highly dynamic flow control requirements of the TGV process.

[0003] In the existing technology, although the multi-branch parallel scheme based on fixed pipe diameter can achieve segmented flow regulation, the flow coupling effect between branches is significant, the calculation of equivalent flow area is complex, and the actual regulation accuracy is difficult to guarantee. In addition, traditional variable diameter designs mostly focus on the optimization of one-way flow channels, lack of systematic consideration of dynamic pressure balance and energy conversion efficiency, resulting in poor flow control linearity and high energy consumption. The Bernoulli principle reveals the dynamic balance relationship between the flow velocity and static pressure of the fluid in the variable diameter pipe, which provides theoretical support for optimizing the flow control of the electroplating solution. However, how to effectively apply it to multi-speed dynamic regulation scenarios still requires solving key technical problems such as branch coordinated control, pressure matching and precise flow measurement.

[0004] Therefore, the inventors designed a device that uses the Bernoulli principle to dynamically control the flow rate of the electroplating solution in multiple gears to solve the above problems. Summary of the Invention

[0005] In response to the above-mentioned defects of the prior art, the present invention provides a device that uses the Bernoulli principle to dynamically control the flow rate of electroplating liquid in multiple gears, aiming to solve the problems in the prior art that the electroplating liquid flow control device is difficult to achieve multi-gear, high-precision dynamic adjustment and has high energy consumption.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a device for dynamically controlling the flow rate of electroplating liquid in multiple gears by using the Bernoulli principle, including a multi-gear dynamic flow control component, the multi-gear dynamic flow control component including a static pressure tube, at least two groups of variable diameter branch units arranged in parallel, a confluence pipe and a flow meter with the same number as the variable diameter branch units, each of the variable diameter branch units including multiple first variable diameter branches, multiple small diameter valves and multiple second variable diameter branches, the input end of the first variable diameter branch is connected to the static pressure tube, the output end is connected to the input end of the small diameter valve, the output end of the small diameter valve is connected to the input end of the second variable diameter branch, the output end of the second variable diameter branch is connected to the input end of the confluence pipe, and the output end of the confluence pipe is connected to the input end of the flow meter; wherein, the diameter of the first variable diameter branch decreases from the input end to the output end, and the diameter of the second variable diameter branch increases from the input end to the output end.

[0007] Based on the above, the beneficial effect of a device using the Bernoulli principle to dynamically control the flow rate of electroplating solution in multiple gears is to solve the problem that electroplating solution flow control devices in the prior art are difficult to achieve multi-gear, high-precision dynamic adjustment and high energy consumption; it is mainly reflected in:

[0008] 1. The present invention uses the variable diameter branch unit of the multi-speed dynamic flow control component to achieve multi-speed precise regulation of the electroplating solution flow rate using the Bernoulli principle, solving the problems of limited adjustment range and insufficient precision of traditional single valves or variable frequency pumps;

[0009] 2. The present invention optimizes the matching of fluid pressure and flow rate through the gradual diameter change structure of the first and second diameter-changing branches, reduces energy loss, and solves the problem of high energy consumption of the traditional throttle valve adjustment method;

[0010] 3. The present invention realizes rapid response and flexible flow switching through solenoid valve control of small-diameter valves and combined regulation of multiple branches, solving the problems of dynamic regulation lag and poor stability of traditional methods.

[0011] Furthermore, the device also includes a plating liquid storage component, which includes a plating liquid storage tank and a variable frequency liquid pump. The input end of the variable frequency liquid pump is connected to the plating liquid storage tank, and the output end of the variable frequency liquid pump is connected to the input end of the static pressure tube.

[0012] Based on the above, the beneficial effect of the electroplating liquid storage tank is to provide a stable supply source of electroplating liquid; the beneficial effect of the variable frequency liquid pump is to flexibly adjust the output pressure and flow according to system requirements, solving the problem of high energy consumption and slow adjustment response of traditional fixed speed pumps; the beneficial effect of the static pressure tube is to stabilize the fluid pressure and distribute it to each variable diameter branch, solving the problem of fluid pressure fluctuations affecting flow control accuracy.

[0013] Furthermore, a pressure sensor 1 and a filter are sequentially arranged between the variable frequency liquid medicine pump and the static pressure tube, and a pressure sensor 2 is arranged on the static pressure tube. The pressure difference data between the pressure sensor 1 and the pressure sensor 2 is used to control the output pressure of the variable frequency liquid medicine pump.

[0014] Based on the above, the beneficial effect of pressure sensor 1 is to monitor the pressure after the pump in real time, which solves the problem of lack of real-time feedback on the output pressure of the variable frequency liquid pump; the beneficial effect of the filter is to remove impurity particles in the electroplating solution; the beneficial effect of pressure sensor 2 is to detect the inlet pressure of the static pressure pipe, which solves the problem that the system pressure balance state cannot be accurately monitored.

[0015] Furthermore, the device also includes an electroplating operation component, which includes an upper jet disk and a lower jet disk, and the output ends of the two flow meters are respectively connected to the upper jet disk and the lower jet disk.

[0016] Based on the above, the beneficial effect of the dual flow meter configuration is to independently monitor the flow rates of the upper spray plate and the lower spray plate.

[0017] Furthermore, the diameter of the first reducing branch decreases from the input end to the output end to 1 / 2, 1 / 4, and 1 / 8 of the diameter of the static pressure pipe, and the diameter of the second reducing branch increases from the input end to the output end to 1 / 8, 1 / 4, and 1 / 2 of the diameter of the converging pipe, and the diameters of the static pressure pipe and the converging pipe are equal.

[0018] Based on the above, the beneficial effect of the decreasing diameter design of the first variable diameter branch is to gradually increase the fluid flow rate and reduce the static pressure; the beneficial effect of the increasing diameter design of the second variable diameter branch is to smoothly restore the fluid pressure and reduce the flow rate, solving the problem of unstable flow caused by fluid impact; the beneficial effect of the equal diameter design of the static pressure pipe and the converging pipe is to keep the system pressure reference consistent.

[0019] Furthermore, the small-diameter valve is a solenoid valve, the diameter of which matches the diameter of the connected variable-diameter branch.

[0020] Furthermore, the diameter change ratio of the first reducing branch and the second reducing branch is determined based on the Bernoulli principle, and the equivalent flow area is adjusted by controlling the opening and closing combination of several small-diameter valves in each group of the reducing branch units.

[0021] Based on the above, the beneficial effects achieved based on the Bernoulli principle (P + 1 / 2ρv2 + ρgh = C) can be specifically explained by the principles of fluid mechanics as follows:

[0022] 1. Through the design of the first variable diameter branch with a decreasing diameter, according to the continuity equation (Q = A·v), it can be seen that when the flow cross-sectional area (A) decreases step by step, the fluid flow velocity (v) will inevitably increase. According to the Bernoulli principle, the increase in flow velocity will cause the static pressure (P) at that location to decrease, forming a local low-pressure area, thus solving the problem that traditional constant-diameter pipelines cannot achieve fine flow control through pressure difference changes;

[0023] 2. Through the design of the second reducing branch with a progressively increasing diameter, the flow cross-sectional area (A) gradually expands, the flow velocity (v) decreases accordingly, and the static pressure (P) recovers accordingly. This design avoids the conversion of fluid kinetic energy (1 / 2ρv2) into turbulent loss due to sudden expansion at the outlet;

[0024] 3. By adjusting the equivalent flow area through the opening and closing combination of small-diameter valves and utilizing the conservation of total mechanical energy in the Bernoulli principle, the flow rate and pressure distribution of different branches can be dynamically adjusted. Multiple valve combinations can form a discrete equivalent cross-sectional area (Ae), thereby accurately controlling the flow rate (Qe = Ae·ve), solving the problem of poor linearity of single valve adjustment and the inability to achieve multi-speed flow output.

[0025] In summary, the synergistic effect of the variable diameter structure and the valve combination enables the system to achieve flow rate graded regulation through the conversion of static pressure (P) and dynamic pressure (1 / 2ρv2) while maintaining the conservation of total energy (C), while avoiding the mechanical energy loss of traditional throttle valves, and comprehensively solving the problem of high-precision and low-energy dynamic flow control.

[0026] Furthermore, the opening and closing combination of the small-diameter valve includes any combination of opening a single valve or multiple valves to form multi-speed flow control.

[0027] Furthermore, the device also includes a circulation reflux pipe, the input end of the circulation reflux pipe is connected to the output end of the electroplating operation component, and the output end of the circulation reflux pipe is connected to the electroplating liquid storage tank.

[0028] In order to more clearly illustrate the above features of the present invention and the objects to be achieved, the present invention will be further described below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 : is a stereogram of the present invention;

[0030] Figure 2 : is a connection diagram of the present invention.

[0031] Explanation of the accompanying numbers: 1-plating liquid storage assembly, 11-plating liquid storage tank, 12-variable frequency liquid pump, 13-pressure sensor 1, 14-filter, 15-circulation reflux pipe, 2-multi-speed dynamic flow control assembly, 21-static pressure pipe, 211-pressure sensor 2, 22-reducing branch unit, 221-first reducing branch, 222-small diameter valve, 223-second reducing branch, 23-merging pipe, 24-flow meter, 3-electroplating operation assembly, 31-upper spray plate, 32-lower spray plate. DETAILED DESCRIPTION

[0032] like Figure 1-Figure 2 As shown, a device for dynamically controlling the flow of electroplating liquid using the Bernoulli principle in multiple gears includes a multi-gear dynamic flow control component 2, the multi-gear dynamic flow control component 2 includes a static pressure pipe 21, at least two sets of variable diameter branch units 22 arranged in parallel, a confluence pipe 23 and a flow meter 24, the number of which is the same as the number of the variable diameter branch units 22, each of the variable diameter branch units 22 includes a plurality of first variable diameter branches 221, a plurality of small diameter valves 222 and a plurality of second variable diameter branches 223, the input end of the first variable diameter branch 221 is connected to the first variable diameter branch 223. It is connected to the static pressure pipe 21, and its output end is connected to the input end of the small-diameter valve 222. The output end of the small-diameter valve 222 is connected to the input end of the second reducing branch 223. The output end of the second reducing branch 223 is connected to the input end of the confluence pipe 23. The output end of the confluence pipe 23 is connected to the input end of the flowmeter 24. The diameter of the first reducing branch 221 decreases from the input end to the output end, and the diameter of the second reducing branch 223 increases from the input end to the output end.

[0033] The device also includes a plating liquid storage component 1, which includes a plating liquid storage tank 11 and a variable frequency liquid pump 12. The input end of the variable frequency liquid pump 12 is connected to the plating liquid storage tank 11, and the output end of the variable frequency liquid pump 12 is connected to the input end of the static pressure tube 21.

[0034] A pressure sensor 13 and a filter 14 are sequentially arranged between the variable frequency liquid medicine pump 12 and the static pressure tube 21. A pressure sensor 2 211 is arranged on the static pressure tube 21. The pressure difference data between the pressure sensor 13 and the pressure sensor 2 211 is used to control the output pressure of the variable frequency liquid medicine pump 12.

[0035] The device further includes an electroplating operation component 3 , which includes an upper spray plate 31 and a lower spray plate 32 . The output ends of the two flow meters 24 are connected to the upper spray plate 31 and the lower spray plate 32 , respectively.

[0036] The diameter of the first reducing branch 221 decreases from the input end to the output end to 1 / 2, 1 / 4, and 1 / 8 of the diameter of the static pressure pipe 21, and the diameter of the second reducing branch 223 increases from the input end to the output end to 1 / 8, 1 / 4, and 1 / 2 of the diameter of the converging pipe 23. The diameters of the static pressure pipe 21 and the converging pipe 23 are equal. Each group of the reducing branch units 22 includes three first reducing branches 221, three small-diameter valves 222, and three second reducing branches 223.

[0037] The small-diameter valve 222 is a solenoid valve, and its diameter matches the diameter of the connected reducing branch.

[0038] The diameter change ratio of the first reducing branch 221 and the second reducing branch 223 is determined based on the Bernoulli principle, and the equivalent flow area is adjusted by controlling the opening and closing combination of several small-diameter valves 222 in each group of the reducing branch units 22.

[0039] The opening and closing combination of the small-diameter valve 222 includes any combination of opening a single valve or multiple valves to form multi-speed flow control.

[0040] The device further includes a circulation reflux pipe 15 , the input end of which is connected to the output end of the electroplating operation component 3 , and the output end of which is connected to the electroplating solution storage tank 11 .

[0041] In summary, the specific embodiment of the present invention is as follows: the plating liquid in the plating liquid storage tank 11 is pressurized and delivered by the variable frequency liquid pump 12. The pumping pressure is monitored in real time by the pressure sensor 13. After purification by the filter 14, it enters the static pressure pipe 21. The pressure sensor 2 211 provided on the static pressure pipe 21 forms a pressure differential closed loop with the pressure sensor 13, dynamically adjusting the output of the variable frequency liquid pump 12 to ensure that the system pressure is stable at the set value.

[0042] After the electroplating liquid enters the multi-speed dynamic flow control assembly 2, it is diverted to the parallel variable diameter branch unit 22. The first variable diameter branch 221 adopts a design with decreasing diameter to gradually increase the flow rate and form a stepped static pressure drop. The small diameter valve 222 selectively opens branches of different diameters according to the control command, forming a variety of equivalent flow areas through the valve combination. The second variable diameter branch 223 adopts a design with increasing diameter to gradually convert the kinetic energy of the fluid into static pressure energy. After the pressure of the fluid in each branch is balanced in the confluence pipe 23, it is detected in real time by the flow meter 24. By adjusting the opening and closing combination of the valves of different branches, a geometric series multi-speed adjustment can be achieved.

[0043] The regulated electroplating solution is delivered to the upper jet plate 31 and the lower jet plate 32 in two ways, forming a stable bidirectional jet flow field. By independently monitoring the data of the two flow meters 24, the valve combination of the corresponding branches can be adjusted in real time to ensure uniform electroplating deposition on the workpiece surface. The used electroplating solution is returned to the electroplating solution storage tank 11 through the circulation reflux pipe 15, completing the closed-loop circulation.

[0044] This device realizes the efficient conversion and precise distribution of pressure energy and kinetic energy through the Bernoulli principle. With the help of intelligent valve control, flow control is achieved under the premise of maintaining the conservation of total mechanical energy. The variable diameter branch unit 22 realizes the directional conversion of energy form. The combination of several small-diameter valves 222 provides a digital adjustment method. The closed-loop feedback system composed of pressure sensor 13 and pressure sensor 211 ensures dynamic adjustment stability, thereby solving the problems of insufficient adjustment accuracy and high energy consumption of traditional electroplating solution flow control devices.

[0045] The above description is only the optimal solution embodiment of the present invention and is not intended to limit the present invention. Various modifications or substitutions made by those skilled in the art without departing from the essence and protection scope of the present invention should also be within the protection scope of the present invention.

Claims

1. A device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle, characterized in that: The invention comprises a multi-speed dynamic flow control component (2), wherein the multi-speed dynamic flow control component (2) comprises a static pressure pipe (21), at least two sets of variable diameter branch units (22) arranged in parallel, a converging pipe (23) and a flow meter (24) having the same number as the variable diameter branch units (22), each of the variable diameter branch units (22) comprises a plurality of first variable diameter branches (221), a plurality of small diameter valves (222) and a plurality of second variable diameter branches (223), and the input end of the first variable diameter branch (221) is connected to the static pressure pipe (21). The output end is connected to the input end of the small-diameter valve (222), the output end of the small-diameter valve (222) is connected to the input end of the second reducing branch (223), the output end of the second reducing branch (223) is connected to the input end of the confluence pipe (23), and the output end of the confluence pipe (23) is connected to the input end of the flow meter (24); wherein the diameter of the first reducing branch (221) decreases from the input end to the output end, and the diameter of the second reducing branch (223) increases from the input end to the output end.

2. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 1, characterized in that: The device further comprises a plating liquid storage assembly (1), the plating liquid storage assembly (1) comprising a plating liquid storage tank (11) and a variable frequency liquid pump (12), the input end of the variable frequency liquid pump (12) being connected to the plating liquid storage tank (11), and the output end of the variable frequency liquid pump (12) being connected to the input end of the static pressure pipe (21).

3. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 2, characterized in that: A pressure sensor 1 (13) and a filter (14) are sequentially arranged between the variable frequency liquid medicine pump (12) and the static pressure pipe (21), and a pressure sensor 2 (211) is arranged on the static pressure pipe (21). The pressure difference data between the pressure sensor 1 (13) and the pressure sensor 2 (211) is used to control the output pressure of the variable frequency liquid medicine pump (12).

4. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 1, characterized in that: The device further comprises an electroplating operation assembly (3), wherein the electroplating operation assembly (3) comprises an upper jet disk (31) and a lower jet disk (32), and the output ends of the two flow meters (24) are respectively connected to the upper jet disk (31) and the lower jet disk (32).

5. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 1, characterized in that: The diameter of the first diameter-reducing branch (221) decreases from the input end to the output end to 1 / 2, 1 / 4, and 1 / 8 of the diameter of the static pressure pipe (21), and the diameter of the second diameter-reducing branch (223) increases from the input end to the output end to 1 / 8, 1 / 4, and 1 / 2 of the diameter of the converging pipe (23), respectively. The diameters of the static pressure pipe (21) and the converging pipe (23) are equal.

6. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 5, characterized in that: The small-diameter valve (222) is a solenoid valve, the diameter of which matches the diameter of the connected variable-diameter branch.

7. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 1, characterized in that: The diameter change ratio of the first variable diameter branch (221) and the second variable diameter branch (223) is determined based on the Bernoulli principle, and the equivalent flow area is adjusted by controlling the opening and closing combination of a plurality of small diameter valves (222) in each group of the variable diameter branch units (22).

8. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 7, characterized in that: The opening and closing combination of the small-diameter valve (222) includes any combination of opening a single valve or multiple valves to form multi-speed flow control.

9. The device for dynamically controlling the flow rate of electroplating solution using the Bernoulli principle in multiple stages according to claim 4, characterized in that: The device further comprises a circulation reflux pipe (15), the input end of the circulation reflux pipe (15) being connected to the output end of the electroplating operation component (3), and the output end of the circulation reflux pipe (15) being connected to the electroplating liquid storage tank (11).

Images