Circulating cooling water temperature control system for intraocular lens growing furnace

Abstract

The invention discloses a circulating cooling water temperature control system for an artificial crystal growing furnace, and relates to the technical field of crystal growing furnace accessories, the circulating cooling water temperature control system comprises a base, a water pump A is fixedly arranged at the top of the base, and the input end of the water pump A is connected with a circulating water pool for storing conventional cooling water; the output end of the water pump A is connected with a water segregator A fixedly arranged on the top of the base, the first output end of the water segregator A is connected with a refrigerator, the output end of the refrigerator is connected with a heat preservation water tank, the output end of the heat preservation water tank is connected with a water pump B, and the output end of the water pump B is connected with a water segregator B. The refrigerating machine can be independent of the system, then the refrigerating machine can be stopped after sufficient low-temperature cooling water is prepared, restarting is not needed in the production process, the problems that the service life is shortened and the fault probability is increased due to repeated starting and stopping are solved, the stability of the system is guaranteed, and meanwhile the use energy consumption can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal growth furnace accessories, and in particular to a circulating cooling water temperature control system for an artificial crystal growth furnace. Background Art

[0002] Single crystal silicon is a material that must be used in the production of chips. The crystal growth furnace for producing single crystal silicon is also called a single crystal furnace. In the process of manufacturing single crystal silicon by the Czochralski method, the melting point of silicon is about 1414°C and the melting point of stainless steel is about 1100°C. Therefore, the single crystal furnace needs to use a cooling water circulation system to internally cool the furnace barrel and furnace cover during use. The cooling water temperature is usually around 25°C.

[0003] According to the search, the invention patent with application publication number CN117721535A discloses a single crystal furnace cooling water circulation system, which includes a conventional cooling water circulation system. A chilled water circulation system is additionally provided on the outside of the conventional cooling water circulation system. In the single crystal furnace cooling water circulation system, a chilled water circulation system is designed that can independently control the temperature of the single crystal furnace cover circulating cooling water. By lowering the temperature of the furnace cover circulating cooling water, the cooling and heat dissipation of the crystal surface can be enhanced, thereby achieving the purpose of providing a larger longitudinal temperature gradient for the growth of silicon single crystals.

[0004] However, when the above system is actually used, since the cooling water in the freezing water pool is in a continuous circulation state, the water temperature in the freezing water pool will continue to rise. In order to ensure that the output cooling water is in a predetermined temperature range, the freezer needs to be frequently started and stopped during the temperature stabilization stage after the polysiliconization is completed. Frequent start and stop operations will not only seriously shorten the service life of the freezer, but also increase the probability of failure of the freezer, thereby reducing the stability of the cooling system.

[0005] In addition, due to the different return water temperatures, the above system must have two water pools: a raw water pool and a chilled water pool, and cannot use a single water pool for water circulation operation. The actual implementation requires a large area, which is not conducive to low-cost implementation.

[0006] Therefore, it is necessary to invent a circulating cooling water temperature control system for an artificial crystal growth furnace to solve the above problems. Summary of the Invention

[0007] The object of the present invention is to provide a circulating cooling water temperature control system for an artificial crystal growth furnace, which uses an insulated water tank to separately store the low-temperature cooling water produced by the freezer so that the freezer can be independent of the system, and then after a sufficient amount of low-temperature cooling water is produced, the freezer can be shut down, and there is no need to start it again during the production process, which avoids the problem of repeated start and stop, shortening the service life, and increasing the probability of failure, ensuring the stability of the system, and reducing energy consumption, so as to solve the problem raised in the above background technology that the cooling water in the freezing water pool is continuously in a circulating state, which causes the water temperature in the freezing water pool to continue to rise. In order to ensure that the output cooling water is in a predetermined temperature range, the freezer needs to be started and stopped frequently in the temperature stabilization stage after the polysiliconization is completed. Frequent start and stop operations will not only seriously shorten the service life of the freezer, but also increase the probability of failure of the freezer, thereby reducing the stability of the cooling system.

[0008] To achieve the above objectives, the present invention provides the following technical solutions: a circulating cooling water temperature control system for an artificial crystal growth furnace, comprising a base, a water pump A fixedly provided on the top of the base, an input end of the water pump A connected to a circulating water pool for storing conventional cooling water, an output end of the water pump A connected to a water distributor A fixedly provided on the top of the base, a first output end of the water distributor A connected to a refrigerator, an output end of the refrigerator connected to an insulated water tank, an output end of the insulated water tank connected to a water pump B, an output end of the water pump B connected to the water distributor B, a first output end of the water distributor B provided with a first one-way valve and connected to a merging mechanism, a second output end of the water distributor A and a second output end of the water distributor B commonly connected to a merging pipe, and both input ends of the merging pipe are provided with a second one-way valve; The third output end of the water distributor A is connected to the furnace cooling system, and the output end of the furnace cooling system and the output end of the merging mechanism are both connected to the circulating water pool. The output end of the merging pipe is connected to the furnace cover cooling system, and the output end of the furnace cover cooling system is connected to the merging mechanism.

[0009] Preferably, water temperature sensors for monitoring water temperature are provided at the input and output ends of the circulating water pool, a liquid level sensor is provided inside the insulated water tank, and the water temperature sensor, liquid level sensor and freezer are all connected to the control center.

[0010] Preferably, the merging mechanism includes a merging water tank connected to the first output end of the water distributor B. The merging water tank is fixedly arranged on the top of the base, and an annular groove is provided at the bottom of the inner cavity of the merging water tank.

[0011] Preferably, a furnace cover cooling system output end connecting pipe for connecting to the furnace cover cooling system output end is fixedly provided through the top back side of the combined water tank, and a circulating water pool input end connecting pipe for connecting to the circulating water pool is fixedly provided through the top front side of the combined water tank.

[0012] Preferably, it also includes an anti-stratification component, an additional component A and an additional component B arranged inside the combined water tank.

[0013] Preferably, the anti-stratification component includes a motor fixedly arranged on the top of the combined water tank, the output shaft of the motor extends to the top of the inner cavity of the combined water tank, the bottom end of the output shaft of the motor is fixedly connected to a turntable, and a stirring shaft A is provided through the left side of the bottom of the turntable, and the stirring shaft A is rotatably connected to the turntable through a bearing. A plurality of longitudinal limiting grooves are provided on both sides of the stirring shaft A, and the bottom end of the stirring shaft A is fixedly provided with an annular reinforcement plate which is rotatably nested in the inner side of the annular groove through a bearing.

[0014] Preferably, the additional component A includes a gear fixedly sleeved on the top outer side of the stirring shaft A.

[0015] Preferably, the additional component A also includes an annular sealing plate that is rotatably sleeved on the outside of the turntable through a bearing, the annular sealing plate is fixedly connected to the inner wall of the combined water tank, and a plurality of L-shaped fixing arms are evenly fixed on the top of the annular sealing plate, and a gear ring that meshes with the gear is commonly fixed on the top of the plurality of L-shaped fixing arms.

[0016] Preferably, the additional component B includes a lifting shaft that is slidably nested in the vertical direction inside the stirring shaft A, and multiple stirring shafts B are fixedly arranged on both sides of the lifting shaft, which are respectively slidably arranged in the vertical direction on the inside of multiple longitudinal limiting grooves. A lifting pressure plate is fixedly sleeved on the outside of any one of the stirring shafts B, and a fixed seat is fixedly provided at the top of the lifting shaft. The bottom end of the fixed seat is fixedly connected to the top of the stirring shaft A with a reset spring sleeved on the outside of the lifting shaft, and a rolling steel ball is rotatably nested at the top of the fixed seat.

[0017] Preferably, the additional component B further includes a blocking ring fixedly arranged on the top of the inner cavity of the combined water tank, and a plurality of guide protrusions are evenly fixedly arranged on the bottom of the blocking ring.

[0018] Technical effects and advantages of the present invention: The present invention utilizes an insulated water tank to separately store the low-temperature cooling water produced by the freezer, so that the freezer can be independent of the system. After a sufficient amount of low-temperature cooling water is produced, the freezer can be shut down and does not need to be restarted during the production process. This avoids the problem of repeated start and stop that shortens the service life and increases the probability of failure, ensures the stability of the system, and can also reduce energy consumption.

[0019] The present invention arranges an anti-stratification component, an additional component A and an additional component B inside the merging mechanism so that the low-temperature cooling water and the heat exchange cooling water inside the merging mechanism can be quickly mixed under the action of a combination of multiple mixing methods, so as to avoid excessive fluctuations in water temperature in the circulating water pool when the water is returned to the circulating water pool due to stratification, and thus the conventional cooling water in the circulating water pool cannot meet the cooling needs of the furnace body. On this basis, only one circulating water pool needs to be set up to achieve stable cooling of the furnace body and the furnace cover at different stages. The required area for actual implementation is small, which is convenient and low-cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional front view structure of the present invention; Figure 2 It is a schematic diagram of the three-dimensional rear view structure of the present invention; Figure 3 This is a schematic diagram of the internal structure of the combined water tank of the present invention; Figure 4 This is a schematic structural diagram of the merging mechanism of the present invention; Figure 5 This is a schematic diagram of the partial structure of the anti-delamination component of the present invention; Figure 6 This is a schematic diagram of the local structure of the additional component A of the present invention; Figure 7 This is a schematic diagram of the local structure of the added component B of the present invention; Figure 8 Schematic diagram of the blocking ring and guide protrusion structure of the present invention; Figure 9 This is a schematic diagram of the principle of Example 5 of the present invention.

[0021] In the figure: 11. Base; 12. Water pump A; 13. Water distributor A; 14. Converging pipe; 15. Refrigerator; 16. Insulated water tank; 17. Water pump B; 18. Water distributor B; 2. Converging mechanism; 21. Converging water tank; 22. Annular groove; 23. Connecting pipe at output end of furnace cover cooling system; 24. Connecting pipe at input end of circulating water pool; 3. Anti-stratification component; 31. Motor; 32. Turntable; 33. Stirring shaft A; 34. Longitudinal limit slide; 35. Annular reinforcement plate; 4. Additional component A; 41. Gear; 42. Annular sealing plate; 43. L-shaped fixed arm; 44. Gear ring; 45. Lifting shaft; 46. Stirring shaft B; 47. Lifting and lowering plate; 5. Additional component B; 51. Fixed seat; 52. Return spring; 53. Rolling steel ball; 54. Blocking ring; 55. Guide protrusion. DETAILED DESCRIPTION

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention. Example 1

[0023] The present invention provides Figures 1-8 The circulating cooling water temperature control system for an artificial crystal growth furnace shown in the figure includes a base 11, a water pump A12 is fixedly provided on the top of the base 11, the input end of the water pump A12 is connected to a circulating water pool for storing conventional cooling water, the output end of the water pump A12 is connected to a water distributor A13 fixedly provided on the top of the base 11, the first output end of the water distributor A13 is connected to a refrigerator 15, the output end of the refrigerator 15 is connected to an insulated water tank 16, the insulated water tank 16 is provided with a liquid level sensor, the output end of the insulated water tank 16 is connected to a water pump B17, the output end of the water pump B17 is connected to a water distributor B18, the first output end of the water distributor B18 is provided with a first one-way valve and is connected to a merging mechanism 2, the distributor The second output end of the water device A13 and the second output end of the water distributor B18 are commonly connected to the converging pipe 14. The two input ends of the converging pipe 14 are both provided with a second one-way valve. The input end, output end, two input ends of the converging pipe 14 and the output end of the converging pipe 14 of the circulating water pool are all provided with water temperature sensors for monitoring the water temperature. The water temperature sensor, liquid level sensor and freezer 15 are all connected to the control center so that the control center can receive the detection data of the water temperature sensor and the liquid level sensor in real time to determine the water temperature at each position of the system, so as to adjust the output ratio of the water distributor A13 and the water distributor B18. At the same time, the water level inside the insulated water tank 16 can also be known to determine whether the low-temperature cooling water inside the insulated water tank 16 is sufficient.

[0024] It is known that a water temperature sensor is a device used to measure the temperature of a liquid. It senses temperature changes and converts them into electrical signals to provide temperature data for control systems, display devices or other related devices. It is widely used in fields such as automobiles, home appliances, and industrial equipment. Technicians in this field can choose the model according to actual needs, so this application does not go into details about its specific model.

[0025] Similarly, a liquid level sensor is a pressure sensor that measures liquid level. It is mainly used to detect the position or liquid level height of the liquid. It is widely used in many fields such as industry, agriculture, and medical care. Technical personnel in this field can also choose the model according to actual needs. Therefore, this application does not go into details about its specific model.

[0026] The third output end of the water distributor A13 is connected to the furnace body cooling system, and the output end of the furnace body cooling system and the output end of the merging mechanism 2 are both connected to the circulating water pool. The output end of the merging pipe 14 is connected to the furnace cover cooling system, and the output end of the furnace cover cooling system is connected to the merging mechanism 2. It should be noted that the furnace body cooling system and the furnace cover cooling system are respectively used to cool the furnace body and the furnace cover of the single crystal furnace, which belong to the solutions already disclosed in the prior art and are not the necessary technical features of this application. Therefore, this application does not elaborate on the specific composition and principles of the furnace body cooling system and the furnace cover cooling system.

[0027] like Figure 3 and 4 As shown, the converging mechanism 2 includes a converging water tank 21 connected to the first output end of the water distributor B18. The converging water tank 21 is fixedly arranged on the top of the base 11. An annular groove 22 is provided at the bottom of the inner cavity of the converging water tank 21. A furnace cover cooling system output end connecting pipe 23 for connecting to the furnace cover cooling system output end is fixedly provided through the top of the back side of the converging water tank 21. A circulating water pool input end connecting pipe 24 for connecting to the circulating water pool is fixedly provided through the top of the front side of the converging water tank 21.

[0028] The working principle of the technical solution provided in this embodiment is as follows: During the polysiliconization stage, the water pump A12 draws conventional cooling water from the circulating water pool and then inputs it into the water distributor A13. The water distributor A13 proportionally inputs the conventional cooling water into the furnace cooling system, the confluence pipe 14, and the refrigerator 15. The confluence pipe 14 then inputs the conventional cooling water into the furnace cover cooling system, thereby cooling the furnace body and the furnace cover respectively. The conventional cooling water input into the refrigerator 15 is cooled by the refrigerator 15, and the cooled low-temperature cooling water is stored in the thermal insulation water tank 16. During the temperature stabilization stage after the material is quenched, the water pump B17 starts to pump the low-temperature cooling water inside the insulation water tank 16 and input it into the water distributor B18 for distribution. According to the detection results of the water temperature sensors at the two input ends of the merging pipe 14, the water distributor B18 inputs the low-temperature cooling water into the merging pipe 14 and the merging water tank 21 in proportion. The low-temperature cooling water input into the merging pipe 14 is mixed with the conventional cooling water to form special cooling water for cooling the furnace cover during the temperature stabilization stage. The special cooling water is input into the furnace cover cooling system under the action of the merging pipe 14. After heat exchange, the special cooling water The cooling water is input into the combined water tank 21 through the connecting pipe 23 at the output end of the furnace cover cooling system, and is mixed with the low-temperature cooling water inside the combined water tank 21. The temperature of the mixed cooling water is the same as the temperature of the conventional cooling water in the circulating water pool. At this time, when the mixed cooling water is returned to the circulating water pool through the connecting pipe 24 at the input end of the circulating water pool, the water temperature inside the circulating water pool remains unchanged, so as to avoid affecting the stable cooling of the furnace body due to the change of the water temperature inside the circulating water pool. On this basis, only one circulating water pool needs to be set up to achieve stable cooling of the furnace body and the furnace cover at different stages. The required area for actual implementation is small, which is convenient for low-cost implementation.

[0029] It should also be noted that the water distributor A13 and the water distributor B18 are both water distributors with flow rate regulation function, so that conventional cooling water and low-temperature cooling water can be distributed according to actual temperature requirements.

[0030] At the same time, based on the above content, after ensuring that there is sufficient low-temperature cooling water inside the insulated water tank 16, the freezer 15 can be shut down, and there is no need to start it again during this production process. This avoids repeated start and stop, which shortens the service life and increases the probability of failure, ensures the stability of the system, and also reduces energy consumption. Example 2

[0031] like Figure 3 、 Figure 5-7 As shown, on the basis of the above embodiment, a circulating cooling water temperature control system for an artificial crystal growth furnace also includes an anti-stratification component 3 arranged inside the confluent water tank 21, and the anti-stratification component 3 includes a motor 31 fixedly arranged on the top of the confluent water tank 21, and the output shaft of the motor 31 extends to the top of the inner cavity of the confluent water tank 21. The bottom end of the output shaft of the motor 31 is fixedly connected to a turntable 32, and a stirring shaft A33 is provided through the left side of the bottom of the turntable 32. The stirring shaft A33 is rotatably connected to the turntable 32 through a bearing. A plurality of longitudinal limiting grooves 34 are provided on both sides of the stirring shaft A33, and an annular reinforcement plate 35 is fixedly provided on the bottom end of the stirring shaft A33 and is rotatably nested in the inner side of the annular groove 22 through a bearing.

[0032] The working principle of the technical solution provided in this embodiment is as follows: When the low-temperature cooling water and the heat exchange cooling water output by the furnace cover cooling system are input into the combined water tank 21, in order to avoid the stratification of hot and cold water, the motor 31 drives the turntable 32 to rotate through its output shaft. When the turntable 32 rotates, it drives the stirring shaft A33 to revolve around the output shaft of the motor 31 as the axis, thereby stirring and mixing the low-temperature cooling water and the heat exchange cooling water inside the combined water tank 21. Example 3

[0033] like Figure 5-7 As shown, based on the above embodiment, a circulating cooling water temperature control system for an artificial crystal growth furnace also includes an additional component A4 arranged inside the confluent water tank 21, the additional component A4 includes a gear 41 fixedly sleeved on the top outside the stirring shaft A33, and the additional component A4 also includes an annular sealing plate 42 rotatably sleeved on the outside of the turntable 32 through a bearing, the annular sealing plate 42 is fixedly connected to the inner wall of the confluent water tank 21, and a plurality of L-shaped fixed arms 43 are evenly fixed on the top of the annular sealing plate 42, and a gear ring 44 meshing with the gear 41 is commonly fixed on the top of the plurality of L-shaped fixed arms 43.

[0034] The working principle of the technical solution provided in this embodiment is as follows: During the revolution of the stirring shaft A33, the gear ring 44 drives the lifting shaft 45 to rotate through the gear 41. When the lifting shaft 45 rotates, it drives multiple lifting and pressing plates 47 to rotate with the lifting shaft 45 as the axis through multiple stirring shafts B46, thereby enhancing the stirring effect on the water body and accelerating the mixing speed of the water body. Example 4

[0035] like Figure 5 、 Figure 7-8 As shown, on the basis of the above embodiments, a circulating cooling water temperature control system for an artificial crystal growth furnace also includes an additional component B5 arranged inside the confluent water tank 21, and the additional component B5 includes a lifting shaft 45 that is slidably nested in the stirring shaft A33 along the vertical direction, and a plurality of stirring shafts B46 are fixedly arranged on both sides of the lifting shaft 45, which are respectively slidably arranged on the inner sides of a plurality of longitudinal limiting grooves 34 along the vertical direction. A lifting pressure plate 47 is fixedly sleeved on the outer side of any stirring shaft B46, and a fixed seat 51 is fixed on the top of the lifting shaft 45. The bottom end of the fixed seat 51 is fixedly connected to the top of the stirring shaft A33 with a reset spring 52 sleeved on the outer side of the lifting shaft 45, and a rolling steel ball 53 is rotatably nested on the top of the fixed seat 51. The additional component B5 also includes a blocking ring 54 fixedly arranged on the top of the inner cavity of the confluent water tank 21, and a plurality of guide protrusions 55 are evenly fixed on the bottom of the blocking ring 54.

[0036] The working principle of the technical solution provided in this embodiment is as follows: During the revolution and rotation of the lifting shaft 45, the rolling steel ball 53 is driven by the fixed seat 51 to continuously rotate under the blocking ring 54. When the rolling steel ball 53 passes the guide protrusion 55, the guide protrusion 55 pushes the fixed seat 51 downward through the rolling steel ball 53, thereby causing the fixed seat 51 to compress the reset spring 52, and at the same time drive the lifting shaft 45 to move downward inside the stirring shaft A33. When the lifting shaft 45 moves downward, it drives multiple lifting and pressure plates 47 to move downward through multiple stirring shafts B46, thereby causing the lifting and pressure plates 47 to press down the water body. Similarly, when the rolling steel ball 53 passes over the guide protrusion 55, the compressed reset spring 52 drives the fixed seat 51 to move up and reset. When the fixed seat 51 moves upward, the lifting shaft 45 drives multiple lifting and pressure plates 47 to lift the water body through multiple stirring shafts B46, thereby further enhancing the mixing speed of the water body. Example 5

[0037] Compared with Examples 1-4, this embodiment provides a new circulating cooling water temperature control system, which is larger in size and suitable for large-scale production.

[0038] This embodiment utilizes a plate heat exchanger, a cooling tower, a chiller, and multiple water temperature sensors to precisely regulate the water temperature in the water tank, and a circulating water pump, a pressure gauge, and two three-way regulating valves to precisely regulate the circulating water pressure and flow rate. These hardware and software components together form a circulating cooling water temperature control system.

[0039] It should be noted that the signal connection ends of the multiple water temperature sensors and the two three-way regulating valves are commonly connected to the controller.

[0040] Circulating water temperature control method: First, the plate heat exchanger is used to perform preliminary temperature exchange through the cooling tower circulation water circuit to control the water temperature within a deviation range of 1-2°C from the set water temperature. Then, the water temperature is precisely adjusted through the combined action of the chiller equipment and the plate heat exchanger equipment to control the water temperature within the range of ±0.1°C from the set water temperature, and finally returns to the water tank.

[0041] Real-time temperature detection: High-precision temperature sensors are installed at key locations of the circulating cooling water to collect water temperature data in real time and transmit the data to the controller. The controller controls the output power of the chiller and cooling tower, thereby controlling the degree of water temperature regulation.

[0042] Precise control method: The controller uses advanced control software PID algorithm. PID is a proportional-integral-differential algorithm. According to the difference between the set water temperature and the actual detected water supply temperature, the controller calculates the degree to which the three-way regulating valve needs to be adjusted to open, thereby accurately controlling the water temperature in the water tank.

[0043] Feedback and optimization: The controller continuously compares and analyzes the actual water temperature data with the set water temperature data. The controller adjusts the system based on the feedback results, thereby achieving continuous dynamic repair and adjustment of the water temperature to ensure that the water temperature always remains within the set range with high precision.

[0044] Compared with the existing technology, this embodiment first uses a cooling tower for preliminary temperature control to significantly reduce energy consumption, and then uses a chiller to perform precise temperature control, reducing the difficulty of temperature control and improving temperature control accuracy. The cooling tower and chiller water channels are not in direct contact with the crystal growth furnace. The use of a plate heat exchanger for heat exchange can ensure that the main water is not contaminated, reduce damage to the crystal growth furnace equipment, and ensure that the temperature of the circulating cooling water in the crystal growth furnace is stable within the range of ±0.1°C and the water flow is stable, thereby ensuring the stability of the circulating water in the crystal growth furnace.

[0045] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A circulating cooling water temperature control system for an artificial crystal growth furnace, characterized by: The invention comprises a base (11), a water pump A (12) is fixedly provided on the top of the base (11), an input end of the water pump A (12) is connected to a circulating water pool for storing conventional cooling water, an output end of the water pump A (12) is connected to a water distributor A (13) fixedly provided on the top of the base (11), a first output end of the water distributor A (13) is connected to a refrigerator (15), an output end of the refrigerator (15) is connected to an insulated water tank (16), an output end of the insulated water tank (16) is connected to a water pump B (17), an output end of the water pump B (17) is connected to a water distributor B (18), a first one-way valve is provided on the first output end of the water distributor B (18) and a merging mechanism (2) is connected thereto, a second output end of the water distributor A (13) and a second output end of the water distributor B (18) are commonly connected to a merging pipe (14), and both input ends of the merging pipe (14) are provided with a second one-way valve; The third output end of the water distributor A (13) is connected to the furnace cooling system, and the output end of the furnace cooling system and the output end of the merging mechanism (2) are both connected to the circulating water pool. The output end of the merging pipe (14) is connected to the furnace cover cooling system, and the output end of the furnace cover cooling system is connected to the merging mechanism (2).

2. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 1, characterized in that: Water temperature sensors for monitoring water temperature are provided at the input and output ends of the circulating water pool, and a liquid level sensor is provided inside the thermal insulation water tank (16). The water temperature sensor, liquid level sensor and freezer (15) are all connected to a control center.

3. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 2, characterized in that: The merging mechanism (2) comprises a merging water tank (21) connected to the first output end of the water distributor B (18); the merging water tank (21) is fixedly arranged on the top of the base (11); and an annular groove (22) is provided at the bottom of the inner cavity of the merging water tank (21).

4. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 3, characterized in that: A furnace cover cooling system output end connecting pipe (23) for connecting to the furnace cover cooling system output end is fixedly provided through the top of the back side of the combined water tank (21), and a circulating water pool input end connecting pipe (24) for connecting to the circulating water pool is fixedly provided through the top of the front side of the combined water tank (21).

5. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 4, characterized in that: It also includes an anti-stratification component (3), an additional component A (4), and an additional component B (5) arranged inside the combined water tank (21).

6. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 5, characterized in that: The anti-stratification component (3) includes a motor (31) fixedly arranged on the top of the combined water tank (21), the output shaft of the motor (31) extends to the top of the inner cavity of the combined water tank (21), the bottom end of the output shaft of the motor (31) is fixedly connected to a turntable (32), a stirring shaft A (33) is provided through the left side of the bottom of the turntable (32), the stirring shaft A (33) is rotatably connected to the turntable (32) through a bearing, a plurality of longitudinal limiting grooves (34) are provided on both sides of the stirring shaft A (33), and an annular reinforcement plate (35) is fixedly provided at the bottom end of the stirring shaft A (33) and is rotatably nested in the inner side of the annular groove (22) through a bearing.

7. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 6, characterized in that: The additional component A (4) includes a gear (41) fixedly sleeved on the top of the outer side of the stirring shaft A (33).

8. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 7, characterized in that: The added component A (4) further includes an annular sealing plate (42) which is rotatably sleeved on the outside of the turntable (32) through a bearing, the annular sealing plate (42) is fixedly connected to the inner wall of the combined water tank (21), a plurality of L-shaped fixed arms (43) are evenly fixedly provided on the top of the annular sealing plate (42), and a gear ring (44) which meshes with the gear (41) is fixedly provided on the top of the plurality of L-shaped fixed arms (43), and the added component A (4) further includes a lifting shaft (45) which is slidably nested in the stirring shaft A (33) in the vertical direction, and a plurality of stirring shafts B (46) which are respectively slidably provided in the vertical direction on the inner sides of the plurality of longitudinal limiting slots (34) are fixedly provided on both sides of the lifting shaft (45), and a lifting and lowering plate (47) is fixedly sleeved on the outer side of any one of the stirring shafts B (46).

9. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 8, characterized in that: The additional component B (5) includes a fixed seat (51) fixedly arranged on the top of the lifting shaft (45), the bottom end of the fixed seat (51) is fixedly connected to the top of the stirring shaft A (33) and has a return spring (52) sleeved on the outside of the lifting shaft (45), and a rolling steel ball (53) is rotatably nested at the top of the fixed seat (51).

10. The circulating cooling water temperature control system for an artificial crystal growth furnace according to claim 9, characterized in that: The added component B (5) further comprises a blocking ring (54) fixedly arranged on the top of the inner cavity of the combined water tank (21), and a plurality of guide protrusions (55) are evenly fixedly arranged on the bottom of the blocking ring (54).

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