Composite mask clamp for vapor deposition coating

Abstract

The invention relates to a composite mask clamp for vapor deposition coating. The composite mask clamp comprises an upper rigid mask plate, a lower rigid mask plate and an elastic clamping plate clamped between the upper rigid mask plate and the lower rigid mask plate, a first conical hole and a first fastening hole are formed in the upper rigid mask plate; a second conical hole symmetrical to the first conical hole and a second fastening hole matched with the first fastening hole of the upper rigid mask plate are formed in the lower rigid mask plate; a cone frustum with a middle hole and a fastening through hole are arranged on the upper face and the lower face of the elastic clamping plate. When the device is used, a sample is filled into the sample mounting hole of the elastic clamping plate, and the upper rigid mask plate and the lower rigid mask plate compress the middle elastic clamping plate to expand towards the inner hole when being clamped by the screws, so that the side surface of the sample is tightly clamped, and the whole coating of the upper and lower surfaces to be coated of the coated sample is realized; deposition particles can be prevented from entering the side face part which does not need to be coated in the vapor deposition process.

Description

Technical Field

[0001] The invention relates to a mask fixture, in particular to a composite mask fixture used for vapor deposition coating. Background Art

[0002] Vapor deposition technology includes physical vapor deposition and chemical vapor deposition. A masking process is generally used to produce a coating layer with a characteristic shape. Existing masking fixtures for vapor deposition technology, such as those disclosed in Chinese invention patents CN 204125521U and CN201610522031.2, clamp the sample by pressing against the edges of the upper and lower surfaces to be plated. However, this method cannot completely coat the upper and lower surfaces of the sample. Therefore, those skilled in the art have provided a composite masking fixture for vapor deposition coating to address the problems raised in the above-mentioned background technology. Summary of the Invention

[0003] The object of the present invention is to provide a composite mask fixture for vapor deposition coating to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A composite mask fixture for vapor deposition coating, comprising an upper rigid mask plate, a lower rigid mask plate and an elastic clamping plate sandwiched in between; the upper rigid mask plate is provided with a first conical hole and a first fastening hole; the lower rigid mask plate is provided with a second conical hole symmetrical to the first conical hole, and a second fastening hole used in conjunction with the first fastening hole of the upper rigid mask plate; the upper and lower surfaces of the elastic clamping plate are provided with a frustum with a central opening and a fastening through hole, and a sample mounting hole is provided in the frustum.

[0006] As a further solution of the present invention: the minimum inner diameter of the first conical hole on the upper rigid mask plate and the second conical hole on the lower rigid mask plate is larger than the outer diameter of the coated sample; the thickness of the upper rigid mask plate and the lower rigid mask plate is smaller than the height of a single frustum on the elastic clamping plate; the upper and lower surfaces of the elastic clamping plate are symmetrically distributed with frustums with central openings, and the taper of the frustum is the same as that of the first conical hole on the upper rigid mask plate and the second conical hole on the lower rigid mask plate.

[0007] As a further solution of the present invention: the maximum outer diameter of the frustum on the elastic clamping plate is greater than the maximum inner diameter of the first conical hole on the upper rigid mask plate and the second conical hole on the lower rigid mask plate; the minimum outer diameter of the frustum on the elastic clamping plate is not less than the minimum inner diameter of the first conical hole on the upper rigid mask plate and the second conical hole on the lower rigid mask plate.

[0008] As a further solution of the present invention: the diameter of the frustum inner hole of the elastic clamping plate is larger than the outer diameter of the coated sample; the maximum thickness of the elastic clamping plate is not less than the thickness of the coated sample.

[0009] As a further solution of the present invention: the elastic clamping plate is made of one of the materials selected from the group consisting of nitrile rubber, fluororubber, silicone rubber and polytetrafluoroethylene.

[0010] Compared with the prior art, the present invention has the following beneficial effects:

[0011] The present invention proposes a composite mask fixture for vapor deposition coating, in which a sample is filled into the sample mounting hole of an elastic clamping plate, and an upper rigid mask plate and a lower rigid mask plate are clamped by screws to compress the middle elastic clamping plate to expand toward the inner hole, thereby achieving close clamping of the side of the sample. While achieving full-surface coating of the upper and lower surfaces to be coated of the sample to be coated, it can prevent deposited particles from entering the side parts that do not need to be coated during the vapor deposition process. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the structure of a composite mask fixture used for vapor deposition coating.

[0013] Figure 2 This is a schematic cross-sectional view of a mask opening in a composite mask fixture used for vapor deposition coating.

[0014] In the figure: 100, upper rigid mask plate, 101, first conical hole, 102, first fastening hole, 200, elastic clamping plate, 201, sample mounting hole, 202, upper frustum, 203, fastening through hole, 300, lower rigid mask plate, 301, second conical hole, 302, second fastening hole. DETAILED DESCRIPTION

[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] See also Figures 1-2In an embodiment of the present invention, a composite mask fixture for vapor deposition coating includes an upper rigid mask plate 100, a lower rigid mask plate 300 and an elastic clamping plate 200 sandwiched therebetween; the upper rigid mask plate 100 is provided with a first conical hole 101 and a first fastening hole 102; the lower rigid mask plate 300 is provided with a second conical hole 301 symmetrical to the first conical hole 101, and a second fastening hole 302 used in conjunction with the first fastening hole 102 of the upper rigid mask plate 100; the upper and lower surfaces of the elastic clamping plate 200 are provided with a frustum 202 with a central opening and a fastening through hole 203, and a sample mounting hole 201 is provided in the frustum 202.

[0017] In one embodiment of the present invention, the minimum inner diameters of the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300 are larger than the outer diameter of the sample to be coated;

[0018] Specifically, the minimum inner diameter of the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300 is 10.8 mm, which is 0.3 mm larger than the outer diameter of the sample to be coated;

[0019] In one embodiment of the present invention, the thickness of the upper rigid mask plate 100 and the lower rigid mask plate 300 is less than the height of a single frustum 202 on the elastic clamping plate 200;

[0020] Specifically, the thickness of the upper rigid mask plate 100 and the lower rigid mask plate 300 is 2 mm, and the height of the single frustum 202 on the elastic clamping plate 200 is 2.1 mm;

[0021] In one embodiment of the present invention, the upper and lower surfaces of the elastic clamping plate 200 are symmetrically distributed with frustums 202 with a central opening, and the frustums 202 have the same taper as the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300.

[0022] Specifically, the taper is 60°;

[0023] In one embodiment of the present invention, the maximum outer diameter of the truncated cone 202 on the elastic clamping plate 200 is greater than the maximum inner diameter of the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300;

[0024] Specifically, the maximum outer diameter of the frustum 202 on the elastic clamping plate 200 is 13.4 mm, and the maximum inner diameters of the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300 are both 13.1 mm;

[0025] In one embodiment of the present invention, the minimum outer diameter of the frustum 202 on the elastic clamping plate 200 is not less than the minimum inner diameter of the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300;

[0026] Specifically, the minimum outer diameter of the truncated cone 202 on the elastic clamping plate 200 is 11 mm, and the minimum inner diameter of the first conical hole 101 on the upper rigid mask plate 100 and the second conical hole 301 on the lower rigid mask plate 300 is 10.8 mm;

[0027] In one embodiment of the present invention, the diameter of the inner hole of the truncated cone 202 of the elastic clamping plate 200 is larger than the outer diameter of the sample to be coated;

[0028] Specifically, the diameter of the inner hole of the frustum 202 of the elastic clamping plate 200 is 10.6 mm, and the outer diameter of the coated sample is 10.5 mm;

[0029] In one embodiment of the present invention, the maximum thickness of the elastic clamping plate 200 is not less than the thickness of the sample to be coated;

[0030] Specifically, the maximum thickness of the elastic clamping plate 200 is 5.2 mm, and the thickness of the coated sample is 5 mm;

[0031] In an embodiment of the present invention, the elastic clamping plate 200 is made of one of the following materials: nitrile rubber, fluororubber, silicone rubber or polytetrafluoroethylene.

[0032] When installing the sample, first place an auxiliary mounting plate with 0.1mm thick bosses corresponding to the openings of the lower rigid mask plate 300 at the bottom of the lower rigid mask plate 300. Then, place the elastic clamping plate 200 on the lower rigid mask plate 300. The sample is then placed into the sample mounting hole 201 of the elastic clamping plate 200 using a robotic arm equipped with a suction cup. The upper rigid mask plate 100 is then placed on top. Finally, the upper and lower rigid mask plates 100 and 300 are fastened together with screws. When tightening the upper and lower rigid mask plates 100 and 300, the elastic clamping plate 200 is squeezed and tightly wrapped around the sides of the sample. This way, the upper and lower circular surfaces of the sample are fully exposed to the coating environment for front-side coating, while the sides are wrapped with fluororubber to prevent deposited particles from entering the masked areas that do not require coating during vapor deposition.

[0033] The present invention proposes a composite mask fixture for vapor deposition coating, in which a sample is filled into the sample mounting hole of an elastic clamping plate, and an upper rigid mask plate and a lower rigid mask plate are clamped by screws to compress the middle elastic clamping plate to expand toward the inner hole, thereby achieving close clamping of the side of the sample. While achieving full-surface coating of the upper and lower surfaces to be coated of the sample to be coated, it can prevent deposited particles from entering the side parts that do not need to be coated during the vapor deposition process.

[0034] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A composite mask fixture for vapor deposition coating, characterized in that: The invention comprises an upper rigid mask plate (100), a lower rigid mask plate (300) and an elastic clamping plate (200) sandwiched therebetween; the upper rigid mask plate (100) is provided with a first conical hole (101) and a first fastening hole (102); the lower rigid mask plate (300) is provided with a second conical hole (301) symmetrical to the first conical hole (101) and a second fastening hole (302) used in conjunction with the first fastening hole (102) of the upper rigid mask plate (100); the upper and lower surfaces of the elastic clamping plate (200) are provided with a truncated cone (202) with a central opening and a fastening through hole (203); and a sample mounting hole (201) is provided in the truncated cone (202).

2. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The minimum inner diameters of the first conical hole (101) on the upper rigid mask plate (100) and the second conical hole (301) on the lower rigid mask plate (300) are greater than the outer diameter of the sample to be coated.

3. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The thickness of the upper rigid mask plate (100) and the lower rigid mask plate (300) is smaller than the height of a single frustum (202) on the elastic clamping plate (200).

4. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The upper and lower surfaces of the elastic clamping plate (200) are symmetrically distributed with truncated cones (202) with a central opening, and the taper of the truncated cone (202) is the same as that of the first conical hole (101) on the upper rigid mask plate (100) and the second conical hole (301) on the lower rigid mask plate (300).

5. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The maximum outer diameter of the truncated cone (202) on the elastic clamping plate (200) is greater than the maximum inner diameter of the first conical hole (101) on the upper rigid mask plate (100) and the second conical hole (301) on the lower rigid mask plate (300).

6. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The minimum outer diameter of the frustum (202) on the elastic clamping plate (200) is not less than the minimum inner diameter of the first conical hole (101) on the upper rigid mask plate (100) and the second conical hole (301) on the lower rigid mask plate (300).

7. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The diameter of the inner hole of the truncated cone (202) of the elastic clamping plate (200) is larger than the outer diameter of the sample to be coated.

8. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The maximum thickness of the elastic clamping plate (200) is not less than the thickness of the sample to be coated.

9. The composite mask fixture for vapor deposition coating according to claim 1, characterized in that: The elastic clamping plate (200) is made of one of the following materials: nitrile rubber, fluororubber, silicone rubber or polytetrafluoroethylene.

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