Pressurizing cylinder service life prediction system and control method

Abstract

The invention discloses a pressure cylinder service life prediction system and a control method, and the system comprises a magnetic assembly which is disposed on a pressure cylinder, detects the reciprocating motion of the pressure cylinder, and generates an electric signal; the data processor is connected with the magnetic assembly and is used for receiving the electric signal and accumulating and counting the reciprocating times of the pressure cylinder; the data monitor is connected with the data processor and used for receiving the reciprocating times of the pressure cylinder and predicting the service life of the pressure cylinder according to the reciprocating times of the pressure cylinder. The method has the advantages that the reciprocating frequency of the pressure cylinder is monitored through the magnetic assembly, the service life of the pressure cylinder is predicted, sudden faults of the pressure cylinder are avoided, and the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of booster cylinders, and in particular to a booster cylinder life prediction system and control method. Background Art

[0002] Wafer degassing systems play a critical role in semiconductor manufacturing, ensuring stable chamber pressure increases. During this process, the booster cylinder, the core component that achieves this pressure boost, is crucial for process success. Its operational reliability directly impacts process success. This booster cylinder withstands high-pressure loads during its high-frequency reciprocating motion. Sudden failures (such as piston ring wear or seal aging) can not only render the current batch of wafers useless but also disrupt the production line during repair and replacement, severely impacting production efficiency and lead times. Summary of the Invention

[0003] The technical problem to be solved by the embodiments of the present invention is to provide a booster cylinder life prediction system and control method, which monitors the reciprocating times of the booster cylinder through a magnetic component to realize the life prediction of the booster cylinder, avoid sudden failure of the booster cylinder, and improve production efficiency.

[0004] In order to solve the above technical problems, the present invention provides a booster cylinder life prediction system, comprising:

[0005] A magnetic component is provided on the booster cylinder, detects the reciprocating motion of the booster cylinder and generates an electrical signal;

[0006] a data processor connected to the magnetic component, configured to receive the electrical signal and accumulate and count the number of reciprocating times of the boosting cylinder;

[0007] A data monitor is connected to the data processor and is used to receive and predict the life of the boosting cylinder according to the number of reciprocating times of the boosting cylinder.

[0008] In a feasible implementation, the magnetic component includes:

[0009] A sensor is provided on the outside of the boost cylinder, wherein the sensor detects a change in the magnetic field and generates an electrical signal;

[0010] The trigger source is arranged inside the boost cylinder and is used to periodically approach or move away from the sensor to generate a change in the magnetic field to trigger the sensor to operate.

[0011] In a feasible implementation, the sensor is a magnetic detection switch, and the trigger source is a magnet.

[0012] In a feasible implementation, the trigger source is a magnetic ring, which is provided on the piston of the booster cylinder and is used to move with the piston of the booster cylinder to change the induced magnetic field of the magnetic detection switch so that the magnetic detection switch outputs the electrical signal.

[0013] In a feasible implementation, the data monitor includes:

[0014] The life prediction module processes the reciprocating times of the boost cylinder based on the life prediction model to obtain a life percentage value.

[0015] In a feasible implementation, the life prediction model is:

[0016]

[0017] Wherein, n represents the number of reciprocating times of the boost cylinder;

[0018] m represents the preset number of boost times.

[0019] In a feasible implementation, the data monitor further includes:

[0020] The state prediction module judges the reciprocating number of the boost cylinder based on a preset boost range. If the reciprocating number of the boost cylinder is within the preset boost range, the boost cylinder is in a healthy state. If the reciprocating number of the boost cylinder exceeds the preset boost range, the boost cylinder is in an abnormal state.

[0021] In a feasible implementation, the data processor and the data monitor are connected via Ethernet.

[0022] In a feasible implementation, the air pressure at the input end of the boost cylinder is 0.5 MPa to 0.7 MPa, and the air pressure at the output end of the boost cylinder is up to 2 MPa.

[0023] A control method for a boost cylinder life prediction system, comprising:

[0024] The magnetic component acquires the electrical signal;

[0025] The data processor receives and counts the number of reciprocating times of the boosting cylinder according to the electrical signal;

[0026] The data monitor predicts the life of the boosting cylinder according to the number of reciprocating times of the boosting cylinder.

[0027] The implementation of the present invention has the following beneficial effects:

[0028] By monitoring the reciprocating times of the booster cylinder through the magnetic component, the life of the booster cylinder can be predicted, sudden failure of the booster cylinder can be avoided, and production efficiency can be improved.

[0029] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The drawings herein are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application, and do not constitute an improper limitation on the present application.

[0031] Figure 1 It is a structural schematic diagram of the boost cylinder life prediction system of the present invention;

[0032] Figure 2 is a schematic diagram of the connection between the data processor and the data monitor of the present invention;

[0033] Figure 3 This is a detection flow chart of the boost cylinder life prediction system of the present invention;

[0034] Figure 4 This is a step diagram of the control method of the boost cylinder life prediction system of the present invention. DETAILED DESCRIPTION

[0035] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0036] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0038] The present invention provides a boost cylinder life prediction system, referring to Figure 1 ,include,

[0039] The magnetic component 10 is provided on the booster cylinder and detects the reciprocating motion of the booster cylinder and generates an electrical signal;

[0040] The data processor 20 is connected to the magnetic assembly 10 and is used to receive the electrical signal and accumulate and count the number of reciprocating times of the booster cylinder;

[0041] The data monitor 30 is connected to the data processor 20 and is used to receive and predict the life of the boosting cylinder according to the reciprocating times of the boosting cylinder.

[0042] Specifically, the present invention provides a booster cylinder life prediction system, which is applicable to defoaming equipment. The magnetic component 10 monitors the reciprocating times of the booster cylinder to predict the life of the booster cylinder, avoid sudden failure of the booster cylinder, and improve production efficiency.

[0043] More specifically, the data processor 20 receives the electrical signal output by the magnetic component 10, converts it into a digital signal of the number of reciprocating motions, and performs cumulative counting (e.g., the count increases by 1 each time a pulse signal is received) to record the workload of the booster cylinder in real time, providing a quantitative data basis for life prediction.

[0044] In one possible implementation, the magnetic assembly 10 includes:

[0045] The sensor is located outside the boost cylinder. The sensor detects changes in the magnetic field and generates an electrical signal.

[0046] The trigger source is located inside the booster cylinder and is used to periodically approach or move away from the sensor to generate a change in the magnetic field to trigger the sensor action;

[0047] The sensor is a magnetic detection switch, and the trigger source is a magnet.

[0048] Specifically, the non-contact detection method of the magnetic detection switch and the magnet does not require disassembly of the booster cylinder, and can be used for real-time monitoring during equipment operation without affecting the normal production process, reducing downtime for detection and improving equipment utilization.

[0049] In a feasible implementation, the trigger source is a magnetic ring, which is provided on the piston of the booster cylinder and is used to change the induced magnetic field of the magnetic detection switch along with the movement of the piston of the booster cylinder, so that the magnetic detection switch outputs an electrical signal.

[0050] Specifically, when the piston reciprocates, the magnetic ring moves closer to or farther away from the sensor, causing the magnetic field around the sensor to change. The sensor detects the change and outputs an electrical signal (such as a pulse signal).

[0051] The boost cylinder life prediction system adopts non-contact detection, which can avoid mechanical wear and improve detection reliability. It has high magnetic signal stability and strong anti-interference ability.

[0052] In one possible implementation, the data monitor 30 includes,

[0053] The life prediction module processes the reciprocating times of the boost cylinder based on the life prediction model to obtain the life percentage value;

[0054] The lifespan prediction model is:

[0055]

[0056] Where n represents the number of reciprocating times of the booster cylinder;

[0057] m represents the preset number of boost times.

[0058] Specifically, the current life loss ratio is calculated based on the life prediction model. For example, if the preset number of boost times is 100,000 times and the current count is 50,000 times, then the remaining life is 50%.

[0059] The mechanical movement is converted into an intuitive life percentage through mathematical models, which makes it easier for users to plan maintenance in advance.

[0060] In a feasible implementation, the data monitor 30 further includes:

[0061] The state prediction module judges the reciprocating number of the boost cylinder based on the preset boost range. If the reciprocating number of the boost cylinder is within the preset boost range, the boost cylinder is in a healthy state. If the reciprocating number of the boost cylinder exceeds the preset boost range, the boost cylinder is in an abnormal state.

[0062] Specifically, the state prediction module can set the relationship between the number of boost times and the boost pressure. For example, if the system learns that the average number of boost times from 0.5Mpa to 2.0Mpa is 30 times, the experience value range of 30-50 times can be set as a healthy state. A value greater than 50 means that the efficiency of the boost cylinder is reduced, and a maintenance prompt message is displayed on the data monitor 30 to remind maintenance.

[0063] In one possible implementation, refer to Figure 2 The data processor 20 and the data monitor 30 are connected via Ethernet.

[0064] Specifically, the data processor 20 and the data monitor 30 are connected via an Ethernet cable 40. Crystal plugs are provided at both ends of the Ethernet cable 40. The data processor 20 and the data monitor 30 are connected via Ethernet to realize remote data transmission and centralized management (such as the UI host computer displays the operating status). The life data can be viewed in real time through the human-computer interface to optimize the maintenance plan (such as regular replacement according to the predicted life, rather than unified replacement).

[0065] In a feasible implementation, the air pressure at the boost cylinder input end is 0.5 MPa to 0.7 MPa, the air pressure at the boost cylinder input end can be selected as 0.5 MPa, 0.6 MPa, 0.7 MPa, and the maximum air pressure at the boost cylinder output end is 2 MPa.

[0066] Specifically, the booster cylinder is used to compress the gas, and the compressed gas enters the pressure oven. The pressure oven is used in the defoaming process to control the temperature and pressure to achieve workpiece processing.

[0067] Reference Figure 3 A magnetic assembly 10 is mounted on the booster cylinder, with a magnetic ring attached to the cylinder's piston. A sensor detects the ring's movement. Each reciprocating motion of the booster cylinder is detected and counted by the sensor. The sensor then serves as an input to a PLC (Programmable Logic Controller) and transmits the information to a data monitor 30 (e.g., a host computer) via TCP (Transmission Control Protocol). The data monitor 30 uses the sensor counts as the numerator and the preset booster cylinder lifespan as the denominator to display the lifespan percentage on the operation panel. For example, if the original design lifespan of the booster cylinder is 2 million cycles, a prediction is made using 2 million cycles as the denominator and the sensor counts as the numerator.

[0068] The number of reciprocating times of the boost cylinder is judged based on the preset boost range. If the reciprocating times of the boost cylinder is within the preset boost range, the boost cylinder is in a healthy state. If the reciprocating times of the boost cylinder exceeds the preset boost range, the boost cylinder is in an abnormal state. The operating status will be displayed on the host computer to remind the user to perform maintenance.

[0069] A control method for a boost cylinder life prediction system, referring to Figure 4 ,include,

[0070] Step S100, the magnetic component 10 obtains an electrical signal;

[0071] Step S200: the data processor 20 receives and counts the number of reciprocating times of the booster cylinder according to the electrical signal;

[0072] In step S300 , the data monitor 30 predicts the life of the boosting cylinder according to the number of reciprocating times of the boosting cylinder.

[0073] Specifically, the present invention also provides a control method for a booster cylinder life prediction system, which monitors the workload of the booster cylinder in real time through cumulative counting and a life model in a data monitor 30, and reminds the user to replace it before the life is exhausted (such as when 10% of the life remains), thereby avoiding failure of defoaming operations due to sudden damage to the booster cylinder and preventing batch scrapping of wafers.

[0074] Specifically, magnetic assembly 10 triggers electrical signals through magnetic field changes, capturing piston motion in real time. Data processor 20 converts accumulated counts into workload data, quantifying the actual wear and tear of the booster cylinder. Data monitor 30 outputs lifespan predictions based on the data model and alerts the user through a user interface or alarm system, forming a closed-loop "detection-analysis-response" management system.

[0075] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0076] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A boost cylinder life prediction system, characterized in that: include, A magnetic component is provided on the booster cylinder, detects the reciprocating motion of the booster cylinder and generates an electrical signal; a data processor connected to the magnetic component, configured to receive the electrical signal and accumulate and count the number of reciprocating times of the boosting cylinder; A data monitor is connected to the data processor and is used to receive and predict the life of the boosting cylinder according to the number of reciprocating times of the boosting cylinder.

2. The boost cylinder life prediction system according to claim 1, characterized in that: The magnetic component includes: A sensor is provided on the outside of the boost cylinder, wherein the sensor detects a change in the magnetic field and generates an electrical signal; The trigger source is arranged inside the boost cylinder and is used to periodically approach or move away from the sensor to generate a change in the magnetic field to trigger the sensor to operate.

3. The boost cylinder life prediction system according to claim 2, characterized in that: The sensor is a magnetic detection switch, and the trigger source is a magnet.

4. The boost cylinder life prediction system according to claim 3, characterized in that: The trigger source is a magnetic ring, which is provided on the piston of the boosting cylinder and is used to change the induced magnetic field of the magnetic detection switch along with the movement of the piston of the boosting cylinder, so that the magnetic detection switch outputs the electrical signal.

5. The boost cylinder life prediction system according to claim 1, characterized in that: The data monitor includes: The life prediction module processes the reciprocating times of the boost cylinder based on the life prediction model to obtain a life percentage value.

6. The boost cylinder life prediction system according to claim 5, characterized in that: The life prediction model is: Wherein, n represents the number of reciprocating times of the boost cylinder; m represents the preset number of boost times.

7. The boost cylinder life prediction system according to claim 5, characterized in that: The data monitor further includes: The state prediction module judges the reciprocating number of the boost cylinder based on a preset boost range. If the reciprocating number of the boost cylinder is within the preset boost range, the boost cylinder is in a healthy state. If the reciprocating number of the boost cylinder exceeds the preset boost range, the boost cylinder is in an abnormal state.

8. The boost cylinder life prediction system according to claim 1, characterized in that: The data processor and the data monitor are connected via Ethernet.

9. The boost cylinder life prediction system according to claim 1, characterized in that: The air pressure at the input end of the boost cylinder is 0.5 MPa to 0.7 MPa, and the air pressure at the output end of the boost cylinder is up to 2 MPa.

10. A control method for a boost cylinder life prediction system, used to control the boost cylinder life prediction system according to any one of claims 1 to 9, characterized in that: include, The magnetic component acquires the electrical signal; The data processor receives and counts the number of reciprocating times of the boosting cylinder according to the electrical signal; The data monitor predicts the life of the boosting cylinder according to the number of reciprocating times of the boosting cylinder.

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