Temperature pressure sensor

Abstract

A temperature and pressure sensor comprises a disc-shaped seat body which is provided with a first cavity towards one side of a longitudinal far end; the metal elastic diaphragm receives the pressure of the medium to be measured on one side of the longitudinal far end, the edge part of the metal elastic diaphragm is hermetically fixed to the disc-shaped seat body from one side of the longitudinal far end and seals the first cavity, the middle part of the metal elastic diaphragm arches towards one side of the longitudinal far end to form an arching part, and a second cavity is defined by the arching part and the disc-shaped seat body; the thermosensitive element is at least partially surrounded by the arching part, and a terminal of the thermosensitive element penetrates through the disc-shaped seat body towards one side of the longitudinal near end in a sealing manner; the pressure sensitive element is fixed at the longitudinal near end of the disc-shaped seat body and is communicated to the first cavity through a pressure channel arranged in the disc-shaped seat body; and the first cavity and the communicating space of the first cavity are filled with the pressure guide liquid. According to the temperature pressure sensor, on the premise that the metal elastic diaphragm exists, the thermosensitive element can be added, and the accurate temperature of the medium to be measured can be obtained.

Description

Technical Field

[0001] The present application relates to the field of sensor technology, and in particular to a temperature and pressure sensor. Background Art

[0002] In the field of pressure sensors, an elastic diaphragm is sometimes required to isolate the adverse effects of the measured medium on pressure-sensitive elements, especially pressure chips. One longitudinal proximal end of the elastic diaphragm receives the pressure of the measured medium, while the other side transmits this pressure to the pressure-sensitive element via a pressure-conducting fluid 8. In such pressure sensors, due to the presence of the elastic diaphragm, when the temperature of the measured medium needs to be measured simultaneously, a separate temperature sensor is typically required to obtain the temperature of the measured medium, or a thermistor is placed away from the elastic diaphragm. However, due to the influence of temperature gradients, it can only obtain an approximate temperature of the measured medium.

[0003] The information disclosed in this Background of the Invention section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the present invention is dedicated to providing a temperature and pressure sensor, which adds a thermal sensitive element to the presence of a metal elastic diaphragm and obtains the accurate temperature of the medium to be measured.

[0005] The present invention provides a temperature and pressure sensor, comprising:

[0006] a disc-shaped seat having a first cavity toward a longitudinal distal end;

[0007] a metal elastic diaphragm receiving the pressure of the medium to be measured at one longitudinal distal end, wherein the edge portion of the diaphragm is sealed and fixed to the disc-shaped seat body from the longitudinal distal end and closes the first cavity, and the middle portion thereof arches toward the longitudinal distal end to form an arched portion, and the arched portion and the disc-shaped seat body enclose a second cavity;

[0008] a thermally sensitive element at least partially surrounded by the arched portion, with its terminal passing through the disc-shaped seat body in a sealed manner toward the longitudinal proximal end;

[0009] a pressure sensitive element fixed to the longitudinal proximal end of the disc-shaped seat body, which is connected to the first cavity through a pressure channel provided in the disc-shaped seat body;

[0010] and a pressure-conducting liquid filled in the first cavity and the communicating space thereof.

[0011] Preferably, the metal elastic diaphragm comprises a circle of elastic portion whose outer edge is directly connected to the inner edge of the edge portion, and a central portion whose outer edge is directly connected to the inner edge of the elastic portion, and the arched portion is formed on the central portion.

[0012] Preferably, the elastic portion has a corrugated cross-section in the longitudinal plane.

[0013] Preferably, the disc-shaped seat body is provided with a liquid injection hole with one end connected to the first cavity, and the liquid injection hole is sealed by a steel ball.

[0014] Preferably, a surface on one side of the longitudinal proximal end of the disc-shaped seat body is recessed inward to form a cavity, and the longitudinal proximal end of the liquid injection hole extends to the bottom of the cavity.

[0015] Preferably, a substrate is fixed to the proximal surface of the disc-shaped seat body, a processing circuit is provided on a surface of the substrate away from the disc-shaped seat body, and the pressure sensitive element and the terminal are electrically connected to the processing circuit.

[0016] . According to any one of claims 1 to 3, the temperature and pressure sensor, wherein the central portion is supported toward the longitudinal proximal end on a support portion formed by the disc-shaped seat body protruding toward the longitudinal distal end, and the first cavity is connected to the second cavity.

[0017] Preferably, the terminal passes through a through hole provided on the disc-shaped seat body toward the longitudinal proximal end, and is sealed with the through hole by fritted glass.

[0018] Preferably, the support portion is provided with a notch connecting the first cavity and the second cavity.

[0019] Preferably, the central portion is sealed and welded toward the longitudinal proximal end to a circle of support portions formed by the disc-shaped seat body protruding toward the longitudinal distal end to form a circle of welding portions that separate the first cavity and the second cavity; the interior of the arched portion is filled with a heat-conductive material that wraps the thermistor. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 FIG. 1 is a schematic structural diagram of the temperature and pressure sensor of the first embodiment.

[0021] Figure 2 FIG. 1 is a schematic structural diagram of a temperature and pressure sensor according to a second embodiment. DETAILED DESCRIPTION

[0022] The technical solution of the present application will be clearly and completely described below in conjunction with the accompanying drawings. The following embodiments are exemplary and are only used to explain the present application and are not to be construed as limiting the present application. In the following description, the same reference numerals are used to represent the same or equivalent elements, and repeated descriptions are omitted.

[0023] In the description of this application, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the product of this application is conventionally placed when in use, or the orientations or positional relationships conventionally understood by those skilled in the art. These are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the prepositive terms "first", "second", "third", etc. are only used to distinguish the modified objects, and cannot be understood as indicating or implying relative importance.

[0024] In addition, the terms "mounted," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0025] It should be further understood that the term “and / or” used in this specification and the corresponding claims refers to any and all possible combinations of one or more of the listed items.

[0026] like Figure 1 As shown in the figure, in the first embodiment, a temperature and pressure sensor 100 comprises a disc-shaped base 1, a metal elastic diaphragm 3, a thermal element 5, and a pressure sensitive element 6. The disc-shaped base 1 has a cavity 1a facing its longitudinal distal end (i.e., lower end). The metal elastic diaphragm 3 receives the pressure P of the medium to be measured at the longitudinal distal end. Its edge portion 31 is sealed and fixed to a flange 11 extending from the longitudinal distal end of the disc-shaped base 1, which extends toward the longitudinal distal end, thereby sealing the cavity 1a. The middle portion of the metal elastic diaphragm 3 arches toward the longitudinal distal end to form a raised portion 34. The raised portion 34 and the disc-shaped base 1 enclose a cavity 1d. The thermal element 5 is at least partially surrounded by the raised portion 34, and its terminal 51 sealably extends through the disc-shaped base 1 toward the longitudinal proximal end. The pressure sensitive element 6 is fixed to the longitudinal proximal end (i.e., lower end) of the disc-shaped base 1 and is connected to the cavity 1a via a pressure channel provided within the disc-shaped base 1. The cavity 1a and its pressure channel and other communicating spaces are filled with a pressure-conducting liquid 8 , which may be silicone oil or other suitable liquids. The edge portion 31 of the metal elastic diaphragm 3 may be pre-welded to the longitudinal proximal end of an annular interface 7 .

[0027] The temperature and pressure sensor 100 of this embodiment is formed by arching the metal elastic diaphragm 3 toward the distal longitudinal end to form a dome 34, and disposing the thermal element 5 inside the dome 34. In this way, the thermal element 5 can be placed close to the medium to be measured under the premise of the presence of the metal elastic diaphragm 3, thereby obtaining the accurate temperature of the medium to be measured.

[0028] Preferably, the metal elastic diaphragm 3 may include a ring of elastic portion 33 whose outer edge is directly connected to the inner edge of the edge portion 31, and a central portion 32 whose outer edge is directly connected to the inner edge of the elastic portion 33, with the arched portion 34 formed on the central portion 32. The elastic portion 33 may have a corrugated cross-section in the longitudinal plane, thereby providing elasticity to the metal elastic diaphragm 3 when deformed in the longitudinal direction by the pressure of the medium to be measured.

[0029] Preferably, central portion 32 is supported toward its proximal longitudinal end on support portion 12 formed by a protrusion from the disc-shaped base body 1 toward its distal longitudinal end, with cavity 1a communicating with cavity 1d. For example, support portion 12 may include a notch connecting cavities 1a and 1d. Terminal 51 extends toward its proximal longitudinal end through through-hole 1c provided in disc-shaped base body 1 and is sealed with fritted glass 9a.

[0030] The disc-shaped base body 1 may be provided with an injection hole 1f, one end of which connects to the cavity 1a. The injection hole 1f is sealed by a steel ball 9. Preferably, the longitudinal proximal surface of the disc-shaped base body 1 is recessed inward to form a cavity 1g, with the longitudinal proximal end of the injection hole 1f extending to the bottom of the cavity 1g. A substrate 4 may be fixed to the proximal surface 1e of the disc-shaped base body 1. The processing circuit 40 is provided on the side of the substrate 4 facing away from the disc-shaped base body 1. The pressure sensitive element 6 may be electrically connected to the processing circuit 40 via a lead 61. The longitudinal proximal end of the terminal 51 may be electrically connected to a metallized hole 42 provided on the substrate 4, which is electrically connected to the processing circuit 40. The processing circuit 40 may include a conditioning element 41. A frame 43 may be fixed to the longitudinal proximal end of the substrate 4, surrounding at least the pressure sensitive element 6 and the lead 61. The frame 43 may be filled with a protective gel 430.

[0031] See also Figure 2. On the basis of the first embodiment, in the temperature and pressure sensor 100 of the second embodiment, the central portion 32 of the metal elastic diaphragm 3 is sealed and welded toward the longitudinal proximal end to a circle of support portions 12 formed by the disc-shaped seat body 1 protruding toward the longitudinal distal end, thereby forming a circle of welding portions 331 to separate the cavity 1a and the cavity 1d. The interior of the arched portion 34 is filled with a thermally conductive material 52 that wraps the thermistor 5. The thermally conductive material 52 can be solid or semi-solid, such as thermal paste, etc., which can have a higher thermal conductivity than silicone oil, thereby more accurately obtaining the temperature of the medium to be measured. In this embodiment, the sintered glass 9a can be replaced by an adhesive 9b, which does not need to form a seal between the terminal 51 and the through hole 1c, because the welding portion 331 has completely separated the cavity 1d and the cavity 1a, and the pressure-conducting liquid 8 in the cavity 1a will not leak from between them.

[0032] The scope of the disclosure is defined not by the detailed description, but by the claims and their equivalents, and all variations within the scope of the claims and their equivalents are construed as being included in the disclosure.

Claims

1. A temperature and pressure sensor (100), characterized in that: include: A disc-shaped seat body (1) having a first cavity (1a) facing a longitudinal distal end; A metal elastic diaphragm (3) receives the pressure (P) of the medium to be measured at one longitudinal distal end, wherein the edge portion (31) is sealed and fixed to the disc-shaped seat body (1) from the longitudinal distal end and closes the first cavity (1a), and the middle portion is arched toward the longitudinal distal end to form an arched portion (34), and the arched portion (34) and the disc-shaped seat body (1) enclose a second cavity (1d); A thermal element (5) at least partially surrounded by the arched portion (34), wherein the terminal (51) thereof passes through the disc-shaped seat body (1) in a sealed manner toward the longitudinal proximal end; a pressure sensitive element (6) fixed to the longitudinal proximal end of the disc-shaped seat body (1), which is connected to the first cavity (1a) through a pressure channel provided in the disc-shaped seat body (1); A pressure-conducting liquid (8) is filled in the first cavity (1a) and the communicating space thereof.

2. The temperature and pressure sensor (100) according to claim 1, characterized in that The metal elastic diaphragm (3) includes a circle of elastic part (33) whose outer edge is directly connected to the inner edge of the edge part (31), and a central part (32) whose outer edge is directly connected to the inner edge of the elastic part (33), and the arched part (34) is formed on the central part (32).

3. The temperature and pressure sensor (100) according to claim 2, characterized in that The elastic portion (33) has a corrugated cross-section in the longitudinal plane.

4. The temperature and pressure sensor (100) according to claim 1, characterized in that The disc-shaped seat (1) is provided with a liquid injection hole (1f) whose end is connected to the first cavity (1a), and the liquid injection hole (1f) is sealed by a steel ball (9).

5. The temperature and pressure sensor (100) according to claim 4, characterized in that The longitudinal proximal end of the disc-shaped seat body (1) is recessed inwards to form a cavity (1g), and the longitudinal proximal end of the liquid injection hole (1f) extends to the bottom of the cavity (1g).

6. The temperature and pressure sensor (100) according to claim 1, characterized in that A substrate (4) is fixed to the proximal surface (1e) of the disc-shaped seat body (1), a processing circuit (40) is provided on a surface of the substrate (4) away from the disc-shaped seat body (1), and the pressure sensitive element (6) and the terminal (51) are electrically connected to the processing circuit (40).

7. The temperature and pressure sensor (100) according to any one of claims 1 to 6, characterized in that: The central portion (32) is supported on a support portion (12) formed by the disc-shaped seat body (1) protruding toward the longitudinal distal end toward the longitudinal proximal end, and the first cavity (1a) is connected to the second cavity (1d).

8. The temperature and pressure sensor (100) according to claim 7, characterized in that The terminal (51) passes through a through hole (1c) provided on the disc-shaped seat body (1) toward the longitudinal proximal end, and is sealed with the through hole (1c) by means of sintered glass (9a).

9. The temperature and pressure sensor (100) according to claim 7, characterized in that: The supporting portion (12) is provided with a notch communicating with the first cavity (1a) and the second cavity (1d).

10. The temperature and pressure sensor (100) according to any one of claims 1 to 6, characterized in that: The central portion (32) is sealed and welded toward the longitudinal proximal end to a circle of support portions (12) formed by the disc-shaped seat body (1) protruding toward the longitudinal distal end, thereby forming a circle of welding portions (331) that separate the first cavity (1a) and the second cavity (1d); the interior of the arched portion (34) is filled with a heat-conducting material (52) that wraps the thermal element (5).

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