Low stress flexible clamping system for aluminum based silicon carbide ultrathin mirrors

Abstract

The present application relates to clamping system, specifically for aluminum-based silicon carbide ultra-thin mirror low stress flexible clamping system, including: air floating support part, the air floating support part includes air bag, the air bag is located above the bottom plate, the air bag is U-shaped, after inflating the air bag, the U-shaped two branches of the upper end of the air bag open; Adaptive clamp, the adaptive clamp is also U-shaped, when the air bag opens, pull the adaptive clamp to open outward, when clamping high-temperature mirror, the adaptive clamp restores to its original state, clamping the mirror; After inflating the air bag, the U-shaped two branches of its upper end open, the tension of its opening is enough to pull the adaptive clamp in martensite phase, which is convenient for the mirror to put into the clamping system; When clamping the mirror, the micro-displacement compensation block starts to elongate under the inverse piezoelectric effect, the thickness is reduced, the reaction force on the mirror is reduced, the flexible clamping is realized, the assembly stress of the mirror is reduced, the surface flatness of the mirror is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to a clamping system, in particular a low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin mirrors. BACKGROUND

[0002] In the production process of aluminum-based silicon carbide ultra-thin mirrors, clamping operations are required. Clamping systems include mechanical clamps and vacuum suction clamps. Mechanical clamps are divided into snap ring clamps and pressure plate clamps, and vacuum suction clamps are divided into whole vacuum suction clamps and split vacuum suction clamps. The snap ring clamp is composed of a circular snap ring and multiple fastening bolts. In use, the mirror is placed in the snap ring, and the snap ring is shrunk by tightening the bolts to clamp the edge of the mirror. This clamp has a simple structure and is easy to operate, and is suitable for mirrors of various sizes and shapes, but may cause stress concentration at the edge of the mirror. The pressure plate clamp fixes the mirror on the mounting surface through the pressure plate and the bolt. The pressure plate is usually made of elastic materials such as rubber or spring steel to reduce damage to the mirror. This clamp can provide a more uniform clamping force and is suitable for mirrors with high surface precision requirements, but attention should be paid to the installation position of the pressure plate and the uniformity of the clamping force to avoid affecting the surface precision of the mirror. The whole vacuum suction clamp is a flat plate structure with a vacuum chamber. Many small holes are opened on the flat plate. The air in the vacuum chamber is pumped out by a vacuum pump to form a negative pressure, so that the mirror is adsorbed on the flat plate. This clamp is suitable for mirrors of various shapes and sizes, especially large-sized and thin mirrors, and can provide uniform suction force without damaging the surface of the mirror, but a reliable vacuum pump and vacuum control system are required. The split vacuum suction clamp is composed of multiple independent vacuum suction units and can be flexibly combined and arranged according to the shape and size of the mirror. Each suction unit has an independent vacuum channel and valve for controlling the size and distribution of the suction force. This clamp is suitable for complex and irregular mirrors, but its uniformity of suction force may be slightly worse than that of the whole vacuum suction clamp.

[0003] A lens clamping jig device with the application number CN202010500627.9 moves the first mobile seat on the first guide plate to push the dispensing cylinder to move longitudinally, and moves the second mobile seat on the second guide plate to push the dispensing cylinder to move transversely. Finally, the setting of the adjusting part in the dispensing cylinder allows only one lens to be placed in the dispensing cylinder at a time, so that the lenses are placed one by one in the positioning holes. However, the lens clamping jig device uses vacuum suction or mechanical clamping to clamp the lenses, which generates a large assembly stress on the lenses, easily leading to loss of surface precision and reducing the flatness of the mirror surface. SUMMARY

[0004] The main purpose of the present application is to provide an aluminum-based silicon carbide ultra-thin mirror low-stress flexible clamping system to solve the problems in the related art.

[0005] In order to achieve the above-mentioned purpose, according to one aspect of the present application, an aluminum-based silicon carbide ultra-thin mirror low-stress flexible clamping system is provided, comprising a bottom plate, further comprising: an air floating support part, the air floating support part comprises an air bag, the air bag is arranged above the bottom plate, the air bag is U-shaped, after the air bag is inflated, the two branches of the U-shaped upper end of the air bag are opened;

[0006] An adaptive clamp is also U-shaped, when the air bag is opened, the adaptive clamp is pulled to open outward, when the high-temperature mirror is clamped, the adaptive clamp returns to its original state and clamps the mirror;

[0007] A micro-displacement compensation block is divided into two parts and arranged inside the two branches of the U-shaped adaptive clamp, when the mirror presses the micro-displacement compensation block, the micro-displacement compensation block is elongated to reduce the reaction force on the mirror.

[0008] Further, the outer side of the micro-displacement compensation block is fixedly provided with a ballast plate.

[0009] Further, a plurality of preloading parts are arranged on one side of the ballast plate, the preloading parts pass through the adaptive clamp and the micro-displacement compensation block in sequence and are fixedly connected with the air bag, and the preloading parts are slidingly connected with the adaptive clamp and the micro-displacement compensation block.

[0010] Further, the preloading part comprises a pull rod, a bottom disc, a plurality of buffer strips and a top disc, the buffer strips are fixedly arranged on one side of the bottom disc close to the top disc, the top disc is fixedly arranged on the end of the pull rod, the other end of the pull rod is fixedly connected with the air bag, and the pull rod penetrates through the bottom disc and is slidingly connected with the bottom disc.

[0011] Further, the bottom disc and the top disc are located in the ballast plate.

[0012] Further, the adaptive clamp is made of memory alloy.

[0013] Further, the micro-displacement compensation block is made of piezoelectric ceramic.

[0014] Further, a honeycomb-shaped adhesive layer is fixedly arranged on the side of the ballast plate in contact with the mirror, for buffering the pressure of the ballast plate on the mirror.

[0015] Further, a plurality of partitions are fixedly arranged inside the air bag, and the partitions divide the air bag into a plurality of independent areas.

[0016] Further, a flat air bag is fixedly arranged in the middle of the bottom of the air bag.

[0017] Compared with the prior art, the present application has the following beneficial effects:

[0018] The low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application, by inflating the air bag, the U-shaped two branches at the upper end are opened, and the tension of the opening is sufficient to pull open the self-adaptive clamp in the martensite phase, facilitating the mirror to be placed in the clamping system; when clamping the mirror, the micro-displacement compensation block starts to elongate under the inverse piezoelectric effect, the thickness is reduced, the reaction force on the mirror is reduced, flexible clamping is realized, the assembly stress of the mirror is reduced, the loss of surface precision is prevented, and the flatness of the mirror surface is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 The air bag of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is not inflated.

[0020] Figure 2 The air bag of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is inflated.

[0021] Figure 3 The stress self-balancing clamping mechanism of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is shown in cross-section.

[0022] Figure 4 The micro-displacement compensation block structure of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is shown in cross-section.

[0023] Figure 5 The air floatation support part of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is shown in longitudinal cross-section.

[0024] Figure 6 The air floatation support part of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is shown in cross-section.

[0025] Figure 7 The preloading part structure of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is shown in cross-section.

[0026] Figure 8 The air floatation support part structure of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin mirror of the present application is shown in cross-section.

[0027] REFERENCE NUMERALS:

[0028] 1. Base plate; 2. Guide groove; 3. Electric cylinder; 4. Air flotation support; 5. Adaptive clamp; 6. Micro-displacement compensation block; 7. Ballast plate; 8. Preload section; 9. Flat airbag; 10. Connecting plate; 11. Column; 41. Airbag; 42. Air inlet; 43. Partition; 44. Connecting groove; 71. Through hole; 72. Air passage; 73. Exhaust port; 74. Circular groove; 81. Tie rod; 82. Chassis; 83. Buffer strip; 84. Top plate. Detailed Implementation

[0029] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0030] This embodiment provides a low-stress flexible clamping system for aluminum-based silicon carbide ultrathin mirrors, such as... Figures 1-3 As shown, it includes a base plate 1, a guide groove 2 on the base plate 1, an electric cylinder 3 for pushing and pulling the column 11 at one end of the guide groove 2, and also includes an air-floating support part 4, which includes an airbag 41. The airbag 41 is located above the base plate 1 and is U-shaped. After the airbag 41 is inflated, the two U-shaped plates at the upper end of the airbag 41 open. The pulling force of opening the airbag 41 is sufficient to pull open the adaptive clamp 5 in the martensitic phase.

[0031] The adaptive clamp 5 is also U-shaped. When the airbag 41 is opened, it pulls the adaptive clamp 5 to open outward. When clamping the high-temperature reflector, the adaptive clamp 5 returns to its original shape and clamps the reflector.

[0032] The micro-displacement compensation block 6 is divided into two parts, which are respectively located on the inner sides of the two supports of the U-shaped adaptive clamp 5. When the reflector squeezes the micro-displacement compensation block 6, the micro-displacement compensation block 6 extends, reducing the reaction force on the reflector.

[0033] Ballast plates 7 are fixedly installed on the outer side of the micro-displacement compensation block 6.

[0034] like Figure 4 As shown, the ballast plate 7 is provided with crisscrossing air passages 72, and the outer side of the ballast plate 7 is provided with several exhaust ports 73. The exhaust ports 73 are connected to the air passages 72. The air passages 72 extend out of the ballast plate 7. Air can be supplied into the air passages 72 through the air passages 72 extending out of the ballast plate 7 and discharged through the exhaust ports 73.

[0035] The inner side of the ballast plate 7 is provided with several through holes 71 and several circular grooves 74. The through holes 71 are connected to the circular grooves 74. The base plate 82 and the top plate 84 are located in the circular grooves 74. The tie rod 81 extends out from the through holes 71.

[0036] A number of preloaded parts 8 are provided on one side of the ballast plate 7. The preloaded parts 8 pass through the adaptive clamp 5 and the micro-displacement compensation block 6 in sequence and are fixedly connected to the airbag 41. The preloaded parts 8 are slidably connected to the adaptive clamp 5 and the micro-displacement compensation block 6.

[0037] like Figure 7 As shown, the preload unit 8 includes a pull rod 81, a chassis 82, several buffer strips 83 and a top plate 84. The buffer strips 83 are all fixedly installed on the side of the chassis 82 near the top plate 84. The top plate 84 is fixedly installed at the end of the pull rod 81. The other end of the pull rod 81 is fixedly connected to the airbag 41. The pull rod 81 passes through the chassis 82 and is slidably connected to the chassis 82.

[0038] Both the chassis 82 and the top chassis 84 are located within the ballast plate 7.

[0039] The adaptive clamp 5 is made of shape memory alloy.

[0040] In this embodiment, the adaptive clamp 5 is preferably made of Ni-Ti-Cu shape memory alloy. First, the Ni-Ti-Cu shape memory alloy is processed into a U-shape at high temperature to form the adaptive clamp 5, which is convenient for clamping the reflector. At this time, the adaptive clamp 5 is in the austenitic phase, that is, the high temperature phase. When the adaptive clamp 5 is cooled to the martensitic phase temperature range, the clamp becomes soft and deformable. After the air bag 41 is inflated, the adaptive clamp 5 can be pulled open to facilitate the placement of the reflector. The temperature of the newly placed reflector is high, which is higher than the austenitic phase of the adaptive clamp 5. The adaptive clamp 5 recovers its original shape by means of the shape memory effect, thereby tightly fitting the reflector surface and realizing adaptive clamping.

[0041] The micro-displacement compensation block 6 is made of piezoelectric ceramic.

[0042] When the adaptive clamp 5 returns to its original shape and clamps the reflector, the reflector exerts pressure on the micro-displacement compensation block 6. The piezoelectric ceramic exhibits the direct piezoelectric effect and generates charge under pressure. Then, the piezoelectric ceramic exhibits the inverse piezoelectric effect. Under the action of the electric field, the piezoelectric ceramic begins to elongate and its thickness decreases, reducing the reaction force on the reflector, achieving flexible clamping, reducing the assembly stress of the reflector, preventing loss of surface accuracy, and thus improving the flatness of the reflector surface.

[0043] A honeycomb-shaped adhesive layer is fixed on one side of the ballast plate 7 that contacts the reflector to buffer the pressure of the ballast plate 7 on the reflector.

[0044] The honeycomb adhesive layer is a siloxane-modified polyurethane adhesive with a coating thickness of 200±10μm. It is cured by ultraviolet light with a wavelength of 365nm and an intensity of 50mW / cm². After curing, it forms a honeycomb microstructure with a pore size of 50-100μm. The elastic modulus of the honeycomb adhesive layer is 0.5-1.0GPa.

[0045] When the mirror is taken out from the honeycomb adhesive layer, low-temperature gas such as liquid nitrogen vapor is input into the air passage 72 to induce micro-cracks at the interface of the honeycomb adhesive layer by the CTE difference, so that the honeycomb adhesive layer is broken in a brittle manner and loses the adhesion, thereby avoiding damage to the mirror when it is taken out.

[0046] As shown in Figure 5 and Figure 6 A plurality of partitions 43 are fixedly arranged inside the air bag 41, the partitions 43 divide the air bag 41 into a plurality of independent areas, the rigidity of the air bag 41 at the corresponding position can be changed by adjusting the air pressure in each area, and stable clamping of the mirror is realized.

[0047] As shown in Figure 5 and Figure 6 An air inlet 42 is arranged outside each independent area of the air bag 41, and a plurality of connecting grooves 44 are arranged inside the air bag 41. One end of a pull rod 81 is inserted into the connecting groove 44 and is fixedly connected with the air bag 41. The self-adaptive clamp 5 and the micro-displacement compensation block 6 are both provided with a through hole, and the pull rod 81 is moved outward through the through hole to press the micro-displacement compensation block 6. After the air bag 41 is inflated, the air bag 41 is inflated, the pull rod 81 is pulled to move outward, the pull rod 81 pulls the ballast plate 7 to move outward through the top disc 84, the micro-displacement compensation block 6 is pressed, and the micro-displacement compensation block 6 is subjected to a pre-pressure to prevent tension from causing brittle damage to the micro-displacement compensation block 6.

[0048] As shown in Figure 8 A flat air bag 9 is fixedly arranged at the middle of the bottom of the air bag 41. The flat air bag 9 does not block the inflation passages at the left and right ends of the U-shaped air bag 41, and the left and right ends of the air bag 41 can be inflated synchronously to ensure the symmetry of the tension. The bottom of the flat air bag 9 is fixedly provided with a connecting plate 10 for supporting the flat air bag 9. The middle of the bottom of the connecting plate 10 is fixedly provided with a stand column 11, and the stand column 11 is fixedly connected with the piston rod of the electric cylinder 3. The electric cylinder 3 drives the clamping system to move along the guide groove 2 through the stand column 11, and the mirror is sent to the next moving passage.

[0049] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the present application has been disclosed as the above preferred embodiment, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content to obtain equivalent embodiments with equivalent changes, without departing from the technical solution of the present application. Any modification, equivalent change and modification of the above embodiments based on the technical essence of the present application are still within the scope of the technical solution of the present application.

Claims

1. A low-stress flexible clamping system for aluminum-based silicon carbide ultrathin mirrors, comprising a base plate (1), characterized in that, Also include: Air float support (4), the air float support (4) includes air bag (41), the air bag (41) is located above the bottom plate (1), the air bag (41) is U-shaped, after the air bag (41) is inflated, the U-shaped two branches of the upper end of the air bag (41) open; Adaptive clamp (5), the adaptive clamp (5) is also U-shaped, when the air bag (41) opens, pull the adaptive clamp (5) to open outward, when clamping the high-temperature mirror, the adaptive clamp (5) restores to the original state, and the mirror is clamped; Micro-displacement compensation block (6), the micro-displacement compensation block (6) is divided into two parts, and is arranged in the inner side of the two branches of the U-shaped adaptive clamp (5), when the mirror extrudes the micro-displacement compensation block (6), the micro-displacement compensation block (6) is elongated, and the reaction force on the mirror is reduced; The outer side of the micro-displacement compensation block (6) is fixedly provided with a ballast plate (7); One side of the ballast plate (7) is provided with a plurality of preloading parts (8), the preloading parts (8) pass through the adaptive clamp (5) and the micro-displacement compensation block (6) in sequence, and are fixedly connected with the air bag (41); The preloading parts (8) are in sliding connection with the adaptive clamp (5) and the micro-displacement compensation block (6); The preloading parts (8) include a pull rod (81), a bottom disc (82), a plurality of buffer strips (83) and a top disc (84), the buffer strips (83) are fixedly arranged on one side of the bottom disc (82) close to the top disc (84), the top disc (84) is fixedly arranged on the end of the pull rod (81), the other end of the pull rod (81) is fixedly connected with the air bag (41), and the pull rod (81) penetrates through the bottom disc (82) and is in sliding connection with the bottom disc (82); The micro-displacement compensation block (6) is made of piezoelectric ceramic.

2. The aluminum-based silicon carbide ultrathin mirror low-stress flexible chucked system of claim 1, wherein, The bottom disc (82) and the top disc (84) are located in the ballast plate (7).

3. The aluminum-based silicon carbide ultrathin mirror low-stress flexible chucked system of claim 1, wherein, The adaptive clamp (5) is made of memory alloy.

4. The aluminum-based silicon carbide ultrathin mirror low-stress flexible chucked system of claim 1, wherein, The side of the ballast plate (7) contacting the mirror is fixedly provided with a honeycomb adhesive layer for buffering the pressure of the ballast plate (7) on the mirror.

5. The aluminum-based silicon carbide ultrathin mirror low-stress flexible chucked system of claim 1, wherein, The air bag (41) is fixedly provided with a plurality of partitions (43) inside, and the partitions (43) divide the air bag (41) into a plurality of independent areas.

6. The aluminum-based silicon carbide ultrathin mirror low-stress flexible chucked system of claim 1, wherein, A flat air bag (9) is fixedly arranged at the bottom of the air bag (41).

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