Air floating workbench

Abstract

The invention relates to the technical field of precision machining, and particularly discloses an air floating workbench which comprises an air floating mechanism and an air floating rotary table, when the air floating workbench works, a first driving part drives a floating body to move in the first direction, then the floating body drives a workbench on the air floating rotary table to move in the first direction, and meanwhile, the air floating mechanism drives the air floating rotary table to move in the second direction; the second driving piece can drive the workbench to rotate around the rotating shaft in the first direction. Therefore, the workpiece on the workbench can move in the first direction and rotate around the axis of the first direction. In the process, at least three air floatation single shafts are arranged between the top plate and the bottom plate, the overall lateral air floatation rigidity is increased while first direction guiding is provided, and when the air floatation workbench moves horizontally, lateral supporting is provided for the workbench and a load, deflection in the movement process is restrained, and the stability of the air floatation workbench is improved.

Description

Technical Field

[0001] The present invention relates to the field of precision machining technology, in particular to an air-floating workbench. Background Art

[0002] Semiconductor measurement equipment requires operations such as wafer rotation, vertical feed, and focusing. Vertical single-axis and rotating shafts are often guided by mechanical guides, which primarily utilize balls or rollers in direct contact with a flat surface. These guides not only generate vibration during operation but also directly transmit vibration, generating nonlinear friction. This makes them difficult to meet the high dynamic response and repeatable positioning accuracy requirements of testing equipment.

[0003] To this end, the prior art discloses a mobile platform built using a single air-floating single axis. By using the air-floating single axis, non-contact and zero wear are achieved, thereby meeting the requirements of high dynamic response and high repeatability of the detection equipment.

[0004] However, relying solely on a single bushing to provide air film support, the air-floating worktable cannot provide sufficient lateral support for the worktable and the load when performing horizontal movement, causing the worktable and the load to sway, thereby affecting the stability of the air-floating worktable.

[0005] Therefore, an air flotation workbench is urgently needed to solve the above problems. Summary of the Invention

[0006] The purpose of the present invention is to provide an air-floating workbench to solve the problem in the related art that only a single bushing is used to provide air film support. When the air-floating workbench moves horizontally, it cannot provide sufficient lateral support for the workbench and the load, causing the workbench and the load to sway, thereby affecting the stability of the air-floating workbench.

[0007] The present invention provides an air flotation workbench, which includes:

[0008] An air-floating mechanism comprises a top plate, a bottom plate, a floating body, a first driving member and at least three air-floating single shafts, wherein the top plate, the floating body and the bottom plate are sequentially arranged along a first direction, and the at least three air-floating single shafts are arranged between the top plate and the bottom plate and spaced apart around the circumference of the floating body, wherein the air-floating single shafts comprise air-floating guide columns and air-floating bushings, wherein the air-floating bushings are arranged on the floating body, and the air-floating guide columns are passed through the air-floating bushings along the first direction, and the two ends of the air-floating guide columns are respectively fixed to the top plate and the bottom plate, and the first driving member drives the floating body to move along the first direction;

[0009] An air-floating turntable, wherein the top plate is provided with a through hole opposite to the floating body along a first direction, the air-floating turntable is passed through the through hole and is arranged on the floating body, the air-floating turntable includes a workbench and a second driving member, the second driving member can drive the workbench to rotate, and the rotating shaft of the workbench is arranged along the first direction.

[0010] As a preferred technical solution of the air flotation workbench, the first direction is a vertical direction;

[0011] There is a magnetic force F between the air-floating guide column and the air-floating bushing, and the magnetic force F can balance the load of the floating body.

[0012] As a preferred technical solution for the air-floating workbench, the air-floating guide column is magnetic;

[0013] The air-floating single shaft further includes a magnetic ring, which is sleeved on the air-floating guide column and fixedly connected to the air-floating bushing.

[0014] As an optimal technical solution for the air-floating workbench, the air-floating guide column is magnetic, and the air-floating bushing is magnetic.

[0015] As a preferred technical solution of the air-floating workbench, the floating body is provided with at least three mounting holes arranged along the first direction, and at least three air-floating bushings are arranged in a one-to-one correspondence in the at least three mounting holes;

[0016] An adhesive layer is provided between the hole wall of the mounting hole and the corresponding air-floating bushing.

[0017] As a preferred technical solution of the air flotation workbench, the floating body is further provided with a glue inlet hole and a glue overflow hole connected to each of the mounting holes, and glue can be injected into the mounting holes through the glue inlet holes;

[0018] The air-floating single shaft also includes two first elastic rubber rings, which are both sleeved on the air-floating bushing and located in the mounting hole. The glue inlet hole and the glue overflow hole are respectively located between the two first elastic rubber rings, and the hole wall of the mounting hole and the air-floating bushing clamp the first elastic rubber ring.

[0019] As a preferred technical solution of the air flotation workbench, each of the mounting holes is correspondingly provided with two glue inlet holes and two glue overflow holes;

[0020] The air-floating single shaft also includes two second elastic rubber rings, which are both sleeved on the air-floating bushing and located between the two first elastic rubber rings. The hole wall of the mounting hole and the air-floating bushing clamp the second elastic rubber rings, and a glue inlet hole and a glue overflow hole are provided between each adjacent first elastic rubber ring and second elastic rubber ring.

[0021] As an optimal technical solution for the air-floating workbench, the air-floating turntable also includes a base and an air-floating bearing. The base is fixed to the floating body and is recessed with an accommodating cavity with an opening along the first direction, and the opening is opposite to the through hole. The air-floating bearing is fixed to the base and enables the workbench to rotate with the base. The second driving member is arranged in the accommodating cavity and is transmission-connected to the workbench.

[0022] As a preferred technical solution of the air-floating workbench, the air-floating bearing is provided with a tapered hole opposite to the opening, and the diameter of the tapered hole gradually decreases along the direction of the axis of the tapered hole approaching the base;

[0023] The workbench includes a conical platform and a limiting plate, wherein the conical platform is inserted into the conical hole, and the peripheral wall of the conical platform cooperates with the hole wall of the conical hole, and the limiting plate is arranged in the accommodating cavity and is opposite to the bottom wall of the air bearing opposite to the opening, and the conical platform and the limiting plate are connected to each other;

[0024] The hole wall of the tapered hole is configured as a tapered air-bearing surface, and the bottom wall of the air-bearing opposite to the limiting plate is configured as a lower air-bearing surface.

[0025] As an optimal technical solution for the air-floating workbench, two first driving members are provided, and the two first driving members are arranged on both sides of the floating body. The fixed end of the first driving member is fixedly connected to the top plate or the bottom plate, and the telescopic end of the first driving member is fixedly connected to the floating body.

[0026] The beneficial effects of the present invention are:

[0027] The present invention provides an air-floating workbench, which includes an air-floating mechanism and an air-floating turntable. The air-floating mechanism includes a top plate, a bottom plate, a floating body, a first driving member and at least three air-floating single shafts. The top plate, the floating body and the bottom plate are arranged in sequence along a first direction. At least three air-floating single shafts are arranged between the top plate and the bottom plate and are arranged at circumferential intervals around the floating body. The air-floating single shaft includes an air-floating guide column and an air-floating bushing. The air-floating bushing is arranged on the floating body. The air-floating guide column is passed through the air-floating bushing along the first direction. The two ends of the air-floating guide column are respectively fixed to the top plate and the bottom plate. The first driving member drives the floating body to move along the first direction. The top plate is provided with a through hole opposite to the floating body along the first direction. The air-floating turntable is passed through the through hole and is arranged on the floating body. The air-floating turntable includes a workbench and a second driving member. The second driving member can drive the workbench to rotate. The rotating shaft of the workbench is arranged along the first direction. When the air-floating workbench is in operation, the first drive element first drives the floating body to move in the first direction, which in turn causes the floating body to drive the workbench on the air-floating turntable to move in the first direction. Simultaneously, the second drive element can drive the workbench to rotate around the axis of rotation in the first direction. This enables the workpiece on the workbench to move in the first direction and rotate around the axis of rotation in the first direction. During this process, at least three air-floating single axes are set between the top plate and the bottom plate. While providing guidance in the first direction, they also increase the overall lateral air-floating stiffness. When the air-floating workbench performs horizontal movement, they provide lateral support for the workbench and the load, suppressing yaw during movement and improving the stability of the air-floating workbench. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 1 ;

[0029] Figure 2 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 2 ;

[0030] Figure 3 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 3 ;

[0031] Figure 4 for Figure 3 Cross-sectional view at AA in the middle;

[0032] Figure 5 Schematic diagram of the structure of the air-floating single shaft in an embodiment of the present invention;

[0033] Figure 6 This is a schematic structural diagram of an air-floating single shaft in another embodiment of the present invention;

[0034] Figure 7 This is a schematic structural diagram of the air flotation mechanism in an embodiment of the present invention;

[0035] Figure 8 for Figure 7 Cross-sectional view at the middle BB;

[0036] Figure 9 Schematic diagram of the structure of the air-floating turntable in an embodiment of the present invention.

[0037] In the picture:

[0038] Z, first direction;

[0039] 1. Air-floating mechanism; 11. Top plate; 111. Through hole; 12. Bottom plate; 13. Floating body; 131. Mounting hole; 132. Glue inlet hole; 133. Glue overflow hole; 134. Assembly hole; 14. First driving member; 15. Air-floating single axis; 151. Air-floating guide column; 152. Air-floating bushing; 153. Magnetic ring; 154. First elastic rubber ring; 155. Second elastic rubber ring; 16. First ruler; 17. First reader;

[0040] 2. Air-bearing turntable; 21. Workbench; 211. Conical table; 212. Limit plate; 22. Second driving member; 23. Base; 24. Air-bearing bearing; 241. Conical hole; 242. Lower air-bearing surface; 25. Second ruler; 26. Second reader. DETAILED DESCRIPTION

[0041] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0042] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0043] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0044] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0045] like Figures 1 to 9 As shown, this embodiment provides an air-floating workbench, which includes an air-floating mechanism 1 and an air-floating turntable 2. The air-floating mechanism 1 includes a top plate 11, a bottom plate 12, a floating body 13, a first driving member 14, and at least three air-floating single shafts 15. The top plate 11, the floating body 13, and the bottom plate 12 are sequentially arranged along a first direction Z. The at least three air-floating single shafts 15 are arranged between the top plate 11 and the bottom plate 12 and are spaced apart around the circumference of the floating body 13. The air-floating single shafts 15 include air-floating guide columns 151 and air-floating bushings 152. The air-floating bushings 152 are arranged on the floating body 13. An air-bearing guide post 151 extends through an air-bearing bushing 152 along a first direction Z. The ends of the air-bearing guide post 151 are fixedly connected to the top plate 11 and the bottom plate 12, respectively. A first driver 14 drives the floating body 13 to move along the first direction Z. The top plate 11 is provided with a through hole 111 that faces the floating body 13 along the first direction Z. The air-bearing turntable 2 extends through the through hole 111 and is mounted on the floating body 13. The air-bearing turntable 2 includes a worktable 21 and a second driver 22. The second driver 22 is capable of rotating the worktable 21, whose rotation axis is disposed along the first direction Z. During operation, the first driver 14 first drives the floating body 13 to move along the first direction Z, which in turn causes the floating body 13 to drive the worktable 21 on the air-bearing turntable 2 to move along the first direction Z. Simultaneously, the second driver 22 drives the worktable 21 to rotate about its rotation axis in the first direction Z. This achieves both movement of the workpiece on the worktable 21 along the first direction Z and rotation of the worktable about its axis in the first direction Z. During this process, at least three air-floating single axes 15 are arranged between the top plate 11 and the bottom plate 12, which provide guidance in the first direction Z while increasing the overall lateral air-floating stiffness. When the air-floating workbench moves horizontally, it provides lateral support for the workbench 21 and the load, suppresses the deflection during the movement, and improves the stability of the air-floating workbench.

[0046] Optionally, the through hole 111 is an avoidance hole. When the first driving member 14 drives the floating body 13 to move along the first direction Z, the workbench 21 can shuttle in the through hole 111 .

[0047] Optionally, an air-floating surface is provided between the air-floating bushing 152 and the air-floating guide column 151. This setting realizes non-contact motion and reduces friction loss. The viscous damping of the air film can absorb high-frequency vibrations and reduce jitter during motion, which is particularly suitable for high-speed reciprocating motion.

[0048] Because the floating body 13 and the base plate 12 are non-contacting, the first drive member 14 needs to operate continuously when the air-floating workbench is in operation. Failure of the first drive member 14 can easily cause the floating body 13 to fall off. To address this issue, the first direction Z is optionally a vertical direction; a magnetic force F is generated between the air-floating guide column 151 and the air-floating bushing 152, and the magnetic force F can balance the load of the floating body 13. In this embodiment, the load of the floating body 13 is balanced by the magnetic force F generated between the air-floating guide column 151 and the air-floating bushing 152. Consequently, when the first drive member 14 fails, the floating body 13 can still maintain the position at the time of the failure, thereby preventing the floating body 13 from falling off.

[0049] Regarding how to generate a magnetic force F between the air-floating guide column 151 and the air-floating bushing 152, the air-floating guide column 151 can optionally be magnetic. The air-floating single shaft 15 also includes a magnetic ring 153, which is sleeved on the air-floating guide column 151 and fixedly connected to the air-floating bushing 152. In this embodiment, the magnetic force F between the air-floating guide column 151 and the air-floating bushing 152 is generated through the interaction between the magnetic field generated by the air-floating guide column 151 and the magnetic field generated by the magnetic ring 153. Specifically, the air-floating guide column 151 can be embedded with magnetic material. In other embodiments, a magnetic coil can also be embedded in the air-floating guide column 151.

[0050] Optionally, two magnetic rings 153 are provided, and the two magnetic rings 153 are respectively located on both sides of the air-floating bushing 152 .

[0051] In other embodiments, the air-floating guide column 151 and the air-floating bushing 152 may optionally be magnetic. In this embodiment, the magnetic ring 153 is not required to be sleeved on the air-floating guide column 151. This configuration can reduce the axial size of the air-floating single shaft 15. Specifically, the air-floating bushing 152 can be made of a magnetic material.

[0052] In other embodiments, the first driver may also have a magnetic gravity compensation function, for example, a cylindrical voice coil motor with a magnetic gravity compensation function.

[0053] In other embodiments, a magnetic spring may be separately provided between the base plate 12 and the floating body 13 .

[0054] Since there is only a gap of several microns between the air-floating bushing 152 and the air-floating guide column 151, when multiple air-floating single shafts 15 are used in combination, there are higher requirements for the installation accuracy of the air-floating guide column 151 and the installation accuracy of the air-floating bushing 152; when installing the air-floating guide column 151, optionally, the parallelism between each air-floating guide column 151 is indirectly guaranteed by the verticality of the air-floating guide column 151 relative to the base plate 12, and the air-floating guide column 151 is first fixed to the base plate 12 by the locking screw at the lower end of the air-floating guide column 151, and the verticality of the four air-floating guide columns 151 relative to the bottom surface is adjusted by adding precision gaskets or grinding the lower end face of the guide column, and is controlled at the micron level.

[0055] When installing the air-floating bushing 152, in order to ensure that the axis of the air-floating bushing 152 is aligned with that of the air-floating guide column 151, the floating body 13 is optionally provided with at least three mounting holes 131 arranged along the first direction Z, and at least three air-floating bushings 152 are arranged in a one-to-one correspondence within the at least three mounting holes 131; an adhesive layer is provided between the hole walls of the mounting holes 131 and the corresponding air-floating bushings 152. In this embodiment, there may be errors during processing of the at least three mounting holes 131 arranged along the first direction Z. Therefore, when installing the air-floating assembly, an air film is first formed between the air-floating bushing 152 and the air-floating guide column 151 to ensure that the axis of the air-floating bushing 152 is aligned with that of the air-floating guide column 151. Then, an adhesive layer is provided between the hole walls of the mounting holes 131 and the corresponding air-floating bushings 152 to achieve the fixation of the relative position between the air-floating bushing 152 and the floating body 13.

[0056] Optionally, the floating body 13 is also provided with a glue inlet hole 132 and a glue overflow hole 133 connected to each mounting hole 131, and glue can be injected into the mounting hole 131 through the glue inlet hole 132; the air-floating single shaft 15 also includes two first elastic rubber rings 154, the two first elastic rubber rings 154 are both sleeved on the air-floating bushing 152 and located in the mounting hole 131, the glue inlet hole 132 and the glue overflow hole 133 are respectively located between the two first elastic rubber rings 154, and the hole wall of the mounting hole 131 and the air-floating bushing 152 clamp the first elastic rubber ring 154. In this embodiment, when an air film exists between the air-floating bushing 152 and the air-floating guide column 151, the air-floating bushing 152 and the air-floating guide column 151 are coaxially arranged. Therefore, when there is an error in the machining of the mounting hole 131, the position of the air-floating bushing 152 within the mounting hole 131 will change. Since the first elastic rubber ring 154 is elastic, the first elastic rubber ring 154 can allow the air-floating bushing 152 to change its position within the mounting hole 131. The hole wall of the mounting hole 131, the air-floating bushing 152, and the two first elastic rubber rings 154 are arranged to form an annular glue injection cavity. By injecting resin glue into the glue inlet hole 132, when glue overflows from the glue overflow hole 133, it indicates that the annular glue injection cavity is full of glue. At this time, the glue inlet hole 132 and the glue overflow hole 133 are sealed. After the resin glue in the annular glue injection cavity solidifies, the relative positions of the air-floating bushing 152 and the floating body 13 are fixed.

[0057] In other embodiments, in addition to including two first elastic rubber rings 154, each mounting hole 131 may optionally be provided with two corresponding glue inlet holes 132 and two glue overflow holes 133; the air-floating single shaft 15 may also include two second elastic rubber rings 155, both of which are sleeved on the air-floating bushing 152 and located between the two first elastic rubber rings 154. The hole wall of the mounting hole 131 and the air-floating bushing 152 clamp the second elastic rubber ring 155, and a glue inlet hole 132 and a glue overflow hole 133 are provided between each adjacent first elastic rubber ring 154 and second elastic rubber ring 155. In this embodiment, on the one hand, the hole wall of the mounting hole 131, the air-floating bushing 152, and each adjacent first elastic rubber ring 154 and second elastic rubber ring 155 are arranged to form an annular glue injection cavity, forming a total of two annular glue injection cavities. This arrangement can reduce the amount of resin glue used and reduce assembly costs. On the other hand, the area between the two second elastic rubber rings 155 can form an air-floating annular flow channel, thereby supplying air to the air-floating surface of the air-floating bushing 152 .

[0058] Optionally, the air-floating turntable 2 further includes a base 23 and an air-floating bearing 24. The base 23 is fixed to the floating body 13 and is recessed with an opening along the first direction Z, with the opening facing the through-hole 111. The air-floating bearing 24 is fixed to the base 23 and enables the worktable 21 to rotate in conjunction with the base 23. The second driving member 22 is disposed within the accommodation cavity and is in transmission connection with the worktable 21. In this embodiment, the second driving member 22 is a rotary motor, wherein a rotating stator is fixed within the accommodation cavity and a rotating rotor is fixedly connected to the worktable 21. The air-floating bearing 24 enables the worktable 21 to rotate in conjunction with the base 23, thereby enabling the second driving member 22 to drive the worktable 21 to rotate relative to the base 23.

[0059] Optionally, the floating body 13 is recessed with an assembly hole 134 , and the base 23 is inserted into the assembly hole 134 and fixedly connected to the floating body 13 .

[0060] As for the specific structure of the air-floating bearing 24, optionally, the air-floating bearing 24 is provided with a conical hole 241 opposite to the opening, and the diameter of the conical hole 241 gradually decreases along the axis of the conical hole 241 approaching the base 23; the workbench 21 includes a conical platform 211 and a limit plate 212, the conical platform 211 is inserted into the conical hole 241, and the peripheral wall of the conical platform 211 cooperates with the hole wall of the conical hole 241, the limit plate 212 is arranged in the accommodating cavity and opposite to the bottom wall of the air-floating bearing 24 opposite to the opening, the conical platform 211 and the limit plate 212 are connected to each other; the hole wall of the conical hole 241 is set as a conical air-floating surface, and the bottom wall of the air-floating bearing 24 opposite to the limit plate 212 is set as a lower air-floating surface 242. In this embodiment, after the conical platform 211 and the limiting plate 212 are connected to each other, the air bearing 24 limits the conical platform 211 and the limiting plate 212, so that the worktable 21 can only rotate relative to the air bearing 24. Furthermore, because the wall of the conical hole 241 is configured as a conical air bearing surface, and the bottom wall of the air bearing 24 opposite the limiting plate 212 is configured as a lower air bearing surface 242, an air film is generated between the worktable 21 and the air bearing 24, eliminating mechanical friction between the worktable 21 and the air bearing 24. The viscous damping of the air film absorbs high-frequency vibrations and reduces jitter during movement. Furthermore, the conical air bearing surface also provides axial and radial stiffness.

[0061] Optionally, the conical platform 211 and the limiting plate 212 are connected by bolts, thereby achieving relative fixation of the conical platform 211 and the limiting plate 212 .

[0062] Optionally, two first driving members 14 are provided, one on each side of the floating body 13, the other having a fixed end secured to the top plate 11 or the bottom plate 12, and a telescopic end secured to the floating body 13. In this embodiment, two first driving members 14 are provided, thereby improving the stability of the floating body 13 in moving along the first direction Z and preventing deflection and jamming.

[0063] Optionally, the first driving member 14 is a voice coil motor, a hydraulic cylinder, or a pneumatic cylinder.

[0064] Optionally, the air flotation mechanism 1 further includes a first ruler 16 and a first readhead 17. The first ruler 16 is fixedly mounted on the floating body 13, and the first readhead 17 is fixedly mounted on the bottom plate 12 or the top plate 11. The first ruler 16 and the first readhead 17 are disposed opposite each other, and the first readhead 17 is capable of detecting the distance moved by the first ruler 16. Specifically, the first ruler 16 may be a grating ruler, and the first readhead 17 may be a grating ruler readhead. The specific structures of the first ruler 16 and the first readhead 17 are conventional and will not be elaborated upon here.

[0065] Optionally, the air-bearing turntable 2 further includes a second ruler 25 and a second readhead 26. The second ruler 25 is fixedly mounted on the workbench 21, and the second readhead 26 is fixedly mounted on the base 23. The second ruler 25 and the second readhead 26 are arranged opposite each other, and the second readhead 26 can detect the rotation angle of the second ruler 25. Specifically, the second ruler 25 can be a grating ruler, and the second readhead 26 can be a grating ruler readhead. The specific structures of the second ruler 25 and the second readhead 26 are conventional and will not be described in detail here.

[0066] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Air flotation workbench, characterized in that, include: An air-floating mechanism (1) comprises a top plate (11), a bottom plate (12), a floating body (13), a first driving member (14) and at least three air-floating single shafts (15), wherein the top plate (11), the floating body (13) and the bottom plate (12) are arranged in sequence along a first direction (Z), and at least three air-floating single shafts (15) are arranged between the top plate (11) and the bottom plate (12) and are arranged at intervals around the circumference of the floating body (13). 15) includes an air-floating guide column (151) and an air-floating bushing (152), wherein the air-floating bushing (152) is arranged on the floating body (13), the air-floating guide column (151) is passed through the air-floating bushing (152) along the first direction (Z), the two ends of the air-floating guide column (151) are respectively fixed to the top plate (11) and the bottom plate (12), and the first driving member (14) drives the floating body (13) to move along the first direction (Z); An air-floating turntable (2), wherein the top plate (11) is provided with a through hole (111) opposite to the floating body (13) along a first direction (Z), the air-floating turntable (2) is passed through the through hole (111) and is arranged on the floating body (13), the air-floating turntable (2) includes a workbench (21) and a second driving member (22), the second driving member (22) can drive the workbench (21) to rotate, and the rotating shaft of the workbench (21) is arranged along the first direction (Z).

2. The air flotation workbench according to claim 1, characterized in that: The first direction (Z) is a vertical direction; There is a magnetic force F between the air-floating guide column (151) and the air-floating bushing (152), and the magnetic force F can balance the load of the floating body (13).

3. The air flotation workbench according to claim 2, characterized in that: The air-floating guide column (151) is magnetic; The air-floating single shaft (15) further comprises a magnetic ring (153), wherein the magnetic ring (153) is sleeved on the air-floating guide column (151) and fixedly connected to the air-floating bushing (152).

4. The air flotation workbench according to claim 2, characterized in that: The air-floating guide column (151) is magnetic, and the air-floating bushing (152) is magnetic.

5. The air flotation workbench according to claim 1, characterized in that: The floating body (13) is provided with at least three mounting holes (131) arranged along the first direction (Z), and at least three air-floating bushings (152) are arranged in a one-to-one correspondence in the at least three mounting holes (131); An adhesive layer is provided between the hole wall of the mounting hole (131) and the corresponding air-floating bushing (152).

6. The air flotation workbench according to claim 5, characterized in that: The floating body (13) is further provided with a glue inlet hole (132) and a glue overflow hole (133) communicating with each of the mounting holes (131), and glue can be injected into the mounting holes (131) through the glue inlet hole (132); The air-floating single shaft (15) also includes two first elastic rubber rings (154), both of which are sleeved on the air-floating bushing (152) and located in the mounting hole (131), the glue inlet hole (132) and the glue overflow hole (133) are respectively located between the two first elastic rubber rings (154), and the hole wall of the mounting hole (131) and the air-floating bushing (152) clamp the first elastic rubber ring (154).

7. The air flotation workbench according to claim 6, characterized in that: Each of the mounting holes (131) is correspondingly provided with two glue inlet holes (132) and two glue overflow holes (133); The air-floating single shaft (15) also includes two second elastic rubber rings (155), and the two second elastic rubber rings (155) are both sleeved on the air-floating bushing (152) and located between the two first elastic rubber rings (154). The hole wall of the mounting hole (131) and the air-floating bushing (152) clamp the second elastic rubber ring (155), and a glue inlet hole (132) and a glue overflow hole (133) are provided between each adjacent first elastic rubber ring (154) and second elastic rubber ring (155).

8. The air flotation workbench according to claim 1, characterized in that: The air-floating turntable (2) also includes a base (23) and an air-floating bearing (24), wherein the base (23) is fixed to the floating body (13) and is provided with an accommodating cavity with an opening along the first direction (Z), wherein the opening is opposite to the through hole (111), and the air-floating bearing (24) is fixed to the base (23) and enables the workbench (21) to rotate in conjunction with the base (23), and the second driving member (22) is arranged in the accommodating cavity and is transmission-connected to the workbench (21).

9. The air flotation workbench according to claim 8, characterized in that: The air bearing (24) is provided with a tapered hole (241) opposite to the opening, and the diameter of the tapered hole (241) gradually decreases along the axis of the tapered hole (241) toward the base (23); The workbench (21) includes a conical platform (211) and a limiting plate (212), wherein the conical platform (211) is inserted into the conical hole (241), and the peripheral wall of the conical platform (211) cooperates with the hole wall of the conical hole (241), and the limiting plate (212) is arranged in the accommodating cavity and is opposite to the bottom wall of the air bearing (24) opposite to the opening, and the conical platform (211) and the limiting plate (212) are connected to each other; The hole wall of the tapered hole (241) is configured as a tapered air-floating surface, and the bottom wall of the air-floating bearing (24) opposite to the limiting plate (212) is configured as a lower air-floating surface (242).

10. The air flotation workbench according to any one of claims 1 to 9, characterized in that: Two first driving members (14) are provided, and the two first driving members (14) are provided on both sides of the floating body (13). The fixed end of the first driving member (14) is fixedly connected to the top plate (11) or the bottom plate (12), and the telescopic end of the first driving member (14) is fixedly connected to the floating body (13).

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