Fully automatic batch leak detection system and leak detection method for vacuum plugs

Abstract

The present application discloses a fully automatic batch leak detection system for vacuum plugs and a leak detection method thereof, comprising: a leak detection unit, a transfer unit, a vacuum unit, a helium mass spectrometer, an air intake unit and a controller, wherein the leak detection unit comprises a pair of leak detection boxes for alternately performing helium leak detection, each leak detection box having a plurality of built-in positioning fixtures, each positioning fixture having a vacuum port in the leak detection box that can cooperate with the vacuum plug; the transfer unit comprises a conveyor belt for conveying the vacuum plugs in a front-to-rear direction and a manipulator for transferring the vacuum plugs between the conveyor belt and the vacuum ports; the vacuum unit comprises a rotary vane pump for loading a suction force and a vacuum pipeline connected between the rotary vane pump and the leak detection unit; the helium mass spectrometer is used to detect the helium concentration in the vacuum pipeline; the air intake unit conveys helium into the corresponding leak detection box; the controller controls the operation of each unit and the helium mass spectrometer; the present application significantly improves production efficiency and product quality, and ensures the detection accuracy of helium leak detection.

Description

Technical Field

[0001] The present application relates to the technical field of helium leak detection equipment, and in particular to a fully automatic batch leak detection system and a leak detection method for vacuum plugs. Background Art

[0002] Cryogenic containers use a double-layer container structure. An extremely high vacuum state must be maintained between the outer container and the inner container. After the vacuum is drawn, a vacuum plug is required to seal the container to ensure that the interlayer does not leak. As a key component, the vacuum plug is usually made by turning round steel. However, some round steel materials may have quality problems, resulting in air leakage in the center of the vacuum plug. If unqualified vacuum plugs are used to seal cryogenic containers, the high vacuum interlayer of the cryogenic container will fail. A large amount of cryogenic liquid will rapidly vaporize after being heated, causing a sudden increase in pressure, thereby affecting the quality and safety of the product. Therefore, quality inspection of vacuum plugs is crucial. Summary of the Invention

[0003] In order to solve the above technical problems, the purpose of this application is to provide a fully automatic batch leak detection system and leak detection method for vacuum plugs with high efficiency and accuracy.

[0004] To achieve the above objectives, on the one hand, the present application adopts the following technical solution: a fully automatic batch leak detection system for vacuum plugs, comprising:

[0005] The leak detection unit includes at least one pair of leak detection boxes arranged at intervals along the left-right direction, each of the leak detection boxes having a plurality of positioning fixtures built therein, each of the positioning fixtures having a vacuum port in the leak detection box capable of cooperating with the vacuum plug;

[0006] A transfer unit, comprising a conveyor belt extending in a front-to-rear direction and a manipulator arranged above the conveyor belt, wherein the conveyor belt is arranged between the at least one pair of leak detection boxes to transport the vacuum plugs in the front-to-rear direction, and the manipulator is used to transfer the vacuum plugs between the conveyor belt and each of the vacuum ports;

[0007] A vacuum unit comprising a rotary vane pump for applying suction force and a vacuum pipeline connected between the rotary vane pump and the leak detection unit, wherein the vacuum pipeline comprises a main vacuum line and at least one pair of vacuum branches, each leak detection box being equipped with one vacuum branch, each vacuum branch being connected to a plurality of positioning fixtures of the corresponding leak detection box and capable of being controlled to communicate with the corresponding vacuum port; the main vacuum line connecting the rotary vane pump and the at least one pair of vacuum branches and being configured to be controlled to communicate alternately with the at least one pair of vacuum branches;

[0008] a helium mass spectrometer, connected to the vacuum main circuit, for detecting the helium concentration in the vacuum main circuit;

[0009] an air inlet unit connected to the at least one pair of leak detection boxes and configured to be controllably communicated with the corresponding leak detection boxes to deliver helium into the corresponding leak detection boxes; and

[0010] A controller, connected to the leak detection unit, the transfer unit, the vacuum unit, the helium mass spectrometer, and the air intake unit;

[0011] Each of the leak detection boxes has a leak detection state in which a vacuum plug is loaded for helium leak detection and an empty state in which all vacuum plugs are removed. The at least one pair of leak detection boxes alternately enters the leak detection state.

[0012] The fully automatic batch leak detection system of the present application realizes automated picking and placing and automated helium leak detection, saving labor and improving work accuracy. By alternately running the leak detection boxes for helium leak detection, production efficiency and product quality are significantly improved.

[0013] In the above technical solution, it is further preferred that the leak detection box includes a box body with an opening on the top and a box cover that can cooperate with the opening, the box cover is transmission-connected to a flip motor, the flip motor is used to drive the box cover to flip between a first position closing the opening and a second position opening the opening, and the flip motor is signal-connected to the controller.

[0014] In the above technical solution, it is further preferred that the air intake unit includes a helium cylinder and a helium pipeline connected between the helium cylinder and the box body of the at least one pair of leak detection boxes, the helium pipeline includes a helium main line and at least a pair of helium branches, the helium main line is connected to the helium cylinder, each leak detection box is configured with a helium branch, and each helium branch is connected between the helium main line and the corresponding box body.

[0015] In the above technical solution, it is further preferred that a pressure reducing valve is provided on the helium main line, and a solenoid valve is arranged on each of the helium branch lines, and both the pressure reducing valve and the solenoid valve are connected to the controller signal.

[0016] In the above technical solution, it is further preferred that at least one pneumatic suction cup is installed at the end of the manipulator, and the at least one pneumatic suction cup is used to suck the vacuum plug.

[0017] In the above technical solution, it is further preferred that the vacuum unit also includes a first pneumatic valve, a second pneumatic valve and a third pneumatic valve arranged in the vacuum pipeline, the first pneumatic valve connects or cuts off the fluid connection between the vacuum main line and the helium mass spectrometer, the second pneumatic valve is connected between each vacuum branch and the vacuum main line, the second pneumatic valve connects or cuts off the fluid connection between the corresponding vacuum branch and the rotary vane pump, the third pneumatic valve is connected between each positioning tool and the vacuum branch, the third pneumatic valve connects or cuts off the fluid connection between the corresponding positioning tool and the vacuum branch, and the first pneumatic valve, the second pneumatic valve and the third pneumatic valve are all connected to the controller signal.

[0018] In the above technical solution, it is further preferred that it further includes a frame, a workbench is horizontally installed on the frame, the workbench divides the frame into a first working space and a second working space located below the first working space, the leak detection unit and the transfer unit are located in the first working space, and the vacuum unit, the air intake unit, the helium mass spectrometer and the controller are all located in the second working space.

[0019] In the above technical solution, it is further preferred that a control panel connected to the controller signal is installed on the rack, and the control panel is located in the first working space.

[0020] On the other hand, the present application provides a leak detection method based on the above-mentioned fully automatic batch leak detection system for vacuum plugs, comprising:

[0021] S1, the controller controls the conveyor belt to move the vacuum plug to the set position, and then controls the robot to transfer the vacuum plug on the conveyor belt to each positioning tool of the empty leak detection box in sequence;

[0022] S2, the controller controls the vacuum unit to connect to the leak detection box in the leak detection state, and the rotary vane pump vacuums the matching vacuum plugs through the vacuum ports on each positioning fixture;

[0023] S3, the controller controls the air inlet unit to connect to the leak detection box in the leak detection state and deliver helium into it;

[0024] S4: The helium mass spectrometer monitors the helium concentration in real time. If the helium concentration exceeds the set value, the controller controls the vacuum units to connect to the positioning tooling one by one to accurately locate the unqualified vacuum plugs. If the helium concentration does not exceed the set value, the controller determines that each vacuum plug is qualified.

[0025] S5, the controller controls the robot to sort the vacuum plugs according to the judgment results, and the qualified vacuum plugs are transferred to the conveyor belt to be transported to the downstream workstation, and the unqualified vacuum plugs are transferred by the robot to the waste collection area.

[0026] In the above technical solution, it is further preferred that in the step S4, when the helium mass spectrometer detects that the helium concentration exceeds the set value, the controller further detects leaks through a dichotomy method; first, the fluid connection between half of the positioning fixtures and the vacuum branch is cut off, and the other half of the connected positioning fixtures are subjected to helium leak detection, and then the number of connections of the positioning fixtures is gradually reduced, and finally the defective vacuum plug is located; if multiple vacuum plugs are defective, the controller controls the positioning fixtures to be connected one by one for helium leak detection.

[0027] The leak detection method of the present application controls the fully automatic batch leak detection system to perform helium leak detection alternately, greatly improving production capacity. By controlling the switching of each pneumatic valve of the vacuum unit, the helium leak detection range is controlled, the defective plug is accurately located, the probability of missed detection is reduced, and the detection accuracy is ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the three-dimensional structure of a fully automatic batch leak detection system provided in an embodiment of the present application;

[0029] Figure 2 for Figure 1 A partial enlarged schematic diagram of point A in the middle;

[0030] Figure 3 for Figure 1 The main view of the fully automatic batch leak detection system;

[0031] Figure 4 for Figure 1 Schematic diagram of the principle of the fully automatic batch leak detection system.

[0032] Among them: 100, fully automatic batch leak detection system; 10, rack; 101, first working space; 102, second working space; 1, workbench; 13, bottom plate; 14, support platform; 20, leak detection unit; 2, leak detection box; 21, box body; 22, box cover; 23, flip motor; 3, positioning tool; 31, vacuum port; 30, transfer unit; 4, conveyor belt; 41, conveyor motor; 5, manipulator; 51, pneumatic suction cup; 40, vacuum Unit; 6. Rotary vane pump; 8. Vacuum pipeline; 801. Vacuum main line; 802. Vacuum branch line; 81. First pneumatic valve; 82. Second pneumatic valve; 83. Third pneumatic valve; 84. Vacuum manifold; 85. Manifold connecting pipe; 50. Air inlet unit; 9. Helium pipeline; 91. Pressure reducing valve; 92. Solenoid valve; 93. Helium nozzle; 11. Helium cylinder; 60. Controller; 12. Control panel; 70. Helium mass spectrometer; 200. Vacuum plug. DETAILED DESCRIPTION

[0033] In order to describe the technical content, structural features, achieved purposes and effects of the application in detail, the technical solutions in the embodiments of the application will be described below in conjunction with the drawings in the embodiments of the application. Obviously, the described embodiments are only a part of the embodiments of the application, rather than all of the embodiments. In the following description, for the purpose of explanation, many specific details are set forth to provide a detailed description of various exemplary embodiments or implementations of the invention. However, various exemplary embodiments may also be implemented without these specific details or in the case of one or more equivalent arrangements. In addition, various exemplary embodiments may be different, but are not necessarily exclusive. For example, without departing from the inventive concept, the specific shape, structure and characteristics of the exemplary embodiment may be used or implemented in another exemplary embodiment.

[0034] The present application provides a fully automatic batch leak detection system for vacuum plugs, which performs batch helium leak detection on vacuum plugs through efficient alternating operation, automated picking and placing, and precise helium leak detection, significantly improving production efficiency and product quality.

[0035] like Figure 1 、 3 As shown in , 4 , the fully automatic batch leak detection system 100 includes: a frame 10 and a leak detection unit 20, a transfer unit 30, a vacuum unit 40, an air intake unit 50, a controller 60 and a helium mass spectrometer 70 installed on the frame 10. The controller 60 is controlled and connected to the leak detection unit 20, the transfer unit 30, the vacuum unit 40, the air intake unit 50 and the helium mass spectrometer 70 to control the operation of each unit and the helium mass spectrometer 70.

[0036] A workbench 1 is horizontally installed on the frame 10, and the workbench 1 divides the frame 10 into a first working space 101 and a second working space 102 located below the first working space 101. The leak detection unit 20 and the transfer unit 30 are located in the first working space 101, and the vacuum unit 40, the air intake unit 50 and the controller 60 are all located in the second working space 102.

[0037] like Figure 1 、 2 As shown in Figure 4, the leak detection unit 20 includes at least one pair of leak detection boxes 2 arranged at intervals along the left and right directions. Each leak detection box 2 has a plurality of positioning fixtures 3 built in. Each positioning fixture 3 has a vacuum port 31 in the leak detection box 2 that can cooperate with the vacuum plug 200. The vacuum plug 200 is installed on the positioning fixture 3 to seal the vacuum port 31.

[0038] In an embodiment of the present application, the leak detection unit 20 includes two leak detection boxes 2, which are installed on the workbench 1 opposite to each other on the left and right sides. Each leak detection box 2 is installed with 16 positioning tooling 3. The 16 positioning tooling 3 is divided into two groups side by side and installed in the leak detection box 2, and the positioning tooling 3 of each group is arranged at intervals along the front and back directions.

[0039] The leak detection box 2 includes a box body 21 with an opening at the top and a box cover 22 that can cooperate with the opening. The box cover 22 is connected to a flip motor 23 for transmission. The flip motor 23 is connected to the controller 60 by signal. Under the control of the controller 60, the box cover 22 is driven to flip between a first position closing the opening and a second position opening the opening. When the box cover 22 flips to the first position, it completely covers the opening of the box body 21, thereby forming an enclosed space with the box body 21, so that the vacuum plug 200 can perform helium leak detection in the enclosed space.

[0040] Each leak detection box 2 has a leak detection state in which the vacuum plug 200 is loaded for helium leak detection and an empty state in which all the vacuum plugs 200 are removed. A pair of leak detection boxes 2 enter the leak detection state alternately, which reduces pause time and improves production efficiency.

[0041] like Figure 1 、 3 As shown, the transfer unit 30 includes a conveyor belt 4 extending in the front-to-back direction and a robot 5 arranged above the conveyor belt 4. The conveyor belt 4 extends in the front-to-back direction and is arranged between two leak detection boxes 2. The conveyor belt 4 is connected to a conveying motor 41 for transmission. The conveying motor 41 is connected to the controller 60 for signal. Under the control of the controller 60, the conveyor belt 4 is driven to transport the vacuum plug in the front-to-back direction.

[0042] The manipulator 5 is hoisted on top of the frame 10 and is used to transfer the vacuum plug 200 between the conveyor belt 4 and each vacuum port 31. The manipulator 5 is connected to the controller 60 by signal. Under the control of the controller 60, the manipulator 5 can move the vacuum plug 200 in the front-back, up-down, and left-right directions. This is flexible and convenient, enabling automated placement of the vacuum plug, reducing labor costs and improving work accuracy. At least one pneumatic suction cup 51 is installed at the end of the manipulator 5. The at least one pneumatic suction cup 51 is connected to the controller 60 by signal. Under the control of the controller 60, it sucks up the vacuum plug 200 and carries it between the conveyor belt 4 and each vacuum port 31.

[0043] like Figure 1 、 3As shown in Figure 4, the vacuum unit 40 includes a rotary vane pump 6 for loading the suction force and a vacuum pipeline 8 connected between the rotary vane pump 6 and the leak detection unit 20. The vacuum pipeline 8 includes a vacuum main line 801 and at least one pair of vacuum branches 802. Each leak detection box 2 is equipped with a vacuum branch 802. Each vacuum branch 802 is connected to several positioning fixtures 3 of the corresponding leak detection box 2 and can be controlled to communicate with the corresponding vacuum port 31; the vacuum main line 801 connects the rotary vane pump 6 and at least one pair of vacuum branches 802, and is configured to be able to be controlled to communicate alternately with at least one pair of vacuum branches 802.

[0044] The helium mass spectrometer 70 is connected to the vacuum main line 801 and is used to monitor the helium concentration in the vacuum main line in real time. If the helium concentration exceeds the standard, it means that there is a vacuum plug leaking, and defective vacuum plugs can be accurately detected.

[0045] In the vacuum unit 40, a first pneumatic valve 81 is connected between the main vacuum line 801 and the helium mass spectrometer 70. This first pneumatic valve 81 is signal-connected to the controller 60 and, under the control of the controller 60, opens or closes the fluid connection between the main vacuum line 801 and the helium mass spectrometer 70. When the rotary vane pump 6 is evacuating, the first pneumatic valve 81 is closed to avoid affecting the operation of the helium mass spectrometer 70. A second pneumatic valve 82 is connected between each vacuum branch line 802 and the main vacuum line 801. This second pneumatic valve 82 is signal-connected to the controller 60 and, under the control of the controller 60, opens or closes the fluid connection between the corresponding vacuum branch line 802 and the rotary vane pump 6. The top of each positioning tool 3 forms a vacuum port 31 in the box body 21 of the leak detection box 2, and the bottom thereof passes through the box body 21 and is connected to the corresponding vacuum branch 802 through the third pneumatic valve 83 below the box body 21. The third pneumatic valve 83 is connected to the controller 60 signal, and connects or cuts off the fluid connection between the corresponding positioning tool 3 and the vacuum branch 802 under the control of the controller 60.

[0046] The second pneumatic valves 82 of a pair of vacuum branches 802 are opened alternately under the control of the controller 60. When the leak detection box 2 corresponding to each vacuum branch is in the leak detection state, the corresponding second pneumatic valve 82 and third pneumatic valve 83 are opened to perform vacuum and helium leak detection.

[0047] Each vacuum branch 802 includes a pair of vacuum manifolds 84 and a manifold connecting pipe 85 connecting the pair of vacuum manifolds 84. The pair of vacuum manifolds 84 are arranged relatively to each other on the left and right sides of the corresponding leak detection box 2. Multiple KF flanges are welded on each vacuum manifold 84, and are connected one by one to a corresponding group of positioning tooling 3 through multiple KF flanges. Each third pneumatic valve 83 controls the on-off between the corresponding KF flange and the corresponding positioning tooling 3.

[0048] The air supply unit 50 is connected to a pair of leak detection boxes 2 and is configured to be controllably connected to the corresponding leak detection boxes 2 to deliver helium into the corresponding leak detection boxes 2. The air supply unit 50 includes a helium cylinder 11 and a helium pipeline 9 connected between the helium cylinder 11 and the box bodies 21 of the pair of leak detection boxes 2. The helium pipeline 9 includes a main helium line and at least a pair of helium branches. The main helium line is connected to the helium cylinder 11, and each leak detection box 2 is configured with a helium branch line, each helium branch line connected between the main helium line and the corresponding box body 21.

[0049] A pressure reducing valve 91 is installed on the main helium circuit, and a solenoid valve 92 is installed on each helium branch circuit. Both pressure reducing valve 91 and solenoid valve 92 are signal-connected to the controller 60. Under the control of the controller 60, each solenoid valve 92 connects or disconnects the fluid connection between the helium cylinder 11 and the corresponding leak detection box 2. It also controls the flow rate of the corresponding helium branch circuit, rationally controlling the helium flow rate, reducing helium waste, and saving energy. Each helium branch circuit includes a helium nozzle 93 installed in the box body 21 of the corresponding leak detection box 2. The helium nozzle 93 is used to spray helium into the box body 21.

[0050] like Figure 1 、 3 As shown, a control panel 12 is mounted on the frame 10 and is signal-connected to the controller 60. The control panel 12 can display various production parameters transmitted by the controller 60 for direct reading by an operator, and can also allow the operator to input instructions and parameters and transmit the instructions and parameters to the controller 60. The control panel 12 is located in the first workspace 101 to facilitate operation by the operator.

[0051] Among them, a base plate 13 is also installed at the bottom of the frame 10, and the base plate 13 is horizontally installed at the bottom of the second working space 102. A support platform 14 is installed on the base plate 13, and the rotary vane pump 6 is installed between the support platform 14 and the base plate 13. The helium mass spectrometer 70 is installed above the support platform 14. The helium mass spectrometer 70 and the rotary vane pump 6 are stacked up and down, which effectively reduces the footprint of the fully automatic batch leak detection system 100 and reduces the difficulty of connecting the helium mass spectrometer 70 and the vacuum pipeline 8.

[0052] The present application also provides a leak detection method based on the above-mentioned fully automatic batch leak detection system for vacuum plugs, the leak detection method comprising:

[0053] S1, the controller controls the conveyor belt to move the vacuum plug to the set position, and then controls the robot to transfer the vacuum plug on the conveyor belt to each positioning tool of the empty leak detection box in sequence;

[0054] S2, the controller controls the vacuum unit to connect to the leak detection box in the leak detection state, and the rotary vane pump vacuums the matching vacuum plugs through the vacuum ports on each positioning fixture;

[0055] S3, the controller controls the air inlet unit to connect to the leak detection box in the leak detection state and deliver helium into it;

[0056] S4: The helium mass spectrometer monitors the helium concentration in real time. If the helium concentration exceeds the set value, the controller controls the vacuum units to connect to the positioning tooling one by one to accurately locate the unqualified vacuum plugs. If the helium concentration does not exceed the set value, the controller determines that each vacuum plug is qualified.

[0057] S5, the controller controls the robot to sort the vacuum plugs according to the judgment results, and the qualified vacuum plugs are transferred to the conveyor belt to be transported to the downstream workstation, and the unqualified vacuum plugs are transferred by the robot to the waste collection area.

[0058] In step S1, the controller 60 controls the operation of the manipulator 5 according to the current working status of each leak detection box 2. When a leak detection box 2 is in an empty state, the manipulator 5 is promptly commanded to transfer the vacuum plug 200 into the leak detection box 2 and seal the vacuum port 31 of each positioning tool 3 in the leak detection box 2 with the vacuum plug 200.

[0059] In step S2, the third pneumatic valve 83 and the second pneumatic valve 82 in the vacuum branch 802 connected to the leak detection box 2 that has just been loaded in step S1 are opened, and the vacuum branch connects the leak detection box 2 and the rotary vane pump 6. The rotary vane pump 6 loads suction negative pressure at each vacuum port 31 of the leak detection box 2 until the vacuum degree at each vacuum port 31 reaches the set value, and the rotary vane pump 6 stops working.

[0060] In step S3, the controller 60 controls the box cover 22 of the leak detection box 2 in step S1 to flip to the first position to seal the leak detection box 2, and then controls the solenoid valve 92 corresponding to the leak detection box 2 in step S1 in the air intake unit 50 to open, and the helium cylinder 11 outputs helium and sprays helium toward the sealed leak detection box 2 through the helium nozzle 93 in the leak detection box 2.

[0061] In step S4, the controller 60 controls the first pneumatic valve 81 to open, and the helium mass spectrometer 70 is connected to the vacuum main line 801 to monitor the helium concentration of the vacuum branch connected to the leak detection box 2 in step S1. If the helium concentration exceeds the set value, it means that the helium in the leak detection box 2 enters the vacuum branch 802 from the vacuum port 31 through at least one vacuum plug 200, indicating that there is a leak in the vacuum plug 200; if the helium concentration does not exceed the standard, this batch of vacuum plugs are all qualified products, and the process goes to step S5.

[0062] When the helium mass spectrometer 70 detects a helium concentration exceeding a set value, the controller 60 performs further leak detection using a binary method. First, it closes half of the third pneumatic valves 83 in the vacuum branch 802, severing fluid communication between half of the positioning fixtures 3 and the vacuum branch. Helium leak detection is then performed on the remaining connected positioning fixtures 3. The number of third pneumatic valves 83 opened is then gradually reduced, ultimately locating the defective vacuum plug 200. If multiple vacuum plugs 200 are defective, the controller 60 controls the third pneumatic valves 83 to open one by one, performing helium leak detection on each positioning fixture 3 to ensure accurate detection and reduce the probability of missed detection.

[0063] In step S5, after the leak detection box 2 in step S1 is inspected, the first pneumatic valve 81 is closed, and the solenoid valve 92, the second pneumatic valve 82 and the third pneumatic valve 83 corresponding to the leak detection box 2 are all closed. The controller 60 controls the box cover 22 of the leak detection box 2 to flip to the second position, and the manipulator 5 can sort the vacuum plugs in the leak detection box 2. The leak detection box 2 is in an empty state again, and steps S1 to S5 are cycled.

[0064] The first pneumatic valve, the second pneumatic valve and the third pneumatic valve of the present application may also be replaced by controllable valves of other types of structures, such as solenoid valves.

[0065] The above shows and describes the basic principles, main features and advantages of the present application. Those skilled in the art should understand that the present application is not limited to the above embodiments. The above embodiments and descriptions are only for illustrative purposes. Various changes and improvements may be made to the present application without departing from the spirit and scope of the present application. The scope of protection claimed in the present application is defined by the appended claims, the description and their equivalents.

Claims

1. A fully automatic batch leak detection system for vacuum plugs, characterized in that: include: The leak detection unit includes at least one pair of leak detection boxes arranged at intervals along the left-right direction, each of the leak detection boxes having a plurality of positioning fixtures built therein, each of the positioning fixtures having a vacuum port in the leak detection box that can cooperate with the vacuum plug; the leak detection box includes a box body with an opening at the top and a box cover that can cooperate with the opening, the box cover is connected to a flip motor, and the flip motor is used to drive the box cover to flip between a first position closing the opening and a second position opening the opening; A transfer unit, comprising a conveyor belt extending in a front-to-rear direction and a manipulator arranged above the conveyor belt, wherein the conveyor belt is arranged between the at least one pair of leak detection boxes to transport the vacuum plugs in the front-to-rear direction, and the manipulator is used to transfer the vacuum plugs between the conveyor belt and each of the vacuum ports; A vacuum unit comprising a rotary vane pump for applying suction force and a vacuum pipeline connected between the rotary vane pump and the leak detection unit, wherein the vacuum pipeline comprises a main vacuum line and at least one pair of vacuum branches, with each leak detection box being equipped with one vacuum branch; each vacuum branch is connected to the plurality of positioning fixtures corresponding to the leak detection box and is controllably fluidically connected to the corresponding vacuum port; the main vacuum line connects the rotary vane pump and the at least one pair of vacuum branches and is configured to be controllably connected to each vacuum branch alternately; a helium mass spectrometer, connected to the vacuum main circuit and used to detect the helium concentration in the vacuum main circuit; an air inlet unit connected to the at least one pair of leak detection boxes and configured to be controllably and alternately fluidically connected to each of the leak detection boxes to deliver helium into the corresponding leak detection box; the air inlet unit includes a helium cylinder and a helium pipeline connected between the helium cylinder and the box body of the at least one pair of leak detection boxes, the helium pipeline including a main helium line and at least one pair of helium branches, the main helium line being connected to the helium cylinder, each leak detection box being configured with a helium branch, and each helium branch being connected between the main helium line and the corresponding box body; as well as A controller, connected to the leak detection unit, the transfer unit, the vacuum unit, the helium mass spectrometer, and the air intake unit; Each of the leak detection boxes has a leak detection state in which a vacuum plug is loaded for helium leak detection and an empty state in which all vacuum plugs are removed, and each of the leak detection boxes alternately enters the leak detection state; The vacuum unit also includes a first valve, several second valves and several third valves arranged in the vacuum pipeline, the first valve is configured to connect or cut off the fluid connection between the vacuum main line and the helium mass spectrometer, each vacuum branch is connected to the vacuum main line with a second valve, each second valve is configured to connect or cut off the fluid connection between the corresponding vacuum branch and the rotary vane pump, a third valve is arranged on the flow path between the vacuum port of each positioning tool and the vacuum branch, each third valve is configured to connect or cut off the fluid connection of the flow path between the vacuum port of the corresponding positioning tool and the vacuum branch, the first valve, the several second valves and the several third valves are all connected to the controller control; the flip motor is connected to the controller signal.

2. The fully automatic batch leak detection system according to claim 1, characterized in that: The helium main line is provided with a pressure reducing valve, and each of the helium branch lines is provided with a solenoid valve. Both the pressure reducing valve and the solenoid valve are connected to the controller signal.

3. The fully automatic batch leak detection system according to claim 1, characterized in that: At least one pneumatic suction cup is installed at the end of the manipulator, and the at least one pneumatic suction cup is used to suck the vacuum plug.

4. The fully automatic batch leak detection system according to claim 1, characterized in that: The first valve, the second valve and the third valve are all pneumatic valves.

5. The fully automatic batch leak detection system according to claim 1, characterized in that: The machine also includes a frame, on which a workbench is horizontally mounted. The workbench divides the frame into a first working space and a second working space located below the first working space. The leak detection unit and the transfer unit are located in the first working space, and the vacuum unit, the air intake unit, the helium mass spectrometer, and the controller are all located in the second working space.

6. The fully automatic batch leak detection system according to claim 5, characterized in that: A control panel connected to the controller signal is installed on the rack, and the control panel is located in the first working space.

7. A leak detection method for use in a fully automatic batch leak detection system for vacuum plugs according to any one of claims 1 to 6, characterized in that: include: S1, the controller controls the conveyor belt to move the vacuum plug to the set position, and then controls the robot to transfer the vacuum plug on the conveyor belt to each positioning tool of the empty leak detection box in sequence; S2, the controller controls the vacuum unit to connect to the leak detection box in the leak detection state, and the rotary vane pump vacuums the matching vacuum plugs through the vacuum ports on each positioning fixture; S3, the controller controls the air inlet unit to connect to the leak detection box in the leak detection state and deliver helium into it; S4: The helium mass spectrometer monitors the helium concentration in real time. If the helium concentration exceeds the set value, the controller controls the vacuum units to connect to the positioning tooling one by one to accurately locate the unqualified vacuum plugs. If the helium concentration does not exceed the set value, the controller determines that each vacuum plug is qualified. S5, the controller controls the robot to sort the vacuum plugs according to the judgment results, and the qualified vacuum plugs are transferred to the conveyor belt to be transported to the downstream workstation, and the unqualified vacuum plugs are transferred by the robot to the waste collection area.

8. The leak detection method according to claim 7, characterized in that: In step S4, when the helium mass spectrometer detects that the helium concentration exceeds the set value, the controller further performs leak detection through a dichotomy method; first, the fluid connection between half of the positioning fixtures and the vacuum branch is cut off, and the other half of the positioning fixtures that are connected are subjected to helium leak detection. Then, the number of connected positioning fixtures is gradually reduced, and finally the defective vacuum plug is located; if multiple vacuum plugs are defective, the controller controls the positioning fixtures to be connected one by one for helium leak detection.

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