Automatic target changing device for plasma generator

Abstract

The present application discloses an automatic target changing device for a plasma generator, comprising a fixing member, a first drive assembly, a second drive assembly, a conveying assembly, and a disassembly and assembly mechanism. The fixing member is connected to a housing of the plasma generator, and the first drive assembly cooperates with the housing to drive the housing back and forth between a working station and a target changing station, and the second drive assembly realizes the lifting and lowering of the housing, thereby replacing the manual lifting and moving of the housing. The conveying assembly transfers new and old targets at the target changing station, and the screwdriver, rotary drive assembly, and lifting drive assembly in the disassembly and assembly mechanism, which correspond one-to-one to the screws, realize automatic removal and tightening of the screws and automatic replacement of the targets, replacing the step-by-step operations of manual alignment, screw removal, and target replacement. This solves the problems of time-consuming manual operations and fragmented process steps, can shorten equipment downtime, and avoid the reduction of wafer yield and increase in unit manufacturing cost caused by interruption of production rhythm due to downtime.

Description

Technical Field

[0001] The present application relates to the technical field of wafer manufacturing equipment, and in particular to an automatic target changing device for a plasma generator. Background Art

[0002] In the field of semiconductor manufacturing, the plasma generator is the core equipment of the physical vapor deposition (PVD) process. It bombards the target material with plasma, causing the target atoms or molecules to be deposited on the wafer surface, forming key functional structures such as conductive layers and insulating layers.

[0003] With the breakthrough of chip manufacturing process to 5nm and 3nm nodes and the popularization of 12-inch large-size wafers, target materials, as consumables, need to be replaced frequently. The efficiency and safety of the replacement process directly affect the continuity of the production line and the release of production capacity.

[0004] In existing technology, the target and the plasma generator housing are typically secured together with multiple screws. Target replacement requires first separating the housing from the process chamber, followed by manual operations such as moving the housing, removing the screws, removing the old target, installing the new target, and tightening the screws. This poses a significant safety risk, as the plasma generator housing and targets are relatively heavy (typically tens to hundreds of kilograms). Manual lifting and moving can easily lead to equipment collisions or personal injury due to improper handling. Furthermore, manual alignment and screw removal are time-consuming, severely limiting production efficiency. Furthermore, the target replacement process is fragmented, requiring separate steps for separating the housing from the process chamber, transferring the housing to the target replacement area, removing and tightening the screws one by one, and replacing the old target with the new one. These steps require separate, uncoordinated operations, resulting in unmanageable equipment downtime. Semiconductor production lines require extremely high continuity requirements, and downtime that disrupts production not only reduces wafer yield but also increases unit manufacturing costs due to idle production capacity. This issue is increasingly constraining the competitiveness of domestic industrial chains, particularly in the context of capacity expansion in sectors such as photovoltaics and display panels.

[0005] Therefore, there is an urgent need for a device that can realize automatic target replacement to solve the safety hazards of manual operation, shorten the time spent on target replacement, and improve process coordination, thereby ensuring the efficient and continuous operation of the production line. Summary of the Invention

[0006] The purpose of this application is to overcome the deficiencies in the prior art and to provide an automatic target changing device for a plasma generator.

[0007] The present application provides an automatic target changing device for a plasma generator, comprising: a fixing member for connecting a housing of the plasma generator; a first driving assembly for driving the fixing member and the housing to move back and forth between a working station and a target changing station, wherein the housing can be connected to a process chamber at the working station to facilitate wafer processing, and the housing can be separated from a target material at the target changing station; a second driving assembly for driving the fixing member and the housing to perform lifting motions; a conveying assembly provided at the target changing station, wherein a conveying surface of the conveying assembly for receiving the target material is provided with a position-avoiding hole; a disassembly and assembly mechanism provided at the target changing station and below the conveying assembly, wherein the disassembly and assembly mechanism comprises: a plurality of screwdrivers, wherein the screwdrivers correspond to the screws connecting the housing and the target material one by one, and a magnet is provided in the screwdrivers to attract the removed screws; a lifting mechanism for lifting the fixing member and the housing ... The lowering drive component is used to drive the screwdriver to rise and fall; the rotating drive component is used to drive the screwdriver to rotate; when changing the target, the second drive component drives the fixing part and the shell to rise, so that the shell is separated from the process chamber, and the first drive component drives the fixing part and the shell to move toward the target changing station; after the shell reaches the target changing station, the avoidance hole, the screwdriver and the screws connecting the shell and the target material correspond one by one; the lifting drive component drives the screwdriver to rise, and the screwdriver can pass through the avoidance hole and act on the screw; the rotating drive component drives the screwdriver to rotate, and the screwdriver can remove the screw; the lifting drive component drives the screwdriver and the screw to descend, so that the conveying component can transfer the removed old target material and feed in the new target material; the lifting drive component drives the screwdriver and the screw to rise, and cooperates with the rotating drive component, so that the screw can lock the new target material and the shell.

[0008] Furthermore, the plasma generator is detachably connected to the process chamber; an annular flange is provided on the bottom of the shell facing the process chamber, and an annular groove adapted to the annular flange is provided on the top of the process chamber facing the plasma generator, and an elastic sealing member is provided in the annular groove; one of the shell and the process chamber is provided with at least two locking hooks equidistantly distributed along the circumference, and the other is provided with a corresponding locking ring; after the plasma generator returns to the working station, the annular flange is embedded in the annular groove, compressing the elastic sealing member, and the locking hook is buckled with the locking ring, thereby fastening and sealing the plasma generator and the process chamber.

[0009] Furthermore, the fixing member is arranged in the form of a gantry, and a lifting block is provided on each side of the fixing member; an inner concave slot is provided on each side of the outer shell, and the lifting block can enter the inner concave slot, and when the fixing member rises, the lifting block can lift the outer shell; a supporting assembly is also provided on the fixing member, and the supporting assembly includes: a support plate for supporting the bottom surface of the outer shell; a supporting driving member and a connecting rod transmission structure, and the supporting driving member can drive the support plate close to or away from the bottom surface of the outer shell through the connecting rod transmission structure.

[0010] Furthermore, the concave slot is open on one side facing the target changing station and is provided with a limiting wall on the other side away from the target changing station. The top of the concave slot is provided with a limiting slot, and the top surface of the lifting block is provided with a limiting plug; so that the lifting block is lower than the top of the concave slot, and the lifting block can enter the concave slot by translation; after the lifting block moves to contact the limiting wall, the lifting block rises, and the limiting plug can be inserted into the limiting slot; a pressure sensor is provided in the limiting slot; after the limiting plug is inserted into the limiting slot and the lifting block lifts the plasma generator, the pressure sensor triggers a pressure fluctuation to confirm that the fixing part is connected to the shell.

[0011] Furthermore, the automatic target changing device for the plasma generator also includes a first positioning mechanism, which is used to limit the movement range of the fixed part to ensure that the fixed part reaches and stays at the working station or the target changing station; the first positioning mechanism includes: a first limiting unit, which is provided at the working station; a second limiting unit, which is provided at the target changing station; and a detection positioning unit, which is provided on the fixed part; when the detection positioning unit detects the first limiting unit, the fixed part reaches the working station and the first drive component stops driving; when the detection positioning unit detects the second limiting unit, the fixed part reaches the target changing station and the first drive component stops driving.

[0012] Furthermore, the automatic target changing device for the plasma generator also includes a second positioning mechanism, which is used to limit the movement range of the transmission component to ensure that the avoidance hole corresponds one-to-one with the screwdriver after reaching the target changing station; the second positioning mechanism includes a positioning pin, which is arranged under the transmission component; at least two positioning holes are provided on the transmission surface of the transmission component, and at least two positioning holes are arranged at intervals along the movement direction of the transmission component; every time the transmission component moves a station, there will be a positioning hole facing the positioning pin, so that the positioning pin is inserted into the positioning hole, which can confirm and calibrate the position of the transmission component.

[0013] Furthermore, the transmission component includes a first reel, a second reel and a conveyor belt, one end of the conveyor belt is wound around the first reel, and the other end is wound around the second reel, and a avoidance hole is provided on the belt surface of the conveyor belt; so that one of the first reel and the second reel performs a winding movement and the other performs an unwinding movement, and the conveyor belt can move toward the reel performing the winding movement.

[0014] Furthermore, the automatic target changing device for the plasma generator also includes: a supporting platform for supporting the conveyor belt, and a vertically penetrating auxiliary avoidance hole is provided on the supporting platform; a fine-motion adjustment module, and the fine-motion adjustment module includes three groups of displacement drive parts, which are respectively used to realize the X-axis translation, Y-axis translation and θ-angle rotation adjustment of the supporting platform to ensure that the auxiliary avoidance holes correspond to the avoidance holes one by one; a connecting part is also provided on the supporting platform, and the connecting part is used to fix the supporting platform and the conveyor belt. In the fixed state, the fine-motion adjustment module can drive the conveyor belt to perform X-axis translation, Y-axis translation and θ-angle rotation adjustment through the supporting platform to ensure that the avoidance holes correspond to the screws connecting the shell and the target material one by one.

[0015] Furthermore, the disassembly and assembly mechanism also includes: a rack extending in the vertical direction and provided on the side of the screwdriver; a gear rotatably provided under the transmission assembly and meshing with the rack; a splint provided on the gear; when the screwdriver rises, the rack drives the gear to rotate, causing the splint to flip in the direction away from the screwdriver; when the screwdriver descends, the rack drives the gear to rotate in the opposite direction, causing the splint to flip in the direction close to the screwdriver, and the splint can press against the screw on the screwdriver to fix the screw.

[0016] Furthermore, the disassembly and assembly mechanism includes: a rotating drive member and a toothed disc, the rotating drive member is used to drive the toothed disc to rotate; multiple linkage gears, any linkage gear is connected to a screwdriver, the linkage gear is engaged with the toothed disc, and the rotation of the toothed disc can drive all the linkage gears to rotate, thereby realizing the rotation of the screwdriver.

[0017] The present application provides an automatic target changing device for a plasma generator, comprising a fixing member, a first drive assembly, a second drive assembly, a conveying assembly, and a disassembly and assembly mechanism. The fixing member is connected to the housing of the plasma generator, and the first drive assembly cooperates with the housing to drive the housing back and forth between a working station and a target changing station, while the second drive assembly realizes the raising and lowering of the housing, thereby replacing the manual lifting and moving of the housing and avoiding the risk of equipment collision or personal injury caused by the heavy weight of the housing and target material. The conveying assembly transfers new and old targets at the target changing station, and the screwdriver, rotary drive assembly, and lifting drive assembly in the disassembly and assembly mechanism, which correspond to the screws one by one, realize automatic removal and tightening of the screws and automatic replacement of the targets, replacing the step-by-step manual alignment, screw removal, and target replacement operations, solving the problems of time-consuming manual operations and fragmented processes, shortening equipment downtime, and avoiding the reduction in wafer yield and increase in unit manufacturing cost caused by interruption of production rhythm due to downtime. Especially in the context of capacity expansion in the photovoltaic and display panel fields, the device can effectively improve the continuity of the production line and the efficiency of capacity release. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of an automatic target changing device for a plasma generator provided in this application;

[0019] Figure 2 for Figure 1 The automatic target changing device for a plasma generator shown is a schematic structural diagram after omitting the plasma generator and the process chamber;

[0020] Figure 3 for Figure 2 The structure diagram of the automatic target changing device for a plasma generator shown is shown after omitting the first drive assembly and the second drive assembly;

[0021] Figure 4 A schematic diagram of the structure of a transmission component and disassembly mechanism provided in this application;

[0022] Figure 5 for Figure 4 A schematic diagram of the structure of the transmission assembly and the disassembly mechanism in another state is shown;

[0023] Figure 6 This is a schematic structural diagram of another automatic target changing device for a plasma generator provided in this application. DETAILED DESCRIPTION

[0024] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0025] The present application provides an automatic target changing device for a plasma generator, comprising: a fixing member 11 for connecting a housing 1 of a plasma generator; a first driving assembly 21 for driving the fixing member 11 and the housing 1 to move back and forth between a working station and a target changing station, wherein the housing 1 can be connected to a process chamber 3 at the working station to facilitate wafer processing, and the housing 1 can be separated from a target material 2 at the target changing station; a second driving assembly 22 for driving the fixing member 11 and the housing 1 to perform lifting motions; a conveying assembly 23 provided at the target changing station, wherein the conveying assembly 23 is provided with a position avoidance hole 23d on a conveying surface for receiving the target material 2; a disassembly and assembly mechanism provided at the target changing station and below the conveying assembly 23, wherein the disassembly and assembly mechanism comprises: a plurality of screwdrivers 31, wherein the screwdrivers 31 correspond one to one with screws connecting the housing 1 and the target material 2, and wherein a magnet is provided inside the screwdriver 31 to attract the removed screws; a lifting and lowering driving assembly 23; a plurality of screwdrivers 31 for connecting the housing 1 and the target material 2 ...; a plurality of screwdrivers 31 for connecting the housing 1 and the target material 2, and wherein a plurality of screwdrivers 31 for connecting the housing 1 and the target material 2; a plurality of screwdrivers 31 for connecting the housing 1 and the target material 2, and wherein a plurality of screwdrivers 31 for connecting the housing 1 and the target material 2; a plurality of screwdrivers 31 for connecting the housing The first drive assembly 21 drives the fixing member 11 to move the shell 1 toward the target changing station; after the shell 1 reaches the target changing station, the avoidance hole 23d and the screwdriver 31 correspond one by one to the screws connecting the shell 1 and the target material 2; the lifting drive assembly drives the screwdriver 31 to rise, and the screwdriver 31 can pass through the avoidance hole 23d and act on the screw; the rotation drive assembly drives the screwdriver 31 to rotate, and the screwdriver 31 can remove the screw; the lifting drive assembly drives the screwdriver 31 to descend with the screw, so that the conveying assembly 23 can transfer the removed old target material and feed in the new target material; the lifting drive assembly drives the screwdriver 31 to rise with the screw, and cooperates with the rotation drive assembly so that the screw can lock the new target material and the shell 1.

[0026] For details, please refer to Figure 1 In the illustrated embodiment, a process chamber 3 is located at a workstation. A carrier is provided within the process chamber 3 for receiving wafers. The top of the process chamber 3 is open for connection to a plasma generator. The plasma generator is detachably mounted on the process chamber 3. The automatic target changing device provided in this application is capable of removing the plasma generator from the process chamber 3 and transferring it to the target changing station, allowing the disassembly mechanism to replace the target material 2.

[0027] Combined with reference Figure 2 The first drive assembly 21 includes a motor, a screw, and a guide rod. The screw and guide rods extend in a first horizontal direction, are parallel to each other, and are fixed to the equipment frame. A servo motor is used as the motor. The motor's output shaft is connected to one end of the screw via a timing belt assembly to drive the screw's rotation. To improve guidance reliability, the first drive assembly 21 includes two sets of guide rods, spaced apart along a second horizontal direction, with the first horizontal direction, the second horizontal direction, and the vertical direction perpendicular to each other.

[0028] In other embodiments, the first driving assembly 21 may be a linear driving component such as a pneumatic cylinder or an electric cylinder.

[0029] Continue to refer to Figure 1 The fixing member 11 is arranged in the form of a gantry, comprising two vertical rods and a horizontal rod. The two vertical rods are spaced apart along the second horizontal direction. The horizontal rod is welded or bolted to the top ends of the two vertical rods, forming a "door"-shaped frame, which allows the housing 1 to be tightly clamped inside the frame (wear-resistant rubber pads can be placed inside the vertical rods to prevent scratches on the housing 1). Through holes are provided at the bottom ends of the vertical rods, and the vertical rods correspond one-to-one with the guide rods. The vertical rods are mounted on the guide rods through the through holes and can slide along the guide rods.

[0030] In other embodiments, the fixing member 11 can be any component that can be connected to the housing 1 to extract the plasma generator, such as a clamp, a suction cup, etc.

[0031] Combined with reference Figure 2 A nut is provided on one side of one of the vertical rods, and the nut is threadedly connected to the lead screw. When the motor drives the lead screw to rotate, the nut moves along the lead screw's axial direction, driving the fixing member 11 to translate along the guide rod in the first horizontal direction, thereby achieving the transfer of the housing 1 between the working station and the target changing station.

[0032] Continue to refer to Figure 1 and Figure 2 The second drive assembly 22 includes four groups of oil cylinders, which are distributed in pairs and can cooperate with the support to install the first drive assembly 21 and the frame of the fixing member 11. When the plasma generator needs to be raised or lowered, the four groups of oil cylinders are driven synchronously to stabilize the heavy equipment.

[0033] In other embodiments, the second drive assembly 22 may be a linear drive component such as a pneumatic cylinder or an electric cylinder.

[0034] Continue to refer to Figure 1 and Figure 2 The conveyor assembly 23 is located at the target exchange station. The conveyor assembly 23 is in the form of a conveyor belt. The conveyor assembly 23 is oriented in the second horizontal direction (the conveyor belt 23c extends along the second horizontal direction) to output or input the target material 2. The conveyor belt 23c has avoidance holes 23d on its surface. The number and position of the avoidance holes 23d correspond to the screws connecting the housing 1 and the target material 2. The diameter of the avoidance holes 23d is adapted to accommodate a screwdriver 31, allowing the screwdriver 31 to pass through for installing or removing the screws.

[0035] In other embodiments, the conveying component 23 may also be any component capable of conveying the target material 2, such as a transmission roller, a moving platform, or the like.

[0036] In one embodiment, the transmission component 23 is in the form of a conveyor belt, and the movement range of the conveyor belt 23c includes two stations, namely the target changing station and the loading and unloading station. The target changing station is located directly above the disassembly and assembly mechanism, corresponding to the end position of the fixed part 11 transferring the shell 1; the loading and unloading station is used to deliver old target materials and welcome new target materials.

[0037] In this embodiment, the conveyor belt 23c is provided with only one set of avoidance holes 23d. During target changes, the portion of the conveyor belt 23c with the avoidance holes 23d is located at the target change station to receive the old target. As the conveyor belt 23c rotates, the old target is transported to the loading and unloading station, where workers or mechanical equipment (such as a robot) remove the old target and replace it with a new one (the screw holes on the new target correspond one-to-one with the avoidance holes 23d on the conveyor belt 23c). The conveyor belt 23c then reverses, transporting the new target back to the target change station, where the assembly and disassembly mechanism can then install the new target.

[0038] The two-station design can realize target material replacement through a single set of avoidance holes 23d, and the structure is simple.

[0039] In another embodiment, the movement range of the conveyor belt 23c includes three stations, namely the loading station, the target changing station and the unloading station. The target changing station is located between the loading station and the unloading station. The loading station is used to place new target materials, and the unloading station is used to deliver old target materials.

[0040] In this embodiment, at least two groups of avoidance holes 23d are provided on the conveyor belt 23c. The number and position of each group of avoidance holes 23d correspond one-to-one to the screws connecting the shell 1 and the target material 2. The distance between any two adjacent groups of avoidance holes 23d is equal to the distance between adjacent workstations.

[0041] Initially, one set of avoidance holes 23d is located at the target-changing station, corresponding to the old target to be removed, while the other set of avoidance holes 23d is located at the loading station, corresponding to the new target to be installed. After the old target is removed, the conveyor belt 23c rotates, with the old target entering the unloading station while the new target enters the target-changing station. Once the new target is installed, the conveyor belt 23c rotates in the reverse direction, allowing the two sets of avoidance holes 23d to reset, facilitating the next target-changing operation.

[0042] The three-station design processes new and old targets in parallel through multiple sets of avoidance holes 23d, which can reduce the waiting time required for replacing old and new targets and improve target changing efficiency.

[0043] Continue to refer to Figure 1 and Figure 2 The disassembly and assembly mechanism includes a plurality of screwdrivers 31 , which are evenly spaced along the circumferential direction and adapted to the distribution of screws connecting the housing 1 and the target material 2 .

[0044] The lifting drive assembly can be any drive member capable of driving the screwdriver 31 to move vertically, such as an air cylinder or an electric cylinder. The rotating drive assembly can be any drive member capable of driving the screwdriver 31 to rotate, such as a rotating air cylinder or a motor.

[0045] In a specific embodiment, after the target change instruction is triggered (such as the target material is used for a preset time, or the equipment processes a preset number of wafers), ensure that the fixing part 11 is connected to the shell 1, and the second drive component 22 drives the fixing part 11 to rise, so that the shell 1 is separated from the process chamber 3; the motor of the first drive component 21 drives the screw to rotate, driving the fixing part 11 to move horizontally along the guide rod toward the target change station until the shell 1 reaches directly above the conveying component 23; the second drive component 22 drives the fixing part 11 to descend, so that the target material 2 is close to or directly falls onto the conveying surface to facilitate the operation of the disassembly and assembly mechanism; at this time, the screws connecting the shell 1 and the target material 2, the avoidance hole 23d on the conveying component 23, and the screwdriver 31 under the conveying component 23 correspond one to one.

[0046] The lifting drive assembly drives the screwdriver 31 to rise, and the screwdriver 31 passes through the avoidance hole 23d and docks with the screw; the rotation drive assembly drives the screwdriver 31 to reverse, remove the screw, and separate the old target material from the shell 1; the screw is attracted to the screwdriver 31 by the magnet; the lifting drive assembly drives the screwdriver 31 to descend with the screw, away from the target material 2 and the conveying assembly 23.

[0047] The conveying assembly 23 sends out the old target; workers or mechanical equipment remove the old target, and then place the new target into the conveying assembly 23, ensuring that the screw holes on the new target correspond to the avoidance holes 23d one by one.

[0048] The conveying component 23 returns to the original route and transfers the new target material to the target changing station, and the new target material is aligned with the shell 1; the lifting drive component drives the screwdriver 31 to carry the screw up, and the screw passes through the avoidance hole 23d and enters the screw hole of the new target material; the rotation drive component drives the screwdriver 31 to rotate forward, tighten the screw, and the new target material is fixed to the shell 1.

[0049] The second drive assembly 22 drives the fixing part 11 to carry the plasma generator upward; the first drive assembly 21 drives the fixing part 11 to translate toward the working station; after the shell 1 faces the process chamber 3, the second drive assembly 22 drives the shell 1 to descend, so that the shell 1 is reconnected with the process chamber 3, and the target change is completed.

[0050] The automatic target changing device provided in the present application is connected to the housing 1 of the plasma generator through a fixing part 11, and cooperates with the first drive component 21 to drive the housing 1 back and forth between the working station and the target changing station, and the second drive component 22 to realize the lifting and lowering of the housing 1, replacing the operation of manually lifting and moving the housing 1, and avoiding the risk of equipment collision or personal injury caused by the heavy weight of the housing 1 and the target material 2; through the transmission component 23 to transfer new and old target materials at the target changing station, and the screwdriver 31, the rotation drive component and the lifting drive component corresponding to the screws in the disassembly and assembly mechanism, the automatic removal and locking of the screws and the automatic replacement of the target materials are realized, replacing the step-by-step operations of manual alignment, screw removal, and target replacement, solving the problems of time-consuming manual operation and fragmented process, shortening equipment downtime, avoiding the reduction of wafer yield and increase in unit manufacturing cost due to interruption of production rhythm due to downtime, especially in the context of capacity expansion in photovoltaics, display panels and other fields, it can effectively improve the continuity of the production line and the efficiency of capacity release.

[0051] To facilitate target replacement, the housing 1 is optionally detachably connected to the process chamber 3 .

[0052] The shell 1 and the process chamber 3 are detachably connected, and the plasma generator and the process chamber 3 can be conveniently separated when changing targets, so that the fixing part 11 can carry the shell 1 and the target material 2 to the target changing station for target material replacement, thereby avoiding spatial obstruction of the process chamber 3 to the target changing operation, and at the same time ensuring that the two can be stably connected in the non-target changing state to meet the requirements of the wafer process for air pressure and sealing.

[0053] The present application does not limit the detachable connection method between the shell 1 and the process chamber 3. The shell 1 and the process chamber 3 can be connected in any form such as screw connection, plug connection, and clip connection.

[0054] In one specific embodiment, an annular flange 1a is provided at the bottom of the shell 1 facing the process chamber 3, and an annular groove 3a adapted to the annular flange 1a is provided at the top of the process chamber 3 facing the plasma generator, and an elastic seal 4 is provided in the annular groove 3a; one of the shell 1 and the process chamber 3 is provided with at least two locking hooks equidistantly distributed along the circumference, and the other is provided with a corresponding locking ring; after the plasma generator returns to the working station, the annular flange 1a is embedded in the annular groove 3a, compressing the elastic seal 4, and the locking hook is buckled with the locking ring, which can tighten and seal the plasma generator and the process chamber 3.

[0055] For details, please refer to Figure 6In the illustrated embodiment, the upper surface of the process chamber 3 facing the shell 1 is provided with a circle of concave annular grooves 3a. The cross-section of the annular grooves 3a is in the shape of an inverted convex letter. An elastic seal 4 is embedded in the deep groove. The lower surface of the shell 1 facing the process chamber 3 is provided with a circle of annular flanges 1a. The cross-section of the annular flanges 1a is also in the shape of an inverted convex letter. The shape of the annular flanges 1a is adapted to the annular grooves 3a. The depth of the annular grooves 3a is slightly greater than the height of the annular flanges 1a. After the shell 1 moves to the position directly above the process chamber 3, the annular flanges 1a and the annular grooves 3a are coaxially arranged, and the axes of the two coincide with the central axes of the shell 1 and the process chamber 3.

[0056] The elastic sealing member 4 can be made of elastic materials such as rubber and plastic. The elastic sealing member 4 has elastic deformation characteristics.

[0057] After the plasma generator returns to its working position, the outer shell 1 descends, and the annular flange 1a can be embedded in the annular groove 3a. By fitting the annular flange 1a and the annular groove 3a, the radial positioning of the plasma generator and the process chamber 3 can be achieved, preventing relative displacement of the outer shell 1 and the process chamber 3. As the annular flange 1a penetrates deeper, the bottom of the annular flange 1a gradually compresses the elastic seal 4, causing it to produce elastic deformation, and the elastic seal 4 can fill the small gap between the flange and the groove. After being compressed, the elastic seal 4 forms an airtight surface, which can block the flow of gas between the inside of the cavity and the outside world, thereby ensuring the sealing of the connection between the plasma generator and the process chamber 3.

[0058] Furthermore, locking hooks and locking rings are provided on the outer wall surfaces of the outer shell 1 and the process chamber 3, and are evenly distributed along the circumference (e.g., three locking hooks are distributed at 120° intervals) to ensure balanced force. For example, at least three locking hooks are evenly distributed along the circumference of the process chamber 3 (the locking hooks are L-shaped, with one end hinged to the process chamber 3), and a corresponding locking ring is provided on the outer periphery of the outer shell 1 (the locking ring is an annular protrusion that fits the hook portion of the locking hook). After the outer shell 1 falls to the bottom, the locking hook is rotated toward the corresponding locking ring (this can be done manually or by configuring a drive such as a cylinder to achieve automatic rotation), and the hook portion of the locking hook can be engaged with the locking ring. Through the mechanical engagement of the locking hook and the locking ring, the outer shell 1 and the process chamber 3 can be axially tightened to ensure that the elastic seal 4 is always in an effectively compressed state, while preventing the outer shell 1 and the process chamber 3 from separating due to changes in internal air pressure during the process.

[0059] In one embodiment, the fixing member 11 is fixedly connected to the housing 1. When the housing 1 is connected to the process chamber 3, the second driving assembly 22 applies a downward pressing force to the fixing member 11 to ensure that the fixing member 11, the housing 1 and the process chamber 3 remain sealed and fixed.

[0060] For details, please refer to Figure 1In the illustrated embodiment, the fixture 11 is configured as a gantry. Two vertical rods of the fixture 11 cooperate to hold the housing 1 in place, with either rod securely connected to the housing 1 via screws. After target change, the fixture 11 returns to the workstation, carrying the housing 1. The second drive assembly 22 lowers the housing 1. Once the housing 1 abuts the process chamber 3, the second drive assembly 22 maintains downward pressure on the fixture 11, ensuring a secure connection between the housing 1 and the process chamber 3.

[0061] In another embodiment, the fixing member 11 is selectively connected to the housing 1. When the target needs to be changed, the fixing member 11 is connected to the housing 1 to facilitate the transfer of the plasma generator. After the target is changed, the fixing member 11 is detached from the housing 1 to perform other operations.

[0062] The fixing member 11 is selectively connected to the housing 1. When changing targets, the two are connected to transfer the plasma generator. After the target change is completed, the connection is released and the fixing member 11 can be removed from the housing 1 for other target change operations or auxiliary operations.

[0063] This application does not limit the specific configuration of the fixing member 11 .

[0064] In a specific embodiment, the fixing member 11 is arranged in the form of a gantry, and a lifting block 12 is provided on both sides of the fixing member 11; an inner concave slot is provided on both sides of the outer shell 1, and the lifting block 12 can enter the inner concave slot. When the fixing member 11 rises, the lifting block 12 can lift the outer shell 1.

[0065] For details, please refer to Figure 1 and Figure 2 In the illustrated embodiment, the fixing member 11 is arranged in the form of a gantry, consisting of two vertical rods and a horizontal rod. A rectangular block-shaped lifting block 12 is provided at the end of any vertical rod away from the horizontal rod. The outer shell 1 is roughly cylindrical. The concave card slot is provided at the lower part of the outer shell 1. The lifting block 12 can enter the concave card slot by translation, and can also enter the concave card slot by first descending and then rising. The top surface of the concave card slot is convex, and the lifting block 12 rises after entering the concave card slot. After abutting against the top surface of the concave card slot, the lifting block 12 can lift the outer shell 1.

[0066] After the target is changed, if the fixing member 11 needs to be withdrawn, the lifting block 12 is lowered to the top surface of the groove out of the concave groove, and the fixing member 11 can be taken out by translation.

[0067] The matching design of the lifting block 12 and the concave slot is simple and efficient, which helps to improve the efficiency of target changing and meet the automation and continuity requirements of semiconductor production lines.

[0068] Optionally, the lifting block 12 is made of 40Cr alloy structural steel. After quenching and tempering, the hardness of the lifting block 12 reaches HRC35-40, ensuring no plastic deformation when supporting a heavy (50-150kg) plasma generator, thus meeting lifting requirements.

[0069] Optionally, the surface of the lifting block 12 that contacts the housing 1 is laser-engraved with a crosshatch pattern (with a pattern depth of 0.1-0.2 mm and a grid spacing of 1-2 mm). These patterns create a microscopic concave-convex structure. When the lifting block 12 contacts the top surface of the recessed slot, the pattern increases the microscopic meshing of the contact surface, improving the static friction coefficient and preventing relative slippage of the housing 1 during lifting.

[0070] Optionally, a fluororubber strip is provided on the surface of the lifting block 12 that contacts the housing 1. When the lifting block 12 enters the recessed slot and is subjected to force, the strip compresses and elastically deforms, filling the tiny gap between the lifting block 12 and the recessed slot. The high friction coefficient between the strip and the housing 1 also provides an anti-slip effect and prevents surface scratches caused by direct metal contact.

[0071] Optionally, a supporting assembly is also provided on the fixing member 11, and the supporting assembly includes: a support plate 41 for supporting the bottom surface of the shell 1; a supporting driving member 42 and a connecting rod transmission structure 43. The supporting driving member 42 can drive the support plate 41 close to or away from the bottom surface of the shell 1 through the connecting rod transmission structure 43, so as to choose whether to use the supporting assembly to assist the lifting block 12 to lift the shell 1 as needed.

[0072] For details, please refer to Figure 6 In the illustrated embodiment, two groups of support assemblies are provided on the fixing member 11, and the two groups of support assemblies are symmetrically arranged along the second horizontal direction, and any support assembly is arranged on the outside of a vertical rod of the fixing member 11. The support plate 41 is made of high-strength aluminum alloy. The support plate 41 is arranged in the shape of a rectangular plate, and the size is adapted to the local supporting area of ​​the bottom surface of the shell 1. The surface of the support plate 41 used to contact the shell 1 is covered with a 0.5mm thick polyurethane buffer layer. The supporting drive member 42 can adopt any driving member such as a cylinder and an electric cylinder that can drive the connecting rod transmission structure 43 to swing. The cylinder body of the supporting drive member 42 is fixed on the fixing member 11, and the output shaft is connected to the connecting rod transmission structure 43. The connecting rod transmission structure 43 is composed of at least two connecting rods hinged to each other. One end of the connecting rod transmission structure 43 is hinged to the output shaft of the supporting drive member 42, and the other end is hinged to the support plate 41 to form a crank slider mechanism.

[0073] It should be noted that when the total weight of the plasma generator is relatively large (e.g., exceeding 100 kg), relying solely on the lifting blocks 12 on both sides can easily lead to excessive stress (stress concentration) in the concave slots, which may cause deformation or cracking of the slots over long-term use. Furthermore, if there is a misalignment between the center of gravity of the housing 1 and the lifting points of the lifting blocks 12, relying solely on the lifting blocks 12 will cause tilt, affecting the subsequent docking accuracy with the process chamber 3 or the positioning accuracy of the target change station.

[0074] The additional support assembly can play a role in assisting support, preventing tipping, and ensuring safety when the fixing member 11 supports the heavy plasma generator.

[0075] Specifically, after the fixing member 11 is connected to the shell 1 and the shell 1 is lifted under the action of the second drive assembly 22, the supporting drive member 42 works and pushes the pallet 41 to rotate or move horizontally around the hinge point through the connecting rod transmission structure 43, so that the pallet 41 approaches the bottom surface of the shell 1 until the pallet 41 fits the bottom surface of the shell 1. The connecting rod transmission structure 43 can convert the linear motion of the supporting drive member 42 into the rotational or translational motion of the pallet 41, ensuring that the pallet 41 can accurately approach or move away from the bottom surface of the shell 1, thereby adapting to the support requirements of shells 1 of different thicknesses. At this time, the lifting block 12 pushes upward, and at the same time, the two groups of pallets 41 support upward from the bottom, forming a coordinated force mode of "lifting on both sides + supporting from the bottom", which together drive the shell 1 to rise steadily. The two symmetrically distributed sets of support plates 41 and the lifting block 12 form a three-dimensional force balance (the lifting block 12 bears the vertical upward thrust, while the support plates 41 bear the vertical upward support force). This balance offsets the eccentric torque that may be generated by the shift in the center of gravity of the housing 1, preventing it from tilting during the lifting process. After the housing 1 is transferred above the conveyor assembly 23, the output shaft of the support drive 42 retracts, pulling the support plates 41 in the opposite direction of rotation or horizontal movement via the connecting rod transmission structure 43, moving the support plates 41 away from the bottom surface of the housing 1 to prevent interference with subsequent target changing operations.

[0076] Optionally, the concave slot is open on one side facing the target changing station and is provided with a limiting wall on the other side away from the target changing station, the top of the concave slot is provided with a limiting slot, and the top surface of the lifting block 12 is provided with a limiting plug; so that the lifting block 12 is lower than the top of the concave slot, and the lifting block 12 can enter the concave slot by translation; after the lifting block 12 moves to contact the limiting wall, the lifting block 12 rises, and the limiting plug can be inserted into the limiting slot; a pressure sensor is provided in the limiting slot; after the limiting plug is inserted into the limiting slot and the lifting block 12 lifts the plasma generator, the pressure sensor triggers a pressure fluctuation to confirm that the fixing part 11 is connected to the shell 1.

[0077] Specifically, the concave card slot is semi-open, and the concave card slot is open on the side facing the target changing station. When the fixing member 11 moves along the first horizontal direction, it can enter the concave card slot through the open side. Since a limit wall is provided on the other side of the concave card slot away from the target changing station, the lifting block 12 continues to move horizontally and will eventually be stopped by the limit wall. At this time, the lifting block 12 moves horizontally into place, and the limit plug is facing the limit slot. When the lifting block 12 rises, the limit plug can be inserted into the limit slot. The shape of the limit slot is adapted to the limit plug. After the limit plug enters the limit slot, it can only be disengaged from the limit slot by descending, thereby ensuring the uniqueness and stability of the connection between the fixing member 11 and the housing 1.

[0078] The limiting wall achieves a horizontal "hard limit" through rigid contact, ensuring that the lifting block 12 enters the concave slot to a consistent depth. The limiting plug and the limiting slot form a "convex-concave fit", using geometric constraints to limit the relative horizontal displacement of the plasma generator, preventing it from shifting due to vibration during the lifting process.

[0079] Furthermore, a pressure sensor is provided in the limiting slot. After the lifting block 12 contacts the limiting wall, the second drive assembly 22 drives the fixing part 11 to rise, and the lifting block 12 rises synchronously with the fixing part 11. The limiting plug on its top surface gradually approaches the limiting slot at the top of the slot and is finally fully inserted into the slot. The lifting block 12 continues to rise and lifts the plasma generator. The gravity of the outer shell 1 is transmitted to the limiting plug through the limiting slot and then acts on the pressure sensor. The pressure sensor detects that the pressure value jumps from the initial state (close to 0) to the preset threshold (such as ≥80% of the weight of the outer shell 1) and produces a stable fluctuation (due to slight vibration of the equipment). The pressure sensor feeds back the signal to the control system to confirm that the fixing part 11 and the outer shell 1 are reliably connected.

[0080] The pressure sensor can convert mechanical force signals into electrical signals. By detecting whether the pressure reaches a preset threshold, it can objectively judge the connection status between the lifting block 12 and the shell 1 (whether it is truly bearing and lifting), replacing manual visual confirmation and realizing automatic connection verification.

[0081] In actual use, the lifting force can also be confirmed through the pressure sensor to determine whether to enable the support assembly to assist in lifting the plasma generator (for example, when the pressure value fluctuates by more than 10%, the support assembly is triggered to replenish pressure).

[0082] Optionally, the automatic target changing device for a plasma generator provided in the present application further includes a first positioning mechanism, which is used to limit the movement range of the fixing member 11 to ensure that the fixing member 11 reaches and stays at a working station or a target changing station.

[0083] The first positioning mechanism is provided to accurately define the end point of the movement of the fixing part 11 between the working station and the target changing station, to ensure that the fixing part 11 can be accurately docked at the preset position every time, to avoid the deviation of the docking between the shell 1 and the process chamber 3 or the misalignment with the conveying component 23 due to overtravel or under-position of the movement, thereby ensuring the smoothness and operation accuracy of the target changing process.

[0084] This application does not limit the specific configuration of the first positioning mechanism.

[0085] In one embodiment, the first positioning mechanism includes photoelectric sensors (e.g., diffuse reflection photoelectric switches) located at the working and target-changing stations, and a light barrier secured to the fixture 11. When the fixture 11 moves to the corresponding station, the light barrier blocks the light path of the photoelectric sensors, causing the sensors to send a signal to the control system, causing the first drive assembly 21 to stop, thereby achieving positioning.

[0086] In another embodiment, the first positioning mechanism includes mechanical stops (made of 45# steel, surface hardened) at both the working and target changing stations. A buffer (e.g., a polyurethane cushion) is installed at the corresponding position on the fixture 11. When the fixture 11 reaches the stop, the buffer contacts the stop, triggering a travel switch to send a stop signal. The mechanical limit switches, combined with the electronic signal, provide dual positioning assurance, resulting in high repeatability and precision.

[0087] In another embodiment, the first positioning mechanism includes: a first limiting unit, which is provided at the working station; a second limiting unit, which is provided at the target changing station; and a detection positioning unit, which is provided on the fixing member 11; when the detection positioning unit detects the first limiting unit, the fixing member 11 reaches the working station, and the first driving component 21 stops driving; when the detection positioning unit detects the second limiting unit, the fixing member 11 reaches the target changing station, and the first driving component 21 stops driving.

[0088] The first position-limiting unit can be a metal positioning block (made of 45# steel, quenched and tempered, and chrome-plated for rust prevention), fixed to the frame adjacent to the process chamber 3, corresponding to the motion path of the fixture 11. Alternatively, the first position-limiting unit can be a magnetic scale positioning point (magnetic scale markings are provided on the guide rail corresponding to the workstation). As a physical or electronic marker of the workstation, the first position-limiting unit can transmit a "workstation arrival" signal to the detection and positioning unit.

[0089] The second stopper can be an infrared emitter (such as a laser diode) fixed to the frame next to the conveyor assembly 23, capable of emitting an infrared beam along the direction of motion of the fixed member 11. Alternatively, the second stopper can be a mechanical bumper (made of polyurethane, with a hardness of 80 Shore A to avoid damage from rigid impact), fixed to the frame next to the conveyor assembly 23 and protruding from the frame surface. The second stopper serves as a signal source for the target change position, transmitting a "target change position arrival" signal to the detection and positioning unit.

[0090] The detection and positioning unit is paired with the first and second limit units. If the limit unit is a metal block, the detection unit can use a proximity sensor (such as an inductive proximity switch); if the limit unit is an infrared transmitter, the detection unit can use an infrared receiver; if the limit unit is a magnetic grating marker, the detection unit can use a magnetic grating readhead. The detection and positioning unit can detect in real time whether the first or second limit unit signals appear in the motion path and convert the detection results into electrical signals that are fed back to the control system.

[0091] Specifically, when the fixing part 11 moves from the target changing station to the working station driven by the first driving component 21, the detection and positioning unit moves synchronously with the fixing part 11; when approaching the working station, the detection and positioning unit senses the first limit unit (such as a metal block triggering a proximity sensor, or a magnetic grating reading head recognizing a magnetic grating mark), and immediately sends a "reaching the working station" signal to the control system; after receiving the signal, the control system cuts off the power of the first driving component 21 (such as the servo motor power-off brake), and the fixing part 11 stops at the working station to ensure that the shell 1 is aligned with the process chamber 3.

[0092] Similarly, when the fixing part 11 moves from the working station to the target changing station under the drive of the first driving component 21, the detection and positioning unit continues to scan the path; when arriving at the target changing station, the detection and positioning unit receives the signal of the second limit unit (such as the infrared receiver captures the infrared beam, or the mechanical impact block triggers the travel switch), and sends a "reaching the target changing station" signal to the control system; the control system then stops the first driving component 21, and the fixing part 11 stops at the target changing station to ensure that the housing 1 is aligned with the transmission component 23.

[0093] Through the cooperation of the limit unit and the detection and positioning unit, the repeatability of the fixing part 11 can reach ±0.05mm (magnetic grid / infrared solution) or ±0.1mm (mechanical / proximity sensor solution), which can effectively avoid sealing deviation when the shell 1 and the process chamber 3 are docked (for example, the annular flange 1a cannot be accurately embedded in the annular groove 3a), or the alignment error between the shell 1 and the conveyor belt avoidance hole 23d.

[0094] Optionally, the outer diameter of the shell 1 is larger than the outer diameter of the process chamber 3 , and a circle of receiving grooves is provided on the bottom surface of the shell 1 , which surround the annular flange 1 a ; when the shell 1 is connected to the process chamber 3 , the process chamber 3 can be inserted into the receiving grooves.

[0095] The receiving groove can further calibrate the connection state between the housing 1 and the process chamber 3 and improve the sealing performance of the connection between the two.

[0096] Optionally, the receiving groove is configured in a trumpet-shaped manner, with the inner wall of the receiving groove tilted toward the central axis from bottom to top, so that the opening diameter of the receiving groove gradually decreases; the outer wall of the process chamber 3 and the inner wall of the receiving groove are inclined toward each other. The receiving groove forms a "wide outside and narrow inside" guide structure to facilitate the insertion of the process chamber 3; the two achieve final positioning by means of the inclined surfaces contacting each other.

[0097] Specifically, after the housing 1 returns to its working position, the second drive assembly 22 lowers the housing 1, first guiding the process chamber 3 into the housing 1 through the bell mouth. The bell mouth's flared shape compensates for slight horizontal offset between the housing 1 and the process chamber 3, ensuring that the annular flange 1a is aligned with the annular groove 3a. As the housing 1 continues to descend, the annular flange 1a is fully inserted into the annular groove 3a, pressing against the elastic seal 4. The cooperation between the receiving groove, the annular flange 1a, and the annular groove 3a provides dual radial positioning.

[0098] Optionally, the first drive assembly 21 includes a motor, a screw, and a guide rod. The guide rod is provided with a first limit block and a second limit block. The first limit block is fixed to the end of the guide rod near the working station, and the second limit block is fixed to the end of the guide rod near the target changing station. The first limit block and the second limit block are made of polyurethane. The fixed part 11 is provided with a metal striker, which is opposite to the first limit block and the second limit block. When the fixed part 11 moves to the extreme position, the striker and the limit block are in flexible contact.

[0099] Specifically, the motor drives the screw to rotate, and the nut moves axially along the screw, driving the fixed member 11 to move synchronously. The fixed member 11 is slidably mounted on a guide rod via a linear bearing. The guide rod rigidly constrains the fixed member 11's rotational freedom, ensuring that the fixed member 11 can only move linearly along the first horizontal direction. When the fixed member 11 approaches the working station, the metal striker gradually approaches and abuts the first limit block, triggering the travel switch (or motor overload protection), the screw stops rotating, and the fixed member 11 stops at the working station. Similarly, when the fixed member 11 abuts the second limit block, it stops at the target change station.

[0100] Adding a limit block on the guide rod as a mechanical hard limit can form "electronic + mechanical" dual protection with the detection and positioning unit (such as a proximity sensor) to prevent the fixing part 11 from overtravel due to failure of the electronic signal.

[0101] Optionally, a limit slot is provided on the conveying surface of the conveying assembly 23, and the limit slot is adapted to the target material 2. When the plasma generator is transferred to the target changing station by the fixing member 11 and placed on the conveying assembly 23, the target material 2 can be inserted into the limit slot, and the limit slot can calibrate the relative position of the target material 2 and the conveying assembly 23, ensuring that the screw holes and screws on the target material 2 correspond one-to-one with the avoidance holes 23d, thereby avoiding disassembly and assembly failures caused by the misalignment of the screws and the avoidance holes 23d. After the old target material is removed, the contour guiding effect of the limit slot can also facilitate the insertion of the new target material, further ensuring that when the new target material arrives at the target changing station, its screw holes are precisely aligned with the screw holes, avoidance holes 23d, and screws on the housing 1.

[0102] Optionally, the automatic target changing device for a plasma generator provided in the present application further includes a second positioning mechanism, which is used to limit the motion range of the conveying assembly 23 to ensure that the avoidance hole 23d corresponds one-to-one with the screwdriver 31 after reaching the target changing position.

[0103] The second positioning mechanism is provided to precisely control the start and stop positions of the conveying assembly 23, ensuring that when the avoidance hole 23d on its belt surface reaches the target changing station, it can be precisely aligned with the screwdriver 31 below and the screw above, avoiding displacement deviation that causes the screwdriver 31 to be unable to pass through the avoidance hole 23d or the screw to be disassembled and misplaced, thereby ensuring the reliability of screw removal and locking during the target changing process.

[0104] This application does not limit the specific configuration of the second positioning mechanism.

[0105] In one embodiment, the conveyor assembly 23 is a conveyor belt equipped with a high-precision encoder system. An incremental encoder with a resolution of ≥10,000 pulses / rev is installed at the end of the conveyor belt's drive roller. This encoder measures the drive roller's rotation angle in real time and converts it into the conveyor belt's linear displacement. A PLC control system compares this displacement data with the preset target-changing station position. If the deviation is ≤0.02mm, the system is shut down. Closed-loop control ensures the precise positioning of the avoidance hole 23d.

[0106] In another embodiment, the transmission component 23 is in the form of a mobile platform, which includes a servo drive system. The mobile platform is directly driven by a high-precision servo motor, so that its position repeatability accuracy is not greater than ±0.02mm; the movement path of the mobile platform is preset by the electronic cam function. When the avoidance hole 23d approaches the target changing station, the motor automatically decelerates to a low speed for alignment, and brakes immediately after reaching the preset position, and cooperates with the photoelectric sensor for secondary verification to ensure that the avoidance hole 23d is accurately in place.

[0107] In another embodiment, the second positioning mechanism includes a positioning pin, which is arranged below the conveying component 23; at least two positioning holes are provided on the conveying surface of the conveying component 23, and at least two positioning holes are arranged at intervals along the movement direction of the conveying component 23; every time the conveying component 23 moves one station, there will be a positioning hole facing the positioning pin, so that the positioning pin is inserted into the positioning hole, which can confirm and calibrate the position of the conveying component 23.

[0108] Specifically, the locating pin is made of 45 steel (chrome-plated surface for rust prevention), is cylindrical, and is fixed on the frame below the conveying component 23. The bottom of the locating pin is connected to the lifting drive (which can be a cylinder, electric cylinder, etc.), and the output shaft of the lifting drive can be extended and retracted in the vertical direction, thereby driving the locating pin to rise and fall. A locating hole is provided on the conveying surface of the conveying component 23 (located outside the avoidance hole 23d, so as not to affect the operation of the screwdriver 31). The number of the locating holes is at least two, and these locating holes are spaced apart along the movement direction of the conveying component 23 (the spacing is consistent with the distance between adjacent workstations). The locating hole is a circular through hole (the diameter is 0.1-0.2 mm larger than the locating pin, forming a clearance fit).

[0109] When the avoidance holes 23d move toward the target replacement station, the control system determines, based on a preset program or sensor signal (such as a proximity switch), that the positioning holes are approaching the positioning pins. When one of the positioning holes aligns with the positioning pin, the lifting drive drives the positioning pin upward, allowing it to penetrate the positioning hole and mechanically restrict the movement of the conveyor assembly 23. Even with slight deviations (such as when the positioning holes and positioning pins are not perfectly aligned), the positioning pins can utilize the guiding properties of the clearance fit to achieve slight mechanical correction during insertion, ensuring that the conveyor surface is fine-tuned to the correct position. After the old target falls onto the conveyor surface, the positioning pins retract downward, disengaging the positioning holes, activating the conveyor assembly 23 and allowing the old target to be delivered to the unloading station. When the avoidance holes 23d move to the unloading station, the other positioning hole aligns with the positioning pin, allowing the positioning pin to be inserted into this positioning hole, further calibrating the position of the old target in the unloading station, facilitating the automated mechanical equipment to remove the old target and insert the new one. After the new target is in place, the positioning pin retracts downward and disengages the positioning hole, and the transport assembly 23 is activated again to return it to the target exchange station. When the new target moves to the target exchange station, the first positioning hole is once again aligned with the positioning pin. By inserting the positioning pin and calibrating the position, the new target can be accurately positioned.

[0110] The "convex-concave fit" between the locating pins and the locating holes achieves rigid positioning through geometric constraints. This limits the conveyor surface's translational deviation in the horizontal directions (X and Y axes) and rotational deviation about the vertical Z axis, ensuring that the conveyor surface's endpoint is perfectly aligned with the pre-set workstation. Especially when conveyor assembly 23 utilizes a conveyor belt, the mechanical limiter is unaffected by belt slack, slippage, or electromagnetic interference. Even with frequent target changes (e.g., more than 10 times per hour), it maintains stable positioning, reducing equipment failure rates.

[0111] In another embodiment, the second positioning mechanism utilizes an infrared sensor array for positioning. The infrared sensor array consists of 8-12 infrared emitting and receiving tubes (distributed in pairs), evenly spaced along the width and length of the conveyor belt 23c on the target change station frame, forming a detection array. The detection range of the infrared sensor array matches the edge contour of the target 2 (e.g., a circular target corresponds to a circular arrangement of sensors, while a rectangular target corresponds to a rectangular arrangement). A signal processing module, connected to the infrared sensor array, collects the on / off status of each sensor in real time (no signal from the receiving tube when the target is obstructed, and a signal when unobstructed) and converts this information into coordinate data for the target edge.

[0112] When the transmission component 23 transfers the target material 2 to the target changing station, the infrared sensor array emits an infrared light beam, which is perpendicular to the transmission surface and covers the edge area of ​​the target material 2; if the target material 2 blocks part of the sensor, the signal processing module can calculate the deviation between the actual center coordinate of the target material 2 and the preset center coordinate according to the position of the blocked sensor (such as X-axis offset +0.1mm, Y-axis offset -0.08mm, θ angle rotation +0.05°); the deviation data is fed back to the drive system of the transmission component 23 (such as a roller drive motor in the form of a conveyor belt, a translation driver of a mobile platform, or the transmission component 23 is equipped with a micro-adjustment module), driving the transmission surface to make micro-adjustments (X-axis translation, Y-axis translation or θ angle rotation) until the edge contour of the target material 2 is completely matched with the preset detection point matrix of the sensor array. At this time, the screw hole on the target material 2 is precisely aligned with the avoidance hole 23d and the screwdriver 31.

[0113] The second positioning mechanism is set up to detect the position error of the target material 2 caused by transmission vibration, loading offset, etc. in real time, and dynamically adjust the drive system to control the positioning deviation within ±0.02mm, solving the problem that traditional mechanical positioning cannot compensate for dynamic errors.

[0114] In one embodiment, the transmission component 23 includes a first reel 23a, a second reel 23b and a conveyor belt 23c, one end of the conveyor belt 23c is wound around the first reel 23a, and the other end is wound around the second reel 23b, and a avoidance hole 23d is provided on the belt surface of the conveyor belt 23c; so that one of the first reel 23a and the second reel 23b performs a winding motion and the other performs an unwinding motion, and the conveyor belt 23c can move toward the reel performing the winding motion.

[0115] For details, please refer to Figure 4 and Figure 5In the illustrated embodiment, both the first and second reels 23a, 23b are steel cylinders (100-150 mm in diameter and length matching the width of the conveyor belt 23c). They are rotatably mounted on the frame at both ends via bearing blocks, allowing them to rotate about their respective axes. Each reel is connected to a motor (either a separate motor can power each reel, or a single motor can power both reels through a transmission structure such as a synchronous belt, gears, or couplings) to provide the reeling and unreeling power. The conveyor belt 23c is made of polyimide (1-2 mm thick, 300-500 mm wide), which is resistant to high temperatures (-200°C to 260°C) and wear. One end of the conveyor belt 23c is fixed to and wound around the first reel 23a, and the other end is fixed to and wound around the second reel 23b. The middle section of the belt is horizontally tensioned. Avoidance holes 23d (8-10 mm in diameter, with a positioning accuracy of ±0.05 mm) are provided on the belt surface according to the target screw distribution pattern.

[0116] When conveyor belt 23c needs to move toward the target change station, the drive motor drives the first reel 23a to rewind (rotate clockwise) while the second reel 23b unwinds (rotate counterclockwise). Conveyor belt 23c is released from the second reel 23b and rewound onto the first reel 23a, moving the entire belt toward the first reel. Conversely, when the second reel 23b rewinds and the first reel 23a unwinds, the conveyor belt 23c moves toward the second reel 23b.

[0117] With this arrangement, the conveyor belt 23c is a single-layer structure, and only the avoidance hole 23d needs to be set on one surface. The position of the avoidance hole 23d is determined only by the translation accuracy of the conveyor belt 23c, and there is no need to consider the alignment problem of the "upper hole and lower hole" in the multi-layer structure.

[0118] Optionally, the automatic target changing device for a plasma generator provided in the present application further includes a supporting platform 24 for supporting the conveyor belt 23 c . A vertically penetrating auxiliary avoidance hole 24 a is provided on the supporting platform 24 , and the disassembly and assembly mechanism is provided below the supporting platform 24 .

[0119] For details, please refer to Figure 4 and Figure 5 In the illustrated embodiment, the support platform 24 is made of aluminum alloy with a thickness of 20-30 mm. Its dimensions match the load-bearing section (i.e., the middle section) of the conveyor belt 23 c, and it features high strength (tensile strength ≥ 310 MPa) and lightweight construction. The surface of the support platform 24 is precision milled and anodized to a finish of Ra ≤ 0.8 μm (high smoothness). The edges are rounded (R2-R3) to prevent scratches on the conveyor belt 23 c.

[0120] Continue to refer to Figure 4 and Figure 5The supporting platform 24 is also provided with auxiliary avoidance holes 24a that pass through from top to bottom. The number and position of the auxiliary avoidance holes 24a correspond one-to-one to the avoidance holes 23d on the conveyor belt 23c. The hole diameter is 0.5-1mm larger than the avoidance hole 23d (such as the avoidance hole 23d has a diameter of 8mm, and the auxiliary avoidance hole 24a has a diameter of 8.5-9mm) to ensure that the screwdriver 31 can pass through smoothly; the verticality of the hole wall is ≤0.02mm to avoid interfering with the lifting and lowering of the screwdriver 31. The supporting platform 24 is horizontally fixed on the frame and is located below the conveyor belt 23c. Its top surface is in contact with the load-bearing section of the conveyor belt 23c (the gap is ≤0.1mm). The disassembly and assembly mechanism is installed below the supporting platform 24, and the axis of the screwdriver 31 coincides with the axis of the auxiliary avoidance hole 24a.

[0121] When the conveyor belt 23c supports the target material 2, its belt surface will sink slightly due to the gravity of the target material 2. At this time, the supporting platform 24 can offset the gravity of the target material 2 through rigid support, preventing the conveyor belt 23c from sagging due to its single-layer structure.

[0122] When the conveyor belt 23c moves driven by the first reel 23a and the second reel 23b, its belt surface contacts the top surface of the supporting platform 24. The low friction coefficient (friction coefficient ≤0.1 when Ra≤0.8μm) can ensure the smooth movement of the conveyor belt 23c, reduce the wear on the belt surface, and ensure the service life of the conveyor belt 23c.

[0123] Optionally, the automatic target changing device for a plasma generator provided in the present application also includes a fine-motion adjustment module, which includes three groups of displacement drive parts, which are respectively used to realize the X-axis translation, Y-axis translation and θ-angle rotation adjustment of the supporting platform 24 to ensure that the auxiliary avoidance holes 24a correspond one-to-one with the avoidance holes 23d.

[0124] The micro-adjustment module adjusts the support platform 24. Its core consists of three sets of high-precision displacement drivers and a matching guide structure. The X-axis translation driver uses a piezoelectric ceramic drive slide (such as model P-611.3S, with a travel of ±50μm and a positioning accuracy of ±0.1μm). It is installed between the bottom of the support platform 24 and the frame, and is arranged along the width (transverse) direction of the conveyor belt 23c. The micro-expansion and contraction of the piezoelectric ceramic drives the support platform 24 to move horizontally along the X-axis. The Y-axis translation driver also uses a piezoelectric ceramic drive slide. It is arranged along the extension direction (longitudinal) of the conveyor belt 23c and is perpendicular to the X-axis translation driver (superimposed by a cross slide structure). It is responsible for driving the support platform 24 to move horizontally along the Y-axis. The θ angle rotation drive consists of two sets of symmetrically distributed micro servo electric cylinders (such as model IAIEC06, with a stroke of ±30μm and a thrust of 50N), which are respectively installed at the diagonal positions of the bottom of the supporting platform 24. The differential expansion and contraction (one expansion and one contraction) of the two sets of electric cylinders drive the supporting platform to make a small rotation around the vertical axis (Z axis) (adjustment range of ±0.05°) to achieve θ angle correction.

[0125] In addition, the micro-adjustment module also includes a laser displacement sensor installed above the supporting platform 24, which is used to detect the relative position deviation between the avoidance hole 23d and the auxiliary avoidance hole 24a in real time and feed the data back to the control system.

[0126] When the conveyor belt 23c drives the avoidance hole 23d to the target change station and stops, the laser displacement sensor collects the center coordinates of the avoidance hole 23d and the auxiliary avoidance hole 24a, and calculates the offset of the two on the X-axis (horizontal) and Y-axis (vertical) (such as +0.03mm on the X-axis and -0.02mm on the Y-axis) and the θ-angle rotation deviation (such as +0.02°). The control system compares the detected deviation with the preset threshold. If the threshold is exceeded, it sends an adjustment instruction to the three sets of displacement drivers. The X-axis translation driver expands and contracts according to the lateral deviation, driving the support platform 24 to move along the X-axis to the target position; the Y-axis translation driver expands and contracts according to the longitudinal deviation to complete the Y-axis direction correction; the two sets of θ-angle rotation drivers drive the support platform 24 to rotate until the θ-angle deviation is zero through differential expansion and contraction. During the adjustment process, the laser displacement sensor monitors in real time until the deviation meets the threshold requirement, and the adjustment stops.

[0127] The addition of a micro-adjustment module can accurately compensate for hole position deviations caused by equipment installation errors and component deformation after long-term operation (such as stretching of the conveyor belt 23c and micro-deformation of the supporting platform 24), and always ensure that the coaxiality of the avoidance hole 23d and the auxiliary avoidance hole 24a is within 0.01mm.

[0128] Optionally, a connecting piece is further provided on the supporting platform 24, which is used to fix the supporting platform 24 and the conveyor belt 23c. In the fixed state, the fine-adjustment module can drive the conveyor belt 23c to perform X-axis translation, Y-axis translation and θ-angle rotation adjustment through the supporting platform 24 to ensure that the avoidance hole 23d corresponds one-to-one to the screws connecting the shell 1 and the target material 2.

[0129] For example, the relative positions of the avoidance hole 23d and the auxiliary avoidance hole 24a are first adjusted using the fine-tuning module. Once aligned, the connector is activated to secure the support platform 24 and conveyor belt 23c, and the relative positions of the avoidance hole and the screw are then adjusted. This ensures that the avoidance hole 23d, the auxiliary avoidance hole 24a, and the screw at the target change station are precisely aligned. The screwdriver 31 is then installed according to the position of the avoidance hole 23d, ensuring the precise alignment of the four components required for the target change operation.

[0130] In one embodiment, an electromagnet is installed on the support platform 24, and a ferromagnetic sheet is installed on the conveyor belt 23c. During the commissioning phase, the conveyor belt 23c moves to the target change station. After the avoidance hole 23d and the auxiliary avoidance hole 24a are initially aligned, a detection mechanism (such as a laser displacement sensor, CCD camera, etc.) confirms the deviation between the hole and the screw. If the deviation between the hole and the screw exceeds a preset threshold, the control system activates the electromagnet, magnetically attracting the ferromagnetic sheet and rigidly attaching the conveyor belt 23c to the support platform 24. The micro-adjustment module then drives the support platform 24, driving the conveyor belt 23c to synchronously complete X and Y axis translation and θ-angle rotation until the hole and the screw are precisely aligned.

[0131] In another embodiment, a negative pressure chamber is defined within the support platform 24. Suction holes are provided on the surface of the support platform 24, connecting the suction holes to the negative pressure chamber, which is then connected to a vacuum pump via an air pipe. When fine-tuning the position of the avoidance hole 23d is required, the vacuum pump is activated, and the negative pressure chamber draws suction from the suction holes to the conveyor belt 23c, ensuring a tight fit between the conveyor belt 23c and the support platform 24. This allows the fine-tuning module to synchronize the two and correct any deviation in the hole position.

[0132] In another embodiment, the support platform 24 is equipped with pneumatic clamps, each with a 0.5mm-thick silicone pad on its gripping surface (to increase friction and prevent damage to the conveyor belt 23c). A clamping area is reserved at the edge of the conveyor belt 23c. To fine-tune the position of the avoidance holes 23d, the clamps close, and the silicone pads clamp the gripping area at the edge of the conveyor belt, allowing the fine-tuning module to synchronize the two and correct any hole position deviations.

[0133] This application does not limit the specific configuration of the connecting piece.

[0134] In actual use, the positioning calibration of the avoidance hole 23d and the auxiliary avoidance hole 24a can be performed only during the debugging phase using the micro-adjustment module and the connector. Alternatively, the positioning calibration can be performed once before each operation of the screwdriver 31.

[0135] Optionally, the disassembly and assembly mechanism also includes: a rack 32 extending in the vertical direction and provided on the side of the screwdriver 31; a gear 33 rotatably provided below the transmission assembly 23 and engaged with the rack 32; a splint 34 provided on the gear 33; when the screwdriver 31 rises, the rack 32 drives the gear 33 to rotate, causing the splint 34 to flip in the direction away from the screwdriver 31; when the screwdriver 31 descends, the rack 32 drives the gear 33 to rotate in the opposite direction, causing the splint 34 to flip in the direction close to the screwdriver 31, and the splint 34 can press the screw on the screwdriver 31 to fix the screw.

[0136] For details, please refer to Figure 4 and Figure 5In the illustrated embodiment, screwdriver 31 employs a magnetic bit (e.g., a Phillips or Hexagon socket head, made of S2 tool steel, nickel-plated for rust resistance) for tightening screws. A rack 32 (spur rack, module 0.5, 30 teeth, length adapted to the screwdriver's lifting stroke, made of 45# steel, with hardened tooth surfaces) is bolted to the side of screwdriver 31. Rack 32 extends along the vertical axis of screwdriver 31.

[0137] Continue to refer to Figure 4 and Figure 5 Gear 33 is rotatably mounted below transmission assembly 23 and to one side of rack 32 via a bearing housing. Gear 33 is a spur gear (module 0.5, matching the rack, 15 teeth, made of 40Cr, case-carburized and quenched). The axis of gear 33 is horizontally positioned and meshes with rack 32 (meshing clearance 0.02-0.05mm).

[0138] Continue to refer to Figure 4 and Figure 5 The splint 34 is set in an L shape (made of spring steel 65Mn, thickness 0.5-1mm, length 20-30mm), one end of which is fixed to the end face of the gear 33 by welding or bolts (deviating from the center of the gear by 5-8mm so that it can rotate synchronously with the gear), and the other end is a free end, and the inside of the free end is covered with a 0.3mm thick rubber pad (to increase friction with the screw).

[0139] When the disassembly and assembly mechanism drives the screwdriver 31 to lower and avoid the position with the removed screw, the rack 32 on the side of the screwdriver 31 moves downward accordingly. Since the rack 32 is engaged with the gear 33, the downward movement of the rack 32 drives the gear 33 to rotate in the opposite direction (such as clockwise); the splint 34 fixed on the gear 33 rotates synchronously with the gear 33, and its free end flips in the direction close to the screwdriver 31. Finally, the rubber pad fits the side face (or hexagonal face) of the screw head and applies slight pressure (pressure value 5-10N); at this time, the screwdriver bit of the screwdriver 31 magnetically attracts the screw, and the pressure of the splint can stabilize the screw on the bit to prevent the screw from falling off.

[0140] After the new target is in place, the screwdriver 31 rises with the removed screw, and the rack 32 moves up with the screwdriver 31, driving the gear 33 to rotate forward (such as counterclockwise); the splint 34 flips away from the screwdriver 31 along with the gear 33, and the rubber pad separates from the screw, releasing the pressure; so that the screw can be inserted into the screw hole and tightened to the new target and the housing 1 under the rotation of the screwdriver 31.

[0141] The meshing transmission between rack 32 and gear 33 converts the vertical linear motion (lifting) of screwdriver 31 into rotational motion of gear 33, which in turn drives the flipping motion of clamping plate 34 (moving closer to / away from screwdriver 31), achieving a mechanical linkage of "lift-flip-clamp / release." Clamping plate 34 presses against the screw, combining with the magnetic force of the screwdriver bit 31 to create a dual securing effect. This mechanical pressure compensates for the lack of magnetic force on non-magnetic screws (such as aluminum alloy screws), ensuring the screw remains stable during lifting and transfer.

[0142] In one embodiment, the disassembly and assembly mechanism includes: a rotating drive member 35a and a toothed disc 35b, the rotating drive member 35a is used to drive the toothed disc 35b to rotate; a plurality of linkage gears 35c, any linkage gear 35c is connected to a screwdriver 31, the linkage gear 35c is engaged with the toothed disc 35b, and the rotation of the toothed disc 35b can drive all the linkage gears 35c to rotate, thereby realizing the rotation of the screwdriver 31.

[0143] For details, please refer to Figure 3 In the illustrated embodiment, the rotary drive element 35a utilizes a high-precision servo motor (such as the Panasonic MSMD042G1U, rated at 3000 rpm and with a positioning accuracy of ±0.01°). The output shaft of the rotary drive element 35a is rigidly connected to the central axis of the toothed disc 35b via a coupling, providing power to the entire transmission system. The toothed disc 35b comprises an outer gear ring (made of 40Cr, with tooth surfaces carburized and hardened to a hardness of HRC 58-62). The toothed disc 35b is mounted horizontally below the conveyor assembly 23 and can rotate freely about its central axis, with its rotation axis perpendicular to the conveyor surface. Multiple interlocking gears 35c (made of 40Cr, also carburized and hardened) are evenly distributed along the circumference of the toothed disc 35b and mesh with each other. The central axis of each interlocking gear 35c extends upward and is connected to a screwdriver 31 via a keyed or welded connection. The screwdriver bit of the screwdriver 31 is aligned with the clearance hole 23d to ensure precise engagement of the screw during rotation.

[0144] When it is necessary to remove or install a screw, the rotary drive member 35a is started, driving the toothed disc 35b to rotate around the central axis; since all the interlocking gears 35c are engaged with the toothed disc 35b, the toothed disc 35b can synchronously drive all the interlocking gears 35c to rotate, thereby achieving the same direction and speed rotation of all screwdrivers 31.

[0145] In order to facilitate the synchronous lifting and lowering of multiple groups of linkage gears 35c while rotating with the toothed disc 35b, a connecting plate is provided on the toothed disc 35b, and the connecting plate extends toward the linkage gear 35c. The toothed disc 35b and the linkage gear 35c are both rotatably arranged on the connecting plate through bearings. In this way, the toothed disc 35b rotates, driving the linkage gear 35c to rotate through engagement, and the toothed disc 35b lifts and lowers, driving the linkage gear 35c to lift and lower through the connecting plate.

[0146] To improve the reliability of the linkage gear 35c's movement, the frame is equipped with multiple sets of auxiliary guide rods. Each of these auxiliary guide rods extends vertically, corresponding one to each linkage gear 35c. Each linkage gear 35c is slidably mounted on one of these auxiliary guide rods. When the toothed disc 35b is raised or lowered, the linkage gear 35c can follow the auxiliary guide rods and move along with it without affecting its rotation.

[0147] Through the gear train structure of "single power source (rotating driving member 35a) + toothed disc 35b (active member) + multiple linkage gears 35c (driven member)", the rigid transmission characteristics of gear meshing are utilized to evenly transmit the power of the rotating driving member 35a to each linkage gear 35c, so that the speed and direction of each linkage gear 35c are completely consistent, ultimately achieving synchronous rotation of all screwdrivers 31.

[0148] This "center-and-spoke" transmission ensures uniform power distribution, avoids inconsistent movements of the screwdriver 31 due to differences in parameters of multiple drive components (such as speed and torque fluctuations), and further avoids the problem of local stress deformation of the housing 1 and the target material 2 caused by asynchronous removal / installation of the screws (especially when the target material is a brittle material).

[0149] Furthermore, the disassembly and assembly mechanism also includes: a gear column 35d, a rotary driving member 35a which is a dual-axis motor, one movable end of the rotary driving member 35a is connected to the gear disc 35b, and the other movable end is connected to the gear column 35d, and the rotary driving member 35a can simultaneously drive the gear disc 35b and the gear column 35d to rotate; a lifting auxiliary screw rod 35e, which is extended in the vertical direction, and the gear disc 35b is connected to the lifting auxiliary screw rod 35e through a nut; a lifting auxiliary gear 35f is provided on the lifting auxiliary screw rod 35e, and the lifting auxiliary gear 35f is engaged with the gear column 35d. When the gear column 35d rotates, the lifting auxiliary screw rod 35e can be driven to rotate through the lifting auxiliary gear 35f, and the gear disc 35b can move in the vertical direction through the nut.

[0150] For details, please refer to Figure 3In the illustrated embodiment, the rotary drive member 35a uses a dual-axis servo motor (such as Delta ASD-A2-0421-M, with output shafts at both ends extending coaxially and in opposite directions, a rated speed of 3000 rpm, and a torque of 4 N·m) to provide rotational power for the system. The two output shafts of the rotary drive member 35a are respectively connected to the gear disc 35b and the gear column 35d.

[0151] Continue to refer to Figure 3 The toothed disc 35b is an outer gear ring structure, and its disc surface is fixed to the nut by a bolt. The nut is threadedly connected to the lifting auxiliary screw rod 35e and can move vertically along the lifting auxiliary screw rod 35e.

[0152] Continue to refer to Figure 3 The gear column 35d is a cylindrical spur gear. One end of the gear column 35d is connected to the output shaft of the dual-axis motor through a coupling and can rotate synchronously with the motor.

[0153] Continue to refer to Figure 3 The lifting auxiliary screw rod 35e is a ball screw rod, which is fixed on the frame in the vertical direction. A lifting auxiliary gear 35f (with the same module as the gear column 35d) is provided on the screw rod, and the lifting auxiliary gear 35f is kept in meshing with the gear column 35d.

[0154] To remove or install a screw, the rotary drive element 35a is activated, causing both output shafts to rotate simultaneously (at the same speed, with the direction set as needed): one output shaft drives the toothed disc 35b to rotate about its central axis. This meshing action drives all the interlocking gears 35c and the screwdriver 31 to rotate synchronously (achieving the screw-tightening motion); the other output shaft drives the toothed column 35d to rotate synchronously. This column 35d, via the auxiliary lift gear 35f, drives the auxiliary lift screw 35e to rotate about its own axis. Because the toothed disc 35b is connected to the auxiliary lift screw 35e via a nut, the rotation of the auxiliary lift screw 35e drives the toothed disc 35b to move vertically along the screw (either up or down, depending on the screw's rotation direction), which in turn drives all the interlocking gears 35c and the screwdriver 31 to move synchronously (achieving the screwdriver's movement toward or away from the screw).

[0155] In this way, the rotation and lifting actions are achieved by the same motor drive.

[0156] Leveraging the synchronous output characteristics of the dual-axis motor, the rotational motion of a single power source is divided into two paths. One path directly drives the toothed disc 35b to rotate the screwdriver 31, while the other path drives the auxiliary lifting screw 35e through the "tooth column 35d-lifting auxiliary gear 35f" transmission. The "lifting auxiliary screw 35e-nut" structure then converts the rotational motion into the vertical lifting of the toothed disc 35b, ultimately achieving the required "rotation + lifting" compound motion of the screwdriver 31. Through the mechanical transmission of gears and screws, the two degrees of freedom of rotation and lifting are integrated into the same drive system, avoiding the coordination issues of multiple drive components and ensuring synchronous operation.

[0157] It should be noted that the toothed disc 35b can be keyed to achieve a rotationally driven connection with the rotary drive member 35a without interfering with the lifting (the toothed disc 35b and the rotary drive member 35a are connected by a mutually constrained, axially extending key and keyway, which can transmit rotational power without interfering with the lifting of the toothed disc 35b). In this case, the rotary drive member 35a is fixed and does not rise or fall with the toothed disc 35b. Alternatively, the rotary drive member 35a can provide a rotational driving force while also being able to move up and down with the toothed disc 35b. To improve the stability of the lifting movement, the frame is further equipped with a vertically extending guide rod, allowing the toothed disc 35b to slide on the guide rod. The guide rod can also limit the direction of movement while providing vertical support.

[0158] The above embodiments merely illustrate several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. An automatic target changing device for a plasma generator, characterized in that: include: A fixing member (11) for connecting to the housing (1) of the plasma generator; A first driving assembly (21) is used to drive the fixing member (11) and the housing (1) to move back and forth between a working station and a target changing station, wherein the housing (1) can be connected to a process chamber (3) to perform wafer processing, and the housing (1) can be separated from the target (2) at the target changing station; A second driving assembly (22) is used to drive the fixing member (11) and the housing (1) to perform lifting motion; A conveying component (23) is provided at the target changing station, and a conveying surface of the conveying component (23) for receiving the target material (2) is provided with a position avoidance hole (23d); A disassembly and assembly mechanism is provided at the target changing station and below the conveying assembly (23), and the disassembly and assembly mechanism comprises: a plurality of screwdrivers (31), wherein the screwdrivers (31) correspond one to one with the screws connecting the housing (1) and the target material (2), and the screwdrivers (31) are provided with magnets capable of attracting the removed screws; A lifting drive assembly, used for driving the screwdriver (31) to lift; A rotation drive assembly, used for driving the screwdriver (31) to rotate; When changing targets, the second driving component (22) drives the fixing component (11) and the housing (1) to rise, so that the housing (1) is separated from the process chamber (3), and the first driving component (21) drives the fixing component (11) and the housing (1) to move toward the target changing station; After the housing (1) reaches the target changing station, the avoidance holes (23d), the screwdriver (31) and the screws connecting the housing (1) and the target material (2) correspond one to one; The lifting drive assembly drives the screwdriver (31) to rise, and the screwdriver (31) can pass through the avoidance hole (23d) and act on the screw; The rotary drive assembly drives the screwdriver (31) to rotate, and the screwdriver (31) is capable of removing the screw; The lifting drive assembly drives the screwdriver (31) and the screw to descend, so that the conveying assembly (23) can transfer the removed old target material and deliver the new target material; The lifting drive assembly drives the screwdriver (31) to lift up with the screw, and cooperates with the rotation drive assembly so that the screw can lock the new target material and the housing (1).

2. The automatic target changing device for a plasma generator according to claim 1, characterized in that: The plasma generator is detachably connected to the process chamber (3); The bottom of the housing (1) facing the process chamber (3) is provided with an annular flange (1a); the top of the process chamber (3) facing the plasma generator is provided with an annular groove (3a) adapted to the annular flange (1a); an elastic sealing member (4) is provided in the annular groove (3a); One of the housing (1) and the process chamber (3) is provided with at least two locking hooks equidistantly distributed along the circumference, and the other is provided with a corresponding locking ring; After the plasma generator returns to the working station, the annular flange (1a) is embedded in the annular groove (3a), the elastic sealing member (4) is compressed, and the locking hook is engaged with the locking ring, thereby fastening and sealing the plasma generator and the process chamber (3).

3. The automatic target changing device for a plasma generator according to claim 1, characterized in that: The fixing member (11) is arranged in the form of a gantry, and a lifting block (12) is provided on each side of the fixing member (11); A concave slot is provided on each side of the housing (1), and the lifting block (12) can enter the concave slot. When the fixing member (11) rises, the lifting block (12) can lift up the housing (1); The fixing member (11) is also provided with a support assembly, and the support assembly comprises: A support plate (41) for supporting the bottom surface of the housing (1); A supporting driving member (42) and a connecting rod transmission structure (43) are provided, wherein the supporting driving member (42) can drive the supporting plate (41) to approach or move away from the bottom surface of the housing (1) through the connecting rod transmission structure (43).

4. The automatic target changing device for a plasma generator according to claim 3, characterized in that: The concave card slot is open on one side facing the target changing station and is provided with a limiting wall on the other side away from the target changing station. A limiting slot is provided on the top of the concave card slot, and a limiting plug is provided on the top surface of the lifting block (12); The lifting block (12) is positioned lower than the top of the concave slot, and the lifting block (12) can enter the concave slot by translation; After the lifting block (12) moves to contact the limiting wall, the lifting block (12) rises, and the limiting insert block can just be inserted into the limiting slot; A pressure sensor is provided in the limiting slot; After the limiting plug is inserted into the limiting slot and the lifting block (12) lifts the plasma generator, the pressure sensor triggers pressure fluctuations to confirm that the fixing member (11) is connected to the housing (1).

5. The automatic target changing device for a plasma generator according to claim 1, characterized in that: It also includes a first positioning mechanism, which is used to limit the movement range of the fixing member (11) to ensure that the fixing member (11) reaches and stays at the working station or the target changing station; The first positioning mechanism includes: A first limiting unit is provided at the working station; A second limiting unit is provided at the target changing station; A detection and positioning unit is provided on the fixing member (11); When the detection and positioning unit detects the first limit unit, the fixing member (11) reaches the working position, and the first driving component (21) stops driving; When the detection and positioning unit detects the second limit unit, the fixing member (11) reaches the target changing position, and the first driving component (21) stops driving.

6. The automatic target changing device for a plasma generator according to claim 1, characterized in that: It also includes a second positioning mechanism, which is used to limit the movement range of the transmission component (23) to ensure that the avoidance hole (23d) corresponds one-to-one with the screwdriver (31) after reaching the target changing position; The second positioning mechanism comprises a positioning pin, and the positioning pin is arranged below the transmission component (23); At least two positioning holes are provided on the conveying surface of the conveying component (23), and at least two positioning holes are spaced apart along the moving direction of the conveying component (23); Each time the conveying component (23) moves one station, there will be a positioning hole facing the positioning pin, so that the positioning pin is inserted into the positioning hole, thereby confirming and calibrating the position of the conveying component (23).

7. The automatic target changing device for a plasma generator according to claim 1, 5 or 6, characterized in that: The transmission assembly (23) comprises a first reel (23a), a second reel (23b) and a conveyor belt (23c), one end of the conveyor belt (23c) is wound around the first reel (23a), and the other end is wound around the second reel (23b), and a position avoidance hole (23d) is provided on the belt surface of the conveyor belt (23c); One of the first reel (23a) and the second reel (23b) is caused to perform a reeling motion and the other is caused to perform an unreeling motion, and the conveyor belt (23c) is capable of moving toward the reel performing the reeling motion.

8. The automatic target changing device for a plasma generator according to claim 7, characterized in that: Also includes: A supporting platform (24) is used to support the conveyor belt (23c), and a vertically penetrating auxiliary avoidance hole (24a) is provided on the supporting platform (24); A micro-adjustment module, the micro-adjustment module comprising three groups of displacement drive members, respectively used to realize X-axis translation, Y-axis translation and θ-angle rotation adjustment of the supporting platform (24), so as to ensure that the auxiliary avoidance hole (24a) corresponds to the avoidance hole (23d); The supporting platform (24) is further provided with a connecting piece, and the connecting piece is used to fix the supporting platform (24) and the conveyor belt (23c). In the fixed state, the micro-adjustment module can drive the conveyor belt (23c) to perform X-axis translation, Y-axis translation and θ-angle rotation adjustment through the supporting platform (24), so as to ensure that the avoidance hole (23d) corresponds to the screw connecting the shell (1) and the target material (2).

9. The automatic target changing device for a plasma generator according to claim 1, characterized in that: The disassembly and assembly mechanism also includes: A rack (32) extending in a vertical direction and arranged on a side of the screwdriver (31); a gear (33) rotatably disposed below the transmission assembly (23) and meshing with the rack (32); A clamping plate (34) is provided on the gear (33); When the screwdriver (31) rises, the rack (32) drives the gear (33) to rotate, causing the clamping plate (34) to flip in a direction away from the screwdriver (31); When the screwdriver (31) descends, the rack (32) drives the gear (33) to rotate in the opposite direction, so that the clamping plate (34) flips in a direction close to the screwdriver (31). The clamping plate (34) can press the screw on the screwdriver (31) to fix the screw.

10. The automatic target changing device for a plasma generator according to claim 1, characterized in that: The disassembly and assembly mechanism comprises: A rotary drive member (35a) and a toothed disc (35b), wherein the rotary drive member (35a) is used to drive the toothed disc (35b) to rotate; A plurality of linkage gears (35c), any one of the linkage gears (35c) is connected to a screwdriver (31), the linkage gear (35c) is meshed with the toothed disc (35b), and the toothed disc (35b) rotates to drive all the linkage gears (35c) to rotate, thereby achieving the rotation of the screwdriver (31).

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