Suction nozzle replacement device and die bonder

Abstract

The invention relates to the technical field of die bonders, and discloses a suction nozzle replacement device and a die bonder, the suction nozzle replacement device comprises a mounting plate, a pneumatic linear execution mechanism and a containing plate, the mounting plate, the pneumatic linear execution mechanism and the containing plate are arranged along a first direction, the pneumatic linear execution mechanism is arranged on the mounting plate, the containing plate is slidably connected to the mounting plate, and the pneumatic linear execution mechanism is arranged on the mounting plate. The power output end of the pneumatic linear executing mechanism is connected with the containing plate, the pneumatic linear executing mechanism is used for driving the containing plate to slide in the second direction, and the containing plate is used for containing the multiple suction nozzles; wherein the thickness directions of the mounting plate and the accommodating plate extend along the first direction, and the suction nozzle replacement device with the structure is compact in structure and small in occupied space, can reduce extrusion on layout space of other functional modules when being applied to the die bonder, and is beneficial to design and layout of other functional modules.

Description

Technical Field

[0001] The present invention belongs to the technical field of crystal bonding machines, and more specifically, relates to a nozzle replacement device and a crystal bonding machine. Background Art

[0002] A die bonder is a device used in the field of semiconductor packaging. It is used to accurately and reliably mount chips onto substrates, lead frames or other carriers. In the semiconductor packaging process, chips of various sizes, shapes and materials, as well as different packaging processes may be involved. Different chips and processes may require different types of nozzles. Based on this, in order to improve applicability, the die bonder is provided with a nozzle replacement device, which stores different types of nozzles for use. However, in addition to the nozzle replacement device, the die bonder is also provided with other functional modules such as a mounting device and a visual inspection device. Therefore, if the nozzle replacement device occupies a large space, it will seriously squeeze the layout space of other functional modules, which is not conducive to the design layout of other functional modules. Summary of the Invention

[0003] The main purpose of the present invention is to provide a nozzle replacement device with a compact structure and small space occupation.

[0004] According to a first aspect of the present invention, a nozzle replacement device is provided, comprising a mounting plate, a pneumatic linear actuator, and a receiving plate, wherein the mounting plate, the pneumatic linear actuator, and the receiving plate are arranged along a first direction, the pneumatic linear actuator is disposed on the mounting plate, the receiving plate is slidably connected to the mounting plate, a power output end of the pneumatic linear actuator is connected to the receiving plate, the pneumatic linear actuator is used to drive the receiving plate to slide along a second direction, and the receiving plate is used to receive a plurality of nozzles;

[0005] The thickness directions of the mounting plate and the accommodating plate both extend along the first direction, and the first direction and the second direction are perpendicular to each other.

[0006] In a specific embodiment of the present invention, the pneumatic linear actuator is a cylinder, the length direction of the cylinder extends along the second direction, at least two cylinders are provided, and all the cylinders are spaced apart along the third direction;

[0007] The first direction, the second direction and the third direction are perpendicular to each other.

[0008] In a specific embodiment of the present invention, in the first direction, a mounting groove is provided on one side of the mounting plate facing the accommodating plate, the length direction of the mounting groove extends along the second direction, and at least two mounting grooves are provided that are spaced apart along the third direction. One cylinder is provided in one mounting groove, and each cylinder is provided in a different mounting groove.

[0009] In a specific embodiment of the present invention, the nozzle replacement device further includes a fixing seat, and the number of the fixing seats is at least two;

[0010] Along the second direction, the mounting plate has a first end and a second end opposite to each other, an end surface of the first end has at least two extensions extending along the second direction, all of the extensions are arranged at intervals along the third direction, and each of the extensions faces one of the mounting grooves along the second direction;

[0011] Among them, the two ends of the cylinder body along its length direction are respectively a first connecting end and a second connecting end, the first connecting end extends outside the mounting groove and is located above the corresponding extension part, and the first connecting end is fixedly connected to the corresponding extension part through a fixing seat.

[0012] In a specific embodiment of the present invention, the second connecting end extends outside the mounting groove;

[0013] The suction nozzle replacement device also includes an air inlet and outlet assembly, and each of the cylinders is connected to the air inlet and outlet assembly, wherein the air inlet and outlet assembly includes a first air nozzle, a second air nozzle, a first air pipe and a second air pipe, the first air nozzle is connected to the first connecting end and the first air pipe, the second air nozzle is connected to the second connecting end and the second air pipe, and the first air pipe and the second air pipe are both used to supply air to the cylinder body of the cylinder.

[0014] In a specific embodiment of the present invention, the extension portion has an avoidance hole passing through along the first direction, the first air nozzle passes through the avoidance hole and is connected to the first connecting end, and along the first direction, the first air nozzle is arranged opposite to the corresponding fixing seat.

[0015] In a specific embodiment of the present invention, the nozzle replacement device further includes a tube bundle, the tube bundle is connected to the mounting plate and is located on a side of the mounting plate facing the accommodating plate along the first direction, a tube bundle channel is formed between the tube bundle and the mounting plate, and a length direction of the tube bundle channel extends along the second direction;

[0016] There are at least two bundled tubes, all of which are spaced apart along the third direction. One bundled tube cooperates with one air inlet and outlet assembly. In the air inlet and outlet assembly, the first air pipe and the second air pipe pass through the bundled tube channel.

[0017] In a specific embodiment of the present invention, the piston rod of the cylinder passes through the first connecting end;

[0018] The accommodating plate includes a accommodating main board, a connecting main board, a first connecting ear and a second connecting ear. The accommodating main board and the connecting main board are connected along the second direction. The two ends of the connecting main board in the third direction are respectively connected to the first connecting ear and the second connecting ear. The accommodating main board is slidably connected to the mounting plate. The connecting main board is arranged between two adjacent cylinders. In the third direction, the piston rod of the cylinder on one side of the connecting main board is connected to the first connecting ear, and the piston rod of the cylinder on the other side is connected to the second connecting ear. The end of the accommodating main board away from the cylinder piston rod along the second direction is provided with a plurality of accommodating grooves, and the accommodating grooves are used to accommodate suction nozzles.

[0019] In a specific embodiment of the present invention, the nozzle replacement device further comprises a first sensor, a partition, and a control board;

[0020] The number of the first sensors matches the number of the receiving slots, and each receiving slot is correspondingly provided with a first sensor, and the first sensor is used to detect whether there is a suction nozzle in the receiving slot;

[0021] The partition is connected to the accommodating main board, and along the first direction, the partition is located on a side of the accommodating main board away from the mounting plate, and the thickness direction of the partition extends along the first direction;

[0022] Along the first direction, the control board is disposed between the partition and the accommodating main board, and the control board is electrically connected to the first sensor.

[0023] The present invention further provides a crystal bonding machine, comprising the nozzle replacement device and an air supply assembly as described above, wherein the air supply assembly is connected to the pneumatic linear actuator.

[0024] One of the above technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0025] In actual application, the nozzle replacement device of the present invention has a mounting plate connected to a crystal bonding machine, a receiving plate receiving a plurality of nozzles, and the receiving plate is driven by a pneumatic linear actuator to slide along a second direction to a preset position for nozzle replacement. Since the thickness direction of the mounting plate and the receiving plate extends along the first direction, the mounting plate, the pneumatic linear actuator and the receiving plate are arranged along the first direction, that is, the pneumatic linear actuator is arranged between the two plates. The nozzle replacement device of this structure has a compact structure and occupies a small space. Applying it to a crystal bonding machine can reduce the squeezing of the layout space of other functional modules, which is beneficial to the design layout of other functional modules. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0027] Figure 1 is a perspective view of a nozzle replacement device according to an embodiment of the present invention;

[0028] Figure 2 is a perspective view of the nozzle replacement device according to an embodiment of the present invention from another angle;

[0029] Figure 3 2. It is an exploded schematic diagram of a nozzle replacement device according to an embodiment of the present invention;

[0030] Figure 4 This is a three-dimensional diagram of the mounting plate and the bundled tube fitting according to an embodiment of the present invention;

[0031] Figure 5 This is a three-dimensional diagram of the pneumatic linear actuator, the connecting main board, the first connecting ear and the second connecting ear in cooperation with each other according to an embodiment of the present invention;

[0032] Figure 6 This is an embodiment of the present invention Figure 1 A is an enlarged schematic diagram.

[0033] In the figure, 1. mounting plate; 1A. first end; 1B. second end; 101. mounting groove; 102. extension portion; 102A. avoidance hole; 2. pneumatic linear actuator; 2A. first connecting end; 2B. second connecting end; 3. accommodating plate; 31. accommodating main board; 3101. accommodating groove; 32. connecting main board; 33. first connecting ear; 34. second connecting ear; 4. fixing seat; 5. air inlet and outlet assembly; 51. first air nozzle; 52. second air nozzle; 53. first air pipe; 54. second air pipe; 6. bundle pipe member; 601. bundle pipe channel; 7. first sensor; 8. control board; 9. partition; 10. buffer block; Z, first direction; X, second direction; Y, third direction. DETAILED DESCRIPTION

[0034] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limiting the present invention.

[0035] Reference Figures 1 to 6 As shown, a nozzle replacement device of a preferred embodiment of the present application has a first direction Z, a second direction X and a third direction Y that are perpendicular to each other. The nozzle replacement device includes a mounting plate 1, a pneumatic linear actuator 2 and a receiving plate 3. The mounting plate 1, the pneumatic linear actuator 2 and the receiving plate 3 are arranged along the first direction Z. The pneumatic linear actuator 2 is arranged on the mounting plate 1, and the receiving plate 3 is slidably connected to the mounting plate 1. The power output end of the pneumatic linear actuator 2 is connected to the receiving plate 3. The pneumatic linear actuator 2 is used to drive the receiving plate 3 to slide along the second direction X. The receiving plate 3 is used to accommodate multiple nozzles; wherein, the thickness directions of the mounting plate 1 and the receiving plate 3 both extend along the first direction Z.

[0036] In actual application, the nozzle replacement device of the present invention has a mounting plate 1 connected to a crystal bonding machine, and a receiving plate 3 receives a plurality of nozzles. The receiving plate 3 is driven by a pneumatic linear actuator 2 to slide along a second direction X to a preset position for nozzle replacement. Since the thickness direction of the mounting plate 1 and the receiving plate 3 extends along the first direction Z, the mounting plate 1, the pneumatic linear actuator 2 and the receiving plate 3 are arranged along the first direction Z, that is, the pneumatic linear actuator 2 is arranged between the two plates. The nozzle replacement device of this structure has a compact structure and occupies a small space. Applying it to a crystal bonding machine can reduce the squeezing of the layout space of other functional modules, which is beneficial to the design layout of other functional modules.

[0037] It should be noted that the pneumatic linear actuator can achieve linear motion without using a motor, eliminating the volume of the motor itself and the transmission component, and the volume is relatively small. Therefore, the pneumatic linear actuator 2 is used as the driving source to achieve the sliding of the accommodating plate 3, and the pneumatic linear actuator 2 is arranged between the mounting plate 1 and the accommodating plate 3. The nozzle replacement device has a compact structure and occupies a small space.

[0038] The nozzle replacement device also includes two linear guide rails. The accommodating plate 3 is slidably connected to the mounting plate 1 through the linear guide rails, and the pneumatic linear actuator 2 is arranged between the two linear guide rails, which can ensure the stable sliding of the accommodating plate 3.

[0039] In this embodiment, the pneumatic linear actuator 2 is a cylinder, which has the characteristics of flexible control, fast response, clean medium and no pollution risk. The length direction of the cylinder extends along the second direction X. There are two cylinders, and the two cylinders are arranged at intervals along the third direction Y. At this time, the piston rod of the cylinder is connected to the accommodating plate 3, and the sliding of the accommodating plate 3 is achieved by the two cylinders. Its structure is simple and can make the accommodating plate 3 slide smoothly.

[0040] In other embodiments, the number of cylinders may be three, four or more, which is not limited in this application.

[0041] Furthermore, in the first direction Z, a mounting groove 101 is provided on one side of the mounting plate 1 facing the accommodating plate 3, and the length direction of the mounting groove 101 extends along the second direction X. Two mounting grooves 101 are provided along the third direction Y, and a cylinder is provided in one mounting groove 101, and each cylinder is provided in a different mounting groove 101, that is, the cylinder is embedded in the mounting plate 1, which can reduce the space occupied by the nozzle replacement device in the first direction Z, and the structure of the nozzle replacement device is more compact.

[0042] Specifically, when the number of cylinders is more than two, the number of mounting grooves 101 is also more than two. In actual applications, the number of mounting grooves 101 is adapted to the number of cylinders, and one cylinder is installed in one mounting groove 101. This application does not go into too much detail about this.

[0043] In this embodiment, the nozzle replacement device further includes a fixing seat 4, the number of which is two; along the second direction X, the mounting plate 1 has a first end 1A and a second end 1B opposite to each other, the end surface of the first end 1A has two extensions 102 extending along the second direction X, the two extensions 102 are spaced apart along the third direction Y, and each extension 102 faces a mounting groove 101 along the second direction X; wherein, the two ends of the cylinder body along its length direction are respectively a first connecting end 2A and a second connecting end 2B, the first connecting end 2A extends outside the mounting groove 101, that is, the mounting groove 101 is along One end in the second direction X is an open end, through which the first connecting end 2A passes, and the first connecting end 2A is located above the corresponding extension portion 102, and the first connecting end 2A is fixedly connected to the corresponding extension portion 102 through a fixing seat 4. Specifically, by arranging a fixing seat 4 on the extension portion 102 to fix the first connecting end 2A of the cylinder, the advantage is that the fixing seat 4 is not arranged between the mounting plate 1 and the accommodating plate 3, thereby ensuring the stable connection of the cylinder and avoiding the nozzle replacement device from occupying too much space in the first direction Z. Therefore, the nozzle replacement device has a compact structure.

[0044] Exemplarily, the fixing seat 4 is fixedly connected to the extension portion 102 by bolts to fix the first connecting end 2A.

[0045] It should be noted that the number of extensions 102 matches the number of mounting grooves 101 and cylinders, and this application will not elaborate on this.

[0046] Furthermore, the second connecting end 2B extends to the outside of the mounting groove 101, that is, the two ends of the mounting groove 101 along the second direction X are open ends extending to the end surface of the first end 1A and the end surface of the second end 1B respectively; the nozzle replacement device also includes an air inlet and outlet assembly 5, each cylinder is connected to the air inlet and outlet assembly 5, wherein the air inlet and outlet assembly 5 includes a first air nozzle 51, a second air nozzle 52, a first air pipe 53 and a second air pipe 54, the first air nozzle 51 is connected to the first connecting end 2A and the first air pipe 53, the second air nozzle 52 is connected to the second connecting end 2B and the second air pipe 54, the first air pipe 53, the second air pipe 53 and the second air pipe 54 are connected. The two air pipes 54 are both used to supply air to the cylinder body of the cylinder. Specifically, since the first connecting end 2A and the second connecting end 2B extend outside the mounting groove 101, the first air nozzle 51 and the second air nozzle 52 are also arranged outside the mounting groove 101. At this time, the first air nozzle 51 and the second air nozzle 52 are not arranged between the mounting plate 1 and the accommodating plate 3. The space on both sides of the mounting plate 1 in the second direction X is fully utilized to arrange the first air nozzle 51 and the second air nozzle 52, avoiding the nozzle replacement device from occupying too much space in the first direction Z. Therefore, the nozzle replacement device has a compact structure.

[0047] Furthermore, the extension portion 102 has an avoidance hole 102A passing through along the first direction Z. The first air nozzle 51 passes through the avoidance hole 102A and is connected to the first connecting end 2A. Along the first direction Z, the first air nozzle 51 is arranged opposite to the corresponding fixing seat 4. At this time, the space of the extension portion 102 away from the fixing seat 4 on the first direction Z is fully utilized to arrange the first air nozzle 51. The first air nozzle 51 will not interfere with the sliding of the accommodating plate 3. The design is reasonable and the overall structure of the nozzle replacement device is compact.

[0048] In this embodiment, the nozzle replacement device further includes a bundle pipe member 6, which is connected to the mounting plate 1 and is located on a side of the mounting plate 1 facing the accommodating plate 3 along the first direction Z. A bundle pipe channel 601 is formed between the bundle pipe member 6 and the mounting plate 1, and the length direction of the bundle pipe channel 601 extends along the second direction X. There are two bundle pipe members 6, and all bundle pipe members 6 are arranged at intervals along the third direction Y. One bundle pipe member 6 cooperates with one inlet and outlet assembly 5. In the inlet and outlet assembly 5, the first air pipe 53 and the second air pipe 54 are passed through the bundle pipe channel 601. Specifically, by setting the bundle pipe member 6, it is possible to The first air pipe 53 and the second air pipe 54 are arranged in an orderly manner, and the nozzle replacement device is applied to the crystal bonding machine, which can prevent the first air pipe 53 and the second air pipe 54 from squeezing the layout space of other functional modules; and based on the setting of the above-mentioned linear slide rail, a space with a certain distance in the first direction Z is formed between the accommodating plate 3 and the mounting plate 1. Based on this, the bundle pipe 6 is set on the side of the mounting plate 1 facing the accommodating plate 3, which makes full use of the space between the accommodating plate 3 and the mounting plate 1, and will not increase the space occupied by the nozzle replacement device in the first direction Z. The nozzle replacement device has the characteristic of compact structure.

[0049] Furthermore, a control valve is connected to one end of the mounting plate 1 in the third direction Y. The first air pipe 53 connecting the two cylinders is connected in parallel and connected to the control valve, and the second air pipe 53 connecting the two cylinders is connected in parallel and connected to the control valve. The air supply of the first air pipe 53 or the second air pipe 54 is controlled by the control valve, which is easy to operate and ensures the consistency of the actions of the two cylinders.

[0050] In this embodiment, the piston rod of the cylinder is passed through the first connecting end 2A; the accommodating plate 3 includes a accommodating main board 31, a connecting main board 32, a first connecting ear 33 and a second connecting ear 34. The accommodating main board 31 and the connecting main board 32 are connected along the second direction X, and the two ends of the connecting main board 32 in the third direction Y are respectively connected to the first connecting ear 33 and the second connecting ear 34. The accommodating main board 31 is slidably connected to the mounting plate 1, and the connecting main board 32 is arranged between the two cylinders. In the third direction Y, the piston rod of the cylinder on one side of the connecting main board 32 is connected to the first connecting ear 33, and the piston rod of the cylinder on the other side is connected to the second connecting ear 34. The end of the accommodating main board 31 away from the cylinder piston rod along the second direction X is provided with a plurality of accommodating grooves 3101, and the accommodating grooves 3101 are used to accommodate the suction nozzle.

[0051] Specifically, in the initial state of the nozzle replacement device, the piston rod of the cylinder is in an extended state. After air is supplied to the cylinder body through the first air pipe 53, the piston rod retracts, thereby driving the connecting main board 32 to slide along the second direction X, thereby driving the accommodating main board 31 to slide to a preset position for the nozzle replacement work to be carried out; and after the replacement is completed, air is supplied to the cylinder body through the second air pipe 54, so that the piston rod is reset, thereby driving the accommodating plate 3 to be reset.

[0052] Exemplarily, the accommodating main plate 31 and the connecting main plate 32 are connected by bolts, while the first connecting ear 33 and the second connecting ear 34 are integrally connected to the connecting main plate 32, and the piston rod and the first connecting ear 33 and the second connecting ear 34 are locked by nuts.

[0053] Furthermore, the nozzle replacement device also includes a first sensor 7, a partition 8 and a control board 9; the number of the first sensors 7 is adapted to the number of the accommodating slots 3101, and each accommodating slot 3101 is correspondingly provided with a first sensor 7, and the first sensor 7 is used to monitor whether there is a nozzle in the accommodating slot 3101; the partition 8 is connected to the accommodating main board 31, and along the first direction Z, the partition 8 is located on the side of the accommodating main board 31 away from the mounting plate 1, and the thickness direction of the partition 8 extends along the first direction Z; along the first direction Z, the control board 9 is provided between the partition 8 and the accommodating main board 31. The control board 9 is placed between the main board 31 and the main board 31, and is electrically connected to the first sensor 7; specifically, the control board 9 is used to process the signal of the first sensor 7 and transmit the signal of the first sensor 7 to the control system of the crystal bonder, so that the placement device of the crystal bonder can complete the suction nozzle replacement work. In actual application, when replacing the suction nozzle, the placement device places the suction nozzle to be replaced on the receiving slot 3101 where no suction nozzle is placed based on the signal of the first sensor 7, and then replaces the suction nozzle in the receiving slot 3101 where the suction nozzle of the required model is placed.

[0054] The setting of the partition 8 blocks the propagation path of the static electricity generated by the control board 9, which can prevent the static electricity generated by the control board 9 from affecting the normal operation of other functional modules of the crystal bonding machine, and it can also protect the control board 9. In addition, the thickness direction of the partition 8 extends along the first direction Z. Therefore, the setting of the partition 8 will not cause the volume of the nozzle replacement device to increase too much, and the nozzle replacement device has a compact structure and occupies a small space.

[0055] In addition, the nozzle replacement device blocks the propagation path of static electricity generated by the control board 9 through the partition 8, and adopts a pneumatic linear actuator to drive the accommodating plate 3 to slide, thereby reducing the position of the nozzle replacement device that needs to be insulated, which can save manufacturing costs.

[0056] Furthermore, the nozzle replacement device also includes a buffer block 10, which is connected to the connecting main board 32. The buffer block 10 is used to contact the first end 1A. The material of the buffer block 10 is rubber material or a material that can play a buffering role in this field. This application does not impose any restrictions on this. Specifically, the buffer block 10 plays a buffering and limiting role, that is, it can limit the stroke of the accommodating plate 3. After the buffer block 10 contacts the first end 1A, the buffer block 10 can absorb the energy generated by the contact to ensure the stability of the structure.

[0057] In the present application, a second sensor and a third sensor are provided at one end of the mounting plate 1 in the third direction Y. The second sensor and the third sensor are spaced apart in the second direction X. A sensing element is provided on the accommodating main board 31. The second sensor and the third sensor cooperate with the sensing element to monitor the stroke of the accommodating plate 3. The stroke of the cylinder piston rod is controlled by the signals of the second sensor and the third sensor to ensure that the accommodating plate 3 slides to the preset position in actual application.

[0058] In addition, the mounting plate 1 and the connecting body are provided with weight-reducing holes penetrating along the first direction Z to reduce the overall weight of the nozzle replacement device.

[0059] Based on the above-mentioned nozzle replacement device, the present application also proposes a crystal bonding machine, which includes the above-mentioned nozzle replacement device and an air supply component, the air supply component is connected to the pneumatic linear actuator, and the air supply component is used to supply gas to the pneumatic linear actuator. Since the crystal bonding machine includes the above-mentioned nozzle replacement device, the crystal bonding machine also has the advantages of the above-mentioned nozzle replacement device. The present application does not go into too much detail on this. In addition, the crystal bonding machine using the above-mentioned nozzle replacement device is conducive to the design layout of other functional modules such as mounting devices and visual inspection devices.

[0060] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A nozzle replacement device, characterized in that: The invention comprises a mounting plate (1), a pneumatic linear actuator (2) and a receiving plate (3), wherein the mounting plate (1), the pneumatic linear actuator (2) and the receiving plate (3) are arranged along a first direction (Z), the pneumatic linear actuator (2) is arranged on the mounting plate (1), the receiving plate (3) is slidably connected to the mounting plate (1), a power output end of the pneumatic linear actuator (2) is connected to the receiving plate (3), the pneumatic linear actuator (2) is used to drive the receiving plate (3) to slide along a second direction (X), and the receiving plate (3) is used to receive a plurality of suction nozzles; Wherein, the thickness directions of the mounting plate (1) and the accommodating plate (3) both extend along the first direction (Z), and the first direction (Z) and the second direction (X) are perpendicular to each other.

2. The nozzle replacement device according to claim 1, characterized in that: The pneumatic linear actuator (2) is a cylinder, the length direction of the cylinder extends along the second direction (X), at least two cylinders are provided, and all the cylinders are spaced apart along the third direction (Y); The first direction (Z), the second direction (X) and the third direction (Y) are perpendicular to each other.

3. The nozzle replacement device according to claim 2, characterized in that: In the first direction (Z), a mounting groove (101) is provided on one side of the mounting plate (1) facing the accommodating plate (3), the length direction of the mounting groove (101) extends along the second direction (X), at least two mounting grooves (101) are provided and spaced apart along the third direction (Y), one cylinder is provided in one mounting groove (101), and each cylinder is provided in a different mounting groove (101).

4. The nozzle replacement device according to claim 3, characterized in that: The nozzle replacement device further comprises a fixing seat (4), and the number of the fixing seats (4) is at least two; Along the second direction (X), the mounting plate (1) has a first end (1A) and a second end (1B) opposite to each other, the end surface of the first end (1A) having at least two extensions (102) extending along the second direction (X), all the extensions (102) being arranged at intervals along the third direction (Y), and each of the extensions (102) facing one of the mounting grooves (101) along the second direction (X); The two ends of the cylinder body along its length direction are respectively a first connecting end (2A) and a second connecting end (2B); the first connecting end (2A) extends outside the mounting groove (101) and is located above the corresponding extension portion (102); the first connecting end (2A) is fixedly connected to the corresponding extension portion (102) via a fixing seat (4).

5. The nozzle replacement device according to claim 4, characterized in that: The second connecting end (2B) extends outside the mounting groove (101); The nozzle replacement device further comprises an air inlet and outlet assembly (5), and each of the cylinders is connected to the air inlet and outlet assembly (5), wherein the air inlet and outlet assembly (5) comprises a first air nozzle (51), a second air nozzle (52), a first air pipe (53) and a second air pipe (54), wherein the first air nozzle (51) is connected to the first connecting end (2A) and the first air pipe (53), and the second air nozzle (52) is connected to the second connecting end (2B) and the second air pipe (54), and the first air pipe (53) and the second air pipe (54) are both used for supplying air to the cylinder body of the cylinder.

6. The nozzle replacement device according to claim 5, characterized in that: The extension portion (102) has a relief hole (102A) passing through along the first direction (Z); the first air nozzle (51) passes through the relief hole (102A) and is connected to the first connecting end (2A); along the first direction (Z), the first air nozzle (51) is arranged opposite to the corresponding fixing seat (4).

7. The nozzle replacement device according to claim 5, characterized in that: The nozzle replacement device further comprises a bundled tube member (6), the bundled tube member (6) being connected to the mounting plate (1) and being located on a side of the mounting plate (1) facing the accommodating plate (3) along the first direction (Z), a bundled tube channel (601) being formed between the bundled tube member (6) and the mounting plate (1), and the length direction of the bundled tube channel (601) extending along the second direction (X); The number of the bundled tube components (6) is at least two, and all the bundled tube components (6) are arranged at intervals along the third direction (Y). One bundled tube component (6) cooperates with one air inlet and outlet assembly (5), and in the air inlet and outlet assembly (5), the first air pipe (53) and the second air pipe (54) pass through the bundled tube channel (601).

8. The nozzle replacement device according to claim 4, characterized in that: The piston rod of the cylinder passes through the first connecting end (2A); The accommodating plate (3) includes an accommodating main plate (31), a connecting main plate (32), a first connecting ear (33) and a second connecting ear (34); the accommodating main plate (31) and the connecting main plate (32) are connected along the second direction (X); the connecting main plate (32) is connected to the first connecting ear (33) and the second connecting ear (34) at both ends in the third direction (Y); the accommodating main plate (31) is slidably connected to the mounting plate (1); the connecting main plate (32) is arranged between two adjacent cylinders; in the third direction (Y), the piston rod of the cylinder on one side of the connecting main plate (32) is connected to the first connecting ear (33), and the piston rod of the cylinder on the other side is connected to the second connecting ear (34); a plurality of accommodating grooves (3101) are arranged at one end of the accommodating main plate (31) away from the piston rod of the cylinder along the second direction (X); the accommodating grooves (3101) are used to accommodate suction nozzles.

9. The nozzle replacement device according to claim 8, characterized in that: The nozzle replacement device further comprises a first sensor (7), a partition (8) and a control panel (9); The number of the first sensors (7) is adapted to the number of the accommodating slots (3101), and each accommodating slot (3101) is correspondingly provided with a first sensor (7), and the first sensor (7) is used to monitor whether there is a suction nozzle in the accommodating slot (3101); The partition (8) is connected to the accommodating main board (31), and along the first direction (Z), the partition (8) is located on a side of the accommodating main board (31) away from the mounting plate (1), and the thickness direction of the partition (8) extends along the first direction (Z); Along the first direction (Z), the control board (9) is arranged between the partition (8) and the accommodating main board (31), and the control board (9) is electrically connected to the first sensor (7).

10. A die bonding machine, characterized in that: It comprises a nozzle replacement device and an air supply assembly as described in any one of claims 1 to 9, wherein the air supply assembly is connected to the pneumatic linear actuator (2).

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