Fixing device and semiconductor device

Abstract

The application relates to the technical field of semiconductor equipment, and discloses a fixing device and a semiconductor equipment. The fixing device of the application comprises a clamping assembly, the clamping assembly is used for clamping a mask or a wafer; a supporting assembly, the supporting assembly is used for supporting the mask or the wafer along a first direction and adjusting the included angle between the mask or the wafer and a first plane, wherein the first plane is perpendicular to the first direction; and a rotary adjusting mechanism, the rotary adjusting mechanism comprises a driving assembly, wherein the driving assembly is used for driving the mask or the wafer to rotate, and the rotation axis of the mask or the wafer is parallel to the first direction. The fixing device of the application can adjust the Rx angle and the Ry angle of the mask or the wafer through the supporting assembly, and adjust the Rz angle of the mask or the wafer through the rotary adjusting mechanism, so that the spatial posture multi-angle adjustment of the mask or the wafer can be realized, and the fixed angle of the mask can be accurately controlled.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a fixing device and a semiconductor equipment. BACKGROUND

[0002] With the rapid development of semiconductor equipment technology, the processing precision and safety of a mask or a wafer are increasingly required. For example, in a photolithography machine, a mask fixing device is an important device for operating a mask in a photolithography process. The mask fixing device clamps and fixes the mask for subsequent photolithography process. The fixing precision (e.g., fixing angle) of the mask fixing device to the mask will affect the performance and quality of the final product, and therefore, there is an urgent need to provide a fixing device to improve the fixing precision of the mask. SUMMARY

[0003] Embodiments of the present application provide a fixing device and a semiconductor equipment, which can accurately fix a mask or a wafer.

[0004] In a first aspect, embodiments of the present application provide a fixing device, comprising: a clamping assembly, the clamping assembly being configured to clamp a mask or a wafer; the clamping assembly comprising a flexible contact, the flexible contact being configured to abut an edge of the mask or the wafer; a support assembly, the support assembly being configured to support the mask or the wafer along a first direction, and to adjust an included angle between the mask or the wafer and a first plane, wherein the first plane is perpendicular to the first direction; a rotation adjustment mechanism, the rotation adjustment mechanism comprising a driving assembly, wherein the driving assembly is configured to drive the mask or the wafer to rotate, and a rotation axis of the mask or the wafer is parallel to the first direction.

[0005] It can be understood that, by means of the fixing device, the Rx angle and the Ry angle of the mask or the wafer can be adjusted by the support assembly, and the Rz angle of the mask or the wafer can be adjusted by the rotation adjustment mechanism, so that the spatial posture multi-angle adjustment of the mask or the wafer can be realized, and the fixing angle of the mask can be accurately controlled.

[0006] In some possible implementations, the clamping assembly includes a first clamping base, and a first motor, a swing arm and an elastic member disposed on the first clamping base; the swing arm includes a first arm extending along a second direction and a second arm extending along a third direction, one end of the first arm along the second direction is connected to one end of the second arm along the third direction, the other end of the first arm along the second direction is connected to one end of the elastic member along the elastic direction of the elastic member, and the other end of the elastic member along the elastic direction of the elastic member is fixedly connected to the first clamping base; the flexible contact is disposed on the other end of the second arm along the third direction; the second direction and the third direction are perpendicular to the first direction; the connection between the first arm and the second arm is provided with a rotating bearing, the rotating bearing is connected to the first clamping base; the elastic member and the second arm are respectively disposed on two sides of the first motor along a fourth direction, and the first motor is used to push the first arm along a fifth direction; the first direction, the fourth direction and the fifth direction are perpendicular to each other in pairs.

[0007] In some possible implementations, the third direction and the fifth direction form an acute angle, and the one end of the second arm along the third direction connected to the first arm is closer to the first motor than the other end of the second arm along the third direction.

[0008] In some possible implementations, the clamping assembly further includes a photoelectric sensor disposed on the first clamping base, and the photoelectric sensor is used to detect the driving state of the first motor; in correspondence with the case that the clamping assembly releases the mask plate or the wafer, the photoelectric sensor detects that the first motor is in a first driving state; in correspondence with the case that the clamping assembly clamps the mask plate or the wafer, the photoelectric sensor detects that the first motor is in a second driving state.

[0009] In some possible implementations, the clamping assembly includes a second clamping base, and a second motor and a force sensor disposed on the second clamping base; the flexible contact is connected to the output end of the second motor, and the second motor is used to drive the flexible contact to abut against the edge of the mask plate or the wafer along the fourth direction; the fourth direction is perpendicular to the first direction; the force sensor is used to detect the pushing force of the flexible contact on the mask plate or the wafer, so as to control the driving force output by the second motor.

[0010] In some possible implementations, a limiting assembly is further included; the limiting assembly is at least partially distributed along the fourth direction away from the clamping assembly, and the clamping assembly and the limiting assembly are used to place the mask plate or the wafer therebetween; the clamping assembly is used to abut against the edge of the mask plate or the wafer, so as to limit the mask plate or the wafer between the clamping assembly and the limiting assembly.

[0011] In some possible implementations, the limiting assembly includes at least two limiting columns, and the at least two limiting columns include a first limiting column and a second limiting column; the flexible contact is located on the perpendicular bisector of the first limiting column and the second limiting column.

[0012] In some possible implementation manners, the first support plate and the second support plate are further included, the second support plate is spaced apart from the first support plate along the first direction, the rotation adjusting mechanism is arranged on the first support plate, and the support assembly and the clamping assembly are arranged on the second support plate; and: the driving assembly is connected with the second support plate and configured to drive the second support plate to rotate about the first axis, the first axis being parallel to the first direction; the guide mechanism is arranged between the first support plate and the second support plate and configured to guide the rotation of the second support plate.

[0013] In some possible implementation manners, the support assembly includes at least two piezoelectric screws, the at least two piezoelectric screws being spaced apart on the second support plate, and each piezoelectric screw is connected with the second support plate at one end along the first direction and configured to support the mask plate or the wafer at the other end, and the piezoelectric screw is in point contact with the mask plate or the wafer.

[0014] In some possible implementation manners, the support assembly includes at least two support blocks, the at least two support blocks being spaced apart on the second support plate, and each support block is connected with the second support plate at one end along the first direction and configured to support the mask plate or the wafer at the other end, and the support block is in point contact with the mask plate or the wafer; at least one support block of the at least two support blocks is provided with a gasket between the support block and the second support plate, and the number and / or thickness of the gasket is adjustable, so that the included angle between the mask plate or the wafer and the first plane is adjustable.

[0015] In some possible implementation manners, the guide mechanism includes a first guide part and a second guide part, the first guide part is arranged on the side of the first support plate facing the second support plate, the second guide part is arranged on the side of the second support plate facing the first support plate, and the first guide part and the second guide part are nested with each other; one of the first guide part and the second guide part includes at least two arc-shaped protrusions distributed along the circumference thereof, and the other includes at least two arc-shaped grooves distributed along the circumference thereof, and the first axis passes through the geometric center of the figure obtained by sequentially connecting the positions of the at least two arc-shaped protrusions and / or the geometric center of the figure obtained by sequentially connecting the positions of the at least two arc-shaped grooves.

[0016] In some possible implementation manners, the guide mechanism includes a circular collar, the circular collar includes an inner ring and an outer ring nested with each other, the outer ring is connected with the first support plate, and the inner ring is connected with the second support plate, and the inner ring is capable of rotating about the first axis relative to the outer ring.

[0017] In some possible implementation manners, the driving assembly includes a third motor, the rotation adjusting mechanism further includes a transmission assembly, the transmission assembly includes a first transmission part and a second transmission part, the third motor is connected with the first transmission part and configured to drive the first transmission part to rotate to drive the second transmission part to move, and the second transmission part is connected with the second support plate and configured to drive the second support plate to rotate.

[0018] In some possible implementation manners, the first transmission part comprises a first coupling, a lead screw, a lead screw fixing seat and a lead screw support seat, the first coupling is used to connect the third motor and the lead screw, the lead screw extends in a fourth direction, and two ends of the lead screw in the fourth direction are rotationally connected with the lead screw fixing seat and the lead screw support seat respectively; the second transmission part comprises a sliding block, a first guide rail, a second guide rail and a connecting piece, the sliding block is arranged on the lead screw and can move on the lead screw in the fourth direction; the first guide rail and the second guide rail are arranged on two sides of the sliding block in a first direction respectively, the first guide rail guides the sliding block in the fourth direction; one end of the connecting piece is connected with the second guide rail, and the other end is connected with the second support plate, and the second guide rail guides the connecting piece in a fifth direction, the fourth direction, the fifth direction and the first direction are perpendicular to each other.

[0019] In some possible implementation manners, the first transmission part comprises a second coupling, a worm, a worm fixing seat and a worm support seat, the second coupling is used to connect the third motor and the worm, the worm extends in a second direction, and two ends of the worm in the second direction are rotationally connected with the worm fixing seat and the worm support seat respectively, and the second direction is perpendicular to the first direction; the second transmission part comprises a worm wheel, the worm wheel is engaged with the worm, and the worm wheel is fixedly connected with the second support plate.

[0020] In some possible implementation manners, the driving assembly comprises a speed reducer, the rotation adjusting mechanism further comprises a transmission assembly, the transmission assembly comprises a first gear and a second gear, wherein the size of the first gear is smaller than the size of the second gear, the first gear and the second gear are engaged with each other, and the second gear is connected with the second support plate; the speed reducer is used to transmit a driving force received thereby to the first gear, so that the first gear rotates to drive the second gear and the second support plate to rotate.

[0021] In some possible implementation manners, the driving assembly comprises a speed reducer, the rotation adjusting mechanism further comprises a transmission assembly, the transmission assembly comprises a first gear and a second gear, wherein the size of the first gear is smaller than the size of the second gear, the first gear and the second gear are engaged with each other; and: the support assembly and the clamping assembly are arranged on an end face of the second gear, the speed reducer is used to transmit a driving force received thereby to the first gear, so that the first gear rotates to drive the second gear to rotate; the fixing device further comprises at least one gear limiting assembly, the at least one gear limiting assembly is arranged on the first support plate along an edge of the second gear, and is used to limit the position of the second gear in the first direction.

[0022] In some possible implementation manners, the material of the flexible contact point comprises at least one of polyether ether ketone and polytetrafluoroethylene; and / or, the material of the elastic member comprises stainless steel or titanium alloy; and / or, the material of the limiting column in the limiting assembly comprises at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide and aluminum oxide.

[0023] In some possible implementation manners, the material of the first support plate and / or the second support plate comprises at least one of a titanium alloy, an aluminum alloy, stainless steel, zirconia, and alumina.

[0024] In a second aspect, the embodiments of the present application provide a semiconductor device comprising the fixing device of the first aspect. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 According to some embodiments of the present application, a structural schematic diagram of a first fixing device 1 is shown;

[0026] Figure 2 According to some embodiments of the present application, a partial structural schematic diagram of the first fixing device 1 is shown;

[0027] Figure 3A According to some embodiments of the present application, a structural schematic diagram of a clamping assembly 10 is shown;

[0028] Figure 3B According to some embodiments of the present application, a structural schematic diagram of the clamping assembly 10 is shown from another perspective;

[0029] Figure 4 According to some embodiments of the present application, a partial structural schematic diagram of a second fixing device 1 is shown;

[0030] Figure 5 According to some embodiments of the present application, a partial structural schematic diagram of a third fixing device 1 is shown;

[0031] Figure 6 According to some embodiments of the present application, a structural schematic diagram of a guide mechanism is shown;

[0032] Figure 7 According to some embodiments of the present application, a structural schematic diagram of the second fixing device 1 is shown;

[0033] Figure 8 According to some embodiments of the present application, a structural schematic diagram of the third fixing device 1 is shown;

[0034] Figure 9 According to some embodiments of the present application, a partial structural schematic diagram of the fixing device 1 is shown;

[0035] Figure 10 According to some embodiments of the present application, a structural schematic diagram of a fourth fixing device 1 is shown;

[0036] Figure 11 According to some embodiments of the present application, a structural schematic diagram of a fifth fixing device 1 is shown.

[0037] Reference signs:

[0038] 01-mask; 1-fixing device; 011-left side of mask; 012-bottom side of mask;

[0039] 10-clamping assembly; 101a-first clamping base; 1011-bottom wall; 1012-side wall; 102-first motor; 1021-second extension; 103-swing arm; 1031-first arm; 10311-first extension; 1032-second arm; 104-elastic member; 105-bearing cover plate; 106-fixing member; 107-flexible contact; 108-fixing seat; 1081-waist-shaped through hole; 1091-first photoelectric switch; 1092-second photoelectric switch; 101b-second clamping base; 110-second motor; 111-force sensor;

[0040] 20-support assembly; 201-piezoelectric screw; 202-hemispherical thimble; 203-support block; 2031-abutting part; 203a-protruding surface;

[0041] 30-rotation adjusting mechanism; 311-third motor; 312-motor support seat; 313-reducer; 320-first transmission part; 321a-first coupling; 322-screw rod; 323-screw rod fixing seat; 324-screw rod support seat; 330-second transmission part; 331-sliding block; 332-first guide rail; 333-second guide rail; 334-connecting member; 321b-second coupling; 325-worm; 326-worm fixing seat; 327-worm support seat; 328-first gear; 329-second gear;

[0042] 40-first support plate; 50-second support plate;

[0043] 60-limiting assembly; 601-first limiting column; 602-second limiting column; 603-third limiting column; 604-fourth limiting column;

[0044] 70-mask detector;

[0045] 80-first guide part; 801-first arc-shaped protrusion; 802-second arc-shaped protrusion; 803-third arc-shaped protrusion;

[0046] 90-circular collar; 901-inner ring; 902-outer ring;

[0047] 100-arc-shaped grating mechanism; 1001-arc-shaped scale seat; 1002-arc-shaped grating; 1003-grating reader;

[0048] 200-gear limiting assembly; 210-limiting bearing; 220-cantilever; 230-wave bead screw. DETAILED DESCRIPTION

[0049] The following specific embodiments illustrate the implementation of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with some embodiments, this does not mean that the features of this application are limited to the implementation. On the contrary, the purpose of introducing the application in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present application. In order to provide an in-depth understanding of the present application, the following description will contain many exemplary details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other unless there is a conflict.

[0050] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0051] The following explains the terms that may appear in the embodiments of the present application.

[0052] In the description of the embodiments of this application, "and / or" is simply a description of the association relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the related objects are in an "or" relationship. When there are multiple related objects, it can represent the selection of one, two, or all of them.

[0053] In the description of the embodiments of the present application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are intended only to facilitate the description of the embodiments of the present application and to simplify the description. They do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the embodiments of the present application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0054] In the description of the embodiments of the present application, it should be noted that unless specifically defined and limited otherwise, the terms "mount", "connect", "connection" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0055] The parallel, perpendicular, same (for example, the same length, the same width, etc.) and the like mentioned in the embodiments of the present application are all for the current process level, not the absolute strict definition in the mathematical sense. There can be a deviation within a predetermined angle range between two components parallel or perpendicular to each other, and in an embodiment, the predetermined angle is 10°, for example, the deviation can be within ±5°.

[0056] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the embodiments of the present application will be further described in detail below with reference to the drawings.

[0057] It should be noted that the embodiments of the present application provide a fixing device and a semiconductor equipment comprising the fixing device. For example, the fixing device of the embodiments of the present application can be applied to a photolithography machine to fix a mask plate. It can also be applied to other semiconductor equipment, such as wafer processing equipment, to fix a wafer.

[0058] Please refer to Figure 1 , Figure 1 is a structural schematic diagram of a fixing device 1 provided by the embodiments of the present application. It should be noted that, for the convenience of description, the fixing device 1 is taken as an example of a mask plate fixing device in the embodiments of the present application and the drawings, for example, the fixing device 1 is used to fix a mask plate 01. In other embodiments, the fixing device can also be used to fix a wafer. In addition, in the drawings of the present application, the x-axis direction (an example of the fifth direction in the embodiments of the present application), the y-axis direction (an example of the fourth direction in the embodiments of the present application) and the z-axis direction (an example of the first direction in the embodiments of the present application) are perpendicular to each other, wherein the z-axis direction can be the direction of gravity of the fixing device 1, the x-axis direction can be the in / out direction of the mask plate 01, for example Figure 1 , the negative direction of the x-axis can be the in direction of the mask plate 01. The Rx, Ry and Rz directions respectively represent the rotation directions around the x-axis, the y-axis and the z-axis.

[0059] As Figure 1As shown, the fixture 1 includes a clamping assembly 10, a support assembly 20, and a rotation adjustment mechanism 30. The clamping assembly 10 is used to clamp the mask 01. The support assembly 20 is used to support the mask 01 along the z-axis, allowing the mask 01 to be placed horizontally. In this case, the mask 01 is parallel to the xy plane (an example of the first plane in this application). The support assembly 20 can also be used to adjust the angle between the mask 01 and the xy plane, changing the angle of the mask 01 in the Rx and Ry directions, hereinafter referred to as the Rx angle and the Ry angle. The rotation adjustment mechanism 30 includes a drive assembly, which is used to drive the mask 01 to rotate about the z-axis. In other words, the rotation axis of the mask 01 is parallel to the z-axis, so that the drive assembly can be used to change the angle of the mask 01 in the Rz direction, hereinafter referred to as the Rz angle.

[0060] It can be understood that the fixing device 1 provided in the embodiment of the present application can adjust the Rx angle and Ry angle of the mask 01 through the support component 20, and adjust the Rz angle of the mask 01 through the rotation adjustment mechanism 30, thereby realizing multi-angle adjustment of the spatial posture of the mask 01 and accurately controlling the fixing angle of the mask 01.

[0061] In some embodiments, such as Figure 1 As shown, the fixture 1 further includes a first support plate 40 and a second support plate 50, which are spaced apart along the z-axis. The rotation adjustment mechanism 30 is disposed on the first support plate 40, and the support assembly 20 and the clamping assembly 10 are disposed on the second support plate 50. Furthermore, the drive assembly of the rotation adjustment mechanism 30 is connected to the second support plate 50 and is configured to drive the second support plate 50 to rotate about a first axis parallel to the z-axis. This can drive the rotation of the mask 01 supported by the support assembly 20 on the second support plate 50.

[0062] In some embodiments, a guide mechanism is provided between the first support plate 40 and the second support plate 50 ( Figure 1 (Not shown) The guide mechanism is used to provide a rotation center (e.g., the structural center of the guide mechanism) and to provide rotational guidance for the second support plate 50, allowing the second support plate 50 to rotate the reticle 01 about the structural center of the guide mechanism. In other words, the rotation axis of the reticle 01 passes through the structural center of the guide mechanism. It will be appreciated that the guide mechanism allows the second support plate 50 to rotate stably, preventing the rotation center of the reticle 01 from shifting, thereby ensuring the accuracy of the Rz angle adjustment mechanism 30 for adjusting the reticle 01. The specific structure of the guide mechanism will be described in detail below and is not detailed here.

[0063] Figure 2 Schematic diagrams of some structures of the fixing device 1 in some embodiments are shown.

[0064] likeFigure 2 As shown, in some embodiments, the fixing device 1 further comprises a limiting assembly 60, and the limiting assembly 60 comprises at least two limiting posts. Figure 2 In some embodiments, the limiting assembly 60 comprises a first limiting post 601, a second limiting post 602, a third limiting post 603 and a fourth limiting post 604. In other embodiments, the limiting assembly 60 can comprise more or less limiting posts, for example, the limiting assembly 60 can only comprise the first limiting post 601 and the second limiting post 602. It can be understood that the mask plate 01 is arranged between the limiting assembly 60 and the clamping assembly 10, and the position of the mask plate 01 is limited by the clamping assembly 10 and the limiting assembly 60. Thus, the first limiting post 601, the second limiting post 602, the third limiting post 603 and the fourth limiting post 604 are arranged around the mask plate 01.

[0065] Continuing to refer to Figure 2 In some embodiments, the limiting posts are arranged on the second support plate 50. For example, the second support plate 50 is provided with limiting post fixing grooves corresponding in number to the limiting posts, that is, the number of limiting post fixing grooves can be more than or equal to the number of limiting posts. In this way, the positions of the limiting posts can be adjusted according to the size or shape of the actual mask plate 01, so as to limit the mask plate 01 of different sizes or shapes.

[0066] It should be noted that the specific structure or shape of the limiting posts and the limiting post fixing grooves is not limited in the present application. For example, the shape of the limiting posts and the limiting post fixing grooves can be cylindrical, conical or square columnar. The limiting posts can also be designed with threads, so that the height of the limiting posts in the z-axis direction can be adjusted.

[0067] Continuing to refer to Figure 2 In some embodiments, taking a square mask plate 01 as an example, the first limiting post 601 and the second limiting post 602 are arranged on the second support plate 50 in the x-axis direction (the edge extension direction of the mask plate 01) and are spaced apart, and the clamping assembly 10 and the first limiting post 601 / second limiting post 602 are arranged on the two edge portions of the second support plate 50 opposite in the y-axis direction, respectively. Thus, the mask plate 01 can be placed between the clamping assembly 10 and the first limiting post 601 / second limiting post 602, the clamping assembly 10 is in contact with the edge of the mask plate 01 and can abut against the mask plate 01 in the positive y-axis direction, and the first limiting post 601 and the second limiting post 602 are in contact with the edge of the mask plate 01 and can abut against the mask plate 01 in the negative y-axis direction, so as to achieve clamping of the mask plate 01.

[0068] Continuing to refer to Figure 2In some embodiments, the third limiting column 603 and the fourth limiting column 604 are spaced apart along the y-axis direction (the extension direction of the other edge of the mask plate 01) on the second support plate 50, and the third limiting column 603 and the fourth limiting column 604 are arranged at a left (x-axis negative direction) position on the second support plate 50. In this way, when the mask plate 01 is fed from the right side (x-axis positive direction) of the second support plate 50, the third limiting column 603 and the fourth limiting column 604 can limit the movement of the mask plate 01 in the x-axis negative direction, and can assist in stopping the feeding.

[0069] Alternatively, in other embodiments, the fixing device 1 does not need to be provided with the limiting assembly 60, and the clamping assembly 10 is used to clamp the mask plate 01. For example, the clamping assembly 10 can be provided with a suction component, and the mask plate 01 is directly clamped by the suction component.

[0070] The specific structure of the clamping assembly 10 of the embodiments of the present application will be introduced below. Figure 3A A structural schematic diagram of the clamping assembly 10 in some embodiments is shown.

[0071] As shown in Figure 3A some embodiments, the clamping assembly 10 includes a first clamping base 101a, and the first clamping base 101a includes a bottom wall 1011 and a side wall 1012. The bottom wall 1011 extends along the x-axis direction and the y-axis direction, and the side wall 1012 extends along the z-axis direction and the y-axis direction. The first clamping base 101a has an overall L-shaped structure.

[0072] The clamping assembly 10 further includes a first motor 102, a swing arm 103, and an elastic member 104 arranged on the first clamping base 101a. The first motor 102 is arranged close to the side wall 1012 and is connected to the bottom wall 1011 or the side wall 1012 through a fixing member. The side of the first motor 102 facing the x-axis negative direction is provided with a pushing structure for providing a pushing force in the x-axis negative direction.

[0073] The swing arm 103 includes a first arm 1031 and a second arm 1032. The first arm 1031 extends along a y1 direction (an example of the second direction of the present application), and the second arm 1032 extends along an x1 direction (an example of the third direction of the present application). One end of the first arm 1031 along the y1 direction is connected to one end of the second arm 1032 along the x1 direction. In other words, the swing arm 103 has an L-shaped structure. The y1 direction intersects the x1 direction. The y1 direction can be parallel to the y-axis direction, or can intersect the y-axis direction. The x1 direction can be parallel to the x-axis direction, or can intersect the x-axis direction. A rotating bearing is arranged at the connection between the first arm 1031 and the second arm 1032. Figure 3AThe rotating bearing is connected with the first clamping base 101a through the fixing member 106. Thus, the swing arm 103 can rotate around the fixing member 106 as the fulcrum at the connection between the first arm 1031 and the second arm 1032 under the action of the rotating bearing, that is, rotate clockwise or counterclockwise around the z-axis direction.

[0074] The elastic member 104 is arranged on the side opposite to the first motor 102 along the y-axis direction. The other end of the first arm 1031 along the y1 direction is connected with one end of the elastic member 104 along the elastic direction of the elastic member 104, and the other end of the elastic member 104 along the elastic direction is fixedly connected with the first clamping base 101a. The other end of the second arm 1032 along the x1 direction is provided with the flexible contact 107. Figure 2 As shown, the flexible contact 107 is used to abut against the edge of the mask plate 01.

[0075] It can be understood that the first motor 102 can push the first arm 1031 along the x-axis direction, and the first arm 1031 rotates clockwise around the z-axis direction as the fulcrum at the connection between the first arm 1031 and the second arm 1032 under the pushing force of the first motor 102, and simultaneously drives the second arm 1032 to rotate clockwise around the z-axis direction as the fulcrum at the connection between the first arm 1031 and the second arm 1032, at this time, the flexible contact 107 at one end of the second arm 1032 moves away from the mask plate 01, and the mask plate 01 is released. Since the first arm 1031 is pushed by the first motor 102 towards the negative direction of the x-axis, the elastic member 104 at one end of the first arm 1031 is stretched to the stretched state. When the first motor 102 withdraws the pushing force on the first arm 1031 in the second driving state, the elastic member 104 will recover from the stretched state to the retracted state, at this time, the first arm 1031 rotates counterclockwise around the z-axis direction as the fulcrum at the connection between the first arm 1031 and the second arm 1032 under the retraction force of the elastic member 104, and simultaneously drives the second arm 1032 to rotate counterclockwise around the z-axis direction as the fulcrum at the connection between the first arm 1031 and the second arm 1032, at this time, the flexible contact 107 at one end of the second arm 1032 moves towards the mask plate 01 and abuts against the edge of the mask plate 01, realizing clamping of the mask plate 01.

[0076] In some embodiments, the pushing structure of the first motor 102 can be telescopic along the x-axis direction to realize pushing of the first arm 1031, and the first motor 102 does not need to be provided with a guide rail, and the structure of the clamping assembly 10 can be simplified.

[0077] In some embodiments, as shown in FIG. 2, the first motor 102 is provided with a guide rail 1021, and the first arm 1031 is provided with a guide groove 1031a corresponding to the guide rail 1021. Figure 3AAs shown, the elastic member 104 is connected with the side wall 1012 of the first clamping base 101a through the fixing seat 108. The fixing seat 108 is provided with a waist-shaped through hole 1081, and one end of the elastic member 104 is connected with the side wall 1012 by penetrating the waist-shaped through hole 1081 through a fixing member. The length direction of the waist-shaped through hole 1081 is substantially the same as the elastic direction of the elastic member 104, so that the clamping force of the mask plate 01 can be adjusted by adjusting the fixing position of one end of the elastic member 104. It should be noted that the number of the waist-shaped through hole 1081 is not limited in the embodiment of the application, for example, the fixing seat 108 can be provided with two or more waist-shaped through holes 1081, and the two or more waist-shaped through holes are arranged along the z-axis direction.

[0078] In some embodiments, the elastic member 104 can be replaced, and the rigidity of the elastic member 104 is adjusted by replacing the elastic member 104 with different structures, lengths or types, so as to adjust the clamping force of the mask plate 01. For example, the elastic member 104 can include a spring or a rubber rope.

[0079] Based on the above-mentioned embodiments, the clamping of the mask plate 01 can be realized through the cooperation of the first motor 102, the swing arm 103 and the elastic member 104, and the clamping force of the mask plate 01 can be adjusted by changing the fixing position of the elastic member 104 or the rigidity of the elastic member 104, which helps to improve the clamping precision of the mask plate 01 by the fixing device 1.

[0080] In some embodiments, as shown in Figure 3A The angle between the x1 direction and the y1 direction is in the range of 95 degrees to 100 degrees. It can be understood that the first motor 102 can drive the swing arm 103 with a smaller stroke within the above-mentioned angle range.

[0081] In some embodiments, as shown in Figure 3A The x1 direction and the x-axis direction form an acute angle, and the end of the second arm 1032 connected with the first arm 1031 along the x1 direction is closer to the first motor 102 than the other end of the second arm 1032 along the x1 direction. In this way, the flexible contact 107 at the other end of the second arm 1032 along the x1 direction is closer to the mask plate 01, and the second arm 1032 only needs a smaller rotation angle to clamp the mask plate 01, and the stroke of the first motor 102 pushing the first arm 1031 is smaller, which helps to improve the clamping efficiency of the clamping assembly 10 on the mask plate 01.

[0082] In some embodiments, as shown in Figure 3AAs shown, the y1 direction forms an acute angle with the y-axis direction, and the end of the first arm 1031 connected to the second arm 1032 along the y1 direction is farther away from the first motor 102 than the other end of the first arm 1031 along the y1 direction. In this way, the distance between the first arm 1031 and the first motor 102 can be closer, reducing the stroke of the first motor 102 pushing the first arm 1031, which helps to improve the clamping efficiency of the clamping assembly 10 on the mask plate 01 as a whole.

[0083] In some embodiments, the flexible contact 107 is located on the perpendicular bisector of the line connecting the first limiting column 601 and the second limiting column 602. In this way, the pressure exerted by the flexible contact 107 located on one side of the mask plate 01 is closer to the center line than the pressure exerted by the first limiting column 601 and the second limiting column 602 located on the other side of the mask plate 01, avoiding the offset of the mask plate 01 caused by uneven clamping force on both sides.

[0084] In some embodiments, the clamping assembly 10 further comprises a photoelectric sensor arranged on the first clamping base 101a, and the photoelectric sensor is used to detect the driving state of the first motor 102. For example, corresponding to the release of the mask plate 01 by the clamping assembly 10, the photoelectric sensor detects that the first motor 102 is in a first driving state; corresponding to the clamping of the mask plate 01 by the clamping assembly 10, the photoelectric sensor detects that the first motor is in a second driving state. In this way, according to the different driving states of the first motor 102 detected by the photoelectric sensor, it can be determined whether the clamping assembly 10 clamps the mask plate 01, which is convenient for quickly understanding the working condition.

[0085] For example, the photoelectric sensor can be a photoelectric switch. As shown in Figure 3A The clamping assembly 10 comprises a first photoelectric switch 1091, and the first photoelectric switch 1091 is connected to the bottom wall 1011 through a fixing member. When the first motor 102 is in a first driving state (corresponding to the extended position of the first motor 102), the first photoelectric switch 1091 can be triggered to respond. Specifically, the first arm 1031 can be provided with a first extension 10311, and when the first motor 102 is in the first driving state, the first arm 1031 is pushed to the limit position, so that the first extension 10311 is detected by the first photoelectric switch 1091, triggering the response of the first photoelectric switch 1091.

[0086] The clamping assembly 10 further comprises a second photoelectric switch 1092, and the second photoelectric switch 1092 is connected to the side wall 1012 through a fixing member. When the first motor 102 is in a second driving state (corresponding to the zero return position of the first motor 102), the second photoelectric switch 1092 can be triggered to respond. Specifically, as shown in Figure 3B Figure 3B ​Schematic diagram of the clamping assembly 10 from another perspective. The first motor 102 is provided with a second extension portion 1021, so that when the first motor 102 is in the second driving state, the second extension portion 1021 can be detected by the second photoelectric switch 1092, triggering a response from the second photoelectric switch 1092.

[0087] It should be noted that the embodiments of the present application do not limit the number, structure, or placement of the photoelectric switches. For example, in other examples, the clamping assembly 10 may include only the first photoelectric switch 1091. When the first photoelectric switch 1091 is triggered, the clamping assembly 10 releases the reticle 01; when the first photoelectric switch 1091 is not triggered, the clamping assembly 10 clamps the reticle 01.

[0088] The following combination Figure 4 The structures of the clamping assembly 10 in other embodiments are introduced. Figure 4 Partial structural schematic diagrams of the fixing device 1 in other embodiments are shown.

[0089] like Figure 4 As shown, in some embodiments, the clamping assembly 10 includes a second clamping base 101b, a second motor 110, a force sensor 111, and a flexible contact (not shown) disposed on the second clamping base 101b. The force sensor 111 and the flexible contact are both disposed at the output end of the second motor 110. The second motor 110 is used to drive the flexible contact along the y-axis to abut the edge of the reticle 01. The force sensor 111 is used to detect the thrust of the flexible contact on the reticle 01 to control the driving force of the second motor 110.

[0090] I understand. Figure 4 The clamping assembly 10 of the illustrated embodiment utilizes the second motor 110 to directly push the mask 01 to achieve clamping of the mask 01 , and has a simple structure and low cost; moreover, the force sensor 111 can detect the thrust of the second motor 110 , thereby being able to accurately control the clamping force on the mask 01 .

[0091] Figure 4 The middle limiting assembly 60 can refer to the description of the above embodiment and will not be repeated here.

[0092] In some embodiments, such as Figure 2 or Figure 4 As shown, the fixing device 1 may further include a mask detector 70 , which is disposed on the second support plate 50 and is used to detect whether the mask 01 is placed.

[0093] The specific structure of the guide mechanism in the embodiment of the present application is introduced below.

[0094] In some embodiments, the guide mechanism includes a first guide portion and a second guide portion,Figure 1 As shown, the first guide portion is arranged on one side of the first support plate 40 facing the second support plate 50, and the second guide portion is arranged on one side of the second support plate 50 facing the first support plate 40. The first guide portion 80 and the second guide portion are nested with each other to guide the rotation of the mask plate 01.

[0095] In the following, the guiding mechanism will be described in detail. Figure 5 An embodiment of the guiding mechanism will be described. Figure 5 Fig. 2 shows a schematic view of a part of the fixing device 1 according to some embodiments.

[0096] As shown in Fig. 2, the first guide portion 80 includes at least two arc-shaped protrusions in some embodiments. Figure 5 As shown, the first guide portion 80 includes at least two arc-shaped protrusions in some embodiments. Figure 5 In the embodiment shown in Fig. 2, the first guide portion 80 includes a first arc-shaped protrusion 801, a second arc-shaped protrusion 802 and a third arc-shaped protrusion 803. In other embodiments, the first guide portion 80 can include more or less arc-shaped protrusions. The first arc-shaped protrusion 801, the second arc-shaped protrusion 802 and the third arc-shaped protrusion 803 have the same structure and have a symmetry center (point P). In other words, the first arc-shaped protrusion 801, the second arc-shaped protrusion 802 and the third arc-shaped protrusion 803 are distributed at an angle of 120° around the first support plate 40. In other words, point P is the geometric center of the figure obtained by connecting the first arc-shaped protrusion 801, the second arc-shaped protrusion 802 and the third arc-shaped protrusion 803 in sequence. It can be understood that the rotation axis (first axis) of the second support plate 50 passes through point P. In other words, the first guide portion 80 is used to form the rotation axis of the second support plate 50 to guide the rotation of the second support plate 50.

[0097] It can be understood that the size of the arc-shaped protrusions in the circumferential direction (for example, the N direction) can be used to limit the rotation angle of the second support plate 50. The size of the arc-shaped protrusions in the circumferential direction is not limited in the present application.

[0098] Correspondingly, in some embodiments, the second guide portion includes at least two arc-shaped grooves matching the number of the first guide portion 80. For example, the second guide portion includes three arc-shaped grooves which have the same structure and have a symmetry center and are distributed at an angle of 120° around the second support plate 50. It can be understood that the geometric center of the figure obtained by connecting the three arc-shaped grooves in sequence is in the same z-axis direction as point P.

[0099] It should be noted that in other embodiments, the second guide portion can adopt the structure of the first guide portion 80 in the above-mentioned embodiments, and the first guide portion can adopt the structure of the second guide portion in the above-mentioned embodiments.

[0100] Figure 6 Fig. 3 shows a schematic view of the guiding mechanism according to some other embodiments.

[0101] like Figure 6 As shown, in some embodiments, the guide mechanism includes a circular shaft ring 90, which includes an inner ring 901 and an outer ring 902 that are nested with each other, wherein the outer ring 902 is fixedly connected to the first support plate 40, and the inner ring 901 is connected to the second support plate 50, and the inner ring 901 can rotate around a first axis relative to the outer ring 902, wherein the first axis passes through the center point Q of the circular shaft ring.

[0102] Based on the specific structure of the guide mechanism provided in the above two embodiments, under the drive of the rotation adjustment mechanism 30, the second support plate 50 can rotate stably, so that the rotation center of the mask 01 is not easily offset, and the adjustment accuracy of the Rz angle of the mask 01 by the rotation adjustment mechanism 30 can be ensured.

[0103] Continue reading Figure 5 , combined with Figure 5 An embodiment of the rotation adjustment mechanism 30 of the present application is introduced.

[0104] like Figure 5 As shown, in some embodiments, the rotation adjustment mechanism 30 includes a drive assembly and a transmission assembly, which are connected to each other. The drive assembly includes a third motor 311 and a motor support base 312. The third motor 311 is fixed to the motor support base 312 via a fixing member. The motor support base 312 is fixed to the first support plate 40 via a fixing member to support the third motor 311.

[0105] The transmission assembly includes a first transmission unit 320, which includes a first coupling 321a, a lead screw 322, a lead screw holder 323, and a lead screw support 324. The lead screw holder 323 and the lead screw support 324 are each secured to the first support plate 40 via a fixing member. The lead screw 322 extends along the y-axis, and its ends along the y-axis are rotationally connected to the lead screw holder 323 and the lead screw support 324, respectively. The first coupling 321a is used to connect the third motor 311 and the lead screw 322, thereby transmitting the torque of the third motor 311 to the lead screw 322.

[0106] The transmission assembly also includes a second transmission unit 330, which includes a slider 331, a first guide rail 332, a second guide rail 333, and a connector 334. The slider 331 is inserted through the lead screw 322 and is capable of moving along the y-axis. The first guide rail 332 and the second guide rail 333 are respectively provided on opposite sides of the slider 331 along the z-axis. The first guide rail 332 guides the slider 331 along the y-axis. Exemplarily, the first guide rail 332 includes two sets of cross roller guides, which are fixed to the first support plate 40 via fixing members and connected to the slider 331, guiding the movement of the slider 331.

[0107] One end of the connecting piece 334 is slidingly connected with the second guide rail 333, and the other end is connected with the second support plate 50. The second guide rail 333 guides the connecting piece 334 in the x-axis direction. For example, the second guide rail 333 includes a set of cross roller guides, which are connected with the sliding block 331 through a fixing piece.

[0108] It can be understood that the third motor 311 is connected with the first transmission part 320, and is used to drive the first transmission part 320 to rotate to drive the second transmission part 330 to move. The second transmission part 330 is connected with the second support plate 50, and is used to drive the second support plate 50 to rotate. In this embodiment, the third motor 311 drives the lead screw 322 to rotate, and then drives the sliding block 331 to move along the y-axis direction. At the same time, the second guide rail 333 drives the second support plate 50 to rotate along the direction defined by the guide mechanism (for example, the N direction shown in FIG. 11) through the connecting piece 334. In this way, the linear motion is converted into the rotary motion through the transmission assembly, and the Rz angle adjustment of the reticle 01 is realized. Figure 5

[0109] In some embodiments, as shown in Figure 5 or Figure 6 The fixing device 1 further includes an arc-shaped grating mechanism 100, which is arranged on the first support plate 40. For example, as shown in Figure 5 The arc-shaped grating mechanism 100 can be arranged between two arc-shaped protrusions (for example, the second arc-shaped protrusion 802 and the third arc-shaped protrusion 803). The arc-shaped grating mechanism 100 includes an arc-shaped scale seat 1001, an arc-shaped grating 1002, and a grating reader 1003. The grating reader 1003 is fixed on the side of the second support plate 50 facing the first support plate 40, and rotates with the second support plate 50 to measure the rotation angle of the second support plate 50 and the reticle 01.

[0110] Another embodiment of the rotary adjustment mechanism 30 will be introduced below. Figure 7

[0111] Figure 7 The difference between the rotary adjustment mechanism 30 shown in Figure 5 and the rotary adjustment mechanism 30 shown in FIG. 11 is the transmission assembly. The driving assembly and the clamping assembly 10 can refer to the description of the above embodiments, and will not be described here.

[0112] For example, as shown in Figure 7 ​​As shown, in some embodiments, the first transmission portion 320 includes a second coupling 321b, a worm 325, a worm fixing seat 326, and a worm support seat 327. The worm fixing seat 326 and the worm support seat 327 are each fixed to the first support plate 40 via a fixing member to support the worm 325. The worm 325 extends along the y-axis, and its ends along the y-axis are rotationally connected to the worm fixing seat 326 and the worm support seat 327, respectively. The second coupling 321b is used to connect the third motor 311 and the worm 325 to transmit the torque of the third motor 311 to the worm 325.

[0113] The second transmission portion includes a worm gear 335 . The worm gear 335 and the worm 325 are meshed with each other, and the worm gear 335 is fixedly connected to the second support plate 50 .

[0114] It can be understood that in this embodiment, the third motor 311 drives the worm 325 to rotate, and the rotation of the worm 325 drives the worm wheel 335 to rotate and then pulls the second support plate 50 to rotate along the Rz direction, thereby achieving Rz angle adjustment of the mask 01.

[0115] The following combination Figure 8 Another embodiment of the rotation adjustment mechanism 30 of the present application is introduced.

[0116] like Figure 8 As shown, in some embodiments, the driving assembly of the rotation adjustment mechanism 30 includes a reducer 313, which is disposed on the first support plate 40 via a fixing member. Exemplarily, the reducer 313 includes an upper shaft and a lower shaft, wherein the lower shaft has an adjustment hole, through which the lower shaft of the reducer 313 can be manually rotated, thereby driving the upper shaft of the reducer 313 to rotate.

[0117] The transmission assembly of the rotation adjustment mechanism 30 includes a first gear 328 and a second gear 329, wherein the first gear 328 is smaller than the second gear 329. The first gear 328 and the second gear 329 are meshed with each other, and the first gear 328 is connected to the upper shaft of the reducer 313, and the second gear 329 is connected to the second support plate 50. In the embodiment of the present application, the size of the gears may refer to the addendum diameter.

[0118] It can be understood that the reducer 313 is used to transmit the driving force it receives to the first gear 328. For example, the lower shaft of the reducer 313 is adjusted manually so that the lower shaft drives the upper shaft of the reducer 313 to rotate, thereby driving the first gear 328 to rotate. The first gear 328 pulls the second gear 329 to rotate so that the second support plate 50 and the mask 01 on the second support plate 50 rotate along the Rz direction, thereby realizing the Rz angle adjustment of the mask 01.

[0119] I understand.Figure 8 The rotation adjusting mechanism 30 shown has simple structure and low cost. Since the upper shaft and the lower shaft of the speed reducer 313 have relatively small sizes, the second gear 329 driven by the lower shaft of the speed reducer 313 has relatively large size, which is labor-saving, and the second gear 329 cannot reversely drive the speed reducer 313, which can play a self-locking role to avoid reverse rotation of the mask plate 01 along the Rz direction.

[0120] It should be noted that, Figure 8 The middle clamping assembly 10 can refer to the description of the related embodiments above, which will not be repeated here.

[0121] The specific structure of the support assembly 20 of the embodiments of the application will be introduced below. Figure 9 Some partial structure schematic diagrams of the fixing device 1 in some embodiments are shown.

[0122] As Figure 9 In some embodiments, the support assembly 20 includes at least two piezoelectric screws 201, which are arranged on the second support plate 50 at intervals. Figure 9 In the example, the four piezoelectric screws 201 are uniformly distributed at the four corners of the mask plate 01. Each piezoelectric screw 201 is connected to the second support plate 50 at one end along the z-axis direction, and the other end is used to support the mask plate 01, and the piezoelectric screw 201 and the mask plate 01 are in point contact. In the example, each piezoelectric screw 201 is provided with a hemispherical thimble 202 at one end along the z-axis direction, and the mask plate 01 is supported by the spherical surface of the hemispherical thimble 202 to achieve point contact. In this way, the support force is concentrated in a small area through point contact, which can significantly reduce the deformation of the surface of the mask plate 01, ensure the flatness of the mask plate 01, and avoid warping or micro-strain caused by surface contact.

[0123] It can be understood that two piezoelectric screws 201 in each group of the four piezoelectric screws 201 can cooperate with each other to adjust the Rx and Ry angles of the mask plate 01. For example, the piezoelectric screws 201 at the upper left corner and the lower left corner can adjust the left side 011 of the mask plate 01 along the z-axis direction to be raised or lowered to adjust the Ry angle of the mask plate 01. For another example, the piezoelectric screws 201 at the lower left corner and the lower right corner can adjust the bottom edge 012 of the mask plate 01 along the z-axis direction to be raised or lowered to adjust the Rx angle of the mask plate 01. Figure 9 In the example, the piezoelectric screws 201 at the upper left corner and the lower left corner can adjust the left side 011 of the mask plate 01 along the z-axis direction to be raised or lowered to adjust the Ry angle of the mask plate 01. Figure 9 In the example, the piezoelectric screws 201 at the lower left corner and the lower right corner can adjust the bottom edge 012 of the mask plate 01 along the z-axis direction to be raised or lowered to adjust the Rx angle of the mask plate 01.

[0124] Another embodiment of the support assembly 20 will be introduced below. Figure 10 Another embodiment of the support assembly 20 will be introduced below. Figure 10 The structure schematic diagram of the fixing device 1 in some other embodiments is shown.

[0125] As Figure 10As shown, in some embodiments, the support assembly 20 includes at least two support blocks 203 , and the at least two support blocks 203 are spaced apart and arranged on the second support plate 50 . Figure 10 Taking the four support blocks 203 as an example, the four support blocks 203 are evenly distributed corresponding to the four corners of the mask 01. Each support block 203 is connected to the second support plate 50 at one end along the z-axis, and the other end is used to support the mask 01, and there is point contact between the support block 203 and the mask 01. For example, each support block 203 has a raised surface 203a at one end along the z-axis, and the support block 203 supports the mask 01 through the raised surface 203a to achieve point contact. In this way, by concentrating the supporting force in a small area through point contact, the deformation of the mask 01 surface can be significantly reduced, the flatness of the mask 01 can be ensured, and warping or micro-strain caused by surface contact can be avoided.

[0126] It should be noted that the present application does not limit the shape of the convex surface 203a, which may be a hemispherical surface, an arc-shaped surface, etc.

[0127] Continue reading Figure 10 In some embodiments, a spacer (not shown) is provided between at least one support block 203 and the second support plate 50. The number and / or thickness of the spacer is adjustable, so that the angle between the mask 01 and the xy plane is adjustable. By adjusting the number and / or thickness of the spacer, the Rx and Ry angles of the mask 01 can be adjusted. For example, Figure 10 Spacers are added between the support blocks 203 at the upper left corner and the lower left corner and the second support plate 50, so that the left side 011 of the mask 01 can be raised or lowered along the z-axis direction to adjust the Ry angle of the mask 01. Figure 10 Spacers are added between the support blocks 203 at the lower left and lower right corners and the second support plate 50 to raise or lower the bottom edge 012 of the mask 01 along the z-axis to adjust the Rx angle of the mask 01 .

[0128] In some embodiments, part of the support block 203 (eg Figure 10 The support blocks 203 at the upper left and lower left corners of the center support mask 01 have abutment portions 2031 at their ends. These abutment portions 2031 extend in the positive z-axis direction relative to the raised surface 203a. It is understood that this portion of the support blocks 203 is used to abut the mask 01 in the positive x-axis direction, thus assisting in stopping the feed when the mask 01 moves in the negative x-axis direction. Thus, Figure 10 The supporting assembly 20 of the illustrated embodiment can both support the mask 01 and limit the position of the mask 01 , and has a simple structure and low cost.

[0129] Reference Figure 2 The embodiment shown adopts Figure 10In the case of the support assembly 20 shown, Figure 2 The limit assembly 60 shown can not include the third limit post 603 and the fourth limit post 604. Figure 10 The clamping assembly 10 and the rotation adjusting mechanism 30 can refer to the description of the related embodiments above, which will not be repeated here.

[0130] The specific structure of the fixing device 1 in some other embodiments of the application will be introduced below. Figure 11 The specific structure of the fixing device 1 in some other embodiments of the application will be introduced below.

[0131] Figure 11 The fixing device 1 of the embodiment shown is different from the fixing device 1 of the embodiment shown in the following aspects, Figure 8 The fixing device 1 of the embodiment shown is different from the fixing device 1 of the embodiment shown in the following aspects, Figure 11 In the embodiment shown, the clamping assembly 10 and the support assembly 20 are arranged on the end face of the second gear 329, and the speed reducer 313 is used to transmit the driving force received thereby to the first gear 328, so that the first gear 328 rotates and drives the second gear 329 and the mask plate 01 on the second gear 329 to rotate in the Rz direction, thereby achieving Rz angle adjustment of the mask plate 01. Figure 11 The clamping assembly 10 and the rotation adjusting mechanism 30 can refer to the description of the related embodiments above, which will not be repeated here.

[0132] It can be understood that in this embodiment, the support assembly 20 and the clamping assembly 10 are arranged on the end face of the second gear 329, and the speed reducer 313 is used to transmit the driving force received thereby to the first gear 328, so that the first gear 328 rotates and drives the second gear 329 and the mask plate 01 on the second gear 329 to rotate in the Rz direction, thereby achieving Rz angle adjustment of the mask plate 01.

[0133] As Figure 11 In this embodiment, the fixing device 1 further comprises at least one gear limit assembly 200, which is arranged on the first support plate 40 along the edge of the second gear 329 and is used to limit the position of the second gear 329 in the z-axis direction. Figure 11 In this embodiment, four gear limit assemblies 200 are taken as examples, which are circumferentially distributed at 90 degrees on the first support plate 40.

[0134] Illustratively, the gear limit assembly 200 comprises a limit bearing 210, a cantilever 220 and a wave bead screw 230. The limit bearing 210 is arranged at the end of the cantilever 220 extending in the z-axis direction, and the limit bearing 210 is connected with the first support plate 40. The limit bearing plays a guiding role on the second gear 329, and is used to limit the position of the second gear 329 in the xy plane. The other end of the cantilever 220 extending in the z-axis direction has an extension arm extending in the xy plane, and the wave bead screw 230 is arranged on the side of the extension arm facing the first support plate 40. The spherical mechanism of the wave bead screw 230 is used to vertically (z-axis direction) press the mask plate 01, so as to limit the displacement of the second gear 329 in the z-axis direction.

[0135] It can be understood that, Figure 11 The fixing device 1 shown does not need to be provided with a second support plate 50, and the clamping assembly 10 and the support assembly 20 are directly arranged on the rotary adjusting mechanism 30. In addition, the rotary adjusting mechanism 30 can directly drive the mask plate 01 to rotate along the Rz direction, and does not need to be provided with a guide mechanism and an arc grating mechanism, so that the structure stacked in the z-axis direction can be reduced, the height of the device can be reduced, the overall space occupied by the fixing device 1 is small, the structure is simple, and the cost is low.

[0136] In addition, the fixing device 1 provided by the above-mentioned embodiments of the present application can be used in a vacuum environment or a magnetically sensitive environment. In some embodiments, the material of each mechanism component in the fixing device 1 is suitable for a vacuum environment or is non-magnetic.

[0137] For example, to adapt to the vacuum environment, the material of the first support plate 40 / second support plate 50 in the above-mentioned embodiments includes but is not limited to at least one of titanium alloy, aluminum alloy, stainless steel, zirconia, and aluminum oxide. To adapt to the magnetically sensitive environment, the material of the first support plate 40 and the second support plate 50 can be other materials except stainless steel.

[0138] For example, to adapt to the vacuum environment, the material of each limiting column in the limiting assembly 60 in the above-mentioned embodiments includes but is not limited to at least one of titanium alloy, aluminum alloy, stainless steel, zirconia, and aluminum oxide. To adapt to the magnetically sensitive environment, the material of the limiting column can be other materials except stainless steel.

[0139] For example, the material of the flexible contact in the above-mentioned embodiments can be polyether ether ketone (PEEK) or polytetrafluoroethylene.

[0140] For example, the material of the elastic member 104 in the above-mentioned embodiments can be stainless steel or titanium alloy.

[0141] For example, the material of the circular shaft ring 90 / first guide rail 332 / second guide rail 333 in the above-mentioned embodiments can be stainless steel.

[0142] For example, the material of the piezoelectric screw 201 in the above-mentioned embodiments can be beryllium copper.

[0143] For example, the material of the semispherical thimble 202 in the above-mentioned embodiments can be zirconia or aluminum oxide.

[0144] For example, the material of the limiting bearing 210 in the above-mentioned embodiments can be zirconia or stainless steel.

[0145] Exemplarily, the material of the ball mechanism of the wave bead screw 230 in the above embodiment can be zirconium oxide, and the material of the spring for pushing the ball mechanism in the wave bead screw 230 can be stainless steel or titanium alloy.

[0146] In addition, it needs to be explained that the fixing member mentioned in the embodiments of the present application can include but is not limited to any one of a bolt and nut, a pin, and a rivet.

[0147] Although the present application has been illustrated and described with reference to certain preferred embodiments thereof, it should be understood by those skilled in the art that various changes in form and details can be made therein without departing from the spirit and scope of the application.

Claims

1. A fixing device, characterized in that: include: A clamping assembly (10), the clamping assembly (10) being used to clamp a mask or a wafer; the clamping assembly (10) comprising a flexible contact, the flexible contact being used to abut against an edge of the mask or the wafer; A support assembly (20), the support assembly (20) being used to support the mask or wafer along a first direction, and to adjust an angle between the mask or wafer and a first plane, wherein the first plane is perpendicular to the first direction; A rotation adjustment mechanism (30), the rotation adjustment mechanism (30) comprising a drive assembly, wherein the drive assembly is used to drive the mask or wafer to rotate, and the rotation axis of the mask or wafer is parallel to the first direction; The clamping assembly (10) comprises a first clamping base (101a), and a first motor (102), a swing arm (103), and an elastic member (104) arranged on the first clamping base (101a); wherein: The swing arm (103) comprises a first arm (1031) extending along a second direction and a second arm (1032) extending along a third direction, one end of the first arm (1031) along the second direction is connected to one end of the second arm (1032) along the third direction, the other end of the first arm (1031) along the second direction is connected to one end of the elastic member along its elastic direction, and the other end of the elastic member (104) along its elastic direction is fixedly connected to the first clamping base (101a); the flexible contact is provided at the other end of the second arm (1032) along the third direction; the second direction intersects with the third direction and is perpendicular to the first direction; A rotary bearing is provided at the connection between the first arm (1031) and the second arm (1032), and the rotary bearing is connected to the first clamping base (101a); The elastic member (104) and the second arm (1032) are respectively arranged on opposite sides of the first motor (102) along a fourth direction, and the first motor (102) is used to push the first arm (1031) along a fifth direction, and the first direction, the fourth direction and the fifth direction are perpendicular to each other; The third direction forms an acute angle with the fifth direction, and one end of the second arm (1032) connected to the first arm (1031) along the third direction is closer to the first motor (102) than the other end of the second arm (1032) along the third direction.

2. The fixing device according to claim 1, characterized in that The clamping assembly (10) further comprises a photoelectric sensor arranged on the first clamping base (101a), the photoelectric sensor being used to detect the driving state of the first motor (102); Wherein, corresponding to the situation where the clamping assembly (10) releases the mask or wafer, the photoelectric sensor detects that the first motor (102) is in the first driving state; corresponding to the situation where the clamping assembly (10) clamps the mask or wafer, the photoelectric sensor detects that the first motor (102) is in the second driving state.

3. The fixing device according to claim 1 or 2, characterized in that: Also included is a limit assembly (60); The limiting assembly (60) is at least partially spaced apart from the clamping assembly (10) along the fourth direction, and the mask or wafer is placed between the clamping assembly (10) and the limiting assembly (60); wherein the clamping assembly (10) is used to abut against the edge of the mask or wafer to limit the mask or wafer between the clamping assembly (10) and the limiting assembly (60).

4. The fixing device according to claim 3, characterized in that The limiting assembly (60) comprises at least two limiting columns, and the at least two limiting columns comprise a first limiting column (601) and a second limiting column (602); The flexible contact is located on a perpendicular bisector connecting the first limiting column (601) and the second limiting column (602).

5. The fixing device according to claim 1, characterized in that The device further comprises a first support plate (40) and a second support plate (50), wherein the second support plate (50) and the first support plate (40) are spaced apart along the first direction, the rotation adjustment mechanism (30) is arranged on the first support plate (40), and the support assembly (20) and the clamping assembly (10) are arranged on the second support plate (50); and: The driving assembly is connected to the second support plate (50) and is used to drive the second support plate (50) to rotate around a first axis, wherein the first axis is parallel to the first direction; A guide mechanism is provided between the first support plate (40) and the second support plate (50), and the guide mechanism is used to guide the rotation of the second support plate (50).

6. The fixing device according to claim 5, characterized in that The support assembly (20) comprises at least two piezoelectric screws (201), and the at least two piezoelectric screws (201) are arranged at intervals on the second support plate (50), wherein: One end of each piezoelectric screw (201) along the first direction is connected to the second support plate (50), and the other end is used to support the mask or wafer, and each piezoelectric screw (201) is in point contact with the mask or wafer.

7. The fixing device according to claim 5, characterized in that The support assembly (20) comprises at least two support blocks (203), and the at least two support blocks (203) are arranged at intervals on the second support plate (50), wherein: One end of each support block (203) along the first direction is connected to the second support plate (50), and the other end is used to support the mask or wafer, and there is point contact between the support block (203) and the mask or wafer; A gasket is provided between at least one of the at least two support blocks (203) and the second support plate (50), and the number and / or thickness of the gasket is adjustable, so that the angle between the mask or wafer and the first plane is adjustable.

8. The fixing device according to claim 5, characterized in that The guide mechanism comprises a first guide portion (80) and a second guide portion, wherein the first guide portion (80) is arranged on a side of the first support plate (40) facing the second support plate (50), and the second guide portion is arranged on a side of the second support plate (50) facing the first support plate (40), and the first guide portion (80) and the second guide portion are nested and matched with each other; One of the first guide portion (80) and the second guide portion includes at least two arc-shaped protrusions distributed along its circumference, and the other guide portion includes at least two arc-shaped grooves distributed along its circumference, and the first axis passes through the geometric center of a figure obtained by sequentially connecting the positions of the at least two arc-shaped protrusions, and / or passes through the geometric center of a figure obtained by sequentially connecting the positions of the at least two arc-shaped grooves.

9. The fixing device according to claim 5, characterized in that: The guide mechanism comprises a circular shaft ring (90), the circular shaft ring (90) comprising an inner ring (901) and an outer ring (902) nested with each other, the outer ring (902) being connected to the first support plate (40), and the inner ring (901) being connected to the second support plate (50); Wherein, the inner ring (901) is capable of rotating around the first axis relative to the outer ring (902).

10. The fixing device according to claim 5, characterized in that The driving assembly includes a third motor (311), and the rotation adjustment mechanism (30) also includes a transmission assembly, wherein the transmission assembly includes a first transmission part (320) and a second transmission part (330); The third motor (311) is connected to the first transmission part (320) and is used to drive the first transmission part (320) to rotate so as to drive the second transmission part (330) to move; The second transmission part (330) is connected to the second support plate (50) and is used to drive the second support plate (50) to rotate.

11. The fixing device according to claim 10, characterized in that The first transmission part (320) comprises a first coupling (321a), a screw (322), a screw fixing seat (323) and a screw support seat (324); the first coupling (321a) is used to connect the third motor (311) and the screw (322); the screw (322) extends along a fourth direction, and the two ends of the screw (322) along the fourth direction are rotatably connected to the screw fixing seat (323) and the screw support seat (324); The second transmission part (330) comprises a slider (331), a first guide rail (332), a second guide rail (333) and a connecting member (334); the slider (331) is provided through the lead screw (322) and is capable of moving along the fourth direction on the lead screw (322); The first guide rail (332) and the second guide rail (333) are respectively arranged on opposite sides of the slider (331) along the first direction, and the first guide rail (332) guides the slider (331) in the fourth direction; one end of the connecting member (334) is connected to the second guide rail (333), and the other end is connected to the second support plate (50), and the second guide rail (333) guides the connecting member (334) in the fifth direction, and the fourth direction, the fifth direction and the first direction are perpendicular to each other.

12. The fixing device according to claim 10, characterized in that The first transmission part (320) includes a second coupling (321b), a worm (325), a worm fixing seat (326), and a worm support seat (327); the second coupling (321b) is used to connect the third motor (311) and the worm (325); the worm (325) extends along a second direction, and the two ends of the worm (325) along the second direction are respectively rotatably connected to the worm fixing seat (326) and the worm support seat (327); the second direction is perpendicular to the first direction; The second transmission part (330) includes a worm wheel (335), the worm wheel (335) and the worm (325) are meshed with each other, and the worm wheel (335) is fixedly connected to the second support plate (50).

13. The fixing device according to claim 5, characterized in that The driving assembly includes a speed reducer (313), and the rotation adjustment mechanism (30) also includes a transmission assembly, wherein the transmission assembly includes a first gear (328) and a second gear (329), wherein the size of the first gear (328) is smaller than the size of the second gear (329), the first gear (328) and the second gear (329) are meshed with each other, and the second gear (329) is connected to the second support plate (50); The reducer (313) is used to transmit the driving force received by it to the first gear (328), so that the first gear (328) rotates to drive the second gear (329) and the second support plate (50) to rotate.

14. The fixing device according to claim 5, characterized in that The driving assembly includes a speed reducer (313), and the rotation adjustment mechanism (30) also includes a transmission assembly, wherein the transmission assembly includes a first gear (328) and a second gear (329), wherein the size of the first gear (328) is smaller than the size of the second gear, and the first gear (328) and the second gear (329) are meshed with each other; and: The support assembly (20) and the clamping assembly (10) are both arranged on the end surface of the second gear (329), and the reducer (313) is used to transmit the driving force received by it to the first gear (328), so that the first gear (328) rotates to drive the second gear (329) to rotate; The fixing device further comprises at least one gear limiting assembly, which is arranged on the first support plate (40) at intervals along the edge of the second gear (329) and is used to limit the position of the second gear (329) in the first direction.

15. The fixing device according to claim 4, characterized in that The material of the flexible contact includes at least one of polyetheretherketone and polytetrafluoroethylene; And / or, the material of the limiting column in the limiting assembly (60) includes at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide.

16. The fixing device according to claim 5, characterized in that The material of the first support plate (40) and / or the second support plate (50) includes at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide.

17. A semiconductor device, characterized in that: The fixing device comprises the fixing device according to any one of claims 1 to 16.

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