Microfluidic devices and methods of making the same

Abstract

The application provides a microfluidic device and a preparation method thereof. The microfluidic device comprises a microfluidic substrate and a control substrate. The microfluidic substrate comprises a first substrate, and the control substrate comprises a second substrate, a plurality of electrode pairs and a control circuit layer. A first surface of the first substrate has a plurality of opening regions, each of which has two accommodation grooves arranged at intervals, and the two accommodation grooves are communicated through a microfluid channel on a common side wall. The control circuit layer is arranged on the second substrate. The plurality of electrode pairs are arranged on the second substrate and electrically connected with the control circuit layer. Each electrode pair is arranged corresponding to one opening region. The electrode pair comprises two driving electrodes. The control substrate is attached to the microfluidic substrate in use, so that the two driving electrodes are arranged at intervals on two sides of the microfluid channel, and the control circuit layer is used for applying voltage to each electrode pair. The microfluidic device realizes parallel processing of multiple samples, improves the detection efficiency, and can also reduce the replacement cost.

Description

Technical Field

[0001] This invention relates to the field of microfluidic control technology, and in particular to a microfluidic device and its fabrication method. Background Technology

[0002] Microfluidic chips, as a platform integrating multiple advanced technologies (such as physical, chemical and biological technologies), have shown broad application prospects in fields such as deoxyribonucleic acid (DNA) manipulation, gene sequencing and targeted drug therapy.

[0003] Currently, electric field-driven manipulation is one of the main methods for manipulating DNA molecules. This method utilizes the fact that DNA molecules are negatively charged in a typical biological environment. By applying voltages of different charges to both ends of a micrometer-sized quartz tube channel, an electric field can be constructed to manipulate DNA molecules and enable their movement within the microchannel. Using this principle, microfluidic chips can be constructed to separate and detect DNA molecule clusters.

[0004] However, existing technologies have significant limitations when processing multiple DNA molecules that require simultaneous application of different electric fields, making batch processing impossible and resulting in low efficiency. Summary of the Invention

[0005] This application provides a microfluidic device and its preparation method, aiming to solve the problem of low efficiency in the batch processing of DNA molecules by existing microfluidic chips.

[0006] To solve the above-mentioned technical problems, one technical solution adopted in this application is: to provide a microfluidic device, comprising:

[0007] A first substrate includes a first surface; the first surface has a plurality of opening regions spaced apart, each opening region has two receiving grooves spaced apart along a first direction, the common sidewall of the two receiving grooves has a microfluidic channel, and the two receiving grooves are connected through the microfluidic channel;

[0008] Multiple electrode pairs are disposed on the first substrate; each electrode pair corresponds to one opening region; each electrode pair includes two driving electrodes, which are disposed at intervals along the first direction on opposite sides of the microfluidic channel;

[0009] A control circuit layer is disposed on the first substrate and electrically connected to the plurality of electrode pairs; wherein the control circuit layer is used to apply a voltage to each electrode pair.

[0010] In one specific embodiment, the first surface further has a plurality of first grooves, and the control substrate is attached to the first surface of the microfluidic substrate during use, such that each driving electrode is embedded in one of the first grooves; or

[0011] The first substrate further includes a second surface opposite to the first surface, and the second surface also has a plurality of second grooves; the control substrate is attached to the second surface of the microfluidic substrate during use, such that each driving electrode is embedded in one of the second grooves.

[0012] In one specific embodiment, the width of the first groove is greater than the width of the driving electrode; or

[0013] The width of the second groove is greater than the width of the driving electrode.

[0014] In one specific embodiment, the width of the first groove gradually decreases along the depth direction of the first groove, and the width of the driving electrode gradually decreases along the depth direction of the first groove; or

[0015] The width of the second groove gradually decreases along the depth direction of the second groove, and the width of the driving electrode gradually decreases along the depth direction of the second groove.

[0016] In one specific embodiment, the height of the driving electrode is less than the depth of the first groove; or

[0017] The height of the driving electrode is less than the depth of the second groove.

[0018] In one specific embodiment, the first surface has the first groove and the second surface has the second groove; the first groove and the second groove are offset along the first direction.

[0019] In one specific embodiment, the second substrate includes opposing third and fourth surfaces;

[0020] The control circuit layer is disposed on the third surface, and the electrode pair is disposed on the fourth surface and electrically connected to the control circuit layer through vias; or

[0021] The control circuit layer is disposed on the fourth surface, and the electrode pair is disposed on the control circuit layer.

[0022] In one specific embodiment, when the control substrate is attached to the microfluidic substrate, the top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel.

[0023] In one specific embodiment, the electrode pair includes a positive driving electrode and a negative driving electrode; the control circuit layer includes:

[0024] Multiple gate scan lines;

[0025] Multiple data lines are arranged to intersect with the gate scan lines;

[0026] Multiple thin-film transistors; each of the positive drive electrodes is electrically connected to the data line via at least one of the thin-film transistors;

[0027] Common electrode line; all of the negative drive electrodes are electrically connected to the common electrode line.

[0028] To solve the above-mentioned technical problems, another technical solution adopted in this application is: to provide a method for preparing a microfluidic device, comprising:

[0029] A first substrate is provided; the first substrate includes a first surface, the first surface having a plurality of opening regions spaced apart.

[0030] Two receiving slots are formed in each of the opening areas, spaced apart along a first direction, and a microfluidic channel is formed on the common sidewall of the two receiving slots, so that the two receiving slots are connected through the microfluidic channel to form a microfluidic substrate.

[0031] A second substrate is provided, and a control circuit layer is fabricated on the second substrate;

[0032] Multiple electrode pairs electrically connected to the control circuit layer are fabricated on the second substrate to form a control substrate; and each electrode pair corresponds to one of the opening regions, such that when the control substrate is attached to the microfluidic substrate, the two driving electrodes of each electrode pair are spaced apart on opposite sides of the microfluidic channel along the first direction.

[0033] The beneficial effects of this application's embodiments are as follows: Unlike existing technologies, this application provides a microfluidic device and its fabrication method. The microfluidic device includes a microfluidic substrate and a control substrate. The microfluidic substrate includes a first substrate, and the control substrate includes a second substrate, multiple electrode pairs, and a control circuit layer. The first substrate includes a first surface with multiple spaced-apart openings. Each opening has two spaced-apart receiving grooves along a first direction. The common sidewall of the two receiving grooves has a microfluidic channel, and the two receiving grooves are connected through the microfluidic channel. The control circuit layer is disposed on the second substrate. Multiple electrode pairs are disposed on the second substrate and electrically connected to the control circuit layer. Each electrode pair corresponds to one opening. Each electrode pair includes two driving electrodes. During use, the control substrate is attached to the microfluidic substrate, such that the two driving electrodes are spaced-apart on opposite sides of the microfluidic channel along the first direction. The control circuit layer applies voltage to each electrode pair. By integrating multiple independent opening regions and electrode pairs on a single first substrate, each opening region and its corresponding electrode pair can operate independently, allowing for flexible configuration of different experimental conditions. This enables the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency. Furthermore, by placing the control circuit layer and multiple electrode pairs on a second substrate independent of the first substrate, the microfluidic substrate can be replaced individually when needed, thereby reducing replacement costs. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the microfluidic device provided in the first embodiment of this application;

[0035] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0036] Figure 3 for Figure 2 A cross-sectional view of the structure shown along line AA;

[0037] Figure 4 for Figure 2 A schematic diagram of the thin-film transistor structure shown;

[0038] Figure 5 The microfluidic device provided in the second embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0039] Figure 6 The microfluidic device provided in the third embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0040] Figure 7 The microfluidic device provided in the fourth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0041] Figure 8 The microfluidic device provided in the fifth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0042] Figure 9 The microfluidic device provided in the sixth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0043] Figure 10 The microfluidic device provided in the seventh embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0044] Figure 11 The microfluidic device provided in the eighth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0045] Figure 12a The microfluidic device provided in the ninth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0046] Figure 12b The microfluidic device provided in another embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0047] Figure 12c The microfluidic device provided in another embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0048] Figure 13 The microfluidic device provided in the tenth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0049] Figure 14 The microfluidic device provided in the eleventh embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0050] Figure 15 The microfluidic device provided in the twelfth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0051] Figure 16 The microfluidic device provided in the thirteenth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0052] Figure 17 The microfluidic device provided in the fourteenth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0053] Figure 18 The microfluidic device provided in the fifteenth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0054] Figure 19 The microfluidic device provided in the sixteenth embodiment of this application is along Figure 2 Sectional view of line AA in the middle;

[0055] Figure 20a The microfluidic device provided in the seventeenth embodiment of this application, in one case, along Figure 2 Sectional view of line AA in the middle;

[0056] Figure 20b The microfluidic device provided in the seventeenth embodiment of this application, in another case, along Figure 2 Sectional view of line AA in the middle;

[0057] Figure 21 This is a schematic flowchart illustrating a method for fabricating a microfluidic device according to an embodiment of this application.

[0058] Explanation of icon numbers:

[0059] 100-Microfluidic substrate; 200-Control substrate; 1-First substrate; 2-Electrode pair; 3-Control circuit layer; 4-Second substrate; 5-Contact pair; 10-First surface; 20-Second surface; 30-Third surface; 40-Fourth surface; 11-Opening region; 12-Non-opening region; 13-First groove; 14-Second groove; 21-Driving electrode; 31-Knockout portion; 32-Gate scan line; 33-Data line; 34-Thin film transistor; 35-Common electrode line; 41-Via; 51-Connecting contact point; 111-Accommodation groove; 112-Microfluidic channel; 211-Positive driving electrode; 212-Negative driving electrode; 341-Gate; 342-Source; 343-Drain; 344-Insulating layer; 345-Doped semiconductor layer; 346-Protective layer; 511-Positive connecting contact point; 512-Negative connecting contact point. Detailed Implementation

[0060] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0061] The terms "first," "second," and "third" in this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movements between components in a specific orientation (as shown in the figures). If the specific orientation changes, the directional indications also change accordingly. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0062] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0063] The present application will now be described in detail with reference to the accompanying drawings and embodiments.

[0064] See Figures 1-3 , Figure 1 This is a schematic diagram of the microfluidic device provided in the first embodiment of this application; Figure 2 for Figure 1 A magnified view of a section at point A in the middle; Figure 3 for Figure 2 The structure shown is a cross-sectional view along line AA. This microfluidic device can be used to separate individual DNA molecules from DNA clusters for easy detection. Specifically, such as... Figure 3 As shown, the microfluidic device may include a first substrate 1, multiple electrode pairs 2, and a control circuit layer 3.

[0065] The first substrate 1, serving as the main support structure of the microfluidic device, can be made of quartz glass. Specifically, the first substrate 1 includes a first surface 10, i.e. Figure 3The top surface of the first substrate 1 is used to arrange the opening region 11 and other components. The first surface 10 has a plurality of opening regions 11 spaced apart for loading and processing samples; the opening regions 11 are recessed downward from the first surface 10 of the first substrate 1 to form a groove-shaped opening region 11.

[0066] Each opening region 11 has two accommodating grooves 111 spaced apart along a first direction X for loading liquids and samples; wherein the first direction X is perpendicular to the thickness direction Y of the first substrate 1. The two accommodating grooves 111 share a common sidewall with a microfluidic channel 112. The two accommodating grooves 111 are connected through the microfluidic channel 112, allowing only a single DNA molecule from the sample to pass through the microfluidic channel 112, facilitating observation of the DNA molecule by the user. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while simultaneously allowing sample flow and observation through the microfluidic channel 112.

[0067] One of the two accommodating slots 111 is an inlet slot for loading DNA molecule clusters or other samples to be tested; the other is an outlet slot for containing single DNA molecules or other samples to be observed flowing out from the microfluidic channel 112.

[0068] Multiple electrode pairs 2 are disposed on and fixedly connected to the first substrate 1 to enable the electrode pairs 2 to apply a stable electric field; and each electrode pair 2 is disposed corresponding to an opening region 11 to apply an electric field to the corresponding opening region 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pair 2 includes two driving electrodes 21, which are spaced apart along a first direction X on opposite sides of the microfluidic channel 112 so that DNA molecules or other charged particles can pass through the microfluidic channel 112 along the first direction X.

[0069] A control circuit layer 3 is disposed on the first substrate 1 and electrically connected to multiple electrode pairs 2. The control circuit layer 3 applies a voltage to each electrode pair 2 to control DNA molecules suspended in liquid within the receiving tank 111 to enter the microfluidic channel 112 from the inlet tank for detection by the detection device. Simultaneously, the control circuit layer 3 can also coordinate and control the voltage applied to each electrode pair 2, thereby achieving simultaneous independent control of multiple samples.

[0070] The control circuit layer 3 is fixedly connected to the first substrate 1 to stably transmit voltage signals to each electrode pair 2. Specifically, the control circuit layer 3 can be directly fabricated on the first substrate 1, or the control circuit layer 3 can be fabricated on a substrate first, and then the substrate is fixed to the first substrate 1.

[0071] Thus, by integrating multiple independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can operate independently to flexibly configure different experimental conditions, enabling the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency.

[0072] like Figure 3 As shown, in a specific embodiment, multiple electrode pairs 2 and control circuit layer 3 can all be disposed on the first surface 10 of the first substrate 1 to simplify the structure of the microfluidic device and improve manufacturing efficiency. It can be understood that in this embodiment, the first surface 10 is a primary mounting surface of the microfluidic device. The fact that multiple electrode pairs 2 and control circuit layer 3 are all disposed on the first surface 10 means that these components can be centrally arranged, facilitating manufacturing and assembly. Specifically, multiple electrode pairs 2 and control circuit layer 3 are all disposed in the non-opening area 12 of the first surface 10 to avoid obstructing the opening area 11.

[0073] Specifically, two driving electrodes 21 are spaced apart along the first direction X on opposite sides of the two receiving grooves 111 to ensure the consistency and stability of the electric field applied to the electrode pair 2, which helps to achieve a uniform electric field distribution. The control circuit layer 3 has a cutout portion 31 corresponding to the opening region 11 to facilitate the observation of DNA molecules through the microfluidic channel 112. Specifically, the cutout portion 31 of the control circuit layer 3 can be formed by an etching process.

[0074] In a specific embodiment, the common sidewall refers to the shared sidewall between two receiving grooves 111 within the same opening area 11. The common sidewall has microgrooves, which are shallow trench structures formed on the common sidewall. The depth and width of these microgrooves can be designed and fabricated according to actual needs. Microchannels are embedded within the microgrooves; these microchannels are tiny tubes embedded inside the microgrooves, used to carry and control the flow of microfluidics. The microchannels serve as microfluidic channels 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the microchannels can be micrometer-sized quartz capillaries.

[0075] Furthermore, such as Figure 3 As shown, the microchannels are spaced apart from the bottom wall of the receiving tank 111, with one end of the microchannel protruding from the side of the common sidewall and extending into the receiving tank 111. It can be understood that DNA molecules are typically suspended in the liquid within the receiving tank 111. Spaced apart from the bottom wall of the receiving tank 111 maintains a certain distance between the microchannels and the bottom wall, facilitating the entry of suspended DNA molecules from the receiving tank 111 into the microchannels.

[0076] By suspending the microchannel near the inlet tank, DNA molecules can directly enter the microchannel, reducing the probability of DNA molecules contacting the common sidewall before entering the microchannel and preventing damage to the DNA molecules from glass burrs on the common sidewall surface. Preferably, both ends of the microchannel protrude from the sides of the common sidewall to facilitate installation and fixation of the microchannel.

[0077] Of course, in other embodiments, the microfluidic channel 112 can also be a microgroove or micropore disposed on the common sidewall to simulate blood vessels, so that DNA molecules can pass directly through the microgroove or micropore on the common sidewall, thereby improving the space utilization and structural compactness of the microfluidic device.

[0078] like Figure 3 As shown, electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. One of the two driving electrodes 21 is a positive driving electrode 211, and the other is a negative driving electrode 212. The positive driving electrode 211 is located near the outlet tank, and the negative driving electrode 212 is located near the inlet tank, so that DNA molecules can enter the outlet tank from the inlet tank along the first direction X through the microfluidic channel 112.

[0079] See Figure 1 and Figure 2 In a specific embodiment, the control circuit layer 3 may include multiple gate scan lines 32, multiple data lines 33, multiple thin-film transistors 34, and a common electrode line 35. The multiple gate scan lines 32 and multiple data lines 33 are arranged in an interleaved manner; each positive drive electrode 211 is electrically connected to a data line 33 through at least one thin-film transistor 34, and all negative drive electrodes 212 are electrically connected to the common electrode line 35.

[0080] Thus, by using multiple gate scan lines 32 and data lines 33, independent control of each opening region 11 can be achieved; the thin-film transistor 34, as a switching element, can efficiently control current flow, thereby improving the system's response speed and accuracy. All negative drive electrodes 212 are connected to a common electrode line 35, simplifying circuit design, reducing the number of lines, lowering manufacturing costs, and improving system consistency and reliability.

[0081] Specifically, such as Figure 1 As shown, multiple opening regions 11 are arranged in a two-dimensional array on the first substrate 1, and each opening region 11 is provided with at least one thin film transistor 34; the gate scan line 32 is used to turn on a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit voltage signals to a specific column of thin film transistors 34 so as to generate an electric field in a specific electrode pair 2.

[0082] like Figure 2As shown, the thin-film transistor 34 includes a gate 341, a source 342, and a drain 343. The gate scan line 32 is electrically connected to the gate 341 of the thin-film transistor 34 to turn the thin-film transistor 34 on or off. The data line 33 is electrically connected to the source 342 of the thin-film transistor 34, and the drain 343 of the thin-film transistor 34 is electrically connected to the positive driving electrode 211. When the thin-film transistor 34 is on, a voltage signal is transmitted to the positive driving electrode 211 through the data line 33, causing an electric field to be generated between the positive driving electrode 211 and the negative driving electrode 212.

[0083] The input voltage of the scanning signal line can be 15V; the voltage at one end of the negative driving electrode 212 is 0V, and the voltage at one end of the positive driving electrode 211 can be 0-55V to avoid the generation of a large number of bubbles due to the electrolysis of water molecules in the solution. Specifically, different voltages and frequencies can be supplied to the data line 33 according to the needs of the municipal bureau; for example, the voltage at one end of the positive driving electrode 211 can be any value among 5V, 10V, 20V, 40V, and 55V.

[0084] like Figure 1 As shown, all data lines 33, gate scan lines 32 and common electrode lines 35 are grouped on one side of the first substrate 1 and connected to an external control chip to control the operation of the microfluidic device.

[0085] Combination Figure 2 and Figure 4 , Figure 4 for Figure 2 The diagram shows a schematic of the thin-film transistor structure. In a specific embodiment, the gate 341 of the thin-film transistor 34 is disposed on the first substrate 1, and is disposed on the same layer as and electrically connected to the gate scan line 32. Additionally, the common electrode line 35 can also be disposed on the same layer as the gate scan line 32. An insulating layer 344 covers the gate 341 and overlaps the first substrate 1. A doped semiconductor layer 345 is disposed on the insulating layer 344 and corresponds to the gate 341. The source 342 and drain 343 are disposed on the same layer of the insulating layer 344 and respectively cover one side surface of the doped semiconductor layer 345, with the source 342 and drain 343 spaced apart on the doped semiconductor layer 345. A protective layer 346 covers the source 342, drain 343, and the uncovered surface of the doped semiconductor layer 345.

[0086] See Figure 5 , Figure 5This is a cross-sectional view along line AA of the microfluidic device provided in the second embodiment of this application. The microfluidic device provided in the second embodiment of this application has a basically the same structure as the microfluidic device provided in the first embodiment, the difference being that in the second embodiment of this application, multiple electrode pairs 2 and control circuit layer 3 are all disposed on the second surface 20 of the first substrate 1; wherein, the second surface 20 is disposed opposite to the first surface 10, that is, the second surface 20 is... Figure 4 The bottom surface of the first substrate 1 is used to avoid contamination of the receiving groove 111 of the first surface 10 during the preparation of the electrode pair 2 and the control circuit layer 3, which could lead to adverse effects on the detection results.

[0087] In a specific embodiment, two driving electrodes 21 can be spaced apart along the first direction X on opposite sides of the two receiving grooves 111, so that the two receiving grooves are located as close as possible between the electric fields generated by the two driving electrodes 21, facilitating the movement of all DNA molecules in the liquid inlet groove towards the microfluidic channel 112 under the action of the electric field. Specifically, the two driving electrodes 21 are respectively disposed on the second surface 20 at positions corresponding to the non-opening region 12.

[0088] See Figure 6 , Figure 6 This is a cross-sectional view along line AA of the microfluidic device provided in the third embodiment of this application. The microfluidic device provided in the third embodiment of this application has a basically the same structure as the microfluidic device provided in the second embodiment. The difference is that in the third embodiment of this application, the two driving electrodes 21 are respectively disposed on the bottom wall of the two receiving grooves 111 to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the DNA molecules move faster, and the detection reaction time of the microfluidic device is improved.

[0089] Specifically, the positive driving electrode 211 of the two driving electrodes 21 is set to the bottom wall of the liquid outlet tank, and the negative driving electrode 212 is set to the bottom wall of the liquid inlet tank.

[0090] See Figure 7 , Figure 7 This is a cross-sectional view along line AA of the microfluidic device provided in the fourth embodiment of this application. The microfluidic device provided in the fourth embodiment of this application has a basically the same structure as the microfluidic device provided in the first embodiment. The difference is that in the fourth embodiment, the first surface 10 also has multiple first grooves 13, and each driving electrode 21 is embedded in one first groove 13. This makes the electric field generated by the two driving electrodes 21 exert a stronger force on the DNA molecules, enabling the DNA molecules to pass through the microfluidic channel 112 more quickly, thus improving the detection response time of the microfluidic device. Furthermore, placing the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0091] Specifically, the first groove 13 is disposed in the non-opening region 12 of the first surface 10 and extends from the first surface 10 to the second surface 20. The top surface of the driving electrode 21 disposed in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, such that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21. It can be understood that the electric field lines are denser and the electric field strength is stronger in the area directly opposite the two driving electrodes 21, resulting in a greater force on the DNA molecules.

[0092] See Figure 8 , Figure 8 This is a cross-sectional view along line AA of the microfluidic device provided in the fifth embodiment of this application. The microfluidic device provided in the fifth embodiment of this application has a basically the same structure as the microfluidic device provided in the fourth embodiment, except that in the fifth embodiment of this application, the first substrate 1 further includes a second surface 20 opposite to the first surface 10, and the control circuit layer 3 is disposed on the second surface 20 of the first substrate 1. The second surface 20 also has a plurality of second grooves 14, and each driving electrode 21 is embedded in a second groove 14; this is to make the electric field exert a greater force on the DNA molecules while avoiding contamination of the receiving groove 111 of the first surface 10 during the preparation of the electrode pair 2 and the control circuit layer 3, which could lead to adverse effects on the detection results.

[0093] Specifically, the second groove 14 is disposed on the second surface 20 at the position corresponding to the non-opening area 12, and extends from the second surface 20 to the first surface 10. The top surface of the driving electrode 21 disposed within the second groove 14 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, such that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21.

[0094] See Figure 9 , Figure 9 This is a cross-sectional view along line AA of the microfluidic device provided in the sixth embodiment of this application. The microfluidic device provided in the sixth embodiment of this application has a basically the same structure as the microfluidic device provided in the first embodiment, except that in the sixth embodiment of this application, the microfluidic device includes a microfluidic substrate 100 and a control substrate 200; wherein, the microfluidic substrate 100 may include a first substrate 1 and a plurality of electrode pairs 2, and the control substrate 200 may include a second substrate 4, a control circuit layer 3 and a plurality of contact pairs 5.

[0095] The first substrate 1 includes a first surface 10, which has a plurality of spaced opening regions 11 for loading and processing samples; the opening regions 11 are recessed downward from the first surface 10 of the first substrate 1 to form a groove-shaped opening region 11.

[0096] Each opening region 11 has two accommodating slots 111 spaced apart along a first direction X for holding liquids and samples. The two accommodating slots 111 share a common sidewall with a microfluidic channel 112. The two accommodating slots 111 are connected through the microfluidic channel 112, allowing only a single DNA molecule from the sample to pass through the microfluidic channel 112, facilitating observation of the DNA molecule by the user. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while simultaneously allowing sample flow and observation via the microfluidic channel 112.

[0097] One of the two accommodating slots 111 is an inlet slot for loading DNA molecule clusters or other samples to be tested; the other is an outlet slot for containing single DNA molecules or other samples to be observed flowing out from the microfluidic channel 112.

[0098] Multiple electrode pairs 2 are disposed on and fixedly connected to the first substrate 1 to enable the electrode pairs 2 to apply a stable electric field; and each electrode pair 2 is disposed corresponding to an opening region 11 to apply an electric field to the corresponding opening region 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pair 2 includes two driving electrodes 21, which are spaced apart along a first direction X on opposite sides of the microfluidic channel 112 so that DNA molecules or other charged particles can pass through the microfluidic channel 112 along the first direction X.

[0099] The second substrate 4 can also be made of quartz glass. The control circuit layer 3 is disposed on the second substrate 4 and fixedly connected to the second substrate 4 to stably transmit voltage signals. Specifically, the control circuit layer 3 can be directly fabricated on the second substrate 4, or the control circuit layer 3 can be first fabricated on a substrate and then the substrate is fixed to the second substrate 4.

[0100] Multiple contact pairs 5 are disposed on the second substrate 4 and electrically connected to the control circuit layer 3. Each contact pair 5 includes two connecting contacts 51, and each connecting contact 51 corresponds to one of the two driving electrodes 21. Specifically, the connecting contacts 51 can be disposed on the surface of the control circuit layer 3 away from the second substrate 4. Alternatively, the control circuit layer 3 and the connecting contacts 51 can be disposed on different surfaces of the second substrate 4, and the two can be electrically connected through vias to prevent the control circuit layer 3 from being corroded by evaporating liquid. In addition, directly disposing the connecting contacts 51 on the bottom surface of the second substrate 4 makes the bottom surface of the second substrate 4 facing the first substrate 1 flatter, making it easier for the bottom surface of the second substrate 4 to adhere to the surface of the first substrate 1, and preventing the control circuit layer 3 from being squeezed.

[0101] In this system, the control substrate 200 is attached to the microfluidic substrate 100 during use. Multiple contact pairs 5 are electrically connected to multiple electrode pairs 2. The control circuit layer 3 is used to apply voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid in the accommodating tank 111 to enter the microfluidic channel 112 from the liquid inlet tank for detection by the detection device. At the same time, the control circuit layer 3 can also coordinate and control the voltage applied to each electrode pair 2, thereby achieving simultaneous independent control of multiple samples.

[0102] Thus, by integrating multiple independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can operate independently, allowing for flexible configuration of different experimental conditions. This enables the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency. Simultaneously, by placing the control circuit layer 3 and contact pairs 5 on a second substrate 4 independent of the first substrate 1, the microfluidic substrate 100 can be replaced individually when replacement is needed, reducing replacement costs; similarly, the control substrate 200 can also be replaced individually when replacement is needed, further reducing replacement costs.

[0103] like Figure 9 As shown, in a specific embodiment, multiple electrode pairs 2 can be disposed on the non-opening region 12 of the first surface 10 of the first substrate 1 to avoid blocking the opening region 11. Two driving electrodes 21 can be disposed at intervals along the first direction X on opposite sides of the two receiving grooves 111 to ensure the consistency and stability of the electric field applied to the electrode pairs 2, which helps to achieve a uniform electric field distribution.

[0104] When in use, the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100 so that the electrode pair 2 on the first surface 10 makes contact with the corresponding contact pair 5 on the control substrate 200, so that the control circuit layer 3 can apply voltage to the electrode pair 2.

[0105] In a specific embodiment, the control circuit layer 3 has a cutout 31 corresponding to the microfluidic channel 112, and the second substrate 4 is a transparent substrate, so that the microfluidic device has higher transparency and observability, making it easier for users to observe DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the cutout 31 and the corresponding transparent substrate. Specifically, the cutout 31 of the control circuit layer 3 can be formed by an etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0106] Of course, in some embodiments, the control substrate 200 may also have a cutout portion 31 corresponding to the microfluidic channel 112 to further improve optical transmittance and facilitate real-time monitoring of the state of the microfluidic channel 112.

[0107] like Figure 9 As shown, in a specific embodiment, the first surface 10 also has a plurality of first grooves 13, and each driving electrode 21 is embedded in one of the first grooves 13. This makes the electric field generated by the two driving electrodes 21 exert a greater force on the DNA molecules, enabling the DNA molecules to pass through the microfluidic channel 112 more quickly and improving the detection response time of the microfluidic device. In addition, placing the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0108] Specifically, the first groove 13 is disposed in the non-opening area 12 of the first surface 10 and extends from the first surface 10 to the bottom. The top surface of the driving electrode 21 is flush with or protrudes from the first surface 10 so that when the control substrate 200 and the microfluidic substrate 100 are bonded, the connection contact point 51 on the control substrate 200 can contact and be electrically connected with the driving electrode 21.

[0109] Furthermore, the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0110] In a specific embodiment, electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212, and correspondingly, contact pair 5 includes a positive electrode connection contact 511 and a negative electrode connection contact 512.

[0111] Specifically, in combination Figure 1 , Figure 2 and Figure 9The control circuit layer 3 may include multiple gate scan lines 32, multiple data lines 33, multiple thin-film transistors 34, and a common electrode line 35; wherein the multiple gate scan lines 32 and multiple data lines 33 are arranged in an interleaved manner. Each positive electrode contact 511 is electrically connected to the data line 33 through at least one thin-film transistor 34. Specifically, the positive electrode contact 511 is electrically connected to the drain 343 of the thin-film transistor 34 so that when the thin-film transistor 34 is turned on, a voltage signal is transmitted to the positive electrode contact 511 through the data line 33. The positive electrode contact 511 is used to electrically connect to the positive electrode driving electrode 211, and when the control substrate 200 is attached to the microfluidic substrate 100, the positive electrode driving electrode 211 contacts and is electrically connected to the positive electrode contact 511.

[0112] All negative electrode contact points 512 are electrically connected to the common electrode line 35; the negative electrode contact points 512 are used to electrically connect with the negative electrode driving electrode 212, and when the control substrate 200 is attached to the microfluidic substrate 100, the negative electrode driving electrode 212 contacts and is electrically connected to the negative electrode contact points 512.

[0113] Thus, by using multiple gate scan lines 32 and data lines 33, independent control of each opening region 11 can be achieved; the thin-film transistor 34, as a switching element, can efficiently control current flow, thereby improving the system's response speed and accuracy. All negative drive electrodes 212 are connected to a common electrode line 35, simplifying circuit design, reducing the number of lines, lowering manufacturing costs, and improving system consistency and reliability.

[0114] See Figure 10 , Figure 10 This is a cross-sectional view along line AA of the microfluidic device provided in the seventh embodiment of this application. The microfluidic device provided in the seventh embodiment of this application has a basically the same structure as the microfluidic device provided in the sixth embodiment, the difference being that in the seventh embodiment, multiple electrode pairs 2 are disposed on the second surface 20 of the first substrate 1; wherein, the second surface 20 is disposed opposite to the first surface 10, that is, the second surface 20 is... Figure 10 The bottom surface of the first substrate 1 is used to avoid contamination of the receiving groove 111 of the first surface 10 during the preparation of the electrode pair 2, which could lead to adverse effects on the detection results.

[0115] When in use, the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 so that the electrode pair 2 on the second surface 20 makes contact with the corresponding contact pair 5 on the control substrate 200, so that the control circuit layer 3 can apply voltage to the electrode pair 2.

[0116] like Figure 10As shown, in a specific embodiment, two driving electrodes 21 can be arranged at intervals along the first direction X on opposite sides of two receiving grooves 111, so that the two receiving grooves are located as close as possible to the electric field generated by the two driving electrodes 21, so that all DNA molecules in the liquid inlet can move towards the microfluidic channel 112 under the action of the electric field.

[0117] Specifically, two driving electrodes 21 are respectively disposed on the second surface 20 at positions corresponding to the non-opening region 12. The second surface 20 also has multiple second grooves 14, and each driving electrode 21 is embedded in a second groove 14. This is to increase the force of the electric field on the DNA molecules while avoiding contamination of the receiving groove 111 of the first surface 10 during the preparation of the electrode pair 2 and the control circuit layer 3, which could lead to adverse effects on the detection results.

[0118] Specifically, the second groove 14 is disposed on the second surface 20 at the position corresponding to the non-opening area 12, and extends from the second surface 20 to the first surface 10. The top surface of the driving electrode 21 disposed within the second groove 14 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is flush with the second surface 20 or protrudes from the first surface 10. This allows the microfluidic channel 112 to be located in the area directly opposite the two driving electrodes 21, enhancing the electric field's effect on DNA molecules while facilitating contact and electrical connection between the connection point 51 on the control substrate 200 and the driving electrode 21 after the control substrate 200 and the microfluidic substrate 100 are attached.

[0119] See Figure 11 , Figure 11 This is a cross-sectional view along line AA of the microfluidic device provided in the eighth embodiment of this application. The microfluidic device provided in the eighth embodiment of this application has a basically the same structure as the microfluidic device provided in the seventh embodiment. The difference is that in the eighth embodiment of this application, the two driving electrodes 21 are respectively disposed on the bottom wall of the two receiving grooves 111 to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the DNA molecules move faster, and the detection reaction time of the microfluidic device is improved.

[0120] Specifically, the positive driving electrode 211 of the two driving electrodes 21 is set to the bottom wall of the liquid outlet tank, and the negative driving electrode 212 is set to the bottom wall of the liquid inlet tank.

[0121] See Figure 12a , Figure 12aThis is a cross-sectional view along line AA of the microfluidic device provided in the ninth embodiment of this application. The microfluidic device provided in the ninth embodiment of this application has a basically the same structure as the microfluidic device provided in the sixth embodiment, except that in the ninth embodiment of this application, the microfluidic substrate 100 includes a first substrate 1, and the control substrate 200 may include a second substrate 4, a control circuit layer 3, and multiple electrode pairs 2.

[0122] Specifically, the first substrate 1 includes a first surface 10, the first surface 10 having a plurality of spaced opening regions 11 for loading and processing samples; the opening regions 11 are recessed downward from the first surface 10 of the first substrate 1 to form a groove-shaped opening region 11.

[0123] Each opening region 11 has two accommodating slots 111 spaced apart along a first direction X for holding liquids and samples. The two accommodating slots 111 share a common sidewall with a microfluidic channel 112. The two accommodating slots 111 are connected through the microfluidic channel 112, allowing only a single DNA molecule from the sample to pass through the microfluidic channel 112, facilitating observation of the DNA molecule by the user. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while simultaneously allowing sample flow and observation via the microfluidic channel 112.

[0124] One of the two accommodating slots 111 is an inlet slot for loading DNA molecule clusters or other samples to be tested; the other is an outlet slot for containing single DNA molecules or other samples to be observed flowing out from the microfluidic channel 112.

[0125] The second substrate 4 can also be made of quartz glass. The control circuit layer 3 is disposed on the second substrate 4 and fixedly connected to the second substrate 4 to stably transmit voltage signals. Specifically, the control circuit layer 3 can be directly fabricated on the second substrate 4, or the control circuit layer 3 can be first fabricated on a substrate and then the substrate is fixed to the second substrate 4.

[0126] Multiple electrode pairs 2 are disposed on the second substrate 4 and electrically connected to the control circuit layer 3, so that the control circuit layer 3 can apply a voltage to the electrode pairs 2 to form an electric field. Each electrode pair 2 is disposed corresponding to an opening region 11, so that an electric field is applied to the corresponding opening region 11 to manipulate the movement of DNA molecules or other charged particles. Each electrode pair 2 includes two spaced-apart driving electrodes 21.

[0127] In this design, the control substrate 200 is attached to the microfluidic substrate 100 during use, such that two driving electrodes 21 are spaced apart along a first direction X on opposite sides of the microfluidic channel 112, allowing DNA molecules or other charged particles to pass through the microfluidic channel 112 along the first direction X. The control circuit layer 3 applies voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid in the receiving tank 111 to enter the microfluidic channel 112 from the inlet tank for detection by the detection device. Simultaneously, the control circuit layer 3 can also coordinate and control the voltage applied to each electrode pair 2, thereby achieving simultaneous independent control of multiple samples.

[0128] Thus, by further integrating multiple electrode pairs 2 onto the control substrate 200, when the microfluidic substrate 100 needs to be replaced, only the first substrate 1 can be replaced, further reducing replacement costs. At the same time, by integrating multiple independent opening regions 11 and electrode pairs 2 onto a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can operate independently to flexibly configure different experimental conditions, enabling the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency.

[0129] In a specific embodiment, such as Figure 12a As shown, the control circuit layer 3 has a cutout 31 corresponding to the microfluidic channel 112, and the second substrate 4 is a transparent substrate to give the microfluidic device higher transparency and observability, allowing users to observe DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the cutout 31 and the corresponding transparent substrate. Specifically, the cutout 31 of the control circuit layer 3 can be formed by an etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0130] Of course, in some embodiments, the control substrate 200 may also have a cutout portion 31 corresponding to the microfluidic channel 112 to further improve optical transmittance and facilitate real-time monitoring of the state of the microfluidic channel 112.

[0131] like Figure 12a As shown, the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100 during use, so that each driving electrode 21 is attached to the non-opening area 12 of the first surface 10.

[0132] See Figures 12b-12c , Figure 12b A cross-sectional view along line AA of a microfluidic device provided in another embodiment of this application; Figure 12cThis is a cross-sectional view along line AA of a microfluidic device provided in another embodiment of this application. In some embodiments, the first substrate 1 further includes a second surface 20 opposite to the first surface 10, and the control substrate 200 can also be attached to the second surface 20 of the microfluidic substrate 100 during use.

[0133] Among them, such as Figure 12b As shown, the two driving electrodes 21 can be disposed on the side of the control circuit layer 3 away from the cutout portion 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the non-opening area 12 respectively, and the two driving electrodes 21 are spaced apart along the first direction X on opposite sides of the two receiving grooves 111, so that the two receiving grooves are located as close as possible between the electric fields generated by the two driving electrodes 21, so that all DNA molecules in the liquid inlet can move towards the microfluidic channel 112 under the action of the electric field.

[0134] Or, such as Figure 12c As shown, the two driving electrodes 21 can also be disposed on the side of the control circuit layer 3 near the cutout portion 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the opening area 11, and the two driving electrodes 21 are respectively located on the bottom wall of the two receiving grooves 111, so as to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the DNA molecules move faster, and improving the detection response time of the microfluidic device.

[0135] like Figure 12a As shown, in a specific embodiment, a microgroove is provided on the common sidewall between the two receiving grooves 111 within the same opening area 11. A microchannel is embedded within the microgroove; the microchannel is a tiny conduit embedded inside the microgroove, used to carry and control the flow of microfluidics. The microchannel serves as a microfluidic channel 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the microchannel can be a micrometer-sized quartz capillary.

[0136] Of course, in other embodiments, the microfluidic channel 112 can also be a microgroove or micropore disposed on the common sidewall to simulate blood vessels, so that DNA molecules can pass directly through the microgroove or micropore on the common sidewall, thereby improving the space utilization and structural compactness of the microfluidic device.

[0137] like Figure 12aAs shown, in a specific embodiment, electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. One of the two driving electrodes 21 is a positive driving electrode 211, and the other is a negative driving electrode 212. When the control substrate 200 is attached to the microfluidic substrate 100, the positive driving electrode 211 is located near the outlet tank, and the negative driving electrode 212 is located near the inlet tank, so that DNA molecules can enter the outlet tank from the inlet tank along the first direction X through the microfluidic channel 112.

[0138] In a specific embodiment, combined with Figure 1 , Figure 2 and Figure 12a The control circuit layer 3 may include multiple gate scan lines 32, multiple data lines 33, multiple thin-film transistors 34, and a common electrode line 35. The multiple gate scan lines 32 and multiple data lines 33 are arranged in an interleaved manner; each positive drive electrode 211 is electrically connected to a data line 33 through at least one thin-film transistor 34, and all negative drive electrodes 212 are electrically connected to the common electrode line 35.

[0139] Thus, by using multiple gate scan lines 32 and data lines 33, independent control of each opening region 11 can be achieved; the thin-film transistor 34, as a switching element, can efficiently control current flow, thereby improving the system's response speed and accuracy. All negative drive electrodes 212 are connected to a common electrode line 35, simplifying circuit design, reducing the number of lines, lowering manufacturing costs, and improving system consistency and reliability.

[0140] Specifically, each opening region 11 is provided with at least one thin film transistor 34; the gate scan line 32 is used to turn on a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit voltage signals to a specific column of thin film transistors 34 so as to generate an electric field in a specific electrode pair 2.

[0141] The thin-film transistor 34 includes a gate 341, a source 342, and a drain 343. A gate scan line 32 is electrically connected to the gate 341 of the thin-film transistor 34 to turn the thin-film transistor 34 on or off. A data line 33 is electrically connected to the source 342 of the thin-film transistor 34, and the drain 343 of the thin-film transistor 34 is electrically connected to the positive driving electrode 211. When the thin-film transistor 34 is on, a voltage signal is transmitted to the positive driving electrode 211 through the data line 33, causing an electric field to be generated between the positive driving electrode 211 and the negative driving electrode 212.

[0142] All data lines 33, gate scan lines 32, and common electrode lines 35 are grouped on one side of the second substrate 4 and connected to an external control chip to control the operation of the microfluidic device.

[0143] See Figure 13 , Figure 13 This is a cross-sectional view along line AA of the microfluidic device provided in the tenth embodiment of this application. The microfluidic device provided in the tenth embodiment has a basically the same structure as the microfluidic device provided in the ninth embodiment, except that in the tenth embodiment, the first surface 10 also has multiple first grooves 13. During use, the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100, so that each driving electrode 21 is embedded in one first groove 13. This results in a stronger electric field generated by the two driving electrodes 21 on the DNA molecules, allowing the DNA molecules to pass through the microfluidic channel 112 more quickly, thus improving the detection response time of the microfluidic device. Furthermore, embedding the driving electrodes 21 in the first grooves 13 further improves the space utilization and structural compactness of the microfluidic device.

[0144] Specifically, the first groove 13 is disposed in the non-opening area 12 of the first surface 10 and extends from the first surface 10 to the bottom. When the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100, the top surface of the driving electrode 21 embedded in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0145] See Figure 14 , Figure 14 This is a cross-sectional view along line AA of the microfluidic device provided in the eleventh embodiment of this application. The microfluidic device provided in the eleventh embodiment has a structure basically the same as that provided in the ninth embodiment, except that in the eleventh embodiment, the second surface 20 also has multiple second grooves 14; the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 during use, so that each driving electrode 21 is embedded in one second groove 14. This results in a stronger electric field generated by the two driving electrodes 21 on the DNA molecules, enabling the DNA molecules to pass through the microfluidic channel 112 more quickly, thus improving the detection response time of the microfluidic device. Furthermore, embedding the driving electrodes 21 in the second grooves 14 can further improve the space utilization and structural compactness of the microfluidic device.

[0146] Specifically, the second groove 14 is disposed on the second surface 20 at the position corresponding to the non-opening area 12, and extends from the second surface 20 to the first surface 10. When the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the top surface of the driving electrode 21 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0147] See Figure 15 , Figure 15 This is a cross-sectional view along line AA of the microfluidic device provided in the twelfth embodiment of this application. The microfluidic device provided in the twelfth embodiment of this application has a basically the same structure as the microfluidic device provided in the ninth embodiment, except that in the twelfth embodiment of this application, the second substrate 4 includes a third surface 30 and a fourth surface 40 facing each other; wherein, the control circuit layer 3 is disposed on the third surface 30, and the electrode pair 2 is disposed on the fourth surface 40 and electrically connected to the control circuit layer 3 through a via 41; so that the third surface 30 of the second substrate 4 facing the first substrate 1 is flatter, making it easier for the third surface 30 of the second substrate 4 to adhere to the surface of the first substrate 1, and preventing the control circuit layer 3 from being squeezed. In addition, when the control substrate 200 is attached to the first surface 10 of the control substrate 200, the control circuit layer 3 can be prevented from being corroded by the evaporated liquid.

[0148] Wherein, the third surface 30 of the second substrate 4 is the side surface of the second substrate 4 away from the microfluidic substrate 100 when the control substrate 200 is attached to the microfluidic substrate 100; the fourth surface 40 of the second substrate 4 is the side surface of the second substrate 4 facing the microfluidic substrate 100.

[0149] Of course, such as Figure 13 As shown, in other embodiments, the control circuit layer 3 and the electrode pair 2 may both be disposed on one side of the fourth surface 40 of the second substrate 4. Specifically, the control circuit layer 3 may be disposed on the fourth surface 40, and the electrode pair 2 may be disposed on the control circuit layer 3 and located on the side of the control circuit layer 3 away from the second substrate 4.

[0150] See Figure 16 , Figure 16This is a cross-sectional view along line AA of the microfluidic device provided in the thirteenth embodiment of this application. The microfluidic device provided in the thirteenth embodiment of this application has a basically the same structure as the microfluidic device provided in the tenth embodiment. The difference is that in the thirteenth embodiment of this application, the width a of the first groove 13 is greater than the width b of the driving electrode 21, so that when the control substrate 200 and the first surface 10 of the microfluidic substrate 100 are attached, the driving electrode 21 can be more easily embedded in the first groove 13, effectively reducing the accuracy requirements for the alignment and attachment of the control substrate 200 and the microfluidic substrate 100.

[0151] Specifically, the width a of the first groove 13 is the dimension of the first groove 13 along the direction parallel to the first substrate, and the width b of the driving electrode 21 is the dimension of the driving electrode 21 along the direction parallel to the first substrate.

[0152] Preferably, in the same direction, the width a of the first groove 13 can be 105%-110% of the width b of the driving electrode 21. Specifically, the width a of the first groove 13 can be 105%, 106%, 108%, 109%, or 110% of the width b of the driving electrode 21.

[0153] Furthermore, the height c of the driving electrode 21 can be less than the depth d of the first groove 13, so that when the control substrate 200 is attached to the first surface 10, the driving electrode 21 will not come into contact with the bottom of the first groove 13.

[0154] It is understandable that, in the actual fabrication process, due to process errors, the heights c of different driving electrodes 21 on the same second substrate may be different. As a result, when the control substrate 200 is attached to the first surface 10, some driving electrodes 21 abut against the bottom of the first groove 13, while other driving electrodes 21 are suspended in the first groove 13, resulting in uneven force between the control substrate 200 and the microfluidic substrate.

[0155] In this embodiment, by making the height c of the driving electrode 21 less than the depth d of the first groove 13, when the control substrate 200 is attached to the first surface 10, the multiple driving electrodes 21 are suspended in the first groove 13, and the surface of the control circuit layer 3 directly abuts against the first surface 10, thereby making the force between the control substrate 200 and the microfluidic substrate 100 more uniform.

[0156] Of course, in some embodiments, the control circuit layer 3 and the electrode pair 2 are respectively disposed on the third surface 30 and the fourth surface 40 of the second substrate 4, so that when the control substrate 200 is attached to the first surface 10, the fourth surface 40 of the second substrate 4 can directly abut against the first surface 10, so that the force between the control substrate 200 and the microfluidic substrate 100 is more uniform, while avoiding the situation where the liquid in the receiving tank 111 evaporates and contaminates the control circuit layer 3.

[0157] Preferably, the height c of the driving electrode 21 can be 80%-90% of the depth d of the first groove 13. Specifically, the height c of the driving electrode 21 can be 80%, 82%, 85%, 88%, or 90% of the depth d of the first groove 13.

[0158] See Figure 17 , Figure 17 This is a cross-sectional view along line AA of the microfluidic device provided in the fourteenth embodiment of this application. The microfluidic device provided in the fourteenth embodiment of this application has a basically the same structure as the microfluidic device provided in the eleventh embodiment. The difference is that in the fourteenth embodiment of this application, the width e of the second groove 14 is greater than the width b of the driving electrode 21, so that when the control substrate 200 and the second surface 20 of the microfluidic substrate 100 are attached, the driving electrode 21 can be more easily embedded in the second groove 14, effectively reducing the accuracy requirements for the alignment and attachment of the control substrate 200 and the microfluidic substrate 100.

[0159] Specifically, the width e of the second groove 14 is the dimension of the second groove 14 along the direction parallel to the first substrate.

[0160] Preferably, in the same direction, the width e of the second groove 14 can be 105%-110% of the width b of the driving electrode 21. Specifically, the width e of the second groove 14 can be 105%, 106%, 108%, 109%, or 110% of the width b of the driving electrode 21.

[0161] Furthermore, the height c of the driving electrode 21 can be less than the depth f of the second groove 14, so that when the control substrate 200 is attached to the second surface 20, the driving electrode 21 will not abut against the bottom of the second groove 14, so that multiple driving electrodes 21 are suspended in the second groove 14, while the surface of the control circuit layer 3 directly abuts against the second surface 20, thereby making the force between the control substrate 200 and the microfluidic substrate 100 more uniform.

[0162] See Figure 18 , Figure 18This is a cross-sectional view along line AA of the microfluidic device provided in the fifteenth embodiment of this application. The microfluidic device provided in the fifteenth embodiment of this application has a basically the same structure as the microfluidic device provided in the tenth embodiment. The difference is that in the fifteenth embodiment of this application, the width a of the first groove 13 gradually decreases along the depth direction of the first groove 13, so that the first groove 13 is open, and the width of the driving electrode 21 gradually decreases along the depth direction of the first groove 13. This makes it easier for the driving electrode 21 to be embedded in the first groove 13 when the control substrate 200 and the first surface 10 of the microfluidic substrate 100 are attached, effectively reducing the accuracy requirements for the alignment and attachment of the control substrate 200 and the microfluidic substrate 100.

[0163] It should be noted that the depth direction of the first groove 13 refers to the direction in which the opening of the first groove 13 faces the bottom, that is, the direction in which the first surface 10 faces the second surface 20. In other words, the width 'a' of the first groove 13 gradually decreases along the direction from the opening to the bottom, forming an inverted trapezoid that is wider at the top and narrower at the bottom; in addition, the width of the driving electrode 21 gradually decreases along the direction away from the second substrate 4.

[0164] See Figure 19 , Figure 19 This is a cross-sectional view along line AA of the microfluidic device provided in the sixteenth embodiment of this application. The microfluidic device provided in the sixteenth embodiment of this application has a basically the same structure as the microfluidic device provided in the eleventh embodiment. The difference is that in the sixteenth embodiment of this application, the width e of the second groove 14 gradually decreases along the depth direction of the second groove 14, so that the second groove 14 is open, and the width of the driving electrode 21 gradually decreases along the depth direction of the second groove 14. This allows the driving electrode 21 to be more easily embedded in the second groove 14 when the control substrate 200 and the second surface 20 of the microfluidic substrate 100 are attached, effectively reducing the accuracy requirements for the alignment and attachment of the control substrate 200 and the microfluidic substrate 100.

[0165] It should be noted that the depth direction of the second groove 14 refers to the direction in which the opening of the second groove 14 faces the bottom, that is, the direction in which the second surface 20 faces the first surface 10. In other words, the width e of the second groove 14 gradually decreases along the direction in which the opening faces the bottom, forming a trapezoid that is narrower at the top and wider at the bottom, and the width of the driving electrode 21 gradually decreases along the direction away from the second substrate 4.

[0166] See Figure 20a and Figure 20b , Figure 20a A cross-sectional view along line AA of the microfluidic device provided in the seventeenth embodiment of this application in one case; Figure 20bThis is a cross-sectional view along line AA of the microfluidic device provided in the seventeenth embodiment of this application in another case. The microfluidic device provided in the seventeenth embodiment of this application has a basically the same structure as the microfluidic device provided in the tenth embodiment, except that in the seventeenth embodiment of this application, the first surface 10 has a first groove 13 and the second surface 20 has a second groove 14, and the first groove 13 and the second groove 14 are offset along the first direction X.

[0167] Thus, by providing grooves on both opposite surfaces of the first substrate 1, the control substrate 200 can, during use, adhere to either the first surface 10 of the microfluidic substrate 100 to cover the receiving groove 111 and prevent liquid evaporation from the receiving groove 111, or adhere to the second surface 20 of the microfluidic substrate 100 to avoid obstructing the view and facilitate better observation of the sample in the microfluidic channel 112. The specific adhesion position of the control substrate 200 can be adjusted according to the detection requirements.

[0168] It can be understood that the misalignment of the first groove 13 and the second groove 14 along the first direction X means that the projection of the first groove 13 along the thickness direction Y on the first substrate 1 and the projection of the second groove 14 along the thickness direction Y on the first substrate 1 are misaligned along the first direction X. This is so that the depth of the misaligned first groove 13 and the second groove 14 can be set large enough that when the control substrate 200 is attached to the microfluidic substrate 100, the top surface of the driving electrode 21 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, thereby placing the microfluidic channel 112 in the area directly opposite the two driving electrodes 21, thereby enhancing the force of the electric field on the DNA molecules.

[0169] See Figure 21 , Figure 21 This is a schematic flowchart illustrating a method for fabricating a microfluidic device according to an embodiment of this application; this application also provides a method for fabricating a microfluidic device, the specific steps of which include:

[0170] Step S1: Provide a first substrate.

[0171] Specifically, the first substrate 1 includes a first surface 10; the first surface 10 has a plurality of opening regions 11 spaced apart.

[0172] Step S2: Two receiving grooves spaced apart along the first direction are opened in each opening area, and a microfluidic channel is formed on the common sidewall of the two receiving grooves so that the two receiving grooves are connected through the microfluidic channel to form a microfluidic substrate.

[0173] In the specific implementation process, the modified liquid can be used to soak and dry the container 111 and the microfluidic channel 112 to change their surface hydrophilicity, so that DNA molecules are not easy to adhere to the quartz glass wall, so that DNA molecules can spread in the microfluidic channel 112 and are easy to observe and detect.

[0174] Step S3: Provide a second substrate and fabricate a control circuit layer on the second substrate.

[0175] Specifically, the control circuit layer 3 may include multiple gate scan lines 32, multiple data lines 33, multiple thin-film transistors 34, and a common electrode line 35. The multiple gate scan lines 32 and multiple data lines 33 are arranged in an interleaved manner; each opening region 11 corresponds to at least one thin-film transistor 34.

[0176] In the specific implementation process, a cutout 31 can also be formed at the position of the microfluidic channel 112 corresponding to the control circuit layer 3 through an etching process, so that the microfluidic device has higher transparency and observability, making it easier for users to observe the DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the cutout 31 and the corresponding part of the transparent substrate.

[0177] Step S4: Fabricate multiple electrode pairs that are electrically connected to the control circuit layer on the second substrate to form a control substrate.

[0178] Specifically, two driving electrodes 21 are spaced apart on opposite sides of the cutout portion 31 along the first direction X to form an electrode pair 2. Each electrode pair 2 is provided with an opening region 11, such that when the control substrate 200 is attached to the microfluidic substrate 100, the two driving electrodes 21 of each electrode pair 2 are spaced apart on opposite sides of the microfluidic channel 112 along the first direction X.

[0179] After step S1, the method may further include: forming a plurality of first grooves 13 on the first surface 10, and positioning the first grooves 13 on opposite sides of the opening area 11 along the first direction X.

[0180] Alternatively, after step S1, the process may include: opening a plurality of second grooves 14 on the second surface 20, and positioning the second grooves 14 on opposite sides of the microfluidic channel along the first direction.

[0181] Alternatively, after step S1, the method may include: forming a plurality of first grooves 13 on the first surface 10 and forming a plurality of second grooves 14 on the second surface 20; and setting the first grooves 13 and the second grooves 14 to be offset along the first direction X.

[0182] After step S3, the process may further include: attaching a control chip to one side of the first substrate 1 and electrically connecting all data lines 33, gate scan lines 32 and common electrode lines 35 to an external chip.

[0183] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A microfluidic device, characterized in that, The microfluidic device comprises: a microfluidic substrate comprising: a first substrate plate comprising a first surface and a second surface arranged oppositely; the first surface has a plurality of opening regions arranged at intervals, each of the opening regions has two accommodation grooves arranged at intervals along a first direction, and a common side wall of the two accommodation grooves has a microfluidic channel, and the two accommodation grooves are communicated through the microfluidic channel; a control substrate comprising: a second substrate plate; a control circuit layer arranged on the second substrate plate; a plurality of electrode pairs arranged on the second substrate plate and electrically connected with the control circuit layer; each of the electrode pairs corresponds to one of the opening regions; the electrode pair comprises two driving electrodes; the electrode pair comprises a positive driving electrode and a negative driving electrode; wherein, in use, the control substrate is attached to the microfluidic substrate, so that the two driving electrodes are arranged at intervals along the first direction on opposite sides of the microfluidic channel, and the control circuit layer is used to apply voltage to each of the electrode pairs; wherein, the first surface further has a plurality of first grooves, and in use, the control substrate is attached to the first surface of the microfluidic substrate, so that each of the driving electrodes is embedded in one of the first grooves; or the second surface further has a plurality of second grooves; and in use, the control substrate is attached to the second surface of the microfluidic substrate, so that each of the driving electrodes is embedded in one of the second grooves; the second substrate plate comprises a third surface and a fourth surface arranged oppositely; the control circuit layer is arranged on the third surface, and the electrode pairs are arranged on the fourth surface and electrically connected with the control circuit layer through vias; or the control circuit layer is arranged on the fourth surface, and the electrode pairs are arranged on the control circuit layer; the control circuit layer comprises: a plurality of gate scan lines; a plurality of data lines arranged transversely to the gate scan lines; a plurality of thin film transistors; each of the positive driving electrodes is electrically connected to the data lines through at least one of the thin film transistors; a common electrode line; all of the negative driving electrodes are electrically connected to the common electrode line.

2. The microfluidic device according to claim 1, wherein: a width of the first groove is greater than a width of the driving electrode; or a width of the second groove is greater than a width of the driving electrode.

3. The microfluidic device according to claim 1, wherein: a width of the first groove gradually decreases along a depth direction of the first groove, and a width of the driving electrode gradually decreases along the depth direction of the first groove; or a width of the second groove gradually decreases along a depth direction of the second groove, and a width of the driving electrode gradually decreases along the depth direction of the second groove.

4. The microfluidic device according to claim 1, wherein: a height of the driving electrode is less than a depth of the first groove; or a height of the driving electrode is less than a depth of the second groove.

5. The microfluidic device according to claim 1, wherein: The first surface has the first groove and the second surface has a second groove; the first groove and the second groove are arranged in a staggered manner along the first direction.

6. The microfluidic device according to any one of claims 1-5, wherein, When the control substrate is attached to the microfluidic substrate, the top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel.

7. A method for manufacturing a microfluidic device according to any one of claims 1 to 6, characterized in that Comprising: providing a first substrate; The first substrate includes a first surface having a plurality of opening regions arranged at intervals; In each of the opening regions, two accommodation grooves arranged at intervals along a first direction are formed, and a microfluidic channel is formed on the common side wall of the two accommodation grooves, so that the two accommodation grooves are communicated through the microfluidic channel, to form a microfluidic substrate; providing a second substrate, and manufacturing a control circuit layer on the second substrate; manufacturing a plurality of electrode pairs on the second substrate, which are electrically connected to the control circuit layer, to form a control substrate; and making each of the electrode pairs correspond to one of the opening regions, so that when the control substrate is attached to the microfluidic substrate, two driving electrodes of each of the electrode pairs are arranged at intervals along the first direction on opposite sides of the microfluidic channel.

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