Automatic feeding and discharging equipment of crystal growth furnace

Abstract

The crystal growth furnace automatic feeding and discharging equipment comprises an AGV platform car, a supporting seat is fixedly arranged at the top of the AGV platform car, a pair of transverse sliding rails parallel to each other are transversely and fixedly arranged at the top of the supporting seat through a pair of sliding rail supports, and a mounting sliding plate is transversely and slidably arranged on the pair of transverse sliding rails; a transverse lead screw module for driving the mounting sliding plate to transversely move is fixedly arranged in the middle of the top of the supporting seat, a longitudinal mounting plate is arranged at the front end of the mounting sliding plate, and a longitudinal lead screw module and a lifting seat which longitudinally slides in a lifting mode through the longitudinal lead screw module are fixedly arranged on the surface of the longitudinal mounting plate; according to the automatic feeding and discharging equipment, automatic feeding and discharging of crucible conveying of the crystal growth furnace are achieved by automatically recognizing the position and size of the crucible, automatically clamping the crucible and cooperating with the AGV platform car, a traditional manual clamping and conveying mode is replaced, automation of production and conveying is guaranteed, the production efficiency is improved, and the production cost is reduced. And the safety is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of automatic loading and unloading, and in particular relates to automatic loading and unloading equipment for a crystal growth furnace. Background Art

[0002] Crystals play a vital role in production and everyday life. Crystals are often grown in crystal growth furnaces. Existing crystal growth furnaces mostly feature a double-layered quartz tube water-cooled chamber, with the interlayer between the two layers serving as a cooling medium channel. The crucible used for crystal growth is located within the heated area enclosed by the inner quartz tubes and heated by induction coils.

[0003] The loading and unloading of the crucible used in the existing crystal growth furnace is generally performed manually. Since the crucible is heavy and the temperature of the crucible after heating is very high, improper operation may cause burns, etc., which is quite dangerous. Therefore, the present invention designs an automatic loading and unloading device for the crystal growth furnace. Summary of the Invention

[0004] The object of the present invention is to provide an automatic loading and unloading device for a crystal growth furnace to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: an automatic loading and unloading equipment for a crystal growth furnace, comprising an AGV platform vehicle, a support seat fixedly provided on the top of the AGV platform vehicle, a pair of mutually parallel transverse slide rails fixedly provided on the top of the support seat through a pair of slide rail brackets, a mounting slide plate sliding transversely provided on the pair of transverse slide rails, a transverse screw module driving the mounting slide plate to move transversely fixedly provided in the middle of the top of the support seat, a longitudinal mounting plate provided at the front end of the mounting slide plate, a longitudinal screw module fixedly provided on the surface of the longitudinal mounting plate, and a lifting seat provided on the longitudinal mounting plate that can be lifted and slid longitudinally by the longitudinal screw module, an electric clamping claw assembly for clamping the crucible is provided on the lifting seat, and a CCD camera module for visually identifying the size of the crucible is installed on the top of the support seat.

[0006] Preferably, the electric clamp assembly includes a clamp driving electric cylinder fixedly arranged on the top of the lifting seat, a connecting base plate fixedly arranged on the telescopic ends of the clamp driving electric cylinder, a pair of clamp arms fixedly connected to the connecting base plate through a connecting piece, and a pair of arc-shaped clamps fixedly installed at the front end of the pair of clamp arms.

[0007] Preferably, the connecting member includes a pair of connecting seats arranged on the top of the lifting seat through horizontal sliding of a guide rail, the pair of connecting seats are symmetrically distributed on both sides of the clamping claw driving electric cylinder, and the sliding direction of the connecting seat is parallel to the telescopic movement direction of the connecting seat plate, the connecting seat plate is fixedly connected to one end of the connecting seat on the corresponding side, and the other end of the connecting seat is fixedly connected to the clamping claw arm.

[0008] Preferably, a plurality of heat insulation plates are fixedly provided at equal distances on the arc-shaped surface of the clamping jaw, and the heat insulation plates are made of non-metallic ceramic heat insulation material.

[0009] Preferably, a support plate for preventing the crucible from falling is provided extending forward from the bottom end of the lifting seat, and the support plate and the lifting seat are integrally formed into an integrated structure, and a layer of non-metallic ceramic heat insulating material is provided on the support plate.

[0010] Preferably, a temperature infrared detection sensor for detecting the temperature of the crucible to be clamped is fixedly mounted on the front end of the supporting plate via a fixing plate.

[0011] Preferably, the support plate is in a U-shaped structure, and the size of the U-shaped groove in the middle of the support plate matches the size of the docking platform for placing the crucible.

[0012] Preferably, a baffle plate is provided on the top fixed edge of the support seat, and a counterweight block for maintaining balance is also provided inside the support seat.

[0013] Compared with the prior art, the present invention has the following beneficial effects: The automatic loading and unloading equipment of the present invention automatically identifies the size of the crucible, automatically clamps the crucible, and then uses the AGV platform vehicle to automatically transport the clamped crucible from the docking station to the crystal growth furnace for placement, thereby realizing automatic loading of the crystal growth furnace. After processing, according to the same principle, the crucible in the crystal growth furnace can be automatically identified, automatically clamped and transported to the docking station, realizing automatic unloading, replacing the traditional manual clamping and transportation method, ensuring the automation and intelligence of production and transportation, and also being safer. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a schematic diagram of the front-end three-dimensional structure of the present invention; Figure 3 It is a schematic diagram of the top view of the structure of the present invention; Figure 4 This is a schematic diagram of the structure of the electric gripper assembly installed in the present invention; Figure 5 This is a schematic structural diagram of the electric cylinder driving the gripper of the present invention; In the figure: 1. AGV platform vehicle; 2. Support base; 3. Mounting slide; 4. Horizontal slide rail; 5. Slide rail bracket; 6. Longitudinal screw module; 7. Lifting base; 8. Gripper drive electric cylinder; 9. Gripper; 10. U-shaped support plate; 11. Longitudinal mounting plate; 12. CCD camera module; 13. Horizontal screw module; 14. Gripper arm; 15. Heat insulation board; 16. Connecting base; 17. Connecting base plate; 18. Guide slide rail; 19. Enclosure plate; 20. Temperature infrared detection sensor. DETAILED DESCRIPTION

[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] Example 1 See also Figure 1 and Figure 5 , the present invention provides a technical solution: An automatic loading and unloading device for a crystal growth furnace includes an AGV platform vehicle 1. In this embodiment, the AGV platform vehicle 1 is a Hikvision MR-Q3-600CE-D(M). The top of the AGV platform vehicle 1 is fixed with a support base 2 by a plurality of fixing bolts. The top of the support base 2 is a horizontal mounting platform structure. The top of the support base 2 is fixed with a pair of mutually parallel transverse slide rails 4 by a pair of slide rail brackets 5. A mounting slide 3 is provided on the pair of transverse slide rails 4 for transverse sliding. A transverse screw module 13 for driving the transverse movement of the mounting slide 3 is fixed in the middle of the top of the support base 2, which can drive the entire electric gripper assembly to perform transverse horizontal reciprocating motion. In this embodiment, the transverse screw The model of module 13 is SBSW178-2510-S1000, and a longitudinal mounting plate 11 is provided at the front end of the mounting slide 3. A longitudinal screw module 6 is fixedly provided on the surface of the longitudinal mounting plate 11. The specification model of the longitudinal screw module 6 is SBSW178-2505-S200, and a lifting seat 7 is provided on the longitudinal mounting plate 11, which can be lifted and slid longitudinally through the longitudinal screw module 6. The lifting seat 7 is provided with an electric clamping jaw assembly for clamping the crucible to realize the longitudinal reciprocating linear motion of the electric clamping jaw assembly; a CCD camera module 12 for visually identifying the size of the crucible is installed on the top of the support seat 2, which is used to realize the appearance size detection of 6-inch and 8-inch crucibles. In this embodiment, preferably, the electric clamping jaw assembly includes a clamping jaw driving electric cylinder 8 fixedly arranged on the top of the lifting seat 7, a connecting base plate 17 fixedly arranged on the two telescopic ends of the clamping jaw driving electric cylinder 8, a pair of clamping jaws 14 fixedly connected to the connecting base plate 17 through a connecting piece, and a pair of arc-shaped clamping jaws 9 fixedly installed at the front end of the pair of clamping jaws 14, which are used to clamp the crucible. The clamping jaws 14 and the clamping jaws 9 are both made of 304 stainless steel. In this embodiment, preferably, the connecting member includes a pair of connecting seats 16 that are horizontally slidably arranged on the top of the lifting seat 7 via a guide rail 18. The pair of connecting seats 16 are symmetrically distributed on both sides of the clamping jaw driving electric cylinder 8, and the sliding direction of the connecting seats 16 is parallel to the telescopic movement direction of the connecting seat plate 17. The connecting seat plate 17 is fixedly connected to one end of the connecting seat 16 on the corresponding side, and the other end of the connecting seat 16 is fixedly connected to the clamping jaw arm 14. The clamping jaw driving electric cylinder 8 drives the connecting seat plates 17 at both ends to move synchronously with the telescopic ends of the clamping jaw driving electric cylinder 8, thereby driving the connecting seats 16 and the clamping jaw arm 14 connected to the connecting seats 16 to move synchronously, thereby achieving the clamping or loosening of the clamping jaw 9. In this embodiment, preferably, a plurality of heat insulation plates 15 are fixedly arranged at equal distances on the curved surface of the clamping jaw 9. The heat insulation plates 15 are non-metallic ceramic heat insulation materials that play a role in heat insulation and scalding prevention. In this embodiment, preferably, a support plate 10 for preventing the crucible from falling is extended forward from the bottom end of the lifting seat 7, and the support plate 10 and the lifting seat 7 are integrally formed into an integrated structure. A layer of non-metallic ceramic insulation material is provided on the support plate 10 to play a role in heat insulation and scalding prevention.In this embodiment, preferably, a temperature infrared detection sensor 20 for detecting the temperature of the crucible to be clamped is fixedly installed on the front end of the support plate 10 through a fixing plate, which is used to detect whether the crucible temperature is overheated. The temperature alarm threshold can be set on the touch screen. When the contact temperature exceeds the set temperature, the device automatically alarms. In this embodiment, preferably, the shape of the support plate 10 is a U-shaped structure, and the size of the U-shaped groove in the middle of the support plate 10 matches the size of the docking station for placing the crucible. In order to facilitate the insertion of the support plate 10 into the docking station, it can be smoothly supported on the bottom of the crucible. In this embodiment, preferably, a baffle plate 19 is provided on the top fixed edge of the support seat 2, and a counterweight block for maintaining balance is also provided inside the support seat 2 to ensure balance and stability and prevent the crucible from tipping over due to uneven weight distribution when clamping.

[0017] Workflow: The crucible is manually placed on the guide rail platform of the docking workbench; The guide rail platform moves to the AGV docking position via linear guide rails; Lower the support plate 10 to the same height as the docking workbench through the longitudinal screw module 6; The electric clamping jaw assembly clamps the crucible, and then cooperates with the horizontal screw module 13 to move the crucible to the support base 2; AGV platform vehicle 1 moves to the crystal growth workshop through autonomous navigation; AGV platform vehicle 1 exchanges safety signals with the crystal growth furnace and performs error prevention detection. Move down to the bottom of the crystal growth furnace to complete automatic loading; the unloading process is opposite.

[0018] Although the embodiments of the present invention have been shown and described, as detailed above, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the invention, and the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An automatic loading and unloading device for a crystal growth furnace, comprising an AGV platform vehicle (1), characterized in that: The top of the AGV platform vehicle (1) is fixedly provided with a support seat (2), the top of the support seat (2) is laterally fixedly provided with a pair of mutually parallel transverse slide rails (4) through a pair of slide rail brackets (5), a mounting slide plate (3) is laterally slidably provided on the pair of transverse slide rails (4), a transverse screw module (13) for driving the mounting slide plate (3) to move laterally is fixedly provided in the middle of the top of the support seat (2), a longitudinal mounting plate (11) is provided at the front end thereof, a longitudinal screw module (6) is fixedly provided on the surface of the longitudinal mounting plate (11), and a lifting seat (7) that can be lifted and slid longitudinally by the longitudinal screw module (6) is provided on the longitudinal mounting plate (11), an electric clamping claw assembly for clamping a crucible is provided on the lifting seat (7), and a CCD camera module (12) for visually identifying the size of the crucible is installed on the top of the support seat (2).

2. The automatic loading and unloading equipment for a crystal growth furnace according to claim 1, characterized in that: The electric clamp assembly comprises a clamp driving electric cylinder (8) fixedly arranged on the top of the lifting seat (7), a connecting seat plate (17) fixedly arranged on the two telescopic ends of the clamp driving electric cylinder (8), a pair of clamp arms (14) fixedly connected to the connecting seat plate (17) via a connecting piece, and a pair of arc-shaped clamps (9) fixedly installed at the front ends of the pair of clamp arms (14).

3. The automatic loading and unloading equipment for a crystal growth furnace according to claim 2, characterized in that: The connecting member includes a pair of connecting seats (16) which are horizontally slidably arranged on the top of the lifting seat (7) through a guide slide rail (18), and the pair of connecting seats (16) are symmetrically distributed on both sides of the clamping claw driving electric cylinder (8), and the sliding direction of the connecting seats (16) is parallel to the telescopic movement direction of the connecting seat plate (17). The connecting seat plate (17) is fixedly connected to one end of the connecting seat (16) on the corresponding side, and the other end of the connecting seat (16) is fixedly connected to the clamping claw arm (14).

4. The automatic loading and unloading equipment for a crystal growth furnace according to claim 3, characterized in that: A plurality of heat insulation plates (15) are fixedly provided at equal distances on the arc-shaped surface of the clamping jaw (9), and the heat insulation plates (15) are made of non-metallic ceramic heat insulation material.

5. The automatic loading and unloading equipment for a crystal growth furnace according to claim 1, characterized in that: A support plate (10) for preventing the crucible from falling is provided on the bottom end of the lifting seat (7) and extends forward, and the support plate (10) and the lifting seat (7) are integrally formed into an integrated structure, and a layer of non-metallic ceramic heat insulating material is provided on the support plate (10).

6. The automatic loading and unloading equipment for a crystal growth furnace according to claim 5, characterized in that: A temperature infrared detection sensor (20) for detecting the temperature of the crucible to be clamped is fixedly mounted on the front end of the support plate (10) via a fixing plate.

7. The automatic loading and unloading equipment for a crystal growth furnace according to claim 1, characterized in that: The support plate (10) is in the form of a U-shaped structure, and the size of the U-shaped groove in the middle of the support plate (10) matches the size of the docking platform on which the crucible is placed.

8. The automatic loading and unloading equipment for a crystal growth furnace according to claim 1, characterized in that: A baffle plate (19) is provided on the top fixed edge of the support seat (2), and a counterweight block for maintaining balance is also provided inside the support seat (2).

Images