Semiconductor film uniformity detection device

Abstract

The invention relates to the technical field of film detection devices, and discloses a semiconductor film uniformity detection device which comprises a bottom plate, the top of the bottom plate is fixedly connected with a fixing column, the top end of the fixing column is fixedly connected with a fixing plate, the inner wall of the fixing plate is fixedly connected with a connecting plate, and the inner wall of the connecting plate is provided with an electric clamping block. The inner wall of the positioning block is rotationally connected with a clamping jaw through a torsional spring, the two sides of the clamping jaw are rotationally connected with connecting rods, the two sides of the moving plate are rotationally connected with rotating rods, the inner walls of the rotating rods are provided with stirring mechanisms used for reducing concentrated stress, and the inner walls of the rotating rods are fixedly connected with connecting rods. According to the device, the elastic roller is driven by the connecting rod to rotate to pre-clamp a film, it is ensured that the detection result is based on the tensile property of a sample, and the overall detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film detection devices, and in particular to a semiconductor thin film uniformity detection device. Background Art

[0002] As an inorganic non-metallic material with excellent performance, thin films are widely used in many fields such as aerospace, automobile manufacturing, construction engineering and electronic equipment because of their high strength, high modulus, low density and good chemical stability.

[0003] The patent application number 202010767963.X relates to a tensile strength testing device for the production of light-transmitting and heat-insulating films based on energy-saving buildings, which particularly includes a base, two parallel support rods arranged perpendicular to the base, a movable crossbeam arranged between the two parallel support rods, a driving member for driving the crossbeam to slide along the support rods, and a detector for detecting the tensile strength of the electronic cloth. The electronic cloth tensile film testing device also includes a bottom plate arranged parallel to the two parallel support rods, a lower clamping member for clamping the electronic cloth, and an upper clamping member for clamping the electronic cloth; the bottom plate The surface of the device is provided with a marking line parallel to the support rod, the upper clamping part and the lower clamping part are respectively located at the two ends of the marking line, the upper clamping part is fixedly connected to the crossbeam, and the lower clamping part is fixedly connected to the base, and the electronic cloth is clamped between the upper clamping part and the lower clamping part. Its advantage is that it can reduce the operating difficulty of the detector and improve the detection accuracy of the detector. However, when the device clamps the film, the film is prone to slipping, resulting in low clamping stability and prone to safety hazards during detection. Therefore, a semiconductor thin film uniformity detection device is proposed to solve the above-mentioned problems. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a semiconductor thin film uniformity detection device in view of the above-mentioned deficiencies in the prior art.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a semiconductor thin film uniformity detection device, including a base plate, the top of the base plate is fixedly connected to a fixed column, the top of the fixed column is fixedly connected to a fixed plate, the inner wall of the fixed plate is fixedly connected to a connecting plate, the inner wall of the connecting plate is installed with an electric clamping block, auxiliary mechanisms for auxiliary detection are provided on both sides of the electric clamping block, a lifting device is installed on the inner wall of the base plate, a movable plate is installed on the circumferential surface of the lifting device, an electric telescopic rod is installed on the inner wall of the movable plate, a positioning block is fixedly connected to the inner wall of the positioning block, a clamping claw is rotatably connected to the clamping claw by a torsion spring, and connecting rods are rotatably connected to the two sides of the movable plate. The rotating rods are The inner wall of the rotating rod is provided with a toggle mechanism for reducing concentrated stress, and the inner wall of the rotating rod is fixedly connected to a connecting rod, and the inner wall of the rotating rod is rotatably connected to an elastic roller, and the rotating rod is driven to rotate through the hinge point by the movement of the connecting rod, and the rotation of the rotating rod drives the elastic roller to rotate, thereby pre-clamping the film undergoing tensile test, ensuring that the test result is based on the tensile performance of the sample itself, rather than premature fracture caused by clamping damage, saving time and improving overall test efficiency. The bottom of the bottom plate is fixedly connected to the main control box; the inner wall of the fixed plate contacts the circumferential surface of the lifting device, and the top of the electric telescopic rod is hinged to both sides of the clamping claw; the outer surface of the clamping claw contacts the inner wall of the movable plate, and the connecting rod is hinged to the inner wall of the rotating rod. Preferably, the toggle mechanism includes a reciprocating screw, each of which is fixedly connected to a roller second at both ends of the reciprocating screw, and a toggle piece movably connected to the circumferential surface of the reciprocating screw, and the two sides of the elastic roller are fixedly connected to roller one. While pre-clamping the film, the toggle piece is driven by the rotation of the elastic roller to drive the toggle piece to move back and forth to toggle the film, thereby avoiding the phenomenon that the wire thread will be entangled during detection, and at the same time, eliminating the concentrated stress between the films, making the detection more accurate, making the detection of the equipment more stable, and improving the overall working efficiency; the bottom of the movable plate is fixedly connected to a fixed block one, the inner wall of the fixed block one is hinged with a telescopic hinge rod, the inner wall of the bottom plate is slidably connected to a push plate, and the top of the push plate The part is fixedly connected with a fixed block 2, which pre-clamps the film and drives the toggle piece to move back and forth by rotating the elastic roller to toggle the film, thereby avoiding the phenomenon of silk thread being entangled during detection and eliminating the concentrated stress between the films, making the detection more accurate, making the detection of the equipment more stable, and improving the overall work efficiency; the reciprocating screw is rotatably connected to the inner wall of the rotating rod, the side of the roller 1 close to the elastic roller contacts the rotating rod, the side of the roller 2 close to the elastic roller contacts the rotating rod, the inner wall of the toggle piece contacts the circumferential surface of the connecting rod, the inner wall of the toggle piece contacts the circumferential surface of the elastic roller, and the bottom of the telescopic hinged rod is hinged to the inner wall of the fixed block 2.

[0006] Preferably, the auxiliary mechanism includes a two-way threaded rod, the front and rear ends of the two-way threaded rod are fixedly connected to pulleys, the circumferential surface of the two-way threaded rod is threadedly connected to a scraper, and when the push plate is cleaning the top of the bottom plate, the push plate moves to drive the scraper to gather towards the middle, thereby gathering and cleaning the waste, saving the cleaning time of the staff and extending the service life of the equipment. The scraping platform can eliminate such interference factors, ensure that the test results truly reflect the tensile strength of the film, and improve the stability of the equipment. The two sides of the electric clamp are fixedly connected to fixed blocks three, and the inner wall of the fixed block three A buckle is rotatably connected through a torsion spring, and clamping plates are fixedly connected on both sides of the electric clamping block. While clamping the top of the film, the electric clamping block is limited and reinforced by the clamping plate and the buckle to avoid loosening of the film during clamping, thereby improving the stability of the detection, ensuring the safety of the staff during detection, speeding up the detection process, and improving the detection efficiency; the circumferential surface of the bidirectional threaded rod is rotatably connected to the inner wall of the push plate, the pulley contacts the front and rear sides of the push plate, the bottom of the scraper contacts the top of the base plate, the scraper contacts the inner wall of the push plate, and the buckle contacts both sides of the electric clamping block.

[0007] The present invention adopts the above technical solution, which can bring the following beneficial effects: 1. A semiconductor thin film uniformity detection device, through the coordinated operation among a base plate, a fixed column, a fixed plate, a lifting device, a movable plate, an electric clamping block, an electric telescopic rod, a clamping claw, a connecting rod, a rotating rod, an elastic roller, a connecting rod, a main control box, a positioning block, and a connecting plate, moves the connecting rod to drive the rotating rod to rotate through the hinge point, and the rotating rod rotates to drive the elastic roller to rotate, thereby pre-clamping the film undergoing tensile testing, ensuring that the test result is based on the uniform tensile strength of the sample itself, rather than premature fracture due to clamping damage, saving time and improving overall detection efficiency.

[0008] 2. This semiconductor thin film uniformity detection device, through the coordinated operation between roller 1, reciprocating screw, roller 2, and the toggle plate, pre-clamps the film while rotating the elastic roller to drive the toggle plate to move back and forth to toggle the film, thereby avoiding the entanglement of the wire during detection and eliminating the concentrated stress between the films, making the detection more accurate, making the detection of the equipment more stable, and improving the overall work efficiency.

[0009] 3. This semiconductor thin film uniformity detection device, through the coordinated operation between fixed block 1, telescopic hinge rod, fixed block 2, and push plate, pre-clamps the film while rotating the elastic roller to drive the paddle plate to move back and forth to paddle the film, thereby avoiding the phenomenon of silk thread getting entangled during detection and eliminating the concentrated stress between the films, making the detection more accurate, making the detection of the equipment more stable, and improving the overall work efficiency.

[0010] 4. This semiconductor thin film uniformity detection device works through the coordinated operation of a bidirectional threaded rod, a pulley, and a scraper. While the push plate is cleaning the top of the bottom plate, the push plate moves and drives the scraper to gather toward the middle, thereby gathering and cleaning the waste, saving the staff's cleaning time and extending the service life of the equipment. The scraping platform can eliminate such interference factors, ensure that the test results truly reflect the tensile strength of the film, and improve the stability of the equipment.

[0011] 5. This semiconductor thin film uniformity detection device, through the coordinated operation between the fixed block three, the clip and the clamping plate, clamps the top of the film while limiting and reinforcing the electric clamping block through the clamping plate and the clip, to avoid the film from loosening during clamping, improve the stability of the detection, ensure the safety of the staff during the detection, speed up the detection process, and improve the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the movable plate structure of the present invention; Figure 3 For the present invention Figure 2 A magnified view of the structure at center A; Figure 4 For the present invention Figure 2 A magnified view of the structure at point B in the middle; Figure 5 This is a structural diagram of the toggle piece of the present invention; Figure 6 This is a schematic diagram of the push plate structure of the present invention; Figure 7 This is a schematic diagram of the scraper structure of the present invention; Figure 8 It is a schematic diagram of the card board structure of the present invention.

[0013] In the figure: 1. Base plate; 2. Fixed column; 3. Fixed plate; 4. Lifting device; 5. Moving plate; 6. Toggle mechanism; 61. Roller 1; 62. Reciprocating screw; 63. Roller 2; 64. Toggle piece; 65. Fixed block 1; 66. Telescopic hinge rod; 67. Fixed block 2; 68. Push plate; 7. Auxiliary mechanism; 71. Bidirectional threaded rod; 72. Pulley; 73. Scraper; 74. Fixed block 3; 75. Buckle; 76. Clamping plate; 8. Electric clamping block; 9. Electric telescopic rod; 10. Clamping claw; 11. Connecting rod; 12. Rotating rod; 13. Elastic roller; 14. Connecting rod; 15. Main control box; 16. Positioning block; 17. Connecting plate. DETAILED DESCRIPTION

[0014] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0015] See also Figure 1 - Figure 8One embodiment of the present invention is: a semiconductor film uniformity detection device, comprising a base plate 1, a fixed column 2 is fixedly connected to the top of the base plate 1, a fixed plate 3 is fixedly connected to the top of the fixed column 2, a connecting plate 17 is fixedly connected to the inner wall of the fixing plate 3, an electric clamping block 8 is installed on the inner wall of the connecting plate 17, and auxiliary mechanisms 7 for auxiliary detection are set on both sides of the electric clamping block 8, a lifting device 4 is installed on the inner wall of the base plate 1, a movable plate 5 is installed on the circumferential surface of the lifting device 4, and an electric telescopic rod 9 is installed on the inner wall of the movable plate 5. The film is manually placed on the bottom wall by a worker. The connecting plate 17 is then opened, and the electric clamping block 8 is started through the main console to clamp the top of the film. When the top of the film is clamped, the bottom of the film is placed inside the movable plate 5. At this time, the electric telescopic rod 9 is started through the main console to start working. The electric telescopic rod 9 drives the clamping claws 10 to rotate through the top hinge point, so that the two clamping claws 10 are close to each other to clamp the bottom of the film, speeding up the detection process, improving the overall detection efficiency, reducing the possibility of accidents during detection, thereby improving the safety and reliability of the entire detection process, and moving the plate. 5 is fixedly connected to the inner wall of the positioning block 16, the inner wall of the positioning block 16 is rotatably connected to the clamping claw 10 through a torsion spring, the two sides of the clamping claw 10 are rotatably connected to the connecting rod 11, the two sides of the movable plate 5 are rotatably connected to the rotating rod 12, the inner wall of the rotating rod 12 is provided with a toggle mechanism 6 for reducing concentrated stress, the inner wall of the rotating rod 12 is fixedly connected to the connecting rod 14, the inner wall of the rotating rod 12 is rotatably connected to the elastic roller 13, the bottom of the bottom plate 1 is fixedly connected to the main control box 15, while clamping the film, the clamping claw 10 rotates and drives the connecting rod 11 to move through the hinge point, The connecting rod 11 moves through the hinge point to drive the rotating rod 12 to rotate, and the rotation of the rotating rod 12 drives the elastic roller 13 to rotate, thereby pre-clamping the film undergoing tensile testing, ensuring that the test result is based on the tensile performance of the sample itself, rather than premature fracture due to clamping damage, saving time and improving overall testing efficiency; the inner wall of the fixed plate 3 contacts the circumferential surface of the lifting device 4, and the top of the electric telescopic rod 9 is hinged to the two sides of the clamping claw 10; the outer surface of the clamping claw 10 contacts the inner wall of the movable plate 5, and the connecting rod 11 is hinged to the inner wall of the rotating rod 12.

[0016] The toggle mechanism 6 includes a reciprocating screw 62, both ends of the reciprocating screw 62 are fixedly connected to roller 2 63, the circumferential surface of the reciprocating screw 62 is movably connected to a toggle piece 64, and both sides of the elastic roller 13 are fixedly connected to roller 1 61. While pre-clamping the film, because the film is subjected to a tensile test, when the film is stretched, the film drives the elastic roller 13 to rotate through the contact surface, and the rotation of the elastic roller 13 drives the roller 1 61 to rotate, and the roller 1 61 rotates through the circumferential surface to contact the circumferential surface of the roller 2 63. , thereby driving the second roller 63 to rotate, the rotation of the second roller 63 drives the reciprocating screw 62 to rotate, and the reciprocating screw 62 rotates through the reciprocating slide groove on the circumferential surface to drive the paddle piece 64 to move back and forth to paddle the film, avoiding the phenomenon that the wire will be entangled during detection, and at the same time eliminating the concentrated stress between the films, making the detection more accurate, making the detection of the equipment more stable, and improving the overall work efficiency; the bottom of the movable plate 5 is fixedly connected to a fixed block 65, the inner wall of the fixed block 65 is hinged with a telescopic hinge rod 66, and the inner wall of the bottom plate 1 There is a push plate 68 in sliding connection, and the top of the push plate 68 is fixedly connected with a fixed block 2 67. When the film inspection is completed, the movable plate 5 will be reset and moved upward by the lifting device 4. At this time, the lifting device 4 moves to drive the fixed block 1 65 to move, and the fixed block 1 65 moves through the hinge point to drive the telescopic hinge rod 66 to move, and the telescopic hinge rod 66 moves through the hinge point to drive the fixed block 2 67 to move, and the fixed block 2 67 moves to drive the push plate 68 to move, thereby cleaning the waste on the top of the bottom plate 1 to avoid the accumulation of waste and affecting the normal operation of the equipment. The reciprocating screw 62 is rotatably connected to the inner wall of the rotating rod 12, the side of the roller 161 close to the elastic roller 13 is in contact with the rotating rod 12, the side of the roller 2 63 close to the elastic roller 13 is in contact with the rotating rod 12, the inner wall of the toggle piece 64 is in contact with the circumferential surface of the connecting rod 14, the inner wall of the toggle piece 64 is in contact with the circumferential surface of the elastic roller 13, and the bottom of the telescopic hinged rod 66 is hinged to the inner wall of the fixed block 2 67.

[0017] Working principle: When the device is testing the film, the staff manually places the film into the connecting plate 17, and then starts the electric clamping block 8 through the main console to clamp the top of the film. When the top of the film is clamped, the bottom of the film is placed inside the movable plate 5. At this time, the electric telescopic rod 9 is started through the main console to start working. The electric telescopic rod 9 drives the clamping claws 10 to rotate through the top hinge point, so that the two clamping claws 10 are close to each other to clamp the bottom of the film, speeding up the detection process, improving the overall detection efficiency, and reducing the possibility of accidents during the detection, thereby improving the safety and reliability of the entire detection process. While clamping the film, the clamping claws 10 rotate through the hinge point to drive the connecting rod 11 to move, and the connecting rod 11 moves through the hinge point to drive the rotating rod 12 to rotate. The rotating rod 12 rotates and drives the elastic roller 13 to rotate, thereby pre-clamping the film undergoing tensile testing to ensure that the test results are based on the tensile properties of the sample itself, rather than premature fracture due to clamping damage, saving time and improving overall detection efficiency.

[0018] While the film is pre-clamped, because the film is subjected to a tensile test, when the film is stretched, the film drives the elastic roller 13 to rotate through the contact surface, and the rotation of the elastic roller 13 drives the roller 1 61 to rotate, and the rotation of the roller 1 61 contacts the circumferential surface of the roller 2 63 through the circumferential surface, thereby driving the roller 2 63 to rotate, and the rotation of the roller 2 63 drives the reciprocating screw 62 to rotate, and the reciprocating screw 62 rotates through the reciprocating groove of the circumferential surface to drive the paddle 64 to move back and forth to paddle the film, thereby avoiding the phenomenon of the silk thread being entangled during the detection, and at the same time eliminating the concentrated stress between the films, making the detection more accurate. , making the equipment's detection more stable and improving the overall work efficiency. When the film detection is completed, the movable plate 5 will be reset and moved up through the lifting device 4. At this time, the lifting device 4 moves to drive the fixed block 1 65 to move, and the fixed block 1 65 moves through the hinge point to drive the telescopic hinge rod 66 to move, and the telescopic hinge rod 66 moves through the hinge point to drive the fixed block 2 67 to move, and the fixed block 2 67 moves to drive the push plate 68 to move, thereby cleaning the waste on the top of the bottom plate 1 to avoid the accumulation of waste, which affects the normal operation of the equipment, and also protects the flatness and smoothness of the platform surface, extending the service life of the detection platform, and improving the overall stability of the equipment.

[0019] See also Figure 1 - Figure 8The two ends of the double-threaded rod 71 are fixedly connected to the pulley 72 at the front and rear ends of the double-threaded rod 71. The circumferential surface of the double-threaded rod 71 is threadedly connected to the scraper 73. When the push plate 68 cleans the top of the bottom plate 1, the push plate 68 moves to drive the double-threaded rod 71 to move, and the double-threaded rod 71 drives the pulley 72 to move. The pulley 72 moves through the circumferential surface and contacts with the top of the bottom plate 1, thereby driving the pulley 72 to rotate. The rotation of the pulley 72 drives the double-threaded rod 71 to rotate. The rotation of the double-threaded rod 71 drives the scraper 73 to gather towards the middle through the thread groove, thereby gathering and cleaning the waste, saving the cleaning time of the staff and extending the service life of the equipment. The scraping platform can eliminate such interference factors, ensure that the test results truly reflect the tensile strength of the film, and improve the stability of the equipment. When the locking cam 75 is in the unlocked position, the locking cam 76 is in the unlocked position, and the locking cam 76 is in the unlocked position, so that the locking cam 76 is locked and the locking cam 76 is locked.

[0020] Working principle: When the push plate 68 is cleaning the top of the bottom plate 1, the push plate 68 moves to drive the two-way threaded rod 71 to move, and the two-way threaded rod 71 drives the pulley 72 to move. The pulley 72 moves through the circumferential surface and contacts the top of the bottom plate 1, thereby driving the pulley 72 to rotate. The rotation of the pulley 72 drives the two-way threaded rod 71 to rotate. The rotation of the two-way threaded rod 71 drives the scraper 73 to gather toward the middle through the thread groove, thereby gathering and cleaning the waste, saving the cleaning time of the staff and extending the service life of the equipment. The scraping platform can eliminate such interference factors and ensure the detection The results truly reflect the tensile strength of the film and improve the stability of the equipment. While clamping the top of the film, the rear electric clamp 8 drives the fixed block three 74 to move, and the movement of the fixed block three 74 drives the buckle 75 to move. At the same time, the right electric clamp 8 drives the card plate 76 to move, so that the card plate 76 moves through the inclined surface to drive the buckle 75 to rotate, and then resets it through the torsion spring, thereby limiting and reinforcing the electric clamp 8 to avoid loosening of the film during clamping, improving the stability of the detection, ensuring the safety of the staff during detection, and speeding up the detection process and improving the detection efficiency.

[0021] The present invention provides a semiconductor thin film uniformity detection device. There are numerous methods and approaches for implementing this technical solution. The above is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also within the scope of protection of the present invention. Any components not specified in this embodiment may be implemented using existing technologies.

Claims

1. A semiconductor thin film uniformity detection device, comprising a base plate (1), characterized in that: The top of the base plate (1) is fixedly connected to a fixed column (2), the top of the fixed column (2) is fixedly connected to a fixed plate (3), the inner wall of the fixed plate (3) is fixedly connected to a connecting plate (17), the inner wall of the connecting plate (17) is installed with an electric clamping block (8), and auxiliary mechanisms (7) for auxiliary detection are provided on both sides of the electric clamping block (8), the inner wall of the base plate (1) is installed with a lifting device (4), the circumferential surface of the lifting device (4) is installed with a movable plate (5), the inner wall of the movable plate (5) is installed with an electric telescopic rod (9), and the movable plate (5) is installed with an electric telescopic rod (9). The inner wall of the base plate (1) is fixedly connected to a positioning block (16), the inner wall of the positioning block (16) is rotatably connected to a clamping claw (10) via a torsion spring, both sides of the clamping claw (10) are rotatably connected to connecting rods (11), both sides of the movable plate (5) are rotatably connected to a rotating rod (12), the inner wall of the rotating rod (12) is provided with a toggle mechanism (6) for reducing concentrated stress, the inner wall of the rotating rod (12) is fixedly connected to a connecting rod (14), the inner wall of the rotating rod (12) is rotatably connected to an elastic roller (13), and the bottom of the base plate (1) is fixedly connected to a main control box (15).

2. The semiconductor thin film uniformity detection device according to claim 1, characterized in that: The inner wall of the fixing plate (3) contacts the circumferential surface of the lifting device (4), and the top of the electric telescopic rod (9) is hinged to both sides of the clamping claw (10).

3. The semiconductor thin film uniformity detection device according to claim 2, characterized in that: The outer surface of the clamping claw (10) contacts the inner wall of the movable plate (5), and the connecting rod (11) is hinged to the inner wall of the rotating rod (12).

4. The semiconductor thin film uniformity detection device according to claim 3, characterized in that: The toggle mechanism (6) includes a reciprocating screw (62), both ends of the reciprocating screw (62) are fixedly connected to roller 2 (63), the circumferential surface of the reciprocating screw (62) is movably connected to a toggle plate (64), and both sides of the elastic roller (13) are fixedly connected to roller 1 (61).

5. The semiconductor thin film uniformity detection device according to claim 4, characterized in that: The bottom of the movable plate (5) is fixedly connected to a fixed block 1 (65), the inner wall of the fixed block 1 (65) is hinged with a telescopic hinge rod (66), the inner wall of the bottom plate (1) is slidably connected to a push plate (68), and the top of the push plate (68) is fixedly connected to a fixed block 2 (67).

6. The semiconductor thin film uniformity detection device according to claim 5, characterized in that: The reciprocating screw (62) is rotatably connected to the inner wall of the rotating rod (12); the side of the roller 1 (61) close to the elastic roller (13) contacts the rotating rod (12); the side of the roller 2 (63) close to the elastic roller (13) contacts the rotating rod (12); the inner wall of the shifting piece (64) contacts the circumferential surface of the connecting rod (14); the inner wall of the shifting piece (64) contacts the circumferential surface of the elastic roller (13); and the bottom of the telescopic hinge rod (66) is hinged to the inner wall of the fixed block 2 (67).

7. The semiconductor thin film uniformity detection device according to claim 6, characterized in that: The auxiliary mechanism (7) includes a bidirectional threaded rod (71), the front and rear ends of the bidirectional threaded rod (71) are fixedly connected to pulleys (72), the circumferential surface of the bidirectional threaded rod (71) is threadedly connected to a scraper (73), both sides of the electric clamping block (8) are fixedly connected to fixed blocks three (74), the inner wall of the fixed block three (74) is rotatably connected to a buckle (75) through a torsion spring, and both sides of the electric clamping block (8) are fixedly connected to clamping plates (76).

8. The semiconductor thin film uniformity detection device according to claim 7, characterized in that: The circumferential surface of the bidirectional threaded rod (71) is rotatably connected to the inner wall of the push plate (68), the pulley (72) contacts the front and rear sides of the push plate (68), the bottom of the scraper (73) contacts the top of the bottom plate (1), the scraper (73) contacts the inner wall of the push plate (68), and the buckle (75) contacts both sides of the electric clamp (8).

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