Automatic washing process of 6-inch edge corrosion equipment for Hua blank cavity

Abstract

The invention discloses an automatic washing process for 6-inch edge corrosion equipment aiming at a hua blank cavity, and particularly relates to the technical field of material industry cleaning, which comprises the following steps: S1, rotary valves are respectively additionally arranged at the existing air inlet and vacuum hole of the hua blank cavity, and are connected with a water pipeline, the water pipeline is connected with a water pump, a flow meter and a pressure sensor, and the water pump is connected with a water pump; the water pump, the flow meter, the pressure sensor and the rotary valve are all in communication connection with the controller. The rotary valves and the waterway pipelines are additionally arranged at the air inlet hole and the vacuum hole of the blank cavity, and the water pump, the flow meter, the pressure sensor and the controller of the equipment are utilized, so that the automatic washing function is realized, the cavity does not need to be manually disassembled, the secondary damage risk caused by manual operation is avoided, and the production efficiency is improved. Compared with the prior art, time and energy required by disassembly, cleaning and reinstallation are remarkably reduced, the equipment maintenance cost is effectively reduced, meanwhile, equipment shutdown caused by manual cleaning is avoided, the production efficiency is greatly improved, and considerable economic benefits are brought.

Description

Technical Field

[0001] The present invention relates to the technical field of industrial cleaning, and in particular to an automatic water washing process for 6-inch edge corrosion equipment of a Huaying cavity. Background Art

[0002] In the field of semiconductor manufacturing, Huaying's 6-inch edge etching equipment, as one of the key processing equipment, has long faced a difficult problem in actual production applications. During the edge etching process, silicates will gradually form in the cavity corrosion groove. These silicates will continue to accumulate and adsorb on the outside of the edge. As production time goes by, the amount of silicate accumulation continues to increase. When it reaches a certain level, it will cause serious damage to the cavity and even affect the normal operation and service life of the equipment, becoming a key factor that plagues production efficiency and equipment maintenance.

[0003] To solve this problem, existing technologies mainly rely on manual periodic disassembly of the cavity for cleaning. However, this traditional manual cleaning method has many disadvantages. On the one hand, manual operation is cumbersome, time-consuming and labor-intensive, requiring professional maintenance personnel to spend a lot of time and energy to disassemble, clean and reinstall the cavity, resulting in long periods of equipment downtime, greatly reducing production efficiency. On the other hand, during the disassembly and installation process, due to human factors such as improper operation or improper use of tools, secondary damage to the cavity is likely to occur, further increasing the maintenance cost and damage risk of the equipment, and also bringing a heavy economic burden to the company. At the same time, the cleaning effect of manual cleaning is difficult to ensure consistency, and there are certain subjective differences and uncertainties, which cannot meet the strict requirements of modern semiconductor manufacturing for equipment cleanliness and stability.

[0004] Furthermore, the existing technology lacks a water-washing process that can achieve efficient, automated cleaning while avoiding manual intervention, reducing maintenance costs, and precisely controlling cleaning results. Therefore, for Huaying's 6-inch edge etching equipment, developing a process with automated water-washing capabilities to overcome the numerous shortcomings of existing manual cleaning methods has become a pressing technical challenge in this field, one with extremely important practical significance and application value. Summary of the Invention

[0005] The main purpose of the present invention is to provide an automatic water washing process for 6-inch edge corrosion equipment of Huaying cavity, which can effectively solve the problem of unstable wire performance caused by uneven process during the processing of multi-layer wrapped wires.

[0006] To achieve the above object, the technical solution adopted by the present invention is:

[0007] An automatic water washing process for 6-inch edge etching equipment of Huaying cavity includes the following steps:

[0008] S1. Install rotary valves at the existing air inlet and vacuum holes of the Huaying cavity, and connect water pipes. The water pipes are connected to a water pump, a flow meter, and a pressure sensor. The water pump, flow meter, pressure sensor, and rotary valve are all connected to the controller.

[0009] S2. When the cavity corrosion tank needs to be washed, create a new cleaning job in the equipment software interface and set the washing time and water flow rate parameters;

[0010] S3. The controller controls the rotary valve to open according to the cleaning job instruction, so that the water channel at the air inlet and the vacuum hole is conductive;

[0011] S4. The water pump delivers water into the cavity corrosion tank through the air inlet. The water flows in the cavity to flush the outside of the pressure edge, dissolving and flushing away the adsorbed silicate. The flow meter and pressure sensor monitor the flow rate and pressure of the water in real time and feed the data back to the controller.

[0012] S5. The controller adjusts the speed of the water pump and the opening of the rotary valve in real time according to the flow and pressure data to maintain the stability of the water flow;

[0013] S6. After the set washing time, the controller controls the rotary valve to close, stops the water pump, and the sewage in the cavity is discharged through the vacuum hole;

[0014] S7. After the sewage is drained, the drying system of the cavity is started to blow and dry the cavity until there is no residual water in the cavity;

[0015] S8. After drying is completed, the controller sends a cleaning completion signal and the equipment returns to normal production status.

[0016] Preferably, the rotary valve is a high-precision electromagnetic rotary valve, which can achieve rapid switching and opening under the precise control of the controller, ensuring timely opening and closing of the water channel.

[0017] Preferably, the water pipeline is made of corrosion-resistant, high-strength stainless steel, has good sealing performance, can withstand the impact of high-pressure water flow generated during the water washing process, and ensure the stable operation of the water washing process.

[0018] Preferably, the water pump is equipped with a variable frequency speed regulation device, which can accurately adjust the water flow speed and pressure according to different water washing needs based on the controller instructions, meet the requirements of diversified water washing processes, and at the same time have overcurrent and overpressure protection functions.

[0019] Preferably, the flow meter adopts a high-precision electromagnetic flow meter, which can monitor the flow rate of water during the water washing process in real time and transmit the flow data to the controller in real time in the form of a digital signal. The controller accurately adjusts the water pump according to the preset flow range to ensure the efficiency and stability of the water washing process.

[0020] Preferably, the pressure sensor is a high-sensitivity piezoresistive pressure sensor, which is installed in a key position of the water pipeline. It can monitor the changes in water flow pressure in real time and promptly feed back the pressure signal to the controller. When the pressure exceeds the set safety range, the controller immediately issues an alarm and takes corresponding protective measures to prevent damage to the cavity and equipment due to abnormal pressure.

[0021] Preferably, the controller has a built-in control program that combines advanced fuzzy control algorithm and PID control algorithm, which can dynamically and accurately adjust the water pump speed, rotary valve opening, etc. according to the real-time data feedback from the flow meter and pressure sensor, thereby realizing refined control of the water washing process and improving the consistency and stability of the water washing effect.

[0022] Preferably, in step S4, after the water flows into the cavity from the air inlet, a circular flow is formed in the cavity to fully flush the corrosion grooves in the cavity to ensure that the silicate is fully dissolved and removed.

[0023] Preferably, in step S7, the drying system adopts a multi-stage drying process, first using a high-power heating device to quickly remove most of the moisture in the cavity, and then completely removes the residual moisture in the cavity by combining low-power continuous heating with dry gas purging to ensure the drying effect. The drying process is precisely controlled by the controller with time and temperature parameters to ensure that the cavity is dried evenly and thoroughly, and to prevent equipment failure due to insufficient drying.

[0024] Preferably, the automatic water washing process has intelligent diagnosis and early warning functions. The controller can analyze the water flow rate, pressure changes, and water washing time data during the water washing process in real time, detect abnormal data and potential fault hazards, and immediately issue an audible and visual alarm signal. The specific fault location and cause are displayed on the equipment display screen, and the water washing operation is automatically stopped.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] 1. The present invention realizes automatic water washing function by installing rotary valves and connecting water pipes at the air inlet and vacuum holes on the Huaying cavity body, and using the equipment's own water pump, flow meter, pressure sensor and controller. There is no need to manually disassemble the cavity, avoiding the risk of secondary damage caused by manual operation, significantly reducing the time and energy spent by professional maintenance personnel on disassembling, cleaning and reinstalling the cavity, effectively reducing the maintenance cost of the equipment, and avoiding long-term equipment shutdown caused by manual cleaning, greatly improving production efficiency, and bringing considerable economic benefits to the enterprise.

[0027] 2. The present invention uses a water pump to deliver water into the cavity corrosion groove through the air inlet. The water forms a circulation in the cavity to flush the outside of the pressure edge, and the controller adjusts the water pump speed and the rotary valve opening in real time according to the flow and pressure data to achieve an efficient and thorough cleaning effect. By utilizing the dissolving effect of water and the flushing force of the water flow, combined with the circulation design of the water flow in the cavity, the cavity corrosion groove can be fully flushed, and silicates adsorbed on the outside of the pressure edge can be efficiently removed, effectively preventing damage to the cavity due to silicate accumulation, thereby extending the service life of the equipment and improving the reliability and stability of the equipment.

[0028] 3. The present invention uses a high-precision electromagnetic flowmeter to monitor the water flow rate in real time, and a high-sensitivity piezoresistive pressure sensor to monitor the water flow pressure in real time, and feeds back the data to a controller with a built-in fuzzy control algorithm combined with a PID control algorithm to achieve refined control of the water washing process. The controller dynamically and accurately adjusts the water pump speed, rotary valve opening, etc. according to the preset flow and pressure range to ensure the consistency and stability of the water washing effect each time, avoids fluctuations in cleaning effects caused by factors such as different operators or operator fatigue during manual cleaning, meets the strict requirements of modern semiconductor manufacturing for equipment cleanliness and stability, and helps to improve product quality and yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a partial flow diagram of the present invention;

[0030] Figure 2 It is a detection analysis diagram of the present invention;

[0031] Figure 3 It is a schematic diagram of the decision of the present invention;

[0032] Figure 4 This is the overall cleaning flow chart of the present invention;

[0033] Figure 5 It is a road map for water washing of the present invention. DETAILED DESCRIPTION

[0034] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0035] For example 1, please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 and Figure 5 As shown, an automatic water washing process for the 6-inch edge etching equipment of Huaying cavity includes the following steps:

[0036] S1. Install rotary valves at the existing air inlet and vacuum holes of the Huaying cavity, and connect them to water pipes. The water pipes are connected to the water pump, flow meter, and pressure sensor. The water pump, flow meter, pressure sensor, and rotary valve are all connected to the controller.

[0037] S2. When the cavity corrosion tank needs to be washed, create a new cleaning job in the equipment software interface and set the washing time and water flow rate parameters;

[0038] S3. The controller controls the rotary valve to open according to the cleaning job instruction, so that the water channel at the air inlet and vacuum hole is conductive;

[0039] S4. The water pump delivers water into the cavity corrosion tank through the air inlet. The water flows on the outside of the pressure edge in the cavity, dissolving and washing away the adsorbed silicates. The flow meter and pressure sensor monitor the flow rate and pressure of the water in real time and feed the data back to the controller.

[0040] S5. The controller adjusts the speed of the water pump and the opening of the rotary valve in real time according to the flow and pressure data to maintain the stability of the water flow;

[0041] S6. After the set washing time, the controller controls the rotary valve to close, stops the water pump, and the sewage in the cavity is discharged through the vacuum hole;

[0042] S7. After the sewage is drained, the drying system of the cavity is started to blow and dry the cavity until there is no residual water in the cavity;

[0043] S8. After drying is completed, the controller sends a cleaning completion signal and the equipment returns to normal production status.

[0044] Example 2: This example further explains the implementation of this solution based on Example 1. Rotary valves are respectively installed at the air inlet and vacuum hole of the cavity and connected to the water pipes. The water pump, flow meter, pressure sensor and other equipment are communicated with the controller to form a complete automatic water washing system. When water washing is required, a cleaning job is created and parameters are set in the software interface. After receiving the command, the controller opens the rotary valve to make the water channel conductive. The water pump sends water into the corrosion tank of the cavity. The water flow flushes the outside of the pressure edge to dissolve and wash away the silicate. At the same time, the flow meter and pressure sensor monitor the water flow data in real time and feed it back to the controller. The controller dynamically adjusts the water pump speed and the rotary valve opening according to these data to maintain a stable water flow. After the set water washing time is reached, the controller closes the rotary valve and stops the water pump. The sewage is discharged from the cavity through the vacuum hole. The drying system is then started to blow and dry the cavity until there is no residual moisture. Finally, the controller sends a cleaning completion signal, and the equipment returns to normal production.

[0045] Through this automatic water washing process, first of all, an automated cleaning process is realized, without the need for manual disassembly of the cavity, effectively avoiding the risk of secondary damage caused by manual operation, greatly reducing the workload of maintenance personnel and equipment downtime, reducing maintenance costs and significantly improving production efficiency. Secondly, the scouring force and dissolution effect of the water flow are used to efficiently remove the silicate in the cavity corrosion tank. At the same time, with the help of the controller's precise control of the water flow, the stability of the cleaning process and the consistency of the cleaning effect are guaranteed, the service life of the equipment is extended and the product quality and yield rate are improved. Furthermore, the process has intelligent diagnosis and early warning functions. The controller can monitor various data in the water washing process in real time. Once an abnormality is found, it can issue an alarm and take protective measures in time, effectively ensuring the safe and stable operation of the equipment, reducing the risk of equipment damage and maintenance costs, and providing reliable equipment support for semiconductor manufacturing.

[0046] The rotary valve is a high-precision electromagnetic rotary valve that can achieve rapid switching and opening under the precise control of the controller, ensuring timely conduction and closing of the water channel.

[0047] A high-precision electromagnetic rotary valve is installed at the air inlet and vacuum port of the cavity. Under the precise control of the controller, the rotary valve can achieve rapid switching and opening. When the controller issues a water washing command, the rotary valve opens quickly, connecting the water pipe with the water channel inside the cavity, allowing water to smoothly enter the cavity corrosion tank for flushing and cleaning. When the water washing process is completed or the water flow needs to be stopped, the rotary valve can be closed in time to cut off the water channel, ensuring that the water flow in the cavity can circulate and be discharged according to the predetermined program, thereby achieving efficient and automatic water washing of the cavity corrosion tank.

[0048] By using high-precision electromagnetic rotary valves, the automated water washing process achieves precise control of the water path, ensuring timely on and off flow, avoiding leaks or interruptions, and improving the stability and reliability of the washing process. Its rapid switching and opening capabilities enable responsive washing operations, shortening equipment downtime and increasing production efficiency. Furthermore, the rotary valve's high-precision control helps maintain water flow stability, ensuring consistent cleaning results, further extending equipment life and improving product quality and yield, providing efficient and reliable equipment support for the semiconductor manufacturing process.

[0049] The water pipeline is made of corrosion-resistant, high-strength stainless steel with good sealing performance. It can withstand the impact of high-pressure water flow generated during the water washing process, ensuring the stable operation of the water washing process.

[0050] The water pipe system in the automatic water washing process of Huaying's 6-inch cavity edge corrosion equipment is based on corrosion-resistant, high-strength stainless steel to build a channel for water flow inside the equipment. With its excellent sealing performance, during the water washing process, even in the face of the impact of high-pressure water flow, the pipe can maintain a stable operating state, ensuring that water flows smoothly from the water pump through the air inlet into the cavity corrosion tank, flushing the outside of the pressure edge without hindrance, dissolving and washing away silicates. At the same time, key data such as water pressure and flow can be accurately transmitted to the flow meter and pressure sensor, thereby providing reliable data support for the controller, realizing precise control of the water pump and rotary valve, and ensuring the efficient operation of the water washing process;

[0051] The water pipeline is made of corrosion-resistant, high-strength stainless steel with excellent sealing and stability. It can effectively withstand the impact of high-pressure water flow during the washing process, ensuring the continuity and reliability of the washing process, thereby improving the washing efficiency and quality. Its stable water flow transmission capacity is conducive to the precise monitoring and control of water flow parameters, ensuring the stability and consistency of the entire washing process. In addition, the pipes made of this material have a long service life, reducing the frequency of repairs and replacements due to pipe damage, reducing the maintenance cost of the equipment, and providing a strong guarantee for the long-term stable operation of the equipment, indirectly improving production efficiency and economic benefits.

[0052] The water pump is equipped with a variable frequency speed regulation device, which can accurately adjust the water flow speed and pressure according to different water washing needs based on the controller instructions to meet the requirements of diverse water washing processes, and at the same time has overcurrent and overpressure protection functions; the flow meter uses a high-precision electromagnetic flow meter, which can monitor the water flow rate during the water washing process in real time, and transmit the flow data in real time to the controller in the form of a digital signal. The controller accurately controls the water pump according to the preset flow range to ensure the efficiency and stability of the water washing process.

[0053] In the automatic water washing process of Huaying's 6-inch cavity edge corrosion equipment, the flow meter and water pump work together to ensure precise water flow control. The high-precision electromagnetic flow meter monitors the water flow rate during water washing in real time and transmits the data to the controller as a digital signal. The controller accurately controls the water pump speed based on the preset flow range through the frequency conversion speed regulation device, and accurately adjusts the water flow rate and pressure according to the water washing requirements. At the same time, the water pump's overcurrent and overpressure protection functions effectively prevent water pump failure and damage, ensuring an efficient and stable water washing process.

[0054] The coordinated regulation of the flow meter and the water pump enables precise control of the water washing process, improves cleaning efficiency and quality, and ensures the stability and consistency of the cleaning effect. The overcurrent and overpressure protection functions of the water pump enhance the reliability of equipment operation, reduce the risk of equipment failure, and lower maintenance costs. The system can flexibly adjust water flow parameters according to different water washing needs, meet diverse process requirements, and improve the applicability and flexibility of the equipment.

[0055] The pressure sensor is a high-sensitivity piezoresistive pressure sensor installed in key locations of water pipes. It can monitor changes in water pressure in real time and promptly feed back pressure signals to the controller. When the pressure exceeds the set safety range, the controller immediately issues an alarm and takes corresponding protective measures to prevent damage to the cavity and equipment due to abnormal pressure.

[0056] The controller has a built-in control program that combines advanced fuzzy control algorithms with PID control algorithms. It can dynamically and accurately adjust the water pump speed, rotary valve opening, etc. according to the real-time data feedback from the flow meter and pressure sensor, thereby achieving refined control of the water washing process and improving the consistency and stability of the water washing effect.

[0057] In the automatic water washing process of Huaying's 6-inch cavity edge corrosion equipment, highly sensitive piezoresistive pressure sensors are installed at key locations in the water pipeline to monitor water pressure changes in real time and quickly feed back pressure signals to the controller. The controller uses a program that combines fuzzy control algorithms with PID control algorithms. Based on the data transmitted by the flow meter and pressure sensor, it dynamically and accurately adjusts the water pump speed and rotary valve opening to achieve refined control of the water washing process. When the pressure exceeds the preset safety range, the controller immediately triggers an alarm and takes protective measures, such as adjusting the water pump speed or closing the rotary valve, to prevent abnormal pressure from damaging the cavity and equipment, ensuring the efficiency and stability of the water washing process.

[0058] Through the synergistic effect of highly sensitive piezoresistive pressure sensors and advanced control algorithms, this process can monitor and finely control the pressure and flow rate during the water washing process in real time, ensuring the consistency and stability of the water washing effect and significantly improving the cleaning quality. At the same time, timely alarms and protective measures in the event of pressure abnormalities effectively avoid damage to the equipment due to pressure problems, enhance the reliability and safety of equipment operation, and reduce maintenance costs and the risk of equipment failure. In addition, this precise control reduces the waste of water resources and energy, improves production efficiency, and provides efficient and stable equipment support for the semiconductor manufacturing process.

[0059] In step S4, after the water flows into the cavity from the air inlet, a circulation is formed in the cavity, which comprehensively flushes the corrosion grooves in the cavity to ensure the full dissolution and removal of silicates. In step S7, the drying system adopts a multi-stage drying process, first using a high-power heating device to quickly remove most of the moisture in the cavity, and then combining low-power continuous heating with dry gas purging to completely remove the residual moisture in the cavity to ensure the drying effect. The drying process is precisely controlled by the controller in terms of time and temperature parameters to ensure that the cavity is dried evenly and thoroughly, and to prevent equipment failure due to insufficient drying.

[0060] In step S4 of the automatic water washing process for Huaying's 6-inch cavity edge etching equipment, water flows into the cavity through the air inlet, forming a circulation flow within the cavity, fully flushing the cavity corrosion grooves to ensure the complete dissolution and removal of silicates. In step S7, the drying system adopts a multi-stage drying process, first using a high-power heating device to quickly remove most of the moisture in the cavity, and then combining low-power continuous heating with dry gas purging to completely remove any residual moisture in the cavity. The entire drying process is precisely controlled by a controller with time and temperature parameters to ensure uniform and thorough drying of the cavity, effectively preventing equipment failures caused by insufficient drying.

[0061] The water forms a circulation in the cavity, achieving all-round flushing of the cavity corrosion groove, significantly improving the cleaning effect, and ensuring the thorough removal of silicates. The multi-stage drying process first uses high-power heating to quickly remove most of the moisture, and then combines low-power heating with dry gas purging to completely remove residual moisture and ensure the drying effect. The controller's precise control of the drying process ensures the uniformity and thoroughness of the cavity drying, effectively avoiding equipment failures caused by insufficient drying, extending equipment service life, improving production efficiency and product quality, and providing reliable equipment support for the semiconductor manufacturing process.

[0062] This automatic water washing process has intelligent diagnosis and early warning functions. The controller can analyze the water flow, pressure changes, and water washing time data during the water washing process in real time, detect abnormal data and potential fault hazards, and immediately issue an audible and visual alarm signal. The specific fault location and cause are displayed on the equipment display, and the water washing operation is automatically stopped.

[0063] By real-time monitoring of data such as water flow, pressure changes, and water washing time, anomalies and hidden dangers can be quickly detected. At this time, the system immediately issues an audible and visual alarm, displays the fault location and cause, and automatically terminates the water washing operation, effectively preventing equipment damage, ensuring personnel safety, reducing maintenance costs, and ensuring stable and reliable equipment operation.

[0064] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic water washing process for 6-inch edge corrosion equipment of Huaying cavity, characterized by: The following steps are involved: S1. Install rotary valves at the existing air inlet and vacuum holes of the Huaying cavity, and connect water pipes. The water pipes are connected to a water pump, a flow meter, and a pressure sensor. The water pump, flow meter, pressure sensor, and rotary valve are all connected to the controller. S2. When the cavity corrosion tank needs to be washed, create a new cleaning job in the equipment software interface and set the washing time and water flow rate parameters; S3. The controller controls the rotary valve to open according to the cleaning job instruction, so that the water channel at the air inlet and the vacuum hole is conductive; S4. The water pump delivers water into the cavity corrosion tank through the air inlet. The water flows in the cavity to flush the outside of the pressure edge, dissolving and flushing away the adsorbed silicate. The flow meter and pressure sensor monitor the flow rate and pressure of the water in real time and feed the data back to the controller. S5. The controller adjusts the speed of the water pump and the opening of the rotary valve in real time according to the flow and pressure data to maintain the stability of the water flow; S6. After the set washing time, the controller controls the rotary valve to close, stops the water pump, and the sewage in the cavity is discharged through the vacuum hole; S7. After the sewage is drained, the drying system of the cavity is started to blow and dry the cavity until there is no residual water in the cavity; S8. After drying is completed, the controller sends a cleaning completion signal and the equipment returns to normal production status.

2. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: The rotary valve is a high-precision electromagnetic rotary valve that can achieve rapid switching and opening under the precise control of the controller, ensuring timely opening and closing of the water channel.

3. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: The water pipeline is made of corrosion-resistant, high-strength stainless steel, has good sealing performance, can withstand the impact of high-pressure water flow generated during the water washing process, and ensure the stable operation of the water washing process.

4. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: The water pump is equipped with a variable frequency speed regulation device, which can accurately adjust the water flow speed and pressure according to different water washing needs based on the controller instructions to meet the requirements of diverse water washing processes, and at the same time has overcurrent and overpressure protection functions.

5. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: The flow meter uses a high-precision electromagnetic flow meter, which can monitor the flow rate of water during the water washing process in real time and transmit the flow data to the controller in real time in the form of a digital signal. The controller accurately adjusts the water pump according to the preset flow range to ensure the efficiency and stability of the water washing process.

6. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: The pressure sensor is a high-sensitivity piezoresistive pressure sensor installed in key locations of water pipelines. It can monitor changes in water flow pressure in real time and promptly feed back pressure signals to the controller. When the pressure exceeds the set safety range, the controller immediately issues an alarm and takes corresponding protective measures to prevent damage to the cavity and equipment due to abnormal pressure.

7. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: The controller has a built-in control program that combines advanced fuzzy control algorithms with PID control algorithms. It can dynamically and accurately adjust the water pump speed, rotary valve opening, etc. according to the real-time data feedback from the flow meter and pressure sensor, thereby achieving refined control of the water washing process and improving the consistency and stability of the water washing effect.

8. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: In step S4, after the water flows into the cavity from the air inlet, a circular flow is formed in the cavity to fully flush the corrosion grooves in the cavity to ensure that the silicate is fully dissolved and removed.

9. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: In step S7, the drying system adopts a multi-stage drying process, first using a high-power heating device to quickly remove most of the moisture in the cavity, and then combining low-power continuous heating with dry gas purging to completely remove the residual moisture in the cavity to ensure the drying effect. The drying process is precisely controlled by the controller with time and temperature parameters to ensure that the cavity is dried evenly and thoroughly, and to prevent equipment failure due to insufficient drying.

10. The automatic water washing process for 6-inch edge etching equipment for Huaying cavity according to claim 1 is characterized by: This automatic water washing process has intelligent diagnosis and early warning functions. The controller can analyze the water flow, pressure changes, and water washing time data during the water washing process in real time, detect abnormal data and potential fault hazards, and immediately issue an audible and visual alarm signal. The specific fault location and cause are displayed on the equipment display, and the water washing operation is automatically stopped.

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