Wafer transmission equipment

Abstract

The invention discloses wafer transmission equipment which comprises a shell, the shell comprises a cleaning chamber in butt joint with a wafer loading device, a filter is arranged at the top of the cleaning chamber, a cover cap is connected to the filter in a pressing mode, and the wafer transmission equipment further comprises a lifting device used for lifting the cover cap. The lifting device comprises a pressure-bearing part, a connecting rod mechanism, a guide mechanism and a driving mechanism, the pressure-bearing part is fixed to the cover cap, the driving mechanism drives the pressure-bearing part to move up and down through the connecting rod mechanism, and the guide mechanism guides movement of the pressure-bearing part so that the pressure-bearing part can only move up and down. According to the wafer transmission equipment, the cover cap can be rapidly lifted through the lifting device, filter paper of all filters can be conveniently replaced, meanwhile, the cover cap can be tightly pressed, and the cleanliness of a cleaning cavity in the wafer transmission equipment is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer processing equipment, and in particular to a wafer transmission device. Background Art

[0002] Wafer transport equipment includes the front-end transport module (EFEM) and a wafer sorter. Both chambers are equipped with robotic arms for handling wafers. Since wafers are exposed inside the chamber during robotic handling, the chamber requires a high level of cleanliness to prevent contamination. To ensure the high cleanliness of the gas filtered by the EFEM, the EFEM receives pre-filtered gas from the semiconductor fab. The EFEM then finely filters the incoming gas, and the clean gas blown out from the EFEM flows evenly downward from the top of the chamber. This clean gas deposits particles in the chamber to the bottom while maintaining a positive pressure environment within the chamber, thus ensuring the cleanliness of the EFEM and sorter chambers.

[0003] The cavity space size of the wafer transfer equipment usually corresponds to the number of wafer loading devices (loadports). In order to facilitate the matching of the filtering equipment with the cavity space, multiple filtering devices are usually used in combination. When regularly replacing the filter paper, personnel need to stand at a high place and open the interface connecting the filter and the air intake pipe one by one. Therefore, replacing the filter element is not only time-consuming but also cumbersome. Summary of the Invention

[0004] In order to overcome the above shortcomings, the purpose of the present invention is to provide a wafer transfer equipment. The lifting device added to the equipment is convenient for single-person operation. The filter paper of all filters can be quickly replaced through the lifting device, and at the same time, the cover can be pressed tightly to ensure the cleanliness of the cleaning chamber in the wafer transfer equipment.

[0005] To achieve the above objectives, the present invention adopts a technical solution: a wafer transfer device, comprising a housing, the housing comprising a clean chamber docked with a wafer loading device, a filter provided on the top of the clean chamber, a cover press-fitted onto the filter, the wafer transfer device further comprising a lifting device for lifting the cover, the lifting device comprising: a pressure-bearing member fixed to the upper surface of the cover and provided with two members spaced apart along a first horizontal direction; two ends of the pressure-bearing member extending out of the cover along a second horizontal direction; a groove being formed in a portion of the pressure-bearing member extending out of the cover; The linkage mechanism comprises two groups of linkage assemblies spaced apart along a second direction, the linkage assembly comprising two first rocking links spaced apart along a first direction and a first link pivotally pivoted between the two first rocking links, the two linkage assemblies being linked by a second link fixed to the corresponding first rocking link, the first rocking link comprising a first portion and a second portion arranged up and down, a connection point between the first portion and the second portion being pivotally connected to a support fixed to the housing, an angle being formed between the second portion and a vertical plane, and the second portion being inclined toward the pressure-bearing member, a portion of the second portion being capable of being embedded in the groove body so that the first rocking link can press the pressure-bearing member upward or downward when the first rocking link swings, and a second rocking link being fixed to one of the first rocking links and swinging synchronously therewith; A guide mechanism, comprising a through hole provided on the support and a guide rod capable of moving up and down only along the through hole, wherein the guide rod is fixedly connected to the pressure-bearing member; The driving mechanism includes a screw rod extending along a first direction and a nut seat threadedly connected to the screw rod. When the nut seat moves along the first direction, it can push the first swing rod to swing through the second swing rod.

[0006] Furthermore, the lower end of the second swing arm is lower than the cover, the lower end of the second swing arm is pivotally connected to one end of a linkage rod, and the other end of the linkage rod is pivotally connected to the nut seat.

[0007] Furthermore, the linkage rod is always tilted, and one end of the linkage rod pivotally connected to the second rocker arm is tilted upward.

[0008] Furthermore, the first swing arm is located outside the cover in the second direction. Furthermore, the driving mechanism also includes a guide rail and a slider sliding along the guide rail, and the nut seat includes a fixedly connected nut body and a connecting frame, and the connecting frame is fixedly connected to the slider and pivotally connected to one end of the linkage rod. Furthermore, a connecting member fixedly connected to the two pressure-bearing members is provided between the two pressure-bearing members, and the connecting member is fixedly connected to the upper surface of the cover.

[0009] Furthermore, the portion of the second part that can be embedded in the trough body is connected to a roller, the roller and the trough body are in rolling connection, and gaskets that can abut against the roller are provided on the upper wall and the lower wall of the trough body.

[0010] Furthermore, the opening of the groove body faces the first direction, and the bottom of the groove body is provided with an opening for the roller portion to pass through.

[0011] Furthermore, a limiting plate located above the through hole is fixed on the guide rod, and the limiting plate can abut against the support to limit the downward position of the guide rod.

[0012] Furthermore, a plurality of wafer loading devices are evenly arranged along the first direction, the filters correspond to the wafer loading devices one by one, and the cover can be pressed tightly on all the filters. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A schematic diagram of the three-dimensional structure of an embodiment of the present invention; Figure 2 A side view of a lifting device according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the three-dimensional structure of the lifting device in an embodiment of the present invention; Figure 4 for Figure 2 Enlarged view of point A in the middle; Figure 5 for Figure 2 Enlarged view of point B in the middle; Figure 6 for Figure 3 Enlarged view of point C in the middle; Figure 7 for Figure 3 Enlarged view of point D in the middle; Figure 8 This is a schematic diagram of the connection between the cover and the connecting frame in an embodiment of the present invention; Figure 9 for Figure 8 Enlarged view of point E in the middle. DETAILED DESCRIPTION

[0014] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.

[0015] In each figure, left and right and front and back represent two mutually orthogonal horizontal directions, which are respectively a first direction of the horizontal plane and a second direction of the horizontal plane, and up and down directions are vertical directions.

[0016] A wafer transfer device of the present invention is shown in the attached Figure 1 As shown, the wafer transfer equipment comprises a housing 200, which includes a clean chamber docked with a wafer loader 300. A robot is located within the clean chamber, used to move wafers between the wafer loader 300 and the clean chamber. To maintain the cleanliness of the clean chamber, a filter 400 is installed at the top of the clean chamber, filtering external air before entering the clean chamber.

[0017] The wafer transfer equipment also includes a cover 1 crimped onto the filter 400. The cover 1 is provided with an air inlet pipe 11 corresponding to the filter 400, and external air enters the corresponding filter 400 through the air inlet pipe 11. The lower surface of the cover 1 is provided with a sealing ring 12 that can seal the connection between the cover 1 and the filter 400. When the cover 1 is covered on the filter 400, the sealing ring 12 is squeezed and deformed to achieve a sealing effect. After the filter 400 has been used for a period of time, the filter disc needs to be replaced, but when replacing the filter disc, the cover 1 needs to be lifted until the cover 1 and the filter 400 are separated. In the prior art, it is usually necessary for multiple people to lift the cover 1 together, which brings great inconvenience to the replacement of the filter paper.

[0018] Therefore, in this embodiment, the wafer transfer equipment also includes a lifting device 100, which is used to lift the cover 1. When the lifting device 100 lifts the cover 1 until the cover 1 is separated from the filter 400, personnel replace the filter between the cover 1 and the filter 400 from the gap between the cover 1 and the filter 400. When the lifting device 100 moves the cover 1 downward until the cover 1 is pressed tightly against the filter 400, the sealing ring 12 at the lower end of the cover 1 seals the gap between the cover 1 and the filter 400 to prevent external air containing particles from entering the filter 400 through the gap.

[0019] See attached Figure 2 and attached Figure 3 As shown, the lifting device 100 includes a pressure-bearing member 21, a connecting rod mechanism 3, a guide mechanism 4 and a driving mechanism 5. The pressure-bearing member 21 is fixed to the cover 1. The driving mechanism 5 drives the pressure-bearing member 21 to move up and down through the connecting rod mechanism 3, thereby realizing the lifting and lowering of the cover 1. The guide mechanism 4 guides the movement of the pressure-bearing member 21 so that the pressure-bearing member 21 can only move up and down.

[0020] The pressure-bearing member 21 is fixed to the upper surface of the cover 1. Two pressure-bearing members 21 are spaced apart in the left-right direction. The pressure-bearing members 21 extend out of the cover 1 at both ends in the water-forward and water-forward direction. The portion of the pressure-bearing member 21 extending out of the cover 1 is defined by a groove 211. The groove 211 is located outside the cover 1 in the front-to-back direction and engages with the connecting rod assembly 31. This ensures that the connecting rod assembly 31 does not interfere with the rising cover 1 when it swings.

[0021] See attached Figure 3 As shown, the connecting rod mechanism 3 includes two groups of connecting rod assemblies 31 spaced apart along the second direction. The two groups of connecting rod assemblies 31 are linked by the second connecting rod 32. When one group of connecting rod assemblies 31 swings, the second connecting rod 32 transmits torque, and the other group of connecting rod mechanisms 3 swings synchronously and in the same direction.

[0022] See attached Figure 4 and attached Figure 5As shown, the connecting rod assembly 31 includes two first swing rods 311 spaced apart along a first direction and a first connecting rod 312 pivoted between the two first swing rods 311. The first swing rod 311 includes a first portion 3111 and a second portion 3112 arranged vertically. The connection between the first portion 3111 and the second portion 3112 is pivotally connected to a support 41 located outside the cover 1, and the support 41 is fixed to the housing 200. The two ends of the first connecting rod 312 are respectively pivotally connected to the two first portions 3111. The second connecting rod 32 is fixed to the corresponding first swing rod 311 and located at the connection between the first portion 3111 and the second portion 3112. When the first swing rod 311 swings, it drives the second connecting rod 32 to rotate along its own axis, thereby transmitting torque through the second connecting rod 32.

[0023] An angle is formed between the second portion 3112 and the vertical plane, and the second portion 3112 is inclined toward the pressure-bearing member 21. Part of the second portion 3112 can be embedded in the groove body 211 so that the first rocker arm 311 can press the pressure-bearing member 21 upward or downward when it swings. When the second portion 3112 swings up and down, it applies force to the upper or lower wall of the groove body 211, thereby driving the pressure-bearing member 21 and the cover 1 to move up and down. A second rocker arm 33 that swings synchronously with the first rocker arm 311 is fixed to the first rocker arm 311. External force applied to the second rocker arm 33 drives the connecting rod assembly 31 to swing. The connecting rod mechanism 3 has four second portions 3112, forming four push rod fulcrums, which can relatively smoothly raise and lower the cover 1.

[0024] The guide mechanism 4 comprises a through-hole formed in the support 41 and a guide rod 42 that can only move up and down along the through-hole. The guide rod 42 is fixedly connected to the pressure member 21. While the second portion 3112 tends to move up and down during swinging, it also has a range of left and right movement. However, the cover 1 can only move up and down, otherwise the alignment between the cover 1 and the filter 400 will be affected. Therefore, the guide through-hole and the guide rod 42 are provided. The through-hole is formed in the up-down direction and mates with the outer circumference of the guide rod 42. In this situation, the cover 1 only moves upward and does not move sideways or up and down with the second portion 3112.

[0025] See attached Figure 6 As shown, the drive mechanism 5 includes a screw 51 extending in a first direction and a nut seat 52 threadedly connected to the screw 51. When the screw 51 rotates, the nut seat 52 moves in the left and right directions and can push the first swing arm 311 to swing through the second swing arm 33. The drive mechanism 5 adopts a screw-nut structure. Due to the self-locking effect of the screw and nut, personnel can be prevented from being pinched by the sudden fall of the cover 1 due to its own weight when replacing the filter. At the same time, due to the self-locking effect of the screw 51 and the nut seat 52, when the gas pressure in the clean chamber is greater than the pressure outside the clean chamber, it can prevent the cover 1 from being lifted and the external gas with a large number of particles from entering the clean chamber through the gap between the cover 1 and the filter 400, thereby causing premature failure of the filter and low cleanliness in the clean chamber.

[0026] In this embodiment, the lifting device 100 is provided. When the cover 1 is raised, the drive mechanism 5 consisting of the screw 51 and the nut seat 52 can lift the cover 1 effortlessly, allowing a single person to quickly replace the filter disc. The self-locking effect of the screw 51 and the nut seat 52 prevents personnel from being pinched by the cover 1 suddenly falling due to its own weight when replacing the filter disc. At the same time, the coordinated connecting rod mechanism 3 and the guide mechanism 4 ensure that the force on the cover 1 is more uniform, and the cover 1 does not move laterally during the upward movement, thereby preventing damage to the sealing ring on the cover 1. When the cover 1 is lowered, the self-locking effect of the screw 51 and the nut seat 52 not only applies downward pressure to the cover 1 through the connecting rod assembly 31, but also prevents the gas pressure inside the cleaning chamber from exceeding the pressure outside the chamber, which would cause the gas to lift the cover 1 and allow gas containing a large number of particles to enter the filter 400 through the gap between the cover 1 and the filter 400. Since the guide mechanism 4 and the connecting rod mechanism 3 decompose the force acting on the driving mechanism 5, the large pressure provided by the driving mechanism 5 to the pressure-bearing part 21 will not be directly transmitted to the cover 1 and the sealing ring 12. Therefore, the cover 1 is not easily damaged or deformed, and the sealing ring 12 will not be crushed, thereby ensuring the sealing between the cover 1 and the filter 400.

[0027] When the lifting device 100 lifts the cover 1, an external force causes the screw 51 to rotate, driving the nut seat 52 to move rightward. The rightward movement of the nut seat 52 pushes the lower end of the second swing link 33 to the right, causing the first swing link 311, which is fixedly connected to the second swing link 33, to swing clockwise around the hinge between the support 41 and the second swing link 33. In other words, one set of connecting rod assemblies 31 swings counterclockwise. The two sets of connecting rod mechanisms 3 are connected in the front-to-back direction through the second connecting rod 32 to transmit torque, and the two sets of connecting rod mechanisms 3 swing counterclockwise synchronously. The second portions 3112 of the four first swing links 311 of the two sets of connecting rod mechanisms 3 rotate counterclockwise while moving upward. The portion of the second portion 3112 inserted into the groove body 211 abuts against the upper wall of the groove body 211, driving the cover 1 upward. Because the guide rod 42 is fixedly connected to the pressure member 21 and can only move up and down along the through hole in the support 41 fixed to the housing 200, the cover 1 only moves upward and does not move horizontally to the right while moving upward with the second portion 3112. When the cover 1 is raised to a predetermined height, a person can replace the filter disc through the gap between the cover 1 and the filter 400.

[0028] When the lifting device 100 moves the cover 1 downward, an external force rotates the screw rod 51 in the opposite direction, and the rotating screw rod 51 drives the nut seat 52 to move to the left. The nut seat 52 moving to the left pulls the lower end of the second swing rod 33 to the left, causing the first swing rod 311 fixedly connected to the second swing rod 33 to swing clockwise around the hinge between the support rod and the second swing rod 33, that is, one set of connecting rod assemblies 31 swings clockwise, and the two sets of connecting rod mechanisms 3 in the front and rear directions are connected through the second connecting rod 32 to transmit torque, and the two sets of connecting rod mechanisms 3 swing synchronously clockwise. The second portions 3112 of the four first rocker arms 311 of the two sets of linkage mechanisms 3 rotate clockwise while moving downward. The portion of the second portion 3112 inserted into the groove 211 abuts against the lower wall of the groove 211, pushing the cover 1 downward. Because the guide rod 42 is fixedly connected to the pressure-bearing member 21 and can only move up and down along the through-holes in the support 41 fixed to the housing 200, the cover 1 only moves downward and does not move laterally to the left while moving downward with the second portion 3112. Once the cover 1 is lowered into place, the sealing ring at the lower end of the cover 1 seals the gap between the cover 1 and the filter 400, preventing external air containing particulate matter from entering the filter 400 through the gap.

[0029] The driving mechanism 5 further includes a driving member, which is used to drive the screw rod 51 to rotate along its own axis. The driving member is not limited in this application, and illustratively, the driving member is a handle 511 or a motor.

[0030] In one embodiment, in order to lower the height of the driving mechanism 5 for easier operation, see the attached Figure 3 As shown, the lower end of the second swing arm 33 is lower than the cover 1 , the lower end of the second swing arm 33 is pivotally connected to one end of a linkage rod 53 , and the other end of the linkage rod 53 is pivotally connected to the nut seat 52 .

[0031] The lower end of the second swing arm 33 is lower than the cover 1. A linkage rod 53 is provided to pivotally connect the nut seat 52 and the second swing arm 33. In this case, the drive mechanism 5 can be positioned below the cover 1, facilitating operation. The linkage rod 53 also forms a lever, allowing for easier lifting of the cover 1. The linkage rod 53 also effectively extends the distance from the nut seat 52 to the second swing arm 33 in the left-right direction. Even if the handle 511 is positioned outside the cover 1 in the left-right direction, it can still be rotated. This position of the handle 511 also facilitates operation.

[0032] The lower the height of the drive mechanism 5, the easier it is to operate, as personnel do not need to climb high to rotate the screw rod 51. Therefore, the linkage rod 53 is always tilted, and the end of the linkage rod 53 pivotally connected to the second swing link 33 is tilted upward. At this point, the end of the linkage rod 53 pivotally connected to the nut seat 52 is lower, allowing the linkage rod 53 to push the second swing link 33 even when the nut seat 52 is low.

[0033] It is understood that the linkage rod 53 in the above embodiment can be omitted and replaced with an arcuate hole in the nut seat 52. The nut seat 52 is directly pivotally connected to the second swing link 33. The shaft connecting the second swing link 33 and the nut seat 52 can rotate within the arcuate hole and slide along the arcuate hole. In this case, when the nut seat 52 reciprocates in the left and right directions, the second swing link 33 can still push the first swing link 311 to swing up and down.

[0034] See attached Figure 3 As shown, the first swing arm 311 is located outside the cover 1 in the front-to-back direction. Because the first swing arm 311 is always higher than the cover 1, if the first swing arm 311 is located directly above the cover 1, it may interfere with the swinging first swing arm 311 when the cover 1 moves upward, affecting the rising distance of the cover 1. Therefore, the first swing arm 311 is located outside the cover 1 in the front-to-back direction. In this way, the cover 1 will not collide with the swinging first swing arm 311 when it moves upward.

[0035] At the same time, the first swing arm 311 is located outside the cover 1 in the front-to-back direction. At this time, there is no need to leave much distance between the first swing arm 311 and the cover 1 in the up-down direction for the cover 1 to be raised and lowered. Compared with the first swing arm 311 being located directly above the cover 1, the height position of the first swing arm 311 can be relatively lowered for easy installation.

[0036] In order to improve the stability of the movement of the nut seat 52, see the attached Figure 6 As shown, the drive mechanism 5 also includes a guide rail 54 and a slider 55 that slides along the guide rail 54. The nut seat 52 and the slider 55 are fixedly connected, and the guide rail 54 is fixedly connected to the housing 200. When the two ends of the screw rod 51 are rotatably connected to the housing 200 through the bearing seat, the nut seat 52 can only move back and forth in a straight line. However, because the nut seat 52 must be able to overcome the gravity of the cover 1 and lift the cover 1, the force applied to the nut seat 52 will be transmitted to the screw rod 51. At this time, the slider 55 and the guide rail 54 provided can guide the movement of the nut seat 52 while dispersing the force applied to the screw rod 51 and transmitting the force to the housing 200, thereby preventing the screw rod 51 from being subjected to excessive force and causing deformation.

[0037] The nut seat 52 includes a fixedly connected nut body 521 and a connecting frame 522. The connecting frame 522 is fixedly connected to the slider 55 and pivotally connected to one end of the linkage rod 53. The connecting frame 522 firmly connects the nut body 521 and the slider 55 together while providing space for the pivotal connection of the linkage rod 53.

[0038] In one embodiment, see the attached Figure 8As shown, a connecting member 22 fixedly connected to the two pressure-bearing members 21 is provided between them, and the connecting member 22 is fixedly connected to the upper surface of the cover 1. The connecting member 22 and the pressure-bearing member 21 form a connecting frame 2 fixed to the cover 1, and the connecting frame 2 is used to connect the connecting rod mechanism 3 and the cover 1. The connecting member 22 can transmit the pressure on the pressure-bearing member 21, so that the cover 1 is subjected to force at multiple locations, thereby avoiding stress concentration and deformation of the cover 1. The number of connecting members 22 is set according to actual needs. For example, there are two connecting members 22, and the two connecting members 22 are spaced apart in the front-to-back direction. The two connecting members 22 and the two pressure-bearing members 21 form a frame structure.

[0039] See attached Figure 4 As shown, the connecting rod assembly 31 may further include a roller 31121. The portion of the second portion 3112 that can be inserted into the groove body 211 is rotatably connected to the roller 31121, and the roller 31121 is in rolling connection with the groove body 211. The addition of the roller 31121 for the rolling connection reduces friction and avoids direct sliding contact between the second portion 3112 and the groove body 211, thereby reducing the generation of particles that affect environmental cleanliness.

[0040] See attached Figure 9 As shown, the upper and lower walls of the trough 211 are provided with gaskets 212 that can abut against the roller 31121. The gaskets 212 are made of a material with a low coefficient of friction to improve the smoothness of the rolling of the roller 31121, reduce friction, and prevent the generation of particles. Exemplarily, the gaskets 212 are made of plastic, which also prevents direct wear on the trough 211.

[0041] See attached Figure 9 As shown, the opening of the groove body 211 faces the left-right direction, and the bottom of the groove body 211 defines an opening 2111 for partially passing the roller 31121. Because the roller 31121 can move left-right within the groove body 211, the opening and the opening 2111 provide space for the roller 31121 to move in the first direction. This increases the space for the roller 31121 to move in the left-right direction without increasing the depth of the groove body 211 in the left-right direction.

[0042] See attached Figure 7 As shown, the guide mechanism 4 also includes a limit plate 421, which is fixed to the guide rod 42 and located above the through hole. The limit plate 421 can abut against the support 41 to limit the downward position of the guide rod 42. If the cover 1 moves downward too much, it will over-compress the sealing ring 12, causing damage to the sealing ring 12. Therefore, the limit plate 421 is provided to limit the downward position of the cover 1. When the limit plate 421 abuts the upper end surface of the support 41, the screw 51 stops rotating due to resistance, and the cover 1 descends into place. At this time, the sealing ring at the lower end of the cover 1 closes the gap between the cover 1 and the filter 400.

[0043] See attached Figure 1As shown, multiple wafer loading devices 300 are evenly arranged along the first direction, and the filters 400 correspond one to one with the wafer loading devices 300. In other words, multiple filters 400 are also arranged along the first direction, and the cover 1 can be pressed tightly against all filters 400. In this case, the length direction of the cover 1 is the same as the extension direction of the screw 51, and the connecting frame 2 is located in the middle of the length direction of the cover 1. This makes the force applied to the cover 1 by the drive mechanism 5 more uniform, allowing the cover 1 to be raised and lowered stably and making the handle easier to operate.

[0044] See attached Figure 1 As shown, the wafer transfer mechanism further includes a protective cover 500 , which can be placed over the shell 200 and cover the lifting device 100 . The protective cover 500 can effectively protect the lifting device 100 and prevent the lifting device 100 from being damaged due to collision or external force.

[0045] The above embodiments are only for illustrating the technical concept and features of the present invention. Its purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. It cannot be used to limit the scope of protection of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A wafer transfer device, characterized in that: The wafer transport device comprises a housing, the housing comprising a clean chamber docked with a wafer loading device, a filter provided on the top of the clean chamber, a cover pressed onto the filter, and a lifting device for lifting the cover, the lifting device comprising: a pressure-bearing member fixed to the upper surface of the cover and spaced apart along a first horizontal direction; two pressure-bearing members extending out of the cover at both ends along a second horizontal direction; and a groove formed on the extended portion of the pressure-bearing member; The linkage mechanism comprises two groups of linkage assemblies spaced apart along a second direction, the linkage assembly comprising two first rocking links spaced apart along a first direction and a first link pivotally pivoted between the two first rocking links, the two linkage assemblies being linked by a second link fixed to the corresponding first rocking link, the first rocking link comprising a first portion and a second portion arranged up and down, a connection point between the first portion and the second portion being pivotally connected to a support fixed to the housing, an angle being formed between the second portion and a vertical plane, and the second portion being inclined toward the pressure-bearing member, a portion of the second portion being capable of being embedded in the groove body so that the first rocking link can press the pressure-bearing member upward or downward when the first rocking link swings, and a second rocking link being fixed to one of the first rocking links and swinging synchronously therewith; A guide mechanism, comprising a through hole provided on the support and a guide rod capable of moving up and down only along the through hole, wherein the guide rod is fixedly connected to the pressure-bearing member; The driving mechanism includes a screw rod extending along a first direction and a nut seat threadedly connected to the screw rod. When the nut seat moves along the first direction, it can push the first swing rod to swing through the second swing rod.

2. The wafer transfer device according to claim 1, wherein: The lower end of the second swing rod is lower than the cover, the lower end of the second swing rod is pivotally connected to one end of a linkage rod, and the other end of the linkage rod is pivotally connected to the nut seat.

3. The wafer transfer device according to claim 2, wherein: The linkage rod is always tilted, and one end of the linkage rod pivotally connected to the second swing link is tilted upward.

4. The wafer transfer device according to claim 1, wherein: The first swing arm is located outside the cover in the second direction.

5. The wafer transfer device according to claim 2, wherein: The driving mechanism also includes a guide rail and a slider sliding along the guide rail. The nut seat includes a nut body and a connecting frame that are fixedly connected. The connecting frame is fixedly connected to the slider and is pivotally connected to one end of the linkage rod.

6. The wafer transfer device according to claim 1, wherein: A connecting piece fixedly connected to the two pressure-bearing pieces is further provided between the two pressure-bearing pieces, and the connecting piece is fixedly connected to the upper surface of the cover.

7. The wafer transfer device according to claim 1, wherein: The portion of the second part that can be embedded in the trough body is connected to a roller, and the roller is in rolling connection with the trough body. Gaskets that can abut against the roller are provided on the upper wall and the lower wall of the trough body.

8. The wafer transfer device according to claim 7, wherein: The opening of the groove body faces the first direction, and the bottom of the groove body is provided with an opening for the roller part to pass through.

9. The wafer transfer device according to claim 1, wherein: A limiting plate located above the through hole is fixed on the guide rod, and the limiting plate can abut against the support to limit the downward position of the guide rod.

10. The wafer transfer device according to any one of claims 1 to 9, characterized in that: A plurality of wafer loading devices are evenly arranged along the first direction, the filters correspond to the wafer loading devices one by one, and the cover can be pressed tightly on all the filters.

Images