High-temperature chlorination purification device and process in isostatic pressing graphite production

Abstract

The invention belongs to the technical field of isostatic pressing graphite production, and discloses a high-temperature chlorination purification device and process in isostatic pressing graphite production, the high-temperature chlorination purification device comprises an atmosphere furnace body and a supporting placing frame, the supporting placing frame is arranged in the middle of the bottom end in a sealing furnace cover, and the sealing furnace cover is hinged to the front face of the atmosphere furnace body; by arranging the clamping assembly, the lifting assembly and the rotary stir-frying assembly, the lifting assembly can rise and move by operating a power motor, so that the clamping assembly, a material placing frame clamped and fixed on the inner side of the top and internal isostatic pressing graphite are driven to integrally move upwards; after the material placing frame moves to enable the rotary stir-frying assembly to be located inside, the rotary stir-frying assembly can be started, so that the output end of the rotary stir-frying assembly rotates to drive the isostatic pressing graphite inside the material placing frame to be stir-fried, and through continuous stir-frying, the accumulated graphite is fully and uniformly subjected to heat; therefore, the high-temperature chlorination purification efficiency is greatly improved.

Description

Technical Field

[0001] The invention belongs to the technical field of isostatic graphite production, in particular to a high-temperature chlorination purification device and process in isostatic graphite production. Background Art

[0002] When isostatically pressed graphite is used in semiconductor production, extremely high purity requirements are placed on it. High-temperature chlorination purification equipment is a key piece of equipment for improving its purity. High-temperature chlorination purification utilizes isostatically pressed graphite to react chemically with halogen gases (such as chlorine and fluorine) or halogenated hydrocarbons (such as carbon tetrachloride) at high temperatures to convert impurities in the graphite (such as boron, aluminum, iron, etc.) into volatile halides, which are then discharged through the gas phase to achieve deep purification.

[0003] Existing high-temperature chlorination purification devices are mainly composed of an atmosphere furnace and a gas conveying device. The purification purpose is achieved by placing the isostatically pressed graphite blocks to be purified inside the atmosphere furnace, and then introducing chlorine gas into the atmosphere furnace and heating it. However, since the isostatically pressed graphite blocks are stationary inside, the outside of the accumulated isostatically pressed graphite blocks are first subjected to high-temperature chlorination treatment, while the inside requires heat and chlorine to slowly penetrate, which greatly reduces the efficiency of high-temperature chlorination purification. Therefore, it is necessary to improve it. Summary of the Invention

[0004] In order to solve the problems raised in the above background technology, the present invention provides a high-temperature chlorination purification device and process in the production of isostatic graphite, which has the advantage of facilitating the improvement of purification efficiency.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-temperature chlorination purification device for isostatic graphite production, comprising an atmosphere furnace body, and further comprising: a sealed furnace cover, the sealed furnace cover being hinged to the front of the atmosphere furnace body, a support rack, the support rack being arranged in the middle of the bottom end of the inner portion of the sealed furnace cover, a clamping assembly, the clamping assembly being arranged on the top of the support rack, the bottom of the clamping assembly extending to below the bottom of the atmosphere furnace body, and a rotating stir-frying assembly being arranged above the clamping assembly, and a material placement frame, the material placement frame being movably mounted on the inner side of the top end of the clamping assembly,

[0006] A lifting assembly is arranged at the bottom of the atmosphere furnace body, and the lifting assembly is located on one side of the clamping assembly, wherein the lifting assembly includes a power motor fixedly installed on one side of the bottom of the atmosphere furnace body, the power motor is located on one side of the bottom of the clamping assembly, the end of the power motor is fixedly sleeved with a second output shaft, the end of the second output shaft is fixedly installed with a rotating disk, the bottom end of the rotating disk is fixedly sleeved with a linkage shaft, and the power motor is a servo motor.

[0007] Preferably, the clamping assembly includes a clamping support plate, a clamping plate, a movable frame, a lifting seat and a limiting rod;

[0008] The clamping tray is movably installed on the top of the supporting rack, the movable rack is movably installed on both sides of the inside of the clamping tray, the bottom end of the movable rack extends to the bottom of the atmosphere furnace body, the lifting seat is slidably connected to the bottom end of the movable rack, the limiting rod is fixedly installed on both sides of the bottom of the atmosphere furnace body, and a lifting seat is provided on the outside of the limiting rod.

[0009] Preferably, there are two clamping plates, which are movably mounted on both sides of the top of the clamping support plate, and the two clamping plates are symmetrically arranged.

[0010] Preferably, the surface of the limiting rod is slidably connected to the inner walls on both sides of the lifting seat.

[0011] Preferably, the protruding portion of the end of the linkage shaft extends to the inside of the slot on one side of the lifting seat and is rotatably connected to the inner wall of the slot of the lifting seat.

[0012] Preferably, a driving assembly is provided inside the lifting seat and located inside the movable frame, and the driving assembly includes a first driving motor, a first output shaft, a gear and a rack;

[0013] The first drive motor is fixedly installed in the middle of the bottom end of the lifting seat, the first output shaft is fixedly sleeved on the top of the first drive motor, the gear is fixedly sleeved on the surface of the first output shaft, and the rack is fixedly installed on the inner side of the bottom of the lifting seat. The first drive motor is a servo motor.

[0014] Preferably, the racks are located on both sides of the gear and mesh with the gear.

[0015] Preferably, the rotary stir-fry component comprises a second driving motor and a rotary stir-fry plate;

[0016] The second driving motor is fixedly installed on the top of one side of the atmosphere furnace body, the rotating stir-frying plate is fixedly sleeved on the end of the rotating stir-frying plate, and one end of the rotating stir-frying plate extends to the interior of the atmosphere furnace body, and the rotating stir-frying plate is a mesh structure.

[0017] Preferably, the inner cavity of the material placement frame is an arc-shaped groove, and a movable groove is opened on one side of the material placement frame, and the movable groove is adapted to the size of one end of the rotating stir-frying plate.

[0018] The high-temperature chlorination purification process in isostatic graphite production has the following steps:

[0019] S1: Place the isostatically pressed graphite into the material placement frame, open the sealed furnace cover, and then place the material placement frame on the inside of the top of the clamping assembly;

[0020] S2: Start the driving assembly, and drive the clamping assembly to move toward each other through the gear and rack, so as to clamp and fix the material placement frame;

[0021] S3: Flip and close the sealed furnace cover to seal the atmosphere furnace body, start the atmosphere furnace body to generate heat, and introduce external chlorine gas;

[0022] S4: Finally, the lifting component is started to drive the clamping component and the material placement frame upward, so that the material placement frame moves so that the end of the rotating stir-fry component is located in the material placement frame, and then the rotating stir-fry component is started to rotate and stir-fry the isostatic graphite in the material placement frame to achieve efficient high-temperature chlorination purification treatment.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The above technical solution is provided with a clamping assembly, a lifting assembly and a rotary stir-frying assembly. By running the power motor, the lifting assembly can be lifted and moved, thereby driving the clamping assembly and the material placement frame fixed on the top inner side and the isostatic graphite inside to move upward as a whole, until the material placement frame moves so that the rotary stir-frying assembly is located inside. Then the rotary stir-frying assembly can be started, so that the output end of the rotary stir-frying assembly rotates to drive the isostatic graphite inside the material placement frame to stir. Through continuous stirring, the accumulated graphite is fully and evenly subjected to heat, thereby greatly improving the efficiency of high-temperature chlorination purification. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 is a schematic cross-sectional structural diagram of the clamping assembly of the present invention;

[0027] Figure 3 for Figure 2 Schematic diagram of the local enlarged structure at A in the middle;

[0028] Figure 4 Schematic diagram of the cross-sectional structure of the rotary stir-fry component of the present invention;

[0029] Figure 5 for Figure 4 Schematic diagram of the local enlarged structure at B in the middle;

[0030] Figure 6 This is a schematic diagram of the cross-sectional structure of the lifting seat of the present invention when viewed from above;

[0031] Figure 7 for Figure 6 Schematic diagram of the local enlarged structure at point C in the middle.

[0032] In the figure: 1. Atmosphere furnace body; 2. Sealing furnace cover; 3. Support rack; 4. Clamping assembly; 401. Clamping tray; 402. Clamping plate; 403. Movable rack; 404. Lifting seat; 405. Limiting rod; 5. Material placement frame; 6. Driving assembly; 601. First driving motor; 602. First output shaft; 603. Gear; 604. Rack; 7. Lifting assembly; 701. Power motor; 702. Second output shaft; 703. Rotating disk; 704. Linkage shaft; 8. Rotating stir-frying assembly; 801. Second driving motor; 802. Rotating stir-frying plate. DETAILED DESCRIPTION

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] like Figures 1 to 7 As shown, the present invention provides a high-temperature chlorination purification device for isostatic graphite production, comprising an atmosphere furnace body 1, and further comprising: a sealing furnace cover 2, the sealing furnace cover 2 being hinged to the front of the atmosphere furnace body 1; a support rack 3, the support rack 3 being arranged in the middle of the bottom end of the inner portion of the sealing furnace cover 2; a clamping assembly 4, the clamping assembly 4 being arranged on the top of the support rack 3, the bottom of the clamping assembly 4 extending to below the bottom of the atmosphere furnace body 1, and a rotating stir-fry assembly 8 being arranged above the clamping assembly 4; a material placement frame 5, the material placement frame 5 being movably mounted on the clamping assembly 4 top inner side; lifting assembly 7, the lifting assembly 7 is arranged at the bottom of the atmosphere furnace body 1, and the lifting assembly 7 is located on the side of the clamping assembly 4; wherein, the lifting assembly 7 includes a power motor 701 fixedly mounted on one side of the bottom of the atmosphere furnace body 1, the power motor 701 is located on one side of the bottom of the clamping assembly 4, the end of the power motor 701 is fixedly sleeved with a second output shaft 702, the end of the second output shaft 702 is fixedly mounted with a rotating disk 703, the bottom end of the rotating disk 703 is fixedly sleeved with a linkage shaft 704, and the power motor 701 is a servo motor.

[0035] When the power motor 701 is running, the second output shaft 702 can drive the rotating disk 703 to rotate as a whole. When the rotating disk 703 rotates, the end of the linkage shaft 704 at the bottom of the rotating disk 703 will move along the inner wall of the slot on one side of the clamping component 4, thereby driving the clamping component 4 to move up and down as a whole.

[0036] like Figure 2 As shown, the clamping assembly 4 includes a clamping support plate 401, a clamping plate 402, a movable frame 403, a lifting seat 404 and a limiting rod 405;

[0037] The clamping support plate 401 is movably mounted on the top of the supporting rack 3, and the movable rack 403 is movably mounted on both sides of the inside of the clamping support plate 401. The bottom end of the movable rack 403 extends to the bottom of the atmosphere furnace body 1. The lifting seat 404 is slidably connected to the bottom end of the movable rack 403. The limiting rods 405 are fixedly mounted on both sides of the bottom of the atmosphere furnace body 1, and the lifting seat 404 is provided on the outside of the limiting rods 405.

[0038] There are two clamping plates 402 , which are movably mounted on both sides of the top of the clamping support plate 401 , and the two clamping plates 402 are symmetrically arranged.

[0039] The above solution is adopted: by providing a clamping plate 402, the movable frame 403 and the clamping plate 402 are driven to move toward each other, so that the clamping plate 402 can clamp and fix both sides of the material placement frame 5 located on the top of the clamping pallet 401.

[0040] like Figure 2 As shown, the surface of the limiting rod 405 is slidably connected to the inner walls on both sides of the lifting seat 404.

[0041] With the above solution, the limiting rod 405 is designed to limit the lifting seat 404 as a whole when it moves up and down, so that the lifting seat 404 slides up and down in the vertical direction.

[0042] like Figure 2 and Figure 5 As shown, the protruding portion of the end of the linkage shaft 704 extends into the inside of the slot on one side of the lifting seat 404 and is rotatably connected to the inner wall of the slot of the lifting seat 404.

[0043] With the above solution, when the rotating disk 703 is driven to rotate as a whole, the protruding portion of the linkage shaft 704 slides on the inner wall of the notch on one side of the lifting seat 404, thereby driving the lifting seat 404 to move up and down as a whole.

[0044] like Figure 3 and Figure 7 As shown, the interior of the lifting seat 404 is provided with a driving assembly 6 located inside the movable frame 403, and the driving assembly 6 includes a first driving motor 601, a first output shaft 602, a gear 603 and a rack 604;

[0045] The first drive motor 601 is fixedly installed in the middle of the bottom end of the lifting base 404, the first output shaft 602 is fixedly sleeved on the top of the first drive motor 601, the gear 603 is fixedly sleeved on the surface of the first output shaft 602, and the rack 604 is fixedly installed on the inner side of the bottom of the lifting base 404. The first drive motor 601 is a servo motor.

[0046] With the above solution, by providing the first output shaft 602 , when the first drive motor 601 is running, the first output shaft 602 rotates, driving the gear 603 to rotate synchronously as a whole.

[0047] like Figure 7 As shown, the racks 604 are located on both sides of the gear 603 and mesh with the gear 603 .

[0048] The above solution is adopted: by providing a rack 604, and running the first drive motor 601 to drive the first output shaft 602 and the gear 603 to rotate, the teeth on the surface of the gear 603 will drive the teeth on the inner side of the rack 604, and the two racks 604 and the movable frame 403 can be driven as a whole to move toward or away from each other.

[0049] like Figure 4 As shown, the rotary stir-fry component 8 includes a second driving motor 801 and a rotary stir-fry plate 802;

[0050] The second driving motor 801 is fixedly installed on the top of one side of the atmosphere furnace body 1, and the rotating stir-fry plate 802 is fixedly sleeved on the end of the rotating stir-fry plate 802, and one end of the rotating stir-fry plate 802 extends to the interior of the atmosphere furnace body 1. The rotating stir-fry plate 802 is a mesh structure. By setting the stir-fry plate 802 to a mesh shape, the material will not be turned out of the material placement frame 5 due to the accumulation of the material during the stir-frying process.

[0051] The above scheme is adopted: by providing a rotating stir-frying plate 802, when the material placement frame 5 rises as a whole, the rotating stir-frying plate 802 will be located inside the material placement frame 5, and finally the second drive motor 801 is operated, so that the rotating stir-frying plate 802 can stir-fry the isostatic graphite in the material placement frame 5 when it rotates.

[0052] like Figure 4 As shown, the inner cavity of the material placement frame 5 is an arc-shaped groove, and a movable groove is opened on one side of the material placement frame 5, and the movable groove is adapted to the size of one end of the rotating stir-frying plate 802.

[0053] By adopting the above solution, through the design of the movable groove on one side of the material placement frame 5 , the material placement frame 5 can be turned upward as a whole, so that the rotating stir-frying plate 802 is located inside the material placement frame 5 .

[0054] The high-temperature chlorination purification process in isostatic graphite production has the following process steps:

[0055] S1: Place the isostatically pressed graphite into the material placement frame 5, open the sealed furnace cover 2, and then place the material placement frame 5 on the top inner side of the clamping assembly 4;

[0056] S2: Start the driving assembly 6, and drive the clamping assembly 4 to move toward each other through the gear 603 and the rack 604, so as to clamp and fix the material placement frame 5;

[0057] S3: Flip and close the sealed furnace cover 2 to seal the atmosphere furnace body 1, start the atmosphere furnace body 1 to generate heat, and introduce external chlorine gas;

[0058] S4: Finally, the lifting component 7 is started to drive the clamping component 4 and the material placement frame 5 upward as a whole, so that the material placement frame 5 moves so that the end of the rotating stir-fry component 8 is located in the material placement frame 5, and then the rotating stir-fry component 8 is started to rotate and stir-fry the isostatic graphite in the material placement frame 5 to achieve efficient and high-temperature chlorination purification treatment.

[0059] The working principle and use process of the present invention:

[0060] First, the operator can pull the sealed furnace cover 2 to open, and then place the isostatically pressed graphite inside the material placement frame 5, and then place the material placement frame 5 on the top of the clamping pallet 401, and then start the first drive motor 601 so that the first output shaft 602 drives the gear 603 to rotate. At this time, through the meshing relationship between the surface of the gear 603 and the inner side of the rack 604, the teeth on the surface of the gear 603 can drive the rack 604 to move toward each other, and then drive the two movable frames 403 and the clamping plate 402 to move toward each other, and finally make the clamping plate 402 clamp and fix the material placement frame 5 placed on the top of the clamping pallet 401, and flip the sealed furnace cover 2 closed.

[0061] Afterwards, the power motor 701 can be started. When the power motor 701 is running, the second output shaft 702 will rotate and drive the rotating disk 703 to rotate synchronously as a whole. When the rotating disk 703 is running, the protruding part of the linkage shaft 704 at the bottom end will slide on the inner wall of the slot on one side of the lifting seat 404, thereby driving the lifting seat 404, the movable frame 403, the clamping plate 402 and the clamping support plate 401 and the top material placement frame 5 to move upward as a whole, and finally the material placement frame 5 is moved so that the rotating stir-frying plate 802 is located inside the material placement frame 5, and finally the rotating stir-frying plate 802 can be driven to rotate by starting the second drive motor 801, so that the rotating stir-frying plate 802 rotates to rotate and stir-fry the isostatic graphite inside the material placement frame 5, and then the heat generated by the operation of the atmosphere furnace body 1 and the introduced chlorine gas are fully and efficiently subjected to high-temperature chlorination purification treatment on the isostatic graphite.

[0062] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0063] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A high-temperature chlorination purification device for isostatic graphite production, comprising an atmosphere furnace body (1), characterized in that: Also includes: A sealed furnace cover (2), the sealed furnace cover (2) being hinged to the front side of the atmosphere furnace body (1); A support rack (3), the support rack (3) being arranged in the middle of the bottom end of the sealed furnace cover (2); A clamping assembly (4), wherein the clamping assembly (4) is arranged on the top of the support rack (3), the bottom of the clamping assembly (4) extends to below the bottom of the atmosphere furnace body (1), and a rotating stir-frying assembly (8) is arranged above the clamping assembly (4); A material placement frame (5), wherein the material placement frame (5) is movably mounted on the inner side of the top end of the clamping component (4); A lifting assembly (7), wherein the lifting assembly (7) is arranged at the bottom of the atmosphere furnace body (1), and the lifting assembly (7) is located on one side of the clamping assembly (4); The lifting assembly (7) includes a power motor (701) fixedly mounted on one side of the bottom of the atmosphere furnace body (1), the power motor (701) is located on one side of the bottom of the clamping assembly (4), the end of the power motor (701) is fixedly sleeved with a second output shaft (702), the end of the second output shaft (702) is fixedly mounted with a rotating disk (703), the bottom end of the rotating disk (703) is fixedly sleeved with a linkage shaft (704), and the power motor (701) is a servo motor.

2. The high-temperature chlorination purification device in isostatic graphite production according to claim 1, characterized in that: The clamping assembly (4) comprises a clamping support plate (401), a clamping plate (402), a movable frame (403), a lifting seat (404) and a limiting rod (405); The clamping support plate (401) is movably mounted on the top of the supporting rack (3), the movable rack (403) is movably mounted on both sides of the inside of the clamping support plate (401), the bottom end of the movable rack (403) extends to the bottom of the atmosphere furnace body (1), the lifting seat (404) is slidably connected to the bottom end of the movable rack (403), the limiting rod (405) is fixedly mounted on both sides of the bottom of the atmosphere furnace body (1), and a lifting seat (404) is provided on the outside of the limiting rod (405).

3. The high-temperature chlorination purification device in isostatic graphite production according to claim 2, characterized in that: There are two clamping plates (402), which are movably mounted on both sides of the top of the clamping support plate (401), and the two clamping plates (402) are symmetrically arranged.

4. The high-temperature chlorination purification device in isostatic graphite production according to claim 2, characterized in that: The surface of the limiting rod (405) is slidably connected to the inner walls on both sides of the lifting seat (404).

5. The high-temperature chlorination purification device in isostatic graphite production according to claim 1, characterized in that: The protruding portion of the end of the linkage shaft (704) extends to the inside of the slot on one side of the lifting seat (404) and is rotatably connected to the inner wall of the slot of the lifting seat (404).

6. The high-temperature chlorination purification device in isostatic graphite production according to claim 2, characterized in that: The interior of the lifting seat (404) is provided with a driving assembly (6) located inside the movable frame (403), and the driving assembly (6) includes a first driving motor (601), a first output shaft (602), a gear (603) and a rack (604); The first drive motor (601) is fixedly mounted on the middle of the bottom end of the lifting seat (404), the first output shaft (602) is fixedly sleeved on the top of the first drive motor (601), the gear (603) is fixedly sleeved on the surface of the first output shaft (602), and the rack (604) is fixedly mounted on the inner side of the bottom of the lifting seat (404). The first drive motor (601) is a servo motor.

7. The high-temperature chlorination purification device for isostatic graphite production according to claim 6, characterized in that: The racks (604) are located on both sides of the gear (603) and mesh with the gear (603).

8. The high-temperature chlorination purification device in isostatic graphite production according to claim 1, characterized in that: The rotary stir-frying assembly (8) comprises a second driving motor (801) and a rotary stir-frying plate (802); The second driving motor (801) is fixedly mounted on the top of one side of the atmosphere furnace body (1); the rotating stir-frying plate (802) is fixedly sleeved on the end of the rotating stir-frying plate (802); and one end of the rotating stir-frying plate (802) extends to the interior of the atmosphere furnace body (1); and the rotating stir-frying plate (802) is a mesh structure.

9. The high-temperature chlorination purification device for isostatic graphite production according to claim 1, characterized in that: The inner cavity of the material placement frame (5) is an arc-shaped groove, and a movable groove is provided on one side of the material placement frame (5), and the movable groove is adapted to the size of one end of the rotating stir-frying plate (802).

10. A high-temperature chlorination purification process for isostatic graphite production, applied to the high-temperature chlorination purification device for isostatic graphite production according to any one of claims 1 to 9, characterized in that: The process steps are as follows: S1: Place the isostatically pressed graphite into the material placement frame (5), open the sealed furnace cover (2), and then place the material placement frame (5) on the inner side of the top of the clamping assembly (4); S2: Start the driving assembly (6), and drive the clamping assembly (4) to move toward each other through the gear (603) and the rack (604), thereby clamping and fixing the material placement frame (5); S3: Flip and close the sealed furnace cover (2) to seal the atmosphere furnace body (1), start the atmosphere furnace body (1) to generate heat, and introduce external chlorine gas; S4: Finally, the lifting component (7) is started to drive the clamping component (4) and the material placement frame (5) upward as a whole, so that the material placement frame (5) moves so that the end of the rotating stir-fry component (8) is located in the material placement frame (5), and then the rotating stir-fry component (8) is started to rotate and stir the isostatic graphite in the material placement frame (5), thereby achieving efficient high-temperature chlorination purification treatment.

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