Quartz tube base material ultrasonic cleaning equipment adopting internal and external alternate circulation

Abstract

The invention discloses quartz tube base material ultrasonic cleaning equipment adopting internal and external alternate circulation, and relates to the technical field of quartz tube base material cleaning, the quartz tube base material ultrasonic cleaning equipment specifically comprises an ultrasonic cleaning box and a movable blocking window, the movable blocking window is slidably connected to the side of the ultrasonic cleaning box, and a cleaning cavity and a liquid storage cavity are formed in the ultrasonic cleaning box; a telescopic regulation and control assembly is installed in the ultrasonic cleaning box and located behind the cleaning cavity, and a swing mechanism is installed on one side of the telescopic regulation and control assembly. The quartz tube base material ultrasonic cleaning equipment is provided with an elastic restraining mechanism, the problem that a quartz tube is prone to being damaged in the ultrasonic cleaning process is effectively solved, the problems of uneven cleaning effect and blind areas are remarkably solved by arranging the non-uniform-speed swing mechanism, the two core technologies act synergistically, and on the premise that the safety of the quartz tube is guaranteed, the service life of the quartz tube is prolonged. And efficient, uniform and thorough cleaning is achieved, and the ultra-high cleanliness requirement of the high-precision industry for the quartz tube base material is met.

Description

Technical Field

[0001] The invention relates to the technical field of quartz tube substrate cleaning, in particular to a quartz tube substrate ultrasonic cleaning device adopting internal and external alternating circulation. Background Art

[0002] As a high-performance material with silicon dioxide as its main component, quartz tube plays an indispensable role in high-precision industries such as semiconductor manufacturing, photovoltaic industry, fiber optic communications, precision laboratory instruments and special lamps due to its high purity, excellent high temperature and corrosion resistance, low thermal expansion coefficient and excellent optical properties.

[0003] However, during the production and processing of quartz tubes, various pollutants such as grease, metal ions and tiny particles are easily attached to the surface. If these pollutants are not thoroughly removed, the performance and service life of the quartz tubes will be seriously affected. Therefore, how to clean quartz tubes efficiently and safely has become a key technical problem restricting the development of related industries.

[0004] Currently, ultrasonic cleaning technology is widely used in the cleaning process of quartz tubes as a non-contact, high-efficiency cleaning method, such as the one published in While the "quartz tube cleaning equipment" improves equipment maintenance convenience through modular design, it does not address key technologies for preventing quartz tube breakage or improving cleaning uniformity. Quartz tubes are hard but brittle, and traditional cleaning equipment can easily cause quartz tube breakage or surface damage during the clamping, transportation, and cleaning process due to mechanical shock, vibration, or uneven clamping force.

[0005] At the same time, due to the ultrasonic propagation characteristics and the uneven distribution of the flow field in the cleaning tank, traditional cleaning equipment is prone to form cleaning blind spots during the cleaning process, resulting in incomplete cleaning of some areas of the quartz tube, affecting the overall cleaning effect. Summary of the Invention

[0006] The object of the present invention is to provide a quartz tube substrate ultrasonic cleaning device using internal and external alternating circulation to solve the problems mentioned in the background technology.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solution: an ultrasonic cleaning device for a quartz tube substrate using an alternating internal and external circulation, comprising an ultrasonic cleaning box and a movable baffle, wherein the movable baffle is slidably connected to the side of the ultrasonic cleaning box, and a cleaning chamber and a liquid storage chamber are provided in the ultrasonic cleaning box;

[0008] A telescopic control component is installed in the ultrasonic cleaning box and at the rear of the cleaning chamber, a swing mechanism is installed on one side of the telescopic control component, and a stable clamping mechanism is installed on the side of the swing mechanism and in the cleaning chamber;

[0009] The stable clamping mechanism includes a sliding sleeve, a limiting groove and a rotary disk, a sliding sleeve is installed on the swing mechanism side, and the sliding sleeve is fixed to the limiting groove on one side by welding, a transmission box is installed on the sliding sleeve, the inner wall of the sliding sleeve is movably connected to the rotary disk, and side baffles are slidably connected to the side baffles on both sides of the sliding sleeve, a slider module 1 and a slider module 2 are slidably connected in the top groove of the sliding sleeve, a limiting column is evenly installed and fixed on the top of the slider module 1, and a rotary disk is evenly movably connected on the slider module 2, and a gear column 1 and a gear column 2 are symmetrically slidably connected to the side wall of the slider module 2 and located on the rotary disk side;

[0010] A side control box is fixed to the inner wall of the cleaning chamber in the ultrasonic cleaning box by bolts. The side control box is evenly slidably connected to the two sides of the slider module with alternating push rods. The alternating push rods are correspondingly arranged with the first gear column and the second gear column.

[0011] Furthermore, a crankshaft is movably connected in the side control box through a bearing, and rotating arms are evenly sleeved and movably connected on the crankshaft, and one end of the rotating arm is movably connected to the alternating push rod.

[0012] Furthermore, the motor in the transmission box drives the turntable to rotate through the transmission shaft, and one end of the rotating rod symmetrically connected to the top of the turntable is movably connected to the slider module 1, and the other side of the rotating rod is movably connected to the slider module 2.

[0013] Furthermore, the gear columns 1 and 2 installed in the same group on the slider module 2 are respectively engaged with the teeth on both sides of the turntable. A spring sleeve is installed on the top of the slider module 2 and on the turntable side. A top block is installed in the spring sleeve, and one side of the top block is in contact with the top tooth of the gear column 1.

[0014] Furthermore, the swing mechanism includes a slide, a fixed sleeve tooth and a movable gear. The slide is fixedly connected to the hanging plate side of the telescopic control component, the slide is fixedly connected to the fixed sleeve tooth, the fixed sleeve tooth side is movably connected to the movable gear, the movable gear is movably connected to a companion tooth, and one side of the companion tooth is meshed with the fixed sleeve tooth, and the other side of the companion tooth is movably connected to a moving block on the fixed cam.

[0015] Furthermore, the movable block is located in the limiting groove and is slidably connected to the limiting groove, and the tooth side protrusion of the fixed sleeve is also in contact with the limiting groove.

[0016] The ultrasonic cleaning method for the quartz tube substrate using alternating internal and external circulation is as follows:

[0017] The quartz tubes to be cleaned are positioned one by one in the gap between the turntables on the top of the slider module 2, and are constrained by the protruding pure polypropylene plastic columns on both sides of the top of the turntable;

[0018] At the same time, the telescopic control component drives the sliding sleeve to descend, so that the tooth column 1 on the second side wall of the slider module is flush with the alternating push rod on the side of the side control box. In conjunction with the rotation of the crankshaft in the side control box, multiple sets of alternating push rods are pushed out to contact the tooth column 1 on the second side wall of the slider module, squeezing the tooth column 1 while driving the entire turntable to rotate. The rotating turntable is locked by placing the quartz tube on one side through the plastic column and the upper limit column of the slider module.

[0019] After the swing cycle flushing, the sleeve continues to descend after the alternating push rod is reset, and contacts the weak alkaline cleaning agent placed in the cleaning chamber. After being completely immersed, the movable gear on the slide is controlled to rotate, and the companion gear on the movable gear rotates along the fixed sleeve gear planet. While rotating, the movable block is controlled to drive the entire sleeve to swing left and right. After the ultrasonic cleaning is completed, the cleaning agent is drained, and deionized water or ultrapure water with a temperature close to that of the cleaning liquid is discharged into the liquid storage chamber. The sliding sleeve that moves again drives multiple groups of quartz tube substrates to complete the rinsing and remove the residual cleaning agent. It then rises to the position of the alternating push rod on the side wall of the side control box. As the crankshaft rotates in the opposite direction, the alternate push rod pushed out contacts the gear shaft 2, completing the reset of the turntable. After the operator completes the cleaning, the quartz tube substrate is collected.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. In the present invention, an elastic constraint anti-collision design is used to significantly reduce the risk of quartz tube cracking during cleaning. Dynamic clamping is formed by the rotation of the turntable and the linkage limit column. The alternating push rods are used to push the tooth column 1, driving the turntable to rotate precisely, so that the polypropylene plastic column on it works together with the limit column on the slider module 1 to flexibly constrain the radial movement of the quartz tube from both sides. A spring sleeve and a push block are provided on the top of the slider module 2 to provide axial floating space for the squeezed tooth column 1 and the turntable. This design allows the quartz tube to produce a slight displacement in a strong ultrasonic field, effectively absorbing and dissipating vibration energy, and greatly improving the safety of the quartz tube cleaning process and product yield.

[0022] 2. In the present invention, non-uniform oscillation is used to enhance cleaning, greatly improving cleanliness and uniformity. The original oscillating mechanism is the core. The movable gear drives the companion gear to perform planetary motion along the fixed sleeve gear. The specific profile cam on it converts the complex rotation trajectory into non-uniform reciprocating motion of the moving block in the limit groove. The moving block drives the entire sliding sleeve and all the clamped quartz tubes through the limit groove to synchronously perform uneven left and right swings in the cleaning liquid. This non-uniform oscillation produces drastic changes in turbulence and shear force in the liquid, effectively destroying the ultrasonic standing wave. The non-uniform oscillation forces the cleaning liquid to form a strong alternating flushing flow on the inner and outer surfaces of the quartz tube, significantly enhancing the fluid's ability to strip pollutants and the exchange rate of the cleaning liquid, overcoming the dead angle problem of static cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic structural diagram of the ultrasonic cleaning equipment for quartz tube substrates using alternating internal and external circulation according to the present invention;

[0024] Figure 2 This is a schematic diagram of the top plate removal of the quartz tube substrate ultrasonic cleaning equipment using internal and external alternating cycles of the present invention;

[0025] Figure 3 This is a schematic diagram of the connection structure between the swing mechanism and the telescopic control component of the present invention;

[0026] Figure 4 This is a schematic diagram of installing a stable clamping mechanism on the swing mechanism of the present invention;

[0027] Figure 5 This is a schematic diagram of the connection between the connecting rods on both sides of the rotating disk and the slider module 1 and the slider module 2 of the present invention;

[0028] Figure 6 This is a schematic diagram of the quartz tube substrate of the present invention being locked by the limit pins through the rotation of the turntable;

[0029] Figure 7 This is a schematic diagram of the meshing connection between the first and second gear posts and the two sides of the turntable of the present invention;

[0030] Figure 8 This is a schematic diagram of the installation and disassembly of the alternating push rods on the crankshaft in the side control box of the present invention.

[0031] In the figure: 1. Ultrasonic cleaning box; 2. Movable baffle; 3. Cleaning chamber; 4. Liquid storage chamber; 5. Telescopic control assembly; 6. Swing mechanism; 601. Slide; 602. Fixed sleeve gear; 603. Movable gear; 604. Companion gear; 605. Moving block; 7. Stable clamping mechanism; 701. Slide; 702. Limiting groove; 703. Transmission box; 704. Turntable; 705. Side baffle; 8. Slider module 1; 9. Slider module 2; 10. Side control box; 11. Crankshaft; 12. Alternating push rod; 13. Limiting column; 14. Turntable; 15. Gear column 1; 16. Gear column 2; 17. Spring sleeve; 18. Push block. DETAILED DESCRIPTION

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] See also Figure 1-8 , the present invention provides a technical solution:

[0034] Example 1: To solve the problem that the quartz tube is easily broken due to rigid clamping or free collision during ultrasonic cleaning, the core of this embodiment is to provide elastic constraints through the coordinated rotation of the turntable and the limit column, such as Figure 5 、 Figure 6 and Figure 7 As shown, the quartz tubes to be cleaned are placed one by one in the gap between the turntable 14 on the top of the slider module 9. According to the cleaning requirements, if the quartz tube wall is thin, a single layer is used, as shown in FIG. Figure 6 As shown, five quartz tubes are rinsed at a time. If the quartz tube wall is thick and has strong risk resistance, the quartz tubes can be installed in a stacked manner to increase the cleaning volume of a single quartz tube.

[0035] Similarly, the height of the pure polypropylene plastic columns protruding on both sides of the top of the turntable 14 needs to be increased. Their initial height is about 8mm. This provides preliminary radial restraint on the quartz tube to prevent it from rolling easily. When the telescopic control component 5 is activated to drive the sliding sleeve 701 downward, the toothed columns 15 on the side wall of the slider module 2 9 gradually reach the same height as the alternating push rods 12 evenly distributed on the side wall of the side control box 10, and are flush with each other.

[0036] At this time, the crankshaft 11 driven by the motor in the side control box 10 starts to rotate. Figure 8 As shown, the crankshaft 11 pushes multiple groups of alternating push rods 12 to extend outward synchronously through the rotating arms thereon. The extended alternating push rods 12 directly press and push the corresponding gear column 15 on the side wall of the slider module 2 9. Since the slider module 2 9 is equipped with a gear column 2 16 in addition to the gear column 15, it is also necessary to control the sliding of the gear column 2 16. The crankshaft 11 is also provided with alternating push rods 12 corresponding to the gear column 2 16. When the alternating push rod 12 corresponding to the gear column 15 moves forward, the alternating push rod 12 on the corresponding gear column 2 16 side moves backward, cooperating with the rotation of the crankshaft 11 to move alternately.

[0037] The tooth column 15 is compressed and moves horizontally. Since the tooth column 15 is tightly meshed with the teeth on one side of the turntable 14, the movement of the tooth column 15 forces the turntable 14 to rotate around its central axis. The rotating turntable 14 drives the plastic column on it to rotate synchronously, thereby forming a tighter "clamping" posture for the quartz tube with the limit column 13 fixed on the slider module 8. It is worth noting that:

[0038] This "clamping" is not completely rigid. The rubber sleeve on the surface of the limit column 13 and the plastic column can be added according to the cleaning agent added to the cleaning chamber 4. At the same time, the pressure on the surface of the quartz tube caused by the rotation of the turntable 14 is detected, and the rotation angle of the turntable 14 is controlled to avoid excessive rotation of the turntable 14 causing cracking and breaking of the adaptive tube.

[0039] A spring sleeve 17 is installed on the top of the slider module 9 corresponding to each turntable 14. The toothed surface of the top block 18 built into the spring sleeve 17 abuts against the toothed surface of the top of the tooth column 15 in its natural state. When the tooth column 15 is squeezed by the alternating push rod 12, the tooth column 15 moves and squeezes the top block 18. The top block 18 compresses the internal spring and, after the position of the tooth column 15 is adjusted, limits the normal sliding of the tooth column 15.

[0040] At the same time, the top block 18 provides an elastic floating space of about 0.5-1 mm for the tooth column 15 and the turntable 14 engaged therewith. This allows the quartz tube to effectively buffer the collision force through this tiny elastic displacement in the subsequent strong ultrasonic vibration environment, significantly reducing the risk of rupture due to stress concentration. Actual tests have verified that when this elastic constraint method is used to clean a quartz tube with a diameter of 10 mm and an ultrasonic power of 300 W, its rupture rate can be significantly reduced from about 12% in the traditional rigid clamping method that does not adopt this design to below 3%.

[0041] Example 2: To overcome the "standing wave" effect and cleaning blind spot problem caused by uneven flow of cleaning liquid in traditional static ultrasonic cleaning, and to improve the cleaning uniformity and efficiency of the inner and outer walls of the quartz tube, the core of this embodiment is to introduce a mechanism that can drive the quartz tube assembly to swing at a non-uniform speed. After the quartz tube is elastically clamped and fixed in Example 1, the telescopic control assembly 5 continues to drive the sliding sleeve 701 to descend, so that the clamped multiple groups of quartz tubes are completely immersed in the weak alkaline cleaning liquid pre-injected into the cleaning chamber 3, and then the ultrasonic transducer is started to perform basic ultrasonic cleaning;

[0042] At the same time, in order to enhance the cleaning effect, the swing mechanism 6 installed on the hanging plate side of the telescopic regulating component 5 is started, such as Figure 3 and Figure 4 As shown, the swing mechanism 6 is mainly composed of a slide 601, a fixed sleeve gear 602, a movable gear 603, a companion gear 604 and a moving block 605;

[0043] The motor drives the movable gear 603 to rotate. Since one side of the movable gear 603's movably connected companion tooth 604 is always in meshing state with the fixed sleeve tooth 602 fixedly mounted on the carriage 601, the companion tooth 604 performs planetary motion around the fixed sleeve tooth 602. A cam with a specific profile is fixed to the other side of the companion tooth 604. This cam is movably connected to the moving block 605. The planetary motion of the companion tooth 604 is converted into reciprocating motion of the moving block 605 in the horizontal direction through the cam on the companion tooth 604.

[0044] The moving block 605 is embedded in and slidably connected to a limiting groove 702 welded to one side of the sliding sleeve 701. Therefore, the horizontal reciprocating motion of the moving block 605 is directly transmitted to the entire sliding sleeve 701 through the limiting groove 702, forcing the sliding sleeve 701, the stable clamping mechanism 7 mounted thereon, and all the clamped quartz tubes to swing synchronously left and right in the cleaning liquid.

[0045] The key point is that due to the trajectory characteristics of the planetary motion of the companion gear 604 and the design of its cam profile, the left-right swing amplitude of the sliding sleeve 701 is not uniform and symmetrical. Its speed and acceleration vary within the swing cycle, i.e., it swings at a non-uniform speed. This non-uniform swing generates more complex turbulence and shear forces in the cleaning liquid, significantly disrupting the ultrasonic standing wave and forcing the cleaning liquid to form a more intense alternating flushing on the inner and outer surfaces of the quartz tube, thereby more effectively stripping away various contaminants such as particulates and organic residues adhering to its surface.

[0046] Comparative tests have shown that under the same ultrasonic parameters and cleaning time, the use of this swing cleaning mode can improve the cleanliness of the quartz tube by about 35% compared to static ultrasonic cleaning, as measured by the number of residual particles on the surface.

[0047] After the main cleaning step is completed, the weak alkaline cleaning agent in the cleaning chamber 3 is drained, and then deionized water or ultrapure water preheated to a temperature close to that of the cleaning solution in the liquid storage chamber 4 is injected into the cleaning chamber 3. The swing mechanism 6 is started again to drive the quartz tube assembly to swing in the rinse liquid to completely remove the residual cleaning agent;

[0048] After rinsing is completed, the telescopic control assembly 5 drives the sliding sleeve 701 to rise. When the tooth column 2 16 on the side wall of the slider module 2 9 is once again flush with the alternating push rod 12 of the side control box 10, the crankshaft 11 is controlled to rotate in the opposite direction. At this time, the alternate push rod 12 is pushed out and contacts and pushes the tooth column 2 16. Since the tooth column 2 16 is engaged with the teeth on the other side of the turntable 14;

[0049] like Figure 7 As shown, pushing the second gear column 16 will cause the turntable 14 to rotate in the opposite direction and return to the initial angle. The plastic column will release the constraint on the quartz tube, and the cleaned quartz tube substrate can be safely and conveniently taken out. It should be noted that the operator needs to wear chemical-resistant gloves, protective glasses, and laboratory coats. When using strong acids and alkalis, the operation must be carried out in a fume hood and a mask must be worn to strengthen protection. The rinsing liquid in the liquid storage chamber 4 must also be properly handled in accordance with laboratory or factory regulations.

[0050] The above contents are merely examples and explanations of the structure of the present invention. Those skilled in the art may make various modifications or additions to the described specific embodiments or replace them in a similar manner. As long as they do not deviate from the structure of the invention or exceed the scope defined by the claims, they shall fall within the scope of protection of the present invention.

[0051] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0052] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to specific embodiments. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An ultrasonic cleaning device for a quartz tube substrate using an alternating internal and external circulation, comprising an ultrasonic cleaning box (1) and a movable baffle (2), wherein the ultrasonic cleaning box (1) is slidably connected to the movable baffle (2), and a cleaning chamber (3) and a liquid storage chamber (4) are provided in the ultrasonic cleaning box (1), characterized in that: A telescopic control assembly (5) is installed in the ultrasonic cleaning box (1) and located behind the cleaning chamber (3); a swing mechanism (6) is installed on one side of the telescopic control assembly (5); and a stable clamping mechanism (7) is installed on the side of the swing mechanism (6) and located in the cleaning chamber (3); The stable clamping mechanism (7) includes a sleeve (701), a limiting groove (702) and a rotary disk (704), a sleeve (701) is installed on one side of the swing mechanism (6), a limiting groove (702) is fixed on one side of the sleeve (701) by welding, a transmission box (703) is installed on the sleeve (701), the inner wall of the sleeve (701) is movably connected to the rotary disk (704), the two sides of the sleeve (701) are slidably connected to the side baffles (705), the top channel of the sleeve (701) is slidably connected to the slider module 1 (8) and the slider module 2 (9), the top of the slider module 1 (8) is evenly fixed with a limiting column (13), the slider module 2 (9) is evenly movably connected to the rotary disk (14), the side wall of the slider module 2 (9) and located on the side of the rotary disk (14) are symmetrically slidably connected to the tooth column 1 (15) and the tooth column 2 (16); A side control box (10) is fixed to the inner wall of the cleaning chamber (3) in the ultrasonic cleaning box (1) by bolts. The side control box (10) is evenly slidably connected to an alternating push rod (12) on the side of the slider module (9). The alternating push rod (12) is correspondingly arranged with the tooth column (15) and the tooth column (16).

2. The ultrasonic cleaning device for quartz tube substrates using internal and external alternating cycles according to claim 1, characterized in that: A crankshaft (11) is movably connected to the side control box (10) via a bearing, and rotating arms are evenly sleeved and movably connected to the crankshaft (11), and one end of the rotating arm is correspondingly and movably connected to the alternating push rod (12).

3. The ultrasonic cleaning device for quartz tube substrates using internal and external alternating cycles according to claim 2, characterized in that: The motor in the transmission box (703) drives the rotary disc (704) to rotate via the transmission shaft. One end of the rotating rod symmetrically connected to the top of the rotary disc (704) is movably connected to the slider module 1 (8), and the other end of the rotating rod is movably connected to the slider module 2 (9).

4. The ultrasonic cleaning device for quartz tube substrates using internal and external alternating cycles according to claim 3, characterized in that: The tooth column 1 (15) and the tooth column 2 (16) installed in the same group on the slider module 2 (9) are respectively engaged with the tooth patterns on both sides of the turntable (14). A spring sleeve (17) is installed on the top of the slider module 2 (9) and on the side of the turntable (14). A top block (18) is installed in abutment with the spring sleeve (17). One side of the top block (18) is in abutment with the tooth pattern on the top of the tooth column 1 (15).

5. The ultrasonic cleaning device for quartz tube substrates using internal and external alternating cycles according to claim 4, characterized in that: The swing mechanism (6) comprises a slide (601), a fixed sleeve tooth (602) and a movable gear (603); the slide (601) is fixedly connected to the hanging plate side of the telescopic control component (5); the slide (601) is fixedly connected to the fixed sleeve tooth (602); the fixed sleeve tooth (602) is movably connected to the movable gear (603); the movable gear (603) is movably connected to a companion tooth (604), and one side of the companion tooth (604) is meshed with the fixed sleeve tooth (602); and the other side of the companion tooth (604) is movably connected to a moving block (605) on a fixed cam.

6. The ultrasonic cleaning device for quartz tube substrates using internal and external alternating circulation according to claim 5, characterized in that: The movable block (605) is located in the limiting groove (702) and is slidably connected to the limiting groove (702), and the side protrusion of the fixed sleeve tooth (602) is also in contact with the limiting groove (702).

7. The ultrasonic cleaning device for quartz tube substrates using internal and external alternating circulation according to claim 6, characterized in that: The ultrasonic cleaning method for the quartz tube substrate using internal and external alternating cycles is as follows: The quartz tubes to be cleaned are positioned one by one in the gap between the top turntable (14) of the slider module (9), and are constrained by the protruding pure polypropylene plastic columns on both sides of the top of the turntable (14); At the same time, the telescopic control component (5) drives the sliding sleeve (701) to descend, so that the tooth column (15) on the side wall of the slider module (9) is flush with the alternating push rod (12) on the side of the side control box (10), and the crankshaft (11) in the side control box (10) rotates, pushing out multiple sets of alternating push rods (12) to contact the tooth column (15) on the side wall of the slider module (9), squeezing the tooth column (15) and driving the entire turntable (14) to rotate. The rotating turntable (14) is locked by placing a quartz tube on one side through the plastic column and the upper limit column (13) of the slider module (8); After the swing cycle flushing, the alternate push rod (12) is reset and the sleeve (701) continues to descend and contacts the weak alkaline cleaning agent placed in the cleaning chamber (3). After being completely immersed, the movable gear (603) on the slide (601) is controlled to rotate, and the companion gear (604) on the movable gear (603) rotates along the fixed sleeve gear (602) in a planetary manner. While rotating, the movable block (605) is controlled to drive the entire sleeve (701) to swing left and right. After the ultrasonic cleaning is completed, the cleaning agent is emptied and the liquid storage chamber (4) is filled with deionized water or ultrapure water with a temperature close to that of the cleaning liquid. The movable sleeve (701) drives multiple groups of quartz tube substrates to complete the rinsing and remove the residual cleaning agent. Then it rises to the position of the alternate push rod (12) on the side wall of the side control box (10). With the reverse rotation of the crankshaft (11), the alternate push rod (12) pushed out contacts the gear shaft 2, completing the reset of the turntable (14). The operator collects the quartz tube substrates after the cleaning is completed.

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