Large-swing-angle fine-adjustable air floatation adjusting frame and optical element detection method

Abstract

A large-swing-angle fine-tuning air floatation adjusting frame for optical element detection realizes 360-degree large-angle deflection through hierarchical connection of a bottom plate, a transition plate, a middle plate and a pitching plate in cooperation with a slewing bearing, and realizes nanoscale fine tuning by using a screw rod and a ball head structure of a deflection block. The ton-level optical element can be easily moved and positioned through the air floating module, the side sliding plates and the guide rails are matched with elements of different sizes, and clamping safety is guaranteed through the middle cushion blocks and the side soft cushions. The device can assist detection personnel in performing real-time precise detection on the surface type parameters of the optical element, is particularly suitable for meter-scale, heavy and difficult-to-move optical elements, can conveniently and quickly adjust the measurement surface and the measurement angle, and realizes quick adjustment and measurement of the detection personnel on the optical element.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical component detection, and in particular relates to an optical component detection air-floating adjustment frame with a large swing angle and fine adjustment capability, and an optical component detection method. Background Art

[0002] In the field of optical inspection, kinematic mounts are critical devices for securing and adjusting the position of optical components. Traditional kinematic mounts typically only support small displacements or slight angles, and their limited load capacity makes them inadequate for inspecting large, heavy optical components. Furthermore, existing kinematic mounts with large displacements and loads are often bulky, require high-quality installation space, and are often custom-designed, with poor compatibility and cumbersome adjustment processes, making them incapable of rapidly inspecting optical components of varying sizes.

[0003] An air-floating adjustment mount uses an air-floating unit to lift the mount, utilizing the air cushion effect to reduce friction and enable manual manipulation of even heavy mounts. This allows for rapid manual positioning of heavy mounts, making optical component positioning inspection faster and more accurate, saving considerable time and labor costs. However, existing air-floating adjustment mounts lack fine-tuning and large-angle deflection capabilities, making it difficult to simultaneously meet the requirements for fast positioning and high-precision adjustment. Rapid adjustment of the inspection surface and angle is crucial for optical component surface parameter inspection, and conventional equipment struggles to achieve both convenience and accuracy. Summary of the Invention

[0004] The patent of this invention provides an optical component detection method of an optical component detection air-floating adjustment frame with a large swing angle and fine adjustment, which can not only realize the rapid clamping and fixation of optical components, but also ensure that the detection surface and detection angle of the optical component to be inspected can be quickly moved and accurately positioned according to the detection requirements.

[0005] The large-angle, fine-adjustable air-floating adjustment mount operates as follows: Before placing the optical component, the mount is easily moved to the desired position with the assistance of an air-floating unit. Once the optical component is positioned and secured, the mount is moved to the inspection area. Rotating locating pins and a center plate quickly determine the deflection angle of the optical component, allowing for rapid positioning and interferometry to complete surface parameter testing.

[0006] The air-floating adjustment frame is generally used in conjunction with an interferometer and is placed on an optical platform. The device includes a base plate, a transition plate, a middle plate, a pitch plate, a side slide plate, a side support module, a screw seat, a screw, a knurled handle, a yaw block, a rotation fixed block, an adjustment screw seat, an adjustment screw, side pads, a middle pad, an air-floating module, a guide rail clamp, a slider, a guide rail, a tightening bolt, a handle, a slewing bearing, and a rotating locating pin. The air flotation module is threadedly connected to the base plate and supports the entire mechanism. The handle is threadedly connected to the base plate for manual gripping of the mobile adjustment frame. The slewing support bearing is threadedly connected to the base plate, and the transition plate is threadedly connected to the two slewing support bearings. The deflection block and the rotation fixing block are connected to the transition plate for large angles and fine adjustments. The knurled handle and the screw are combined into an adjustment bolt and threadedly connected to the screw seat. The ball heads at the top of the two screws contact the grooves of the deflection block for fine-tuning and fixing the angle. The rotating locating pin is threadedly connected to the rotating fixing block, and the middle plate is threadedly connected to the slewing support bearing. The rotating fixing pin can be connected to the bottom of the middle plate. The array of blind holes cooperates to fix the large turning angle; the adjustment screw seat is fixed with the middle plate hole axis, the adjustment screw passes through the pitch plate, and the clamping screw passes through the adjustment screw and is threadedly connected to the middle plate. The adjustment screw seat, adjustment screw and clamping screw cooperate to suspend the pitch plate above the middle plate, and fine-tune the angle of the pitch plate to adjust the posture of the optical element; the guide rail is threadedly connected and fixed to the pitch plate, the middle pad is threadedly connected to the pitch plate, the slider slides with the guide rail, the side slide plate is fixed with the slider, the guide rail clamp and the side support module are threadedly connected and fixed, the side pad is threadedly connected to the side support module and is in contact with the optical element.

[0007] The purpose of the present invention is achieved through the following technical solutions:

[0008] An optical component detection air-floating adjustment stand with large swing angle and fine adjustment is characterized by:

[0009] base plate;

[0010] An air flotation module, fixedly mounted on the bottom of the base plate, for providing air flotation support to enable the adjustment frame to be movable;

[0011] Slewing bearings are symmetrically arranged on both sides of the upper surface of the base plate;

[0012] A transition plate connected to the base plate via two slewing bearings to achieve horizontal rotation;

[0013] A middle plate connected to the transition plate via the two slewing bearings, and having a circumferentially distributed array of blind holes at its bottom;

[0014] The pitch plate is suspended above the middle plate through an adjustment screw seat, an adjustment screw and a tightening bolt for fine-tuning the angle;

[0015] The deflection block and the rotation fixed block are fixed on the upper surface of the transition plate and are used for large angle and fine adjustment of the optical element under inspection;

[0016] The rotating positioning pin is detachably mounted on the rotating fixed block and is used to cooperate with the blind hole at the bottom of the middle plate to achieve large-angle positioning;

[0017] Guide rails, fixedly installed on both sides of the upper surface of the pitch plate;

[0018] A slider, slidingly engaged with the guide rail;

[0019] A side slide plate is fixedly connected to the slider;

[0020] A side support module, mounted on the side slide, provided with side cushions for contacting optical components;

[0021] The middle spacer is fixed in the middle of the pitch and is used to support the optical elements;

[0022] Screw seat, fixed on the transition plate;

[0023] The screw rod is matched with the screw seat thread and has a ball head on the top;

[0024] Knurled handle, connected to the screw for rotation adjustment;

[0025] Adjust the screw seat and fix it on the middle plate;

[0026] The adjusting screw passes through the pitch plate and fits into the adjusting screw seat;

[0027] Compression bolt, used to lock the adjusting screw;

[0028] Guide rail clamp, used to lock the slide position;

[0029] Handle, installed on the side of the base plate for manual movement.

[0030] Furthermore, the adjustment screw seat is fixed on the middle plate; the adjustment screw passes through the through hole of the pitch plate and is threadedly engaged with the adjustment screw seat; the clamping bolt passes through the axial hole of the adjustment screw and is threadedly connected to the middle plate; the inclination angle of the pitch plate can be changed by screwing the adjustment screw and is locked by the clamping bolt.

[0031] Furthermore, the screw is mounted on the transition plate through a screw seat; the ball head at the top of the screw contacts the groove of the deflection block; and the screw can be driven to move axially by rotating the knurled handle, pushing the deflection block to achieve angle fine-tuning.

[0032] Furthermore, the bottom of the middle plate is provided with an array of blind holes arranged in a circumferential manner; the rotating positioning pin can be inserted into the rotating fixed block and the selected blind hole; large-angle positioning is achieved by pulling out the positioning pin, rotating the middle plate to the required angle and then reinserting the positioning pin.

[0033] Furthermore, the guide rails are arranged in parallel on both sides of the pitch plate; the slider can slide along the guide rails; the side slide plate can achieve lateral position adjustment through the slider; and the guide rail clamp is used to lock the slider position.

[0034] Furthermore, the air flotation module includes: multiple air flotation units evenly distributed at the bottom of the base plate; the opening and closing of the air flotation units are controlled by an air supply system; when started, the adjustment frame is suspended on the work surface, and when closed, the adjustment frame is firmly placed.

[0035] Furthermore, the side support module includes: a support frame adjustably mounted on the side slide; the side cushion is made of elastic material and fixed to the end of the support frame by a threaded connection.

[0036] Furthermore, the middle pad is fixed to the middle of the pitch plate through a threaded connection, and a buffer layer is provided on the upper surface for protecting the optical element.

[0037] The present invention also provides an optical component detection method, which uses the above-mentioned air-floating adjustment frame and is characterized in that it includes the following steps:

[0038] Start the air flotation module to suspend the adjustment frame;

[0039] Move the adjustment frame to the working position using the handle;

[0040] Loosen the guide rail clamp and adjust the position of the side slide;

[0041] Place the optical element on the middle pad, make the side pads touch the side of the element, and then lock the rail clamp;

[0042] Close the air flotation module to fix the adjustment frame;

[0043] Pull out the rotation positioning pin, rotate the middle plate to the detection angle, and then insert the positioning pin to fix it;

[0044] Fine adjustment of angle is achieved through the knurled handle and adjustment screw;

[0045] Use testing instruments to detect the surface parameters of optical components.

[0046] Further, in the angle fine-tuning step:

[0047] The screw is driven to move by rotating the knurled handle, pushing the deflection block to achieve deflection fine adjustment;

[0048] The tilt angle of the pitch plate can be changed by turning the adjusting screw and locked with the clamping bolt.

[0049] Compared with the prior art, the present invention has the following beneficial effects:

[0050] 1) Due to the use of air-floating modules, compared with traditional adjustment frames, adjustment is more convenient and positioning is more accurate during the optical component inspection process.

[0051] 2) The fine-tuning mechanism and the large swing angle mechanism are used to quickly and accurately adjust the measuring surface and measuring posture of the optical element.

[0052] 3) Combining the air flotation module, fine-tuning mechanism and large swing angle mechanism, it can adapt to optical components of different sizes and surface conditions. While ensuring the safety of the optical components, it can quickly assist inspection personnel in detecting the surface parameters of the optical components. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 This is a schematic diagram of the overall structure of the optical element detection air-floating adjustment frame with large swing angle and fine adjustment according to the present invention;

[0054] Figure 2 This is a three-dimensional diagram of the overall structure of the optical element detection air-floating adjustment frame with large swing angle and fine adjustment according to the present invention;

[0055] Figure 3 This is an exploded view of the optical element detection air-floating adjustment stand with large swing angle and fine adjustment according to the present invention;

[0056] In the figure: 1-base plate, 2-transition plate, 3-middle plate, 4-pitch plate, 5-side slide plate, 6-side support module, 7-screw seat, 8-screw, 9-knurled handle, 10-yaw block, 11-rotation fixed block, 12-adjustment screw seat, 13-adjustment screw, 14-soft pad, 15-middle pad, 16-air flotation module, 17-guide rail clamp, 18-slider, 19-guide rail, 20-tightening bolt, 21-handle, 22-slewing bearing, 23-rotation positioning pin. DETAILED DESCRIPTION

[0057] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this should not limit the scope of protection of the present invention.

[0058] The air-floating adjustment frame of the present invention is mainly used for the precision detection of large optical elements, and realizes the rapid positioning and high-precision posture adjustment of optical elements through air-floating movement, multi-stage adjustment and modular design.

[0059] Example:

[0060] See also Figure 1-3As shown in the figure, an air-floating adjustment frame for optical component detection with large swing angle and fine adjustment includes a base plate 1, a transition plate 2, a middle plate 3, a pitch plate 4, a side slide plate 5, a side support module 6, a screw seat 7, a screw 8, a knurled handle 9, a yaw block 10, a rotation fixing block 11, an adjustment screw seat 12, an adjustment screw 13, a side cushion 14, a middle cushion 15, an air-floating module 16, a guide rail clamp 17, a slider 18, a guide rail 19, a clamping bolt 20, a handle 21, a slewing bearing 22 and a rotation positioning pin 23.

[0061] Air floatation mobile system:

[0062] An air flotation module 16 is mounted on the bottom of base plate 1 and secured with threads. Air pressure supports the entire adjustment mount, eliminating mechanical friction and enabling smooth, low-resistance movement. A handle 21 is threaded onto base plate 1 for manual gripping and movement. This aids in handling and adjusting heavy optical components, often weighing several meters.

[0063] Large-angle tilt mechanism:

[0064] The base plate 1 and the transition plate 2 are connected by a slewing bearing 22 to achieve large-angle rotation in the horizontal plane.

[0065] The rotation positioning pin 23 cooperates with the array of blind holes at the bottom of the middle plate 3 to achieve rapid angle locking (such as 0° to 360° indexing positioning).

[0066] The slewing bearing 22 is threadedly connected to the bottom plate 1, and the transition plate 2 is threadedly connected to the two slewing bearings 22. The rotation positioning pin 23 is threadedly connected to the rotation fixing block 11, and the middle plate 3 is threadedly connected to the slewing support shaft 22. The rotation fixing pin 23 cooperates with the array of blind holes at the bottom of the middle plate 3 to fix the large rotation angle.

[0067] High-precision fine-tuning mechanism:

[0068] Fine adjustment of the deflection: The deflection block 10 and the rotating fixed block 11 are installed on the transition plate 2. The screw 8 cooperates with the ball head groove of the deflection block 10, and the knurled handle 9 is rotated to push the ball head to tilt the deflection block around the horizontal axis, thereby achieving nanometer-level angle fine adjustment.

[0069] Pitch fine-tuning: Use the adjustment screw 13 and the clamping bolt 20 to adjust the tilt angle of the pitch plate 4 and fix it with the locking mechanism.

[0070] Among them, the adjustment screw seat 12 is fixed with the hole axis of the middle plate 3, the adjustment screw 13 passes through the pitch plate 4, and the clamping screw 20 passes through the adjustment screw 13 and is threadedly connected to the middle plate 3. The adjustment screw seat 12, the adjustment screw 13 and the clamping screw 20 cooperate to suspend the pitch plate 4 above the middle plate 3, and fine-tune the angle of the pitch plate 4, thereby adjusting the posture of the optical element.

[0071] Lateral positioning and fixing mechanism:

[0072] The side slide 5 is displaced laterally by the guide rail 19 and the slider 18 to accommodate optical elements of different sizes.

[0073] The guide rail 19 is fixed to the pitch plate 4 via a threaded connection. The central spacer 15 is also threadedly connected to the pitch plate 4. The slider 18 slides with the guide rail 19 and is locked in position by the guide rail clamp 17. The side slide 5 connects the slider 18 and the side support module 6 to achieve lateral translation. The side cushion 14 is threadedly connected to the side support module 6, providing flexible contact with the optical element, preventing scratches while accommodating curved surfaces.

[0074] The working principle and operation process of this embodiment are as follows:

[0075] First, assemble the main components: symmetrically install two slewing bearings 22 on both sides of the upper surface of the base plate 1, ensuring that the central axes of the bearings are parallel; fix the transition plate 2 to the slewing bearings 22 with bolts; install the yaw block 10 and the rotation fixed block 11 on the upper surface of the transition plate 2, and the spacing between them is determined according to the size of the middle plate 3; connect the middle plate 3 to the transition plate 2 through the slewing bearings 22; evenly install 4-6 air flotation modules 16 on the bottom of the base 1 to form a stable air flotation support surface.

[0076] Next, debug the air flotation system: connect the external air source to the air flotation module 16 and adjust the air pressure to 0.4-0.6 MPa. After starting the air flotation system, check whether each air flotation unit is evenly stressed. Adjust the air pressure to keep the suspension height of the adjustment frame at 0.1-0.3 mm. Test the movement resistance of the adjustment frame to ensure that it can be easily pushed by one person.

[0077] Then, clamp the optical element: loosen the guide rail clamp 17 and slide the side slides 5 on both sides outward to the maximum position; use the lifting equipment to place the optical element steadily on the middle pad 15 of the pitch plate 4; push the side slides 5 on both sides so that the side pads 14 lightly touch the edge of the optical element; lock the guide rail clamp 17 to ensure that the optical element is stable but not subjected to excessive stress.

[0078] Next, perform large-angle deflection adjustment: pull out the rotating positioning pin 23 to release the fixation of the middle plate 3; manually rotate the middle plate 3 to the required angle and observe the angle scale indication; insert the rotating positioning pin 23 into the corresponding array-type blind hole to complete the rough positioning; perform fine adjustment by rotating the knurled handle 9: rotate clockwise to push out the screw 8, pushing the deflection block 10 to produce positive deflection; rotate counterclockwise to reduce the deflection angle.

[0079] Next, adjust the pitch angle: loosen the hold-down bolt 20; rotate the adjustment screw 13: clockwise to raise one side of the pitch plate 4, and counterclockwise to lower it; use an electronic level to monitor the pitch angle, and tighten the hold-down bolt 20 when it reaches the target value; repeat the above steps to adjust the other side until the optical element reaches the ideal posture.

[0080] Finally, check the positioning: turn off the air flotation module 16 to place the adjustment frame firmly on the optical platform; use the laser interferometer to align the surface of the optical element; perform secondary fine-tuning as needed: adjust the yaw angle using the knurled handle 9 and correct the pitch angle using the adjustment screw 13; after confirming that the posture is correct, you can use the laser interferometer to detect the surface parameters of the optical element.

[0081] This embodiment utilizes a hierarchical structure consisting of a base plate, transition plate, mid-plate, and pitch plate, coupled with slewing bearings to achieve 360° yaw. The ball-end structure of the screw and yaw block allows for nanometer-level fine-tuning. The air-floating module allows for easy movement and positioning of ton-scale optical components. The side slides and guide rails accommodate components of varying sizes, while the center block and side cushions ensure secure clamping. This combination of air-floating support, wide-range rotational positioning, and micrometer-level fine-tuning meets the demand for efficient and precise adjustment in the field of optical inspection and has broad application prospects.

[0082] The above embodiments are described to facilitate understanding and application of the invention by those skilled in the art. It is apparent that those skilled in the art can readily make various modifications to these embodiments and apply the general principles described herein to other embodiments without requiring creative effort. Therefore, the present invention is not limited to the above embodiments. Improvements and modifications made by those skilled in the art based on the disclosure of the present invention, without departing from the scope of the present invention, should fall within the scope of protection of the present invention.

Claims

1. A large swing angle, fine-tunable optical component detection air-floating adjustment frame, characterized in that: include: Bottom plate (1); An air flotation module (16) is fixedly mounted on the bottom of the base plate (1) and is used to provide air flotation support to enable the adjustment frame to be movable; Slewing bearings (22) are symmetrically arranged on both sides of the upper surface of the base plate (1); The transition plate (2) is connected to the base plate (1) via the two slewing bearings (22) to achieve horizontal rotation; The middle plate (3) is connected to the transition plate (2) via the two slewing bearings (22), and has an array of blind holes distributed in a circumferential manner at its bottom; The pitch plate (4) is suspended above the middle plate (3) through an adjustment screw seat (12), an adjustment screw (13) and a clamping bolt (20) for fine-tuning the angle; A deflection block (10) and a rotation fixing block (11) are fixed to the upper surface of the transition plate (2) and are used for large angle and fine adjustment of the optical element to be inspected; A rotating positioning pin (23) is detachably mounted on the rotating fixed block (11) and is used to cooperate with the blind hole at the bottom of the middle plate (3) to achieve large-angle positioning; Guide rails (19) are fixedly mounted on both sides of the upper surface of the pitch plate (4); A slider (18) is slidably engaged with the guide rail (19); A side slide (5) is fixedly connected to the slider (18); A side support module (6) is mounted on the side slide plate (5) and is provided with a side cushion (14) for contacting the optical element; A middle pad (15) is fixed to the middle of the pitch plate (4) for supporting the optical element; A screw seat (7) is fixed on the transition plate (2); The screw (8) is threadably matched with the screw seat (7) and has a ball head on the top; a knurled handle (9) connected to the screw (8) for rotational adjustment; An adjusting screw seat (12) is fixed on the middle plate (3); An adjusting screw (13) passes through the pitch plate (4) and cooperates with the adjusting screw seat (12); A tightening bolt (20) for locking the adjusting screw (13); A guide rail clamp (17) for locking the position of the slider (18); A handle (21) is mounted on the side of the base plate (1) for manual movement.

2. The large swing angle, fine-tunable optical component detection air-floating adjustment stand according to claim 1, characterized in that: The adjusting screw seat (12) is fixed on the middle plate (3); the adjusting screw (13) passes through the through hole of the pitch plate (4) and is threadedly engaged with the adjusting screw seat (12); the clamping bolt (20) passes through the axial hole of the adjusting screw (13) and is threadedly connected to the middle plate (3); the tilt angle of the pitch plate (4) can be changed by screwing the adjusting screw (13) and is locked by the clamping bolt (20).

3. The large swing angle, fine-tunable optical component detection air-floating adjustment stand according to claim 1, characterized in that: The screw (8) is mounted on the transition plate (2) via a screw seat (7); the ball head at the top of the screw (8) contacts the groove of the deflection block (10); and the screw (8) can be driven to move axially by rotating the knurled handle (9), thereby pushing the deflection block (10) to achieve angle fine-tuning.

4. The large swing angle, fine-tunable optical component detection air-floating adjustment stand according to claim 1, characterized in that: The bottom of the middle plate (3) is provided with an array of blind holes arranged in a circumferential manner; the rotating positioning pin (23) can be inserted into the rotating fixed block (11) and the selected blind hole; large-angle positioning is achieved by pulling out the positioning pin, rotating the middle plate (3) to a desired angle, and then reinserting the positioning pin.

5. The large swing angle, fine-tunable optical component detection air-floating adjustment stand according to claim 1, characterized in that: The guide rails (19) are arranged in parallel on both sides of the pitch plate (4); the slider (18) can slide along the guide rails (19); the side slide plate (5) can realize lateral position adjustment through the slider (18); and the guide rail clamp (17) is used to lock the position of the slider (18).

6. The large swing angle, fine-tunable optical component detection air-floating adjustment stand according to claim 1, characterized in that: The air flotation module (16) comprises: a plurality of air flotation units evenly distributed at the bottom of the base plate (1); the opening and closing of the air flotation units are controlled by an air supply system; when started, the adjustment frame is suspended on the work surface; when closed, the adjustment frame is placed firmly.

7. The large swing angle, fine-tunable optical element detection air-floating adjustment stand according to claim 1, characterized in that: The side support module (6) comprises: a support frame adjustably mounted on the side slide plate (5); and the side cushion (14) is made of elastic material and fixed to the end of the support frame via a threaded connection.

8. The large swing angle, fine-tunable optical component detection air-floating adjustment stand according to claim 1, characterized in that: The middle pad (15) is fixed to the middle of the pitch plate (4) through a threaded connection, and a buffer layer is provided on the upper surface for protecting optical elements.

9. A method for detecting an optical component, using the air-floating adjustment mount according to any one of claims 1 to 8, characterized in that The following steps are involved: Activating the air flotation module (16) to suspend the adjustment frame; The adjustment frame is moved to a working position by means of a handle (21); Loosen the guide rail clamp (17) and adjust the position of the side slide (5); Place the optical element on the middle pad (15), make the side cushions (14) contact the side of the element, and then lock the guide rail clamp (17); Close the air flotation module (16) to fix the adjustment frame; Pull out the rotating positioning pin (23), rotate the middle plate (3) to the detection angle, and then insert the positioning pin to fix it; Fine adjustment of angle is performed via the knurled handle (9) and the adjusting screw (13); Use testing instruments to detect the surface parameters of optical components.

10. The method according to claim 9, characterized in that During the angle fine-tuning step: The screw (8) is driven to move by rotating the knurled handle (9), thereby pushing the deflection block (10) to achieve deflection fine adjustment; The tilt angle of the pitch plate (4) is changed by turning the adjusting screw (13) and locked with the clamping bolt (20).

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