Full-automatic detection equipment for semiconductor packaging products

Abstract

The invention belongs to the technical field of detection, and particularly relates to a semiconductor packaging product full-automatic detection device which comprises a machine table body, a bearing table fixedly arranged at the top of the machine table body and a third supporting frame located on the bearing table, a first three-axis moving support fixedly arranged on the third supporting frame, and a second three-axis moving support fixedly arranged on the third supporting frame. A carrying module is arranged on the first three-axis moving bracket, the carrying module comprises a first clamping jaw and a second clamping jaw, and the first clamping jaw and the second clamping jaw are respectively used for clamping to-be-detected products with different sizes; a plurality of reinspection modules are arranged on the bearing table and located below the third supporting frame. The product is reinspected and casually inspected through the reinspection module, full-automatic inspection of the product is achieved, casual inspection of different types can be achieved through the automatic reinspection mode, and compared with manual random taking casual inspection, the automatic reinspection mode is more efficient and more convenient to use.

Description

Technical Field

[0001] The invention belongs to the field of detection technology, in particular to a fully automatic detection device for semiconductor packaging products. Background Art

[0002] Packaged semiconductors must undergo multiple tests and be classified and graded by sorting machines to ensure product reliability and yield. Semiconductor technology supports a variety of application scenarios such as integrated circuits, optoelectronic devices, and power devices. Its manufacturing equipment (such as high-precision lithography machines and automated sorting machines) and process innovations continue to promote the miniaturization and high performance of electronic equipment.

[0003] In the field of semiconductor manufacturing, product quality control is of vital importance, and defect detection is a key link in ensuring product quality. During the production process of semiconductor packaging products, due to various process factors, many defects such as scratches on the chip surface, solder joint defects, and cracks inside the package may appear. If these defects cannot be detected in a timely and accurate manner, they will seriously affect the performance and reliability of semiconductor products, and then cause electronic equipment failures, resulting in huge losses to users. For example, the Chinese invention patent with the publication number CN116273960A, entitled "An Automated Inspection Device for Semiconductor Devices," discloses a device comprising a loading section, a conveying section, an inspection section, and a receiving section. The loading section is configured to transport a magazine containing semiconductor devices to be inspected to a predetermined location and sequentially transfer the frames containing the semiconductor devices to be inspected in the magazine to the conveying section. The conveying section includes a separately placed conveyor belt mechanism and a lifting mechanism. The conveyor belt mechanism delivers the frames to the inspection station. The lifting mechanism lifts the semiconductor devices to be inspected and also replaces the inspected semiconductor devices in the frames. The inspection section performs defect inspection on the lifted semiconductor devices to be inspected. The receiving section receives the inspected semiconductor devices and frames into the magazine. The lifting mechanism lifts the semiconductor devices and then allows the inspection section to move, preventing equipment vibration from affecting the position of the semiconductor devices.

[0004] The above-mentioned equipment sets the detection position on the conveying part. The conveying part will generate vibration during operation. This vibration will be transmitted to the frame where the component to be tested is located, causing the component to be tested to shake, thereby affecting the detection accuracy. In order to solve this problem, some solutions in the existing technology set a lifting mechanism to lift the product to be tested from the tray and then perform detection through the movement of the detection part, so as to avoid the influence of the vibration of the conveying part on the position of the semiconductor device. However, although this solution solves the vibration problem to a certain extent, its detection mode will still be affected by the close-range conveying components, and there will be limitations. It is impossible to achieve fully automated detection, the detection efficiency is low, and the random inspection process relies on manual random picking, and the accuracy and reliability of the random inspection are difficult to guarantee.

[0005] Therefore, in order to solve the above problems, a fully automatic detection device for semiconductor packaging products is proposed. Summary of the Invention

[0006] The purpose of the present invention is to address the deficiencies of the prior art and to solve the technical problems raised in the background art by providing a fully automatic detection device for semiconductor packaging products.

[0007] In order to solve the above technical problems, the following technical solutions are adopted: a fully automatic inspection device for semiconductor packaging products, comprising a machine body, a carrying platform fixedly provided on the top of the machine body; and further comprising: a third support frame located on the carrying platform, wherein a first three-axis movable bracket is fixedly provided on the third support frame, and a transport module is provided on the first three-axis movable bracket; A plurality of re-inspection modules are provided on the carrying platform and below the third support frame; A transmission module is provided on the carrying platform, and the transmission module is divided into three sections, namely the feeding station of the product to be tested, the loading and unloading station of the product testing, and the product discharging station; A detection module is provided on the carrying platform and at a position away from the transmission module to prevent the vibration caused by the transmission module during the transportation of the product from affecting the accuracy of the detection by the detection module; A binning module is provided on the carrying platform and below the transmission module; There are multiple groups of code reading components on the carrying platform, and the multiple groups of code reading components correspond to the feeding station of the product to be tested, the testing platform of the testing module and the product discharging station respectively; A product jig, which is used to carry the product; When the test result shows that the product is unqualified, the re-inspection process of the unqualified product is carried out; When random inspection of the test results of the testing equipment is required, the re-inspection module implements the random inspection process.

[0008] Preferably, a second photoelectric sensor, a second sensing baffle, a grating scale and a reading head are fixedly provided on the first three-axis movable bracket, at least two groups of the second photoelectric sensors are provided and correspond to the transport module, the grating scale and the reading head are cooperated to obtain the displacement data of the first three-axis movable bracket in two horizontal directions, and the second photoelectric sensor and the second sensing baffle are cooperated to detect the in-place data of the transport module.

[0009] Preferably, the re-inspection module includes a first base plate, a lifting assembly is provided on the first base plate, the first base plate is connected to a second base plate via the lifting assembly, belt conveyors are symmetrically provided on the second base plate, and a limiting unit for limiting the lifting assembly is further provided on the first base plate; The lifting assembly includes a connecting rod provided on a first base plate, the first base plate is connected to the second base plate via the connecting rod, a linear flange bearing is provided on the connecting rod, the linear flange bearing is fixedly connected to the supporting platform, a second rotary motor is fixedly provided at the bottom of the first base plate, and an output end of the second rotary motor extends to the first base plate and is fixedly connected to a ball screw; The limiting unit includes a mounting frame, a first photoelectric sensor is fixedly installed on the mounting frame, a first sensing baffle is further provided on the first bottom plate, the first sensing baffle corresponds to the first photoelectric sensor, and a first feeding sensor is fixedly provided on the belt conveyor and located between the second bottom plate and the product fixture; The belt conveyor is also provided with a first proximity switch.

[0010] Preferably, the transport module comprises a first clamping jaw and a second clamping jaw, wherein the first clamping jaw and the second clamping jaw are respectively used to clamp products of different sizes; The transport module also includes a mounting plate fixedly connected to the first three-axis mobile bracket, a first rotating motor is fixedly installed on the mounting plate, and a plurality of telescopic cylinders are provided on the outside of the mounting plate extending from the first rotating motor, and a clamping motor is provided at the bottom of the plurality of telescopic cylinders, respectively, and the output end of the clamping motor is respectively connected to the first clamping jaw and the second clamping jaw, and a laser sensor is provided on one side of the clamping jaw motor.

[0011] Preferably, the transmission module includes a second support frame fixedly arranged on the supporting platform, a belt line transmission mechanism is fixedly arranged on the second support frame, a second feed sensor and a discharge sensor are respectively arranged at the head and tail ends of the belt line transmission mechanism, a second proximity switch is fixedly arranged on the top of the belt line transmission mechanism, a plurality of side positioning mechanisms are fixedly arranged on the outside of the belt line transmission mechanism, a limit seat is fixedly arranged on the inside of the belt line transmission mechanism, and an in-position sensor is fixedly arranged on the belt line transmission mechanism and close to the limit seat.

[0012] Preferably, a contour detection component and a three-dimensional dimension detection component are sequentially arranged on the supporting platform and close to the detection module, the detection module includes a fourth support frame fixedly mounted on the supporting platform, a driving motor is arranged on the supporting platform and located on the inner side of the fourth support frame, a connecting claw hook is fixedly arranged at the output end of the driving motor, and a rotating detection platform is arranged on the connecting claw hook.

[0013] Preferably, the contour detection assembly includes a limiting side plate, on which a fourth linear guide rail and a handwheel adjuster are sequentially mounted, a second cooperative frame is slidably arranged on the fourth linear guide rail, a first cooperative frame is slidably arranged on the handwheel adjuster, a first camera module is fixedly arranged on the second cooperative frame, and a second camera module is fixedly arranged on the first cooperative frame; The contour detection component also includes a second linear guide rail arranged on the supporting platform, a second slider is slidably arranged on the second linear guide rail, a third linear guide rail is fixedly arranged on the second slider, a third slider is slidably arranged on the third linear guide rail, and the third slider is connected to the limiting side plate.

[0014] Preferably, the three-dimensional dimension detection component includes a fifth support frame arranged on the supporting platform, a second three-axis movable bracket is arranged on the fifth support frame, a side combination frame is fixedly arranged on the second three-axis movable bracket, and a first 3D line laser profiler and a second 3D line laser profiler are arranged on the side combination frame in sequence. The first 3D line laser profiler and the second 3D line laser profiler are arranged opposite to each other and are used to detect the geometric shapes of the front and back sides of the product.

[0015] Preferably, the code reading assembly includes a code reader and a universal adjustment frame arranged on a carrying platform; The code reading assembly corresponding to the detection module detection platform also includes a first linear guide rail arranged on the supporting platform, a first slider is slidably arranged on the first linear guide rail, and the first slider is connected to the universal adjustment frame.

[0016] Preferably, the binning module includes a first support frame fixedly mounted on a carrier platform, a conveyor line is fixedly mounted on the first support frame, and both ends of the conveyor line are provided with a through-beam photoelectric sensor.

[0017] Beneficial effects of the present invention: The present invention uses the re-inspection module to re-inspect and spot-check products, thus achieving fully automated product testing. The automated re-inspection mode can implement different types of spot checks, which is more efficient and more convenient to use than manual random sampling. The detection position is completely separated from the conveying part and an independent detection module is used for detection. This design fundamentally avoids the impact of vibration generated during the operation of the conveying part on the detection process, ensuring that the component under test remains stable during the detection process, thereby significantly improving detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] In the attached figure: Figure 1 This is a schematic diagram of the overall structure of the present invention Figure 1 ; Figure 2 This is a schematic diagram of the overall structure of the present invention Figure 2 ; Figure 3 It is a structural diagram of the transmission module in the present invention; Figure 4 It is a structural diagram of the transport module in the present invention; Figure 5 It is a structural schematic diagram of the third support frame in the present invention; Figure 6 is a schematic structural diagram of the second photoelectric sensor in the present invention; Figure 7 It is a structural diagram of the re-inspection module in the present invention; Figure 8 This invention Figure 7 A magnified schematic diagram of the local structure; Figure 9 It is a structural schematic diagram of the first feeding sensor in the present invention; Figure 10 It is a structural diagram of the code reading component in the present invention; Figure 11 It is a structural diagram of the three-dimensional size detection component of the present invention; Figure 12 It is a schematic structural diagram of the contour detection component in the present invention; Figure 13 It is a structural diagram of the binning module in the present invention; Figure 14 This is a schematic diagram of the overall structure of the present invention Figure 3 ; Figure 15 This invention Figure 14 Enlarged schematic diagram of the local structure.

[0020] Legend: 1. Machine body; 2. Binning module; 21. Through-beam photoelectric sensor; 22. Conveyor line; 23. First support frame; 3. Handling module; 31. Mounting plate; 32. First rotary motor; 33. Laser sensor; 34. Telescopic cylinder; 35. Gripper motor; 36. First gripper; 37. Second gripper; 4. Re-inspection module; 41. First base plate; 42. Connecting rod; 43. Ball screw; 44. Limiting unit; 441. Mounting frame; 45. Second rotary motor; 4 6. First induction baffle; 47. Linear flange bearing; 48. Second base plate; 49. First proximity switch; 410. Belt conveyor; 411. First feed sensor; 412. Product fixture; 413. First photoelectric sensor; 5. Transmission module; 51. Second feed sensor; 52. Belt conveyor; 53. Second proximity switch; 54. Second support frame; 55. Side positioning mechanism; 56. In-position sensor; 57. Limit seat; 58. Discharge sensor; 6. Load-bearing 61, third support frame; 612, first three-axis movable support; 613, second photoelectric sensor; 614, second induction baffle; 615, grating scale; 616, reading head; 62, code reading assembly; 621, code reader; 622, first linear guide rail; 623, first slider; 624, universal adjustment frame; 7, detection module; 71, rotating detection platform; 73, fourth support frame; 74, drive motor; 75, connecting claw hook; 8, contour detection assembly; 81, second Linear guide rail; 82, second slider; 83, third linear guide rail; 84, third slider; 85, limiting side plate; 86, fourth linear guide rail; 87, handwheel adjuster; 88, first cooperative frame; 89, first camera module; 810, second camera module; 811, second cooperative frame; 9, three-dimensional dimension detection component; 91, first 3D line laser profiler; 92, second 3D line laser profiler; 93, fifth support frame; 94, side combination frame; 96, second three-axis movable bracket. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0022] Specific examples are given below.

[0023] See also Figures 1-15 The present invention provides a fully automatic detection device for semiconductor packaging products, comprising a machine body 1, a carrying platform 6 fixedly provided on the top of the machine body 1, and further comprising: A third support frame 61 is located on the carrier platform 6. A first three-axis movable bracket 612 is fixedly mounted on the third support frame 61. A transport module 3 is mounted on the first three-axis movable bracket 612. The transport module 3 includes a first clamping jaw 36 and a second clamping jaw 37. The first clamping jaw 36 and the second clamping jaw 37 are respectively used to clamp products to be inspected of different sizes. A plurality of re-inspection modules 4 are provided on the carrier platform 6 and below the third support frame 61. Each of the re-inspection modules 4 has a U-shaped notch. The U-shaped notch is provided to allow the re-inspection module 4 to avoid the transmission module 5 during the rising process. A transmission module 5 is also provided on the carrier platform 6. The transmission module 5 is divided into three sections, which are used for the feeding station of the product to be tested, the loading and unloading station of the product testing, and the product discharging station. The re-inspection module 4 on the feeding station side is used to transfer the product to be re-inspected to the transmission module 5, and the re-inspection module 4 on the discharging station side is used to transfer the sampled products out. The re-inspection module 4 includes a first base plate 41, on which a lifting assembly is provided. The first base plate 41 is connected to a second base plate 48 via the lifting assembly. A belt conveyor 410 is symmetrically provided on the second base plate 48. A limiting unit 44 for limiting the lifting assembly is also provided on the first base plate 41. A detection module 7 is provided on the carrying platform 6 and at a position away from the transmission module 5 to prevent the vibration caused by the transmission module 5 during the transportation of the product from affecting the detection accuracy of the detection module 7. A contour detection component 8 and a three-dimensional dimension detection component 9 are provided on the carrying platform 6 and near the detection module 7. The contour detection component 8 is used to detect local features on the surface of the product, and the three-dimensional dimension detection component 9 is used to detect the overall geometric shape of the product. The contour detection assembly 8 includes a limiting side plate 85, on which a fourth linear guide 86 and a handwheel adjuster 87 are sequentially mounted. A second cooperative frame 811 is slidably mounted on the fourth linear guide 86, and a first cooperative frame 88 is slidably mounted on the handwheel adjuster 87. A first camera module 89 is fixedly mounted on the second cooperative frame 811, and a second camera module 810 is fixedly mounted on the first cooperative frame 88. A binning module 2 is provided on the carrier 6 and below the transmission module 5. The binning module 2 is used to centrally transmit unqualified products. The carrier 6 is provided with a plurality of sets of code reading components 62, which correspond one by one to the feeding station of the product to be tested, the detection platform of the detection module 7 and the product discharge station, and are used to confirm the product information of the corresponding station; Product fixture 412, product fixture 412 is used to carry products.

[0024] When in use, the third support frame 61 located on the carrying platform 6 is used to load and support the first three-axis mobile bracket 612. The handling module 3 provided on the first three-axis mobile bracket 612 includes but is not limited to loading and supporting the first clamping jaw 36 and the second clamping jaw 37. The first clamping jaw 36 and the second clamping jaw 37 are respectively used to clamp products to be inspected of different sizes, thereby improving the performance of the device in the process of inspecting products and expanding its scope of use. Multiple re-inspection modules 4 are provided on the carrier 6 and below the third support frame 61 to re-inspect and spot-check the products on the transmission module 5, thereby improving the qualified rate of the products after they are discharged. The U-shaped notches provided on the multiple re-inspection modules 4 are used to avoid the transmission module 5 during the displacement process. The transmission module 5 is used for transporting semiconductor products during testing, and the transmission module 5 is divided into three sections, which are respectively used for the feeding station of the product to be tested, the loading and unloading station of the product testing, and the product unloading station. The re-inspection module 4 located on the side of the feeding station is used to transfer the products to be re-inspected to the transmission module 5 for subsequent testing. The re-inspection module 4 located on the side of the unloading station is used to transfer the randomly inspected products out. This process realizes the unloading processing of the product after testing. The lifting assembly provided on the first base plate 41 is used to drive the second base plate 48 to lift, so that the re-inspection module 4 can be adapted to the position where it is working, which can make the use of the device more convenient. The second base plate 48 connected to the first base plate 41 through the lifting assembly is used to load and support the belt conveyor 410. The belt conveyor 410 symmetrically arranged on the second base plate 48 is used to realize the flow of the product fixture 412 and the products on the product fixture 412, ensuring the normal progress of the re-inspection and random inspection work. The first base plate 41 is also provided with a limiting unit 44 for limiting the lifting assembly. During the lifting process of the second base plate 48, the limiting unit 44 can make the second base plate 48 stay at the target working position and limit its moving distance, thereby improving the adaptability of the device and making the device more convenient to use. The detection module 7 provided on the carrying platform 6 and located on the side of the transmission module 5 away from the re-inspection module 4 is used to connect the product jig 412 and the product on the product jig 412, and is used to carry the product to be inspected for local features and geometric shapes, so as to facilitate subsequent inspection of the product. The contour detection component 8 is used to detect local features on the surface of the product, and the three-dimensional dimension detection component 9 is used to detect the overall geometric shape of the product. The present device can more comprehensively detect the local features and geometric shapes of the product through the contour detection component 8 and the three-dimensional dimension detection component 9, wherein the local features include the groove depth, straightness, angle and surface roughness on the product, and several shapes include curved surfaces, volumes and spatial coordinates, etc. The limiting side plate 85 is used to load the fourth linear guide 86 and the handwheel adjuster 87. The central axes of the fourth linear guide 86 and the handwheel adjuster 87 are in the same straight line. The second cooperative frame 811 slidably arranged on the fourth linear guide 86 is used to receive the first camera module 89 and the fourth linear guide 86. The first camera module 89 is driven by the fourth linear guide 86 to perform linear displacement. The first cooperative frame 88 slidably arranged on the handwheel adjuster 87 is used to receive the handwheel adjuster 87 and the second camera module 810. The second camera module 810 is driven by the handwheel adjuster 87 to perform linear displacement. The first camera module 89 fixedly arranged on the second cooperative frame 811 and the second camera module 810 fixedly arranged on the first cooperative frame 88 are used to detect local features on the surface of the product; The binning module 2 provided on the carrying platform 6 and below the transmission module 5 is used to transport products that fail the inspection. The binning module 2 can carry multiple product jigs 412 and collect and transport the detected unqualified products, thereby ensuring the efficiency of product inspection and preventing the rejection of defective products during the inspection process from affecting the efficiency of product inspection. The code reading component 62 on the carrier 6 corresponds to the feeding station of the product to be tested, the detection platform of the detection module 7 and the product discharge station one by one, and is used to confirm the product information of the corresponding station; Product jig 412 , which is used to carry and transport products.

[0025] Further, such as Figure 2 、 Figure 5 and Figure 6 As shown, the first three-axis movable bracket 612 is fixedly provided with a second photoelectric sensor 613, a second sensing baffle 614, a grating scale 615 and a reading head 616. At least two groups of second photoelectric sensors 613 are provided and correspond to the transport module 3. The grating scale 615 and the reading head 616 are cooperated to obtain the displacement data of the first three-axis movable bracket 612 in two horizontal directions. The second photoelectric sensor 613 and the second sensing baffle 614 are cooperated to detect the in-place data of the transport module 3.

[0026] When in use, the second photoelectric sensor 613 fixedly arranged on the first three-axis mobile bracket 612 corresponds to the second induction baffle 614. During the use of this device, the first three-axis mobile bracket 612 is required to drive the transport module 3 to move its position. During the movement of the first three-axis mobile bracket 612, the second photoelectric sensor 613 and the second induction baffle 614 are used to determine the moving position of the transport module 3 driven by the first three-axis mobile bracket 612, thereby ensuring that the transport module 3 can accurately clamp the product and ensure the product transfer efficiency. The ruler 615 and the reading head 616 are used to record the displacement data of the first three-axis movable bracket 612. At least two groups of second photoelectric sensors 613 are provided and correspond to the transport module 3. The grating ruler 615 and the reading head 616 are used to obtain the displacement data of the first three-axis movable bracket 612 in two horizontal directions. The second photoelectric sensor 613 and the second sensing baffle 614 are used to detect the in-place data of the transport module 3 so that the first clamp 36 and the second clamp 37 can subsequently clamp the product, thereby improving the efficiency of the device in detecting the product.

[0027] Further, such as Figure 1 、 Figure 7 and Figure 8 As shown, the lifting assembly includes a connecting rod 42 provided on a first base plate 41, the first base plate 41 is connected to the second base plate 48 via the connecting rod 42, a linear flange bearing 47 is provided on the connecting rod 42, and the linear flange bearing 47 is fixedly connected to the supporting platform 6, a second rotary motor 45 is fixedly provided at the bottom of the first base plate 41, and a ball screw 43 is provided at the output end of the second rotary motor 45; The limiting unit 44 includes a mounting frame 441, on which a first photoelectric sensor 413 is fixedly installed. A first sensing block 46 is also provided on the first bottom plate 41, and the first sensing block 46 corresponds to the first photoelectric sensor 413. A plurality of first feeding sensors 411 are fixedly provided on the second bottom plate 48 and located between the second bottom plate 48 and the product fixture 412. The belt conveyor 410 is further provided with a first proximity switch 49 .

[0028] When in use, the lifting assembly includes a connecting rod 42 provided on the first base plate 41, which can connect the first base plate 41 and the second base plate 48. The first base plate 41 is connected to the second base plate 48 through the connecting rod 42. The linear flange bearing 47 provided on the connecting rod 42 is fixedly connected to the carrier platform 6, thereby ensuring the stability of the lifting of the re-inspection module 4 during use. The linear flange bearing 47 is fixedly connected to the carrier platform 6. The second rotary motor 45 fixedly provided at the bottom of the first base plate 41 is used to drive the ball screw 43 to rotate. The output end of the second rotary motor 45 extends to the ball screw 43 fixedly connected to the first base plate 41 to drive the second base plate 48 to lift and lower, thereby ensuring efficient transportation of products on the belt conveyor 410. The limiting unit 44 includes a mounting frame 441, which is used to load the first photoelectric sensor 413. The first photoelectric sensor 413 fixed on the mounting frame 441 is used to detect the moving position of the second base plate 48. The first sensing baffle 46 is also provided on the first base plate 41 to cooperate with the first photoelectric sensor 413, so that the position distance of the second base plate 48 is controlled by the cooperation of the two, thereby ensuring the accuracy of the product transported by this device. The first sensing baffle 46 corresponds to the first photoelectric sensor 413, and the multiple first feeding sensors 411 provided on the belt conveyor 410 are used to detect the feeding and discharging of products on the belt conveyor 410.

[0029] Further, such as Figure 1 、 Figure 2 and Figure 4 As shown, the transport module 3 also includes a mounting plate 31 fixedly connected to the first three-axis mobile bracket 612, and a first rotating motor 32 is fixedly installed on the mounting plate 31. The first rotating motor 32 extends to the outside of the mounting plate 31 and is provided with a plurality of telescopic cylinders 34. The bottoms of the plurality of telescopic cylinders 34 are respectively provided with clamping motors 35, and the output ends of the clamping motor 35 are respectively connected to the first clamping jaw 36 and the second clamping jaw 37, and a laser sensor 33 is provided on one side of the clamping motor 35.

[0030] When in use, the transport module 3 also includes a mounting plate 31 fixedly connected to the first three-axis movable bracket 612. The mounting plate 31 is used to load the first rotating motor 32, and it is connected to the first three-axis movable bracket 612. Driven by the first three-axis movable bracket 612, it performs linear movement within the three-axis range. The first rotating motor 32 fixedly set on the mounting plate 31 is used to realize the rotation of the first clamp 36 and the second clamp 37. The first rotating motor 32 extends to the outside of the mounting plate 31. The multiple telescopic cylinders 34 set are used to control the linear position of the clamp motor 35. The multiple clamp motors 35 set at the bottom of the multiple telescopic cylinders 34 are used to control the picking and placing of products. The output ends of the multiple clamp motors 35 are respectively connected to the first clamp 36 and the second clamp 37. The laser sensor 33 set on one side of the clamp motor 35 is used to detect whether the product is successfully clamped, or whether there is a product on the inside of the first clamp 36 and the second clamp 37.

[0031] Further, such as Figure 1 、 Figure 2 and Figure 3 As shown, the transmission module 5 includes a second support frame 54 fixedly arranged on the supporting platform 6, a belt line transmission mechanism 52 is fixedly arranged on the second support frame 54, a second feed sensor 51 and a discharge sensor 58 are respectively provided at the head and tail ends of the belt line transmission mechanism 52, a second proximity switch 53 is fixedly arranged on the belt line transmission mechanism 52, a plurality of side positioning mechanisms 55 are fixedly arranged on the outer side of the belt line transmission mechanism 52, a limit seat 57 is fixedly arranged on the inner side of the belt line transmission mechanism 52, and an in-position sensor 56 is fixedly provided on the belt line transmission mechanism 52 and near the limit seat 57.

[0032] When in use, the transmission module 5 includes a second support frame 54 fixedly arranged on the re-inspection module 4 for loading the belt line transmission mechanism 52 to ensure the stable use of the belt line transmission mechanism 52 when the device is in use. The belt line transmission mechanism 52 fixedly arranged on the second support frame 54 is divided into three sections, which are respectively used for the feeding station of the product to be tested, the loading and unloading station of the product inspection, and the product unloading station. The second feeding sensor 51 and the discharging sensor 58 respectively arranged at the head and tail ends of the belt line transmission mechanism 52 are used to detect the feeding and unloading of the product on the belt line transmission mechanism 52, and the second proximity switch 53 fixedly arranged on the top of the belt line transmission mechanism 52 is used to detect the product fixture 412 To determine whether the product is close to the position, multiple side positioning mechanisms 55 fixedly arranged on the outside of the belt line transmission mechanism 52 are used to position the product jig 412. When it is started, the product jig 412 is pushed out, thereby fixing the position of the product jig 412, so that the clamping action of the product during inspection is stable. The limit seat 57 fixedly arranged on the inside of the belt line transmission mechanism 52 is used to detect whether the position of the product jig 412 has been reached. The in-position sensor 56 fixedly arranged on the belt line transmission mechanism 52 and close to the limit seat 57 cooperates with the side positioning mechanism 55 to fix the position of the product jig 412 to be inspected, so as to facilitate the product to be clamped.

[0033] Further, such as Figure 1 、 Figure 2 and Figure 15 As shown, the detection module 7 includes a fourth support frame 73 fixedly mounted on the supporting platform 6, a driving motor 74 is provided on the supporting platform 6 and located on the inner side of the fourth support frame 73, a connecting claw hook 75 is fixedly provided at the output end of the driving motor 74, and a rotating detection platform 71 is provided on the connecting claw hook 75.

[0034] When in use, the detection module 7 includes a fourth support frame 73 fixedly mounted on the supporting platform 6 for fixing the driving motor 74. The driving motor 74 is used to receive the product fixture 412 and the product on the product fixture 412 through the rotating detection platform 71 set by the connecting claw hook 75, and rotates under the drive of the driving motor 74 set on the supporting platform 6 to realize the fluidity detection of the product and ensure the detection efficiency of the product. The connecting claw hook 75 fixedly set at the output end of the driving motor 74 is used to receive the driving motor 74 and the rotating detection platform 71 to ensure the stable connection between the two. The connecting claw hook 75 is fixedly connected to the rotating detection platform 71.

[0035] Further, such as Figure 1 、 Figure 2 and Figure 12As shown, the contour detection component 8 also includes a second linear guide rail 81 arranged on the supporting platform 6, a second slider 82 is slidably arranged on the second linear guide rail 81, a third linear guide rail 83 is fixedly arranged on the second slider 82, a third slider 84 is slidably arranged on the third linear guide rail 83, and the third slider 84 is connected to the limiting side plate 85.

[0036] When in use, the contour detection component 8 also includes a second linear guide 81 arranged on the supporting platform 6 for driving the second slider 82 to perform linear displacement, the second slider 82 slidingly arranged on the second linear guide 81 is used to load the third linear guide 83 and drive the third linear guide 83 to displace together, the third linear guide 83 fixedly arranged on the second slider 82 is used to drive the third slider 84 to perform linear displacement, the third slider 84 slidingly arranged on the third linear guide 83 is used to load the limiting side plate 85, and the third slider 84 is connected to the limiting side plate 85.

[0037] Further, such as Figure 1 、 Figure 2 and Figure 11 As shown, the three-dimensional dimension detection component 9 includes a fifth support frame 93 arranged on the supporting platform 6, a second three-axis movable bracket 96 is arranged on the fifth support frame 93, a side combination frame 94 is fixedly arranged on the second three-axis movable bracket 96, and a first 3D line laser profiler 91 and a second 3D line laser profiler 92 are arranged on the side combination frame 94. The first 3D line laser profiler 91 and the second 3D line laser profiler 92 are used to detect the geometric shapes of the front and back sides of the product.

[0038] When in use, the three-dimensional dimension detection component 9 includes a fifth support frame 93 arranged on the supporting platform 6 for loading and supporting the second three-axis movable bracket 96, the second three-axis movable bracket 96 arranged on the fifth support frame 93 is used to drive the side combination frame 94 to perform three-axis displacement, the side combination frame 94 fixedly arranged on the second three-axis movable bracket 96 is used to load the first 3D line laser profiler 91 and the second 3D line laser profiler 92, the first 3D line laser profiler 91 and the second 3D line laser profiler 92 arranged in sequence on the side combination frame 94 are used to realize the detection of the geometric shape of the product, the first 3D line laser profiler 91 and the second 3D line laser profiler 92 are arranged opposite to each other, and the geometric shape of the front and back sides of the product on the rotating detection platform 71 are detected.

[0039] Further, such as Figure 1 、 Figure 2 and Figure 10 As shown, the code reading assembly 62 includes a code reader 621 and a universal adjustment frame 624 provided on the carrier 6; The code reading assembly 62 corresponding to the detection platform of the detection module 7 further includes a first linear guide rail 622 provided on the carrier platform 6 , a first slider 623 is slidably provided on the first linear guide rail 622 , and the first slider 623 is connected to the universal adjustment frame 624 .

[0040] When in use, the code reader 621 and the universal adjustment frame 624 on the supporting platform 6 correspond to the feeding station, the detection platform of the detection module 7 and the discharging station for obtaining and confirming product information, and the universal adjustment frame 624 is used to adjust the code reader 621; the code reading component 62 corresponding to the detection platform of the detection module 7 also includes a first linear guide rail 622 set on the supporting platform 6, which can be used to load the first slider 623 and drive the first slider 623 to perform linear displacement. The first slider 623 slidingly set on the first linear guide rail 622 is used to drive the universal adjustment frame 624 at this position (corresponding to the universal adjustment frame 624 at the detection platform position of the detection module 7) to move the code reader 621, so as to facilitate the acquisition and confirmation of product information at the detection platform position of the detection module 7.

[0041] Further, such as Figure 1 、 Figure 2 and Figure 13 As shown, the binning module 2 includes a first support frame 23 fixedly mounted on the carrier platform 6 , a conveyor line 22 is fixedly mounted on the first support frame 23 , and a through-beam photoelectric sensor 21 is provided at both ends of the conveyor line 22 .

[0042] When in use, the binning module 2 includes a first support frame 23 fixedly mounted on the supporting platform 6 for loading and supporting the conveyor line 22. The conveyor line 22 fixedly mounted on the first support frame 23 is used to transmit defective products detected by the device. The through-beam photoelectric sensors 21 provided at both ends of the conveyor line 22 are used to detect the presence or absence of incoming materials, thereby controlling the start and shut down of the first support frame 23.

[0043] When the inspection result shows that the product is unqualified, it is further judged that there may be a detection error, and the unqualified product needs to be re-inspected, and the product jig 412 on which the product to be re-inspected is placed is placed at the feeding end of the re-inspection module 4. The initial state of the re-inspection module 4 is below the transmission module 5. When the feeding sensor of the re-inspection module 4 detects the product jig 412, the re-inspection module 4 rises, and at the same time, the belt conveyor 410 is started, driving the product jig 412 to be transported to the feeding station. When the first feeding sensor 411 detects the product jig 412, the belt conveyor 410 stops, and then the re-inspection module 4 descends, thereby placing the product jig 412 at the feeding station of the transmission module 5. When the first proximity switch 49 at the feeding station detects the product jig 412, the belt conveyors 410 of the feeding station and the detection and loading and unloading stations are started, and the normal process continues. When it is necessary to conduct random inspections on the inspection results of the inspection equipment, all products to be inspected on the product fixture 412 are inspected, the limit unit 44 and the linear flange bearing 47 are reset, and the belt conveyor 410 for the loading and unloading station and the discharging station is started. When the product fixture 412 continues to be transmitted, the re-inspection module 4 rises to a certain height. At this time, the first proximity switch 49 of the re-inspection module 4 is higher than the height of the transmission module 5. When the first proximity switch 49 detects the product fixture 412, the re-inspection module 4 rises further, and at the same time, the belt conveyor 410 of the re-inspection module 4 is started to transmit the products to be inspected. When the first feed sensor 411 at the discharging end of the re-inspection module 4 cannot sense the product fixture 412, the belt conveyor 410 of the re-inspection module 4 stops.

[0044] In the description of the present invention, it should be understood that the terms "front and back", "left and right", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the equipment or components referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0045] Of course, in this technical solution, those skilled in the art will understand that the term "a" should be understood as "at least one" or "one or more." That is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple. The term "a" should not be understood as a limitation on quantity.

[0046] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art based on the technical guidance of the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A fully automatic inspection device for semiconductor packaging products, comprising a machine body (1), wherein a supporting platform (6) is fixedly provided on the top of the machine body (1); characterized in that: Also includes: a third support frame (61) located on the bearing platform (6), a first three-axis movable bracket (612) being fixedly provided on the third support frame (61), and a transport module (3) being provided on the first three-axis movable bracket (612); A plurality of re-inspection modules (4) are provided on the carrying platform (6) and below the third support frame (61); A transmission module (5) is provided on the carrier platform (6), and the transmission module (5) is divided into three sections, namely a feeding station for products to be tested, a loading and unloading station for product testing, and a product discharging station; A detection module (7) is provided on the carrier platform (6) and at a position away from the transmission module (5) to prevent the vibration caused by the transmission module (5) during the process of transporting the product from affecting the accuracy of the detection by the detection module (7); A binning module (2) is provided on the carrier platform (6) and below the transmission module (5); There are multiple groups of code reading components (62) on the carrier platform (6), and the multiple groups of code reading components (62) correspond to the feeding station of the product to be tested, the detection platform of the detection module (7) and the product discharging station respectively; A product jig (412), the product jig (412) being used to carry the product; When the test result shows that the product is unqualified, the re-inspection process of the unqualified product is carried out; When random inspection of the test results of the testing equipment is required, the re-inspection module implements the random inspection process.

2. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: A second photoelectric sensor (613), a second sensing baffle (614), a grating scale (615) and a reading head (616) are fixedly provided on the first three-axis movable bracket (612); at least two groups of the second photoelectric sensors (613) are provided and correspond to the transport module (3); the grating scale (615) and the reading head (616) cooperate to obtain displacement data of the first three-axis movable bracket (612) in two horizontal directions; and the second photoelectric sensor (613) and the second sensing baffle (614) cooperate to detect in-position data of the transport module (3).

3. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: The re-inspection module (4) comprises a first bottom plate (41), a lifting assembly is provided on the first bottom plate (41), the first bottom plate (41) is connected to a second bottom plate (48) via the lifting assembly, a belt conveyor (410) is symmetrically provided on the second bottom plate (48), and a limiting unit (44) for limiting the lifting assembly is also provided on the first bottom plate (41); The lifting assembly includes a connecting rod (42) provided on a first base plate (41), the first base plate (41) is connected to the second base plate (48) via the connecting rod (42), a linear flange bearing (47) is provided on the connecting rod (42), the linear flange bearing (47) is fixedly connected to the supporting platform (6), a second rotary motor (45) is fixedly provided at the bottom of the first base plate (41), and an output end of the second rotary motor (45) extends to the first base plate (41) and is fixedly connected to a ball screw (43); The limiting unit (44) includes a mounting frame (441), a first photoelectric sensor (413) is fixedly provided on the mounting frame (441), a first sensing baffle (46) is further provided on the first bottom plate (41), the first sensing baffle (46) corresponds to the first photoelectric sensor (413), and a first feeding sensor (411) is fixedly provided on the belt conveyor (410) and located between the second bottom plate (48) and the product fixture (412); The belt conveyor (410) is also provided with a first proximity switch (49).

4. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: The transport module (3) comprises a first clamping jaw (36) and a second clamping jaw (37), wherein the first clamping jaw (36) and the second clamping jaw (37) are respectively used to clamp products of different sizes; The transport module (3) further comprises a mounting plate (31) fixedly connected to the first three-axis mobile bracket (612), a first rotary motor (32) being fixedly mounted on the mounting plate (31), a plurality of telescopic cylinders (34) being arranged outside the first rotary motor (32) and extending to the mounting plate (31), a plurality of clamping motors (35) being respectively arranged at the bottom of the plurality of telescopic cylinders (34), an output end of the clamping motor (35) being respectively connected to the first clamping jaw (36) and the second clamping jaw (37), and a laser sensor (33) being arranged on one side of the clamping motor (35).

5. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: The transmission module (5) includes a second support frame (54) fixedly arranged on the supporting platform (6), a belt line transmission mechanism (52) is fixedly arranged on the second support frame (54), a second feeding sensor (51) and a discharging sensor (58) are respectively arranged at the head and tail ends of the belt line transmission mechanism (52), a second proximity switch (53) is fixedly arranged on the top of the belt line transmission mechanism (52), a plurality of side positioning mechanisms (55) are fixedly arranged on the outside of the belt line transmission mechanism (52), a limit seat (57) is fixedly arranged on the inside of the belt line transmission mechanism (52), and an in-position sensor (56) is fixedly arranged on the belt line transmission mechanism (52) and close to the limit seat (57).

6. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: A contour detection component (8) and a three-dimensional size detection component (9) are sequentially arranged on the carrier platform (6) and near the detection module (7). The detection module (7) includes a fourth support frame (73) fixedly mounted on the carrier platform (6). A driving motor (74) is arranged on the carrier platform (6) and located on the inner side of the fourth support frame (73). A connecting claw hook (75) is fixedly arranged at the output end of the driving motor (74), and a rotating detection platform (71) is arranged on the connecting claw hook (75).

7. The fully automatic inspection equipment for semiconductor packaging products according to claim 6, characterized in that: The contour detection component (8) includes a limiting side plate (85), a fourth linear guide rail (86) and a handwheel adjuster (87) are sequentially mounted on the limiting side plate (85), a second cooperative frame (811) is slidably mounted on the fourth linear guide rail (86), a first cooperative frame (88) is slidably mounted on the handwheel adjuster (87), a first camera module (89) is fixedly mounted on the second cooperative frame (811), and a second camera module (810) is fixedly mounted on the first cooperative frame (88); The contour detection component (8) further comprises a second linear guide rail (81) arranged on the supporting platform (6), a second slider (82) being slidably arranged on the second linear guide rail (81), a third linear guide rail (83) being fixedly arranged on the second slider (82), a third slider (84) being slidably arranged on the third linear guide rail (83), and the third slider (84) being connected to the limiting side plate (85).

8. The fully automatic inspection equipment for semiconductor packaging products according to claim 6, characterized in that: The three-dimensional dimension detection component (9) includes a fifth support frame (93) arranged on the supporting platform (6), a second three-axis movable support (96) is arranged on the fifth support frame (93), a side assembly frame (94) is fixedly arranged on the second three-axis movable support (96), and a first 3D line laser profiler (91) and a second 3D line laser profiler (92) are arranged on the side assembly frame (94) in sequence, and the first 3D line laser profiler (91) and the second 3D line laser profiler (92) are arranged opposite to each other and are used to detect the geometric shapes of the front and back sides of the product.

9. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: The code reading assembly (62) includes a code reader (621) and a universal adjustment frame (624) arranged on the supporting platform (6); The code reading assembly (62) corresponding to the detection platform of the detection module (7) further includes a first linear guide rail (622) provided on the carrier platform (6), a first slider (623) being slidably provided on the first linear guide rail (622), and the first slider (623) being connected to the universal adjustment frame (624).

10. The fully automatic inspection equipment for semiconductor packaging products according to claim 1, characterized in that: The binning module (2) comprises a first support frame (23) fixedly mounted on a carrier platform (6), a conveyor line (22) fixedly mounted on the first support frame (23), and a beam-type photoelectric sensor (21) is provided at both ends of the conveyor line (22).

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