Processing equipment and processing method of TGV glass substrate

Abstract

The invention discloses processing equipment and a processing method of a TGV glass substrate, and the processing method of the TGV glass substrate comprises the following steps: preheating a to-be-punched point before punching, so that the temperature of the to-be-processed point and the surrounding area is increased to form a preheating area, and the local temperature of the glass substrate can be relatively uniform by preheating, so that the glass substrate is not damaged during punching; the heat applied by laser cutting is not easy to cause severe temperature difference, so that the thermal stress generated in the material is effectively reduced, and the condition of cracks or rough surfaces is eliminated or reduced; according to the processing equipment of the TGV glass substrate, the light paths of the cutting head and the preheating head are communicated, and the laser beam of the cutting head is partially reflected into the preheating head by utilizing the beam splitter, so that the punching of the glass substrate and the preheating of the next processing point are simultaneously performed, and the processing time of the glass substrate is further saved.

Description

Technical Field

[0001] The present invention belongs to the technical field of TGV chip processing, and in particular relates to a processing device and a processing method for a TGV glass substrate. Background Art

[0002] In recent years, the through-glass via (TGV) process, an extension of the TSV process, has attracted widespread attention within the industry due to its advantages, including adjustable thermal expansion coefficient, low insertion loss, and high resistivity. By replacing traditional chip-to-chip interconnects with short vertical lines, TGVs achieve high integration while miniaturizing products, significantly improving product performance. As a potential alternative to silicon-based interposers, TGVs hold broad application prospects in RF devices, microelectromechanical systems (MEMS) packaging, and optoelectronic system integration.

[0003] Currently, drilling holes in glass substrates using high-temperature lasers is the most widely used method. However, as a non-metallic material, glass has low thermal conductivity. This means that heat cannot be quickly transferred from the drilling area to other parts, resulting in localized overheating and the formation of a heat-affected zone (HAZ). This is primarily due to the high energy density of the laser beam, the low thermal conductivity of glass, and the generation of instantaneous high temperatures.

[0004] The formation of heat-affected zones can cause cracks or rough sections around the through-holes of the glass substrate. To address these problems, the existing technologies mainly have the following two solutions: Solution 1: First, several small holes are formed on the glass substrate, and then the glass substrate is soaked in strong acid, and the corrosiveness of the strong acid is used to etch the through holes to the target aperture; Option 2: Use resin or other components to cover the surface of the through hole to form a protective layer on the surface of the through hole.

[0005] However, both of the above solutions do not fundamentally reduce the generation of cracks, but instead cover or eliminate the generated cracks or rough through-hole surfaces through chemical methods, and there are always certain defects. Summary of the Invention

[0006] The main purpose of the present invention is to provide a TGV glass substrate processing device and processing method, aiming to solve the problem that the existing technology cannot fundamentally reduce the cracks or rough surfaces caused by thermal stress when drilling the glass substrate in the TGV process.

[0007] The technical solution adopted in the present invention is: A TGV glass substrate processing device, comprising: The cutting head includes a first reflector, a beam splitter and a beam focusing mirror arranged in sequence; The preheating head includes a second reflector and a beam expander arranged in sequence, the second reflector is parallel to the beam splitter; the inner cavity of the preheating head is connected to the inner cavity of the cutting head, so that the optical path of the beam splitter is connected to the second reflector; Among them, the first reflector is used to reflect the light source generated by the laser generator to the beam splitter, which divides the light source into two beams with different energy densities; the beam splitter refracts the beam with higher energy density to the beam focusing mirror, and reflects the beam with lower energy density to the second reflector; the second reflector reflects the beam to the beam expander; the beam focusing mirror is used to drill holes in the glass substrate, and the beam expander is used to preheat the glass substrate.

[0008] Optionally, the cutting head includes a first mounting part, a second mounting part and a third mounting part which are detachably connected in sequence; a first reflector is mounted in the first mounting part, the first reflector has an angle with the horizontal plane, and a first incident hole is provided on the side wall of the first mounting part, and the light source generated by the laser generator is emitted to the first reflector through the first incident hole; a beam splitter is mounted in the second mounting part, and a reflective hole is provided on the side wall of the second mounting part, and the mirror surface of the beam splitter has an angle of 45° with the axis of the reflective hole and the axis of the second mounting part; a beam focusing mirror is mounted in the third mounting part, and the beam focusing mirror is parallel to the glass substrate.

[0009] Optionally, the side wall of the second mounting portion includes a first threaded section, a connecting section, and a second threaded section in sequence; the outer diameter of the first threaded section is smaller than that of the connecting section, and is provided with an external thread, and the first threaded section is threadedly connected to the first mounting portion; the reflective hole is opened in the connecting section, and the inner cavity of the connecting section includes a placement portion and a transition section, the inner diameter of the placement portion is larger than the inner diameter of the transition section, and the inner diameter of the transition section is the same as the inner diameter of the first threaded section; the inner cavity of the second threaded section is connected to the transition section, and the inner diameter of the second threaded section is larger than the inner diameter of the transition section, an internal thread is opened in the second threaded section, and the second threaded section is threadedly connected to the third mounting portion.

[0010] Optionally, a reflection hole and a placement portion are provided at one end of the connecting section near the first threaded section, the placement portion includes a first annular groove and a second annular groove, and the reflection hole is provided between the first annular groove and the second annular groove; the inner diameter of the first annular groove and the inner diameter of the second annular groove are the same and both are larger than the inner diameter of the transition section; the first annular groove and the second annular groove are respectively used to place the two ends of the beam splitter.

[0011] Optionally, the third mounting part includes a first mounting section, a second mounting section and a conical section in sequence; the inner cavity of the first mounting section is connected to a beam focusing mirror through a thread, and the first mounting section is connected to the second mounting part; the inner diameter of the second mounting section is smaller than the inner diameter of the first mounting section, a protective lens is clamped in the second mounting section, and a second air inlet hole connected to the outside world is opened on the side wall of the second mounting section, and the second air inlet hole is arranged between the protective lens and the conical section; the inner diameter of the conical section gradually decreases from top to bottom, and a through hole for the light beam to pass through is opened at the bottom end of the conical section, and the conical section is coaxially arranged with the beam focusing mirror.

[0012] Optionally, the inner wall of the second mounting section has a first annular protrusion and a second annular protrusion, and a snap-in groove for snapping the protective lens is formed between the first annular protrusion and the second annular protrusion; the edge of the protective lens has a chamfer; the cross-section of the first annular protrusion is arc-shaped, and the surface of the first annular protrusion and the chamfer of the protective lens are used to facilitate the protective lens to enter the snap-in groove.

[0013] Optionally, the preheating head includes a first shell and a second shell that are detachably connected, and the beam expander includes a second convex lens and a concave lens; a second reflector is installed at the top of the inner cavity of the first shell, and a second incident hole is provided on one side wall of the first shell, and the second incident hole is connected to the inner cavity of the cutting head; the mirror surface of the second reflector has an angle of 45° with the axis of the first shell and the axis of the second incident hole; the inner cavity of the first shell includes an upper section and a lower section, the inner diameter of the upper section is larger than the inner diameter of the lower section, the second convex lens is installed in the upper section, and the lower section is connected to the second shell; a concave lens is installed in the second shell.

[0014] Optionally, the inner cavity of the preheating head is connected to the inner cavity of the cutting head through a distance adjusting mechanism; the distance adjusting mechanism includes a first connecting tube, a second connecting tube and a third connecting tube, and the optical path between the beam splitter and the second reflector is connected through the first connecting tube and the second connecting tube, and the first connecting tube and the second connecting tube are respectively arranged on the cutting head and the preheating head; one end of the third connecting tube is threadedly connected to the first connecting tube, and the other end is rotatably connected to the second connecting tube.

[0015] Optionally, a rotating part is provided at one end of the inner wall of the third connecting tube, and a distance adjusting part is provided at the other end; the rotating part includes at least one annular groove, and a third annular protrusion is provided on the outer wall of the second connecting tube, and the third annular protrusion is clamped in the annular groove; the distance adjusting part is provided with an internal thread, and the outer wall of the first connecting tube has an external thread, and the distance adjusting part is threadedly connected to the first connecting tube; a tightening nut is also installed on the first connecting tube, and the tightening nut is threadedly connected to the first connecting tube, and the tightening nut is used to tighten the third connecting tube.

[0016] A method for processing a TGV glass substrate comprises the following steps: S1. Fix the glass substrate to be processed on the placement table and adjust the cutting head and preheating head to the initial position; S2. Adjust the output power of the laser generator to the first gear so that the laser beam output from the cutting head preheats the first point to be processed in the initial row / column; S3. After the preheating is completed, the output power of the laser generator is increased to the second gear, so that the laser generator punches the first point to be processed; while the first point to be processed is being punched, the preheating head preheats the next punching point, and this cycle continues until the punching of the row / column is completed; S4. After punching the previous row / column, repeat steps S2 to S3. S5. After all the holes to be processed are punched on the glass substrate, the punched glass substrate is soaked in a strong acid solution for 5 to 10 minutes. S6. Clean the immersed glass substrate and detect the surface roughness parameters of the pore diameter and the pore wall.

[0017] The beneficial effects of the present invention are: 1) The present invention provides a method for processing a TGV glass substrate: before drilling, the first processing point of the row / column is preheated by a cutting head, and then the preheated point is drilled; during drilling, a beam splitter refracts a light beam with a higher energy density toward a beam focusing mirror, which is focused by the beam focusing mirror to drill a hole in the glass substrate; at the same time, the beam splitter is used to reflect a portion of the laser beam with a lower energy density to a preheating head, which is used to preheat the next processing point. After the cutting head moves to the next point, it can directly drill a hole, and this cycle is repeated until all the points to be processed in the row / column are processed; the cutting head and the preheating head are then moved to the next row / column, and the above steps are repeated. Preheating can make the local temperature of the glass substrate more uniform, so that when drilling, the heat applied by laser cutting is not likely to cause a sharp temperature difference, thereby effectively reducing the thermal stress generated inside the material, thereby eliminating or reducing the occurrence of cracks or rough surfaces. In addition, the preheated area can be processed in a different way to effectively reduce the occurrence of cracks and rough surfaces, thereby increasing the qualified rate of the formed glass substrate and reducing the overall construction cost.

[0018] 2) The present invention also provides a TGV glass substrate processing device. By connecting the optical paths of the cutting head and the preheating head, a beam splitter is used to split the laser beam into two beams with different energy densities, which are simultaneously transmitted to a focusing mirror and a second reflector. The beam splitter refracts the beam with higher energy density to the focusing mirror, which focuses the laser beam onto the processing point, thereby preheating or drilling the processing point. The second reflector reflects the laser beam to the beam expander, which expands the focus of the laser beam, thereby preheating the processing point and its vicinity. The present invention can preheat the processing points on the glass substrate, thereby effectively reducing the problem of cracks or rough hole surfaces caused by excessive temperature differences at the drilling points. It can also simultaneously perform drilling of the glass substrate and preheating of the next processing point, further saving processing time for the glass substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0020] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 is a schematic top view of the present invention; Figure 3 It is a structural diagram of the placement table; Figure 4 It is a structural diagram of the support seat; Figure 5 yes Figure 3 A magnified schematic diagram of area A in the middle; Figure 6 yes Figure 3 A magnified schematic diagram of area B in the middle; Figure 7 yes Figure 4 Enlarged schematic diagram of the middle C area; Figure 8 yes Figure 4 Enlarged schematic diagram of region D in the middle; Figure 9 It is a structural diagram of the processing component; Figure 10 is a top view schematic diagram of the processing component; Figure 11 yes Figure 10 The schematic cross-sectional view of EE is shown in FIG, and the mounting plate is omitted; Figure 12 is a structural schematic diagram of the second mounting portion; Figure 13 is a structural diagram of the third mounting portion; Figure 14 yes Figure 13 Enlarged schematic diagram of the middle H region; Figure 15 This is a schematic diagram of the internal structure of the preheating head; Figure 16 2 is a schematic structural diagram of the third connecting pipe; Figure 17 It is a structural diagram of the laser generator; Figure 18 yes Figure 17 Enlarged schematic diagram of the middle F area; Figure 19 yes Figure 17 Schematic diagram of the magnified G region in the middle.

[0021] Description of Figure Numbers: 100, support base; 110, bottom support frame; 111, top support frame; 200, placement table; 210, mounting profile; 221, first clamping member; 222, second clamping member; 223, third clamping member; 224, fourth clamping member; 225, electric push rod; 230, linear module; 231, vertical mounting plate; 232, first drive motor; 233, first synchronous wheel; 234, ball screw; 235, screw nut; 236, connecting plate; 300, plane moving assembly; 310, first slide rail; 311, second Drive motor; 312, second synchronous wheel; 313, coupling; 314, transmission shaft; 320, moving beam; 330, second slide rail; 3301, second slider; 331, third drive motor; 332, third synchronous wheel; 400, laser generator; 410, radiator housing; 411, first air inlet; 412, first air outlet; 413, heat dissipation fin; 414, guide hole; 600, processing assembly; 601, fourth mounting plate; 602, translation channel; 603, limit block; 604, sliding guide rail; 605, first Fifth mounting plate; 610, cutting head; 611, first mounting portion; 612, first reflector; 613, second mounting portion; 6131, first threaded section; 6132, connecting section; 6133, second threaded section; 61321, reflective hole; 61322, first annular groove; 61323, second annular groove; 614, beam splitter; 615, third mounting portion; 6151, first mounting section; 6152, second mounting section; 61521, first annular protrusion; 61522, second annular protrusion; 6153, tapered section; 616, Beam collecting mirror; 617, protective lens; 618, second air inlet; 620, preheating head; 621, reflector mounting plate; 622, second reflector; 623, first shell; 624, second convex lens; 625, second shell; 6251, third air inlet; 6252, annular air flow cavity; 626, concave lens; 630, distance adjustment mechanism; 631, first connecting pipe; 632, fastening nut; 633, third connecting pipe; 6331, anti-slip stripe; 6332, distance adjustment part; 6333, annular groove; 634, second connecting pipe.

[0022] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0024] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), such directional indications are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In addition, the descriptions of "first", "second", etc. in the present invention are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, "and / or" in the full text includes three solutions. Taking A and / or B as an example, it includes technical solution A, technical solution B, and technical solution that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, and must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0026] Example 1: like Figures 1 and 2 As shown, this embodiment provides a TGV glass substrate processing device. The glass substrate is mounted on a placement table 200 , and a processing assembly 600 consisting of a cutting head 610 and a preheating head 620 is movably disposed above the glass substrate.

[0027] like Figures 9-11As shown, the cutting head 610 includes a first reflector 612, a beam splitter 614, and a beam focusing mirror 616, which are installed in sequence from top to bottom when in use. The preheating head 620 includes a second reflector 622 and a beam expander, which are installed in sequence from top to bottom when in use. The second reflector 622 is parallel to the beam splitter 614. The inner cavity of the preheating head 620 is connected to the inner cavity of the cutting head 610, so that the optical path of the beam splitter 614 and the second reflector 622 are connected. Among them, the first reflector 612 is used to reflect the light source generated by the laser generator 400 to the beam splitter 614, and the beam splitter 614 splits the light source into two beams with different energy densities. The beam splitter 614 refracts the beam with higher energy density to the beam focusing mirror 616 and reflects the beam with lower energy density to the second reflector 622. The second reflector 622 reflects the light beam to the beam expander. The beam focusing mirror 616 is used to drill holes in the glass substrate, and the beam expander is used to preheat the glass substrate. In this embodiment, by connecting the optical paths of the cutting head 610 and the preheating head 620, a beam splitter 614 is used to split the laser beam into two beams with different energy densities, which are simultaneously transmitted to a focusing mirror 616 and a second reflector 622. After the beam splitter 614 refracts the beam with higher energy density to the focusing mirror 616, the focusing mirror 616 focuses the laser beam onto the point to be processed on the glass substrate, thereby preheating or drilling the point to be processed. After the second reflector 622 reflects the laser beam to the beam expander, the beam expander adjusts the focus of the laser beam, so that the area irradiated by the preheating head 620 on the glass substrate is expanded, thereby preheating the point to be processed and its vicinity. In this way, the point to be processed on the glass substrate can be preheated, thereby effectively reducing the problem of cracks or rough hole surface caused by excessive temperature difference at the drilling point. In addition, the drilling of the glass substrate and the preheating of the next processing point can be performed simultaneously, further saving the processing time of the glass substrate.

[0028] like Figures 11-14 As shown, the cutting head 610 includes a first mounting portion 611, a second mounting portion 613 and a third mounting portion 615 which are detachably connected in sequence; a first reflector 612 is mounted in the first mounting portion 611, the first reflector 612 has an angle with the horizontal plane, and a first incident hole is provided on the side wall of the first mounting portion 611, and the light source generated by the laser generator 400 is emitted to the first reflector 612 through the first incident hole; a beam splitter 614 is mounted in the second mounting portion 613, and a reflecting hole 61321 is provided on the side wall of the second mounting portion 613, the mirror surface of the beam splitter 614 has an angle of 45° with the axis of the reflecting hole 61321 and the axis of the second mounting portion 613; a beam focusing mirror 616 is mounted in the third mounting portion 615, and the beam focusing mirror 616 is parallel to the glass substrate.

[0029] In this embodiment, the first mounting portion 611 has a space composed of three side walls, a bottom wall and an inclined wall. The three side walls are perpendicular to each other, and the bottom wall is perpendicular to the three side walls. The inclined wall and the bottom wall are arranged at an angle, and the four sides of the inclined wall are simultaneously in contact with the three side walls and the bottom wall; the first incident hole is opened on the side wall opposite to the inclined wall, and the first reflector 612 is installed on the inclined wall, and the mirror surface of the first reflector 612 faces the first incident hole; a threaded hole is opened on the bottom wall of the first mounting portion 611.

[0030] Preferably, the first reflector 612 forms an angle of 45° with the bottom wall of the first mounting portion 611, the laser generator 400 is mounted horizontally, and the emission hole of the laser generator 400 is aligned with the center of the first reflector 612; so that the laser beam emitted by the laser generator 400 can be reflected along the central axis of the second mounting portion 613.

[0031] In this embodiment, the second mounting portion 613 is cylindrical.

[0032] The side wall of the second mounting portion 613 includes a first threaded section 6131, a connecting section 6132 and a second threaded section 6133 in sequence; the outer diameter of the first threaded section 6131 is smaller than that of the connecting section 6132, and an external thread is provided. The first threaded section 6131 is threadedly connected to the threaded hole on the bottom wall of the first mounting portion 611; the reflection hole 61321 is opened in the connecting section 6132, and the inner cavity of the connecting section 6132 includes a placement portion and a transition section. The inner diameter of the placement portion is larger than the inner diameter of the transition section, so that the beam splitter 614 can be placed from either end of the second mounting portion 613, and the inner diameter of the transition section is the same as the inner diameter of the first threaded section 6131; the inner cavity of the second threaded section 6133 is connected to the transition section, and the inner diameter of the second threaded section 6133 is larger than the inner diameter of the transition section. An internal thread is opened in the second threaded section 6133, and the second threaded section 6133 is threadedly connected to the third mounting portion 615.

[0033] In this embodiment, a reflection hole 61321 and a placement portion are provided at one end of the connecting section 6132 close to the first threaded section 6131, and the placement portion includes a first annular groove 61322 and a second annular groove 61323, and the reflection hole 61321 is provided between the first annular groove 61322 and the second annular groove 61323; the inner diameter of the first annular groove 61322 and the inner diameter of the second annular groove 61323 are the same and both are larger than the inner diameter of the transition section; the first annular groove 61322 and the second annular groove 61323 are respectively used to place the two ends of the beam splitter 614.

[0034] In this embodiment, the lens of the beam splitter 614 is rectangular, and the width of the beam splitter 614 is smaller than the inner diameter of the first threaded section 6131 , so that the beam splitter 614 can be placed in the second mounting portion 613 ; the reflective surface of the beam splitter 614 faces the second reflector 622 .

[0035] In this embodiment, the beam splitter 614 is arranged at one end close to the first mounting portion 611. When installing the beam splitter 614, one end of the beam splitter 614 is first inserted from the end close to the first mounting portion 611. After the bottom end of the beam splitter 614 abuts against the second annular groove 61323, the other end of the beam splitter 614 is released, so that the beam splitter 614 tilts toward the first annular groove 61322, thereby completing the installation of the beam splitter 614.

[0036] Preferably, the diameter of the second annular groove 61323 is equal to the height of the transition section, so that after the beam splitter 614 is placed, the mirror surface of the beam splitter 614 forms a 45° angle with both the axis of the reflective hole 61321 and the axis of the second mounting portion 613. After the beam splitter 614 is placed, the first mounting portion 611 and the second mounting portion 613 can be threadedly connected.

[0037] In this embodiment, the third mounting portion 615 sequentially comprises a first mounting section 6151, a second mounting section 6152, and a tapered section 6153. A beam focusing lens 616 is threadedly connected to the inner cavity of the first mounting section 6151, which is then threadedly connected to the second mounting portion 613. The inner diameter of the second mounting section 6152 is smaller than that of the first mounting section 6151, and a protective lens 617 is snapped into place within the second mounting section 6152. During installation, the protective lens 617, which has a smaller inner diameter, is first snapped into the second mounting section 6152, followed by the beam focusing lens 616 being screwed into the first mounting section 6151. The third mounting portion 615 is then connected to the second mounting portion 613.

[0038] Protective lens 617 is used to prevent mist from the high-temperature melted glass during the drilling process from affecting focusing lens 616. Protective lens 617 is typically made of a material that does not absorb the laser light source and is a solid lens. Focusing lens 616 is a first convex lens, and its focus can be adjusted by adjusting the distance between tapered section 6153 and the glass substrate.

[0039] In this embodiment, a second air inlet hole 618 connected to the outside world is opened on the side wall of the second mounting section 6152, and the second air inlet hole 618 is arranged between the protective lens 617 and the conical section 6153; the inner diameter of the conical section 6153 gradually decreases from top to bottom, and a through hole for the light beam to pass through is opened at the bottom end of the conical section 6153, and the conical section 6153 is coaxially arranged with the focusing mirror 616.

[0040] The tapered section 6153 is used to prevent mist or debris generated during drilling from entering the third mounting portion 615, thereby further protecting the focusing lens 616. Furthermore, a second air inlet 618 is provided on the sidewall of the tapered section 6153. This second air inlet 618 is used to supply protective air into the interior of the tapered section 6153, increasing the pressure therein to be greater than the ambient pressure. This prevents mist generated by the melting glass from entering the third mounting portion 615. Furthermore, the air discharged from the tapered section 6153 disperses the molten debris generated during drilling, preventing it from cooling, solidifying, and accumulating in the processed hole, potentially affecting hole quality.

[0041] In this embodiment, a first annular protrusion 61521 and a second annular protrusion 61522 are provided on the inner wall of the second mounting section 6152, and a snap-in groove for snapping the protective lens 617 is formed between the first annular protrusion 61521 and the second annular protrusion 61522; the cross-section of the first annular protrusion 61521 is arc-shaped, and the edge of the protective lens 617 has a chamfer; the surface of the first annular protrusion 61521 and the chamfer of the protective lens 617 are used to facilitate the protective lens 617 to enter the snap-in groove.

[0042] In this embodiment, if Figures 9 to 16 As shown, the preheating head 620 includes a detachably connected first housing 623 and a second housing 625. The beam expander includes a second convex lens 624 and a concave lens 626. An inclined reflector mounting plate 621 is provided on the top of the first housing 623. The reflector mounting plate 621 is used to mount a second reflector 622, with the mirror surface of the second reflector 622 facing the beam splitter 614. After the second reflector 622 is mounted on the reflector mounting plate 621, the reflector mounting plate 621 is then locked to the first housing 623.

[0043] In this embodiment, a second reflector 622 is mounted at the top of the inner cavity of the first housing 623. A second incident aperture is provided on a side wall of the first housing 623, communicating with the inner cavity of the cutting head 610. The mirror surface of the second reflector 622 forms a 45° angle with both the axis of the first housing 623 and the axis of the second incident aperture, aligning the central axis of the second reflector 622 with the central axis of the beam splitter 614. The inner cavity of the first housing 623 comprises an upper section and a lower section, the inner diameter of the upper section being larger than that of the lower section. A second convex lens 624 is mounted within the upper section, which is connected to the second housing 625. A concave lens 626 is mounted within the second housing 625.

[0044] Specifically, a step surface is formed at the junction of the upper section and the lower section of the inner cavity of the first shell 623 , and the second convex lens 624 is placed on the step surface of the inner cavity of the first shell 623 .

[0045] In this embodiment, the first housing 623 and the second housing 625 are threadedly connected. Rotating the first housing 623 or the second housing 625 allows the second convex lens 624 and the concave lens 626 to move closer or further away from each other, thereby adjusting the dispersion of the laser beam by the beam expander and, in turn, the preheating area of ​​the glass substrate. The interior of the second housing 625 is configured as a single-stage stepped hole, with the concave lens 626 threadedly connected to the larger end of the stepped hole.

[0046] In this embodiment, if Figure 15 As shown, an air flow groove is opened in the peripheral wall of the second shell 625, and the opening of the air flow groove faces downward. A third air inlet hole 6251 is opened on the peripheral wall of the second shell 625, and the third air inlet hole 6251 is used to input air into the air flow groove.

[0047] In this embodiment, the width of the slot of the air flow slot gradually decreases, and the gas in the air flow slot is pressurized and output after passing through the slot.

[0048] In this embodiment, the laser generator 400 is a carbon dioxide laser generator 400 .

[0049] In this embodiment, if Figures 17-19 As shown, air-cooled radiators are installed on both sides of the laser generator 400. The air-cooled radiator includes a radiator housing 410 and a plurality of heat dissipation fins 413 sealed within the radiator housing 410. The radiator housing 410 is provided with a first air inlet 411 and a first air outlet 412 only on its end surface. The first air inlet 411 connects the compressed air source to the interior of the radiator housing 410. The first air inlet 411 is located above the topmost heat dissipation fin 413, while the first air outlet 412 is located below the bottommost heat dissipation fin 413.

[0050] In this embodiment, a plurality of heat dissipation fins 413 divide the inner cavity of the radiator housing 410 into a plurality of independent spaces. The heat dissipation fins 413 are provided with guide holes 414, and the spaces divided by two adjacent heat dissipation fins 413 are connected through the guide holes 414; the guide holes 414 on two adjacent heat dissipation fins 413 are located at the ends of the two heat dissipation fins 413 that are away from each other; the guide holes 414 of the top heat dissipation fin 413 are arranged at one end of the first air inlet 411 in the courtyard, and the guide holes 414 of the bottom heat dissipation fin 413 are located at one end close to the first air outlet 412. After the compressed air enters from the first air inlet 411, it passes through the plurality of guide holes 414 in sequence and flows out through the first air outlet 412.

[0051] In this embodiment, the air outputted from the first air outlet 412 of the radiator is communicated with the second air inlet 618 and the third air inlet 6251 simultaneously through the three-way valve.

[0052] In this embodiment, the air output from the first air outlet 412 of the radiator carries a certain amount of heat after heat exchange with the heat dissipation fins 413, so that the hot air output from the air flow groove can assist in preheating the glass substrate, which can reduce the demand for laser beam power of the preheating head 620, so that a beam splitter 614 with lower reflectivity can be selected to concentrate more energy in the cutting head 610.

[0053] Example 2: This embodiment provides an optional solution for the connection structure between the preheating head 620 and the cutting head 610.

[0054] In this embodiment, if Figures 9 to 16 The inner cavity of the preheating head 620 is connected to the inner cavity of the cutting head 610 through the distance adjustment mechanism 630; the distance adjustment mechanism 630 includes a first connecting tube 631, a second connecting tube 634 and a third connecting tube 633, and the optical path between the beam splitter 614 and the second reflector 622 is connected through the first connecting tube 631 and the second connecting tube 634. The first connecting tube 631 and the second connecting tube 634 are respectively arranged on the cutting head 610 and the preheating head 620; one end of the third connecting tube 633 is threadedly connected to the first connecting tube 631, and the other end is rotatably connected to the second connecting tube 634. A rotating part is provided at one end of the inner wall of the third connecting tube 633, and a distance adjusting part 6332 is provided at the other end; the rotating part includes at least one annular groove 6333, and a third annular protrusion is provided on the outer wall of the second connecting tube 634, and the third annular protrusion is clamped in the annular groove 6333. The cross-section of the third annular protrusion is an arc surface, and the edge of the annular groove 6333 adopts an arc transition; the distance adjusting part 6332 is provided with an internal thread, and the outer wall of the first connecting tube 631 has an external thread, and the distance adjusting part 6332 is threadedly connected to the first connecting tube 631; a tightening nut is also installed on the first connecting tube 631, and the tightening nut is threadedly connected to the first connecting tube 631, and the tightening nut is used to tighten the third connecting tube 633.

[0055] In this embodiment, a plurality of anti-slip stripes 6331 are further provided on the outer peripheral wall of the third connecting tube 633 . The anti-slip stripes 6331 extend along the axial direction of the third connecting tube 633 . The plurality of anti-slip stripes 6331 are evenly distributed on the circumference of the third connecting tube 633 .

[0056] Specifically, the anti-slip stripes 6331 are used to prevent slipping when the third connecting pipe 633 is rotated.

[0057] Example 3: This embodiment provides a method for processing a TGV glass substrate.

[0058] The processing method of the TGV glass substrate includes the following steps: S1. Fix the glass substrate to be processed on the placement table 200, and adjust the cutting head 610 and the preheating head 620 to the initial position; S2. Adjust the output power of the laser generator 400 to the first gear so that the laser beam output from the cutting head 610 preheats the first point to be processed in the initial row / column; use the preheating head 620 to preheat the glass substrate to be processed at a low temperature so that a preheating zone is formed around the area to be punched on the glass substrate. The preheating temperature is 10% to 30% of the punching temperature, and the preheating temperature should be controlled so as not to cause the glass substrate to be denatured. The preheating time can be reasonably set according to the material of the glass substrate and the frequency of the selected laser beam.

[0059] When glass is heated by laser irradiation, it expands, and the degree of expansion is determined by the thermal expansion coefficient (α T ). When heating is uneven, it causes temperature differences and generates stress. Thermal stress can be estimated using the following formula: Where, σ is the thermal stress, E is the Young's modulus of the glass, and α T is the thermal expansion coefficient, ΔT is the temperature difference. T The present invention reduces the influence of thermal stress on the processing area by preheating the glass, that is, by reducing the temperature difference ΔT.

[0060] The power and preheating temperature of the first gear are selected according to actual needs. In order to better reduce thermal stress, the value of the temperature difference ΔT can be small enough, but the preheating temperature should not exceed the denaturation temperature of the glass substrate material.

[0061] For common TGV glass substrate materials, the preheating temperature should usually be controlled between 50°C and 300°C to avoid excessively high temperatures that may cause deformation or loss of hardness of the glass.

[0062] S3. After the preheating is completed, the output power of the laser generator 400 is increased to the second gear, so that the laser generator 400 punches the first point to be processed; while the first point to be processed is being punched, the preheating head 620 preheats the next punching point, and this cycle is repeated until the punching of the row / column is completed; the power of the second gear should ensure that the laser power output by the laser generator 400 meets the temperature output by the cutting head 610 after passing through the beam splitter 614 and the beam focusing mirror 616, which can melt and penetrate the point to be processed on the glass substrate.

[0063] S4: After the punching of the previous row / column is completed, steps S2 to S3 are repeated until all the points to be processed are processed; S5. After all the holes to be processed are punched on the glass substrate, the punched glass substrate is soaked in a strong acid solution for 5 to 10 minutes. The strong acid solution can corrode the debris or rough surface on the hole wall, making the hole wall smoother.

[0064] S6. Clean the immersed glass substrate and detect the surface roughness parameters of the pore diameter and the pore wall.

[0065] Example 4: This embodiment provides a moving mechanism for a processing assembly 600 .

[0066] In this embodiment, if Figures 1 to 10 As shown, the moving mechanism of the processing component 600 includes a support base 100 and a liftable placement table 200 arranged on the support base 100, and the placement table 200 is used to place the glass substrate; it also includes a laser generator 400, which is arranged on the processing component 600 and is used to provide a laser light source for drilling the glass substrate; the processing component 600 is movably arranged above the glass substrate.

[0067] In this embodiment, the processing assembly 600 is mounted on the fourth mounting plate 601, and the cutting head 610 and the laser generator 400 are fixed on one side of the fourth mounting plate 601. The fourth mounting plate 601 is provided with a translation channel 602, the length direction of which is perpendicular to the length direction of the laser generator 400 (e.g., Figure 9 and Figure 10 As shown in FIG, slide rails 604 are provided on both sides of the translation channel 602. Matching sliders are slidably provided on the slide rails 604. The preheating head 620 is mounted on a fifth mounting plate 605, which is mounted on the sliders of the slide rails 604. Thus, when the third connecting tube 633 is rotated, the preheating head 620 moves within the translation channel 602, thereby approaching or moving away from the cutting head 610.

[0068] In this embodiment, a limit block 603 is further provided at one end of the translation channel 602 away from the cutting head 610 , and the limit block 603 is used to limit the moving distance of the preheating head 620 .

[0069] In this embodiment, the support base 100 includes a bottom support frame 110 and a top support frame 111 connected by a number of vertical supports. The top support frame 111 is provided with a planar moving component 300 for driving the processing component 600 to move. The planar moving component 300 is used to drive the processing component 600 to move in a plane above the glass substrate to realize processing of different points on the glass substrate.

[0070] In this embodiment, the planar moving assembly 300 includes a first slide rail 310 and a second slide rail 330 that are perpendicular to each other in space. The first slide rail 310 is provided at both ends of the top of the support seat 100, and the two ends of the second slide rail 330 are respectively installed on the first slider of the first slide rail 310, and the processing assembly 600 is installed on the second slider 3301 of the second slide rail 330.

[0071] Specifically, second synchronous wheels 312 are provided at both ends of the first slide rail 310 in the length direction, and the second synchronous wheels 312 at both ends of the first slide rail 310 are connected through a synchronous belt transmission; a second drive motor 311 is also provided at one end of the first slide rail 310, and the second drive motor 311 is used to drive the second synchronous wheel 312 to rotate; the second synchronous wheels 312 on the two first slide rails 310 at both ends of the top support frame 111 are driven to move synchronously through the coupling 313 and the transmission shaft 314.

[0072] like Figure 8 As shown, the cutting head 610 and the preheating head 620 are respectively located on both sides of the second slide rail 330; a moving beam 320 is also installed between the second slide rail 330 and the first slider.

[0073] Specifically, the mounting base of the third drive motor 331 presses the top surface of the synchronous belt against the top surface of the moving beam 320, thereby fixing the moving beam 320 to the synchronous belt and allowing the synchronous belt to drive the moving beam 320 to move. The bottom surface of the moving beam 320 is mounted on the first slider of the first slide rail 310. The first slider can move along the length of the first slide rail 310, thereby guiding the movement of the moving beam 320. The two ends of the synchronous belt are mounted on the second synchronous pulleys 312 at both ends of the first slide rail 310. The two sides of the moving beam 320 are provided with strip-shaped through holes that penetrate through the strip-shaped through holes. The synchronous belt passes through the strip-shaped through holes so that the synchronous belt can move along the length of the first slide rail 310 when the second drive motor 311 drives the second synchronous pulley 312 to rotate.

[0074] In this embodiment, the specific connection method between the second drive motor 311 and the second synchronous wheel 312 can be referred to the figure. The second synchronous wheel 312 at one end of the first slide rail 310 includes two coaxial synchronous wheels, and the power output shaft of the second drive motor 311 is also provided with synchronous teeth. The synchronous teeth on the power output shaft of the second drive motor 311 are connected to one of the synchronous wheels in the second synchronous wheel 312, and the other synchronous wheel of the second synchronous wheel 312 is connected to the synchronous belt drive.

[0075] Similarly, third synchronous wheels 332 are provided at both ends of the second slide rail 330 , and the two third synchronous wheels 332 are also equipped with synchronous belts; a third drive motor 331 is provided at one end of the second slide rail 330 , and the third drive motor 331 is transmission-connected to the third synchronous wheel 332 .

[0076] In this embodiment, the fourth mounting plate 601 is installed on the second slider 3301, and the bottom belt body of the synchronous belt connected to the third synchronous wheel 332 is locked on the fourth mounting plate 601, so that the third drive motor 331 can drive the fourth mounting plate 601 to follow the movement of the second slider 3301.

[0077] In this embodiment, the second drive motor 311 is used to drive the movable beam 320 to move along the length of the first slide rail 310. The third drive motor 331 is used to drive the fourth mounting plate 601 to move along the length of the second slide rail 330, thereby achieving planar movement of the processing assembly 600 above the placement table 200.

[0078] In this embodiment, the placement platform 200 includes a funnel-shaped storage bin body and a mounting profile 210 disposed on the top edge of the storage bin body.

[0079] like Figures 1 to 8 As shown, a clamping assembly is provided on the placement platform 200 , and the clamping assembly includes a first clamping piece 221 , a second clamping piece 222 and a third clamping piece 223 provided on the top edge of the placement platform 200 .

[0080] Specifically, the first clamping member 221 and the two second clamping members 222 are respectively arranged on the mounting profile 210 on different sides of the storage bin body.

[0081] like Figures 4-7 As shown, the first clamping member 221 is fixedly provided on the placement table 200, the second clamping members 222 are fixedly provided at both ends of the first clamping member 221, and the two ends of the third clamping member 223 are movably installed on the second clamping member 222; the fourth clamping member 224 is movably provided on the third clamping member 223 and the first clamping member 221 respectively; the first clamping member 221, the second clamping member 222, the third clamping member 223 and the fourth clamping member 224 respectively fix the edge of the glass substrate from different directions of the glass substrate.

[0082] Specifically, the second clamping member 222 is provided with a linear module 230, and both ends of the third clamping member 223 are mounted on the linear module 230. The first clamping member 221 and the third clamping member 223 are provided with an electric push rod 225 at the same end, and the fourth clamping member 224 is mounted on the electric push rod 225. The first clamping member 221, the second clamping member 222, the third clamping member 223, and the fourth clamping member 224 are all profiles with snap-fit ​​grooves.

[0083] During installation, the two perpendicular edges of the glass substrate are first clamped into the clamping grooves of the first clamping member 221 and the second clamping member 222 respectively. Then, the linear module 230 is activated, which drives the third clamping member 223 to move and clamp the third edge of the glass substrate into the clamping groove of the third clamping member 223. Finally, the electric push rod 225 is activated to push the fourth clamping member 224 to move, so that the fourth clamping member 224 clamps the fourth edge of the glass substrate, thereby completing the fixation of the glass substrate.

[0084] In this embodiment, the area between the four mounting profiles 210 on the top surface of the placement table 200 is in a grid or mesh shape; the grid or mesh shape is conducive to the residue after glass substrate processing falling into the storage bin for unified treatment.

[0085] In this embodiment, the placement table 200 is connected to the support base 100 via a lifting mechanism, and the lifting mechanism is used to drive the placement table 200 to move on the support base 100, so that the installation height of the placement table 200 can be adjusted.

[0086] Specifically, the lifting mechanism includes a vertical mounting plate 231, a first drive motor 232, a first synchronous pulley 233, a ball screw 234, a screw nut 235, and a connecting plate 236. The ball screw 234 is rotatably arranged between the top support frame 111 and the bottom support frame 110, and two ball screws 234 are provided at both ends of the support base 100. The two ball screws 234 at the same end of the support base 100 are symmetrically distributed on both sides of the support base 100. One end of the ball screw 234 is fixedly connected to the first synchronous pulley 233, and the other end of the ball screw 234 is transmission-connected to the screw nut 235. The screw nut 235 can convert the rotation of the ball screw 234 into translation along the length direction of the ball screw 234. The two first synchronous pulleys 233 at the same end of the support base 100 are connected by a synchronous belt transmission. A vertical mounting plate 231 is disposed parallel to one side of the ball screw 234 and is used to mount a first drive motor 232. The first drive motor 232 is in driving connection with an adjacent first synchronous pulley 233. A connecting plate 236 is connected at one end to a lead screw nut 235 and at the other end to the placement platform 200. The first drive motor 232 rotates the first synchronous pulley 233, thereby driving the lead screw nut 235 up and down along the ball screw 234, thereby driving the placement platform 200 up and down within the support base 100, thereby adjusting the installation height of the placement platform 200.

[0087] The present invention is not limited to the above optional embodiments. Anyone can derive various other forms of products based on the teachings of the present invention. The above specific embodiments should not be construed as limiting the scope of protection of the present invention. The scope of protection of the present invention shall be based on the scope defined in the claims, and the description can be used to interpret the claims.

Claims

1. A TGV glass substrate processing equipment, characterized in that: include: A cutting head (610), the cutting head (610) comprising a first reflector (612), a beam splitter (614), and a beam focusing mirror (616) arranged in sequence; A preheating head (620), the preheating head (620) comprising a second reflector (622) and a beam expander arranged in sequence, the second reflector (622) being parallel to the beam splitter (614); an inner cavity of the preheating head (620) being in communication with an inner cavity of the cutting head (610), so that the beam splitter (614) and the second reflector (622) are optically connected; The first reflector (612) is used to reflect the light source generated by the laser generator (400) to the beam splitter (614), and the beam splitter (614) splits the light source into two light beams with different energy densities; the beam splitter (614) refracts the light beam with higher energy density to the beam focusing mirror (616), and reflects the light beam with lower energy density to the second reflector (622); the second reflector (622) reflects the light beam to the beam expander; the beam focusing mirror (616) is used to punch a hole in a glass substrate, and the beam expander is used to preheat the glass substrate.

2. The TGV glass substrate processing equipment according to claim 1, characterized in that: The cutting head (610) comprises a first mounting portion (611), a second mounting portion (613), and a third mounting portion (615) which are detachably connected in sequence; The first reflector (612) is installed in the first mounting portion (611), the first reflector (612) forms an angle with a horizontal plane, and a first incident hole is provided on a side wall of the first mounting portion (611), and the light source generated by the laser generator (400) is emitted toward the first reflector (612) through the first incident hole; The beam splitter (614) is installed in the second mounting portion (613), and a reflection hole (61321) is provided on the side wall of the second mounting portion (613), and the mirror surface of the beam splitter (614) forms an angle of 45° with the axis of the reflection hole (61321) and the axis of the second mounting portion (613); A beam collecting mirror (616) is installed in the third installation portion (615), and the beam collecting mirror (616) is parallel to the glass substrate.

3. The TGV glass substrate processing equipment according to claim 2, characterized in that: The side wall of the second mounting portion (613) comprises a first threaded section (6131), a connecting section (6132), and a second threaded section (6133) in sequence; The first threaded section (6131) has an outer diameter smaller than that of the connecting section (6132) and is provided with an external thread, and the first threaded section (6131) is threadedly connected to the first mounting portion (611); The reflective hole (61321) is provided in the connecting section (6132); the inner cavity of the connecting section (6132) comprises a placement portion and a transition section; the inner diameter of the placement portion is greater than the inner diameter of the transition section; and the inner diameter of the transition section is the same as the inner diameter of the first threaded section (6131); The inner cavity of the second threaded section (6133) is connected to the transition section, and the inner diameter of the second threaded section (6133) is larger than the inner diameter of the transition section. An internal thread is provided in the second threaded section (6133), and the second threaded section (6133) is threadedly connected to the third mounting portion (615).

4. The TGV glass substrate processing equipment according to claim 3, characterized in that: A reflection hole (61321) and a placement portion are provided at one end of the connecting section (6132) close to the first threaded section (6131), the placement portion comprising a first annular groove (61322) and a second annular groove (61323), the reflection hole (61321) being provided between the first annular groove (61322) and the second annular groove (61323); The inner diameter of the first annular groove (61322) and the inner diameter of the second annular groove (61323) are the same and both are larger than the inner diameter of the transition section; The first annular groove (61322) and the second annular groove (61323) are respectively used to place the two ends of the beam splitter (614).

5. The TGV glass substrate processing equipment according to claim 2, characterized in that: The third mounting portion (615) sequentially comprises a first mounting section (6151), a second mounting section (6152), and a tapered section (6153); The inner cavity of the first mounting section (6151) is connected to a beam collecting mirror (616) via a thread, and the first mounting section (6151) is threadedly connected to the second mounting portion (613); The inner diameter of the second mounting section (6152) is smaller than the inner diameter of the first mounting section (6151); a protective lens (617) is clamped inside the second mounting section (6152); a second air inlet (618) communicating with the outside is provided on the side wall of the second mounting section (6152); the second air inlet (618) is provided between the protective lens (617) and the tapered section (6153); The inner diameter of the conical section (6153) gradually decreases from top to bottom, and a through hole for light beams to pass through is provided at the bottom end of the conical section (6153), and the conical section (6153) and the beam focusing mirror (616) are coaxially arranged.

6. The TGV glass substrate processing equipment according to claim 5, characterized in that: The inner wall of the second mounting section (6152) is provided with a first annular protrusion (61521) and a second annular protrusion (61522), and a snap-fit ​​groove for snapping the protective lens (617) is formed between the first annular protrusion (61521) and the second annular protrusion (61522); The cross section of the first annular protrusion (61521) is arc-shaped, and the edge of the protective lens (617) has a chamfer. The surface of the first annular protrusion (61521) and the chamfer of the protective lens (617) are used to facilitate the protective lens (617) to enter the snap-in groove.

7. The TGV glass substrate processing equipment according to claim 1, characterized in that: The preheating head (620) comprises a first shell (623) and a second shell (625) that are detachably connected, and the beam expander comprises a second convex lens (624) and a concave lens (626); A second reflector (622) is installed at the top end of the inner cavity of the first shell (623); a second incident hole is provided on a side wall of the first shell (623); the second incident hole is connected to the inner cavity of the cutting head (610); the mirror surface of the second reflector (622) has an angle of 45° with the axis of the first shell (623) and the axis of the second incident hole; The inner cavity of the first shell (623) comprises an upper section and a lower section, the inner diameter of the upper section is larger than the inner diameter of the lower section, the second convex lens (624) is installed in the upper section, and the lower section is connected to the second shell (625); A concave lens (626) is installed in the second shell (625).

8. The TGV glass substrate processing equipment according to claim 7, characterized in that: The inner cavity of the preheating head (620) is connected to the inner cavity of the cutting head (610) via a distance adjustment mechanism (630); The distance adjustment mechanism (630) comprises a first connecting tube (631), a second connecting tube (634) and a third connecting tube (633); the optical path between the beam splitter (614) and the second reflector (622) is connected via the first connecting tube (631) and the second connecting tube (634); the first connecting tube (631) and the second connecting tube (634) are respectively arranged on the cutting head (610) and the preheating head (620); One end of the third connecting tube (633) is threadedly connected to the first connecting tube (631), and the other end is rotatably sleeve-connected to the second connecting tube (634).

9. The TGV glass substrate processing equipment according to claim 8, characterized in that: One end of the inner wall of the third connecting tube (633) is provided with a rotating portion, and the other end is provided with a distance adjusting portion (6332); The rotating portion includes at least one annular groove (6333), and a third annular protrusion is provided on the outer wall of the second connecting tube (634). The third annular protrusion is clamped in the annular groove (6333). The cross section of the third annular protrusion is an arc surface, and the edge of the annular groove (6333) adopts an arc transition. The distance adjusting portion (6332) is provided with an internal thread, the outer wall of the first connecting pipe (631) is provided with an external thread, and the distance adjusting portion (6332) is threadedly connected to the first connecting pipe (631); A tightening nut is also installed on the first connecting tube (631), the tightening nut being threadedly connected to the first connecting tube (631), and the tightening nut being used to tighten the third connecting tube (633).

10. A method for processing a TGV glass substrate, characterized in that: The TGV glass substrate processing method is applied to the TGV glass substrate processing equipment according to any one of claims 1 to 9, and the TGV glass substrate processing method comprises the following steps: S1. Fix the glass substrate to be processed on the placement table and adjust the cutting head and preheating head to the initial position; S2. Adjust the output power of the laser generator to the first gear so that the laser beam output from the cutting head preheats the first processing point in the initial row / column; S3. After the preheating is completed, the output power of the laser generator is increased to the second gear, so that the laser generator punches the first point to be processed; while the first point to be processed is being punched, the preheating head preheats the next punching point, and this cycle continues until the punching of the row / column is completed; S4. After punching the previous row / column, repeat steps S2 to S3. S5. After all the holes to be processed are punched on the glass substrate, the punched glass substrate is soaked in a strong acid solution for 5 to 10 minutes. S6. Clean the immersed glass substrate and detect the surface roughness parameters of the pore diameter and the pore wall.

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