High-temperature dry vacuum pump unit

By setting up nitrogen preheating and shock absorption structures in the high-temperature dry vacuum pump unit, the temperature drop and vibration problems caused by nitrogen dilution are solved, achieving more efficient operation and lower energy consumption, and extending the service life of the unit.

CN120684409APending Publication Date: 2025-09-23ZHONGKEYI (NANTONG) SEMICON EQUIP CO LTD +1
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Patent Information

Application Number
CN202511000766.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-21
Publication Date
2025-09-23

AI Technical Summary

Technical Problem

When the high-temperature dry vacuum pump unit uses nitrogen for dilution, the pump chamber temperature cools down instantly, causing dust generation, occupying a large area and increasing energy consumption.

Method used

A high-temperature dry vacuum pump unit was designed. Nitrogen inlets and outlets were set in the pump connectors, and the temperature of the pump cavity was used to preheat the nitrogen to avoid the temperature drop caused by the introduction of nitrogen. Shock absorbers and support bases were also configured to buffer external vibrations and extend the service life.

Benefits of technology

It effectively avoids the temperature drop caused by nitrogen injection, reduces dust generation, reduces energy consumption and improves the stability and service life of the unit.

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Abstract

The invention relates to the technical field of dry vacuum pumps, and discloses a high-temperature dry vacuum pump unit which comprises an upper pump, a lower pump and a heating plate, the upper pump is arranged above the lower pump, a pump connector is arranged between the upper pump and the lower pump, an air inlet cavity is formed in the upper end of the middle of the lower pump, and an exhaust cavity is formed in the lower pump and located below the air inlet cavity. According to the high-temperature dry vacuum pump unit, by arranging the pump connecting port piece, external nitrogen can enter the lower connecting plate through the nitrogen inlet and then is exhausted through the nitrogen outlet and enters the air inlet channel, and deep and long holes are formed in the two ends of the air inlet channel in the upper surface of the air inlet cavity correspondingly to the lower surface of the air inlet cavity to serve as deep and long hole nitrogen channels. The nitrogen groove connected with the nitrogen channel of the deep and long hole in the air inlet cavity is formed in the exhaust cavity of the lower pump, and nitrogen is distributed into the cavity through the nitrogen groove, so that the situation that the high-temperature pump cavity is instantly cooled due to introduction of the nitrogen, and the temperature in the pump is reduced is avoided.
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Description

Technical Field

[0001] The present invention relates to the technical field of dry vacuum pumps, in particular to a high-temperature dry vacuum pump unit. Background Art

[0002] The process products produced in demanding processes are often accompanied by large amounts of dust. During actual operation, the medium being pumped by a vacuum dry pump contains this dust. Excessive dust accumulation can fill gaps within the vacuum dry pump, causing it to malfunction. Different processes produce different reactants. Some processes produce dust at low temperatures and gaseous forms at high temperatures. Therefore, to minimize dust generation, the temperature of the vacuum dry pump's exhaust system is typically increased, and a high-temperature dry vacuum pump unit is typically configured for this process.

[0003] In addition to generating large amounts of dust, harsh processes are often accompanied by corrosive gases. Based on the corrosion resistance requirements of these harsh processes, dry pump units are typically configured with nitrogen or other inert gases for purging or dilution. By rationally optimizing the amount and distribution of nitrogen in each cavity, gas distribution capacity can be achieved more efficiently. Without affecting pump performance, larger amounts of dilution gas can be introduced, reducing the concentration of corrosive gases and improving the pump's corrosion resistance.

[0004] However, the introduction of nitrogen often causes the high-temperature pump chamber to instantly cool, lowering the temperature inside the pump. This lowered temperature in turn leads to the generation of dust. Therefore, many high-temperature dry vacuum pump units often utilize an external nitrogen heating source. For example, a heating wire may be wrapped around the nitrogen pipeline. This external heating source requires space for heating, resulting in a larger unit footprint. Furthermore, heating the nitrogen also consumes a portion of energy, further increasing the unit's actual energy consumption. Therefore, there is a need for a high-temperature dry vacuum pump unit that can address these issues. Summary of the Invention

[0005] In view of the deficiencies in the prior art, the present invention provides a high-temperature dry vacuum pump unit to solve the problems mentioned in the above background.

[0006] The present invention provides the following technical solution: a high-temperature dry vacuum pump unit, comprising an upper pump, a lower pump and a heating plate, wherein the upper pump is arranged above the lower pump, the upper pump and the lower pump are both provided with a heating plate, and a pump connection port is provided between the upper pump and the lower pump; An air intake cavity is provided at the upper middle end of the lower pump, and an exhaust cavity is provided below the lower pump; The pump connection port includes a nitrogen inlet and a nitrogen outlet, and the nitrogen outlet on the pump connection port is connected to the lower pump air inlet cavity; An air inlet channel connected to the nitrogen outlet of the pump connector is provided on the upper surface of the air inlet cavity of the lower pump, and deep long holes are arranged at both ends of the air inlet channel to form deep long hole nitrogen channels on the lower surface of the air inlet cavity; The exhaust cavity of the lower pump is connected to the deep and long hole nitrogen channel in the air inlet cavity and is used to distribute nitrogen into the nitrogen tank in the cavity.

[0007] Preferably, the upper pump is a Roots vacuum pump, the lower pump is a multi-stage Roots vacuum pump, and a sealing groove is provided on the periphery of the air inlet channel.

[0008] Preferably, the pump connecting port also includes an upper connecting plate, an inner support member and a lower connecting plate. The upper connecting plate is arranged at the upper end of the inner support member in the pump connecting port and is surrounded by upper mounting holes. The lower connecting plate is arranged at the lower end of the inner support member in the pump connecting port and is surrounded by lower mounting holes.

[0009] Preferably, the nitrogen inlet is arranged at one end of the front surface of the lower connecting plate, and the nitrogen outlet is arranged on the lower end surface of the lower connecting plate and is communicated with the interior of the nitrogen inlet.

[0010] Preferably, a support base is provided under the lower pump, and the support base is composed of two strip horizontal plates and two strip vertical plates. Shock absorbers are provided at both ends of the upper end surface of the two strip vertical plates of the support base, and a support frame is provided on the upper end surface of the shock absorber, and the upper end of the support frame is connected to the lower pump.

[0011] Preferably, a limiting column is provided on the upper surface of the strip vertical plate of the supporting chassis and located between the two shock absorbers. The upper end of the limiting column passes through the lower wall of the supporting frame and is provided with a limiting plate. The limiting column is slidably connected to the supporting frame.

[0012] Preferably, both ends of the two strip-shaped horizontal plates of the support base are provided with mounting grooves, and running wheels are rotatably provided inside the mounting grooves. A push-pull handrail is provided at one end of the upper surface of the support base.

[0013] Preferably, a front frame is provided at one end of the support chassis away from the push-pull armrest, and protective connecting rods are provided on both sides of the push-pull armrest and the front frame.

[0014] Preferably, a positioning assembly is provided on the upper surface of the support base and on one side of the walking wheel. The positioning assembly includes a fixing plate, a support screw and a support foot. The lower end of the fixing plate is connected to the support base. A threaded hole is provided on the fixing plate, and the fixing plate is threadedly connected to the support screw through the threaded hole.

[0015] Preferably, the support foot is arranged at the lower end of the support screw, and the upper end of the support screw passes through the fixing plate and is provided with a handle.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The high-temperature dry vacuum pump unit is conveniently connected to the upper pump through the upper connecting plate and the upper mounting hole by providing a pump connection port, and conveniently connected to the lower pump through the lower connecting plate and the lower mounting hole. External nitrogen can enter the lower connecting plate through the nitrogen inlet, and then be discharged through the nitrogen outlet and enter the interior of the air intake channel. Deep long holes are respectively arranged at both ends of the air intake channel on the upper surface of the air intake cavity to the lower surface of the air intake cavity as deep long hole nitrogen channels. The temperature of the cavity is used to preheat the nitrogen. The lower pump exhaust cavity is provided with a nitrogen tank connected to the deep long hole nitrogen channel of the air intake cavity, and nitrogen is distributed into the cavity through the nitrogen tank.

[0017] 2. This high-temperature dry vacuum pump unit uses nitrogen heating to avoid the instantaneous cooling of the high-temperature pump cavity caused by the introduction of nitrogen, thereby reducing the temperature inside the pump. The reduction in the temperature inside the pump will lead to the generation of dust, which will cause the pump to become stuck due to excessive dust. The temperature of the cavity is used to preheat the nitrogen, which effectively increases the operating time of the pump. At the same time, it avoids the problem of a large unit footprint caused by the external configuration of a nitrogen heating source, and the increase in the actual energy consumption of the unit due to the nitrogen heating.

[0018] 3. The high-temperature dry vacuum pump unit is equipped with a shock absorber. When the upper and lower pumps are working or vibrating up and down due to external forces, the downward movement of the upper and lower pumps will drive the support frame to move downward synchronously. The downward movement of the support frame will squeeze the shock absorber to contract. The contraction of the shock absorber can effectively buffer the external force, avoid damage to the internal structure of the upper and lower pumps, and extend the service life of the high-temperature dry vacuum pump unit. By holding the push-pull handrail and cooperating with the walking wheels, the high-temperature dry vacuum pump unit can be pushed or pulled to move and effectively adjust the position, saving time and effort; after the high-temperature dry vacuum pump unit is moved to a suitable position, the support screw can be driven to rotate and move downward by turning the handle, and the downward movement of the support screw can drive the support foot to move downward synchronously and contact the ground, thereby ensuring the stable position of the high-temperature dry vacuum pump unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall structure of the high-temperature dry vacuum pump unit of the present invention; Figure 2 This is a schematic diagram of the connection structure between the upper pump and the lower pump of the present invention; Figure 3 This is one of the structural diagrams of the lower pump of the present invention; Figure 4 This is the second structural diagram of the lower pump of the present invention; Figure 5 This is a schematic diagram of the air intake cavity structure of the present invention; Figure 6 This is a schematic diagram of the lower pump cavity structure of the present invention; Figure 7 This is a schematic structural diagram of the pump connection port of the present invention; Figure 8 This is a schematic diagram of the connection structure between the push-pull armrest and the front frame of the present invention; Figure 9 This is a schematic diagram of the installation structure of the support frame and the positioning assembly of the present invention; Figure 10 For the present invention Figure 9 A magnified schematic diagram of the structure at center A.

[0020] In the figure: 1. Upper pump; 2. Lower pump; 21. Inlet cavity; 22. Exhaust cavity; 201. Inlet channel; 202. Sealing groove; 203. Long and deep hole nitrogen channel; 204. Nitrogen tank; 3. Pump connecting port; 301. Upper connecting plate; 302. Lower connecting plate; 303. Nitrogen inlet; 304. Nitrogen outlet; 4. Support chassis; 401. Mounting groove; 402. Travel wheel; 5. Shock absorber; 6. Support frame; 7. Positioning assembly; 701. Fixing plate; 702. Support screw; 703. Support foot; 704. Handle; 8. Limit column; 9. Push-pull armrest; 10. Front frame; 11. Protective connecting rod. DETAILED DESCRIPTION

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] See also Figure 1-10 A high-temperature dry vacuum pump unit includes an upper pump 1, a lower pump 2 and a heating plate. The upper pump 1 is arranged above the lower pump 2. The upper pump 1 and the lower pump 2 are both provided with heating plates. A pump connection port 3 is provided between the upper pump 1 and the lower pump 2. An air intake cavity 21 is provided at the upper middle end of the lower pump 2, and an air exhaust cavity 22 is provided below the lower pump 2 and located below the air intake cavity 21; The pump connection port 3 includes a nitrogen inlet 303 and a nitrogen outlet 304. The nitrogen outlet 304 on the pump connection port 3 is connected to the air inlet cavity 21 of the lower pump 2. The upper surface of the air inlet cavity 21 of the lower pump 2 is provided with an air inlet channel 201 connected to the nitrogen outlet 304 of the pump connecting port 3, and deep long holes are arranged at both ends of the air inlet channel 201 to form deep long hole nitrogen channels 203 on the lower surface of the air inlet cavity 21; The exhaust chamber 22 of the lower pump 2 is connected to the deep and long hole nitrogen channel 203 in the intake chamber 21 and is used to distribute nitrogen into the nitrogen tank 204 in the chamber.

[0023] Among them, the upper pump 1 is a Roots vacuum pump, the lower pump 2 is a multi-stage Roots vacuum pump, and a sealing groove 202 is provided on the periphery of the air inlet channel 201. When the Roots vacuum pump and the multi-stage Roots vacuum pump are connected through the pump connecting port 3, the sealing groove 202 can effectively prevent external gas from entering or nitrogen from overflowing.

[0024] Among them; the pump connecting port member 3 also includes an upper connecting plate 301, an inner support member and a lower connecting plate 302, the upper connecting plate 301 is arranged at the upper end of the inner support member in the pump connecting port member 3 and is provided with upper mounting holes around it, the lower connecting plate 302 is arranged at the lower end of the inner support member in the pump connecting port member 3 and is provided with lower mounting holes around it, the nitrogen inlet 303 is arranged at one end of the front of the lower connecting plate 302, the nitrogen outlet 304 is arranged on the lower end surface of the lower connecting plate 302 and is connected to the inside of the nitrogen inlet 303, and is convenient for effectively connecting to the upper pump 1 by setting the upper connecting plate 301 and the upper mounting hole, and is convenient for connecting to the lower pump 2 by setting the lower connecting plate 302 and the lower mounting hole. The external nitrogen can enter the lower connecting plate 302 through the nitrogen inlet 303, and then be discharged through the nitrogen outlet 304 and enter the interior of the air inlet channel 201. The two ends of the air inlet channel 201 on the upper surface of the air inlet cavity 21 are respectively arranged with deep and long holes to the lower surface of the air inlet cavity 21 as deep and long hole nitrogen channels 203. The temperature of the cavity is used to preheat the nitrogen. The exhaust cavity 22 of the lower pump 2 is arranged with a nitrogen tank 204 connected to the deep and long hole nitrogen channel 203 in the air inlet cavity 21. The nitrogen is distributed into the cavity through the nitrogen tank 204, which avoids the instantaneous cooling of the high-temperature pump cavity caused by the introduction of nitrogen, thereby reducing the temperature inside the pump.

[0025] Among them, a supporting base frame 4 is arranged under the lower pump 2, and the supporting base frame 4 is composed of two strip horizontal plates and two strip vertical plates. Shock absorbers 5 are arranged at both ends of the upper end surface of the two strip vertical plates of the supporting base frame 4, and a supporting frame 6 is arranged on the upper end surface of the shock absorber 5. The upper end of the support frame 6 is connected to the lower pump 2, and a limiting column 8 is arranged on the upper end surface of the strip vertical plates of the supporting base frame 4 and between the two shock absorbers 5. The upper end of the limiting column 8 passes through the lower wall of the supporting frame 6 and is provided with a limiting disk. The limiting column 8 is slidably connected to the supporting frame 6. When the upper pump 1 and the lower pump 2 are working or vibrating up and down by external force, the downward movement of the upper pump 1 and the lower pump 2 will drive the supporting frame 6 to move downward synchronously, and the downward movement of the support frame 6 will squeeze the shock absorber 5 to contract. The contraction of the shock absorber 5 can effectively buffer the external force, avoid damage to the internal structure of the upper pump 1 and the lower pump 2, and extend the service life of the high-temperature dry vacuum pump unit.

[0026] Among them, both ends of the two strip-shaped horizontal plates of the supporting base frame 4 are provided with installation grooves 401, and a walking wheel 402 is rotatably provided inside the installation groove 401. One end of the upper surface of the supporting base frame 4 is provided with a push-pull handrail 9. The installation groove 401 is provided to facilitate the installation of the walking wheel 402. By holding the push-pull handrail 9 and cooperating with the walking wheel 402, the high-temperature dry vacuum pump unit can be pushed or pulled to move and effectively adjust its position, saving time and effort.

[0027] Among them; a front frame 10 is provided at one end of the supporting base frame 4 away from the pushing and pulling handrail 9, and protective connecting rods 11 are provided on both sides of the pushing and pulling handrail 9 and the front frame 10. The pushing and pulling handrail 9, the front frame 10 and the protective connecting rod 11 cooperate with each other to form an outer protective frame, thereby preventing the upper pump 1 and the lower pump 2 from being damaged by collision with foreign objects.

[0028] Among them, a positioning assembly 7 is provided on the upper surface of the support base 4 and on one side of the walking wheel 402. The positioning assembly 7 includes a fixing plate 701, a support screw 702 and a support foot 703. The lower end of the fixing plate 701 is connected to the support base 4. A threaded hole is provided on the fixing plate 701. The fixing plate 701 is threadedly connected to the support screw 702 through the threaded hole. The support foot 703 is provided at the lower end of the support screw 702. The upper end of the support screw 702 passes through the fixing plate 701 and is provided with a handle 704. When the high-temperature dry vacuum pump unit is moved to a suitable position, the support screw 702 can be driven to rotate and move downward by rotating the handle 704. The downward movement of the support screw 702 can drive the support foot 703 to move downward synchronously and contact the ground, thereby ensuring the stable position of the high-temperature dry vacuum pump unit.

[0029] Working principle: through the upper connecting plate 301 and the upper mounting hole, it is convenient to effectively connect with the upper pump 1, and through the lower connecting plate 302 and the lower mounting hole, it is convenient to connect with the lower pump 2. External nitrogen can enter the lower connecting plate 302 through the nitrogen inlet 303, and then be discharged through the nitrogen outlet 304 and enter the inside of the air inlet channel 201. Deep and long holes are arranged at both ends of the air inlet channel 201 on the upper surface of the air inlet cavity 21 to the lower surface of the air inlet cavity 21 as deep and long hole nitrogen channels 203. The temperature of the cavity is used to preheat the nitrogen. The exhaust cavity 22 of the lower pump 2 is arranged with a nitrogen groove 204 connected to the deep and long hole nitrogen channel 203 in the air inlet cavity 21. Nitrogen is distributed into the cavity through the nitrogen groove 204, which avoids the instantaneous cooling of the high-temperature pump cavity caused by the introduction of nitrogen, thereby reducing the temperature inside the pump.

[0030] Furthermore, when the upper pump 1 and the lower pump 2 are working or vibrating up and down due to external force, the downward movement of the upper pump 1 and the lower pump 2 will drive the support frame 6 to move downward synchronously. The downward movement of the support frame 6 will squeeze the shock absorber 5 to contract. The contraction of the shock absorber 5 can effectively buffer the external force, avoid damage to the internal structure of the upper pump 1 and the lower pump 2, and extend the service life of the high-temperature dry vacuum pump unit. By holding the push-pull handrail 9 and cooperating with the walking wheel 402, the high-temperature dry vacuum pump unit can be pushed or pulled to move and effectively adjust its position, saving time and effort; after the high-temperature dry vacuum pump unit is moved to a suitable position, the support screw 702 can be driven to rotate and move downward by turning the handle 704, and the downward movement of the support screw 702 can drive the support foot 703 to move downward synchronously and contact the ground, thereby ensuring the stable position of the high-temperature dry vacuum pump unit.

[0031] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A high-temperature dry vacuum pump unit, comprising an upper pump (1), a lower pump (2) and a heating plate, characterized in that: The upper pump (1) is arranged above the lower pump (2), and heating plates are arranged on both the upper pump (1) and the lower pump (2), and a pump connecting port (3) is provided between the upper pump (1) and the lower pump (2); An air intake cavity (21) is provided at the upper middle end of the lower pump (2), and an air exhaust cavity (22) is provided below the air intake cavity (21) of the lower pump (2); The pump connecting port (3) comprises a nitrogen inlet (303) and a nitrogen outlet (304), and the nitrogen outlet (304) on the pump connecting port (3) is connected to the air inlet cavity (21) of the lower pump (2); An air intake channel (201) connected to the nitrogen outlet (304) of the pump connector (3) is provided on the upper surface of the air intake cavity (21) of the lower pump (2), and deep long holes are arranged at both ends of the air intake channel (201) to form deep long hole nitrogen channels (203) on the lower surface of the air intake cavity (21); The exhaust chamber (22) of the lower pump (2) is connected to the deep and long hole nitrogen channel (203) in the intake chamber (21) and is used to distribute nitrogen into the nitrogen tank (204) in the chamber.

2. A high-temperature dry vacuum pump unit according to claim 1, characterized in that: The upper pump (1) is a Roots vacuum pump, the lower pump (2) is a multi-stage Roots vacuum pump, and a sealing groove (202) is provided on the periphery of the air inlet channel (201).

3. A high-temperature dry vacuum pump unit according to claim 1, characterized in that: The pump connection port member (3) further comprises an upper connecting plate (301), an inner support member and a lower connecting plate (302), wherein the upper connecting plate (301) is arranged at the upper end of the inner support member in the pump connection port member (3) and is provided with upper mounting holes on its periphery, and the lower connecting plate (302) is arranged at the lower end of the inner support member in the pump connection port member (3) and is provided with lower mounting holes on its periphery.

4. A high-temperature dry vacuum pump unit according to claim 3, characterized in that: The nitrogen inlet (303) is provided at one end of the front face of the lower connecting plate (302), and the nitrogen outlet (304) is provided on the lower end surface of the lower connecting plate (302) and is communicated with the interior of the nitrogen inlet (303).

5. A high-temperature dry vacuum pump unit according to claim 1, characterized in that: A support base (4) is provided below the lower pump (2), and the support base (4) is formed by splicing two strip-shaped horizontal plates and two strip-shaped vertical plates. Shock absorbers (5) are provided at both ends of the upper end surfaces of the two strip-shaped vertical plates of the support base (4). A support frame (6) is provided on the upper end surface of the shock absorber (5), and the upper end of the support frame (6) is connected to the lower pump (2).

6. A high-temperature dry vacuum pump unit according to claim 5, characterized in that: A limiting column (8) is provided on the upper surface of the strip vertical plate of the supporting base frame (4) and located between the two shock absorbers (5). The upper end of the limiting column (8) passes through the lower wall of the supporting frame (6) and is provided with a limiting plate. The limiting column (8) is slidably connected to the supporting frame (6).

7. A high-temperature dry vacuum pump unit according to claim 6, characterized in that: Both ends of the two strip-shaped horizontal plates of the support base (4) are provided with mounting grooves (401), and running wheels (402) are rotatably provided inside the mounting grooves (401). A push-pull handrail (9) is provided on one end of the upper surface of the support base (4).

8. A high-temperature dry vacuum pump unit according to claim 7, characterized in that: A front frame (10) is provided at one end of the support base frame (4) away from the push-pull handrail (9), and protective connecting rods (11) are provided on both sides of the push-pull handrail (9) and the front frame (10).

9. A high-temperature dry vacuum pump unit according to claim 7, characterized in that: A positioning assembly (7) is provided on the upper surface of the supporting base frame (4) and located on one side of the walking wheel (402). The positioning assembly (7) comprises a fixing plate (701), a supporting screw (702) and a supporting foot (703). The lower end of the fixing plate (701) is connected to the supporting base frame (4). A threaded hole is provided on the fixing plate (701), and the fixing plate (701) is threadedly connected to the supporting screw (702) through the threaded hole.

10. A high-temperature dry vacuum pump unit according to claim 9, characterized in that: The support foot (703) is arranged at the lower end of the support screw (702), and the upper end of the support screw (702) passes through the fixing plate (701) and is provided with a handle (704).

Citation Information

Patent Citations

  • Anti-corrosion air distribution structure of vacuum pump shaft

    CN116733742A

  • Two-stage dry vacuum pump and working method thereof

    CN117627924A

  • Vacuum pump unit

    CN119353222A

  • Nitrogen control system of vacuum pump

    CN222162924U

  • Vacuum pump

    WO2024209194A1