A workpiece baking heating device for a magnetron sputtering coating machine

Abstract

The application relates to the technical field of magnetron sputtering coating equipment, in particular to a workpiece baking and heating device for a magnetron sputtering coating machine, which comprises the magnetron sputtering coating machine and a coating sealing door, and a coating chamber is arranged in the magnetron sputtering coating machine. The side positioning frame driven by the positioning electric cylinder, the correction frame adjusted by the electric sliding table and the electric permanent magnet chuck matched with the two can realize the automatic and accurate positioning of workpieces with different sizes and shapes, a special clamp does not need to be replaced, the workpiece positioning adaptability is obviously improved, the infrared heating units arranged in a rectangular array at the bottom of the workpiece baking cavity and independently controlled in temperature can selectively start corresponding heating units according to the size of the workpiece, the power is dynamically adjusted in real time by combining the thermocouple, the heating of each region of the workpiece is ensured to be uniform, the degassing effect of different positions of the workpiece is ensured to be consistent, a high-quality substrate is provided for subsequent coating, and the decline of the film layer bonding force or the compactness defects caused by uneven heating is avoided.

Description

Technical Field

[0001] This invention relates to the field of magnetron sputtering coating equipment technology, specifically to a workpiece baking and heating device for a magnetron sputtering coating machine. Background Technology

[0002] Magnetron sputtering coating technology, due to its advantages such as strong film adhesion, high composition controllability, and stable deposition rate, has been widely used in semiconductor device manufacturing, optical thin film preparation, new energy battery electrode modification, and wear-resistant coatings for tool surfaces. In the magnetron sputtering coating process, the workpiece baking and heating device is a core auxiliary component ensuring film quality. By preheating and degassing the workpiece, surface activation, and temperature control, it effectively avoids pinholes and bubbles in the film caused by residual gas during subsequent coating processes. Simultaneously, it optimizes the film's microstructure, thereby ensuring that the mechanical, optical, and electrical properties of the film meet application requirements.

[0003] Existing devices mostly employ manual clamps or fixed-size mechanical positioning structures, requiring the replacement of specialized clamps for workpieces of different sizes and shapes, resulting in cumbersome operations and long changeover times. Furthermore, manual positioning is prone to workpiece center misalignment due to operational errors, leading to uneven heating during subsequent baking and heating, which in turn causes film thickness deviations. This issue directly impacts device yield, especially in high-precision coating scenarios such as semiconductor wafers. Existing heating devices often use single resistance heating plates or integrated infrared heating tubes, making it impossible to selectively adjust the heating area according to workpiece size. Therefore, there is an urgent need for a workpiece baking and heating device with a reasonable structural design, high functional integration, and high degree of automation to solve the above technical problems and improve the process stability and film quality of magnetron sputtering coating. Summary of the Invention

[0004] The purpose of this invention is to provide a workpiece baking and heating device for a magnetron sputtering coating machine, which solves the aforementioned technical defects.

[0005] To achieve the above effects, the technical solution adopted by the present invention is as follows: a workpiece baking and heating device for a magnetron sputtering coating machine, comprising a magnetron sputtering coating machine and a coating sealing door, wherein the magnetron sputtering coating machine is provided with a coating chamber, a fixed frame is fixedly provided in the middle of the coating chamber, and a workpiece placement assembly is movably provided inside the fixed frame; a baking and heating cover plate is movably provided above the coating chamber, and control servo cylinders are fixedly provided on both sides of the top of the magnetron sputtering coating machine, the bottom end of the drive shaft of the control servo cylinder is fixedly connected to the top of the baking and heating cover plate; an air inlet pipe and an air outlet pipe are fixedly provided on the front and rear sides of the top of the magnetron sputtering coating machine, respectively, the bottom ends of the air inlet pipe and the air outlet pipe extend to the bottom of the baking and heating cover plate, and both the air inlet pipe and the air outlet pipe are made of spring flexible tubes.

[0006] Preferably, the workpiece placement assembly includes a workpiece placement rack with sliding protrusions on both sides. Two movable blocks are movably arranged on both sides inside the fixed frame, and the sliding protrusions are slidably arranged between the upper and lower movable blocks on both sides. Two telescopic electric cylinders are fixedly arranged on both sides inside the fixed frame, and one end of the drive shaft of the telescopic electric cylinder is fixedly connected to one side of the movable block.

[0007] Preferably, the workpiece placement rack has a workpiece baking cavity at the top, and positioning electric cylinders are fixedly installed on both sides inside the workpiece baking cavity. Side positioning frames are slidably installed on both sides inside the workpiece baking cavity, and the driving end of the positioning electric cylinder is fixedly connected to one side of the side positioning frame. Two correction frames are slidably installed on the opposite side of the side positioning frame via an electric slide table, and a fixed support frame is fixedly installed in the middle of the opposite side of the side positioning frame. Electrostatic chucks are installed inside both the correction frames and the fixed support frame.

[0008] Preferably, the baking and heating cover plate is connected to a positive electrode, the internal clamping structure of the workpiece placement assembly is connected to a negative bias, the air inlet pipe introduces argon gas into the baking and heating chamber, and the air outlet pipe controls the pressure inside the baking and heating chamber to be between 1-10 MPa.

[0009] Preferably, a number of infrared heating units are fixedly arranged at the bottom of the inner wall of the workpiece baking cavity, and the infrared heating units are distributed in a rectangular array; the infrared heating units are composed of ceramic infrared heating elements and thermocouples, and each ceramic infrared heating element is independently temperature controlled.

[0010] Preferably, the top of the workpiece placement rack is provided with a sealing connection groove that mates with the bottom of the baking and heating cover plate, the bottom of the workpiece placement rack is provided with a connection groove, the inner walls of the connection groove are provided with mounting grooves on both sides, a connection block is movably disposed inside the mounting groove, a miniature electric cylinder is fixedly disposed on one side of the inner wall of the mounting groove, and the driving end of the miniature electric cylinder is fixedly connected to one side of the connection block; the outer circumferential surface of the baking and heating cover plate is provided with connection slots that mate with the connection blocks on both sides.

[0011] Preferably, the fixed frame has control protrusions movably arranged on both sides inside, and the workpiece placement rack has control grooves on both sides that cooperate with the control protrusions; the fixed frame has a drive groove inside, and transmission rods are rotatably arranged on both sides inside the drive groove. A control electric cylinder is fixedly arranged inside the transmission rod, and a control protrusion is fixedly arranged at one end of the drive shaft of the control electric cylinder; a rotating rod is rotatably arranged on one side inside the drive groove, and sprockets are fixedly arranged at both ends of the rotating rod and at one end of the two transmission rods. The surfaces of the sprockets are meshed and driven by a chain; a drive motor is fixedly arranged on one side inside the workpiece placement rack, and a drive gear is fixedly arranged at one end of the output shaft of the drive motor. A driven gear is fixedly arranged on the surface of the rotating rod, and the driven gear meshes and drives the drive gear.

[0012] Preferably, a miniature electric cylinder II is fixedly installed on the rear side of the inner wall of the fixing frame, and a contact switch is fixedly installed at one end of the drive shaft of the miniature electric cylinder II.

[0013] Preferably, a power module is fixedly installed at the bottom of the workpiece placement rack by bolts. The power module is electrically connected to the electrical components inside the workpiece placement rack via wires. A negative bias voltage is connected inside the side positioning rack via wires.

[0014] Preferably, the ceramic infrared heating element of the infrared heating unit converts electrical energy into infrared rays after being energized. The infrared rays directly radiate onto the surface of the workpiece, and the workpiece molecules absorb the infrared energy and convert it into heat energy. The thermocouple monitors the temperature at various locations of the workpiece in real time and dynamically adjusts the operating power of the infrared heating unit.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0016] The workpiece placement assembly utilizes a side positioning frame driven by a positioning electric cylinder, a correction frame adjusted by an electric slide table, and an electrostatic chuck that works in conjunction with both. This enables automated and precise positioning of workpieces of different sizes and shapes without the need to replace special fixtures, significantly improving workpiece positioning adaptability. Simultaneously, the infrared heating units at the bottom of the workpiece baking chamber, arranged in a rectangular array and with independent temperature control, can selectively activate the corresponding heating units according to the workpiece size. Combined with real-time monitoring by thermocouples, the power is dynamically adjusted to ensure uniform heating in all areas of the workpiece. This guarantees consistent degassing at different locations on the workpiece, providing a high-quality substrate for subsequent coating and avoiding reduced film adhesion or density defects caused by uneven heating.

[0017] By utilizing a baking heating cover plate driven by a servo-controlled electric cylinder, rapid switching between the baking sealed chamber and the coating connection state can be achieved. Combined with a flipping mechanism consisting of a drive motor, sprocket and chain transmission, and control protrusions within the fixed frame, the adjustment of the workpiece from the baking posture to the coating posture can be completed automatically without additional manual or transmission mechanism intervention, shortening the process changeover cycle and avoiding secondary contamination during the workpiece adjustment process. At the same time, the sealing connection groove structure between the baking heating cover plate and the workpiece placement rack, as well as the air inlet and outlet pipes using spring flexible tubes, ensure reliable sealing of the baking chamber, effectively prevent gas leakage, stably maintain the argon atmosphere required for baking, ensure the ion bombardment cleaning effect, and improve the surface activation quality of the workpiece.

[0018] The contact switch driven by the miniature electric cylinder on the rear side of the inner wall of the fixed frame can accurately detect the installation position of the workpiece placement rack. Combined with the control protrusion driven by the electric cylinder and the control groove of the workpiece placement rack, it ensures a reliable connection between the workpiece placement rack and the fixed frame. During the flipping process, the synergistic effect of the sprocket chain drive and gear meshing drive, combined with the synchronous drive of the control protrusion on the workpiece placement rack, prevents swaying caused by the center of gravity shift during workpiece flipping. This ensures the relative positional accuracy of the workpiece coating surface and the target material after flipping, improving the uniformity of the film layer in subsequent sputtering coating. Furthermore, the power module integrated at the bottom of the workpiece placement rack provides stable power to all electrical components, further ensuring the overall reliability and process stability of the device. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a workpiece baking and heating device for a magnetron sputtering coating machine according to an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of the internal structure of the magnetron sputtering coating machine according to an embodiment of the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the fixing frame, baking heating cover plate, and workpiece placement rack in an embodiment of the present invention;

[0023] Figure 4 This is a schematic diagram of the internal structure of the workpiece placement rack according to an embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of the workpiece placement rack and power module structure according to an embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram of the internal structure of the fixing frame according to an embodiment of the present invention;

[0026] Figure 7 This is a schematic diagram of the rotating rod and transmission rod structure according to an embodiment of the present invention.

[0027] In the diagram: 1. Magnetron sputtering coating machine; 2. Coating sealing door; 3. Workpiece placement assembly; 4. Fixing frame; 5. Control servo cylinder; 6. Baking and heating cover plate; 7. Air inlet pipe; 8. Air outlet pipe; 9. Workpiece placement rack; 10. Side positioning frame; 11. Alignment frame; 12. Fixed support frame; 13. Electrostatic chuck; 14. Positioning cylinder; 15. Infrared heating unit; 16. Workpiece baking chamber; 17. Sealing connection groove; 18. Connection groove; 19. Power module; 20. 21. Mounting groove; 22. Connecting block; 23. Miniature electric cylinder one; 24. Connecting slot; 25. Control groove; 26. Sliding protrusion; 27. Telescopic electric cylinder; 28. Movable block; 29. ​​Drive groove; 30. Control through hole; 31. Control protrusion; 32. Miniature electric cylinder two; 33. Contact switch; 34. Drive motor; 35. Drive gear; 36. Driven gear; 37. Rotating rod; 38. Sprocket; 39. Transmission rod; 40. Chain; 41. Control electric cylinder. Detailed Implementation

[0028] The present invention will be further explained below with reference to the accompanying drawings and specific embodiments.

[0029] Example 1

[0030] Please see Figures 1 to 7 As shown, this embodiment discloses a workpiece baking and heating device for a magnetron sputtering coating machine, including: a magnetron sputtering coating machine 1 and a coating sealing door 2. The coating sealing door 2 is rotatably mounted on the front of the magnetron sputtering coating machine 1 via a hinge. The magnetron sputtering coating machine 1 has a coating chamber inside, and a fixing frame 4 is fixedly mounted in the middle of the coating chamber. A workpiece placement assembly 3 is movably mounted inside the fixing frame 4. A baking and heating cover plate 6 is also movably mounted above the coating chamber. Control servo cylinders 5 are fixedly mounted on both sides of the top of the magnetron sputtering coating machine 1, and the drive shafts of the two control servo cylinders 5 are connected. The bottom ends are all fixedly connected to the top of the baking and heating cover plate 6. The baking and heating cover plate 6 is controlled to move up and down inside the coating chamber by two control servo electric cylinders 5. The baking and heating cover plate 6, together with the workpiece placement assembly 3, is used to automatically bake and heat the coated workpiece. The front and rear sides of the top of the magnetron sputtering coating machine 1 are also fixedly provided with an air inlet pipe 7 and an air outlet pipe 8, respectively. The bottom ends of the air inlet pipe 7 and the air outlet pipe 8 extend to the bottom of the baking and heating cover plate 6. The air inlet pipe 7 and the air outlet pipe 8 are both made of spring flexible tubes to ensure that the air inlet pipe 7 and the air outlet pipe 8 can be stably connected as the baking and heating cover plate 6 moves up and down.

[0031] It should be noted that the inside of the baking heating cover plate 6 is connected to a positive electrode, and a sealed connection is made between the baking heating cover plate 6 and the workpiece placement assembly 3. A baking heating chamber is formed between the workpiece placement assembly 3 and the baking heating cover plate 6. Argon gas is introduced into the baking heating chamber through the air inlet pipe 7, and the internal pressure of the baking heating chamber is controlled at 1-10MPa through the air outlet pipe 8. By applying a negative bias voltage to the internal clamping structure of the workpiece placement assembly 3, the argon gas is ionized into argon ions and electrons under the action of the electric field. The argon ions are accelerated by the electric field and bombard the negatively charged workpiece surface at high speed, thereby achieving etching and cleaning of the workpiece surface.

[0032] Specifically, the workpiece placement assembly 3 includes a workpiece placement rack 9. Sliding protrusions 25 are provided on both sides of the workpiece placement rack 9. Two movable locking blocks 27 are movably arranged on both sides inside the fixed frame 4. The two sliding protrusions 25 are respectively located between the upper and lower movable locking blocks 27 on both sides. Two telescopic electric cylinders 26 are fixedly arranged on both sides inside the fixed frame 4. One end of the drive shaft of the telescopic electric cylinder 26 is fixedly connected to one side of the movable locking block 27. The drive shaft of the telescopic electric cylinder 26 controls the movable locking block 27 to slide and extend within the fixed frame 4. After the upper and lower movable locking blocks 27 extend from inside the fixed frame 4, a connecting groove is formed between the two movable locking blocks 27, allowing the sliding protrusions 25 on both sides of the workpiece placement rack 9 to slide within the connecting groove on both sides.

[0033] Furthermore, a workpiece baking cavity 16 is provided at the top of the workpiece placement rack 9, and positioning electric cylinders 14 are fixedly installed on both sides inside the workpiece baking cavity 16. Side positioning frames 10 are slidably installed on both sides inside the workpiece baking cavity 16, and the driving ends of the positioning electric cylinders 14 on both sides are fixedly connected to one side of the two side positioning frames 10 respectively. Two correction frames 11 are slidably installed on the opposite side of the two side positioning frames 10 via electric slides, and a fixed support frame 12 is fixedly installed in the middle of the opposite side of the two side positioning frames 10. The correction frame 11 has an "L" shaped structure, and electrostatic chucks 13 are provided inside the correction frame 11 and the fixed support frame 12. The suction port of the electrostatic chuck 13 extends to the upper end face of the correction frame 11 and the fixed support frame 12. A power module 19 is fixedly installed at the bottom of the workpiece placement rack 9 by bolts, and the inside of the power module 19 is electrically connected to the electrical components inside the workpiece placement rack 9 through wires. The inside of the side positioning frames 10 is connected to a negative bias voltage through wires.

[0034] It should be noted that when clamping and positioning the workpiece, the workpiece is placed inside the workpiece baking cavity 16. First, the side positioning frames 10 on both sides are driven by the positioning electric cylinders 14 on both sides to move closer to the sides of the workpiece until the sides of the workpiece contact the side positioning frames 10 on both sides. At this time, the bottom sides of the workpiece contact the tops of the two fixed support frames 12. Then, the two correction frames 11 set on one side of the two side positioning frames 10 move closer to the front and rear sides of the workpiece until the front and rear sides of the workpiece contact the front and rear correction frames 11 on the front and rear sides respectively. The electrostatic chucks 13 set inside the correction frames 11 and the fixed support frames 12 are used to adsorb and position the bottom surface of the workpiece, ensuring the positioning stability of the workpiece inside the workpiece baking cavity 16.

[0035] Furthermore, several infrared heating units 15 are fixedly installed at the bottom of the inner wall of the workpiece baking cavity 16, and these units are arranged in a rectangular array at the bottom of the inner wall of the workpiece baking cavity 16. Each infrared heating unit 15 is composed of a ceramic infrared heating element and a thermocouple, and each ceramic infrared heating element is independently temperature-controlled. After the workpiece is placed above the fixed support frame 12, the bottom surface of the workpiece is heated non-contactly using the matrix infrared heating units 15. The matrix infrared heating units 15 are selectively applied according to the size and specifications of the workpiece. When the heating element inside the infrared heating unit 15 is energized, it generates heat, converting electrical energy into infrared rays. These infrared rays directly radiate onto the surface of the target workpiece. The workpiece molecules absorb the infrared energy, causing increased vibration and conversion into heat energy, thus achieving non-contact heating of the workpiece without direct contact, avoiding contamination or damage. Simultaneously, the temperature at various locations on the workpiece is monitored using thermocouples, and the operating power of the matrix infrared heating units 15 is dynamically adjusted based on the monitored temperatures, thereby ensuring uniform heating of the workpiece.

[0036] Furthermore, the top of the workpiece placement rack 9 is provided with a sealing connection groove 17 that mates with the bottom of the baking and heating cover plate 6, and the bottom of the workpiece placement rack 9 is also provided with a connection groove 18 that mates with the bottom of the baking and heating cover plate 6. Both sides of the inner wall of the connection groove 18 are provided with mounting grooves 20, and both mounting grooves 20 are movably provided with connecting blocks 21. A miniature electric cylinder 22 is fixedly provided on one side of the inner wall of both mounting grooves 20, and the driving end of the miniature electric cylinder 22 is fixedly connected to one side of the connecting block 21. Both sides of the outer circumference of the baking and heating cover plate 6 are provided with connecting slots 23 that mate with the connecting blocks 21.

[0037] It should be noted that when connecting the baking heating cover plate 6 and the workpiece placement rack 9, the driving end of the servo cylinder 5 is controlled to move the baking heating cover plate 6 downward, so that the bottom of the baking heating cover plate 6 mates with the sealing connection groove 17 on the top of the workpiece placement rack 9. Through the sealing connection between the baking heating cover plate 6 and the workpiece placement rack 9, a baking heating sealed cavity is formed between the baking heating cover plate 6 and the workpiece placement rack 9. Then, the infrared heating unit 15 is used to perform infrared heating treatment on the workpiece. When performing magnetron sputtering coating treatment on the workpiece, By flipping the workpiece placement rack 9, the baking heating cover plate 6 is controlled to move downwards until the bottom of the baking heating cover plate 6 is inserted into the interior of the connecting groove 18. The driving end of the micro electric cylinder 22 controls the connecting block 21 and the connecting slots 23 on both sides of the baking heating cover plate 6 to cooperate and connect, thereby realizing the connection between the baking heating cover plate 6 and the workpiece placement rack 9. At this time, the coating surface of the workpiece that is adsorbed and positioned faces the target material inside the coating chamber. The target material is melted by heating the crucible inside the coating chamber, and the coating surface of the workpiece is subjected to magnetron sputtering coating treatment.

[0038] Furthermore, when controlling the flipping of the workpiece placement rack 9, control protrusions 30 are movably arranged on both sides inside the fixed frame 4, and control grooves 24 that cooperate with the control protrusions 30 are arranged on both sides of the workpiece placement rack 9, connecting the two and controlling the rotation of the control protrusions 30, thereby realizing the flipping control of the workpiece placement rack 9 inside the fixed frame 4; specifically, a drive groove 28 is provided inside the fixed frame 4, and control through holes 29 are provided on both sides of the inner wall of the fixed frame 4, with one side of each of the two control through holes 29 extending into the interior of the drive groove 28; transmission rods 38 are rotatably arranged on both sides inside the drive groove 28, and control electric cylinders 40 are fixedly installed inside each of the two transmission rods 38, with one end of the drive shaft of each of the two control electric cylinders 40... Each workpiece placement rack 9 is fixedly equipped with a control protrusion 30, and one side of each control protrusion 30 penetrates the interior of the control groove 24. Both sides of the workpiece placement rack 9 are provided with control grooves 24 that cooperate with the control protrusions 30. A rotating rod 36 is rotatably provided on one side of the drive groove 28, and sprockets 37 are fixedly provided at both ends of the rotating rod 36 and one end of each of the two transmission rods 38. The two sprockets 37 on the left and right sides are meshed and driven by a chain 39. A drive motor 33 is fixedly provided on one side of the workpiece placement rack 9, and a drive gear 34 is fixedly provided at one end of the output shaft of the drive motor 33. A driven gear 35 is fixedly provided on the surface of the rotating rod 36, and the tooth surface of the driven gear 35 meshes and drives the tooth surface of the drive gear 34.

[0039] Furthermore, a miniature electric cylinder 31 is fixedly installed on the rear side of the inner wall of the fixing frame 4, and a contact switch 32 is fixedly installed on one end of the drive shaft of the miniature electric cylinder 31.

[0040] It should be noted that when connecting the workpiece placement rack 9 and the fixed frame 4, the workpiece placement rack 9 is slid into the fixed frame 4 until the back of the workpiece placement rack 9 contacts the front of the contact switch 32. After the contact switch 32 is triggered and opened, the drive shaft of the control cylinder 40 inside the control transmission rod 38 pushes the control protrusion 30 into the control grooves 24 on both sides of the workpiece placement rack 9, thus completing the connection between the workpiece placement rack 9 and the fixed frame 4. When the workpiece placement rack 9 is flipped, the drive shaft of the micro electric cylinder 31 controls the contact switch 32 to retract to the rear. At this time, the output shaft of the drive motor 33 controls the drive gear 34 to rotate. The drive gear 34 drives the driven gear 35 to mesh and transmit power. The driven gear 35 drives the rotating rod 36 to rotate. Finally, the sprockets 37 at both ends of the rotating rod 36, together with the chain 39, drive the transmission rods 38 on both sides to rotate. The transmission rods 38, together with the control protrusions 30, drive the workpiece placement rack 9 to flip inside the fixed frame 4, so that the coated surface of the flipped workpiece faces the target material.

[0041] Specifically, the working method of a workpiece baking and heating device for a magnetron sputtering coating machine is as follows:

[0042] Step 1: Open the coating sealing door 2 to prepare for the workpiece installation operation. Control the telescopic electric cylinder 26 to drive the movable block 27 to retract, so that a channel is formed inside the fixed frame 4 for the workpiece placement component 3 to be inserted. Ensure that the control servo electric cylinder 5 is in the retracted state, so that the baking heating cover plate 6 is above the coating chamber.

[0043] Step 2: Place the workpiece to be processed in the workpiece baking cavity 16 of the workpiece placement rack 9, start the positioning electric cylinder 14, drive the side positioning racks 10 on both sides to move closer to the sides of the workpiece until they contact the sides of the workpiece. At this time, the bottom sides of the workpiece contact the top of the fixed support rack 12. Control the correction rack 11 to move closer to the front and rear sides of the workpiece through the electric slide table until it contacts the front and rear sides of the workpiece. Start the electrostatic chuck 13 to adsorb and position the bottom surface of the workpiece to ensure that the workpiece is stably fixed in the workpiece baking cavity 16.

[0044] Step 3: Slide the workpiece placement assembly 3 containing the workpiece into the fixed frame 4, so that the sliding protrusions 25 on both sides are located between the movable locking blocks 27 on both sides of the fixed frame 4. When the back of the workpiece placement frame 9 contacts the front of the contact switch 32, the contact switch 32 is triggered, controlling the telescopic electric cylinder 26 to drive the movable locking block 27 to extend, forming a connecting groove between the upper and lower movable locking blocks 27, restricting the sliding protrusion 25 in the connecting groove. At the same time, the control electric cylinder 40 inside the control transmission rod 38 drives the control protrusion 30 to slide into the control grooves 24 on both sides of the workpiece placement frame 9, completing the connection between the workpiece placement frame 9 and the fixed frame 4.

[0045] Step 4: Start the control servo cylinder 5 to drive the baking heating cover plate 6 to move downwards, so that its bottom is connected with the sealing connection groove 17 on the top of the workpiece placement rack 9 to form a baking heating sealed cavity. Argon gas is introduced into the baking heating sealed cavity through the air inlet pipe 7, and the pressure inside the cavity is controlled within the range of 1-10MPa through the air outlet pipe 8. A positive electrode is connected inside the baking heating cover plate 6, and a negative bias is connected to the internal clamping structure of the workpiece placement assembly 3, so that the argon gas is ionized into argon ions and electrons under the action of the electric field. The argon ions are accelerated by the electric field to bombard the workpiece surface, achieving etching and cleaning. Start the infrared heating unit 15 at the bottom of the workpiece baking cavity 16. Selectively activate the corresponding infrared heating unit according to the size and specifications of the workpiece. The ceramic infrared heating element of the infrared heating unit 15 is energized and heats up, converting electrical energy into infrared rays, which are radiated to the workpiece surface to achieve non-contact heating. The temperature of each position of the workpiece is monitored in real time through thermocouples, and the operating power of each infrared heating unit 15 is dynamically adjusted to ensure uniform heating of the workpiece.

[0046] Step 5: After baking and heating are completed, turn off the infrared heating unit 15, stop the argon gas supply, start the control servo cylinder 5, drive the baking heating cover plate 6 to move upward and disengage from the sealed connection with the workpiece placement rack 9, start the micro electric cylinder 31, drive the contact switch 32 to retract to the rear, start the drive motor 33, drive the driven gear 35 to rotate through the drive gear 34, and then drive the rotating rod 36 to rotate. The rotating rod 36 drives the transmission rods 38 on both sides to rotate through the sprocket 37 and the chain 39. The transmission rods 38 drive the workpiece placement rack 9 to flip inside the fixed frame 4 through the control protrusion 30. After the workpiece placement rack 9 flips to the point where the workpiece coating surface faces the target material, stop the drive motor 33.

[0047] Step Six: Restart the control servo cylinder 5 to drive the baking heating cover plate 6 to move downwards so that its bottom is inserted into the connecting groove 18. Start the micro electric cylinder 22 to drive the connecting block 21 to engage with the connecting slots 23 on both sides of the baking heating cover plate 6, so as to achieve a fixed connection between the baking heating cover plate 6 and the workpiece placement rack 9. Close the coating sealing door 2, perform vacuum treatment on the coating chamber, start the magnetron sputtering coating machine 1, melt the target material by heating the crucible inside the coating chamber, and perform magnetron sputtering coating treatment on the coating surface of the workpiece.

[0048] Step 7: After the coating is completed, open the coating sealing door 2, disconnect the baking heating cover plate 6 from the workpiece placement rack 9, control the workpiece placement rack 9 to flip back to the initial position, disconnect the fixing frame 4 from the workpiece placement rack 9, remove the workpiece placement assembly 3 from the fixing frame 4, turn off the electrostatic chuck 13, and take out the workpiece that has been coated.

[0049] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0050] This invention is not limited to the optional embodiments described above, and anyone can derive other various forms of products based on the inspiration of this invention. The specific embodiments described above should not be construed as limiting the scope of protection of this invention; the scope of protection of this invention should be determined by the claims, and the specification can be used to interpret the claims.

Claims

1. A workpiece baking and heating device for a magnetron sputtering coating machine, comprising a magnetron sputtering coating machine (1) and a coating sealing door (2), characterized in that: The magnetron sputtering coating machine (1) has a coating chamber inside, and a fixed frame (4) is fixedly installed in the middle of the coating chamber. A workpiece placement assembly (3) is movably installed inside the fixed frame (4). A baking and heating cover plate (6) is movably installed above the coating chamber. Control servo cylinders (5) are fixedly installed on both sides of the top of the magnetron sputtering coating machine (1). The bottom end of the drive shaft of the control servo cylinder (5) is fixedly connected to the top of the baking and heating cover plate (6). The front of the top of the magnetron sputtering coating machine (1) An air inlet pipe (7) and an air outlet pipe (8) are fixedly installed on the rear side respectively. The bottom ends of the air inlet pipe (7) and the air outlet pipe (8) extend to the bottom of the baking heating cover plate (6). Both the air inlet pipe (7) and the air outlet pipe (8) are made of spring flexible pipe. The baking heating cover plate (6) is connected to the positive electrode inside, and the internal clamping structure of the workpiece placement assembly (3) is connected to the negative bias voltage. Argon gas is introduced into the baking heating chamber through the air inlet pipe (7), and the air outlet pipe (8) controls the pressure inside the baking heating chamber to be 1-10 MPa. The workpiece placement assembly (3) includes a workpiece placement rack (9), with sliding protrusions (25) on both sides of the workpiece placement rack (9). Two movable locking blocks (27) are movably arranged on both sides inside the fixed frame (4). The sliding protrusions (25) are slidably arranged between the upper and lower movable locking blocks (27) on both sides. Two telescopic electric cylinders (26) are fixedly arranged on both sides inside the fixed frame (4). One end of the drive shaft of the telescopic electric cylinder (26) is fixedly connected to one side of the movable locking block (27). A workpiece baking cavity is provided at the top of the workpiece placement rack (9). 16) Positioning electric cylinders (14) are fixedly installed on both sides inside the workpiece baking cavity (16). Side positioning frames (10) are slidably installed on both sides inside the workpiece baking cavity (16). The driving end of the positioning electric cylinder (14) is fixedly connected to one side of the side positioning frame (10). Two correction frames (11) are slidably installed on the opposite side of the side positioning frame (10) via an electric slide table. A fixed support frame (12) is fixedly installed in the middle of the opposite side of the side positioning frame (10). Electrostatic chucks (13) are installed inside both the correction frame (11) and the fixed support frame (12). Several infrared heating units (15) are fixedly arranged at the bottom of the inner wall of the workpiece baking cavity (16). The infrared heating units (15) are arranged in a rectangular array. The infrared heating units (15) are composed of ceramic infrared heating elements and thermocouples. Each ceramic infrared heating element is independently temperature controlled.

2. The workpiece baking and heating device for a magnetron sputtering coating machine according to claim 1, characterized in that, The top of the workpiece placement rack (9) is provided with a sealing connection groove (17) that matches the bottom of the baking heating cover plate (6). The bottom of the workpiece placement rack (9) is provided with a connection groove (18). The inner walls of the connection groove (18) are provided with mounting grooves (20) on both sides. The mounting groove (20) is movably provided with a connecting block (21). A miniature electric cylinder (22) is fixedly provided on one side of the inner wall of the mounting groove (20). The driving end of the miniature electric cylinder (22) is fixedly connected to one side of the connecting block (21). The outer circumference of the baking heating cover plate (6) is provided with a connecting slot (23) that matches the connecting block (21) on both sides.

3. The workpiece baking and heating device for a magnetron sputtering coating machine according to claim 1, characterized in that, The fixed frame (4) has control protrusions (30) movably arranged on both sides inside, and the workpiece placement rack (9) has control grooves (24) on both sides that cooperate with the control protrusions (30); the fixed frame (4) has a drive groove (28) inside, and a transmission rod (38) is rotatably arranged on both sides inside the drive groove (28). A control electric cylinder (40) is fixedly arranged inside the transmission rod (38), and a control protrusion (30) is fixedly arranged at one end of the drive shaft of the control electric cylinder (40); a rotating rod (36) is rotatably arranged on one side inside the drive groove (28). A sprocket (37) is fixedly arranged at both ends of the rotating rod (36) and at one end of the two transmission rods (38). The surfaces of the sprockets (37) are meshed and driven by a chain (39); a drive motor (33) is fixedly arranged on one side inside the workpiece placement rack (9). A drive gear (34) is fixedly arranged at one end of the output shaft of the drive motor (33). A driven gear (35) is fixedly arranged on the surface of the rotating rod (36). The driven gear (35) meshes and drives the drive gear (34).

4. The workpiece baking and heating device for a magnetron sputtering coating machine according to claim 3, characterized in that, A miniature electric cylinder 2 (31) is fixedly installed on the rear side of the inner wall of the fixed frame (4), and a contact switch (32) is fixedly installed at one end of the drive shaft of the miniature electric cylinder 2 (31).

5. A workpiece baking and heating device for a magnetron sputtering coating machine according to claim 1, characterized in that, The bottom of the workpiece placement rack (9) is fixed with a power module (19) by bolts. The power module (19) is electrically connected to the electrical components inside the workpiece placement rack (9) by wires. The side positioning frame (10) is connected to a negative bias voltage by wires.

6. A workpiece baking and heating device for a magnetron sputtering coating machine according to claim 1, characterized in that, The ceramic infrared heating element of the infrared heating unit (15) converts electrical energy into infrared rays after being powered on. The infrared rays directly radiate to the surface of the workpiece, and the workpiece molecules absorb the infrared energy and convert it into heat energy. The thermocouple monitors the temperature of each position of the workpiece in real time and dynamically adjusts the operating power of the infrared heating unit (15).

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