A plasma measurement probe device for high temperature strong magnetic field environments

By designing a mobile plasma measurement probe device, combined with a water-cooling structure and a heat shield, the problem of surface corrosion and damage of the probe in a high-temperature and strong magnetic field environment was solved, achieving higher measurement reliability and probe life.

CN120727320BActive Publication Date: 2025-11-04HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES
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Patent Information

Application Number
CN202511220467.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-08-29
Publication Date
2025-11-04
Estimated Expiration
2045-08-29

AI Technical Summary

Technical Problem

Existing active water-cooled fixed probes are prone to surface corrosion and structural damage under prolonged plasma exposure, leading to decreased measurement reliability, shortened probe life, and increased experimental costs.

Method used

Design a probe device including a base, a driver, a movable seat, a guide rod, a water-cooled structure, a probe assembly, and a heat shield. The driver controls the movement of the probe and the circulation of the cooling medium in the water-cooled structure, thereby achieving precise position adjustment and effective heat dissipation of the probe and avoiding long-term heat deposition.

Benefits of technology

This improves the measurement reliability and lifespan of the probe in high-temperature and strong magnetic field environments, reduces unnecessary heat load and particle bombardment time, and enhances measurement accuracy and reliability.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of plasma measurement, and discloses a plasma measurement probe device for a high-temperature strong magnetic field environment, which comprises a base, a driver, a moving seat, a guide rod, a water cooling structure, a probe assembly and a heat baffle, the driver is in transmission connection with the moving seat; the water cooling structure comprises a water inlet pipe, a water outlet pipe and a water cooling shell, the water cooling shell is arranged on the side of the base far from the moving seat, the water inlet pipe and the water outlet pipe are connected with the water cooling shell and the moving seat, and the water inlet pipe and the water outlet pipe are provided with water cooling interfaces at the ends corresponding to the moving seat; the probe assembly comprises a probe body, a heat conduction base and a ceramic gasket, the water cooling shell is provided with a mounting interface, the heat conduction base is fixed to the mounting interface, the heat baffle is arranged on the side of the heat conduction base far from the water cooling shell, and the ceramic gasket separates the heat conduction base from the heat baffle; the ceramic gasket is provided with a first through hole, the probe body penetrates through the first through hole and is in contact with the heat conduction base for electric conduction, and the hot flow is prevented from being deposited on the surface of the probe for a long time to cause excessively high temperature.
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Description

Technical Field

[0001] This invention relates to the field of plasma measurement technology, and in particular to a plasma measurement probe device for use in high-temperature and strong magnetic field environments. Background Technology

[0002] In the operation and research of nuclear fusion devices, the divertor, as a key component directly subjected to the highest heat flux, plays a crucial role in understanding the interaction mechanism between plasma and its walls. This is of great significance for the safe operation of the device and the design optimization of the fusion reactor. Therefore, accurate measurement of plasma parameters (such as temperature, density, and beam distribution) in the divertor region is essential for understanding boundary physics and optimizing device operation.

[0003] However, in actual tokamak discharge experiments, plasma discharge conditions are complex, reproducibility is poor, and pulse duration is short, making it difficult to conduct systematic single-item physics studies. To overcome this limitation, high-current linear devices are widely used to simulate the extreme environment under the divertor of future fusion reactors. These devices can generate strong magnetic fields and high particle flux, enabling the reproduction of high heat flux and long-term plasma exposure conditions in the divertor region, thus providing a ground-based verification platform for testing key components. However, this also poses stringent challenges to plasma parameter measurement tools—especially the thermal load-bearing capacity of the probes, which are prone to damage due to overheating or distortion of measurement signals. Early probe designs relied heavily on the cooling structures of nearby components for indirect heat dissipation through conduction, resulting in limited thermal management capabilities and difficulty in stable operation under the extreme thermal environment of high-current linear devices.

[0004] To improve the thermal load tolerance of probes, various active water-cooled probe structures have been developed. These structures utilize internal circulating coolant to continuously cool the probe body, enabling it to withstand higher heat fluxes and reliably measure plasma parameters. However, high-current linear devices typically operate in a long-term steady-state or quasi-steady-state, with discharge times reaching several hours, far exceeding the second- or minute-level discharge durations of traditional fusion devices. While fixed water-cooled probes alleviate the thermal load problem to some extent, thermal corrosion, material sputtering, and structural fatigue still occur on the probe surface during prolonged plasma exposure, leading to performance degradation or even failure. This "unnecessary damage" not only increases experimental costs but also affects the reliability of long-term stability studies.

[0005] In summary, for plasma parameter measurement requirements in high-current linear devices under long-term, high-heat-fluidity plasma environments, existing actively water-cooled fixed probes can withstand high heat loads for short periods. However, during long-term discharges measured in hours, they still suffer from severe surface corrosion, structural damage, and performance degradation due to continuous exposure to plasma, leading to decreased measurement reliability, shortened probe lifespan, and increased experimental costs. Summary of the Invention

[0006] The technical problem to be solved by the present invention is that existing active water-cooled fixed probes suffer from severe surface corrosion, structural damage and performance degradation due to continuous exposure to plasma during long-term discharges measured in hours, resulting in decreased measurement reliability, shortened probe life and increased experimental costs.

[0007] To address the aforementioned technical problems, this invention provides a technical solution for a plasma measurement probe device used in high-temperature, high-magnetic-field environments:

[0008] The plasma measurement probe device for high temperature and strong magnetic field environment includes a base, a driver, a movable seat, a guide rod, a water-cooling structure, a probe assembly and a heat shield. The driver and the guide rod are both mounted on the base. The driver is connected to the movable seat in a transmission manner. The movable seat is fixed with a slider, and the slider is slidably engaged with the guide rod.

[0009] The water-cooling structure includes an inlet pipe, an outlet pipe, and a water-cooling shell. The water-cooling shell is spaced apart on the side of the base away from the movable base. The inlet pipe and the outlet pipe are both connected between the water-cooling shell and the movable base, and the inlet pipe and the outlet pipe are provided with a water-cooling interface at one end corresponding to the movable base.

[0010] The probe assembly includes a probe body, a thermally conductive base, and a ceramic gasket. The water-cooled housing is provided with an installation interface. The thermally conductive base is fixed to the installation interface. The ceramic gasket and the heat shield are both located on the side of the thermally conductive base away from the water-cooled housing, and the ceramic gasket isolates the thermally conductive base from the heat shield.

[0011] The ceramic pad has a first through hole in the middle, the probe body passes through the first through hole and contacts the heat-conducting base to conduct electricity, and the heat shield has a second through hole in the middle, the second through hole communicating with the first through hole to expose the end face of the probe body.

[0012] Furthermore, the end face of the probe body is arranged perpendicular to the extension direction of the water outlet pipe, the water-cooled housing is rectangular in shape, and the water outlet pipe and the mounting interface are located on two adjacent vertical sides of the water-cooled housing.

[0013] Furthermore, the water-cooling structure also includes a right-angle connector, one end of which is connected to the water inlet pipe, and the other end of which protrudes from the water-cooling housing towards the probe body. The other end of the right-angle connector is spaced apart from the heat-conducting base to form an annular water return channel between the right-angle connector and the heat-conducting base.

[0014] Furthermore, the heat-conducting base is a circular cover structure, comprising a fixedly connected base plate and an annular wall. The annular wall is welded and fixed to the mounting interface. A threaded hole is provided in the middle of the base plate on the side facing away from the water-cooling housing. The probe body is installed in the threaded hole. A protrusion is also provided in the middle of the base plate on the side near the water-cooling housing. The protrusion is arranged opposite to the other end of the right-angle connector.

[0015] Furthermore, the inlet pipe is inserted inside the outlet pipe, and an annular space for the cooling medium to circulate is formed between the outlet pipe and the inlet pipe.

[0016] Furthermore, the water inlet pipe includes a first water inlet section and a second water inlet section coaxially connected, the second water inlet section being connected to the right-angle connector; the water outlet pipe includes a first water outlet pipe and a second water outlet section coaxially connected, the second water outlet section being connected to the water-cooled shell, and both the second water inlet section and the second water outlet section are ceramic pipe sections.

[0017] Furthermore, the water inlet pipe also includes a fixing block, which is positioned and installed inside the water outlet pipe, and the fixing block is connected to the first water inlet section and the second water inlet section respectively. The fixing block has a water passage hole corresponding to the annular space.

[0018] Furthermore, the plasma measurement probe device also includes a flange assembly, which is fixedly connected to the base. A first through hole is provided in the middle of the flange assembly, through which the water inlet pipe and the water outlet pipe move. The outer wall of the water outlet pipe is provided with a convex ring portion, which is spaced apart from the flange assembly. When the probe assembly is removed, the convex ring portion engages with the flange assembly to stop.

[0019] Furthermore, the probe assembly also includes a wire and an electrode. The electrode is arranged close to the water-cooling interface. One end of the wire is electrically connected to the electrode, and the other end of the wire is electrically connected to the probe body through the water-cooling housing and the heat-conducting base.

[0020] Furthermore, a first corrugated pipe is sleeved on the outside of the water outlet pipe, one end of the first corrugated pipe is fixedly connected to the movable seat, and the other end of the first corrugated pipe is fixedly connected to the flange assembly; a second corrugated pipe is sleeved on the outside of the wire, one end of the second corrugated pipe is fixedly connected to the movable seat, and the other end of the second corrugated pipe is fixedly connected to the flange assembly.

[0021] Compared with existing technologies, the plasma measurement probe device for high-temperature and strong magnetic field environments of the present invention has the following advantages: This plasma measurement probe device for high-temperature and strong magnetic field environments adopts a design consisting of a base, a driver, a movable base, a guide rod, a water-cooling structure, a probe assembly, and a heat shield. The driver and guide rod are both located on the base, and the driver is drivenly connected to the movable base. The movable base has a fixed slider, which slides against the guide rod. The water-cooling structure is connected to the movable base, and the probe assembly is mounted on the water-cooled shell of the water-cooling structure. The driver can precisely control the linear advance and retreat of the movable base, the water-cooling structure, and the probe assembly, enabling the probe body to accurately reach the predetermined measurement position of the plasma. When maintenance is required, the probe body is driven to move to a safe position avoiding the heat flow, preventing heat from accumulating on the probe surface for extended periods and causing excessive temperature. By smoothly moving the probe body, the measurement and maintenance states can be flexibly switched.

[0022] The water-cooling structure includes an inlet pipe, an outlet pipe, and a water-cooling shell. The water-cooling shell is spaced apart on the side of the base away from the moving base and connected to the inlet and outlet pipes. One end of each inlet and outlet pipe has a water-cooling interface. The probe assembly includes a probe body, a heat-conducting base, and a ceramic gasket. The heat-conducting base is fixed to the mounting interface of the water-cooling shell. By directly mounting the heat-conducting base to the mounting interface of the water-cooling shell, the cooling medium enters through the inlet pipe, passes through the water-cooling shell, and carries away the heat from the heat-conducting base. The cooled medium, after heat exchange, is then discharged through the outlet pipe and the water-cooling interface. This continuous flow of cooling medium counteracts the high temperatures generated by high-temperature plasma thermal radiation and particle bombardment. In particular, the probe body is electrically conductive in contact with the heat-conducting base, forming a good heat conduction path from the probe body to the heat-conducting base to the cooling medium. Even if the end face of the probe body is exposed to high-temperature heat flow, the heat-conducting base effectively reduces the overall temperature of the probe body, delaying ablation and extending its service life.

[0023] In addition, the ceramic gasket and heat shield are both located on the side of the heat-conducting base away from the water-cooled housing. The ceramic gasket isolates the heat-conducting base and the heat shield. The ceramic material has excellent high-temperature insulation properties, ensuring that the voltage applied to the probe body during plasma diagnostics will not leak to the vacuum chamber wall through the heat shield, thus guaranteeing the integrity of the electrical measurement circuit. The measurement current loop is: plasma - probe body end face - probe body - heat-conducting base - water-cooled housing - wire. Furthermore, the heat shield has a second through hole that communicates with the first through hole in the ceramic gasket, precisely exposing the end face of the probe body. The heat shield acts like a mask, preventing the side walls of the probe body and other components from direct bombardment and erosion by the plasma, avoiding unnecessary current generation on the sides and root of the probe body, improving the accuracy of the measurement results, and ensuring the measurement reliability of the probe system in extreme environments with high temperature and strong magnetic fields.

[0024] It should be noted that the actuator is a cylinder, and the transmission design of actuator + guide rod + slider ensures the reliability and positioning accuracy of the drive operation in strong magnetic field environments. Simultaneously, a movable probe system is provided that enables precise control, is resistant to high temperatures, and is immune to magnetic field interference. This allows the probe body to precisely extend into the designated plasma region only during necessary measurement periods, and to return to a safe position at other times. This significantly reduces unnecessary heat load and particle bombardment time, improving measurement accuracy, reliability, and probe lifespan. Attached Figure Description

[0025] Figure 1 This is a three-dimensional schematic diagram of a plasma measurement probe device for a high-temperature, high-magnetic-field environment according to an embodiment of the present invention;

[0026] Figure 2 This is an overall cross-sectional view of the plasma measurement probe device for high-temperature and strong magnetic field environments according to an embodiment of the present invention.

[0027] Figure 3 This is a three-dimensional schematic diagram of the water-cooled structure and probe assembly according to an embodiment of the present invention;

[0028] Figure 4 This is an exploded schematic diagram of the water-cooled structure according to an embodiment of the present invention;

[0029] Figure 5 This is an exploded view of the probe assembly according to an embodiment of the present invention;

[0030] Figure 6 This is a partial cross-sectional view of the probe assembly according to an embodiment of the present invention;

[0031] In the diagram: 1. Base; 2. Driver; 3. Moving seat; 31. Slider; 4. Guide rod; 5. Water-cooling structure; 50. Annular space; 51. Water inlet pipe; 511. First water inlet section; 512. Second water inlet section; 513. Fixing block; 52. Water outlet pipe; 521. First water outlet pipe; 522. Second water outlet section; 523. Protruding ring part; 53. Water-cooling shell; 530. Mounting interface; 54. Water-cooling interface; 55. Straight Angle connector; 550, Annular return water channel; 56, First bellows; 6, Probe assembly; 61, Probe body; 62, Thermal base; 621, Base plate; 622, Circular wall; 623, Protrusion; 63, Ceramic gasket; 630, First perforation; 64, Heat shield; 640, Second perforation; 641, Insulating gasket; 65, Wire; 66, Electrode; 67, Second bellows; 7, Flange assembly; 70, First through hole. Detailed Implementation

[0032] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0033] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise" used to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0035] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0036] like Figures 1 to 6 As shown, an embodiment of the present invention provides a plasma measurement probe device for a high-temperature, high-magnetic-field environment, comprising a base 1, a driver 2, a movable seat 3, a guide rod 4, a water-cooling structure 5, a probe assembly 6, and a heat shield 64. The driver 2 and the guide rod 4 are both mounted on the base 1. The driver 2 is connected to the movable seat 3 via a transmission connection. The movable seat 3 is fixed with a slider 31, which slides in cooperation with the guide rod 4. The water-cooling structure 5 includes an inlet pipe 51, an outlet pipe 52, and a water-cooling shell 53. The water-cooling shell 53 is spaced apart on the side of the base 1 away from the movable seat 3. The inlet pipe 51 and the outlet pipe 52 are both connected between the water-cooling shell 53 and the movable seat 3, and the ends of the inlet pipe 51 and the outlet pipe 52 corresponding to the ends of the movable seat 3 are provided with water-cooling interfaces 54.

[0037] The probe assembly 6 includes a probe body 61, a thermally conductive base 62, and a ceramic gasket 63. The water-cooled housing 53 is provided with an installation interface 530. The thermally conductive base 62 is fixed to the installation interface 530. The ceramic gasket 63 and the heat shield 64 are both located on the side of the thermally conductive base 62 away from the water-cooled housing 53, and the ceramic gasket 63 isolates the thermally conductive base 62 from the heat shield 64. The ceramic gasket 63 has a first through hole 630 in the middle. The probe body 61 passes through the first through hole 630 and is electrically connected to the thermally conductive base 62. The heat shield 64 has a second through hole 640 in the middle. The second through hole 640 communicates with the first through hole 630 to expose the end face of the probe body 61.

[0038] This plasma measurement probe device for high-temperature, high-magnetic-field environments adopts a design consisting of a base 1, a driver 2, a movable seat 3, a guide rod 4, a water-cooling structure 5, a probe assembly 6, and a heat shield 64. The driver 2 and guide rod 4 are both located on the base 1. The driver 2 is connected to the movable seat 3 via a transmission connection. The movable seat 3 has a fixed slider 31, which slides against the guide rod 4. The water-cooling structure 5 is connected to the movable seat 3, and the probe assembly 6 is mounted on the water-cooled housing 53 of the water-cooling structure 5. The driver 2 precisely controls the linear movement of the movable seat 3, the water-cooling structure 5, and the probe assembly 6, enabling the probe body 61 to accurately reach the predetermined measurement position of the plasma. When maintenance is required, the probe body 61 is moved to a safe position away from the heat flow, preventing prolonged heat deposition on the probe surface and excessive temperature. By smoothly moving the probe body 61, the measurement and maintenance states can be flexibly switched.

[0039] The water-cooled structure 5 includes an inlet pipe 51, an outlet pipe 52, and a water-cooled housing 53. The water-cooled housing 53 is spaced apart on the side of the base 1 away from the movable base 3 and connected to the inlet pipe 51 and the outlet pipe 52. One end of the inlet pipe 51 and the outlet pipe 52 is provided with a water-cooled interface 54. The probe assembly 6 includes a probe body 61, a heat-conducting base 62, and a ceramic gasket 63. The heat-conducting base 62 is fixed to the mounting interface 530 of the water-cooled housing 53. By directly mounting the heat-conducting base 62 onto the mounting interface 530 of the water-cooled housing 53, the cooling medium enters from the inlet pipe 51, passes through the water-cooled housing 53, and carries away the heat from the heat-conducting base 62. Then, the cooled medium after heat exchange is discharged through the outlet pipe 52 and the water-cooled interface 54. The continuous flow of the cooling medium copes with the high temperature generated by the thermal radiation of the high-temperature plasma and the bombardment of particles. In particular, the probe body 61 is electrically conductive in contact with the heat-conducting base 62, forming a good heat conduction path from the probe body 61 to the heat-conducting base 62 to the cooling medium. Even if the end face of the probe body 61 is exposed to high-temperature heat flow, the heat-conducting base 62 effectively reduces the overall temperature of the probe body 61, delaying ablation and extending its service life.

[0040] In addition, the ceramic gasket 63 and the heat shield 64 are both located on the side of the heat-conducting base 62 away from the water-cooled housing 53. The ceramic gasket 63 isolates the heat-conducting base 62 and the heat shield 64. The ceramic material has excellent high-temperature insulation properties, ensuring that the voltage applied to the probe body 61 during plasma diagnostics will not leak to the vacuum chamber wall through the heat shield 64, thus ensuring the integrity of the electrical measurement circuit. The measurement current loop is: plasma - end face of probe body 61 - probe body 61 - heat-conducting base 62 - water-cooled housing 53 - wire 65. Furthermore, the heat shield 64 has a second through hole 640, which communicates with the first through hole 630 of the ceramic gasket 63, to precisely expose the end face of the probe body 61. The heat shield 64 acts like a mask, preventing the side walls and other components of the probe body 61 from being directly bombarded and eroded by the plasma, avoiding unnecessary current generation on the side and root of the probe body 61, improving the accuracy of the measurement results, and ensuring the measurement reliability of the probe system in extreme environments with high temperature and strong magnetic fields.

[0041] It should be noted that the actuator 2 is a cylinder. Through the transmission design of actuator 2 + guide rod 4 + slider 31, the reliability and positioning accuracy of the driving operation under strong magnetic field environment can be guaranteed. At the same time, a movable probe system that can achieve precise control, high temperature resistance, and resistance to magnetic field interference is provided. This allows the probe body 61 to accurately extend into the designated area of ​​plasma only during the necessary measurement period, and to return to a safe position at other times. This significantly reduces unnecessary heat load and particle bombardment time, and improves the accuracy, reliability, and service life of the measurement.

[0042] In this embodiment, the end face of the probe body 61 is arranged perpendicular to the extension direction of the water outlet pipe 52. The water-cooled housing 53 is rectangular in shape, and the water outlet pipe 52 and the mounting interface 530 are located on two adjacent vertical sides of the water-cooled housing 53. By arranging the end face of the probe body 61 perpendicular to the extension direction of the water outlet pipe 52 (the driving direction of the driver 2), it is ensured that the end face of the probe body 61 can accurately diagnose and measure plasma parameters, and the probe body 61 can be smoothly removed to a maintenance state after a certain period of heat flow deposition. Specifically, the heat shield 64 is a molybdenum plate, and the water-cooled housing 53 is fixedly connected to the molybdenum plate by bolts. Insulating washers 641 are provided between the bolt holes and bolts of the water-cooled housing 53 to provide reliable electrical insulation between the molybdenum plate and the water-cooled housing 53.

[0043] The water-cooling structure 5 also includes a right-angle connector 55. One end of the right-angle connector 55 is connected to the water inlet pipe 51, and the other end of the right-angle connector 55 protrudes from the water-cooling housing 53 towards the probe body 61. The other end of the right-angle connector 55 is spaced apart from the heat-conducting base 62 to form an annular return water channel 550 between the right-angle connector 55 and the heat-conducting base 62. The cooling medium in the annular return water channel 550 is in direct contact with the bottom surface of the heat-conducting base 62, increasing the heat exchange area and thus enabling more effective heat dissipation for the probe body 61.

[0044] As a further preferred embodiment, the heat-conducting base 62 has a circular cover structure. The heat-conducting base 62 includes a fixedly connected base plate 621 and an annular wall 622. The annular wall 622 is welded and fixed to the mounting interface 530. A threaded hole is formed in the middle of the base plate 621 on the side facing away from the water-cooled housing 53. The probe body 61 is mounted in the threaded hole. A protrusion 623 is also provided in the middle of the base plate 621 near the water-cooled housing 53. The protrusion 623 is arranged opposite to the other end of the right-angle connector 55. The heat-conducting base 62 is welded and fixed to the mounting interface 530, ensuring reliable connection while achieving both electrical and thermal conductivity. The protrusion 623 is positioned corresponding to the probe body 61, specifically increasing the local surface area and further improving the heat dissipation effect of the cooling medium on the probe body 61.

[0045] Furthermore, the inlet pipe 51 is inserted inside the outlet pipe 52, forming an annular space 50 between the outlet pipe 52 and the inlet pipe 51 for the flow of cooling medium. The inlet pipe 51 includes a first inlet section 511 and a second inlet section 512 coaxially connected, with the second inlet section 512 connected to a right-angle connector 55. The outlet pipe 52 includes a first outlet pipe 521 and a second outlet section 522 coaxially connected, with the second outlet section 522 connected to the water-cooled housing 53. Both the second inlet section 512 and the second outlet section 522 are ceramic tubes, preventing current leakage to the inlet pipe 51 and the outlet pipe 52. This compact design with an inner inlet pipe and an outer outlet pipe simplifies the piping complexity of the water-cooled structure 5 and makes the circulation of the cooling medium smoother.

[0046] In this embodiment, the inlet pipe 51 further includes a fixing block 513, which is positioned and installed inside the outlet pipe 52. The fixing block 513 is connected to the first inlet section 511 and the second inlet section 512 respectively, and the fixing block 513 has a water passage hole corresponding to the annular space 50. The fixing block 513 provides stable support for the first inlet section 511 and the second inlet section 512, ensuring the structural stability of the inlet pipe 51 relative to the outlet pipe 52.

[0047] The plasma measurement probe device also includes a flange assembly 7, which is fixedly connected to the base 1. A first through hole 70 is provided in the middle of the flange assembly 7, through which the inlet pipe 51 and outlet pipe 52 move. The outer wall of the outlet pipe 52 has a raised ring portion 523, which is spaced apart from the flange assembly 7. When the probe assembly 6 is removed, the raised ring portion 523 engages with the flange assembly 7. The flange assembly 7 is bolted to the flange window of the vacuum chamber, thus fixing the base 1 together to the vacuum chamber. The flange assembly 7 provides access channels for the inlet pipe 51, outlet pipe 52, and wire 65, ensuring reliable connection and flexible movement of the probe device to the vacuum chamber.

[0048] It should be noted that the probe assembly 6 also includes a wire 65 and an electrode 66. The electrode 66 is arranged close to the water-cooling interface 54. One end of the wire 65 is electrically connected to the electrode 66, and the other end of the wire 65 is electrically connected to the probe body 61 through the water-cooling housing 53 and the heat-conducting base 62. The wire 65 is connected to the fixing hole of the water-cooling housing 53 and forms a conductive connection with the probe body 61 through the heat-conducting base 62. The measurement signal is transmitted sequentially from the probe body 61-heat-conducting base 62-water-cooling housing 53-wire 65, and finally received by the external electrode 66.

[0049] In addition, a first corrugated pipe 56 is fitted around the water outlet pipe 52. One end of the first corrugated pipe 56 is fixedly connected to the movable base 3, and the other end is fixedly connected to the flange assembly 7. A second corrugated pipe 67 is fitted around the wire 65. One end of the second corrugated pipe 67 is fixedly connected to the movable base 3, and the other end is fixedly connected to the flange assembly 7. The first corrugated pipe 56 ensures the sealing of the probe device, and the second corrugated pipe 67 ensures the reliability of signal transmission. The movable base 3 has an elongated hole, and the cylinder push rod and the slider 31 are bolted to the elongated hole of the movable base 3, allowing the position of the movable base 3 to be flexibly adjusted to meet the installation requirements of probes in different scenarios.

[0050] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A plasma measurement probe device for use in high-temperature, high-magnetic-field environments, characterized in that, The device includes a base, a driver, a movable seat, a guide rod, a water-cooling structure, a probe assembly, and a heat shield. The driver and the guide rod are both mounted on the base. The driver is connected to the movable seat in a transmission manner. The movable seat has a slider fixed to it, and the slider is slidably engaged with the guide rod. The water-cooling structure includes an inlet pipe, an outlet pipe, and a water-cooling shell. The water-cooling shell is spaced apart on the side of the base away from the movable base. The inlet pipe and the outlet pipe are both connected between the water-cooling shell and the movable base, and the inlet pipe and the outlet pipe are provided with a water-cooling interface at one end corresponding to the movable base. The probe assembly includes a probe body, a thermally conductive base, and a ceramic gasket. The water-cooled housing is provided with an installation interface. The thermally conductive base is fixed to the installation interface. The ceramic gasket and the heat shield are both located on the side of the thermally conductive base away from the water-cooled housing, and the ceramic gasket isolates the thermally conductive base from the heat shield. The ceramic pad has a first through hole in the middle, the probe body passes through the first through hole and contacts the heat-conducting base to conduct electricity, and the heat shield has a second through hole in the middle, the second through hole communicating with the first through hole to expose the end face of the probe body.

2. The plasma measurement probe device for high-temperature, high-magnetic-field environments according to claim 1, characterized in that, The end face of the probe body is arranged perpendicular to the extension direction of the water outlet pipe. The water-cooled housing is rectangular in shape, and the water outlet pipe and the mounting interface are located on two adjacent vertical sides of the water-cooled housing.

3. The plasma measurement probe device for high-temperature and strong magnetic field environments according to claim 2, characterized in that, The water-cooling structure also includes a right-angle connector. One end of the right-angle connector is connected to the water inlet pipe, and the other end of the right-angle connector protrudes from the water-cooling housing in a direction close to the probe body. The other end of the right-angle connector is spaced apart from the heat-conducting base to form an annular water return channel between the right-angle connector and the heat-conducting base.

4. The plasma measurement probe device for high-temperature and strong magnetic field environments according to claim 3, characterized in that, The heat-conducting base is a circular cover structure. The heat-conducting base includes a fixedly connected base plate and a circular wall. The circular wall is welded and fixed to the mounting interface. A threaded hole is opened in the middle of the base plate on the side facing away from the water-cooling shell. The probe body is installed in the threaded hole. A protrusion is also provided in the middle of the base plate near the water-cooling shell. The protrusion is arranged opposite to the other end of the right-angle connector.

5. The plasma measurement probe device for high-temperature, high-magnetic-field environments according to claim 3 or 4, characterized in that, The inlet pipe is inserted inside the outlet pipe, and an annular space for the cooling medium to circulate is formed between the outlet pipe and the inlet pipe.

6. The plasma measurement probe device for high-temperature and strong magnetic field environments according to claim 5, characterized in that, The water inlet pipe includes a first water inlet section and a second water inlet section coaxially connected, and the second water inlet section is connected to the right-angle connector; the water outlet pipe includes a first water outlet pipe and a second water outlet section coaxially connected, and the second water outlet section is connected to the water-cooled shell, and both the second water inlet section and the second water outlet section are ceramic pipe sections.

7. The plasma measurement probe device for high-temperature, high-magnetic-field environments according to claim 6, characterized in that, The inlet pipe also includes a fixing block, which is positioned and installed inside the outlet pipe. The fixing block is connected to the first inlet section and the second inlet section respectively, and the fixing block has a water passage hole corresponding to the annular space.

8. The plasma measurement probe device for high-temperature, high-magnetic-field environments according to claim 1, characterized in that, The plasma measurement probe device further includes a flange assembly, which is fixedly connected to the base. A first through hole is provided in the middle of the flange assembly. The water inlet pipe and the water outlet pipe move through the first through hole. The outer wall of the water outlet pipe is provided with a convex ring portion. The convex ring portion is spaced apart from the flange assembly. When the probe assembly is removed, the convex ring portion and the flange assembly stop and cooperate.

9. The plasma measurement probe device for high-temperature and strong magnetic field environments according to claim 8, characterized in that, The probe assembly also includes a wire and an electrode. The electrode is arranged close to the water-cooling interface. One end of the wire is electrically connected to the electrode, and the other end of the wire is electrically connected to the probe body through the water-cooling housing and the heat-conducting base.

10. The plasma measurement probe device for high-temperature, high-magnetic-field environments according to claim 9, characterized in that, The water outlet pipe is fitted with a first corrugated pipe, one end of which is fixedly connected to the movable seat, and the other end of which is fixedly connected to the flange assembly; the wire is fitted with a second corrugated pipe, one end of which is fixedly connected to the movable seat, and the other end of which is fixedly connected to the flange assembly.

Citation Information

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